DE112009002606B4 - Röntgenstrahlabbildungsgerät und Röntgenstrahlabbildungsverfahren - Google Patents

Röntgenstrahlabbildungsgerät und Röntgenstrahlabbildungsverfahren Download PDF

Info

Publication number
DE112009002606B4
DE112009002606B4 DE112009002606.0T DE112009002606T DE112009002606B4 DE 112009002606 B4 DE112009002606 B4 DE 112009002606B4 DE 112009002606 T DE112009002606 T DE 112009002606T DE 112009002606 B4 DE112009002606 B4 DE 112009002606B4
Authority
DE
Germany
Prior art keywords
phase
information
grating
intensity distribution
sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE112009002606.0T
Other languages
German (de)
English (en)
Other versions
DE112009002606T5 (de
Inventor
Chidane Ouchi
Hidenosuke Itoh
Kentaro Nagai
Toru Den
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE112009002606T5 publication Critical patent/DE112009002606T5/de
Application granted granted Critical
Publication of DE112009002606B4 publication Critical patent/DE112009002606B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/041Phase-contrast imaging, e.g. using grating interferometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20075Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring interferences of X-rays, e.g. Borrmann effect
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KHANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/42Arrangements for detecting radiation specially adapted for radiation diagnosis
    • A61B6/4291Arrangements for detecting radiation specially adapted for radiation diagnosis the detector being combined with a grid or grating
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/48Diagnostic techniques
    • A61B6/484Diagnostic techniques involving phase contrast X-ray imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/40Imaging
    • G01N2223/401Imaging image processing
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KHANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00Arrangements for handling radiation or particles
    • G21K2201/06Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KHANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00Arrangements for handling radiation or particles
    • G21K2201/06Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/067Construction details

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Medical Informatics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Molecular Biology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Biomedical Technology (AREA)
  • Optics & Photonics (AREA)
  • Biophysics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Measurement Of Radiation (AREA)
DE112009002606.0T 2008-10-29 2009-10-27 Röntgenstrahlabbildungsgerät und Röntgenstrahlabbildungsverfahren Active DE112009002606B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008278425 2008-10-29
JP2008-278425 2008-10-29
PCT/JP2009/068434 WO2010050483A1 (ja) 2008-10-29 2009-10-27 X線撮像装置およびx線撮像方法

Publications (2)

Publication Number Publication Date
DE112009002606T5 DE112009002606T5 (de) 2012-08-02
DE112009002606B4 true DE112009002606B4 (de) 2024-02-01

Family

ID=41664696

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112009002606.0T Active DE112009002606B4 (de) 2008-10-29 2009-10-27 Röntgenstrahlabbildungsgerät und Röntgenstrahlabbildungsverfahren

Country Status (8)

Country Link
US (5) US8520799B2 (https=)
EP (2) EP2343537B1 (https=)
JP (4) JP5174180B2 (https=)
KR (1) KR101258927B1 (https=)
CN (3) CN102197303A (https=)
DE (1) DE112009002606B4 (https=)
RU (1) RU2519663C2 (https=)
WO (2) WO2010050483A1 (https=)

