CN1134105C - 适合倒装片安装的表面声波器件 - Google Patents
适合倒装片安装的表面声波器件 Download PDFInfo
- Publication number
- CN1134105C CN1134105C CNB001227378A CN00122737A CN1134105C CN 1134105 C CN1134105 C CN 1134105C CN B001227378 A CNB001227378 A CN B001227378A CN 00122737 A CN00122737 A CN 00122737A CN 1134105 C CN1134105 C CN 1134105C
- Authority
- CN
- China
- Prior art keywords
- pattern
- piezoelectric substrate
- ground connection
- electrode pattern
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
- H03H9/644—Coupled resonator filters having two acoustic tracks
- H03H9/6456—Coupled resonator filters having two acoustic tracks being electrically coupled
- H03H9/6469—Coupled resonator filters having two acoustic tracks being electrically coupled via two connecting electrodes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/058—Holders; Supports for surface acoustic wave devices
- H03H9/059—Holders; Supports for surface acoustic wave devices consisting of mounting pads or bumps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
- H03H9/1071—Mounting in enclosures for surface acoustic wave [SAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the SAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
- H03H9/6483—Ladder SAW filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/72—Networks using surface acoustic waves
- H03H9/725—Duplexers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Wire Bonding (AREA)
Abstract
Description
Claims (7)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP227429/1999 | 1999-08-11 | ||
JP22742999A JP3860364B2 (ja) | 1999-08-11 | 1999-08-11 | 弾性表面波装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1284790A CN1284790A (zh) | 2001-02-21 |
CN1134105C true CN1134105C (zh) | 2004-01-07 |
Family
ID=16860724
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB001227378A Expired - Lifetime CN1134105C (zh) | 1999-08-11 | 2000-08-11 | 适合倒装片安装的表面声波器件 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6417574B1 (zh) |
EP (2) | EP1076414A3 (zh) |
JP (1) | JP3860364B2 (zh) |
KR (1) | KR100679958B1 (zh) |
CN (1) | CN1134105C (zh) |
TW (1) | TW461178B (zh) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100491018B1 (ko) * | 2000-07-21 | 2005-05-24 | 가부시끼가이샤 도시바 | 탄성표면파 필터장치 |
JP2002141771A (ja) * | 2000-08-21 | 2002-05-17 | Murata Mfg Co Ltd | 弾性表面波フィルタ装置 |
ATE544242T1 (de) * | 2000-11-01 | 2012-02-15 | Hitachi Metals Ltd | Hochfrequenz-schaltmodul |
JP2003087080A (ja) | 2001-07-06 | 2003-03-20 | Murata Mfg Co Ltd | 弾性表面波素子及びその製造方法 |
US6930364B2 (en) * | 2001-09-13 | 2005-08-16 | Silicon Light Machines Corporation | Microelectronic mechanical system and methods |
EP1296453B1 (en) * | 2001-09-25 | 2008-11-12 | TDK Corporation | Package substrate for integrated circuit device |
US7148610B2 (en) * | 2002-02-01 | 2006-12-12 | Oc Oerlikon Balzers Ag | Surface acoustic wave device having improved performance and method of making the device |
US6946929B2 (en) * | 2002-02-12 | 2005-09-20 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave device having connection between elements made via a conductor not on the piezoelectric substrate |
US6877209B1 (en) | 2002-08-28 | 2005-04-12 | Silicon Light Machines, Inc. | Method for sealing an active area of a surface acoustic wave device on a wafer |
US6846423B1 (en) | 2002-08-28 | 2005-01-25 | Silicon Light Machines Corporation | Wafer-level seal for non-silicon-based devices |
JP2004120016A (ja) * | 2002-09-20 | 2004-04-15 | Fujitsu Media Device Kk | フィルタ装置 |
KR100455699B1 (ko) * | 2002-10-09 | 2004-11-06 | 주식회사 케이이씨 | 표면 탄성파 필터 장치 |
DE10301934A1 (de) * | 2003-01-20 | 2004-07-29 | Epcos Ag | Elektrisches Bauelement mit verringerter Substratfläche |
JP4177233B2 (ja) * | 2003-01-28 | 2008-11-05 | 富士通メディアデバイス株式会社 | 弾性表面波デバイス及びその製造方法 |
JP4173024B2 (ja) | 2003-02-14 | 2008-10-29 | 富士通メディアデバイス株式会社 | 電子部品の製造方法及びそのベース基板 |
JP4046641B2 (ja) | 2003-03-10 | 2008-02-13 | 富士通メディアデバイス株式会社 | 電子デバイスのパッケージ、ベース基板、電子部品及びそれの製造方法 |
JP2004304622A (ja) | 2003-03-31 | 2004-10-28 | Fujitsu Media Device Kk | 弾性表面波デバイス及びその製造方法 |
DE10325798B4 (de) * | 2003-06-06 | 2015-06-18 | Epcos Ag | SAW-Filter mit verbesserter Selektion oder Isolation |
JP4177182B2 (ja) | 2003-06-13 | 2008-11-05 | 富士通メディアデバイス株式会社 | 弾性表面波デバイス、そのパッケージ及びその製造方法 |
JP4180982B2 (ja) | 2003-06-16 | 2008-11-12 | 富士通メディアデバイス株式会社 | 弾性表面波デバイス、そのパッケージ及びその製造方法 |
JP2005124139A (ja) | 2003-09-25 | 2005-05-12 | Murata Mfg Co Ltd | 分波器、通信機 |
JP2005203889A (ja) * | 2004-01-13 | 2005-07-28 | Fujitsu Media Device Kk | 弾性表面波デバイス |
US7750420B2 (en) * | 2004-03-26 | 2010-07-06 | Cypress Semiconductor Corporation | Integrated circuit having one or more conductive devices formed over a SAW and/or MEMS device |
JP4456503B2 (ja) | 2004-12-24 | 2010-04-28 | 富士通メディアデバイス株式会社 | 電子部品の製造方法 |
JP2007184690A (ja) * | 2006-01-05 | 2007-07-19 | Matsushita Electric Ind Co Ltd | アンテナ共用器 |
JP4829040B2 (ja) * | 2006-08-23 | 2011-11-30 | 京セラ株式会社 | 弾性表面波装置 |
US8093101B2 (en) | 2006-11-14 | 2012-01-10 | Taiyo Yuden Co., Ltd. | Electronic device and method of fabricating the same |
WO2009001170A2 (en) * | 2006-11-16 | 2008-12-31 | Nortel Networks Limited | Filter having impedance matching circuits |
DE102007019325B4 (de) * | 2007-04-24 | 2008-12-24 | Epcos Ag | Mit akustischen Wellen arbeitendes Bauelement |
JP5585013B2 (ja) * | 2009-07-14 | 2014-09-10 | 日亜化学工業株式会社 | 発光装置 |
JP5339092B2 (ja) * | 2010-07-22 | 2013-11-13 | Tdk株式会社 | バンドパスフィルタモジュール及びモジュール基板 |
JP5310873B2 (ja) | 2010-11-09 | 2013-10-09 | 株式会社村田製作所 | 弾性波フィルタ装置 |
JP5873311B2 (ja) * | 2011-11-29 | 2016-03-01 | 太陽誘電株式会社 | 弾性波デバイス及び多層基板 |
JP6472945B2 (ja) * | 2013-06-13 | 2019-02-20 | 太陽誘電株式会社 | 弾性波デバイス |
CN105474539B (zh) * | 2013-08-20 | 2017-12-01 | 株式会社村田制作所 | 声表面波设备及其制造方法 |
US20150077960A1 (en) * | 2013-09-19 | 2015-03-19 | Murata Manufacturing Co., Ltd. | Low-temperature packaging methodology for electronic devices and other devices |
JP6342591B2 (ja) * | 2015-11-25 | 2018-06-13 | 京セラ株式会社 | 電子部品収納用パッケージ、電子装置および電子モジュール |
US10778183B2 (en) * | 2016-07-18 | 2020-09-15 | Skyworks Filter Solutions Japan Co., Ltd. | Saw-based electronic elements and filter devices |
JP6848953B2 (ja) * | 2018-11-26 | 2021-03-24 | 株式会社大真空 | 圧電振動デバイス |
CN111122675B (zh) * | 2020-01-02 | 2022-07-12 | 重庆医科大学 | 条块条电极、基于条块条电极的vegf165传感器及其制备方法和检测方法 |
EP4141927A1 (en) * | 2021-08-30 | 2023-03-01 | Nexperia B.V. | Electronic package and method for manufacturing the same |
TWI806615B (zh) * | 2022-05-19 | 2023-06-21 | 國立清華大學 | 濾波器及其製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04170811A (ja) * | 1990-11-05 | 1992-06-18 | Fujitsu Ltd | 弾性表面波デバイス |
JPH08213873A (ja) * | 1995-02-06 | 1996-08-20 | Fujitsu Ltd | 弾性表面波素子デバイス |
JP3301262B2 (ja) * | 1995-03-28 | 2002-07-15 | 松下電器産業株式会社 | 弾性表面波装置 |
JP3328102B2 (ja) * | 1995-05-08 | 2002-09-24 | 松下電器産業株式会社 | 弾性表面波装置及びその製造方法 |
JPH09162688A (ja) * | 1995-12-11 | 1997-06-20 | Matsushita Electric Ind Co Ltd | 弾性表面波装置 |
