DE602004012323D1 - Katheterspitze - Google Patents
KatheterspitzeInfo
- Publication number
- DE602004012323D1 DE602004012323D1 DE602004012323T DE602004012323T DE602004012323D1 DE 602004012323 D1 DE602004012323 D1 DE 602004012323D1 DE 602004012323 T DE602004012323 T DE 602004012323T DE 602004012323 T DE602004012323 T DE 602004012323T DE 602004012323 D1 DE602004012323 D1 DE 602004012323D1
- Authority
- DE
- Germany
- Prior art keywords
- trench
- semiconductor substrate
- forming
- filling material
- hardmask layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls
- H01L21/76235—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls trench shape altered by a local oxidation of silicon process step, e.g. trench corner rounding by LOCOS
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F2/00—Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
- A61F2/95—Instruments specially adapted for placement or removal of stents or stent-grafts
- A61F2/958—Inflatable balloons for placing stents or stent-grafts
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0009—Making of catheters or other medical or surgical tubes
- A61M25/001—Forming the tip of a catheter, e.g. bevelling process, join or taper
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0067—Catheters; Hollow probes characterised by the distal end, e.g. tips
- A61M25/0068—Static characteristics of the catheter tip, e.g. shape, atraumatic tip, curved tip or tip structure
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0067—Catheters; Hollow probes characterised by the distal end, e.g. tips
- A61M25/008—Strength or flexibility characteristics of the catheter tip
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/10—Balloon catheters
- A61M25/1027—Making of balloon catheters
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F2/00—Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
- A61F2/95—Instruments specially adapted for placement or removal of stents or stent-grafts
- A61F2/958—Inflatable balloons for placing stents or stent-grafts
- A61F2002/9583—Means for holding the stent on the balloon, e.g. using protrusions, adhesives or an outer sleeve
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F2250/00—Special features of prostheses classified in groups A61F2/00 - A61F2/26 or A61F2/82 or A61F9/00 or A61F11/00 or subgroups thereof
- A61F2250/0058—Additional features; Implant or prostheses properties not otherwise provided for
- A61F2250/0096—Markers and sensors for detecting a position or changes of a position of an implant, e.g. RF sensors, ultrasound markers
- A61F2250/0098—Markers and sensors for detecting a position or changes of a position of an implant, e.g. RF sensors, ultrasound markers radio-opaque, e.g. radio-opaque markers
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/10—Balloon catheters
- A61M2025/1043—Balloon catheters with special features or adapted for special applications
- A61M2025/1079—Balloon catheters with special features or adapted for special applications having radio-opaque markers in the region of the balloon
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/10—Balloon catheters
- A61M2025/1043—Balloon catheters with special features or adapted for special applications
- A61M2025/1093—Balloon catheters with special features or adapted for special applications having particular tip characteristics
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2205/00—General characteristics of the apparatus
- A61M2205/32—General characteristics of the apparatus with radio-opaque indicia