Families Citing this family (111)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5339975B2 (ja) * 2008-03-13 2013-11-13 キヤノン株式会社 X線位相イメージングに用いられる位相格子、該位相格子を用いたx線位相コントラスト像の撮像装置、x線コンピューター断層撮影システム
JP5174180B2 (ja) * 2008-10-29 2013-04-03 キヤノン株式会社 X線撮像装置およびx線撮像方法
CN101943668B (zh) * 2009-07-07 2013-03-27 清华大学 X射线暗场成像系统和方法
JP5586899B2 (ja) * 2009-08-26 2014-09-10 キヤノン株式会社 X線用位相格子及びその製造方法
US8532252B2 (en) * 2010-01-27 2013-09-10 Canon Kabushiki Kaisha X-ray shield grating, manufacturing method therefor, and X-ray imaging apparatus
JP5631013B2 (ja) * 2010-01-28 2014-11-26 キヤノン株式会社 X線撮像装置
JP5725870B2 (ja) * 2010-02-22 2015-05-27 キヤノン株式会社 X線撮像装置およびx線撮像方法
JP5796976B2 (ja) * 2010-05-27 2015-10-21 キヤノン株式会社 X線撮像装置
JP5731214B2 (ja) * 2010-08-19 2015-06-10 富士フイルム株式会社 放射線撮影システム及びその画像処理方法
EP2612299B1 (en) * 2010-09-03 2015-11-18 Koninklijke Philips N.V. Regularized phase retrieval in differential phase-contrast imaging
WO2012038857A1 (en) * 2010-09-20 2012-03-29 Koninklijke Philips Electronics N.V. Phase gradient unwrapping in differential phase contrast imaging
WO2012042924A1 (ja) * 2010-09-29 2012-04-05 コニカミノルタエムジー株式会社 医用画像表示方法及び医用画像表示システム
JP2012103237A (ja) * 2010-10-14 2012-05-31 Canon Inc 撮像装置
CN103189739B (zh) * 2010-10-19 2015-12-02 皇家飞利浦电子股份有限公司 微分相位对比成像
RU2572644C2 (ru) * 2010-10-19 2016-01-20 Конинклейке Филипс Электроникс Н.В. Формирование дифференциальных фазово-контрастных изображений
JP5875280B2 (ja) 2010-10-20 2016-03-02 キヤノン株式会社 トールボット干渉を用いた撮像装置および撮像装置の調整方法
EP2633813B1 (en) * 2010-10-29 2015-02-25 FUJIFILM Corporation Phase contrast radiation imaging device
JP2012095865A (ja) * 2010-11-02 2012-05-24 Fujifilm Corp 放射線撮影装置、放射線撮影システム
JP2012143553A (ja) * 2010-12-24 2012-08-02 Fujifilm Corp 放射線画像撮影装置および放射線画像検出器
JP5777360B2 (ja) * 2011-03-14 2015-09-09 キヤノン株式会社 X線撮像装置
JP5915645B2 (ja) * 2011-03-23 2016-05-11 コニカミノルタ株式会社 医用画像表示システム
JP2012200567A (ja) * 2011-03-28 2012-10-22 Fujifilm Corp 放射線撮影システム及び放射線撮影方法
JP2014113168A (ja) * 2011-03-29 2014-06-26 Fujifilm Corp 放射線撮影システム及び放射線撮影方法
JP5475925B2 (ja) 2011-04-20 2014-04-16 富士フイルム株式会社 放射線撮影装置及び画像処理方法
JP2014132913A (ja) * 2011-04-25 2014-07-24 Fujifilm Corp 放射線撮影システム及び放射線撮影方法
JP5787597B2 (ja) * 2011-04-26 2015-09-30 キヤノン株式会社 撮像装置
JP2012236005A (ja) * 2011-04-26 2012-12-06 Fujifilm Corp 放射線撮影装置
JP2014155508A (ja) * 2011-06-08 2014-08-28 Fujifilm Corp 放射線撮影システム
JP2014155509A (ja) * 2011-06-10 2014-08-28 Fujifilm Corp 放射線撮影システム
JP5885405B2 (ja) * 2011-06-13 2016-03-15 キヤノン株式会社 撮像装置、干渉縞解析プログラム及び干渉縞解析方法
JP2013024731A (ja) 2011-07-21 2013-02-04 Canon Inc 放射線検出装置
JP2013050441A (ja) 2011-08-03 2013-03-14 Canon Inc 波面測定装置、波面測定方法、及びプログラム並びにx線撮像装置
JP2014217397A (ja) * 2011-08-22 2014-11-20 富士フイルム株式会社 放射線撮影装置及びアンラップ処理方法
JP2014223091A (ja) * 2011-09-12 2014-12-04 富士フイルム株式会社 放射線撮影装置及び画像処理方法
JP2014238265A (ja) * 2011-09-30 2014-12-18 富士フイルム株式会社 放射線画像検出器及びその製造方法、並びに放射線画像検出器を用いた放射線撮影システム
JP5475737B2 (ja) 2011-10-04 2014-04-16 富士フイルム株式会社 放射線撮影装置及び画像処理方法
US20130108015A1 (en) * 2011-10-28 2013-05-02 Csem Centre Suisse D'electronique Et De Microtechnique S.A - Recherche Et Developpement X-ray interferometer
US20150117599A1 (en) * 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
JP5868132B2 (ja) * 2011-11-14 2016-02-24 キヤノン株式会社 撮像装置および画像処理方法
