KR102504956B1 - 반송 시스템, 가동자, 제어장치 및 제어 방법 - Google Patents

반송 시스템, 가동자, 제어장치 및 제어 방법 Download PDF

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Publication number
KR102504956B1
KR102504956B1 KR1020190090676A KR20190090676A KR102504956B1 KR 102504956 B1 KR102504956 B1 KR 102504956B1 KR 1020190090676 A KR1020190090676 A KR 1020190090676A KR 20190090676 A KR20190090676 A KR 20190090676A KR 102504956 B1 KR102504956 B1 KR 102504956B1
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South Korea
Prior art keywords
magnet group
mover
magnet
disposed
coil
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KR1020190090676A
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English (en)
Korean (ko)
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KR20200017339A (ko
Inventor
타케시 야마모토
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캐논 가부시끼가이샤
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Priority to KR1020230024714A priority Critical patent/KR102708554B1/ko
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H02P25/064—Linear motors of the synchronous type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/14—Electronic commutators
    • H02P6/16—Circuit arrangements for detecting position
    • H02P6/17—Circuit arrangements for detecting position and for generating speed information
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/99—Conveyor systems not otherwise provided for
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Linear Motors (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Non-Mechanical Conveyors (AREA)
KR1020190090676A 2018-08-08 2019-07-26 반송 시스템, 가동자, 제어장치 및 제어 방법 Active KR102504956B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020230024714A KR102708554B1 (ko) 2018-08-08 2023-02-24 반송 시스템 및 그의 제어 방법

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2018-149579 2018-08-08
JP2018149579 2018-08-08
JP2018231005A JP6938457B2 (ja) 2018-08-08 2018-12-10 搬送システム、可動子、制御装置及び制御方法
JPJP-P-2018-231005 2018-12-10

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020230024714A Division KR102708554B1 (ko) 2018-08-08 2023-02-24 반송 시스템 및 그의 제어 방법

Publications (2)

Publication Number Publication Date
KR20200017339A KR20200017339A (ko) 2020-02-18
KR102504956B1 true KR102504956B1 (ko) 2023-03-02

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KR1020190090676A Active KR102504956B1 (ko) 2018-08-08 2019-07-26 반송 시스템, 가동자, 제어장치 및 제어 방법
KR1020230024714A Active KR102708554B1 (ko) 2018-08-08 2023-02-24 반송 시스템 및 그의 제어 방법

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US (2) US11777388B2 (enExample)
JP (3) JP6938457B2 (enExample)
KR (2) KR102504956B1 (enExample)
CN (1) CN115102362B (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7767007B2 (ja) 2020-12-10 2025-11-11 キヤノン株式会社 成膜システム、成膜システムの制御方法、物品の製造方法
DE102022205059A1 (de) 2021-06-08 2022-12-08 Canon Kabushiki Kaisha Transportsystem und steuerverfahren eines transportsystems
JP2023018336A (ja) * 2021-07-27 2023-02-08 キヤノン株式会社 成膜装置、成膜方法、および物品の製造方法
JP7757072B2 (ja) * 2021-07-28 2025-10-21 キヤノン株式会社 搬送システム、搬送システムの制御方法、加工システム、物品の製造方法及びモータ
JP2023072266A (ja) 2021-11-12 2023-05-24 三菱重工エンジニアリング株式会社 二酸化炭素回収システム
JP2023083978A (ja) * 2021-12-06 2023-06-16 キヤノン株式会社 搬送システム
CN114301186B (zh) * 2021-12-29 2024-07-09 湖南大学 一种高温超导悬浮式无线电能传输装置及其组装方法
JP7204053B1 (ja) * 2022-02-02 2023-01-13 三菱電機株式会社 搬送システム及び搬送モジュール
EP4472875A1 (de) * 2022-02-04 2024-12-11 TGW Mechanics GmbH Verfahren zum ansteuern von transportträgern und transportträger zum transport von hängeware an einer hängefördervorrichtung
JP2023174388A (ja) * 2022-05-27 2023-12-07 キヤノン株式会社 搬送システム、成膜装置、搬送システムの制御方法及び物品の製造方法
CN119596734A (zh) * 2023-09-08 2025-03-11 施耐德电气（中国）有限公司 双稳态永磁机构的控制电路及控制方法
CN118650509B (zh) * 2024-06-24 2025-03-18 复旦大学宁波研究院 一种半导体研磨主轴及半导体研磨设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007053825A (ja) * 2005-08-15 2007-03-01 Nikon Corp ステージ製造方法及び露光装置製造方法
JP2008199727A (ja) * 2007-02-09 2008-08-28 Jtekt Corp リニアモータおよびそれを備えた工具移動装置
US7557529B2 (en) 2005-01-11 2009-07-07 Nikon Corporation Stage unit and exposure apparatus

