DE60035932D1 - Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren - Google Patents

Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Info

Publication number
DE60035932D1
DE60035932D1 DE60035932T DE60035932T DE60035932D1 DE 60035932 D1 DE60035932 D1 DE 60035932D1 DE 60035932 T DE60035932 T DE 60035932T DE 60035932 T DE60035932 T DE 60035932T DE 60035932 D1 DE60035932 D1 DE 60035932D1
Authority
DE
Germany
Prior art keywords
thin plate
plate sections
piezoelectric
movable section
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60035932T
Other languages
English (en)
Other versions
DE60035932T2 (de
Inventor
Yukihisa Takeuchi
Kazuyoshi Shibata
Masahiko Namerikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/524,042 external-priority patent/US6498419B1/en
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE60035932D1 publication Critical patent/DE60035932D1/de
Application granted granted Critical
Publication of DE60035932T2 publication Critical patent/DE60035932T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/501—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section in stacking direction, e.g. polygonal, trapezoidal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49128—Assembling formed circuit to base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4957—Sound device making
    • Y10T29/49574—Musical instrument or tuning fork making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49789—Obtaining plural product pieces from unitary workpiece
    • Y10T29/49798—Dividing sequentially from leading end, e.g., by cutting or breaking

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
DE60035932T 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren Expired - Lifetime DE60035932T2 (de)

Applications Claiming Priority (18)

Application Number Priority Date Filing Date Title
JP28152299 1999-10-01
JP28152299 1999-10-01
JP30784499 1999-10-28
JP30784499 1999-10-28
JP32619599 1999-11-16
JP32619599 1999-11-16
JP37196799 1999-12-27
JP37196799 1999-12-27
JP2000013576 2000-01-21
JP2000013576 2000-01-21
JP2000015123 2000-01-24
JP2000015123 2000-01-24
JP2000056434 2000-03-01
JP2000056434 2000-03-01
US09/524,042 US6498419B1 (en) 1999-10-01 2000-03-13 Piezoelectric/electrostrictive device having mutually opposing end surfaces and method of manufacturing the same
US524042 2000-03-13
JP2000133012 2000-05-01
JP2000133012 2000-05-01

Publications (2)

Publication Number Publication Date
DE60035932D1 true DE60035932D1 (de) 2007-09-27
DE60035932T2 DE60035932T2 (de) 2008-05-15

Family

ID=27577722

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60035932T Expired - Lifetime DE60035932T2 (de) 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Country Status (4)

Country Link
US (5) US6534899B1 (de)
EP (3) EP1148560B1 (de)
DE (1) DE60035932T2 (de)
WO (1) WO2001026167A1 (de)

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US7164221B1 (en) * 1999-10-01 2007-01-16 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
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US10607642B2 (en) 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US9117468B1 (en) 2013-03-18 2015-08-25 Magnecomp Corporation Hard drive suspension microactuator with restraining layer for control of bending
US9330698B1 (en) 2013-03-18 2016-05-03 Magnecomp Corporation DSA suspension having multi-layer PZT microactuator with active PZT constraining layers
US11205449B2 (en) 2013-03-18 2021-12-21 Magnecomp Corporation Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension
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EP1148560A4 (de) 2007-04-04
EP1089357A2 (de) 2001-04-04
EP1833102A2 (de) 2007-09-12
EP1089357A3 (de) 2005-03-09
US6534899B1 (en) 2003-03-18
US20060006763A1 (en) 2006-01-12
EP1148560A1 (de) 2001-10-24
WO2001026167A1 (fr) 2001-04-12
US20070228872A1 (en) 2007-10-04
US20030208892A1 (en) 2003-11-13
US20050062366A1 (en) 2005-03-24
EP1089357B1 (de) 2007-08-15
US7245064B2 (en) 2007-07-17
US7358647B2 (en) 2008-04-15
US6933658B2 (en) 2005-08-23
DE60035932T2 (de) 2008-05-15
EP1148560B1 (de) 2010-07-14
US6817072B2 (en) 2004-11-16
EP1833102A3 (de) 2009-04-08

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