DE3688057T2 - Halbleitervorrichtung und Methode zur Herstellung. - Google Patents
Halbleitervorrichtung und Methode zur Herstellung.Info
- Publication number
- DE3688057T2 DE3688057T2 DE86117777T DE3688057T DE3688057T2 DE 3688057 T2 DE3688057 T2 DE 3688057T2 DE 86117777 T DE86117777 T DE 86117777T DE 3688057 T DE3688057 T DE 3688057T DE 3688057 T2 DE3688057 T2 DE 3688057T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacture
- semiconductor device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
- H01L21/2255—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides the applied layer comprising oxides only, e.g. P2O5, PSG, H3BO3, doped oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66325—Bipolar junction transistors [BJT] controlled by field-effect, e.g. insulated gate bipolar transistors [IGBT]
- H01L29/66333—Vertical insulated gate bipolar transistors
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US81770786A | 1986-01-10 | 1986-01-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3688057D1 DE3688057D1 (de) | 1993-04-22 |
DE3688057T2 true DE3688057T2 (de) | 1993-10-07 |
Family
ID=25223702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE86117777T Expired - Fee Related DE3688057T2 (de) | 1986-01-10 | 1986-12-19 | Halbleitervorrichtung und Methode zur Herstellung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4810665A (de) |
EP (1) | EP0229362B1 (de) |
JP (1) | JP2551940B2 (de) |
DE (1) | DE3688057T2 (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01225164A (ja) * | 1988-03-03 | 1989-09-08 | Fuji Electric Co Ltd | 絶縁ゲートmosfetの製造方法 |
JPS6449273A (en) * | 1987-08-19 | 1989-02-23 | Mitsubishi Electric Corp | Semiconductor device and its manufacture |
JP2604777B2 (ja) * | 1988-01-18 | 1997-04-30 | 松下電工株式会社 | 二重拡散型電界効果半導体装置の製法 |
JPH0734474B2 (ja) * | 1988-03-03 | 1995-04-12 | 富士電機株式会社 | 伝導度変調型mosfetの製造方法 |
US5118638A (en) * | 1988-03-18 | 1992-06-02 | Fuji Electric Co., Ltd. | Method for manufacturing MOS type semiconductor devices |
KR910004318B1 (ko) * | 1988-06-27 | 1991-06-25 | 현대전자산업 주식회사 | 수직형 d mos 트랜지스터의 셀 |
JPH02163974A (ja) * | 1988-12-16 | 1990-06-25 | Mitsubishi Electric Corp | 絶縁ゲート型バイポーラトランジスタおよびその製造方法 |
JPH02281662A (ja) * | 1989-04-21 | 1990-11-19 | Mitsubishi Electric Corp | 半導体装置 |
IT1231300B (it) * | 1989-07-24 | 1991-11-28 | Sgs Thomson Microelectronics | Processo di definizione e realizzazione di una regione attivadi dimensioni molto ridotte in uno strato di materiale semiconduttore |
US4931408A (en) * | 1989-10-13 | 1990-06-05 | Siliconix Incorporated | Method of fabricating a short-channel low voltage DMOS transistor |
IT1236994B (it) * | 1989-12-29 | 1993-05-12 | Sgs Thomson Microelectronics | Processo per la fabbricazione di dispositivi semiconduttori mos di potenza e dispositivi con esso ottenuti |
US5182222A (en) * | 1991-06-26 | 1993-01-26 | Texas Instruments Incorporated | Process for manufacturing a DMOS transistor |
US5171705A (en) * | 1991-11-22 | 1992-12-15 | Supertex, Inc. | Self-aligned structure and process for DMOS transistor |
US5284139A (en) * | 1991-12-30 | 1994-02-08 | Abbot Laboratories | Hemometrix temperature compensation |
US5248627A (en) * | 1992-03-20 | 1993-09-28 | Siliconix Incorporated | Threshold adjustment in fabricating vertical dmos devices |
US5426069A (en) * | 1992-04-09 | 1995-06-20 | Dalsa Inc. | Method for making silicon-germanium devices using germanium implantation |
JP3297129B2 (ja) * | 1992-10-08 | 2002-07-02 | 株式会社東芝 | 半導体装置 |
US5369045A (en) * | 1993-07-01 | 1994-11-29 | Texas Instruments Incorporated | Method for forming a self-aligned lateral DMOS transistor |
EP0661755A1 (de) * | 1993-12-28 | 1995-07-05 | AT&T Corp. | Hochspannung-Halbleiteranordnung mit verbesserter elektrischer Robustheit und verminderter Zellschrittweite |
KR0158608B1 (ko) * | 1993-12-29 | 1998-12-01 | 김광호 | 3단자 전력 절연 게이트 트랜지스터 및 그 제조방법 |
US5422288A (en) * | 1994-05-19 | 1995-06-06 | Harris Corporation | Method of doping a JFET region in a MOS-gated semiconductor device |
US5474946A (en) * | 1995-02-17 | 1995-12-12 | International Rectifier Corporation | Reduced mask process for manufacture of MOS gated devices |
JP3279151B2 (ja) * | 1995-10-23 | 2002-04-30 | トヨタ自動車株式会社 | 半導体装置及びその製造方法 |
US7736976B2 (en) * | 2001-10-04 | 2010-06-15 | Vishay General Semiconductor Llc | Method for fabricating a power semiconductor device having a voltage sustaining layer with a terraced trench facilitating formation of floating islands |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52132684A (en) * | 1976-04-29 | 1977-11-07 | Sony Corp | Insulating gate type field effect transistor |
US4705759B1 (en) * | 1978-10-13 | 1995-02-14 | Int Rectifier Corp | High power mosfet with low on-resistance and high breakdown voltage |
US4364073A (en) * | 1980-03-25 | 1982-12-14 | Rca Corporation | Power MOSFET with an anode region |
US4345265A (en) * | 1980-04-14 | 1982-08-17 | Supertex, Inc. | MOS Power transistor with improved high-voltage capability |
JPS5816571A (ja) * | 1981-07-23 | 1983-01-31 | Toshiba Corp | 半導体装置の製造方法 |
DE3240162C2 (de) * | 1982-01-04 | 1996-08-01 | Gen Electric | Verfahren zum Herstellen eines doppelt-diffundierten Leistungs-MOSFET mit Source-Basis-Kurzschluß |
IE55992B1 (en) * | 1982-04-05 | 1991-03-13 | Gen Electric | Insulated gate rectifier with improved current-carrying capability |
US4503598A (en) * | 1982-05-20 | 1985-03-12 | Fairchild Camera & Instrument Corporation | Method of fabricating power MOSFET structure utilizing self-aligned diffusion and etching techniques |
US4443931A (en) * | 1982-06-28 | 1984-04-24 | General Electric Company | Method of fabricating a semiconductor device with a base region having a deep portion |
DE3224642A1 (de) * | 1982-07-01 | 1984-01-05 | Siemens AG, 1000 Berlin und 8000 München | Igfet mit injektorzone |
US4466176A (en) * | 1982-08-09 | 1984-08-21 | General Electric Company | Process for manufacturing insulated-gate semiconductor devices with integral shorts |
US4417385A (en) * | 1982-08-09 | 1983-11-29 | General Electric Company | Processes for manufacturing insulated-gate semiconductor devices with integral shorts |
US4532534A (en) * | 1982-09-07 | 1985-07-30 | Rca Corporation | MOSFET with perimeter channel |
JPS59125664A (ja) * | 1983-01-07 | 1984-07-20 | Toshiba Corp | 半導体装置の製造方法 |
US4587713A (en) * | 1984-02-22 | 1986-05-13 | Rca Corporation | Method for making vertical MOSFET with reduced bipolar effects |
JPS60196974A (ja) * | 1984-03-19 | 1985-10-05 | Toshiba Corp | 導電変調型mosfet |
US4639762A (en) * | 1984-04-30 | 1987-01-27 | Rca Corporation | MOSFET with reduced bipolar effects |
US4672407A (en) * | 1984-05-30 | 1987-06-09 | Kabushiki Kaisha Toshiba | Conductivity modulated MOSFET |
US4631564A (en) * | 1984-10-23 | 1986-12-23 | Rca Corporation | Gate shield structure for power MOS device |
US4641162A (en) * | 1985-12-11 | 1987-02-03 | General Electric Company | Current limited insulated gate device |
JP2880004B2 (ja) * | 1991-08-15 | 1999-04-05 | 松下電器産業株式会社 | 車載用地図表示装置 |
-
1986
- 1986-12-19 EP EP86117777A patent/EP0229362B1/de not_active Expired - Lifetime
- 1986-12-19 DE DE86117777T patent/DE3688057T2/de not_active Expired - Fee Related
-
1987
- 1987-01-09 JP JP62001986A patent/JP2551940B2/ja not_active Expired - Lifetime
- 1987-07-24 US US07/077,711 patent/US4810665A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0229362A3 (en) | 1989-08-30 |
JPS62203380A (ja) | 1987-09-08 |
EP0229362A2 (de) | 1987-07-22 |
DE3688057D1 (de) | 1993-04-22 |
JP2551940B2 (ja) | 1996-11-06 |
EP0229362B1 (de) | 1993-03-17 |
US4810665A (en) | 1989-03-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: HARRIS CORP., MELBOURNE, FLA., US |
|
8339 | Ceased/non-payment of the annual fee |