DE60223735D1 - Interferometer und zugehöriges Herstellungsverfahren - Google Patents

Interferometer und zugehöriges Herstellungsverfahren

Info

Publication number
DE60223735D1
DE60223735D1 DE60223735T DE60223735T DE60223735D1 DE 60223735 D1 DE60223735 D1 DE 60223735D1 DE 60223735 T DE60223735 T DE 60223735T DE 60223735 T DE60223735 T DE 60223735T DE 60223735 D1 DE60223735 D1 DE 60223735D1
Authority
DE
Germany
Prior art keywords
interferometer
manufacturing process
related manufacturing
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60223735T
Other languages
English (en)
Other versions
DE60223735T2 (de
Inventor
Takashi Goh
Makoto Abe
Yasuyuki Inoue
Masayuki Okuno
Takashi Saida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Application granted granted Critical
Publication of DE60223735D1 publication Critical patent/DE60223735D1/de
Publication of DE60223735T2 publication Critical patent/DE60223735T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2255—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure controlled by a high-frequency electromagnetic component in an electric waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
DE60223735T 2001-01-26 2002-01-25 Interferometer und zugehöriges Herstellungsverfahren Expired - Lifetime DE60223735T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001017943 2001-01-26
JP2001017943A JP3703013B2 (ja) 2001-01-26 2001-01-26 干渉計光回路及びその製造方法

Publications (2)

Publication Number Publication Date
DE60223735D1 true DE60223735D1 (de) 2008-01-10
DE60223735T2 DE60223735T2 (de) 2008-10-30

Family

ID=18884043

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60223735T Expired - Lifetime DE60223735T2 (de) 2001-01-26 2002-01-25 Interferometer und zugehöriges Herstellungsverfahren

Country Status (4)

Country Link
US (1) US6823094B2 (de)
EP (3) EP1936322B1 (de)
JP (1) JP3703013B2 (de)
DE (1) DE60223735T2 (de)

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JP4107890B2 (ja) * 2002-06-27 2008-06-25 富士通株式会社 光導波路デバイス
JP4062024B2 (ja) * 2002-09-10 2008-03-19 住友電気工業株式会社 光部品、光増幅器モジュールおよび光伝送システム。
DE10246547B4 (de) * 2002-09-30 2008-05-15 Finisar Corp., Sunnyvale Brechungsindexgitter und Modenkoppler mit einem Brechungsindexgitter
DE10250980A1 (de) * 2002-10-29 2004-05-19 Infineon Technologies Ag Optisches Bauelement mit einer Mach-Zehnder-Struktur
US7376310B2 (en) * 2002-12-20 2008-05-20 International Business Machines Corporation Optical waveguide element with controlled birefringence
CN100410796C (zh) * 2003-03-19 2008-08-13 日本电信电话株式会社 光开关、光调制器和波长可变滤光器
KR100524580B1 (ko) * 2003-10-13 2005-10-31 한국과학기술연구원 Ｍｍｉ 구조를 이용한 집적 광 아이솔레이터
US7162108B2 (en) * 2003-12-17 2007-01-09 Jds Uniphase Corporation Planar lightwave circuit variable optical attenuator
EP2447761B1 (de) * 2005-01-14 2016-03-30 Nippon Telegraph And Telephone Corporation Variables optisches Dampfungsglied des planaren Lichtwellenleitertyps
JP2007065645A (ja) * 2005-08-05 2007-03-15 Nippon Telegr & Teleph Corp <Ntt> 導波路型熱光学位相シフタ及びその光回路
JP4976030B2 (ja) * 2006-03-22 2012-07-18 古河電気工業株式会社 導波路型偏波分離・合成器
EP2180361B1 (de) 2007-08-24 2014-10-08 Nippon Telegraph and Telephone Corporation Polarisations unabhängige interferrometerschaltung vom optischen wellenleitertyp
JP5019632B2 (ja) * 2008-10-02 2012-09-05 古河電気工業株式会社 遅延復調デバイスおよび遅延復調デバイスの位相調整方法
CN102439499B (zh) 2009-06-02 2014-10-15 日本电信电话株式会社 宽带干涉仪型偏振波合成分离器
JP5373908B2 (ja) * 2009-07-22 2013-12-18 日本電信電話株式会社 光９０度ハイブリッド回路
JP5275951B2 (ja) * 2009-09-14 2013-08-28 日本電信電話株式会社 光導波路
JP5530205B2 (ja) * 2010-02-01 2014-06-25 日本オクラロ株式会社 干渉計、復調器及び光通信モジュール
JP5541981B2 (ja) * 2010-06-24 2014-07-09 日本電信電話株式会社 偏波無依存光導波路デバイス
JP2012203129A (ja) * 2011-03-24 2012-10-22 Furukawa Electric Co Ltd:The 光導波回路およびその製造方法ならびに光導波回路装置
JP2012215692A (ja) * 2011-03-31 2012-11-08 Furukawa Electric Co Ltd:The 偏波分離素子および光集積素子
JP5727296B2 (ja) * 2011-05-26 2015-06-03 日本電信電話株式会社 半導体基板上の位相シフタ並びにそれを用いた偏波分離器及び偏波合波器
JP5667514B2 (ja) * 2011-05-26 2015-02-12 日本電信電話株式会社 半導体基板上の位相シフタ並びにそれを用いた偏波分離器及び偏波合成器
US9207399B2 (en) 2013-01-28 2015-12-08 Aurrion, Inc. Athermal optical filter with active tuning and simplified control
JP6413296B2 (ja) * 2014-03-27 2018-10-31 日本電気株式会社 光変調用素子および光変調器
WO2017019145A1 (en) 2015-07-24 2017-02-02 Aurrion, Inc. Phase tuning in waveguide arrays
JP6714381B2 (ja) * 2016-02-19 2020-06-24 Ｎｔｔエレクトロニクス株式会社 光導波路型デバイス
US10754221B2 (en) * 2018-01-24 2020-08-25 Lumentum Operations Llc Polarization multiplexer/demultiplexer with reduced polarization rotation
CN108873168A (zh) * 2018-07-19 2018-11-23 湖北捷讯光电有限公司 一种硅基光波导偏振模式分离器
US11536610B2 (en) 2019-10-31 2022-12-27 Keysight Technologies, Inc. Optical wavemeter
US11513375B2 (en) * 2019-12-16 2022-11-29 Cisco Technology, Inc. Silicon thermal-optic phase shifter with improved optical performance
CN112558221A (zh) * 2020-12-08 2021-03-26 北京量子信息科学研究院 一种提高偏振消光比的方法、装置及系统

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JPH0782132B2 (ja) 1987-01-24 1995-09-06 日本電信電話株式会社 導波形偏光分離素子
JPH0718964B2 (ja) 1987-06-29 1995-03-06 日本電信電話株式会社 集積光デバイスおよびその製造方法
JPH01177002A (ja) 1987-12-29 1989-07-13 Fujitsu Ltd ファイバ融着形光デバイスの製造方法
JPH02130503A (ja) 1988-11-11 1990-05-18 Nippon Telegr & Teleph Corp <Ntt> 集積光デバイス
JPH0367204A (ja) 1989-08-07 1991-03-22 Nippon Telegr & Teleph Corp <Ntt> 集積光デバイスおよびその製造方法
JP2599488B2 (ja) 1990-02-26 1997-04-09 日本電信電話株式会社 光導波回路の特性調整方法およびその方法に使われる光導波回路
JPH04113302A (ja) 1990-09-03 1992-04-14 Nippon Telegr & Teleph Corp <Ntt> 導波型光回路およびその製造方法
US5119447A (en) * 1990-11-06 1992-06-02 General Instrument Corporation Apparatus and method for externally modulating an optical carrier
JP2621684B2 (ja) 1991-05-15 1997-06-18 富士通株式会社 光変調器の動作点制御方法
JP2659293B2 (ja) 1991-08-30 1997-09-30 日本電信電話株式会社 導波路型光スイッチ
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US5506925A (en) * 1995-02-28 1996-04-09 At&T Corp. Radiolytic modification of birefringence in silica planar waveguide structures
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JP3223959B2 (ja) 1997-03-05 2001-10-29 日本電信電話株式会社 導波型光回路における光路長トリミング方法及びその装置
AUPP865599A0 (en) 1999-02-12 1999-03-11 University Of Sydney, The Laser etching of waveguide structures
US6240221B1 (en) * 1999-03-29 2001-05-29 Nortel Networks Limited Integrated optical mach zehnder structures
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US6424755B1 (en) 1999-07-02 2002-07-23 Nortel Networks Limited Slotted monolithic optical waveguides
US6356681B1 (en) * 1999-07-09 2002-03-12 Corning Incorporated Method and apparatus for trimming the optical path length of optical fiber components
JP2001100163A (ja) 1999-09-30 2001-04-13 Sumitomo Osaka Cement Co Ltd 光導波路素子及び光導波路素子の位相制御方法
US6256435B1 (en) 1999-10-20 2001-07-03 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Industry Polarization insensitive grating in a planar channel optical waveguide and method to achieve the same
US6546161B2 (en) * 2000-01-21 2003-04-08 Nippon Telegraph And Telephone Corporation No polarization dependent waveguide type optical circuit

Also Published As

Publication number Publication date
US6823094B2 (en) 2004-11-23
DE60223735T2 (de) 2008-10-30
EP1227297A2 (de) 2002-07-31
US20020126933A1 (en) 2002-09-12
EP1936322A2 (de) 2008-06-25
EP1806557A2 (de) 2007-07-11
EP1806557A8 (de) 2010-06-09
EP1227297A3 (de) 2003-06-04
EP1806557A3 (de) 2010-03-31
EP1936322B1 (de) 2016-04-13
JP3703013B2 (ja) 2005-10-05
JP2002221630A (ja) 2002-08-09
EP1227297B1 (de) 2007-11-28
EP1936322A3 (de) 2010-03-31

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