CN103363969A - Mems器件正交偏移消除 - Google Patents
Mems器件正交偏移消除 Download PDFInfo
- Publication number
- CN103363969A CN103363969A CN2013101197309A CN201310119730A CN103363969A CN 103363969 A CN103363969 A CN 103363969A CN 2013101197309 A CN2013101197309 A CN 2013101197309A CN 201310119730 A CN201310119730 A CN 201310119730A CN 103363969 A CN103363969 A CN 103363969A
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- demodulation
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- heat transfer
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- signal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5726—Signal processing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Gyroscopes (AREA)
Abstract
Description
Claims (21)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261620653P | 2012-04-05 | 2012-04-05 | |
US61/620,653 | 2012-04-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103363969A true CN103363969A (zh) | 2013-10-23 |
CN103363969B CN103363969B (zh) | 2018-08-17 |
Family
ID=48045248
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310119730.9A Active CN103363969B (zh) | 2012-04-05 | 2013-04-08 | 正交修正设备和方法及含mems器件和控制电路的系统 |
CN2013201723672U Withdrawn - After Issue CN203349833U (zh) | 2012-04-05 | 2013-04-08 | 正交修正设备及系统 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2013201723672U Withdrawn - After Issue CN203349833U (zh) | 2012-04-05 | 2013-04-08 | 正交修正设备及系统 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10060757B2 (zh) |
EP (1) | EP2647955B8 (zh) |
KR (1) | KR102045785B1 (zh) |
CN (2) | CN103363969B (zh) |
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8710599B2 (en) | 2009-08-04 | 2014-04-29 | Fairchild Semiconductor Corporation | Micromachined devices and fabricating the same |
US8813564B2 (en) | 2010-09-18 | 2014-08-26 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope with central suspension and gimbal structure |
US8978475B2 (en) | 2012-02-01 | 2015-03-17 | Fairchild Semiconductor Corporation | MEMS proof mass with split z-axis portions |
US9006846B2 (en) | 2010-09-20 | 2015-04-14 | Fairchild Semiconductor Corporation | Through silicon via with reduced shunt capacitance |
US9062972B2 (en) | 2012-01-31 | 2015-06-23 | Fairchild Semiconductor Corporation | MEMS multi-axis accelerometer electrode structure |
US9069006B2 (en) | 2012-04-05 | 2015-06-30 | Fairchild Semiconductor Corporation | Self test of MEMS gyroscope with ASICs integrated capacitors |
US9094027B2 (en) | 2012-04-12 | 2015-07-28 | Fairchild Semiconductor Corporation | Micro-electro-mechanical-system (MEMS) driver |
US9095072B2 (en) | 2010-09-18 | 2015-07-28 | Fairchild Semiconductor Corporation | Multi-die MEMS package |
US9156673B2 (en) | 2010-09-18 | 2015-10-13 | Fairchild Semiconductor Corporation | Packaging to reduce stress on microelectromechanical systems |
US9246018B2 (en) | 2010-09-18 | 2016-01-26 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
US9278846B2 (en) | 2010-09-18 | 2016-03-08 | Fairchild Semiconductor Corporation | Micromachined monolithic 6-axis inertial sensor |
US9352961B2 (en) | 2010-09-18 | 2016-05-31 | Fairchild Semiconductor Corporation | Flexure bearing to reduce quadrature for resonating micromachined devices |
US9425328B2 (en) | 2012-09-12 | 2016-08-23 | Fairchild Semiconductor Corporation | Through silicon via including multi-material fill |
US9444404B2 (en) | 2012-04-05 | 2016-09-13 | Fairchild Semiconductor Corporation | MEMS device front-end charge amplifier |
US9488693B2 (en) | 2012-04-04 | 2016-11-08 | Fairchild Semiconductor Corporation | Self test of MEMS accelerometer with ASICS integrated capacitors |
US9618361B2 (en) | 2012-04-05 | 2017-04-11 | Fairchild Semiconductor Corporation | MEMS device automatic-gain control loop for mechanical amplitude drive |
US9625272B2 (en) | 2012-04-12 | 2017-04-18 | Fairchild Semiconductor Corporation | MEMS quadrature cancellation and signal demodulation |
CN106595714A (zh) * | 2016-12-23 | 2017-04-26 | 宁波大学 | 一种正交偏置自消除的微机械陀螺仪 |
US9644963B2 (en) | 2013-03-15 | 2017-05-09 | Fairchild Semiconductor Corporation | Apparatus and methods for PLL-based gyroscope gain control, quadrature cancellation and demodulation |
CN107436144A (zh) * | 2016-05-26 | 2017-12-05 | 中国科学院微电子研究所 | 自动消除陀螺仪正交误差的电路 |
CN108253953A (zh) * | 2016-12-29 | 2018-07-06 | 深迪半导体(上海)有限公司 | 一种mems陀螺仪的解调系统和解调装置 |
US10060757B2 (en) | 2012-04-05 | 2018-08-28 | Fairchild Semiconductor Corporation | MEMS device quadrature shift cancellation |
US10065851B2 (en) | 2010-09-20 | 2018-09-04 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
CN112629516A (zh) * | 2019-10-09 | 2021-04-09 | 北京大学 | 一种轮式水平轴陀螺栅条状耦合抑制结构 |
Families Citing this family (12)
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---|---|---|---|---|
KR101548863B1 (ko) * | 2014-03-11 | 2015-08-31 | 삼성전기주식회사 | 자이로 센서의 구동장치 및 그 제어방법 |
US9702898B1 (en) * | 2014-04-11 | 2017-07-11 | Panasonic Corporation | Method and system for detecting and correcting quadrature error signals for MEMS device |
US20160102978A1 (en) * | 2014-10-14 | 2016-04-14 | Richtek Technology Corporation | Rotation velocity sensor and method for sensing rotation velocity |
CN105841685B (zh) * | 2016-05-09 | 2018-11-23 | 西北工业大学 | 硅微机械陀螺快速热启动实现方法 |
US10330474B2 (en) * | 2016-05-10 | 2019-06-25 | Nxp Usa, Inc. | Quadrature error compensation circuit for a MEMS gyroscope |
US11365983B2 (en) | 2016-06-03 | 2022-06-21 | Invensense, Inc. | Demodulation phase calibration using external input |
US10649015B1 (en) * | 2017-08-21 | 2020-05-12 | Cirrus Logic, Inc. | Capacitive sensor including compensation for phase shift |
DE102017216007A1 (de) | 2017-09-12 | 2019-03-14 | Robert Bosch Gmbh | Vorrichtungen und Verfahren zur Verarbeitung eines Sensorsignals |
US10996075B2 (en) * | 2017-12-14 | 2021-05-04 | Invensense, Inc. | Microelectromechanical systems (MEMS) gyroscope calibration |
JP7024566B2 (ja) * | 2018-04-06 | 2022-02-24 | 株式会社デンソー | 振動型ジャイロスコープ |
US11125560B2 (en) * | 2019-07-30 | 2021-09-21 | Invensense, Inc. | Robust method for tuning of gyroscope demodulation phase |
IT202100024644A1 (it) * | 2021-09-27 | 2023-03-27 | St Microelectronics Srl | Circuito di controllo di un giroscopio mems, giroscopio mems e metodo di controllo |
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CN1595062A (zh) * | 2004-06-29 | 2005-03-16 | 东南大学 | 电容式微陀螺敏感信号的双路谐波提取方法及提取装置 |
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CN203349833U (zh) * | 2012-04-05 | 2013-12-18 | 快捷半导体(苏州)有限公司 | 正交修正设备及系统 |
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CN203349833U (zh) | 2013-12-18 |
EP2647955B1 (en) | 2018-10-31 |
KR20130113392A (ko) | 2013-10-15 |
EP2647955A2 (en) | 2013-10-09 |
US20130268228A1 (en) | 2013-10-10 |
CN103363969B (zh) | 2018-08-17 |
US10060757B2 (en) | 2018-08-28 |
EP2647955B8 (en) | 2018-12-19 |
KR102045785B1 (ko) | 2019-11-18 |
EP2647955A3 (en) | 2014-07-23 |
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