DE60003312D1 - Parallelprüfer für halbleiterschaltungen - Google Patents
Parallelprüfer für halbleiterschaltungenInfo
- Publication number
- DE60003312D1 DE60003312D1 DE60003312T DE60003312T DE60003312D1 DE 60003312 D1 DE60003312 D1 DE 60003312D1 DE 60003312 T DE60003312 T DE 60003312T DE 60003312 T DE60003312 T DE 60003312T DE 60003312 D1 DE60003312 D1 DE 60003312D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor circuits
- parallel controller
- controller
- parallel
- circuits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
- G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Test And Diagnosis Of Digital Computers (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/340,832 US6476628B1 (en) | 1999-06-28 | 1999-06-28 | Semiconductor parallel tester |
US340832 | 1999-06-28 | ||
PCT/US2000/017792 WO2001001247A2 (en) | 1999-06-28 | 2000-06-28 | Semiconductor parallel tester |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60003312D1 true DE60003312D1 (de) | 2003-07-17 |
DE60003312T2 DE60003312T2 (de) | 2004-05-13 |
Family
ID=23335115
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60003312T Expired - Fee Related DE60003312T2 (de) | 1999-06-28 | 2000-06-28 | Parallelprüfer für halbleiterschaltungen |
Country Status (8)
Country | Link |
---|---|
US (1) | US6476628B1 (de) |
EP (1) | EP1190322B1 (de) |
JP (1) | JP5173097B2 (de) |
KR (1) | KR100696321B1 (de) |
DE (1) | DE60003312T2 (de) |
MY (1) | MY119234A (de) |
TW (1) | TW469485B (de) |
WO (1) | WO2001001247A2 (de) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6671844B1 (en) * | 2000-10-02 | 2003-12-30 | Agilent Technologies, Inc. | Memory tester tests multiple DUT's per test site |
US6988232B2 (en) * | 2001-07-05 | 2006-01-17 | Intellitech Corporation | Method and apparatus for optimized parallel testing and access of electronic circuits |
US7009381B2 (en) * | 2002-03-21 | 2006-03-07 | Agilent Technologies, Inc. | Adapter method and apparatus for interfacing a tester with a device under test |
JP3621938B2 (ja) | 2002-08-09 | 2005-02-23 | 日本電子材料株式会社 | プローブカード |
US6842022B2 (en) * | 2002-09-20 | 2005-01-11 | Agilent Technologies, Inc. | System and method for heterogeneous multi-site testing |
US7437261B2 (en) * | 2003-02-14 | 2008-10-14 | Advantest Corporation | Method and apparatus for testing integrated circuits |
EP1629289A4 (de) * | 2003-05-22 | 2006-06-14 | Teseda Corp | Testerarchitektur zum prüfen integrierter halbleiterschaltungen |
US7053648B2 (en) * | 2003-06-09 | 2006-05-30 | Credence Systems Corporation | Distributed, load sharing power supply system for IC tester |
KR100498509B1 (ko) * | 2003-11-12 | 2005-07-01 | 삼성전자주식회사 | 검사시간을 단축하는 플래시 메모리 테스터 및 이를이용한 전기적 검사방법 |
US7464287B2 (en) * | 2004-03-31 | 2008-12-09 | Intel Corporation | Strategy to verify asynchronous links across chips |
US7913002B2 (en) * | 2004-08-20 | 2011-03-22 | Advantest Corporation | Test apparatus, configuration method, and device interface |
US7543200B2 (en) * | 2005-02-17 | 2009-06-02 | Advantest Corporation | Method and system for scheduling tests in a parallel test system |
US20060214679A1 (en) * | 2005-03-28 | 2006-09-28 | Formfactor, Inc. | Active diagnostic interface for wafer probe applications |
US7292059B2 (en) * | 2005-03-31 | 2007-11-06 | Credence Systems Corporation | Power supply assembly for a semiconductor circuit tester |
JP2006343146A (ja) * | 2005-06-07 | 2006-12-21 | Advantest Corp | 試験装置 |
JP2006343182A (ja) * | 2005-06-08 | 2006-12-21 | Renesas Technology Corp | 半導体集積回路装置の製造方法 |
JP5021924B2 (ja) * | 2005-09-27 | 2012-09-12 | 株式会社アドバンテスト | パフォーマンスボード、試験装置及び試験方法 |
KR100748663B1 (ko) * | 2005-12-19 | 2007-08-10 | 현대자동차주식회사 | 엘피아이 차량의 연료계 모니터링 방법 |
US7458837B2 (en) | 2006-01-13 | 2008-12-02 | Advantest Corporation | Connector housing block, interface member and electronic device testing apparatus |
JP4488438B2 (ja) * | 2006-01-13 | 2010-06-23 | 株式会社アドバンテスト | コネクタハウジングブロック、インターフェイス部材および電子部品試験装置 |
US7475164B2 (en) * | 2006-02-28 | 2009-01-06 | International Business Machines Corporation | Apparatus, system, and method for automated device configuration and testing |
US7552370B2 (en) * | 2006-03-31 | 2009-06-23 | Robert Pochowski | Application specific distributed test engine architecture system and method |
US7598728B2 (en) * | 2006-08-04 | 2009-10-06 | Suckheui Chung | System and method for utilizing an automatic circuit tester system having multiple automatic circuit tester platforms |
US7825650B2 (en) * | 2006-12-15 | 2010-11-02 | Verigy (Singapore) Ptd. Ltd. | Automated loader for removing and inserting removable devices to improve load time for automated test equipment |
US7821254B2 (en) * | 2006-12-15 | 2010-10-26 | Verigy (Singapore) Pte. Ltd. | Method and apparatus for improving load time for automated test equipment |
US7768278B2 (en) * | 2007-02-14 | 2010-08-03 | Verigy (Singapore) Pte. Ltd. | High impedance, high parallelism, high temperature memory test system architecture |
US8305098B2 (en) * | 2007-04-26 | 2012-11-06 | Advantest (Singapore) Pte Ltd | Element usable with the method, and a standalone probe card tester formable using the method |
DE112008001172T5 (de) * | 2007-04-27 | 2010-06-02 | Advantest Corp. | Prüfgerät und Prüfverfahren |
US7739070B2 (en) * | 2007-08-28 | 2010-06-15 | Agilent Technologies, Inc. | Standardized interfaces for proprietary instruments |
US20090134898A1 (en) * | 2007-11-26 | 2009-05-28 | Carlsen Richard D | Coaxial Spring Probe Grounding Method |
US7680615B2 (en) * | 2008-01-25 | 2010-03-16 | Azurewave Technologies, Inc. | Parallel testing system with shared golden calibration table and method thereof |
TWI461712B (zh) * | 2009-01-21 | 2014-11-21 | King Yuan Electronics Co Ltd | 平行測試轉換裝置、平行測試系統以及平行測試之方法 |
KR101534163B1 (ko) * | 2009-04-01 | 2015-07-06 | 삼성전자주식회사 | 실장 테스트에 적합한 메인 보드 및 이를 포함하는 메모리 실장 테스트 시스템 |
JP5528539B2 (ja) * | 2009-04-09 | 2014-06-25 | テラダイン、 インコーポレイテッド | 内蔵型直列絶縁抵抗器を有する試験信号伝達チャネルを利用した自動試験装置 |
CN102360064A (zh) * | 2011-08-01 | 2012-02-22 | 上海宏力半导体制造有限公司 | 芯片的测试系统 |
JP7170494B2 (ja) * | 2018-10-15 | 2022-11-14 | 東京エレクトロン株式会社 | 中間接続部材及び検査装置 |
KR102520852B1 (ko) * | 2022-10-14 | 2023-04-13 | 주식회사 유니밴스 | 프로브카드용 탑 보강판 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3587858D1 (de) * | 1984-06-29 | 1994-07-21 | Advantest Corp | IC-Testvorrichtung. |
JP2537892Y2 (ja) * | 1990-06-08 | 1997-06-04 | 株式会社アドバンテスト | Ic試験装置 |
JP2641816B2 (ja) * | 1991-07-23 | 1997-08-20 | 三菱電機株式会社 | 半導体集積回路の測定方法 |
JPH0792479B2 (ja) * | 1993-03-18 | 1995-10-09 | 東京エレクトロン株式会社 | プローブ装置の平行度調整方法 |