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0043—Catheters; Hollow probes characterised by structural features
- A61M25/005—Catheters; Hollow probes characterised by structural features with embedded materials for reinforcement, e.g. wires, coils, braids
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0043—Catheters; Hollow probes characterised by structural features
- A61M25/0054—Catheters; Hollow probes characterised by structural features with regions for increasing flexibility
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/0067—Catheters; Hollow probes characterised by the distal end, e.g. tips
- A61M25/0068—Static characteristics of the catheter tip, e.g. shape, atraumatic tip, curved tip or tip structure
- A61M25/0069—Tip not integral with tube
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/01—Introducing, guiding, advancing, emplacing or holding catheters
- A61M25/0105—Steering means as part of the catheter or advancing means; Markers for positioning
- A61M25/0108—Steering means as part of the catheter or advancing means; Markers for positioning using radio-opaque or ultrasound markers
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M25/00—Catheters; Hollow probes
- A61M25/01—Introducing, guiding, advancing, emplacing or holding catheters
- A61M25/0105—Steering means as part of the catheter or advancing means; Markers for positioning
- A61M25/0127—Magnetic means; Magnetic markers
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Veterinary Medicine (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Anesthesiology (AREA)
- Pulmonology (AREA)
- Hematology (AREA)
- Biophysics (AREA)
- Manufacturing & Machinery (AREA)
- Cardiology (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Oral & Maxillofacial Surgery (AREA)
- Transplantation (AREA)
- Vascular Medicine (AREA)
- Child & Adolescent Psychology (AREA)
- Element Separation (AREA)
- Media Introduction/Drainage Providing Device (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/767,657 US7118987B2 (en) | 2004-01-29 | 2004-01-29 | Method of achieving improved STI gap fill with reduced stress |
US767657 | 2004-01-29 | ||
PCT/US2004/038299 WO2005075014A1 (en) | 2004-01-29 | 2004-11-17 | Catheter tip |
EP04811126.4A EP1708775B2 (de) | 2004-01-29 | 2004-11-17 | Katheterspitze |
Publications (3)
Publication Number | Publication Date |
---|---|
DE602004012323D1 true DE602004012323D1 (de) | 2008-04-17 |
DE602004012323T2 DE602004012323T2 (de) | 2009-03-19 |
DE602004012323T3 DE602004012323T3 (de) | 2017-09-07 |
Family
ID=34807711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004012323.4T Active DE602004012323T3 (de) | 2004-01-29 | 2004-11-17 | Katheterspitze |
Country Status (6)
Country | Link |
---|---|
US (1) | US7118987B2 (de) |
CN (2) | CN1324673C (de) |
AT (1) | ATE387928T1 (de) |
DE (1) | DE602004012323T3 (de) |
ES (1) | ES2302071T5 (de) |
TW (1) | TWI278960B (de) |
Families Citing this family (81)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100593673B1 (ko) * | 2004-10-27 | 2006-06-28 | 삼성전자주식회사 | 반도체 장치의 제조 방법 및 이를 이용한 반도체 장치의 소자 분리막 제조 방법 |
US7393733B2 (en) | 2004-12-01 | 2008-07-01 | Amberwave Systems Corporation | Methods of forming hybrid fin field-effect transistor structures |
US20060113603A1 (en) * | 2004-12-01 | 2006-06-01 | Amberwave Systems Corporation | Hybrid semiconductor-on-insulator structures and related methods |
KR100620707B1 (ko) * | 2004-12-31 | 2006-09-13 | 동부일렉트로닉스 주식회사 | 반도체 소자의 sti 형성 방법 |
JP2006237509A (ja) * | 2005-02-28 | 2006-09-07 | Toshiba Corp | 半導体装置 |
US9153645B2 (en) | 2005-05-17 | 2015-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication |
