CN104517976B - Cmos图像传感器的像素结构及其形成方法 - Google Patents
Cmos图像传感器的像素结构及其形成方法 Download PDFInfo
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- CN104517976B CN104517976B CN201310461748.7A CN201310461748A CN104517976B CN 104517976 B CN104517976 B CN 104517976B CN 201310461748 A CN201310461748 A CN 201310461748A CN 104517976 B CN104517976 B CN 104517976B
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
Claims (20)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310461748.7A CN104517976B (zh) | 2013-09-30 | 2013-09-30 | Cmos图像传感器的像素结构及其形成方法 |
US14/283,426 US9059068B2 (en) | 2013-09-30 | 2014-05-21 | Pixel structures of CMOS imaging sensors and fabrication method thereof |
US14/685,905 US9123606B2 (en) | 2013-09-30 | 2015-04-14 | Pixel structures of CMOS imaging sensors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310461748.7A CN104517976B (zh) | 2013-09-30 | 2013-09-30 | Cmos图像传感器的像素结构及其形成方法 |
Publications (2)
Publication Number | Publication Date |
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CN104517976A CN104517976A (zh) | 2015-04-15 |
CN104517976B true CN104517976B (zh) | 2018-03-30 |
Family
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Family Applications (1)
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CN201310461748.7A Active CN104517976B (zh) | 2013-09-30 | 2013-09-30 | Cmos图像传感器的像素结构及其形成方法 |
Country Status (2)
Country | Link |
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US (2) | US9059068B2 (zh) |
CN (1) | CN104517976B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140312386A1 (en) * | 2009-09-02 | 2014-10-23 | Pixart Imaging Incorporation | Optoelectronic device having photodiodes for different wavelengths and process for making same |
CN105206633A (zh) * | 2015-08-14 | 2015-12-30 | 豪威科技(上海)有限公司 | 一种图像传感器芯片及制造方法 |
US9812489B2 (en) * | 2015-11-09 | 2017-11-07 | Semiconductor Components Industries, Llc | Pixels with photodiodes formed from epitaxial silicon |
US9997615B2 (en) * | 2015-11-30 | 2018-06-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for forming semiconductor structure with epitaxial growth structure |
CN109314500A (zh) | 2016-06-09 | 2019-02-05 | 株式会社村田制作所 | 弹性波装置 |
US10121805B2 (en) * | 2017-03-09 | 2018-11-06 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor structure and method for manufacturing the same |
DE102017121693B4 (de) * | 2017-09-19 | 2022-12-08 | Infineon Technologies Ag | Dotierungsverfahren |
US11670650B2 (en) * | 2019-09-27 | 2023-06-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and method of manufacturing the same |
CN110854146B (zh) * | 2019-11-19 | 2024-03-12 | 上海华力微电子有限公司 | 一种改善小像素cmos图像传感器性能的结构和工艺方法 |
CN111223884B (zh) * | 2020-03-10 | 2022-08-09 | 厦门安明丽光电科技有限公司 | 一种光电感测器及其制造方法 |
US11611002B2 (en) | 2020-07-22 | 2023-03-21 | Globalfoundries U.S. Inc. | Photodiode and/or pin diode structures |
CN111933651B (zh) * | 2020-08-13 | 2024-01-30 | 锐芯微电子股份有限公司 | 图像传感器的像素结构及其形成方法 |
US11424377B2 (en) * | 2020-10-08 | 2022-08-23 | Globalfoundries U.S. Inc. | Photodiode with integrated, light focusing element |
Citations (1)
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CN102332463A (zh) * | 2011-08-11 | 2012-01-25 | 上海中科高等研究院 | 带有绝缘埋层的图像传感器及其制作方法 |
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US7148528B2 (en) * | 2003-07-02 | 2006-12-12 | Micron Technology, Inc. | Pinned photodiode structure and method of formation |
KR100619396B1 (ko) * | 2003-12-31 | 2006-09-11 | 동부일렉트로닉스 주식회사 | 시모스 이미지 센서 및 그 제조방법 |
US7332737B2 (en) * | 2004-06-22 | 2008-02-19 | Micron Technology, Inc. | Isolation trench geometry for image sensors |
US7262110B2 (en) * | 2004-08-23 | 2007-08-28 | Micron Technology, Inc. | Trench isolation structure and method of formation |
KR100672679B1 (ko) * | 2004-12-30 | 2007-01-22 | 동부일렉트로닉스 주식회사 | 시모스 이미지 센서의 광감지 소자 및 그의 제조방법 |
KR100694470B1 (ko) * | 2005-07-11 | 2007-03-12 | 매그나칩 반도체 유한회사 | 이미지 센서 제조 방법 |
KR20070000817A (ko) * | 2005-06-28 | 2007-01-03 | 매그나칩 반도체 유한회사 | 씨모스 이미지 센서 및 그 제조 방법 |
KR100657143B1 (ko) * | 2005-07-11 | 2006-12-13 | 매그나칩 반도체 유한회사 | 이미지 센서 및 그 제조 방법 |
JP5320659B2 (ja) * | 2005-12-05 | 2013-10-23 | ソニー株式会社 | 固体撮像装置 |
US7659564B2 (en) * | 2006-02-14 | 2010-02-09 | International Business Machines Corporation | CMOS imager photodiode with enhanced capacitance |
KR100851494B1 (ko) * | 2007-05-14 | 2008-08-08 | 매그나칩 반도체 유한회사 | 수직적으로 집적된 세트 및 리셋 다이오드를 갖는 cmos이미지 센서를 위한 소형 픽셀 |
US20080299700A1 (en) * | 2007-05-28 | 2008-12-04 | Bang-Chiang Lan | Method for fabricating photodiode |
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