JPH0732579U (ja) * | 1993-11-22 | 1995-06-16 | 株式会社アドバンテスト | デバイス・インターフェイスのリーク防止機構 |
JPH0732955U (ja) * | 1993-12-01 | 1995-06-16 | 株式会社アドバンテスト | 半導体試験装置のマザーボード |
JPH07318587A (ja) * | 1994-05-27 | 1995-12-08 | Tokyo Electron Ltd | プローブカード |
JP3401713B2 (ja) * | 1994-09-13 | 2003-04-28 | 富士通株式会社 | 集積回路試験装置 |
US5546405A (en) * | 1995-07-17 | 1996-08-13 | Advanced Micro Devices, Inc. | Debug apparatus for an automated semiconductor testing system |
JP2720146B2 (ja) * | 1995-08-29 | 1998-02-25 | ミナトエレクトロニクス株式会社 | ウェーハプローバ用接続リング |
US5907247A (en) * | 1995-10-06 | 1999-05-25 | Texas Instruments Incorporated | Test system and process with microcomputers and serial interface |
US5705932A (en) * | 1995-10-10 | 1998-01-06 | Xilinx, Inc. | System for expanding space provided by test computer to test multiple integrated circuits simultaneously |
US5729150A (en) | 1995-12-01 | 1998-03-17 | Cascade Microtech, Inc. | Low-current probe card with reduced triboelectric current generating cables |
JPH10213628A (ja) * | 1996-02-19 | 1998-08-11 | Ando Electric Co Ltd | 半導体試験装置 |
JPH09251053A (ja) * | 1996-03-13 | 1997-09-22 | Ando Electric Co Ltd | 半導体試験装置 |
JPH10227830A (ja) * | 1996-07-31 | 1998-08-25 | Ando Electric Co Ltd | Icテスタ用テストボード |
JP3302576B2 (ja) * | 1996-09-30 | 2002-07-15 | アジレント・テクノロジー株式会社 | コネクタ付きプローブカード及びdut接続装置 |
JP3730340B2 (ja) * | 1996-11-20 | 2006-01-05 | 株式会社アドバンテスト | 半導体試験装置 |
JPH1183935A (ja) * | 1997-09-05 | 1999-03-26 | Advantest Corp | 半導体試験装置 |
US5794175A (en) * | 1997-09-09 | 1998-08-11 | Teradyne, Inc. | Low cost, highly parallel memory tester |
US6028439A (en) * | 1997-10-31 | 2000-02-22 | Credence Systems Corporation | Modular integrated circuit tester with distributed synchronization and control |
JP3833370B2 (ja) * | 1997-11-21 | 2006-10-11 | 株式会社アドバンテスト | Ic試験装置 |
US6166553A (en) * | 1998-06-29 | 2000-12-26 | Xandex, Inc. | Prober-tester electrical interface for semiconductor test |
US6204679B1 (en) * | 1998-11-04 | 2001-03-20 | Teradyne, Inc. | Low cost memory tester with high throughput |
JP5907245B2 (ja) * | 2014-12-01 | 2016-04-26 | 株式会社三洋物産 | 遊技機 |
-
1999
- 1999-06-28 US US09/340,832 patent/US6476628B1/en not_active Expired - Lifetime
-
2000
- 2000-06-27 MY MYPI20002889A patent/MY119234A/en unknown
- 2000-06-27 TW TW089112574A patent/TW469485B/zh not_active IP Right Cessation
- 2000-06-28 EP EP00944961A patent/EP1190322B1/de not_active Expired - Lifetime
- 2000-06-28 DE DE60003312T patent/DE60003312T2/de not_active Expired - Fee Related
- 2000-06-28 WO PCT/US2000/017792 patent/WO2001001247A2/en active IP Right Grant
- 2000-06-28 KR KR1020017016669A patent/KR100696321B1/ko not_active IP Right Cessation
- 2000-06-28 JP JP2001507193A patent/JP5173097B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE60003312T2 (de) | 2004-05-13 |
US6476628B1 (en) | 2002-11-05 |
EP1190322B1 (de) | 2003-06-11 |
KR100696321B1 (ko) | 2007-03-19 |
JP2003503712A (ja) | 2003-01-28 |
EP1190322A2 (de) | 2002-03-27 |
JP5173097B2 (ja) | 2013-03-27 |
TW469485B (en) | 2001-12-21 |
WO2001001247A3 (en) | 2001-09-07 |
WO2001001247A2 (en) | 2001-01-04 |
MY119234A (en) | 2005-04-30 |
KR20020038597A (ko) | 2002-05-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |