DE3612261A1 - Vielschicht-keramikleiterplatte - Google Patents

Vielschicht-keramikleiterplatte

Info

Publication number
DE3612261A1
DE3612261A1 DE19863612261 DE3612261A DE3612261A1 DE 3612261 A1 DE3612261 A1 DE 3612261A1 DE 19863612261 DE19863612261 DE 19863612261 DE 3612261 A DE3612261 A DE 3612261A DE 3612261 A1 DE3612261 A1 DE 3612261A1
Authority
DE
Germany
Prior art keywords
layer
electrically conductive
conductive material
circuit board
layer structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19863612261
Other languages
German (de)
English (en)
Inventor
Tsuyoshi Yokohama Kanagawa Fujita
Shoji Yokohama Kanagawa Oikawa
Shigeru Yokohama Kanagawa Saito
Hiroshi Tokio/Tokyo Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE3612261A1 publication Critical patent/DE3612261A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
    • H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
    • H05K3/4061—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in inorganic insulating substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/09—Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092—Dispersed materials, e.g. conductive pastes or inks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0347—Overplating, e.g. for reinforcing conductors or bumps; Plating over filled vias
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/035—Paste overlayer, i.e. conductive paste or solder paste over conductive layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/07—Electric details
    • H05K2201/0753—Insulation
    • H05K2201/0769—Anti metal-migration, e.g. avoiding tin whisker growth
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/095—Conductive through-holes or vias
    • H05K2201/09563—Metal filled via
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing the conductive pattern
    • H05K3/245—Reinforcing conductive patterns made by printing techniques or by other techniques for applying conductive pastes, inks or powders; Reinforcing other conductive patterns by such techniques
    • H05K3/246—Reinforcing conductive paste, ink or powder patterns by other methods, e.g. by plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing the conductive pattern
    • H05K3/245—Reinforcing conductive patterns made by printing techniques or by other techniques for applying conductive pastes, inks or powders; Reinforcing other conductive patterns by such techniques
    • H05K3/247—Finish coating of conductors by using conductive pastes, inks or powders
    • H05K3/248—Finish coating of conductors by using conductive pastes, inks or powders fired compositions for inorganic substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4664—Adding a circuit layer by thick film methods, e.g. printing techniques or by other techniques for making conductive patterns by using pastes, inks or powders
    • H05K3/4667—Adding a circuit layer by thick film methods, e.g. printing techniques or by other techniques for making conductive patterns by using pastes, inks or powders characterized by using an inorganic intermediate insulating layer

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)
DE19863612261 1985-04-12 1986-04-11 Vielschicht-keramikleiterplatte Withdrawn DE3612261A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60076574A JPS61236192A (ja) 1985-04-12 1985-04-12 セラミツク基板の電極形成方法

Publications (1)

Publication Number Publication Date
DE3612261A1 true DE3612261A1 (de) 1986-10-16

Family

ID=13609015

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19863612261 Withdrawn DE3612261A1 (de) 1985-04-12 1986-04-11 Vielschicht-keramikleiterplatte

Country Status (4)

Country Link
US (1) US4713494A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS61236192A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN (1) CN86103221A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3612261A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3735959A1 (de) * 1987-10-23 1989-05-03 Bbc Brown Boveri & Cie Mehrlagige duennschichtschaltung sowie verfahren zu deren herstellung
DE3814863A1 (de) * 1988-05-02 1989-11-16 Siemens Ag Verfahren zum herstellen von vielschichtenkeramik auf silikatbasis
EP0373356A1 (en) * 1988-12-16 1990-06-20 International Business Machines Corporation Circuit board
DE102009029485A1 (de) * 2009-09-15 2011-03-24 Robert Bosch Gmbh Verfahren zur Herstellung eines Keramikbauteils, Keramikbauteil und Bauteilanordnung

