DE60200849D1 - Zweidimensionaler photonischer Kristall und Herstellungsverfahren - Google Patents
Zweidimensionaler photonischer Kristall und HerstellungsverfahrenInfo
- Publication number
- DE60200849D1 DE60200849D1 DE60200849T DE60200849T DE60200849D1 DE 60200849 D1 DE60200849 D1 DE 60200849D1 DE 60200849 T DE60200849 T DE 60200849T DE 60200849 T DE60200849 T DE 60200849T DE 60200849 D1 DE60200849 D1 DE 60200849D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- photonic crystal
- dimensional photonic
- dimensional
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/2005—Electromagnetic photonic bandgaps [EPB], or photonic bandgaps [PBG]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12078—Gallium arsenide or alloys (GaAs, GaAlAs, GaAsP, GaInAs)
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Electromagnetism (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/846,748 US6560006B2 (en) | 2001-04-30 | 2001-04-30 | Two-dimensional photonic crystal slab waveguide |
US846748 | 2001-04-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60200849D1 true DE60200849D1 (de) | 2004-09-09 |
DE60200849T2 DE60200849T2 (de) | 2005-08-04 |
Family
ID=25298831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60200849T Expired - Lifetime DE60200849T2 (de) | 2001-04-30 | 2002-02-12 | Zweidimensionaler photonischer Kristall und Herstellungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (1) | US6560006B2 (de) |
EP (1) | EP1255135B1 (de) |
JP (1) | JP2002341164A (de) |
DE (1) | DE60200849T2 (de) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4446591B2 (ja) * | 2000-12-20 | 2010-04-07 | 京セラ株式会社 | 光導波路および光回路基板 |
US6819845B2 (en) * | 2001-08-02 | 2004-11-16 | Ultradots, Inc. | Optical devices with engineered nonlinear nanocomposite materials |
FR2832513B1 (fr) * | 2001-11-21 | 2004-04-09 | Centre Nat Rech Scient | Structure a cristal photonique pour la conversion de mode |
US7279718B2 (en) * | 2002-01-28 | 2007-10-09 | Philips Lumileds Lighting Company, Llc | LED including photonic crystal structure |
JP2003295143A (ja) * | 2002-03-29 | 2003-10-15 | Hitachi Ltd | 光機能素子及びその製造方法 |
AU2003234438A1 (en) * | 2002-05-02 | 2003-11-17 | Vyoptics, Inc. | Integrating element for optical fiber communication systems based on photonic multi-bandgap quasi-crystals having optimized transfer functions |
US6728457B2 (en) * | 2002-07-10 | 2004-04-27 | Agilent Technologies, Inc. | Waveguides in two dimensional slab photonic crystals with noncircular holes |
US20040013384A1 (en) * | 2002-07-17 | 2004-01-22 | Greg Parker | Optical waveguide structure |
US6744804B2 (en) * | 2002-07-18 | 2004-06-01 | Finisar Corporation | Edge emitting lasers using photonic crystals |
US6649439B1 (en) * | 2002-08-01 | 2003-11-18 | Northrop Grumman Corporation | Semiconductor-air gap grating fabrication using a sacrificial layer process |
US7026640B2 (en) * | 2002-08-02 | 2006-04-11 | Ramot At Tel Aviv University Ltd. | Method and systems for dynamically controlling electromagnetic wave motion through a photonic crystal |
US6934441B2 (en) * | 2003-09-09 | 2005-08-23 | Battelle Memorial Institute | Wavelength separation devices incorporating multi-barrier photonic heterostructures |
US6940637B2 (en) * | 2002-09-09 | 2005-09-06 | Battelle Memorial Institute | Multi-barrier photonic heterostructures |
US6778581B1 (en) * | 2002-09-24 | 2004-08-17 | Finisar Corporation | Tunable vertical cavity surface emitting laser |
US20040086244A1 (en) | 2002-11-05 | 2004-05-06 | Zoorob Majd E. | Optical waveguide structure |
JP4236092B2 (ja) * | 2003-01-31 | 2009-03-11 | Tdk株式会社 | 2次元フォトニック結晶 |
WO2004113964A1 (ja) * | 2003-06-19 | 2004-12-29 | Nec Corporation | フォトニック結晶の構造 |
US7257141B2 (en) * | 2003-07-23 | 2007-08-14 | Palo Alto Research Center Incorporated | Phase array oxide-confined VCSELs |
US7255805B2 (en) * | 2004-01-12 | 2007-08-14 | Hewlett-Packard Development Company, L.P. | Photonic structures, devices, and methods |
EP1708000A4 (de) * | 2004-01-22 | 2007-08-01 | Matsushita Electric Ind Co Ltd | Optische einrichtung und herstellungsverfahren für einen photonischen kristallquader |
JP4833665B2 (ja) * | 2004-02-17 | 2011-12-07 | 古河電気工業株式会社 | フォトニック結晶半導体デバイスの製造方法 |
DE102004022140B4 (de) * | 2004-05-05 | 2007-03-08 | Atmel Germany Gmbh | Verfahren zur Herstellung einer Photonic-Band-Gap-Struktur und Bauelement mit einer derartig hergestellten Photonic-Band-Gap-Struktur |
US7447404B2 (en) * | 2004-05-27 | 2008-11-04 | Energy Conversion Devices, Inc. | Photonic integrated circuit |
US7418161B2 (en) * | 2004-06-22 | 2008-08-26 | Micron Technology, Inc. | Photonic crystal-based optical elements for integrated circuits and methods therefor |
US7054524B2 (en) * | 2004-08-30 | 2006-05-30 | Energy Conversion Devices, Inc. | Asymmetric photonic crystal waveguide element having symmetric mode fields |
JP2007173353A (ja) * | 2005-12-20 | 2007-07-05 | Kyoto Univ | フォトニック結晶発光ダイオード及びその製造方法 |
US7922976B2 (en) * | 2006-10-23 | 2011-04-12 | Banpil Photonics, Inc. | High sensitivity sensor device and manufacturing thereof |
US7515790B2 (en) * | 2006-11-09 | 2009-04-07 | Electronics And Telecommunications Research Institute | Two-dimensional planar photonic crystal superprism device and method of manufacturing the same |
US7995892B2 (en) * | 2007-06-01 | 2011-08-09 | Lawrence Livermore National Security, Llc | Low loss, high and low index contrast waveguides in semiconductors |
JP5304035B2 (ja) * | 2007-08-03 | 2013-10-02 | 株式会社村田製作所 | バンドパスフィルタおよびバンドパスフィルタ用フォトニック結晶の製造方法 |
US20100314752A1 (en) * | 2007-11-22 | 2010-12-16 | Agency For Science, Technology And Research | Forming an etched planarised photonic crystal structure |
FR2924820B1 (fr) * | 2007-12-11 | 2010-04-02 | Commissariat Energie Atomique | Dispositif photonique de filtrage spatial a bande passante angulaire etroite. |
US8355611B2 (en) * | 2008-01-11 | 2013-01-15 | Nec Corporation | Photonic crystal element |
US8355614B2 (en) * | 2008-02-28 | 2013-01-15 | Nec Corporation | Optical waveguide |
US8682128B2 (en) * | 2008-08-21 | 2014-03-25 | International Business Machines Corporation | Optical waveguide with periodic sub-wavelength sized regions |
FR2936904B1 (fr) * | 2008-10-03 | 2011-01-14 | Soitec Silicon On Insulator | Procedes et structures pour alterer la contrainte dans des materiaux nitrure iii. |
US8367520B2 (en) | 2008-09-22 | 2013-02-05 | Soitec | Methods and structures for altering strain in III-nitride materials |
US8731359B2 (en) * | 2009-12-30 | 2014-05-20 | Cornell University | Extraordinary light transmission apparatus and method |
KR101979944B1 (ko) * | 2012-10-18 | 2019-05-17 | 엘지이노텍 주식회사 | 발광소자 |
US9888283B2 (en) | 2013-03-13 | 2018-02-06 | Nagrastar Llc | Systems and methods for performing transport I/O |
USD758372S1 (en) | 2013-03-13 | 2016-06-07 | Nagrastar Llc | Smart card interface |
USD864968S1 (en) | 2015-04-30 | 2019-10-29 | Echostar Technologies L.L.C. | Smart card interface |
US11244667B1 (en) * | 2018-01-26 | 2022-02-08 | Hrl Laboratories, Llc | Curved phononic crystal waveguide |
CN108673979A (zh) * | 2018-04-09 | 2018-10-19 | 东南大学 | 一种周期复合结构夹芯板 |
US11309347B2 (en) | 2020-02-11 | 2022-04-19 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit photodetector |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5335240A (en) * | 1992-12-22 | 1994-08-02 | Iowa State University Research Foundation, Inc. | Periodic dielectric structure for production of photonic band gap and devices incorporating the same |
US5600483A (en) * | 1994-05-10 | 1997-02-04 | Massachusetts Institute Of Technology | Three-dimensional periodic dielectric structures having photonic bandgaps |
US5748057A (en) * | 1996-06-03 | 1998-05-05 | Hughes Electronics | Photonic bandgap crystal frequency multiplexers and a pulse blanking filter for use therewith |
DE69942936D1 (de) * | 1998-07-30 | 2010-12-23 | Corning Inc | Verfahren zur herstellung photonischen strukturen |
US6134043A (en) | 1998-08-11 | 2000-10-17 | Massachusetts Institute Of Technology | Composite photonic crystals |
US6175671B1 (en) * | 1998-10-01 | 2001-01-16 | Nortel Networks Limited | Photonic crystal waveguide arrays |
US6134369A (en) | 1999-03-31 | 2000-10-17 | Matsushita Electric Industrial Co. | Compact optical waveguide |
JP3407693B2 (ja) * | 1999-06-09 | 2003-05-19 | 日本電気株式会社 | フォトニック結晶 |
JP3925769B2 (ja) * | 2000-03-24 | 2007-06-06 | 関西ティー・エル・オー株式会社 | 2次元フォトニック結晶及び合分波器 |
-
2001
- 2001-04-30 US US09/846,748 patent/US6560006B2/en not_active Expired - Fee Related
-
2002
- 2002-02-12 DE DE60200849T patent/DE60200849T2/de not_active Expired - Lifetime
- 2002-02-12 EP EP02002094A patent/EP1255135B1/de not_active Expired - Lifetime
- 2002-04-23 JP JP2002120533A patent/JP2002341164A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP1255135B1 (de) | 2004-08-04 |
EP1255135A2 (de) | 2002-11-06 |
DE60200849T2 (de) | 2005-08-04 |
JP2002341164A (ja) | 2002-11-27 |
US6560006B2 (en) | 2003-05-06 |
US20020159126A1 (en) | 2002-10-31 |
EP1255135A3 (de) | 2003-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: AVAGO TECHNOLOGIES GENERAL IP ( SINGAPORE) PTE. LT |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: DILG HAEUSLER SCHINDELMANN PATENTANWALTSGESELLSCHA |