TWI326191B - - Google Patents

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Publication number
TWI326191B
TWI326191B TW095143578A TW95143578A TWI326191B TW I326191 B TWI326191 B TW I326191B TW 095143578 A TW095143578 A TW 095143578A TW 95143578 A TW95143578 A TW 95143578A TW I326191 B TWI326191 B TW I326191B
Authority
TW
Taiwan
Prior art keywords
positive
workpiece
static elimination
ion
negative
Prior art date
Application number
TW095143578A
Other languages
English (en)
Chinese (zh)
Other versions
TW200738072A (en
Inventor
Toshio Sato
Satoshi Suzuki
Original Assignee
Smc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Smc Corp filed Critical Smc Corp
Publication of TW200738072A publication Critical patent/TW200738072A/zh
Application granted granted Critical
Publication of TWI326191B publication Critical patent/TWI326191B/zh

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge
    • H01T19/04—Devices providing for corona discharge having pointed electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Elimination Of Static Electricity (AREA)
TW095143578A 2005-11-25 2006-11-24 Ion balance adjusting method and method of removing charges from workpiece by using the same TW200738072A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005340027A JP4910207B2 (ja) 2005-11-25 2005-11-25 イオンバランス調整方法及びそれを用いたワークの除電方法

Publications (2)

Publication Number Publication Date
TW200738072A TW200738072A (en) 2007-10-01
TWI326191B true TWI326191B (https=) 2010-06-11

Family

ID=38037958

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095143578A TW200738072A (en) 2005-11-25 2006-11-24 Ion balance adjusting method and method of removing charges from workpiece by using the same

Country Status (6)

Country Link
US (1) US7586731B2 (https=)
JP (1) JP4910207B2 (https=)
KR (1) KR100853726B1 (https=)
CN (1) CN1972551B (https=)
DE (1) DE102006055121B4 (https=)
TW (1) TW200738072A (https=)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
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KR100759587B1 (ko) * 2005-04-19 2007-09-17 (주)선재하이테크 막대형 이오나이저
JP5097514B2 (ja) * 2007-11-22 2012-12-12 国立大学法人東京工業大学 ワイヤ電極式イオナイザ
JP5299989B2 (ja) * 2007-12-06 2013-09-25 ヒューグルエレクトロニクス株式会社 イオナイザ
KR100944078B1 (ko) * 2008-01-28 2010-02-24 한국원자력연구원 이온 발생 장치 및 이온 발생 방법
JP5212787B2 (ja) * 2008-02-28 2013-06-19 Ｓｍｃ株式会社 イオナイザ
JP5201338B2 (ja) * 2008-07-08 2013-06-05 Ｓｍｃ株式会社 イオナイザ
CN102106051B (zh) * 2008-08-01 2015-03-25 夏普株式会社 照明装置
JP5336949B2 (ja) * 2009-06-30 2013-11-06 サントリーホールディングス株式会社 樹脂製容器の帯電除去方法、樹脂製容器の殺菌充填方法、樹脂製容器の充填キャッピング方法、樹脂製容器の帯電除去装置および樹脂製容器の殺菌充填システム
JP5435423B2 (ja) 2009-12-09 2014-03-05 Ｓｍｃ株式会社 イオナイザ及び除電方法
CN101969736A (zh) * 2010-11-03 2011-02-09 北京聚星创源科技有限公司 离子发生系统及控制离子平衡度的方法
US9588161B2 (en) 2010-12-07 2017-03-07 Desco Industries, Inc. Ionization balance device with shielded capacitor circuit for ion balance measurements and adjustments
WO2013085952A1 (en) 2011-12-08 2013-06-13 3M Innovative Properties Company An ionization monitoring device and method
JP5945928B2 (ja) * 2012-03-30 2016-07-05 Smc株式会社 電荷発生装置
DE102012207219B4 (de) 2012-04-30 2017-11-23 Gema Switzerland Gmbh Antistatikvorrichtung und zugehöriges Betriebsverfahren
KR101750740B1 (ko) * 2013-04-11 2017-06-27 가부시키가이샤 고가네이 이온 발생기
CN103354693A (zh) * 2013-06-14 2013-10-16 苏州天华超净科技股份有限公司 静电消除系统
WO2015076155A1 (ja) * 2013-11-20 2015-05-28 株式会社コガネイ イオン発生器
US11337783B2 (en) * 2014-10-22 2022-05-24 Ivoclar Vivadent Ag Dental machine tool
US10251251B2 (en) * 2016-02-03 2019-04-02 Yi Jing Technology Co., Ltd Electrostatic dissipation device with static sensing and method thereof
US10548206B2 (en) * 2017-09-05 2020-01-28 International Business Machines Corporation Automated static control
WO2019175952A1 (ja) 2018-03-13 2019-09-19 株式会社 エー・アンド・デイ 除電器、除電器を備えた電子天びん、および除電方法
JP6740299B2 (ja) * 2018-08-24 2020-08-12 ファナック株式会社 加工条件調整装置及び機械学習装置
KR102346822B1 (ko) * 2019-09-17 2022-01-04 (주)선재하이테크 이온 밸런스의 감시 및 이온 밸런스의 자동 조정 기능을 구비한 바 타입 이오나이저
KR102295099B1 (ko) 2019-10-04 2021-08-31 한국전자기술연구원 이온밸런스 측정센서 및 그 측정방법, 이온밸런스 측정센서를 이용한 이온밸런스 조절장치 및 그 조절방법
KR102382561B1 (ko) * 2020-02-21 2022-04-04 에스케이하이닉스 주식회사 이온 발생기의 모니터링 장치 및 시스템
JP7433719B2 (ja) * 2020-04-10 2024-02-20 株式会社ディスコ 加工装置
WO2022092376A1 (ko) * 2020-11-02 2022-05-05 한국전자기술연구원 이온밸런스 측정센서 및 그 측정방법, 이온밸런스 측정센서를 이용한 이온밸런스 조절장치 및 그 조절방법
KR20230000757A (ko) * 2021-06-25 2023-01-03 (주)선재하이테크 광 이오나이저
US11785697B2 (en) * 2022-01-07 2023-10-10 Universal City Studios Llc Systems and methods for monitoring electrostatic buildup for an attraction system
TWI858502B (zh) * 2023-01-11 2024-10-11 有銳有限公司 用於靜電消除設備的離子平衡監控系統與其運作方法

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DE3603947A1 (de) 1986-02-06 1987-08-13 Stiehl Hans Henrich Dr System zur dosierung von luftgetragenen ionen mit hoher genauigkeit und verbessertem wirkungsgrad zur eliminierung elektrostatischer flaechenladungen
US4951172A (en) * 1988-07-20 1990-08-21 Ion Systems, Inc. Method and apparatus for regulating air ionization
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JP2894464B2 (ja) 1992-01-16 1999-05-24 高砂熱学工業株式会社 イオナイザによる帯電物品の除電制御法
EP1448029A3 (en) * 1992-08-14 2010-01-27 Hamamatsu Photonics K.K. Apparatus and method for producing gaseous ions by use of x-rays, and various apparatuses and structures using them
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US6252233B1 (en) 1998-09-18 2001-06-26 Illinois Tool Works Inc. Instantaneous balance control scheme for ionizer
US6252756B1 (en) 1998-09-18 2001-06-26 Illinois Tool Works Inc. Low voltage modular room ionization system
JP2003068497A (ja) 2001-08-29 2003-03-07 Kasuga Electric Works Ltd 直流除電器の制御方法及び制御装置
JP4058273B2 (ja) * 2002-01-22 2008-03-05 株式会社Ｔｒｉｎｃ 静電位イオンバランス測定器および除電装置
US6873515B2 (en) 2002-04-17 2005-03-29 United Microelectronics Corp. Method for preventing electrostatic discharge in a clean room
JP2004063427A (ja) 2002-07-31 2004-02-26 Sunx Ltd 除電装置
US20050052815A1 (en) 2003-09-09 2005-03-10 Smc Corporation Static eliminating method and apparatus therefor
JP4184213B2 (ja) * 2003-09-25 2008-11-19 修二 高石 イオン発生量制御方法及びイオナイザー

Also Published As

Publication number Publication date
DE102006055121B4 (de) 2018-11-29
DE102006055121A1 (de) 2007-05-31
KR20070055393A (ko) 2007-05-30
US7586731B2 (en) 2009-09-08
CN1972551A (zh) 2007-05-30
JP4910207B2 (ja) 2012-04-04
JP2007149419A (ja) 2007-06-14
US20070133145A1 (en) 2007-06-14
KR100853726B1 (ko) 2008-08-22
CN1972551B (zh) 2011-05-04
TW200738072A (en) 2007-10-01

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