DE60210535D1 - Vibrator und Herstellungsverfahren desselben - Google Patents

Vibrator und Herstellungsverfahren desselben

Info

Publication number
DE60210535D1
DE60210535D1 DE60210535T DE60210535T DE60210535D1 DE 60210535 D1 DE60210535 D1 DE 60210535D1 DE 60210535 T DE60210535 T DE 60210535T DE 60210535 T DE60210535 T DE 60210535T DE 60210535 D1 DE60210535 D1 DE 60210535D1
Authority
DE
Germany
Prior art keywords
vibrator
manufacturing process
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60210535T
Other languages
English (en)
Other versions
DE60210535T2 (de
Inventor
Hiroshi Miyajima
Masanori Ogata
Yukihiro Aoki
Yoshiro Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Publication of DE60210535D1 publication Critical patent/DE60210535D1/de
Application granted granted Critical
Publication of DE60210535T2 publication Critical patent/DE60210535T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE60210535T 2001-04-20 2002-04-18 Vibrator und Herstellungsverfahren desselben Expired - Lifetime DE60210535T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001123156 2001-04-20
JP2001123156A JP2002321195A (ja) 2001-04-20 2001-04-20 振動体およびその製造方法

Publications (2)

Publication Number Publication Date
DE60210535D1 true DE60210535D1 (de) 2006-05-24
DE60210535T2 DE60210535T2 (de) 2007-04-05

Family

ID=18972760

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60210535T Expired - Lifetime DE60210535T2 (de) 2001-04-20 2002-04-18 Vibrator und Herstellungsverfahren desselben

Country Status (4)

Country Link
US (1) US6850349B2 (de)
EP (1) EP1251382B1 (de)
JP (1) JP2002321195A (de)
DE (1) DE60210535T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7170665B2 (en) * 2002-07-24 2007-01-30 Olympus Corporation Optical unit provided with an actuator
JP5027984B2 (ja) * 2003-03-28 2012-09-19 キヤノン株式会社 揺動体を用いた電位測定装置、電位測定方法、及び画像形成装置
US7031040B2 (en) 2003-05-16 2006-04-18 Ricoh Company, Ltd. Optical scanning apparatus, optical writing apparatus, image forming apparatus, and method of driving vibration mirror
JP2005164859A (ja) 2003-12-01 2005-06-23 Olympus Corp 光偏向器アレイ
JP4544972B2 (ja) 2003-12-04 2010-09-15 オリンパス株式会社 光偏向器
JP4729289B2 (ja) 2003-12-04 2011-07-20 オリンパス株式会社 光偏向器
JP2006003131A (ja) * 2004-06-15 2006-01-05 Canon Inc 電位センサ
JP5159028B2 (ja) * 2004-06-29 2013-03-06 キヤノン株式会社 揺動体を有する光偏向装置、及びその調整方法
JP2006313301A (ja) * 2005-05-06 2006-11-16 Samsung Electro-Mechanics Co Ltd チルティング部材とこれを有するチルティングアクチュエータ
US7436566B2 (en) * 2005-11-22 2008-10-14 Canon Kabushiki Kaisha Oscillating device, optical deflector and method of controlling the same
US7474165B2 (en) * 2005-11-22 2009-01-06 Canon Kabushiki Kaisha Oscillating device, optical deflector and optical instrument using the same
JP2007322466A (ja) * 2006-05-30 2007-12-13 Canon Inc 光偏向器、及びそれを用いた光学機器
JP2009175463A (ja) * 2008-01-25 2009-08-06 Brother Ind Ltd 光スキャナ製造方法および光スキャナ
JP2011128185A (ja) * 2009-12-15 2011-06-30 Shinano Kenshi Co Ltd 光走査装置
JP5310769B2 (ja) * 2011-03-31 2013-10-09 ブラザー工業株式会社 光スキャナ
JP5915446B2 (ja) * 2011-09-14 2016-05-11 株式会社デンソー 光走査装置
JP6024269B2 (ja) * 2011-09-20 2016-11-16 株式会社デンソー 光走査装置
DE102013209823B4 (de) * 2013-05-27 2015-10-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Struktur mit daran angeordneten Stegen und Verfahren zur Herstellung derselben
CN104730612A (zh) * 2015-03-24 2015-06-24 浙江嘉亮光学科技有限公司 一种偏光镜片的卷材制备工艺
DE102015216811B4 (de) 2015-09-02 2023-06-29 Robert Bosch Gmbh Schwenkvorrichtung für einen Mikrospiegel

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3532408A (en) 1968-05-20 1970-10-06 Bulova Watch Co Inc Resonant torsional oscillators
US5557444A (en) * 1994-10-26 1996-09-17 University Of Washington Miniature optical scanner for a two axis scanning system
KR960019139A (ko) 1994-11-10 1996-06-17 사또오 후미오 갈바노미러 및 그것을 이용한 광디스크 장치
JP2981600B2 (ja) 1996-01-17 1999-11-22 オムロン株式会社 光スキャナおよびそれを用いた光センサ装置
US6061323A (en) 1996-07-30 2000-05-09 Seagate Technology, Inc. Data storage system having an improved surface micro-machined mirror
JP4414498B2 (ja) 1997-12-09 2010-02-10 オリンパス株式会社 光偏向器
JP4112060B2 (ja) 1998-01-27 2008-07-02 オリンパス株式会社 光学系可動部の支持装置
JP4674017B2 (ja) * 2000-11-20 2011-04-20 オリンパス株式会社 光偏向器

Also Published As

Publication number Publication date
JP2002321195A (ja) 2002-11-05
EP1251382B1 (de) 2006-04-12
US6850349B2 (en) 2005-02-01
EP1251382A1 (de) 2002-10-23
DE60210535T2 (de) 2007-04-05
US20020154374A1 (en) 2002-10-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition