DE60232955D1 - Kammförmiges, piezoelektrisches stellglied und herstellungsverfahren dafür - Google Patents

Kammförmiges, piezoelektrisches stellglied und herstellungsverfahren dafür

Info

Publication number
DE60232955D1
DE60232955D1 DE60232955T DE60232955T DE60232955D1 DE 60232955 D1 DE60232955 D1 DE 60232955D1 DE 60232955 T DE60232955 T DE 60232955T DE 60232955 T DE60232955 T DE 60232955T DE 60232955 D1 DE60232955 D1 DE 60232955D1
Authority
DE
Germany
Prior art keywords
compromise
manufacturing
adjustable member
piezoelectric adjustable
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60232955T
Other languages
English (en)
Inventor
Yukihisa Takeuchi
Hiroyuki Tsuji
Kazumasa Kitamura
Nobuo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60232955D1 publication Critical patent/DE60232955D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/089—Shaping or machining of piezoelectric or electrostrictive bodies by machining by punching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
DE60232955T 2001-03-01 2002-03-01 Kammförmiges, piezoelektrisches stellglied und herstellungsverfahren dafür Expired - Lifetime DE60232955D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001057011 2001-03-01
PCT/JP2002/001911 WO2002070265A1 (fr) 2001-03-01 2002-03-01 Actionneur piezo-electrique en forme de peigne et son procede de fabrication

Publications (1)

Publication Number Publication Date
DE60232955D1 true DE60232955D1 (de) 2009-08-27

Family

ID=18916952

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60232955T Expired - Lifetime DE60232955D1 (de) 2001-03-01 2002-03-01 Kammförmiges, piezoelektrisches stellglied und herstellungsverfahren dafür

Country Status (5)

Country Link
US (2) US6943483B2 (de)
EP (1) EP1364793B1 (de)
JP (1) JP3994877B2 (de)
DE (1) DE60232955D1 (de)
WO (1) WO2002070265A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6699018B2 (en) * 2001-04-06 2004-03-02 Ngk Insulators, Ltd. Cell driving type micropump member and method for manufacturing the same
JP4670225B2 (ja) * 2003-04-04 2011-04-13 セイコーエプソン株式会社 圧電素子形成部材およびその製造方法ならびにそれを用いた圧電素子ユニットおよび液体噴射ヘッド
JP4842520B2 (ja) 2003-05-30 2011-12-21 日本碍子株式会社 セル駆動型圧電／電歪アクチュエータ及びその製造方法
JP4847039B2 (ja) * 2004-05-28 2011-12-28 日本碍子株式会社 圧電／電歪構造体及び圧電／電歪構造体の製造方法
JP4703382B2 (ja) * 2005-02-14 2011-06-15 富士フイルム株式会社 振動子アレイの構造、およびその作製方法、並びに超音波プローブ
JP4594262B2 (ja) * 2006-03-17 2010-12-08 日本碍子株式会社 吐出デバイス
US7796269B2 (en) * 2006-06-06 2010-09-14 Morpho Detection, Inc. Irregularly shaped actuator fingers for a micro-electromechanical system fabry-perot filter
CN102906891A (zh) * 2010-05-26 2013-01-30 日本碍子株式会社 压电元件的制造方法
JP5633200B2 (ja) * 2010-06-08 2014-12-03 株式会社リコー 圧電アクチュエータ、液体吐出ヘッド及び画像形成装置
CN103907213B (zh) * 2012-05-17 2016-11-16 松下知识产权经营株式会社 压电元件、使用该压电元件的喷墨装置及其涂布方法
US10415568B2 (en) * 2012-09-17 2019-09-17 Pierburg Pump Technology Gmbh Electrical split-cage or canned coolant pump
US9431041B1 (en) 2014-02-17 2016-08-30 Magnecomp Corporation Comb structure for a disk drive suspension piezoelectric microactuator operating in the D33 mode, and method of manufacturing the same
US9786831B1 (en) 2016-01-27 2017-10-10 Magnecomp Corporation Suspension having a stacked D33 mode PZT actuator with constraint layer
US11594668B2 (en) * 2018-12-28 2023-02-28 Tdk Corporation Thin film laminate, thin film device and multilayer substrate