RU2624513C2 (ru) * 2012-01-24 2017-07-04 Конинклейке Филипс Н.В. Мультинаправленная фазоконтрастная рентгеновская визуализация
WO2013151342A1 (ko) * 2012-04-05 2013-10-10 단국대학교 산학협력단 방사선 위상차 영상 장치
JP2014006247A (ja) * 2012-05-28 2014-01-16 Canon Inc 被検体情報取得装置、被検体情報取得方法及びプログラム
AU2012258412A1 (en) * 2012-11-30 2014-06-19 Canon Kabushiki Kaisha Combining differential images by inverse Riesz transformation
JP6116222B2 (ja) 2012-12-13 2017-04-19 キヤノン株式会社 演算装置、プログラム及び撮像システム
JP6079204B2 (ja) * 2012-12-18 2017-02-15 コニカミノルタ株式会社 医用画像システム
US9357975B2 (en) 2013-12-30 2016-06-07 Carestream Health, Inc. Large FOV phase contrast imaging based on detuned configuration including acquisition and reconstruction techniques
US10578563B2 (en) 2012-12-21 2020-03-03 Carestream Health, Inc. Phase contrast imaging computed tomography scanner
US10096098B2 (en) 2013-12-30 2018-10-09 Carestream Health, Inc. Phase retrieval from differential phase contrast imaging
AU2012268876A1 (en) * 2012-12-24 2014-07-10 Canon Kabushiki Kaisha Non-linear solution for 2D phase shifting
US9364191B2 (en) * 2013-02-11 2016-06-14 University Of Rochester Method and apparatus of spectral differential phase-contrast cone-beam CT and hybrid cone-beam CT
JP2014171799A (ja) * 2013-03-12 2014-09-22 Canon Inc X線撮像装置及びx線撮像システム
KR20140111818A (ko) 2013-03-12 2014-09-22 삼성전자주식회사 엑스선 영상 장치 및 그 제어 방법
JP2014178130A (ja) * 2013-03-13 2014-09-25 Canon Inc X線撮像装置及びx線撮像システム
WO2014167901A1 (ja) 2013-04-08 2014-10-16 コニカミノルタ株式会社 診断提供用医用画像システム及び一般撮影用の診断提供用医用画像システムにタルボ撮影装置系を導入する方法
EP2827339A1 (en) 2013-07-16 2015-01-21 Canon Kabushiki Kaisha Source grating, interferometer, and object information acquisition system
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
DE102013221818A1 (de) * 2013-10-28 2015-04-30 Siemens Aktiengesellschaft Bildgebendes System und Verfahren zur Bildgebung
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
WO2015064723A1 (ja) * 2013-10-31 2015-05-07 国立大学法人東北大学 非破壊検査装置
RU2677763C1 (ru) 2013-12-17 2019-01-21 Конинклейке Филипс Н.В. Получение фазы для систем сканирования с дифференциальным фазовым контрастом
AU2013273822A1 (en) * 2013-12-23 2015-07-09 Canon Kabushiki Kaisha Modulation guided phase unwrapping
CN109115816A (zh) * 2014-02-14 2019-01-01 佳能株式会社 X射线Talbot干涉仪和X射线Talbot干涉仪系统
JP2015166676A (ja) * 2014-03-03 2015-09-24 キヤノン株式会社 X線撮像システム
JP2015190776A (ja) 2014-03-27 2015-11-02 キヤノン株式会社 画像処理装置および撮像システム
JP6362914B2 (ja) * 2014-04-30 2018-07-25 キヤノンメディカルシステムズ株式会社 X線診断装置及び画像処理装置
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
CN104111120B (zh) * 2014-07-25 2017-05-31 中国科学院上海光学精密机械研究所 基于朗奇剪切干涉仪的相位提取方法
JP2016032573A (ja) * 2014-07-31 2016-03-10 キヤノン株式会社 トールボット干渉計、トールボット干渉システム、及び縞走査法
CN106999137B (zh) * 2014-11-24 2021-03-05 皇家飞利浦有限公司 用于x射线相衬断层合成成像的探测器和成像系统
US10117629B2 (en) 2014-12-03 2018-11-06 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College High energy grating techniques
KR101636438B1 (ko) * 2015-03-18 2016-07-05 제이피아이헬스케어 주식회사 단일 그리드를 이용한 pci 기반의 엑스선 영상 생성 방법 및 그 장치
JP6604772B2 (ja) * 2015-08-05 2019-11-13 キヤノン株式会社 X線トールボット干渉計
JP6608246B2 (ja) * 2015-10-30 2019-11-20 キヤノン株式会社 X線回折格子及びx線トールボット干渉計
DE102015226571B4 (de) * 2015-12-22 2019-10-24 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zur Wellenfrontanalyse