US8324660B2 (en) | 2005-05-17 | 2012-12-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication |
US20070020877A1 (en) * | 2005-07-21 | 2007-01-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Shallow trench isolation structure and method of fabricating the same |
KR100745987B1 (ko) * | 2005-08-09 | 2007-08-06 | 삼성전자주식회사 | 반도체 소자의 트렌치 소자 분리 영역 제조 방법 |
KR100688750B1 (ko) * | 2005-08-18 | 2007-03-02 | 동부일렉트로닉스 주식회사 | 섀로우 트렌치 아이솔레이션의 제조방법 |
US8501632B2 (en) * | 2005-12-20 | 2013-08-06 | Infineon Technologies Ag | Methods of fabricating isolation regions of semiconductor devices and structures thereof |
KR100713924B1 (ko) * | 2005-12-23 | 2007-05-07 | 주식회사 하이닉스반도체 | 돌기형 트랜지스터 및 그의 형성방법 |
KR100724196B1 (ko) * | 2005-12-28 | 2007-05-31 | 동부일렉트로닉스 주식회사 | 반도체 소자의 sti 갭필 산화막 제조방법 |
US7767515B2 (en) * | 2006-02-27 | 2010-08-03 | Synopsys, Inc. | Managing integrated circuit stress using stress adjustment trenches |
US8936995B2 (en) | 2006-03-01 | 2015-01-20 | Infineon Technologies Ag | Methods of fabricating isolation regions of semiconductor devices and structures thereof |
US7777250B2 (en) | 2006-03-24 | 2010-08-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures and related methods for device fabrication |
US7884030B1 (en) | 2006-04-21 | 2011-02-08 | Advanced Micro Devices, Inc. and Spansion LLC | Gap-filling with uniform properties |
US7968425B2 (en) | 2006-07-14 | 2011-06-28 | Micron Technology, Inc. | Isolation regions |
EP2062290B1 (de) | 2006-09-07 | 2019-08-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Defektreduzierung durch kontrolle des aspektverhältnisses |
US7799592B2 (en) | 2006-09-27 | 2010-09-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Tri-gate field-effect transistors formed by aspect ratio trapping |
WO2008039534A2 (en) | 2006-09-27 | 2008-04-03 | Amberwave Systems Corporation | Quantum tunneling devices and circuits with lattice- mismatched semiconductor structures |
US8502263B2 (en) | 2006-10-19 | 2013-08-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Light-emitter-based devices with lattice-mismatched semiconductor structures |
KR100868654B1 (ko) * | 2006-12-27 | 2008-11-12 | 동부일렉트로닉스 주식회사 | 반도체 소자의 트렌치 형성 방법 |
KR100960477B1 (ko) * | 2007-02-16 | 2010-06-01 | 주식회사 하이닉스반도체 | 반도체 소자의 sti 형성 방법 |
KR100842749B1 (ko) * | 2007-03-27 | 2008-07-01 | 주식회사 하이닉스반도체 | 반도체소자의 트렌치 소자분리막 형성방법 |
US9508890B2 (en) | 2007-04-09 | 2016-11-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photovoltaics on silicon |
US8237151B2 (en) | 2009-01-09 | 2012-08-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Diode-based devices and methods for making the same |
US7825328B2 (en) | 2007-04-09 | 2010-11-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Nitride-based multi-junction solar cell modules and methods for making the same |
US8304805B2 (en) | 2009-01-09 | 2012-11-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor diodes fabricated by aspect ratio trapping with coalesced films |
US8927353B2 (en) * | 2007-05-07 | 2015-01-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fin field effect transistor and method of forming the same |
JP2008306139A (ja) * | 2007-06-11 | 2008-12-18 | Elpida Memory Inc | 半導体装置の素子分離構造の形成方法、半導体装置の素子分離構造及び半導体記憶装置 |
US8329541B2 (en) | 2007-06-15 | 2012-12-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | InP-based transistor fabrication |
KR100894101B1 (ko) * | 2007-09-07 | 2009-04-20 | 주식회사 하이닉스반도체 | 반도체 소자의 소자분리막 형성방법 |
US8344242B2 (en) | 2007-09-07 | 2013-01-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Multi-junction solar cells |
