CN103985763B - 半导体装置和显示装置 - Google Patents

半导体装置和显示装置 Download PDF

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Publication number
CN103985763B
CN103985763B CN201410196055.4A CN201410196055A CN103985763B CN 103985763 B CN103985763 B CN 103985763B CN 201410196055 A CN201410196055 A CN 201410196055A CN 103985763 B CN103985763 B CN 103985763B
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China
Prior art keywords
film
island
semiconductor
semiconductor device
thickness
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Expired - Fee Related
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CN201410196055.4A
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English (en)
Chinese (zh)
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CN103985763A (zh
Inventor
山崎舜平
后藤裕吾
村川努
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Publication of CN103985763A publication Critical patent/CN103985763A/zh
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/411Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by materials, geometry or structure of the substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6758Thin-film transistors [TFT] characterised by the insulating substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices

Landscapes

  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Recrystallisation Techniques (AREA)
CN201410196055.4A 2007-12-03 2008-12-02 半导体装置和显示装置 Expired - Fee Related CN103985763B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007-312163 2007-12-03
JP2007312163 2007-12-03
CN200810183805.9A CN101452962B (zh) 2007-12-03 2008-12-02 半导体装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN200810183805.9A Division CN101452962B (zh) 2007-12-03 2008-12-02 半导体装置

Publications (2)

Publication Number Publication Date
CN103985763A CN103985763A (zh) 2014-08-13
CN103985763B true CN103985763B (zh) 2018-02-06

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
CN201410196055.4A Expired - Fee Related CN103985763B (zh) 2007-12-03 2008-12-02 半导体装置和显示装置
CN200810183805.9A Expired - Fee Related CN101452962B (zh) 2007-12-03 2008-12-02 半导体装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN200810183805.9A Expired - Fee Related CN101452962B (zh) 2007-12-03 2008-12-02 半导体装置

Country Status (6)

Country Link
US (2) US8047442B2 (https=)
EP (1) EP2071627B1 (https=)
JP (11) JP5514429B2 (https=)
KR (2) KR101720512B1 (https=)
CN (2) CN103985763B (https=)
TW (1) TWI459542B (https=)

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TWI657580B (zh) * 2011-01-26 2019-04-21 Semiconductor Energy Laboratory Co., Ltd. 半導體裝置及其製造方法
US8946066B2 (en) * 2011-05-11 2015-02-03 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing semiconductor device
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US9431545B2 (en) * 2011-09-23 2016-08-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
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JP5912394B2 (ja) 2011-10-13 2016-04-27 株式会社半導体エネルギー研究所 半導体装置
JP6026839B2 (ja) 2011-10-13 2016-11-16 株式会社半導体エネルギー研究所 半導体装置
US9018629B2 (en) 2011-10-13 2015-04-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
US8637864B2 (en) 2011-10-13 2014-01-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same
KR20140060776A (ko) * 2012-11-12 2014-05-21 삼성디스플레이 주식회사 플렉서블 표시 장치 및 그 제조 방법
JP2014138179A (ja) * 2013-01-18 2014-07-28 Nippon Hoso Kyokai <Nhk> 薄膜トランジスタアレイ基板及び表示装置
US9577107B2 (en) 2013-03-19 2017-02-21 Semiconductor Energy Laboratory Co., Ltd. Oxide semiconductor film and method for forming oxide semiconductor film
CA2907101C (en) 2013-05-21 2018-07-31 Halliburton Energy Services, Inc. Thermal securing set screws
JP6345023B2 (ja) * 2013-08-07 2018-06-20 株式会社半導体エネルギー研究所 半導体装置およびその作製方法
DE112015001124T5 (de) 2014-03-06 2016-11-17 Semiconductor Energy Laboratory Co., Ltd. Lichtemittierende Vorrichtung
CN206163716U (zh) * 2014-03-28 2017-05-10 株式会社村田制作所 天线装置以及通信设备
JP6468686B2 (ja) 2014-04-25 2019-02-13 株式会社半導体エネルギー研究所 入出力装置
JP2016081051A (ja) 2014-10-10 2016-05-16 株式会社半導体エネルギー研究所 機能パネル、装置、情報処理装置
KR102367251B1 (ko) * 2015-02-02 2022-02-25 삼성디스플레이 주식회사 표시 장치
US9772268B2 (en) 2015-03-30 2017-09-26 International Business Machines Corporation Predicting semiconductor package warpage
CN111627974B (zh) 2015-07-23 2024-04-05 株式会社半导体能源研究所 显示装置、模块及电子设备
CN107134496B (zh) * 2016-02-29 2019-05-31 昆山工研院新型平板显示技术中心有限公司 薄膜晶体管及其制造方法、显示面板及显示装置
KR102537297B1 (ko) * 2016-07-05 2023-05-30 삼성디스플레이 주식회사 롤러블 표시 장치 및 이를 포함하는 전자 기기
JP7086582B2 (ja) * 2017-12-11 2022-06-20 株式会社ジャパンディスプレイ 表示装置
CN110299369B (zh) * 2019-07-03 2021-11-16 京东方科技集团股份有限公司 显示基板及其制备方法、显示装置
US12408414B2 (en) * 2021-07-14 2025-09-02 Micron Technology, Inc. Transistor and memory circuitry comprising strings of memory cells
CN116131094B (zh) * 2021-11-12 2025-12-05 朗美通日本株式会社 光学半导体器件

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US20120037993A1 (en) 2012-02-16
TW200943540A (en) 2009-10-16
KR20160023740A (ko) 2016-03-03
JP2014075594A (ja) 2014-04-24
EP2071627A2 (en) 2009-06-17
EP2071627B1 (en) 2014-06-11
JP5719910B2 (ja) 2015-05-20
JP6968214B2 (ja) 2021-11-17
JP2015201663A (ja) 2015-11-12
CN101452962A (zh) 2009-06-10
US20090140053A1 (en) 2009-06-04
JP5514429B2 (ja) 2014-06-04
KR20090057932A (ko) 2009-06-08
TWI459542B (zh) 2014-11-01
JP2020074478A (ja) 2020-05-14
CN103985763A (zh) 2014-08-13
US8272575B2 (en) 2012-09-25
JP7250882B2 (ja) 2023-04-03
EP2071627A3 (en) 2012-11-28
US8047442B2 (en) 2011-11-01
JP2009158936A (ja) 2009-07-16
JP6657333B2 (ja) 2020-03-04
JP2025096323A (ja) 2025-06-26
JP7660741B2 (ja) 2025-04-11
JP2018195843A (ja) 2018-12-06
JP5770402B2 (ja) 2015-08-26
JP2023073320A (ja) 2023-05-25
KR101693543B1 (ko) 2017-01-06
JP2022009486A (ja) 2022-01-14
JP7471488B2 (ja) 2024-04-19
JP2017147462A (ja) 2017-08-24
JP2015111744A (ja) 2015-06-18
KR101720512B1 (ko) 2017-03-28
JP6379250B2 (ja) 2018-08-22
JP2024091705A (ja) 2024-07-05
CN101452962B (zh) 2014-06-18

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