CN115102362B - 运输系统及其控制方法及制造制品的方法 - Google Patents

运输系统及其控制方法及制造制品的方法

Info

Publication number
CN115102362B
CN115102362B CN202210835118.0A CN202210835118A CN115102362B CN 115102362 B CN115102362 B CN 115102362B CN 202210835118 A CN202210835118 A CN 202210835118A CN 115102362 B CN115102362 B CN 115102362B
Authority
CN
China
Prior art keywords
mover
magnet
coils
permanent magnets
magnet groups
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202210835118.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN115102362A (zh
Inventor
山本武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority claimed from CN201910716617.6A external-priority patent/CN110829781B/zh
Publication of CN115102362A publication Critical patent/CN115102362A/zh
Application granted granted Critical
Publication of CN115102362B publication Critical patent/CN115102362B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08Control devices operated by article or material being fed, conveyed or discharged
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00Non-mechanical conveyors not otherwise provided for
    • B65G54/02Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K11/00Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21Devices for sensing speed or position, or actuated thereby
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06Linear motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06Linear motors
    • H02P25/064Linear motors of the synchronous type
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/14Electronic commutators
    • H02P6/16Circuit arrangements for detecting position
    • H02P6/17Circuit arrangements for detecting position and for generating speed information
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00Indexing codes relating to the kind or type of conveyors
    • B65G2812/99Conveyor systems not otherwise provided for
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K2213/00Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/03Machines characterised by numerical values, ranges, mathematical expressions or similar information

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Linear Motors (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Non-Mechanical Conveyors (AREA)
CN202210835118.0A 2018-08-08 2019-08-05 运输系统及其控制方法及制造制品的方法 Active CN115102362B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2018-149579 2018-08-08
JP2018149579 2018-08-08
JP2018-231005 2018-12-10
JP2018231005A JP6938457B2 (ja) 2018-08-08 2018-12-10 搬送システム、可動子、制御装置及び制御方法
CN201910716617.6A CN110829781B (zh) 2018-08-08 2019-08-05 运输系统、动子、控制设备及控制方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201910716617.6A Division CN110829781B (zh) 2018-08-08 2019-08-05 运输系统、动子、控制设备及控制方法

Publications (2)

Publication Number Publication Date
CN115102362A CN115102362A (zh) 2022-09-23
CN115102362B true CN115102362B (zh) 2025-09-23

Family

ID=69620527

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210835118.0A Active CN115102362B (zh) 2018-08-08 2019-08-05 运输系统及其控制方法及制造制品的方法

Country Status (4)

Country Link
US (2) US11777388B2 (enExample)
JP (3) JP6938457B2 (enExample)
KR (2) KR102504956B1 (enExample)
CN (1) CN115102362B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7767007B2 (ja) 2020-12-10 2025-11-11 キヤノン株式会社 成膜システム、成膜システムの制御方法、物品の製造方法
DE102022205059A1 (de) 2021-06-08 2022-12-08 Canon Kabushiki Kaisha Transportsystem und steuerverfahren eines transportsystems
JP2023018336A (ja) * 2021-07-27 2023-02-08 キヤノン株式会社 成膜装置、成膜方法、および物品の製造方法
JP7757072B2 (ja) 2021-07-28 2025-10-21 キヤノン株式会社 搬送システム、搬送システムの制御方法、加工システム、物品の製造方法及びモータ
JP2023072266A (ja) 2021-11-12 2023-05-24 三菱重工エンジニアリング株式会社 二酸化炭素回収システム
JP2023083978A (ja) * 2021-12-06 2023-06-16 キヤノン株式会社 搬送システム
CN114301186B (zh) * 2021-12-29 2024-07-09 湖南大学 一种高温超导悬浮式无线电能传输装置及其组装方法
WO2023148859A1 (ja) * 2022-02-02 2023-08-10 三菱電機株式会社 搬送システム、搬送モジュール及びインバータユニット
EP4472875A1 (de) * 2022-02-04 2024-12-11 TGW Mechanics GmbH Verfahren zum ansteuern von transportträgern und transportträger zum transport von hängeware an einer hängefördervorrichtung
JP2023174388A (ja) * 2022-05-27 2023-12-07 キヤノン株式会社 搬送システム、成膜装置、搬送システムの制御方法及び物品の製造方法
CN119596734A (zh) * 2023-09-08 2025-03-11 施耐德电气(中国)有限公司 双稳态永磁机构的控制电路及控制方法
CN118650509B (zh) * 2024-06-24 2025-03-18 复旦大学宁波研究院 一种半导体研磨主轴及半导体研磨设备