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2527647C3 (de) * 1975-06-20 1981-06-25 Siemens AG, 1000 Berlin und 8000 München Mit Flüssigkeitströpfchen arbeitendes Schreibgerät
JP3041952B2 (ja) * 1990-02-23 2000-05-15 セイコーエプソン株式会社 インクジェット式記録ヘッド、圧電振動体、及びこれらの製造方法
JP2504277B2 (ja) * 1990-04-19 1996-06-05 株式会社村田製作所 積層型セラミック電子部品用セラミックグリ―ンシ―トの製造方法および装置
JP3185249B2 (ja) * 1991-06-26 2001-07-09 株式会社村田製作所 セラミックグリーンブロックのカット方法
US5412865A (en) * 1991-08-30 1995-05-09 Murata Manufacturing Co., Ltd. Method of manufacturing multilayer electronic component
EP0795404B1 (de) * 1991-12-26 2005-06-08 Seiko Epson Corporation Tintenstrahldruckkopf
JP3116984B2 (ja) 1992-06-22 2000-12-11 セイコーエプソン株式会社 インクジェットヘッド
JP3114766B2 (ja) * 1992-06-24 2000-12-04 セイコーエプソン株式会社 インクジェットヘッドおよびその製造方法
JP3109017B2 (ja) * 1993-05-12 2000-11-13 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP3227285B2 (ja) 1993-09-17 2001-11-12 シチズン時計株式会社 インクジェットヘッドの製造方法
IT1268101B1 (it) * 1993-10-07 1997-02-20 Seiko Epson Corp Azionatore piezoelettrico per una testa di registrazione, e procedimento per la sua fabbricazione.
JPH08187848A (ja) * 1995-01-12 1996-07-23 Brother Ind Ltd 積層式圧電素子およびその製造方法
US5793149A (en) * 1995-07-26 1998-08-11 Francotyp-Postalia Ag & Co. Arrangement for plate-shaped piezoactuators and method for the manufacture thereof
US5745278A (en) * 1997-02-05 1998-04-28 Raytheon Optical Systems, Inc. Innovative deformable mirror actuator configuration
JP3381779B2 (ja) * 1998-09-17 2003-03-04 セイコーエプソン株式会社 圧電振動子ユニット、圧電振動子ユニットの製造方法、及びインクジェット式記録ヘッド
JP2001053346A (ja) * 1999-08-05 2001-02-23 Sumitomo Metal Electronics Devices Inc 電極層作成方法、多層圧電素子製造方法および多層圧電素子
US6380661B1 (en) * 2000-06-05 2002-04-30 Burleigh Instruments, Inc. Linear incremental bi-directional motor
US6502302B2 (en) * 2000-07-19 2003-01-07 Ngk Insulators, Ltd. Process for producing an industrial member having throughholes of high aspect ratio
US6933663B2 (en) * 2001-04-06 2005-08-23 Ngk Insulators, Ltd. Cell driving type actuator and method for manufacturing the same
DE10121271A1 (de) * 2001-04-30 2002-11-21 Epcos Ag Grünkörper, piezoelektrisches Bauteil sowie Verfahren zum Herstellen eines piezoelektrischen Bauteils

Also Published As

Publication number Publication date
US20040104642A1 (en) 2004-06-03
EP1364793A4 (de) 2007-06-06
US20050273990A1 (en) 2005-12-15
JP3994877B2 (ja) 2007-10-24
JPWO2002070265A1 (ja) 2004-07-02
US7246420B2 (en) 2007-07-24
EP1364793B1 (de) 2009-07-15
US6943483B2 (en) 2005-09-13
WO2002070265A1 (fr) 2002-09-12
EP1364793A1 (de) 2003-11-26

Similar Documents

Publication Publication Date Title
DE60225362D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE60310339D1 (de) Querträger und Herstellungsverfahren
DE60226928D1 (de) Polyhydroxyalkanoat-enthaltende Struktur und Herstellungsverfahren hierfür
DE60319810D1 (de) Anschwemmfiltermedien und herstellungs- und verwendungsverfahren
DE60324888D1 (de) und Herstellungsverfahren
DE60235142D1 (de) Kondensator und dessen Herstellungsverfahren
DE60230696D1 (de) Neigungsverstellvorrichtung und dessen Herstellungsmethode
DE60136927D1 (de) Rfelektiver bedruckter gegenstand und sein herstellungsverfahren
DE60225214D1 (de) Authentisches Dokument und dessen Herstellungsverfahren
BR0205216B1 (pt) dispositivo de comunicaÇço e mÉtodo de fabricaÇço do dispositivo de comunicaÇço
DE50109327D1 (de) Mikromechanisches bauelement und entsprechendes herstellungsverfahren
DE60140343D1 (de) Piezoelektrisches Bauelement und dessen Herstellungsprozess
DE60227777D1 (de) Handgriffstruktur und herstellungsverfahren dafür
DE60233444D1 (de) Teileanbringvorrichtung und teileanbringverfahren
NO20040353L (no) Ny terapeutsk metode
DE60210535D1 (de) Vibrator und Herstellungsverfahren desselben
DE60231538D1 (de) Sputtertarget und herstellungsverfahren dafür
DE60232955D1 (de) Kammförmiges, piezoelektrisches stellglied und herstellungsverfahren dafür
DE60206957D1 (de) Vliesstoff und herstellungsverfahren
DE60226297D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE10196531T1 (de) Beschleunigungssensor und Herstellungsverfahren dafür
EP1357611A4 (de) Piezoelektrisches funktionsteil und verfahren zur herstellung des teils
DE60224247D1 (de) Oberflächenwellenvorrichtung und Herstellungsverfahren
DE60210834D1 (de) Halbleiterbauelement und zugehöriges Herstellungsverfahren
DE50214244D1 (de) Klauenpolläufer und dessen herstellverfahren

Legal Events

Date Code Title Description
8364 No opposition during term of opposition