DE60317651D1 - Verfahren zur herstellung von hochmolekularen verbindungen für photoresists - Google Patents

Verfahren zur herstellung von hochmolekularen verbindungen für photoresists

Info

Publication number
DE60317651D1
DE60317651D1 DE60317651T DE60317651T DE60317651D1 DE 60317651 D1 DE60317651 D1 DE 60317651D1 DE 60317651 T DE60317651 T DE 60317651T DE 60317651 T DE60317651 T DE 60317651T DE 60317651 D1 DE60317651 D1 DE 60317651D1
Authority
DE
Germany
Prior art keywords
photoresists
producing high
molecular compounds
molecular
compounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60317651T
Other languages
English (en)
Other versions
DE60317651T2 (de
Inventor
Hitoshi Watanabe
Hidetaka Hayamizu
Masaaki Kishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daicel Corp
Original Assignee
Daicel Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daicel Chemical Industries Ltd filed Critical Daicel Chemical Industries Ltd
Application granted granted Critical
Publication of DE60317651D1 publication Critical patent/DE60317651D1/de
Publication of DE60317651T2 publication Critical patent/DE60317651T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F6/00—Post-polymerisation treatments
    • C08F6/14—Treatment of polymer emulsions
    • C08F6/16—Purification
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F6/00—Post-polymerisation treatments
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
    • C08F20/02—Monocarboxylic acids having less than ten carbon atoms, Derivatives thereof
    • C08F20/10—Esters
    • C08F20/26—Esters containing oxygen in addition to the carboxy oxygen
    • C08F20/28—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/12—Esters of monohydric alcohols or phenols
    • C08F220/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
    • C08F220/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
    • C08F220/1811—C10or C11-(Meth)acrylate, e.g. isodecyl (meth)acrylate, isobornyl (meth)acrylate or 2-naphthyl (meth)acrylate
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/12—Esters of monohydric alcohols or phenols
    • C08F220/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
    • C08F220/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
    • C08F220/1818—C13or longer chain (meth)acrylate, e.g. stearyl (meth)acrylate
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F6/00—Post-polymerisation treatments
    • C08F6/02—Neutralisation of the polymerisation mass, e.g. killing the catalyst also removal of catalyst residues
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F6/00—Post-polymerisation treatments
    • C08F6/06—Treatment of polymer solutions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
DE60317651T 2002-04-01 2003-03-14 Verfahren zur herstellung von fotolackpolymerverbindungen Expired - Lifetime DE60317651T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2002098841 2002-04-01
JP2002098840 2002-04-01
JP2002098841 2002-04-01
JP2002098840 2002-04-01
PCT/JP2003/003058 WO2003082933A1 (fr) 2002-04-01 2003-03-14 Procede de production de composes a poids moleculaire eleve pour resine photosensible

Publications (2)

Publication Number Publication Date
DE60317651D1 true DE60317651D1 (de) 2008-01-03
DE60317651T2 DE60317651T2 (de) 2008-03-06

Family

ID=28677605

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60317651T Expired - Lifetime DE60317651T2 (de) 2002-04-01 2003-03-14 Verfahren zur herstellung von fotolackpolymerverbindungen

Country Status (7)

Country Link
US (5) US7015291B2 (de)
EP (1) EP1491560B1 (de)
JP (1) JP4286151B2 (de)
KR (2) KR100955989B1 (de)
DE (1) DE60317651T2 (de)
TW (1) TW200307176A (de)
WO (1) WO2003082933A1 (de)

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JP4484690B2 (ja) * 2004-12-21 2010-06-16 ダイセル化学工業株式会社 フォトレジスト用樹脂の製造方法
JP4819355B2 (ja) * 2004-12-21 2011-11-24 ダイセル化学工業株式会社 フォトレジスト用樹脂溶液の製造方法
JP4488906B2 (ja) * 2005-01-05 2010-06-23 ダイセル化学工業株式会社 フォトレジスト用高分子化合物の製造方法
JP4841144B2 (ja) * 2005-01-17 2011-12-21 株式会社ダイセル フォトレジスト用高分子化合物の製造方法
JP2006199764A (ja) * 2005-01-19 2006-08-03 Daicel Chem Ind Ltd フォトレジスト用高分子化合物の製造方法
JP4819370B2 (ja) * 2005-02-17 2011-11-24 ダイセル化学工業株式会社 フォトレジスト用高分子化合物溶液の製造方法、及びフォトレジスト組成物
JP2006225516A (ja) * 2005-02-17 2006-08-31 Daicel Chem Ind Ltd フォトレジスト用樹脂溶液の製造方法
JP4540524B2 (ja) * 2005-03-31 2010-09-08 ダイセル化学工業株式会社 フォトレジスト用高分子化合物の製造方法及びフォトレジスト組成物
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JP5905207B2 (ja) 2011-04-21 2016-04-20 丸善石油化学株式会社 金属不純物量の少ない半導体リソグラフィー用共重合体の製造方法及び該共重合体を製造するための重合開始剤の精製方法
JP5641014B2 (ja) * 2012-05-21 2014-12-17 三菱レイヨン株式会社 重合体粉末の製造方法、重合体粉末、レジスト組成物、その製造方法および重合体を含む組成物の製造方法
US9360758B2 (en) * 2013-12-06 2016-06-07 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device process filter and method
JP6131910B2 (ja) * 2014-05-28 2017-05-24 信越化学工業株式会社 レジスト組成物及びパターン形成方法
JP6481334B2 (ja) * 2014-11-06 2019-03-13 三菱ケミカル株式会社 半導体リソグラフィー用重合体の精製方法および製造方法、レジスト組成物の製造方法、ならびにパターンが形成された基板の製造方法
JP6413678B2 (ja) * 2014-11-14 2018-10-31 三菱ケミカル株式会社 重合体溶液中の金属量低減方法および半導体リソグラフィー用重合体溶液の製造方法
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Also Published As

Publication number Publication date
US20060116493A1 (en) 2006-06-01
TW200307176A (en) 2003-12-01
EP1491560B1 (de) 2007-11-21
US7662897B2 (en) 2010-02-16
KR20080009220A (ko) 2008-01-25
DE60317651T2 (de) 2008-03-06
US7655743B2 (en) 2010-02-02
KR100955989B1 (ko) 2010-05-04
JP4286151B2 (ja) 2009-06-24
US20080268377A1 (en) 2008-10-30
EP1491560A1 (de) 2004-12-29
US7816471B2 (en) 2010-10-19
EP1491560A4 (de) 2005-06-01
US20060116494A1 (en) 2006-06-01
US20100099836A1 (en) 2010-04-22
US20050100815A1 (en) 2005-05-12
KR20040097240A (ko) 2004-11-17
US7015291B2 (en) 2006-03-21
KR100979871B1 (ko) 2010-09-02
JPWO2003082933A1 (ja) 2005-08-04
WO2003082933A1 (fr) 2003-10-09

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