DE3886871T2 - Verfahren zur Herstellung eines Feldeffekttransistors mit Übergangsgatter. - Google Patents
Verfahren zur Herstellung eines Feldeffekttransistors mit Übergangsgatter.Info
- Publication number
- DE3886871T2 DE3886871T2 DE3886871T DE3886871T DE3886871T2 DE 3886871 T2 DE3886871 T2 DE 3886871T2 DE 3886871 T DE3886871 T DE 3886871T DE 3886871 T DE3886871 T DE 3886871T DE 3886871 T2 DE3886871 T2 DE 3886871T2
- Authority
- DE
- Germany
- Prior art keywords
- producing
- field effect
- effect transistor
- transition gate
- transition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005669 field effect Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000007704 transition Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66893—Unipolar field-effect transistors with a PN junction gate, i.e. JFET
- H01L29/66924—Unipolar field-effect transistors with a PN junction gate, i.e. JFET with an active layer made of a group 13/15 material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/107—Substrate region of field-effect devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/808—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a PN junction gate, e.g. PN homojunction gate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/088—J-Fet, i.e. junction field effect transistor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/10—Lift-off masking
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/105—Masks, metal
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62254146A JPH0195564A (ja) | 1987-10-08 | 1987-10-08 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3886871D1 DE3886871D1 (de) | 1994-02-17 |
DE3886871T2 true DE3886871T2 (de) | 1994-06-09 |
Family
ID=17260862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3886871T Expired - Lifetime DE3886871T2 (de) | 1987-10-08 | 1988-10-07 | Verfahren zur Herstellung eines Feldeffekttransistors mit Übergangsgatter. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4895811A (de) |
EP (1) | EP0311109B1 (de) |
JP (1) | JPH0195564A (de) |
DE (1) | DE3886871T2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5273937A (en) * | 1988-01-08 | 1993-12-28 | Kabushiki Kaisha Toshiba | Metal semiconductor device and method for producing the same |
US5011785A (en) * | 1990-10-30 | 1991-04-30 | The United States Of America As Represented By The Secretary Of The Navy | Insulator assisted self-aligned gate junction |
DE4113969A1 (de) * | 1991-04-29 | 1992-11-05 | Telefunken Electronic Gmbh | Verfahren zur herstellung von ohmschen kontakten fuer verbindungshalbleiter |
US5536677A (en) * | 1994-12-01 | 1996-07-16 | Motorola, Inc. | Method of forming conductive bumps on a semiconductor device using a double mask structure |
US6609652B2 (en) * | 1997-05-27 | 2003-08-26 | Spheretek, Llc | Ball bumping substrates, particuarly wafers |
US6051856A (en) * | 1997-09-30 | 2000-04-18 | Samsung Electronics Co., Ltd. | Voltage-controlled resistor utilizing bootstrap gate FET |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2824026A1 (de) * | 1978-06-01 | 1979-12-20 | Licentia Gmbh | Verfahren zum herstellen eines sperrschicht-feldeffekttransistors |
JPS57178376A (en) * | 1981-04-27 | 1982-11-02 | Sumitomo Electric Ind Ltd | Junction type field-effect transistor |
JPS57178374A (en) * | 1981-04-27 | 1982-11-02 | Sumitomo Electric Ind Ltd | Junction type field-efect transistor and its manufacture |
DE3150412A1 (de) * | 1981-12-19 | 1983-07-14 | Drägerwerk AG, 2400 Lübeck | Notatemschutzgeraet |
JPS58143586A (ja) * | 1982-02-22 | 1983-08-26 | Toshiba Corp | 電界効果トランジスタの製造方法 |
JPS58145158A (ja) * | 1982-02-23 | 1983-08-29 | Toshiba Corp | 電界効果トランジスタ及びその製造方法 |
US4561169A (en) * | 1982-07-30 | 1985-12-31 | Hitachi, Ltd. | Method of manufacturing semiconductor device utilizing multilayer mask |
JPS61163664A (ja) * | 1985-01-11 | 1986-07-24 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPS61177780A (ja) * | 1985-02-01 | 1986-08-09 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
FR2579827B1 (fr) * | 1985-04-01 | 1987-05-15 | Thomson Csf | Procede de realisation d'un transistor a effet de champ a metallisation de grille autoalignee |
JPS6273676A (ja) * | 1985-09-26 | 1987-04-04 | Nec Corp | 接合型電界効果トランジスタの製造方法 |
US4729967A (en) * | 1987-04-09 | 1988-03-08 | Gte Laboratories Incorporated | Method of fabricating a junction field effect transistor |
-
1987
- 1987-10-08 JP JP62254146A patent/JPH0195564A/ja active Granted
-
1988
- 1988-10-04 US US07/253,171 patent/US4895811A/en not_active Expired - Lifetime
- 1988-10-07 DE DE3886871T patent/DE3886871T2/de not_active Expired - Lifetime
- 1988-10-07 EP EP88116670A patent/EP0311109B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE3886871D1 (de) | 1994-02-17 |
US4895811A (en) | 1990-01-23 |
EP0311109A2 (de) | 1989-04-12 |
JPH0195564A (ja) | 1989-04-13 |
EP0311109A3 (en) | 1989-07-12 |
JPH0543291B2 (de) | 1993-07-01 |
EP0311109B1 (de) | 1994-01-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) |