JP6774188B2 (ja) 2016-02-23 2020-10-21 キヤノン株式会社 シンチレータプレート、放射線検出器及び放射線計測システム
JP6613988B2 (ja) * 2016-03-30 2019-12-04 コニカミノルタ株式会社 放射線撮影システム
DE102016206559B3 (de) * 2016-04-19 2017-06-08 Siemens Healthcare Gmbh Verfahren zur Korrektur eines Röntgenbilds auf Effekte eines Streustrahlenrasters, Röntgeneinrichtung, Computerprogramm und elektronisch lesbarer Datenträger
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
WO2018175570A1 (en) 2017-03-22 2018-09-27 Sigray, Inc. Method of performing x-ray spectroscopy and x-ray absorption spectrometer system
CN109087348B (zh) * 2017-06-14 2022-04-29 北京航空航天大学 一种基于自适应区域投射的单像素成像方法
JP6838531B2 (ja) * 2017-09-06 2021-03-03 株式会社島津製作所 放射線位相差撮影装置
WO2019073760A1 (ja) * 2017-10-11 2019-04-18 株式会社島津製作所 X線位相差撮影システムおよび位相コントラスト画像補正方法
WO2019111505A1 (ja) * 2017-12-06 2019-06-13 株式会社島津製作所 X線位相差撮像システム
JP7020169B2 (ja) 2018-02-23 2022-02-16 コニカミノルタ株式会社 X線撮影システム
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
JP7347827B2 (ja) * 2018-06-12 2023-09-20 国立大学法人 筑波大学 位相画像撮影方法とそれを利用した位相画像撮影装置
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
US10962491B2 (en) 2018-09-04 2021-03-30 Sigray, Inc. System and method for x-ray fluorescence with filtering
DE112019004478T5 (de) 2018-09-07 2021-07-08 Sigray, Inc. System und verfahren zur röntgenanalyse mit wählbarer tiefe
DE102019111463A1 (de) * 2019-05-03 2020-11-05 Wipotec Gmbh Röntgenstrahlungsdetektorvorrichtung und Vorrichtung zur Röntgeninspektion von Produkten, insbesondere von Lebensmitteln
IL287195B2 (en) * 2019-05-30 2025-07-01 Becton Dickinson Co Phase correction of multiplexed radio frequency signals
US11143605B2 (en) 2019-09-03 2021-10-12 Sigray, Inc. System and method for computed laminography x-ray fluorescence imaging
CN111089871B (zh) * 2019-12-12 2022-12-09 中国科学院苏州生物医学工程技术研究所 X射线光栅相衬图像的相位信息分离方法及系统、储存介质、设备
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
CN115667896B (zh) 2020-05-18 2024-06-21 斯格瑞公司 使用晶体分析器和多个检测元件的x射线吸收光谱的系统和方法
JP7640682B2 (ja) 2020-09-17 2025-03-05 シグレイ、インコーポレイテッド X線を用いた深さ分解計測および分析のためのシステムおよび方法
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
KR102927910B1 (ko) 2020-12-07 2026-02-19 시그레이, 아이엔씨. 투과 x-선 소스를 이용한 고처리량 3D x-선 이미징 시스템
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
DE112023001408T5 (de) 2022-03-15 2025-02-13 Sigray, Inc. System und verfahren für die kompakte laminographie unter verwendung einer mikrofokus-transmissionsröntgenquelle und eines röntgendetektors mit variabler vergrösserung
CN115265524B (zh) * 2022-03-24 2024-10-25 北京控制工程研究所 一种临近空间x射线角秒级星跟踪器
DE112023002079T5 (de) 2022-05-02 2025-02-27 Sigray, Inc. Sequenzielles wellenlängendispersives röntgenspektrometer
WO2024173256A1 (en) 2023-02-16 2024-08-22 Sigray, Inc. X-ray detector system with at least two stacked flat bragg diffractors
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
WO2025101530A1 (en) 2023-11-07 2025-05-15 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
CN117475172B (zh) * 2023-12-28 2024-03-26 湖北工业大学 一种基于深度学习的高噪声环境相位图解包裹方法和系统
WO2025151383A1 (en) 2024-01-08 2025-07-17 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
WO2025155719A1 (en) 2024-01-18 2025-07-24 Sigray, Inc. Sequential array of x-ray imaging detectors
WO2025174966A1 (en) 2024-02-15 2025-08-21 Sigray, Inc. System and method for generating a focused x‑ray beam