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5032975A (en) 1987-08-07 1991-07-16 Canon Kabushiki Kaisha Controller for automatic assembling apparatus
JPH0734645B2 (ja) * 1988-05-13 1995-04-12 旭化成工業株式会社 可動磁石リニア直流モータ
JP3115297B2 (ja) 1989-10-09 2000-12-04 キヤノン株式会社 自動装置の制御装置
US6246204B1 (en) * 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
CA2179971C (en) 1995-06-30 2001-10-30 Takahisa Yamamoto An adaptable communication apparatus and an adaptable communication system
JP3745167B2 (ja) 1998-07-29 2006-02-15 キヤノン株式会社 ステージ装置、露光装置およびデバイス製造方法ならびにステージ駆動方法
US6462491B1 (en) 1999-01-27 2002-10-08 Matsushita Electric Industrial Co., Ltd. Position sensorless motor control apparatus
JP2001230305A (ja) 2000-02-18 2001-08-24 Canon Inc 支持装置
JP4474020B2 (ja) * 2000-06-23 2010-06-02 キヤノン株式会社 移動装置及び露光装置
JP4532712B2 (ja) 2000-09-29 2010-08-25 キヤノン株式会社 電子機器
JP3826039B2 (ja) 2002-01-22 2006-09-27 キヤノン株式会社 信号処理装置
JP4109902B2 (ja) 2002-05-27 2008-07-02 キヤノン株式会社 表示装置
CN1726630A (zh) 2002-12-16 2006-01-25 皇家飞利浦电子股份有限公司 以高定位精确度加工一个物体的装置
US6952086B1 (en) * 2003-10-10 2005-10-04 Curtiss-Wright Electro-Mechanical Corporation Linear position sensing system and coil switching methods for closed-loop control of large linear induction motor systems
EP1850370A1 (en) 2005-01-11 2007-10-31 Nikon Corporation Stage apparatus and exposure apparatus
DE102005013349A1 (de) * 2005-03-23 2006-10-05 Bosch Rexroth Aktiengesellschaft Linearmotor und Verfahren zum Betrieb eines Linearmotors
JP2008005665A (ja) 2006-06-26 2008-01-10 Hitachi Ltd 円筒リニアモータ及びそれを用いた車両
JP2008182210A (ja) * 2006-12-27 2008-08-07 Canon Inc ステージ装置、露光装置及びデバイス製造方法
US7898204B2 (en) 2007-01-05 2011-03-01 Active Precision, Inc. High-speed substrate manipulator
US8564228B2 (en) 2008-11-11 2013-10-22 Chanty Sengchanh Electric machine
US8553204B2 (en) 2009-05-20 2013-10-08 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
US8305672B2 (en) * 2010-02-23 2012-11-06 Microvision, Inc. Magnetically actuated system
KR20130085041A (ko) * 2010-10-26 2013-07-26 무라다기카이가부시끼가이샤 이산 배치 리니어 모터 시스템
CN102480210B (zh) 2010-11-24 2013-09-25 南京理工大学 模块化、长行程电磁直线执行器及其电流换相方法
JP5750358B2 (ja) 2011-10-28 2015-07-22 山洋電気株式会社 電気機械
DE102012103378A1 (de) * 2012-04-18 2013-10-24 Uhlmann Pac-Systeme Gmbh & Co Kg Transportvorrichtung mit Linearmotorantrieb
EP3014219B1 (en) 2013-08-06 2017-10-11 The University Of British Columbia Displacement devices and methods and apparatus for detecting and estimating motion associated with same
KR101531656B1 (ko) * 2013-10-16 2015-06-25 한국전기연구원 자기 부상 이송 장치
JP6335603B2 (ja) 2014-04-15 2018-05-30 キヤノン株式会社 台車搬送システム
JP2015230927A (ja) * 2014-06-03 2015-12-21 キヤノン株式会社 移動装置、荷電粒子線描画装置
DE102014225171A1 (de) 2014-12-08 2016-06-09 Robert Bosch Gmbh Sicherungssystem für eine Anordnung zum Bewegen von Transportkörpern
EP3032724B1 (de) 2014-12-11 2020-05-13 Siemens Aktiengesellschaft Sekundärteil mit Schablone
JP6521772B2 (ja) 2015-07-07 2019-05-29 キヤノン株式会社 搬送システム及びその制御方法、並びに台車及びその制御方法
JP6704705B2 (ja) 2015-10-22 2020-06-03 キヤノン株式会社 可動磁石型リニアモータ制御システム及びその制御方法
TWI609831B (zh) * 2016-08-16 2018-01-01 Usun Technology Co Ltd 磁性傳動之輸送方法
JP7066333B2 (ja) 2017-05-17 2022-05-13 キヤノン株式会社 搬送システム、加工システム、物品の製造方法、搬送システムの制御方法及び可動機構
US10889449B2 (en) 2017-09-25 2021-01-12 Canon Kabushiki Kaisha Transport system and manufacturing method of article
US10965201B2 (en) * 2017-09-25 2021-03-30 Canon Kabushiki Kaisha Transport system, processing system and manufacturing method of article
JP7137300B2 (ja) 2017-09-25 2022-09-14 キヤノン株式会社 搬送装置、搬送システム、搬送システムの制御方法、加工システム及び物品の製造方法
JP7179488B2 (ja) 2018-05-11 2022-11-29 キヤノン株式会社 搬送システムおよびその制御方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7557529B2 (en) 2005-01-11 2009-07-07 Nikon Corporation Stage unit and exposure apparatus
JP2007053825A (ja) * 2005-08-15 2007-03-01 Nikon Corp ステージ製造方法及び露光装置製造方法
JP2008199727A (ja) * 2007-02-09 2008-08-28 Jtekt Corp リニアモータおよびそれを備えた工具移動装置

Also Published As

Publication number Publication date
JP7208317B2 (ja) 2023-01-18
US12424918B2 (en) 2025-09-23
KR20200017339A (ko) 2020-02-18
CN115102362B (zh) 2025-09-23
JP6938457B2 (ja) 2021-09-22
KR20230031875A (ko) 2023-03-07
US20230421037A1 (en) 2023-12-28
CN115102362A (zh) 2022-09-23
KR102708554B1 (ko) 2024-09-24
US11777388B2 (en) 2023-10-03
US20220263398A1 (en) 2022-08-18
JP2023030208A (ja) 2023-03-07
JP2020028212A (ja) 2020-02-20
JP2021184701A (ja) 2021-12-02

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