CN1979883B - 固态成像器件和成像设备 - Google Patents

固态成像器件和成像设备 Download PDF

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Publication number
CN1979883B
CN1979883B CN2006101618897A CN200610161889A CN1979883B CN 1979883 B CN1979883 B CN 1979883B CN 2006101618897 A CN2006101618897 A CN 2006101618897A CN 200610161889 A CN200610161889 A CN 200610161889A CN 1979883 B CN1979883 B CN 1979883B
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gate electrode
type
pixel
element isolation
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CN2006101618897A
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Chinese (zh)
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CN1979883A (zh
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糸长总一郎
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Sony Semiconductor Solutions Corp
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Sony Corp
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/807—Pixel isolation structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/014—Manufacture or treatment of image sensors covered by group H10F39/12 of CMOS image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H10F39/8027—Geometry of the photosensitive area
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H10F39/80373—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor characterised by the gate of the transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/811—Interconnections

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  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
CN2006101618897A 2005-12-05 2006-12-05 固态成像器件和成像设备 Active CN1979883B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005-351368 2005-12-05
JP2005351368 2005-12-05
JP2005351368A JP5320659B2 (ja) 2005-12-05 2005-12-05 固体撮像装置

Publications (2)

Publication Number Publication Date
CN1979883A CN1979883A (zh) 2007-06-13
CN1979883B true CN1979883B (zh) 2012-10-31

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CN2006101618897A Active CN1979883B (zh) 2005-12-05 2006-12-05 固态成像器件和成像设备

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US (5) US8507960B2 (enExample)
JP (1) JP5320659B2 (enExample)
KR (1) KR101323544B1 (enExample)
CN (1) CN1979883B (enExample)
TW (1) TWI340464B (enExample)

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JP5320659B2 (ja) * 2005-12-05 2013-10-23 ソニー株式会社 固体撮像装置
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US8072015B2 (en) 2007-06-04 2011-12-06 Sony Corporation Solid-state imaging device and manufacturing method thereof
JP5292787B2 (ja) * 2007-11-30 2013-09-18 ソニー株式会社 固体撮像装置及びカメラ
EP2109143B1 (en) * 2008-04-09 2013-05-29 Sony Corporation Solid-state imaging device, production method thereof, and electronic device
JP2009277722A (ja) * 2008-05-12 2009-11-26 Panasonic Corp 固体撮像装置及びその製造方法
EP2445008B1 (en) * 2008-08-11 2015-03-04 Honda Motor Co., Ltd. Imaging device and image forming method
JP5444694B2 (ja) 2008-11-12 2014-03-19 ソニー株式会社 固体撮像装置、その製造方法および撮像装置
MX2011006316A (es) * 2008-12-16 2011-09-01 Hiok Nam Tay Sensores de imagen de cancelacion de ruido.
JP5564874B2 (ja) * 2009-09-25 2014-08-06 ソニー株式会社 固体撮像装置、及び電子機器
FR2954587B1 (fr) * 2009-11-10 2012-07-20 St Microelectronics Sa Procede de formation d'un capteur d'images eclaire par la face arriere
JP2011114302A (ja) 2009-11-30 2011-06-09 Sony Corp 半導体素子の製造方法及び半導体素子、並びに固体撮像素子及び固体撮像装置
JP5621266B2 (ja) 2010-01-27 2014-11-12 ソニー株式会社 固体撮像装置とその製造方法、並びに電子機器
JP5810575B2 (ja) * 2011-03-25 2015-11-11 ソニー株式会社 固体撮像装置、および、その製造方法、電子機器
US8883544B2 (en) * 2012-05-04 2014-11-11 Taiwan Semiconductor Manufacturing Company, Ltd. Method of forming an image device
CN103383947B (zh) * 2012-05-04 2016-06-08 台湾积体电路制造股份有限公司 图像装置及其形成方法
WO2014002361A1 (ja) * 2012-06-26 2014-01-03 パナソニック株式会社 固体撮像装置及びその製造方法
US20140110805A1 (en) 2012-10-18 2014-04-24 Infineon Technologies Dresden Gmbh Silicon light trap devices, systems and methods
JP2014187270A (ja) * 2013-03-25 2014-10-02 Sony Corp 固体撮像装置およびその製造方法、並びに電子機器
US8957490B2 (en) * 2013-06-28 2015-02-17 Infineon Technologies Dresden Gmbh Silicon light trap devices
JP6121837B2 (ja) * 2013-08-02 2017-04-26 ソニーセミコンダクタソリューションズ株式会社 撮像素子
CN104517976B (zh) * 2013-09-30 2018-03-30 中芯国际集成电路制造(北京)有限公司 Cmos图像传感器的像素结构及其形成方法
JP5725232B2 (ja) * 2014-04-21 2015-05-27 ソニー株式会社 固体撮像装置及びカメラ
JP2016001709A (ja) * 2014-06-12 2016-01-07 キヤノン株式会社 固体撮像装置の製造方法
JP2016046336A (ja) * 2014-08-21 2016-04-04 ソニー株式会社 固体撮像素子および製造方法、並びに放射線撮像装置
CN107195645B (zh) * 2016-03-14 2023-10-03 松下知识产权经营株式会社 摄像装置
CN109244088B (zh) * 2017-07-10 2022-02-01 中芯国际集成电路制造(上海)有限公司 一种半导体器件及其制备方法、电子装置
KR102542614B1 (ko) * 2017-10-30 2023-06-15 삼성전자주식회사 이미지 센서
TWI834644B (zh) * 2018-05-18 2024-03-11 日商索尼半導體解決方案公司 攝像元件及電子機器
KR102785835B1 (ko) * 2020-05-25 2025-03-26 에스케이하이닉스 주식회사 이미지 센싱 장치
CN112885931B (zh) * 2021-01-08 2022-09-06 广东顺德侨安电子有限公司 一种光电转换装置的形成方法

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JP4539176B2 (ja) * 2004-05-31 2010-09-08 ソニー株式会社 固体撮像素子及びその製造方法
JP4595464B2 (ja) * 2004-09-22 2010-12-08 ソニー株式会社 Ｃｍｏｓ固体撮像素子の製造方法
JP4742602B2 (ja) * 2005-02-01 2011-08-10 ソニー株式会社 固体撮像装置及びその製造方法
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Also Published As

Publication number Publication date
KR101323544B1 (ko) 2013-10-29
US9887226B2 (en) 2018-02-06
US20070128954A1 (en) 2007-06-07
US8507960B2 (en) 2013-08-13
TWI340464B (en) 2011-04-11
US20180138217A1 (en) 2018-05-17
JP2007158031A (ja) 2007-06-21
TW200733371A (en) 2007-09-01
US20160204148A1 (en) 2016-07-14
US9640573B2 (en) 2017-05-02
US20130299887A1 (en) 2013-11-14
JP5320659B2 (ja) 2013-10-23
CN1979883A (zh) 2007-06-13
US9318523B2 (en) 2016-04-19
KR20070058991A (ko) 2007-06-11
US20170194369A1 (en) 2017-07-06

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Effective date of registration: 20161229

Address after: Kanagawa Japan Atsugi Asahi 4-14-1

Patentee after: SONY semiconductor solutions

Address before: Tokyo, Japan, Japan

Patentee before: Sony Corp.