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5812629A (en) * 1997-04-30 1998-09-22 Clauser; John F. Ultrahigh resolution interferometric x-ray imaging
EP1731099A1 (en) * 2005-06-06 2006-12-13 Paul Scherrer Institut Interferometer for quantitative phase contrast imaging and tomography with an incoherent polychromatic x-ray source

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1673933A1 (ru) * 1988-12-28 1991-08-30 Ереванский политехнический институт им.К.Маркса Рентгеноинтерферометрический способ исследовани кристаллов
SU1748030A1 (ru) * 1990-06-07 1992-07-15 Ереванский политехнический институт им.К.Маркса Способ получени рентгеновских проекционных топограмм
US5424743A (en) 1994-06-01 1995-06-13 U.S. Department Of Energy 2-D weighted least-squares phase unwrapping
JP2000088772A (ja) * 1998-09-11 2000-03-31 Hitachi Ltd X線撮像装置
JP4015394B2 (ja) * 2001-09-19 2007-11-28 株式会社日立製作所 X線撮像法
JP4445397B2 (ja) 2002-12-26 2010-04-07 敦 百生 X線撮像装置および撮像方法
US7268891B2 (en) * 2003-01-15 2007-09-11 Asml Holding N.V. Transmission shear grating in checkerboard configuration for EUV wavefront sensor
JP4704675B2 (ja) * 2003-11-28 2011-06-15 株式会社日立製作所 X線撮像装置及び撮像方法
JP2006263180A (ja) * 2005-03-24 2006-10-05 Fuji Photo Film Co Ltd 画像処理装置およびこれを用いた放射線撮影システム
DE102006037257B4 (de) * 2006-02-01 2017-06-01 Siemens Healthcare Gmbh Verfahren und Messanordnung zur zerstörungsfreien Analyse eines Untersuchungsobjektes mit Röntgenstrahlung
DE102006063048B3 (de) * 2006-02-01 2018-03-29 Siemens Healthcare Gmbh Fokus/Detektor-System einer Röntgenapparatur zur Erzeugung von Phasenkontrastaufnahmen
CN101044987A (zh) * 2006-02-01 2007-10-03 西门子公司 产生投影的和断层造影的相位对比照片的x射线ct系统
JP5041750B2 (ja) * 2006-07-20 2012-10-03 株式会社日立製作所 X線撮像装置及び撮像方法
JP2008197593A (ja) * 2007-02-16 2008-08-28 Konica Minolta Medical & Graphic Inc X線用透過型回折格子、x線タルボ干渉計およびx線撮像装置
JP2008200359A (ja) * 2007-02-21 2008-09-04 Konica Minolta Medical & Graphic Inc X線撮影システム
WO2008102598A1 (ja) * 2007-02-21 2008-08-28 Konica Minolta Medical & Graphic, Inc. 放射線画像撮影装置及び放射線画像撮影システム
JP2008200360A (ja) * 2007-02-21 2008-09-04 Konica Minolta Medical & Graphic Inc X線撮影システム
JP5339975B2 (ja) 2008-03-13 2013-11-13 キヤノン株式会社 X線位相イメージングに用いられる位相格子、該位相格子を用いたx線位相コントラスト像の撮像装置、x線コンピューター断層撮影システム
JP5174180B2 (ja) * 2008-10-29 2013-04-03 キヤノン株式会社 X線撮像装置およびx線撮像方法
JP2010253157A (ja) * 2009-04-28 2010-11-11 Konica Minolta Medical & Graphic Inc X線干渉計撮影装置及びx線干渉計撮影方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5812629A (en) * 1997-04-30 1998-09-22 Clauser; John F. Ultrahigh resolution interferometric x-ray imaging
EP1731099A1 (en) * 2005-06-06 2006-12-13 Paul Scherrer Institut Interferometer for quantitative phase contrast imaging and tomography with an incoherent polychromatic x-ray source

