DE3485523D1 - Aluminiumnitrid-sinterkeramikkoerper mit hoher waermeleitfaehigkeit. - Google Patents

Aluminiumnitrid-sinterkeramikkoerper mit hoher waermeleitfaehigkeit.

Info

Publication number
DE3485523D1
DE3485523D1 DE8484308449T DE3485523T DE3485523D1 DE 3485523 D1 DE3485523 D1 DE 3485523D1 DE 8484308449 T DE8484308449 T DE 8484308449T DE 3485523 T DE3485523 T DE 3485523T DE 3485523 D1 DE3485523 D1 DE 3485523D1
Authority
DE
Germany
Prior art keywords
high heat
aluminum nitride
ceramic body
heat conductivity
nitride sinter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8484308449T
Other languages
English (en)
Inventor
Kazuo Shinozaki
Kazuo Anzai
Takeshi Takano
Akihiko Tsuge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3485523D1 publication Critical patent/DE3485523D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE8484308449T 1983-12-12 1984-12-05 Aluminiumnitrid-sinterkeramikkoerper mit hoher waermeleitfaehigkeit. Expired - Lifetime DE3485523D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58233938A JPS60127267A (ja) 1983-12-12 1983-12-12 高熱伝導性窒化アルミニウム焼結体の製造方法

Publications (1)

Publication Number Publication Date
DE3485523D1 true DE3485523D1 (de) 1992-04-02

Family

ID=16962962

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484308449T Expired - Lifetime DE3485523D1 (de) 1983-12-12 1984-12-05 Aluminiumnitrid-sinterkeramikkoerper mit hoher waermeleitfaehigkeit.

Country Status (4)

Country Link
US (1) US4766097A (de)
EP (1) EP0147101B1 (de)
JP (1) JPS60127267A (de)
DE (1) DE3485523D1 (de)

Families Citing this family (49)