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5032975A (en) 1987-08-07 1991-07-16 Canon Kabushiki Kaisha Controller for automatic assembling apparatus
JPH0734645B2 (ja) * 1988-05-13 1995-04-12 旭化成工業株式会社 可動磁石リニア直流モータ
JP3115297B2 (ja) 1989-10-09 2000-12-04 キヤノン株式会社 自動装置の制御装置
US6246204B1 (en) * 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6078663A (en) 1995-06-30 2000-06-20 Canon Kabushiki Kaisha Communication apparatus and a communication system
JP3745167B2 (ja) * 1998-07-29 2006-02-15 キヤノン株式会社 ステージ装置、露光装置およびデバイス製造方法ならびにステージ駆動方法
US6462491B1 (en) 1999-01-27 2002-10-08 Matsushita Electric Industrial Co., Ltd. Position sensorless motor control apparatus
JP2001230305A (ja) 2000-02-18 2001-08-24 Canon Inc 支持装置
JP4474020B2 (ja) * 2000-06-23 2010-06-02 キヤノン株式会社 移動装置及び露光装置
JP4532712B2 (ja) 2000-09-29 2010-08-25 キヤノン株式会社 電子機器
JP3826039B2 (ja) 2002-01-22 2006-09-27 キヤノン株式会社 信号処理装置
JP4109902B2 (ja) 2002-05-27 2008-07-02 キヤノン株式会社 表示装置
US7375479B2 (en) 2002-12-16 2008-05-20 Koninklijke Philips Electronics, N.V. Apparatus for processing an object with high position accurancy
US6952086B1 (en) * 2003-10-10 2005-10-04 Curtiss-Wright Electro-Mechanical Corporation Linear position sensing system and coil switching methods for closed-loop control of large linear induction motor systems
US7557529B2 (en) * 2005-01-11 2009-07-07 Nikon Corporation Stage unit and exposure apparatus
EP1850370A1 (en) 2005-01-11 2007-10-31 Nikon Corporation Stage apparatus and exposure apparatus
DE102005013349A1 (de) * 2005-03-23 2006-10-05 Bosch Rexroth Aktiengesellschaft Linearmotor und Verfahren zum Betrieb eines Linearmotors
JP2007053825A (ja) * 2005-08-15 2007-03-01 Nikon Corp ステージ製造方法及び露光装置製造方法
JP2008005665A (ja) 2006-06-26 2008-01-10 Hitachi Ltd 円筒リニアモータ及びそれを用いた車両
JP2008182210A (ja) * 2006-12-27 2008-08-07 Canon Inc ステージ装置、露光装置及びデバイス製造方法
US7898204B2 (en) 2007-01-05 2011-03-01 Active Precision, Inc. High-speed substrate manipulator
JP2008199727A (ja) * 2007-02-09 2008-08-28 Jtekt Corp リニアモータおよびそれを備えた工具移動装置
CN102210082B (zh) 2008-11-11 2014-07-23 钱蒂·森格钱 电机
US8553204B2 (en) 2009-05-20 2013-10-08 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
US8305672B2 (en) * 2010-02-23 2012-11-06 Microvision, Inc. Magnetically actuated system
JP5590137B2 (ja) * 2010-10-26 2014-09-17 村田機械株式会社 離散配置リニアモータシステム
CN102480210B (zh) 2010-11-24 2013-09-25 南京理工大学 模块化、长行程电磁直线执行器及其电流换相方法
JP5750358B2 (ja) 2011-10-28 2015-07-22 山洋電気株式会社 電気機械
DE102012103378A1 (de) * 2012-04-18 2013-10-24 Uhlmann Pac-Systeme Gmbh & Co Kg Transportvorrichtung mit Linearmotorantrieb
JP6373992B2 (ja) 2013-08-06 2018-08-15 ザ・ユニバーシティ・オブ・ブリティッシュ・コロンビア 変位デバイスおよび方法とそれに関連付けられた運動を検出し推定するための装置
KR101531656B1 (ko) 2013-10-16 2015-06-25 한국전기연구원 자기 부상 이송 장치
JP6335603B2 (ja) 2014-04-15 2018-05-30 キヤノン株式会社 台車搬送システム
JP2015230927A (ja) 2014-06-03 2015-12-21 キヤノン株式会社 移動装置、荷電粒子線描画装置
DE102014225171A1 (de) 2014-12-08 2016-06-09 Robert Bosch Gmbh Sicherungssystem für eine Anordnung zum Bewegen von Transportkörpern
EP3032724B1 (de) 2014-12-11 2020-05-13 Siemens Aktiengesellschaft Sekundärteil mit Schablone
JP6521772B2 (ja) 2015-07-07 2019-05-29 キヤノン株式会社 搬送システム及びその制御方法、並びに台車及びその制御方法
JP6704705B2 (ja) 2015-10-22 2020-06-03 キヤノン株式会社 可動磁石型リニアモータ制御システム及びその制御方法
TWI609831B (zh) * 2016-08-16 2018-01-01 Usun Technology Co Ltd 磁性傳動之輸送方法
JP7066333B2 (ja) 2017-05-17 2022-05-13 キヤノン株式会社 搬送システム、加工システム、物品の製造方法、搬送システムの制御方法及び可動機構
US10889449B2 (en) 2017-09-25 2021-01-12 Canon Kabushiki Kaisha Transport system and manufacturing method of article
JP7137300B2 (ja) 2017-09-25 2022-09-14 キヤノン株式会社 搬送装置、搬送システム、搬送システムの制御方法、加工システム及び物品の製造方法
US10965201B2 (en) * 2017-09-25 2021-03-30 Canon Kabushiki Kaisha Transport system, processing system and manufacturing method of article
JP7179488B2 (ja) 2018-05-11 2022-11-29 キヤノン株式会社 搬送システムおよびその制御方法

Also Published As

Publication number Publication date
CN115102362A (zh) 2022-09-23
JP2021184701A (ja) 2021-12-02
US11777388B2 (en) 2023-10-03
US12424918B2 (en) 2025-09-23
JP2023030208A (ja) 2023-03-07
JP2020028212A (ja) 2020-02-20
KR102504956B1 (ko) 2023-03-02
KR102708554B1 (ko) 2024-09-24
JP7208317B2 (ja) 2023-01-18
US20220263398A1 (en) 2022-08-18
US20230421037A1 (en) 2023-12-28
KR20200017339A (ko) 2020-02-18
JP6938457B2 (ja) 2021-09-22
KR20230031875A (ko) 2023-03-07

Similar Documents

Publication Publication Date Title
CN115102362B (zh) 运输系统及其控制方法及制造制品的方法
CN110829781B (zh) 运输系统、动子、控制设备及控制方法
JP7483397B2 (ja) 搬送システム
JP7479835B2 (ja) 搬送装置及び物品の製造方法
KR20220102106A (ko) 반송 시스템, 가공 시스템 및 물품의 제조방법
JP7406897B2 (ja) 搬送装置および物品の製造方法
CN115447978A (zh) 输送系统和输送系统的控制方法
KR102788789B1 (ko) 반송 시스템, 가동 요소, 제어 장치, 제어 방법 및 물품의 제조 방법
JP7451205B2 (ja) 搬送装置および物品の製造方法
WO2020203921A1 (ja) 搬送システム、可動子、制御装置及び制御方法
CN111293855B (zh) 搬送装置以及物品制造方法
JP2021126040A (ja) 搬送装置、生産システム、及び物品の製造方法
JP2021126003A (ja) 搬送装置、可動子、および物品の製造方法
JP7575879B2 (ja) 搬送システム、可動子、制御装置及び制御方法
JP2023083978A (ja) 搬送システム
JP7733552B2 (ja) 搬送システム、加工システム及び物品の製造方法
JP2022187975A (ja) 搬送システム及び搬送システムの制御方法
JP2022072439A (ja) 搬送装置、真空装置、加工システム及び物品の製造方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant