DE60200251D1 - Optischer Scanner und Herstellungsverfahren dafür - Google Patents

Optischer Scanner und Herstellungsverfahren dafür

Info

Publication number
DE60200251D1
DE60200251D1 DE60200251T DE60200251T DE60200251D1 DE 60200251 D1 DE60200251 D1 DE 60200251D1 DE 60200251 T DE60200251 T DE 60200251T DE 60200251 T DE60200251 T DE 60200251T DE 60200251 D1 DE60200251 D1 DE 60200251D1
Authority
DE
Germany
Prior art keywords
manufacturing process
optical scanner
process therefor
therefor
scanner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60200251T
Other languages
English (en)
Other versions
DE60200251T2 (de
Inventor
Jin-Ho Lee
Young-Chul Ko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of DE60200251D1 publication Critical patent/DE60200251D1/de
Publication of DE60200251T2 publication Critical patent/DE60200251T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/10—Image acquisition
    • G06V10/12—Details of acquisition arrangements; Constructional details thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
DE60200251T 2001-08-24 2002-08-23 Optischer Scanner und Herstellungsverfahren dafür Expired - Fee Related DE60200251T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2001-0051407A KR100434541B1 (ko) 2001-08-24 2001-08-24 광스캐너 및 그 제조방법
KR2001051407 2001-08-24

Publications (2)

Publication Number Publication Date
DE60200251D1 true DE60200251D1 (de) 2004-04-15
DE60200251T2 DE60200251T2 (de) 2004-12-30

Family

ID=19713526

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60200251T Expired - Fee Related DE60200251T2 (de) 2001-08-24 2002-08-23 Optischer Scanner und Herstellungsverfahren dafür

Country Status (6)

Country Link
US (2) US7180647B2 (de)
EP (1) EP1288696B1 (de)
JP (1) JP4142919B2 (de)
KR (1) KR100434541B1 (de)
CN (1) CN1221832C (de)
DE (1) DE60200251T2 (de)

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KR100499146B1 (ko) 2003-06-24 2005-07-04 삼성전자주식회사 곡면 미러를 구비한 광스캐너 및 그 제조방법
JP5011205B2 (ja) * 2003-08-12 2012-08-29 富士通株式会社 マイクロ揺動素子駆動方法
JP4252889B2 (ja) 2003-08-12 2009-04-08 富士通株式会社 マイクロ構造体の製造方法
JP2005088188A (ja) * 2003-08-12 2005-04-07 Fujitsu Ltd マイクロ揺動素子およびマイクロ揺動素子駆動方法
US7925298B2 (en) * 2003-09-18 2011-04-12 Vulcan Portals Inc. User interface for a secondary display module of a mobile electronic device
KR100940206B1 (ko) * 2003-10-24 2010-02-10 삼성전자주식회사 주파수 변조 가능한 공진형 스캐너
CN100339738C (zh) * 2004-03-12 2007-09-26 先进微系统科技股份有限公司 具有多组梳状电极的微机电致动器及其制造方法
JP4568579B2 (ja) * 2004-10-29 2010-10-27 富士通株式会社 光スイッチ
JP4492952B2 (ja) * 2004-12-03 2010-06-30 株式会社リコー 光偏向装置、光偏向アレー、光学システム、画像投影表示装置および画像形成装置
KR100707179B1 (ko) * 2005-02-07 2007-04-13 삼성전자주식회사 광스캐너 패키지 및 그 제조방법
CN100381862C (zh) * 2005-03-23 2008-04-16 精工爱普生株式会社 驱动器和具有驱动器的光学装置以及该驱动器的制造方法
US7527997B2 (en) * 2005-04-08 2009-05-05 The Research Foundation Of State University Of New York MEMS structure with anodically bonded silicon-on-insulator substrate
JP4427006B2 (ja) * 2005-05-31 2010-03-03 セイコーエプソン株式会社 アクチュエータおよびその製造方法
KR100662463B1 (ko) * 2005-09-27 2007-01-02 엘지전자 주식회사 고속 정보 저장장치의 스캐너 및 그 제조방법
DE102005046726B4 (de) * 2005-09-29 2012-02-02 Siltronic Ag Nichtpolierte monokristalline Siliziumscheibe und Verfahren zu ihrer Herstellung
KR100790879B1 (ko) * 2006-06-13 2008-01-03 삼성전자주식회사 맴스 디바이스의 콤전극 형성 방법
DE102008001232A1 (de) * 2008-04-17 2009-10-22 Robert Bosch Gmbh Elektrodenkamm, mikromechanisches Bauteil und Herstellungsverfahren für einen Elektrodenkamm und für ein mikromechanisches Bauteil
JP4980990B2 (ja) * 2008-06-25 2012-07-18 パナソニック株式会社 可動構造体及びそれを用いたマイクロミラー素子
DE102009033191A1 (de) * 2009-07-07 2011-01-13 Technische Universität Dresden Reduzierung der dynamischen Deformation von Translationsspiegeln mit Hilfe von trägen Massen
US8134277B2 (en) * 2009-12-15 2012-03-13 Moidu Abdul Jaleel K Electrostatic comb actuator
US8771085B1 (en) 2010-08-06 2014-07-08 Arthur C. Clyde Modular law enforcement baton
JP5775409B2 (ja) * 2011-09-29 2015-09-09 スタンレー電気株式会社 光スキャナの製造方法
JP2013195940A (ja) * 2012-03-22 2013-09-30 Hitachi Media Electoronics Co Ltd 光走査ミラーデバイス及びその制御方法、並びに、当該デバイスを利用した画像描画装置
JP2013029849A (ja) * 2012-09-14 2013-02-07 Topcon Corp Ｍｅｍｓ走査型ミラーの製造方法
CN103145091B (zh) * 2013-02-07 2015-05-06 东南大学 一种具有交错梳齿的静电驱动结构的制备方法
FR3021309A1 (fr) * 2014-05-26 2015-11-27 Commissariat Energie Atomique Dispositif microelectronique et/ou nanoelectronique capacitif a compacite augmentee
CN105223809B (zh) * 2015-07-10 2018-11-09 沈阳工业大学 H型平台的模糊神经网络补偿器的同步控制系统及方法
FR3063992B1 (fr) * 2017-03-16 2021-07-16 Commissariat Energie Atomique Micro-dispositif comprenant au moins un element mobile
CN109019505A (zh) * 2018-07-19 2018-12-18 中科芯集成电路股份有限公司 一种同轴mems微镜及其制备方法
CN111552072B (zh) * 2020-04-28 2022-07-12 安徽中科米微电子技术有限公司 大尺寸mems垂直梳齿微镜及其制备方法
JP2021189366A (ja) * 2020-06-03 2021-12-13 船井電機株式会社 振動素子
CN115202032A (zh) * 2021-04-09 2022-10-18 华为技术有限公司 静电mems微镜
CN115893309A (zh) * 2021-08-20 2023-04-04 华为技术有限公司 制造微机电系统梳齿结构的方法、系统和梳齿结构
CN116143062B (zh) * 2023-04-21 2023-06-23 中北大学 一种“h”型单晶薄膜压电振动传感器及其制备方法

