DE60335998D1 - Piezoelektrische porzellanzusammensetzung, piezoelektrisches element und herstellungsverfahren dafür - Google Patents
Piezoelektrische porzellanzusammensetzung, piezoelektrisches element und herstellungsverfahren dafürInfo
- Publication number
- DE60335998D1 DE60335998D1 DE60335998T DE60335998T DE60335998D1 DE 60335998 D1 DE60335998 D1 DE 60335998D1 DE 60335998 T DE60335998 T DE 60335998T DE 60335998 T DE60335998 T DE 60335998T DE 60335998 D1 DE60335998 D1 DE 60335998D1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- manufacturing
- method therefor
- porcelain composition
- piezoelectric element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
- C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/6261—Milling
- C04B35/6262—Milling of calcined, sintered clinker or ceramics
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead based oxides
- H10N30/8554—Lead zirconium titanate based
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Connection electrodes of multilayer piezoelectric or electrostrictive devices, e.g. external electrodes
- H10N30/874—Connection electrodes of multilayer piezoelectric or electrostrictive devices, e.g. external electrodes embedded within piezoelectric or electrostrictive material, e.g. via connections
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3251—Niobium oxides, niobates, tantalum oxides, tantalates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3256—Molybdenum oxides, molybdates or oxide forming salts thereof, e.g. cadmium molybdate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3258—Tungsten oxides, tungstates, or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
- C04B2235/3258—Tungsten oxides, tungstates, or oxide-forming salts thereof
- C04B2235/326—Tungstates, e.g. scheelite
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3284—Zinc oxides, zincates, cadmium oxides, cadmiates, mercury oxides, mercurates or oxide forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3289—Noble metal oxides
- C04B2235/3291—Silver oxides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/77—Density
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/94—Products characterised by their shape
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/95—Products characterised by their size, e.g. microceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002272037 | 2002-09-18 | ||
JP2003096661 | 2003-03-31 | ||
PCT/JP2003/011927 WO2004026789A1 (ja) | 2002-09-18 | 2003-09-18 | 圧電磁器組成物、圧電素子及びこれらの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60335998D1 true DE60335998D1 (de) | 2011-03-24 |
Family
ID=32032870
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60335998T Expired - Lifetime DE60335998D1 (de) | 2002-09-18 | 2003-09-18 | Piezoelektrische porzellanzusammensetzung, piezoelektrisches element und herstellungsverfahren dafür |
Country Status (8)
Country | Link |
---|---|
US (1) | US7067965B2 (de) |
EP (1) | EP1547989B1 (de) |
JP (1) | JP4670348B2 (de) |
KR (1) | KR100657194B1 (de) |
CN (1) | CN100434396C (de) |
DE (1) | DE60335998D1 (de) |
TW (1) | TWI281464B (de) |
WO (1) | WO2004026789A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005174974A (ja) * | 2003-12-08 | 2005-06-30 | Matsushita Electric Ind Co Ltd | 積層圧電体部品の製造方法 |
CN1813487B (zh) * | 2003-12-26 | 2011-07-13 | 日本电气株式会社 | 压电致动器 |
CN101189743B (zh) * | 2005-06-03 | 2011-04-13 | 株式会社村田制作所 | 压电元件 |
DE102005027364A1 (de) * | 2005-06-14 | 2006-12-21 | Robert Bosch Gmbh | Piezoaktor |
CN101365829B (zh) * | 2005-11-04 | 2012-07-18 | 赛若朴有限公司 | 压电单晶和其制备方法、以及利用该压电单晶的压电部件和介电部件 |
JP2007258301A (ja) * | 2006-03-22 | 2007-10-04 | Tdk Corp | 積層型圧電素子及びその製造方法 |
DE102006057691A1 (de) | 2006-12-07 | 2008-06-12 | Robert Bosch Gmbh | Niedrig sinterndes, piezoelektrisches Material auf Blei-Zirkonat-Titanat-Mischkristall-Basis, Verfahren zu dessen Herstellung sowie ein dieses Material umfassendes piezoelektrisches Bauelement |
DE102007022093A1 (de) * | 2007-05-11 | 2008-11-13 | Epcos Ag | Piezoelektrisches Vielschichtbauelement |
DE102007045089A1 (de) | 2007-09-07 | 2009-03-12 | Epcos Ag | Keramikmaterial, Verfahren zur Herstellung desselben und elektrokeramisches Bauelement umfassend das Keramikmaterial |
WO2016031995A1 (ja) | 2014-08-29 | 2016-03-03 | 京セラ株式会社 | 圧電磁器およびその製法、ならびに電子部品 |
JP6591910B2 (ja) * | 2016-02-24 | 2019-10-16 | 日本特殊陶業株式会社 | 圧電素子およびその製造方法 |
JP6659450B2 (ja) * | 2016-05-09 | 2020-03-04 | 株式会社シマノ | 圧電素子および圧電素子の製造方法 |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3649353A (en) * | 1969-02-05 | 1972-03-14 | Nasa | Screened circuit capacitors |
US4041140A (en) * | 1974-07-16 | 1977-08-09 | Matsushita Electric Industrial Co., Ltd. | Method of making a sulphide ceramic body |
JPS62254305A (ja) * | 1986-04-17 | 1987-11-06 | マルコン電子株式会社 | 高誘電率磁器組成物 |
JPH0524917A (ja) | 1991-07-17 | 1993-02-02 | Hitachi Metals Ltd | 圧電磁器組成物 |
JP3639881B2 (ja) | 1995-06-19 | 2005-04-20 | 太平洋セメント株式会社 | 圧電組成物 |
JP3867320B2 (ja) | 1996-06-21 | 2007-01-10 | 株式会社村田製作所 | 圧電体磁器組成物 |
CN1495523A (zh) * | 1996-08-27 | 2004-05-12 | ������������ʽ���� | 转移方法和有源矩阵基板的制造方法 |
JPH10139540A (ja) | 1996-10-31 | 1998-05-26 | Toyota Central Res & Dev Lab Inc | 圧電材料 |
US5935485A (en) * | 1996-10-31 | 1999-08-10 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Piezoelectric material and piezoelectric element |
JP3211698B2 (ja) * | 1997-02-19 | 2001-09-25 | 株式会社村田製作所 | 圧電磁器の製造方法 |
JPH10316467A (ja) | 1997-05-15 | 1998-12-02 | Matsushita Electric Ind Co Ltd | 圧電磁器組成物とその製造方法 |
JP4221765B2 (ja) * | 1997-08-29 | 2009-02-12 | ソニー株式会社 | 光集積化酸化物装置および光集積化酸化物装置の製造方法 |
JPH11163433A (ja) | 1997-11-27 | 1999-06-18 | Hitachi Metals Ltd | 積層型圧電セラミックス振動子および製造方法 |
JPH11168248A (ja) | 1997-12-04 | 1999-06-22 | Fujitsu Ltd | 圧電素子及びその製造方法 |
JP3520403B2 (ja) * | 1998-01-23 | 2004-04-19 | セイコーエプソン株式会社 | 圧電体薄膜素子、アクチュエータ、インクジェット式記録ヘッド、及びインクジェット式記録装置 |
JP3108724B2 (ja) | 1999-01-22 | 2000-11-13 | ファインセラミックス技術研究組合 | 高耐久性圧電複合セラミックス及びその製法 |
JP2001058872A (ja) | 1999-08-19 | 2001-03-06 | Tokin Corp | 圧電磁器材料 |
JP2001089237A (ja) * | 1999-09-20 | 2001-04-03 | Tdk Corp | 圧電磁器組成物 |
WO2002034966A1 (fr) * | 2000-10-23 | 2002-05-02 | National Institute Of Advanced Industrial Science And Technology | Structure composite et procede et appareil destines a sa fabrication |
DE10164326A1 (de) * | 2000-12-28 | 2002-10-31 | Denso Corp | Integral eingebranntes, geschichtetes elektromechanisches Wandlungselement |
JP3970588B2 (ja) | 2000-12-28 | 2007-09-05 | 株式会社日本自動車部品総合研究所 | 低温焼成化誘電体セラミックス、積層型誘電体素子、誘電体セラミックスの製造方法および助剤酸化物 |
JP2003142479A (ja) * | 2001-11-02 | 2003-05-16 | Fujitsu Ltd | 半導体装置、エピタキシャル膜の製造方法、およびレーザアブレーション装置 |
JP3928082B2 (ja) * | 2002-03-08 | 2007-06-13 | 富士通株式会社 | Icカード及びその使用方法 |
JP3971279B2 (ja) * | 2002-09-20 | 2007-09-05 | キヤノン株式会社 | 圧電体素子の製造方法 |
US7071007B2 (en) * | 2002-12-06 | 2006-07-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of forming a low voltage drive ferroelectric capacitor |
JP4811556B2 (ja) * | 2004-04-23 | 2011-11-09 | セイコーエプソン株式会社 | 圧電素子、液体噴射ヘッドおよび液体噴射装置 |
-
2003
- 2003-09-17 US US10/663,811 patent/US7067965B2/en not_active Expired - Fee Related
- 2003-09-18 JP JP2004537607A patent/JP4670348B2/ja not_active Expired - Fee Related
- 2003-09-18 TW TW92125737A patent/TWI281464B/zh not_active IP Right Cessation
- 2003-09-18 EP EP20030797674 patent/EP1547989B1/de not_active Expired - Fee Related
- 2003-09-18 CN CNB038252635A patent/CN100434396C/zh not_active Expired - Fee Related
- 2003-09-18 WO PCT/JP2003/011927 patent/WO2004026789A1/ja active Application Filing
- 2003-09-18 KR KR20057004351A patent/KR100657194B1/ko not_active IP Right Cessation
- 2003-09-18 DE DE60335998T patent/DE60335998D1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN100434396C (zh) | 2008-11-19 |
KR20050057323A (ko) | 2005-06-16 |
TWI281464B (en) | 2007-05-21 |
JPWO2004026789A1 (ja) | 2006-01-26 |
WO2004026789A1 (ja) | 2004-04-01 |
EP1547989B1 (de) | 2011-02-09 |
JP4670348B2 (ja) | 2011-04-13 |
EP1547989A4 (de) | 2009-03-25 |
EP1547989A1 (de) | 2005-06-29 |
KR100657194B1 (ko) | 2006-12-14 |
US7067965B2 (en) | 2006-06-27 |
TW200415135A (en) | 2004-08-16 |
US20040222719A1 (en) | 2004-11-11 |
CN1701048A (zh) | 2005-11-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE60336567D1 (de) | Piezoelektrischer d nnfilmoszillator, piezoelektrisches d nnfilmbauelement und herstellungsverfahren daf r | |
DE602004024672D1 (de) | Schaltglied-verbindungsstruktur und herstellungsverfahren dafür | |
DE60310339D1 (de) | Querträger und Herstellungsverfahren | |
DE60319810D1 (de) | Anschwemmfiltermedien und herstellungs- und verwendungsverfahren | |
DE60324888D1 (de) | und Herstellungsverfahren | |
DE602004022327D1 (de) | Keramisches heizelement und herstellungsverfahren dafür | |
DE602004019671D1 (de) | Harzzusammensetzung, formkörper daraus und herstellungsverfahren dafür | |
DE602004029051D1 (de) | Härtende zusammensetzung und herstellungsverfahren dafür | |
DE60311223D1 (de) | Aktuator und dessen Herstellungsverfahren | |
DE602004014132D1 (de) | Interdentalbürste und herstellungsverfahren dafür | |
FR2836536B1 (fr) | Vanne piezoelectrique | |
DE60227777D1 (de) | Handgriffstruktur und herstellungsverfahren dafür | |
DE602004025604D1 (de) | Drucktuchkonstruktion und herstellungsverfahren | |
DE60322290D1 (de) | Dielektrische Keramikzusammensetzung und Resonator | |
EP1628351A4 (de) | Piezoelektrisches material, herstellungsverfahren dafür und nichtlineares piezoelektrisches element | |
DE60315063D1 (de) | Elektrokontaktelement | |
DE60231538D1 (de) | Sputtertarget und herstellungsverfahren dafür | |
DE60327734D1 (de) | Aktuator | |
DE60326822D1 (de) | Mehrschichtiges piezoelektrisches element und herstellungsverfahren dafür | |
DE602004006349D1 (de) | Strukturen aus Vielfachnanoschichten, Bauteile und damit zusammenhängende Herstellungsverfahren | |
DE60335998D1 (de) | Piezoelektrische porzellanzusammensetzung, piezoelektrisches element und herstellungsverfahren dafür | |
FR2830129B1 (fr) | Element piezo-electrique | |
DE60232955D1 (de) | Kammförmiges, piezoelektrisches stellglied und herstellungsverfahren dafür | |
DE60308609D1 (de) | MEMS Schalter und Herstellungsverfahren | |
DE602004001421D1 (de) | Metall-Graphite Material und entsprechendes Herstellungsverfahren |