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US4746637A (en) * 1984-11-08 1988-05-24 Kabushiki Kaisha Toshiba Aluminum nitride sintered body and process for producing the same
US4578365A (en) * 1984-11-26 1986-03-25 General Electric Company High thermal conductivity ceramic body of aluminum nitride
US4578364A (en) * 1984-12-07 1986-03-25 General Electric Company High thermal conductivity ceramic body of aluminum nitride
JPS6217074A (ja) * 1985-07-12 1987-01-26 電気化学工業株式会社 焼結用窒化アルミニウム混合粉末の製造法
JPS6217075A (ja) * 1985-07-12 1987-01-26 電気化学工業株式会社 窒化アルミニウム焼結体及びその製法
CA1262149A (en) * 1985-08-13 1989-10-03 Hitofumi Taniguchi Sinterable aluminum nitride composition, sintered body from this composition and process for producing the sintered body
GB2213500B (en) * 1985-08-13 1990-05-30 Tokuyama Soda Kk Sinterable aluminum nitride composition
JPS6241766A (ja) * 1985-08-13 1987-02-23 株式会社トクヤマ 窒化アルミニウム焼結体及びその製造方法
US4719187A (en) * 1985-10-10 1988-01-12 Corning Glass Works Dense sintered bodies of nitride materials
JPH0717453B2 (ja) * 1985-11-28 1995-03-01 京セラ株式会社 窒化アルミニウム質焼結体およびその製造方法
US4897372A (en) * 1985-12-18 1990-01-30 General Electric Company High thermal conductivity ceramic body
JPS62171964A (ja) * 1986-01-24 1987-07-28 東芝セラミックス株式会社 窒化アルミニウム系焼結体
US4764321A (en) * 1986-03-28 1988-08-16 General Electric Company High thermal conductivity ceramic body
JPH0717456B2 (ja) * 1986-07-24 1995-03-01 ティーディーケイ株式会社 窒化アルミニウム焼結体
KR940000729B1 (ko) * 1986-08-13 1994-01-28 히다찌 긴조꾸 가부시끼가이샤 질화 알루미늄 소결체 및 그 반도체 기판
JPH0641390B2 (ja) * 1986-10-31 1994-06-01 住友電気工業株式会社 高熱伝導性窒化アルミニウム焼結体とその製造方法
US4847221A (en) * 1987-01-13 1989-07-11 Kabushiki Kaisha Toshiba AlN sintered body having high thermal conductivity and a method of fabricating the same
JPS6428280A (en) * 1987-07-23 1989-01-30 Sumitomo Electric Industries Sintered aluminum nitride and production thereof
JPS6437472A (en) * 1987-07-31 1989-02-08 Sumitomo Electric Industries Sintered aluminum nitride having high thermal conductivity and production thereof
JPH0196067A (ja) * 1987-10-08 1989-04-14 Nec Corp 窒化アルミニウム焼結体の製造方法
DE3743663A1 (de) * 1987-12-22 1989-07-06 Kempten Elektroschmelz Gmbh Polykristalline sinterkoerper auf basis von aluminiumnitrid und verfahren zu ihrer herstellung
JPH01203270A (ja) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd 高熱伝導性窒化アルミニウム焼結体及びその製造法
IL89599A0 (en) * 1988-03-15 1989-09-10 Dow Chemical Co Armor
JP2592895B2 (ja) * 1988-03-30 1997-03-19 株式会社東芝 焼成用容器およびその製造方法
US4988646A (en) * 1988-05-12 1991-01-29 International Business Machines Method for producing a ceramic
US5250478A (en) * 1988-07-28 1993-10-05 Kyocera Corporation Aluminum nitride sintered body and process for preparation thereof
JPH02124778A (ja) * 1988-11-04 1990-05-14 Hitachi Metals Ltd ＡｌＮセラミックス同志の接合体及びこれを用いた放熱装置
DE3840577A1 (de) * 1988-12-01 1990-06-07 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Entladungsgefaess fuer eine hochdruckentladungslampe und verfahren zu dessen herstellung
JP2728706B2 (ja) * 1988-12-29 1998-03-18 イビデン株式会社 窒化アルミニウム焼結体
JP2899893B2 (ja) * 1989-06-07 1999-06-02 京セラ株式会社 窒化アルミニウム質焼結体およびその製造方法
US5100846A (en) * 1990-09-13 1992-03-31 The Dow Chemical Company Purification of carbothermally produced aluminum nitride
US5212125A (en) * 1990-11-20 1993-05-18 The Carborundum Company Process for sintering aluminum nitride using organometallic compounds
JPH06508815A (ja) * 1991-07-08 1994-10-06 ザ・ダウ・ケミカル・カンパニー 最小の粒子成長での窒化アルミニウム高密度化
CA2113451A1 (en) * 1991-09-12 1993-03-18 Yi-Hung Chiao Method of making co-fired, multilayer substrates
US5541145A (en) * 1993-12-22 1996-07-30 The Carborundum Company/Ibm Corporation Low temperature sintering route for aluminum nitride ceramics
US5773377A (en) * 1993-12-22 1998-06-30 Crystalline Materials Corporation Low temperature sintered, resistive aluminum nitride ceramics
US5424261A (en) * 1993-12-22 1995-06-13 The Carborundum Company Low temperature sintering route for aluminum nitride ceramics
JP3457495B2 (ja) * 1996-03-29 2003-10-20 日本碍子株式会社 窒化アルミニウム焼結体、金属埋設品、電子機能材料および静電チャック
US5705450A (en) * 1996-12-17 1998-01-06 The Dow Chemical Company A1N sintered body containing a rare earth aluminum oxynitride and method to produce said body
JP4013386B2 (ja) * 1998-03-02 2007-11-28 住友電気工業株式会社 半導体製造用保持体およびその製造方法
WO2001086717A1 (fr) * 2000-05-10 2001-11-15 Ibiden Co., Ltd. Mandrin electrostatique
US6607836B2 (en) 2000-10-23 2003-08-19 Ngk Insulators, Ltd. Material of low volume resistivity, an aluminum nitride sintered body and a member used for the production of semiconductors
US20050082983A1 (en) * 2002-01-15 2005-04-21 Anton Apetz Rolf T. High-pressure discharge lamp
JP4243943B2 (ja) * 2002-04-22 2009-03-25 日本碍子株式会社 窒化アルミニウム材料および半導体製造用部材
JP2006270120A (ja) * 2003-12-19 2006-10-05 Kyocera Corp 発光ダイオード装置
JP2005281046A (ja) 2004-03-29 2005-10-13 Ngk Insulators Ltd 窒化アルミニウム基板及びその製造方法
JP2008044846A (ja) * 2007-10-19 2008-02-28 Taiheiyo Cement Corp 窒化アルミニウム焼結体およびそれを用いた静電チャック
KR102430454B1 (ko) 2014-08-15 2022-08-05 어플라이드 머티어리얼스, 인코포레이티드 플라즈마 강화 화학 기상 증착 시스템에서 높은 온도들로 압축 또는 인장 응력을 갖는 웨이퍼들을 프로세싱하는 방법 및 장치
US20220181126A1 (en) * 2019-03-14 2022-06-09 Lam Research Corporation Lamellar ceramic structure