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JPH04343318A (ja) 1991-05-20 1992-11-30 Fuji Electric Co Ltd ねじり振動子
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JPH07181414A (ja) * 1993-12-22 1995-07-21 Omron Corp 光スキャナ
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
JP3785663B2 (ja) 1995-12-01 2006-06-14 セイコーエプソン株式会社 光変調装置及びその製造方法並びにその光変調装置を用いた電子機器
US5999306A (en) * 1995-12-01 1999-12-07 Seiko Epson Corporation Method of manufacturing spatial light modulator and electronic device employing it
JPH10157257A (ja) 1996-11-22 1998-06-16 Xerox Corp 故障検出用振動センサ及び該センサ付きプリンタシステム
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JP3011144B2 (ja) 1997-07-31 2000-02-21 日本電気株式会社 光スキャナとその駆動方法
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JP4072743B2 (ja) 1998-11-13 2008-04-09 日本ビクター株式会社 光偏向器及びこれを用いた表示装置
US6256131B1 (en) * 1999-08-05 2001-07-03 Microvision Inc. Active tuning of a torsional resonant structure
KR20010019922A (ko) * 1999-08-31 2001-03-15 구자홍 정전형 미세 구조물 및 제조 방법
KR100486704B1 (ko) * 1999-11-05 2005-05-03 삼성전자주식회사 광스캐너 및 이를 적용한 레이저 영상투사장치 및 그 구동방법
US7079299B1 (en) * 2000-05-31 2006-07-18 The Regents Of The University Of California Staggered torsional electrostatic combdrive and method of forming same
JP2002148554A (ja) * 2000-11-03 2002-05-22 Samsung Electronics Co Ltd 光スキャナ及びこれを適用したレーザ映像投射装置並びにその駆動方法
US6690850B1 (en) * 2001-06-05 2004-02-10 Agere Systems Inc. Article comprising a reflection-type spectral equalizer/optical switch
US6894824B2 (en) * 2003-10-02 2005-05-17 Hewlett-Packard Development Company, L.P. Micro mirror device with spring and method for the same
US8450984B2 (en) * 2010-10-29 2013-05-28 General Electric Company Diagnosis and prognosis of rotor thermal sensitivity

Also Published As

Publication number Publication date
DE60200251T2 (de) 2004-12-30
US20070108548A1 (en) 2007-05-17
US7180647B2 (en) 2007-02-20
KR100434541B1 (ko) 2004-06-05
CN1221832C (zh) 2005-10-05
US20030039089A1 (en) 2003-02-27
KR20030017210A (ko) 2003-03-03
CN1417615A (zh) 2003-05-14
JP4142919B2 (ja) 2008-09-03
EP1288696A1 (de) 2003-03-05
US7445723B2 (en) 2008-11-04
JP2003136497A (ja) 2003-05-14
EP1288696B1 (de) 2004-03-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee