DE60231538D1 - Sputtertarget und herstellungsverfahren dafür - Google Patents

Sputtertarget und herstellungsverfahren dafür

Info

Publication number
DE60231538D1
DE60231538D1 DE60231538T DE60231538T DE60231538D1 DE 60231538 D1 DE60231538 D1 DE 60231538D1 DE 60231538 T DE60231538 T DE 60231538T DE 60231538 T DE60231538 T DE 60231538T DE 60231538 D1 DE60231538 D1 DE 60231538D1
Authority
DE
Germany
Prior art keywords
sputtertarget
manufacturing
method therefor
therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60231538T
Other languages
English (en)
Inventor
A Hukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Mining Holdings Inc
Original Assignee
Nikko Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikko Materials Co Ltd filed Critical Nikko Materials Co Ltd
Application granted granted Critical
Publication of DE60231538D1 publication Critical patent/DE60231538D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/08—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
    • C22F1/18—High-melting or refractory metals or alloys based thereon
    • C22F1/183—High-melting or refractory metals or alloys based thereon of titanium or alloys based thereon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Forging (AREA)
DE60231538T 2001-11-26 2002-07-30 Sputtertarget und herstellungsverfahren dafür Expired - Lifetime DE60231538D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001358713 2001-11-26
PCT/JP2002/007715 WO2003046250A1 (fr) 2001-11-26 2002-07-30 Cible de pulverisation et procede de fabrication associe

Publications (1)

Publication Number Publication Date
DE60231538D1 true DE60231538D1 (de) 2009-04-23

Family

ID=19169846

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60231538T Expired - Lifetime DE60231538D1 (de) 2001-11-26 2002-07-30 Sputtertarget und herstellungsverfahren dafür

Country Status (8)

Country Link
US (2) US20040245099A1 (de)
EP (1) EP1449935B1 (de)
JP (1) JP4110476B2 (de)
KR (1) KR100572263B1 (de)
CN (1) CN1329552C (de)
DE (1) DE60231538D1 (de)
TW (1) TW589233B (de)
WO (1) WO2003046250A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4384453B2 (ja) 2003-07-16 2009-12-16 株式会社神戸製鋼所 Ａｇ系スパッタリングターゲット及びその製造方法
JP4468302B2 (ja) * 2003-09-12 2010-05-26 日鉱金属株式会社 スパッタリングターゲット及び同ターゲットの表面仕上げ方法
US7788882B2 (en) * 2003-10-15 2010-09-07 Nippon Mining & Metals Co., Ltd. Packaging device and packaging method for hollow cathode type sputtering target
CN101857950B (zh) * 2003-11-06 2012-08-08 Jx日矿日石金属株式会社 钽溅射靶
CN1985021A (zh) * 2003-12-22 2007-06-20 卡伯特公司 高完整性溅射靶材以及其批量制造方法
EP1865090B1 (de) * 2005-03-28 2010-04-07 Nippon Mining & Metals Co., Ltd. Tieftopfgeformtes kupfersputtertarget
WO2007103309A2 (en) * 2006-03-07 2007-09-13 Cabot Corporation Methods of producing deformed metal articles
US20070251819A1 (en) * 2006-05-01 2007-11-01 Kardokus Janine K Hollow cathode magnetron sputtering targets and methods of forming hollow cathode magnetron sputtering targets
JP5187713B2 (ja) * 2006-06-09 2013-04-24 国立大学法人電気通信大学 金属材料の微細化加工方法
US8702919B2 (en) 2007-08-13 2014-04-22 Honeywell International Inc. Target designs and related methods for coupled target assemblies, methods of production and uses thereof
JP2012505311A (ja) * 2008-10-10 2012-03-01 トーソー エスエムディー，インク． 円形溝プレス装置とスパッターリングターゲットの製造方法
WO2010085316A1 (en) 2009-01-22 2010-07-29 Tosoh Smd, Inc. Monolithic aluminum alloy target and method of manufacturing
WO2011111373A1 (ja) 2010-03-11 2011-09-15 株式会社 東芝 スパッタリングターゲットとその製造方法、および半導体素子の製造方法
CN102400073A (zh) * 2011-11-18 2012-04-04 宁波江丰电子材料有限公司 镍靶坯及靶材的制造方法
CN102418058A (zh) * 2011-12-02 2012-04-18 宁波江丰电子材料有限公司 镍靶坯及靶材的制造方法
CN102424940A (zh) * 2011-12-20 2012-04-25 宁波江丰电子材料有限公司 高纯钴靶材的制备方法
CN103572223B (zh) * 2012-08-01 2016-01-27 宁波江丰电子材料股份有限公司 钽靶材及钽靶材组件的制造方法
CN103572225B (zh) * 2012-08-01 2016-05-04 宁波江丰电子材料股份有限公司 钽靶材及钽靶材组件的制造方法
CN104419901B (zh) * 2013-08-27 2017-06-30 宁波江丰电子材料股份有限公司 一种钽靶材的制造方法
SG11201810964UA (en) 2016-06-07 2019-01-30 Jx Nippon Mining & Metals Corp Sputtering target and production method therefor

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5635036A (en) * 1990-01-26 1997-06-03 Varian Associates, Inc. Collimated deposition apparatus and method
JP3338476B2 (ja) * 1992-06-29 2002-10-28 住友チタニウム株式会社 スパッタリング用の金属Ｔｉターゲットの製造方法
US5772860A (en) * 1993-09-27 1998-06-30 Japan Energy Corporation High purity titanium sputtering targets
US5687600A (en) * 1994-10-26 1997-11-18 Johnson Matthey Electronics, Inc. Metal sputtering target assembly
US6045634A (en) * 1997-08-14 2000-04-04 Praxair S. T. Technology, Inc. High purity titanium sputtering target and method of making
JPH11269621A (ja) * 1997-12-24 1999-10-05 Toho Titanium Co Ltd 高純度チタン材の加工方法
US6226171B1 (en) * 1998-04-27 2001-05-01 Fujitsu Limited Power conducting substrates with high-yield integrated substrate capacitor
JP3802683B2 (ja) * 1998-07-27 2006-07-26 新日本製鐵株式会社 チタンターゲット材用高純度チタン板およびその製造方法
US6283357B1 (en) * 1999-08-03 2001-09-04 Praxair S.T. Technology, Inc. Fabrication of clad hollow cathode magnetron sputter targets
US6342133B2 (en) * 2000-03-14 2002-01-29 Novellus Systems, Inc. PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutter
US6887356B2 (en) * 2000-11-27 2005-05-03 Cabot Corporation Hollow cathode target and methods of making same
JP4263900B2 (ja) 2002-11-13 2009-05-13 日鉱金属株式会社 Ｔａスパッタリングターゲット及びその製造方法
WO2004090193A1 (ja) 2003-04-01 2004-10-21 Nikko Materials Co., Ltd. タンタルスパッタリングターゲット及びその製造方法
JP4468302B2 (ja) 2003-09-12 2010-05-26 日鉱金属株式会社 スパッタリングターゲット及び同ターゲットの表面仕上げ方法
EP1865090B1 (de) 2005-03-28 2010-04-07 Nippon Mining & Metals Co., Ltd. Tieftopfgeformtes kupfersputtertarget

Also Published As

Publication number Publication date
TW589233B (en) 2004-06-01
US20040245099A1 (en) 2004-12-09
CN1578849A (zh) 2005-02-09
US8029629B2 (en) 2011-10-04
EP1449935B1 (de) 2009-03-11
US20100058827A1 (en) 2010-03-11
EP1449935A1 (de) 2004-08-25
TW200301166A (en) 2003-07-01
JP4110476B2 (ja) 2008-07-02
EP1449935A4 (de) 2005-01-19
WO2003046250A1 (fr) 2003-06-05
CN1329552C (zh) 2007-08-01
KR100572263B1 (ko) 2006-04-24
JPWO2003046250A1 (ja) 2005-04-07
KR20040047893A (ko) 2004-06-05

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: NIPPON MINING & METALS CO., LTD., TOKIO/TOKYO, JP

8364 No opposition during term of opposition
R082 Change of representative

Ref document number: 1449935

Country of ref document: EP

Representative=s name: BOEHMERT & BOEHMERT, 28209 BREMEN, DE