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JIANG, M. [et al.]: X-Ray Phase-Contrast Imaging with Three 2D Gratings. In: International Journal of Biomedical Imaging (March 2008). 827152. *

Also Published As

Publication number Publication date
JP2014205079A (ja) 2014-10-30
CN102197303A (zh) 2011-09-21
US20110158493A1 (en) 2011-06-30
KR20110079742A (ko) 2011-07-07
US8681934B2 (en) 2014-03-25
JP5174180B2 (ja) 2013-04-03
JP2012507690A (ja) 2012-03-29
EP2343537B1 (en) 2019-04-10
JP2013106962A (ja) 2013-06-06
WO2010050611A1 (en) 2010-05-06
US20100290590A1 (en) 2010-11-18
DE112009002606T5 (de) 2012-08-02
JP5595473B2 (ja) 2014-09-24
JPWO2010050483A1 (ja) 2012-03-29
EP2343537A4 (en) 2012-05-02
US8340243B2 (en) 2012-12-25
CN102197302B (zh) 2013-06-26
EP2342551A1 (en) 2011-07-13
US20110280368A1 (en) 2011-11-17
CN103876761B (zh) 2016-04-27
KR101258927B1 (ko) 2013-04-29
RU2012137875A (ru) 2014-03-27
US8009797B2 (en) 2011-08-30
JP5456032B2 (ja) 2014-03-26
CN102197302A (zh) 2011-09-21
US8537966B2 (en) 2013-09-17
EP2343537A1 (en) 2011-07-13
RU2519663C2 (ru) 2014-06-20
US20130301795A1 (en) 2013-11-14
US8520799B2 (en) 2013-08-27
CN103876761A (zh) 2014-06-25
US20130070893A1 (en) 2013-03-21
WO2010050483A1 (ja) 2010-05-06

Similar Documents

Publication Publication Date Title
DE112009002606B4 (de) Röntgenstrahlabbildungsgerät und Röntgenstrahlabbildungsverfahren
DE102006037256B4 (de) Fokus-Detektor-Anordnung einer Röntgenapparatur zur Erzeugung projektiver oder tomographischer Phasenkontrastaufnahmen sowie Röntgensystem, Röntgen-C-Bogen-System und Röntgen-CT-System
EP2168488B1 (de) Röntgen-CT-System zur Röntgen-Phasenkontrast-und/oder Röntgen-Dunkelfeld-Bildgebung
RU2526892C2 (ru) Способ анализа фазовой информации, носитель информации и устройство формирования рентгеновских изображений
DE102006037254B4 (de) Fokus-Detektor-Anordnung zur Erzeugung projektiver oder tomographischer Phasenkontrastaufnahmen mit röntgenoptischen Gittern, sowie Röntgen-System, Röntgen-C-Bogen-System und Röntgen-Computer-Tomographie-System
EP2793056B1 (de) Vorrichtung und Verfahren zur Bestimmung der energetischen Zusammensetzung von elektromagnetischen Wellen
DE112010000789B4 (de) Röntgenstrahlenabbildungsvorrichtung und verfahren zum röntgenstrahlenabbilden
DE102006035677A1 (de) Verfahren und CT-System zur Erkennung und Differenzierung von Plaque in Gefäßstrukturen eines Patienten
EP3011321B1 (en) Coded-aperture x-ray imaging
DE112010000754B4 (de) Röntgenstrahlenabbildungsvorrichtung und Verfahren zum Röntgenstrahlenabbilden
EP3136089A1 (en) Omnidirectional scattering- and bidirectional phase-sensitivity with single shot grating interferometry
WO2015156379A1 (en) Image processing unit and control method for image processing unit
Modregger et al. Multiple scattering tomography
DE102018000307A1 (de) Statisches Fourier-Transformations-Spektrometer und ein Verfahren zum Betreiben des statischen Fourier-Transformations-Spektrometers
DE112021001999T5 (de) Bias-Korrektur für Dunkelfeldbildgebung basierend auf einem gleitenden Fensterphasenabruf
EP2913632B1 (de) Verfahren zur Messung eines Messobjektes mittels Röntgenfluoreszenz
DE102013221818A1 (de) Bildgebendes System und Verfahren zur Bildgebung
DE102020101994B4 (de) Verfahren und Vorrichtung zur linsenlosen Bildgebung mittels Fourier-Transformations-Holographie
DE102018220042A1 (de) Vorrichtung zur Erzeugung eines Strahlungsbildes
DD268059B5 (de) Vorrichtung zur roentgenografischen abbildung und messung lokaler spannungsverteilungen
WO2017001569A1 (de) Verfahren und vorrichtung zur kodierung von fächerwinkeln von röntgen-teilstrahlen eines röntgen-fächerstrahls in die röntgen-teilstrahlen
DE2312229A1 (de) Einrichtung zur auswertung von interferogrammen fuer oberflaechendeformationen
DE102004052486A1 (de) Moiréverfahren und Messsystem zur Vermessung der Verzeichnung eines optischen Abbildungssystems
DE102014010870A1 (de) Phasenkontrollierte Überlagerungsmesssysteme auf Modellbasis und Verfahren

Legal Events

Date Code Title Description
R012 Request for examination validly filed
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: G01N0023040000

Ipc: G01N0023041000

R020 Patent grant now final