CN101442020B (zh) * | 2007-11-21 | 2010-07-28 | 中芯国际集成电路制造(上海)有限公司 | 一种可避免氮氧化硅残留的沟槽隔离结构制作方法 |
KR100940661B1 (ko) * | 2007-12-24 | 2010-02-05 | 주식회사 동부하이텍 | 플래시 메모리 소자의 제조 방법 |
KR100955677B1 (ko) | 2007-12-27 | 2010-05-06 | 주식회사 하이닉스반도체 | 반도체 메모리소자의 소자분리막 형성방법 |
US8183667B2 (en) | 2008-06-03 | 2012-05-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Epitaxial growth of crystalline material |
KR20090128902A (ko) * | 2008-06-11 | 2009-12-16 | 크로스텍 캐피탈, 엘엘씨 | 이중 하드마스크막을 이용한 씨모스이미지센서 제조 방법 |
US8274097B2 (en) | 2008-07-01 | 2012-09-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reduction of edge effects from aspect ratio trapping |
US8981427B2 (en) | 2008-07-15 | 2015-03-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Polishing of small composite semiconductor materials |
US7674684B2 (en) * | 2008-07-23 | 2010-03-09 | Applied Materials, Inc. | Deposition methods for releasing stress buildup |
WO2010033813A2 (en) | 2008-09-19 | 2010-03-25 | Amberwave System Corporation | Formation of devices by epitaxial layer overgrowth |
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JP2010098293A (ja) * | 2008-09-22 | 2010-04-30 | Elpida Memory Inc | 半導体装置 |
US8253211B2 (en) | 2008-09-24 | 2012-08-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor sensor structures with reduced dislocation defect densities |
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WO2010114956A1 (en) | 2009-04-02 | 2010-10-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Devices formed from a non-polar plane of a crystalline material and method of making the same |
CN101872739B (zh) * | 2009-04-23 | 2013-10-23 | 上海华虹Nec电子有限公司 | 沟槽的填充方法 |
CN102005373B (zh) * | 2009-08-28 | 2012-08-22 | 中芯国际集成电路制造(上海)有限公司 | 栅极及功率场效应管的制造方法 |
JP5602414B2 (ja) * | 2009-11-05 | 2014-10-08 | ピーエスフォー ルクスコ エスエイアールエル | 半導体装置の製造方法および半導体装置 |
KR101053647B1 (ko) * | 2009-12-29 | 2011-08-02 | 주식회사 하이닉스반도체 | 반도체 장치 제조 방법 |
US8765561B2 (en) | 2011-06-06 | 2014-07-01 | United Microelectronics Corp. | Method for fabricating semiconductor device |
WO2013004236A1 (en) | 2011-07-01 | 2013-01-10 | Coloplast A/S | A catheter with a balloon |
US8921944B2 (en) | 2011-07-19 | 2014-12-30 | United Microelectronics Corp. | Semiconductor device |
US8647941B2 (en) | 2011-08-17 | 2014-02-11 | United Microelectronics Corp. | Method of forming semiconductor device |
JP5977002B2 (ja) * | 2011-08-25 | 2016-08-24 | 東京エレクトロン株式会社 | トレンチの埋め込み方法および半導体集積回路装置の製造方法 |
US8691659B2 (en) | 2011-10-26 | 2014-04-08 | United Microelectronics Corp. | Method for forming void-free dielectric layer |
US8679938B2 (en) | 2012-02-06 | 2014-03-25 | International Business Machines Corporation | Shallow trench isolation for device including deep trench capacitors |
US8829642B2 (en) | 2012-03-29 | 2014-09-09 | The Institute of Microelectronics, Chinese Academy of Science | Semiconductor device and method for manufacturing the same |
CN103367395B (zh) * | 2012-03-29 | 2016-09-21 | 中国科学院微电子研究所 | 半导体器件及其制造方法 |
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- 2004-11-17 DE DE602004012323.4T patent/DE602004012323T3/de active Active
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ES2302071T5 (es) | 2017-09-28 |
CN1649122A (zh) | 2005-08-03 |
CN2796099Y (zh) | 2006-07-12 |
TWI278960B (en) | 2007-04-11 |
JP4717831B2 (ja) | 2011-07-06 |
DE602004012323T2 (de) | 2009-03-19 |
CN1324673C (zh) | 2007-07-04 |
US20050170606A1 (en) | 2005-08-04 |
ATE387928T1 (de) | 2008-03-15 |
US7118987B2 (en) | 2006-10-10 |
TW200525690A (en) | 2005-08-01 |
ES2302071T3 (es) | 2008-07-01 |
DE602004012323T3 (de) | 2017-09-07 |
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