DE102006055121B4 - Verfahren zur Entfernung von Ladungen von einem Werkstück - Google Patents
Verfahren zur Entfernung von Ladungen von einem Werkstück Download PDFInfo
- Publication number
- DE102006055121B4 DE102006055121B4 DE102006055121.4A DE102006055121A DE102006055121B4 DE 102006055121 B4 DE102006055121 B4 DE 102006055121B4 DE 102006055121 A DE102006055121 A DE 102006055121A DE 102006055121 B4 DE102006055121 B4 DE 102006055121B4
- Authority
- DE
- Germany
- Prior art keywords
- positive
- workpiece
- negative
- charge removal
- removal region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 43
- 150000002500 ions Chemical class 0.000 claims abstract description 118
- 238000005259 measurement Methods 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 21
- 238000005421 electrostatic potential Methods 0.000 description 5
- 230000003068 static effect Effects 0.000 description 4
- 230000000875 corresponding effect Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T19/00—Devices providing for corona discharge
- H01T19/04—Devices providing for corona discharge having pointed electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Elimination Of Static Electricity (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005-340027 | 2005-11-25 | ||
| JP2005340027A JP4910207B2 (ja) | 2005-11-25 | 2005-11-25 | イオンバランス調整方法及びそれを用いたワークの除電方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE102006055121A1 DE102006055121A1 (de) | 2007-05-31 |
| DE102006055121B4 true DE102006055121B4 (de) | 2018-11-29 |
Family
ID=38037958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102006055121.4A Active DE102006055121B4 (de) | 2005-11-25 | 2006-11-21 | Verfahren zur Entfernung von Ladungen von einem Werkstück |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7586731B2 (https=) |
| JP (1) | JP4910207B2 (https=) |
| KR (1) | KR100853726B1 (https=) |
| CN (1) | CN1972551B (https=) |
| DE (1) | DE102006055121B4 (https=) |
| TW (1) | TW200738072A (https=) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100759587B1 (ko) * | 2005-04-19 | 2007-09-17 | (주)선재하이테크 | 막대형 이오나이저 |
| JP5097514B2 (ja) * | 2007-11-22 | 2012-12-12 | 国立大学法人東京工業大学 | ワイヤ電極式イオナイザ |
| JP5299989B2 (ja) * | 2007-12-06 | 2013-09-25 | ヒューグルエレクトロニクス株式会社 | イオナイザ |
| KR100944078B1 (ko) * | 2008-01-28 | 2010-02-24 | 한국원자력연구원 | 이온 발생 장치 및 이온 발생 방법 |
| JP5212787B2 (ja) * | 2008-02-28 | 2013-06-19 | Smc株式会社 | イオナイザ |
| JP5201338B2 (ja) * | 2008-07-08 | 2013-06-05 | Smc株式会社 | イオナイザ |
| CN102106051B (zh) * | 2008-08-01 | 2015-03-25 | 夏普株式会社 | 照明装置 |
| JP5336949B2 (ja) * | 2009-06-30 | 2013-11-06 | サントリーホールディングス株式会社 | 樹脂製容器の帯電除去方法、樹脂製容器の殺菌充填方法、樹脂製容器の充填キャッピング方法、樹脂製容器の帯電除去装置および樹脂製容器の殺菌充填システム |
| JP5435423B2 (ja) | 2009-12-09 | 2014-03-05 | Smc株式会社 | イオナイザ及び除電方法 |
| CN101969736A (zh) * | 2010-11-03 | 2011-02-09 | 北京聚星创源科技有限公司 | 离子发生系统及控制离子平衡度的方法 |
| US9588161B2 (en) | 2010-12-07 | 2017-03-07 | Desco Industries, Inc. | Ionization balance device with shielded capacitor circuit for ion balance measurements and adjustments |
| WO2013085952A1 (en) | 2011-12-08 | 2013-06-13 | 3M Innovative Properties Company | An ionization monitoring device and method |
| JP5945928B2 (ja) * | 2012-03-30 | 2016-07-05 | Smc株式会社 | 電荷発生装置 |
| DE102012207219B4 (de) | 2012-04-30 | 2017-11-23 | Gema Switzerland Gmbh | Antistatikvorrichtung und zugehöriges Betriebsverfahren |
| KR101750740B1 (ko) * | 2013-04-11 | 2017-06-27 | 가부시키가이샤 고가네이 | 이온 발생기 |
| CN103354693A (zh) * | 2013-06-14 | 2013-10-16 | 苏州天华超净科技股份有限公司 | 静电消除系统 |
| WO2015076155A1 (ja) * | 2013-11-20 | 2015-05-28 | 株式会社コガネイ | イオン発生器 |
| US11337783B2 (en) * | 2014-10-22 | 2022-05-24 | Ivoclar Vivadent Ag | Dental machine tool |
| US10251251B2 (en) * | 2016-02-03 | 2019-04-02 | Yi Jing Technology Co., Ltd | Electrostatic dissipation device with static sensing and method thereof |
| US10548206B2 (en) * | 2017-09-05 | 2020-01-28 | International Business Machines Corporation | Automated static control |
| WO2019175952A1 (ja) | 2018-03-13 | 2019-09-19 | 株式会社 エー・アンド・デイ | 除電器、除電器を備えた電子天びん、および除電方法 |
| JP6740299B2 (ja) * | 2018-08-24 | 2020-08-12 | ファナック株式会社 | 加工条件調整装置及び機械学習装置 |
| KR102346822B1 (ko) * | 2019-09-17 | 2022-01-04 | (주)선재하이테크 | 이온 밸런스의 감시 및 이온 밸런스의 자동 조정 기능을 구비한 바 타입 이오나이저 |
| KR102295099B1 (ko) | 2019-10-04 | 2021-08-31 | 한국전자기술연구원 | 이온밸런스 측정센서 및 그 측정방법, 이온밸런스 측정센서를 이용한 이온밸런스 조절장치 및 그 조절방법 |
| KR102382561B1 (ko) * | 2020-02-21 | 2022-04-04 | 에스케이하이닉스 주식회사 | 이온 발생기의 모니터링 장치 및 시스템 |
| JP7433719B2 (ja) * | 2020-04-10 | 2024-02-20 | 株式会社ディスコ | 加工装置 |
| WO2022092376A1 (ko) * | 2020-11-02 | 2022-05-05 | 한국전자기술연구원 | 이온밸런스 측정센서 및 그 측정방법, 이온밸런스 측정센서를 이용한 이온밸런스 조절장치 및 그 조절방법 |
| KR20230000757A (ko) * | 2021-06-25 | 2023-01-03 | (주)선재하이테크 | 광 이오나이저 |
| US11785697B2 (en) * | 2022-01-07 | 2023-10-10 | Universal City Studios Llc | Systems and methods for monitoring electrostatic buildup for an attraction system |
| TWI858502B (zh) * | 2023-01-11 | 2024-10-11 | 有銳有限公司 | 用於靜電消除設備的離子平衡監控系統與其運作方法 |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4630167A (en) | 1985-03-11 | 1986-12-16 | Cybergen Systems, Inc. | Static charge neutralizing system and method |
| DE3603947A1 (de) | 1986-02-06 | 1987-08-13 | Stiehl Hans Henrich Dr | System zur dosierung von luftgetragenen ionen mit hoher genauigkeit und verbessertem wirkungsgrad zur eliminierung elektrostatischer flaechenladungen |
| US4951172A (en) | 1988-07-20 | 1990-08-21 | Ion Systems, Inc. | Method and apparatus for regulating air ionization |
| JPH03266398A (ja) | 1990-03-14 | 1991-11-27 | Kasuga Denki Kk | 除電器のイオンバランス制御装置 |
| JPH11135293A (ja) | 1997-10-24 | 1999-05-21 | Keyence Corp | 除電装置 |
| EP0987929A2 (en) | 1998-09-18 | 2000-03-22 | Illinois Tool Works Inc. | Ionization system |
| US6252233B1 (en) | 1998-09-18 | 2001-06-26 | Illinois Tool Works Inc. | Instantaneous balance control scheme for ionizer |
| JP2003217892A (ja) | 2002-01-22 | 2003-07-31 | Takayanagi Kenkyusho:Kk | 静電位イオンバランス測定器および除電装置 |
| US6873515B2 (en) | 2002-04-17 | 2005-03-29 | United Microelectronics Corp. | Method for preventing electrostatic discharge in a clean room |
| DE102004043605A1 (de) | 2003-09-09 | 2005-05-19 | Smc Corp. | Verfahren und Vorrichtung zur statischen Entladung |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2894464B2 (ja) | 1992-01-16 | 1999-05-24 | 高砂熱学工業株式会社 | イオナイザによる帯電物品の除電制御法 |
| EP1448029A3 (en) * | 1992-08-14 | 2010-01-27 | Hamamatsu Photonics K.K. | Apparatus and method for producing gaseous ions by use of x-rays, and various apparatuses and structures using them |
| JP2003068497A (ja) | 2001-08-29 | 2003-03-07 | Kasuga Electric Works Ltd | 直流除電器の制御方法及び制御装置 |
| JP2004063427A (ja) | 2002-07-31 | 2004-02-26 | Sunx Ltd | 除電装置 |
| JP4184213B2 (ja) * | 2003-09-25 | 2008-11-19 | 修二 高石 | イオン発生量制御方法及びイオナイザー |
-
2005
- 2005-11-25 JP JP2005340027A patent/JP4910207B2/ja not_active Expired - Fee Related
-
2006
- 2006-11-21 US US11/562,211 patent/US7586731B2/en active Active
- 2006-11-21 DE DE102006055121.4A patent/DE102006055121B4/de active Active
- 2006-11-24 CN CN2006101628437A patent/CN1972551B/zh active Active
- 2006-11-24 KR KR1020060116762A patent/KR100853726B1/ko active Active
- 2006-11-24 TW TW095143578A patent/TW200738072A/zh unknown
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4630167A (en) | 1985-03-11 | 1986-12-16 | Cybergen Systems, Inc. | Static charge neutralizing system and method |
| DE3603947A1 (de) | 1986-02-06 | 1987-08-13 | Stiehl Hans Henrich Dr | System zur dosierung von luftgetragenen ionen mit hoher genauigkeit und verbessertem wirkungsgrad zur eliminierung elektrostatischer flaechenladungen |
| US4951172A (en) | 1988-07-20 | 1990-08-21 | Ion Systems, Inc. | Method and apparatus for regulating air ionization |
| JPH03266398A (ja) | 1990-03-14 | 1991-11-27 | Kasuga Denki Kk | 除電器のイオンバランス制御装置 |
| JPH11135293A (ja) | 1997-10-24 | 1999-05-21 | Keyence Corp | 除電装置 |
| EP0987929A2 (en) | 1998-09-18 | 2000-03-22 | Illinois Tool Works Inc. | Ionization system |
| US6252233B1 (en) | 1998-09-18 | 2001-06-26 | Illinois Tool Works Inc. | Instantaneous balance control scheme for ionizer |
| JP2003217892A (ja) | 2002-01-22 | 2003-07-31 | Takayanagi Kenkyusho:Kk | 静電位イオンバランス測定器および除電装置 |
| US6873515B2 (en) | 2002-04-17 | 2005-03-29 | United Microelectronics Corp. | Method for preventing electrostatic discharge in a clean room |
| DE102004043605A1 (de) | 2003-09-09 | 2005-05-19 | Smc Corp. | Verfahren und Vorrichtung zur statischen Entladung |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102006055121A1 (de) | 2007-05-31 |
| KR20070055393A (ko) | 2007-05-30 |
| US7586731B2 (en) | 2009-09-08 |
| CN1972551A (zh) | 2007-05-30 |
| JP4910207B2 (ja) | 2012-04-04 |
| TWI326191B (https=) | 2010-06-11 |
| JP2007149419A (ja) | 2007-06-14 |
| US20070133145A1 (en) | 2007-06-14 |
| KR100853726B1 (ko) | 2008-08-22 |
| CN1972551B (zh) | 2011-05-04 |
| TW200738072A (en) | 2007-10-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| R016 | Response to examination communication | ||
| R016 | Response to examination communication | ||
| R016 | Response to examination communication | ||
| R016 | Response to examination communication | ||
| R016 | Response to examination communication | ||
| R018 | Grant decision by examination section/examining division | ||
| R020 | Patent grant now final |