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0714105B2 (ja) * 1986-05-19 1995-02-15 日本電装株式会社 混成集積回路基板及びその製造方法
US4931144A (en) * 1987-07-31 1990-06-05 Texas Instruments Incorporated Self-aligned nonnested sloped via
US4882454A (en) * 1988-02-12 1989-11-21 Texas Instruments Incorporated Thermal interface for a printed wiring board
US4963697A (en) * 1988-02-12 1990-10-16 Texas Instruments Incorporated Advanced polymers on metal printed wiring board
US5243320A (en) * 1988-02-26 1993-09-07 Gould Inc. Resistive metal layers and method for making same
JPH01248593A (ja) * 1988-03-30 1989-10-04 Ngk Insulators Ltd セラミック多層配線基板
US5502889A (en) * 1988-06-10 1996-04-02 Sheldahl, Inc. Method for electrically and mechanically connecting at least two conductive layers
US5164547A (en) * 1988-07-07 1992-11-17 Texas Instruments Incorporated Articles having a dielectric layer on a metal substrate having improved adhesion
JPH0272695A (ja) * 1988-09-07 1990-03-12 Toshiba Lighting & Technol Corp 混成集積回路
JP2840271B2 (ja) * 1989-01-27 1998-12-24 キヤノン株式会社 記録ヘッド
JPH04234147A (ja) * 1990-12-28 1992-08-21 Sony Corp 多層配線構造体
DE69233232T2 (de) * 1991-02-22 2004-08-05 Canon K.K. Elektrischer Verbindungskörper und Herstellungsverfahren dafür
US5144228A (en) * 1991-04-23 1992-09-01 International Business Machines Corporation Probe interface assembly
JP2738600B2 (ja) * 1991-05-27 1998-04-08 京セラ株式会社 回路基板
JPH04369288A (ja) * 1991-06-17 1992-12-22 Kyocera Corp 回路基板
US5404044A (en) * 1992-09-29 1995-04-04 International Business Machines Corporation Parallel process interposer (PPI)
US5389743A (en) * 1992-12-21 1995-02-14 Hughes Aircraft Company Rivet design for enhanced copper thick-film I/O pad adhesion
JPH06223623A (ja) * 1992-12-28 1994-08-12 Internatl Business Mach Corp <Ibm> 銅を素材とするペーストおよびセラミックパッケージ
US5727310A (en) * 1993-01-08 1998-03-17 Sheldahl, Inc. Method of manufacturing a multilayer electronic circuit
US5416278A (en) * 1993-03-01 1995-05-16 Motorola, Inc. Feedthrough via connection
US5428190A (en) * 1993-07-02 1995-06-27 Sheldahl, Inc. Rigid-flex board with anisotropic interconnect and method of manufacture
JP3471046B2 (ja) * 1993-08-12 2003-11-25 富士通株式会社 プリント基板の製造方法
US5527998A (en) * 1993-10-22 1996-06-18 Sheldahl, Inc. Flexible multilayer printed circuit boards and methods of manufacture
JPH07212045A (ja) * 1994-01-21 1995-08-11 Hitachi Ltd 電子部品及びその製造方法
US5834705A (en) * 1994-03-04 1998-11-10 Silicon Graphics, Inc. Arrangement for modifying eletrical printed circuit boards
US6323435B1 (en) 1998-07-31 2001-11-27 Kulicke & Soffa Holdings, Inc. Low-impedance high-density deposited-on-laminate structures having reduced stress
JP2001210919A (ja) * 1999-11-17 2001-08-03 Sharp Corp フレキシブル配線板およびそれを用いた電子機器
US6586682B2 (en) * 2000-02-23 2003-07-01 Kulicke & Soffa Holdings, Inc. Printed wiring board with controlled line impedance
JP3473601B2 (ja) * 2000-12-26 2003-12-08 株式会社デンソー プリント基板およびその製造方法
US6486415B2 (en) * 2001-01-16 2002-11-26 International Business Machines Corporation Compliant layer for encapsulated columns
CN102523677B (zh) * 2001-03-14 2015-04-22 Ibiden股份有限公司 多层印刷电路板
JP2005022956A (ja) * 2003-07-02 2005-01-27 Rohm & Haas Electronic Materials Llc セラミックの金属化
JP2005340687A (ja) * 2004-05-31 2005-12-08 Fujitsu Ltd 積層基板及びその製造方法、かかる積層基板を有する電子機器
JP4634977B2 (ja) * 2006-08-15 2011-02-16 Ｏｋｉセミコンダクタ株式会社 半導体装置及び半導体装置の製造方法
KR100896610B1 (ko) * 2007-11-05 2009-05-08 삼성전기주식회사 다층 세라믹 기판 및 그 제조방법
US9586382B2 (en) * 2008-01-24 2017-03-07 National Taiwan University Ceramic/metal composite structure
KR100957787B1 (ko) * 2008-03-24 2010-05-12 삼성전기주식회사 다층 기판 제조 방법 및 다층 기판
WO2013021750A1 (ja) * 2011-08-11 2013-02-14 古河電気工業株式会社 配線基板およびその製造方法ならびに半導体装置
CN104349586A (zh) * 2013-07-31 2015-02-11 黄小蔓 一种陶瓷基锰覆线pcb及其制备方法
CN103607837A (zh) * 2013-10-21 2014-02-26 溧阳市东大技术转移中心有限公司 一种印刷电路板结构
KR102720915B1 (ko) * 2018-03-28 2024-10-24 다이니폰 인사츠 가부시키가이샤 배선 기판, 및 배선 기판을 제조하는 방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB874965A (en) * 1958-07-09 1961-08-16 G V Planer Ltd Improvements in or relating to electrical circuits or circuit elements
US3189978A (en) * 1962-04-27 1965-06-22 Rca Corp Method of making multilayer circuits
DE1916789A1 (de) * 1968-06-07 1969-12-18 United Aircraft Corp Nach der Einbrennmethode hergestellte Mehrschicht-Dickfilm-Integrierte-Hybrid-Schaltung
DE2202077A1 (de) * 1971-05-17 1972-11-30 Hochvakuum Dresden Veb Verfahren zur Herstellung von Mehrlagenleiterplatten
US4340618A (en) * 1981-03-20 1982-07-20 International Business Machines Corporation Process for forming refractory metal layers on ceramic substrate

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3838204A (en) * 1966-03-30 1974-09-24 Ibm Multilayer circuits
US3778530A (en) * 1971-04-01 1973-12-11 W Reimann Flatpack lead positioning device
US3725743A (en) * 1971-05-19 1973-04-03 Hitachi Ltd Multilayer wiring structure
DE2509912C3 (de) * 1975-03-07 1979-11-29 Robert Bosch Gmbh, 7000 Stuttgart Elektronische Dünnfilmschaltung
US4311768A (en) * 1977-12-22 1982-01-19 Gould Inc. Printed circuit board having mutually etchable copper and nickel layers
JPS5936948A (ja) * 1982-08-25 1984-02-29 Hitachi Ltd セラミツクス基板
JPS5975695A (ja) * 1982-10-23 1984-04-28 日本碍子株式会社 セラミツク厚膜回路基板
GB2134136B (en) * 1983-01-19 1986-03-26 Shell Int Research An electronic conduit and a method of manufacturing it
JPS59167096A (ja) * 1983-03-11 1984-09-20 日本電気株式会社 回路基板
US4541035A (en) * 1984-07-30 1985-09-10 General Electric Company Low loss, multilevel silicon circuit board

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB874965A (en) * 1958-07-09 1961-08-16 G V Planer Ltd Improvements in or relating to electrical circuits or circuit elements
US3189978A (en) * 1962-04-27 1965-06-22 Rca Corp Method of making multilayer circuits
DE1916789A1 (de) * 1968-06-07 1969-12-18 United Aircraft Corp Nach der Einbrennmethode hergestellte Mehrschicht-Dickfilm-Integrierte-Hybrid-Schaltung
DE2202077A1 (de) * 1971-05-17 1972-11-30 Hochvakuum Dresden Veb Verfahren zur Herstellung von Mehrlagenleiterplatten
US4340618A (en) * 1981-03-20 1982-07-20 International Business Machines Corporation Process for forming refractory metal layers on ceramic substrate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3735959A1 (de) * 1987-10-23 1989-05-03 Bbc Brown Boveri & Cie Mehrlagige duennschichtschaltung sowie verfahren zu deren herstellung
DE3814863A1 (de) * 1988-05-02 1989-11-16 Siemens Ag Verfahren zum herstellen von vielschichtenkeramik auf silikatbasis
EP0373356A1 (en) * 1988-12-16 1990-06-20 International Business Machines Corporation Circuit board
DE102009029485A1 (de) * 2009-09-15 2011-03-24 Robert Bosch Gmbh Verfahren zur Herstellung eines Keramikbauteils, Keramikbauteil und Bauteilanordnung

Also Published As

Publication number Publication date
JPS61236192A (ja) 1986-10-21
CN86103221A (zh) 1987-04-01
JPH0525199B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-12
US4713494A (en) 1987-12-15

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