DE19548050A1 (de) * | 1995-12-21 | 1997-06-26 | Siemens Matsushita Components | Elektronisches Bauelement, insbesondere mit akustischen Oberflächenwellen arbeitendes Bauelement - OFW-Bauelement - |
JPH09232910A (ja) * | 1996-02-28 | 1997-09-05 | Oki Electric Ind Co Ltd | 平板多層分波器パッケージ |
JPH09232904A (ja) * | 1996-02-28 | 1997-09-05 | Oki Electric Ind Co Ltd | Sawフィルタ用セラミックパッケージ |
US6137380A (en) * | 1996-08-14 | 2000-10-24 | Murata Manufacturing, Co., Ltd | Surface acoustic wave filter utilizing a particularly placed spurious component of a parallel resonator |
JP3227645B2 (ja) * | 1996-09-17 | 2001-11-12 | 株式会社村田製作所 | 弾性表面波装置 |
JPH10135270A (ja) * | 1996-10-31 | 1998-05-22 | Casio Comput Co Ltd | 半導体装置及びその製造方法 |
JP3196693B2 (ja) * | 1997-08-05 | 2001-08-06 | 日本電気株式会社 | 表面弾性波装置およびその製造方法 |
JPH1188108A (ja) * | 1997-09-03 | 1999-03-30 | Tdk Corp | 弾性表面波装置 |
JPH11122072A (ja) * | 1997-10-14 | 1999-04-30 | Fujitsu Ltd | 弾性表面波装置 |
US5956606A (en) * | 1997-10-31 | 1999-09-21 | Motorola, Inc. | Method for bumping and packaging semiconductor die |
JPH11163670A (ja) * | 1997-12-01 | 1999-06-18 | Seiko Epson Corp | 圧電デバイス |
-
1999
- 1999-08-11 JP JP22742999A patent/JP3860364B2/ja not_active Expired - Fee Related
-
2000
- 2000-07-27 TW TW089115022A patent/TW461178B/zh not_active IP Right Cessation
- 2000-08-08 KR KR1020000045886A patent/KR100679958B1/ko not_active IP Right Cessation
- 2000-08-09 US US09/635,094 patent/US6417574B1/en not_active Expired - Lifetime
- 2000-08-11 EP EP00402286A patent/EP1076414A3/en not_active Withdrawn
- 2000-08-11 EP EP08170324A patent/EP2043263A1/en not_active Withdrawn
- 2000-08-11 CN CNB001227378A patent/CN1134105C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR100679958B1 (ko) | 2007-02-08 |
EP1076414A2 (en) | 2001-02-14 |
EP2043263A1 (en) | 2009-04-01 |
EP1076414A3 (en) | 2002-11-13 |
US6417574B1 (en) | 2002-07-09 |
CN1284790A (zh) | 2001-02-21 |
JP3860364B2 (ja) | 2006-12-20 |
TW461178B (en) | 2001-10-21 |
KR20010021244A (ko) | 2001-03-15 |
JP2001053577A (ja) | 2001-02-23 |
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Legal Events
Date | Code | Title | Description |
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C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C06 | Publication | ||
PB01 | Publication | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: TAIYO YUDEN CO., LTD. Free format text: FORMER OWNER: FUJITSU MEDIA DEVICES LTD Effective date: 20101202 |
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C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee |
Owner name: FUJITSU MEDIA DEVICES LTD Free format text: FORMER NAME: FUJITSU MEDIUM DEVICE CO., LTD. |
|
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: NAGANO PREFECTURE, JAPAN TO: TOKYO, JAPAN |
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CP01 | Change in the name or title of a patent holder |
Address after: Nagano Patentee after: Fujitsu Media Devices Ltd. Address before: Nagano Patentee before: Fujitsu Media Devices Ltd. |
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TR01 | Transfer of patent right |
Effective date of registration: 20101202 Address after: Tokyo, Japan Patentee after: TAIYO YUDEN Co.,Ltd. Address before: Nagano Patentee before: Fujitsu Media Devices Ltd. |
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CX01 | Expiry of patent term |
Granted publication date: 20040107 |
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CX01 | Expiry of patent term |