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3108887A (en) * 1959-05-06 1963-10-29 Carborundum Co Refractory articles and method of making same
US4097293A (en) * 1969-04-30 1978-06-27 Tokyo Shibaura Electric Co., Ltd. Method for manufacturing heat-resistant reinforced composite materials
GB1377487A (en) * 1970-12-23 1974-12-18 Tokyo Shibaura Electric Co Heat resistant composite materials
JPS48100407A (de) * 1972-03-31 1973-12-18
JPS5310543B2 (de) * 1972-04-25 1978-04-14
JPS491427A (de) * 1972-04-25 1974-01-08
JPS5934156B2 (ja) * 1977-08-16 1984-08-20 日本特殊陶業株式会社 アルミナ被覆した窒化アルミニウム焼結体
JPS57181356A (en) * 1981-04-30 1982-11-08 Hitachi Ltd Sintered aluminum nitride body with high heat conductivity
JPS5855377A (ja) * 1981-09-28 1983-04-01 株式会社東芝 窒化アルミニウム焼結体の製造方法
JPS58171318A (ja) * 1982-03-31 1983-10-08 グローリー工業株式会社 硬貨累積装置
DE3333406A1 (de) * 1982-09-17 1984-03-22 Tokuyama Soda K.K., Tokuyama, Yamaguchi Feines aluminiumnitridpulver, verfahren zu seiner herstellung und es enthaltendes mittel
JPS5950078A (ja) * 1982-09-17 1984-03-22 株式会社トクヤマ 窒化アルミニウム焼結体およびその製造方法
DE3247985C2 (de) * 1982-12-24 1992-04-16 W.C. Heraeus Gmbh, 6450 Hanau Keramischer Träger
DE3248103C1 (de) * 1982-12-24 1987-11-12 W.C. Heraeus Gmbh, 6450 Hanau Tiegel zum Ziehen von Einkristallen
JPS58176360A (ja) * 1982-12-27 1983-10-15 神鋼電機株式会社 手持ちバイブレ−タ
US4478785A (en) * 1983-08-01 1984-10-23 General Electric Company Process of pressureless sintering to produce dense, high thermal conductivity aluminum nitride ceramic body
JPS6065768A (ja) * 1983-09-19 1985-04-15 株式会社トクヤマ 窒化アルミニウム組成物およびその製造方法
JPS6071575A (ja) * 1983-09-26 1985-04-23 株式会社トクヤマ 窒化アルミニウム焼結体及びその製造方法
US4547471A (en) * 1983-11-18 1985-10-15 General Electric Company High thermal conductivity aluminum nitride ceramic body
US4578365A (en) * 1984-11-26 1986-03-25 General Electric Company High thermal conductivity ceramic body of aluminum nitride

Also Published As

Publication number Publication date
JPS6346032B2 (de) 1988-09-13
EP0147101A2 (de) 1985-07-03
EP0147101A3 (en) 1986-07-09
EP0147101B1 (de) 1992-02-26
JPS60127267A (ja) 1985-07-06
US4766097A (en) 1988-08-23

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Legal Events

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8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee