ATE509254T1 - Mikrohergestellter kreisel - Google Patents

Mikrohergestellter kreisel

Info

Publication number
ATE509254T1
ATE509254T1 AT03707756T AT03707756T ATE509254T1 AT E509254 T1 ATE509254 T1 AT E509254T1 AT 03707756 T AT03707756 T AT 03707756T AT 03707756 T AT03707756 T AT 03707756T AT E509254 T1 ATE509254 T1 AT E509254T1
Authority
AT
Austria
Prior art keywords
suppression electrode
quadrature suppression
resonator mass
quadrature
electrode
Prior art date
Application number
AT03707756T
Other languages
English (en)
Inventor
John Geen
Original Assignee
Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Application granted granted Critical
Publication of ATE509254T1 publication Critical patent/ATE509254T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/12—Gyroscopes
AT03707756T 2002-02-06 2003-02-06 Mikrohergestellter kreisel ATE509254T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US35461002P 2002-02-06 2002-02-06
US36432202P 2002-03-14 2002-03-14
PCT/US2003/003615 WO2003067190A1 (en) 2002-02-06 2003-02-06 Micromachined gyroscope

Publications (1)

Publication Number Publication Date
ATE509254T1 true ATE509254T1 (de) 2011-05-15

Family

ID=27737467

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03707756T ATE509254T1 (de) 2002-02-06 2003-02-06 Mikrohergestellter kreisel

Country Status (8)

Country Link
US (5) US6877374B2 (de)
EP (3) EP2327959B1 (de)
JP (1) JP4392246B2 (de)
CN (1) CN1628238B (de)
AT (1) ATE509254T1 (de)
AU (1) AU2003209031A1 (de)
DE (1) DE03707756T1 (de)
WO (1) WO2003067190A1 (de)

Families Citing this family (92)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003209031A1 (en) * 2002-02-06 2003-09-02 Analog Devices, Inc. Micromachined gyroscope
FR2859528B1 (fr) * 2003-09-09 2006-01-06 Thales Sa Gyrometre micro-usine a double diapason et a detection dans le plan de la plaque usinee
JP4433747B2 (ja) * 2003-09-29 2010-03-17 株式会社村田製作所 角速度検出装置
DE102004018623A1 (de) * 2004-04-16 2005-11-03 Wabco Gmbh & Co.Ohg Verfahren zum Betrieb eines Sensors
US7478557B2 (en) * 2004-10-01 2009-01-20 Analog Devices, Inc. Common centroid micromachine driver
US7155976B2 (en) * 2005-01-05 2007-01-02 Industrial Technology Research Institute Rotation sensing apparatus and method for manufacturing the same
US7213458B2 (en) * 2005-03-22 2007-05-08 Honeywell International Inc. Quadrature reduction in MEMS gyro devices using quad steering voltages
US7231824B2 (en) * 2005-03-22 2007-06-19 Honeywell International Inc. Use of electrodes to cancel lift effects in inertial sensors
US7421897B2 (en) * 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
FI121539B (fi) * 2005-06-03 2010-12-31 Valtion Teknillinen Menetelmä mikromekaanisten komponenttien valmistamiseksi sekä tällaisella menetelmällä valmistettu piimikromekaaninen rakenne ja sen käyttö
FR2895501B1 (fr) * 2005-12-23 2008-02-29 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec au moins deux massesm oscillantes couplees mecaniquement
DE102007057044B4 (de) 2007-09-10 2021-08-05 Continental Teves Ag & Co. Ohg Mikromechanische Feder
US8215151B2 (en) * 2008-06-26 2012-07-10 Analog Devices, Inc. MEMS stiction testing apparatus and method
US8371167B2 (en) * 2008-07-29 2013-02-12 Pixart Imaging Inc. In-plane sensor, out-of-plane sensor, and method for making same
US20100058861A1 (en) 2008-09-11 2010-03-11 Analog Devices, Inc. Piezoelectric Transducers and Inertial Sensors using Piezoelectric Transducers
US8151641B2 (en) 2009-05-21 2012-04-10 Analog Devices, Inc. Mode-matching apparatus and method for micromachined inertial sensors
WO2010138717A1 (en) * 2009-05-27 2010-12-02 King Abdullah University Of Science And Technology Mems mass spring damper systems using an out-of-plane suspension scheme
US8418555B2 (en) * 2009-06-26 2013-04-16 Honeywell International Inc. Bidirectional, out-of-plane, comb drive accelerometer
US8739626B2 (en) * 2009-08-04 2014-06-03 Fairchild Semiconductor Corporation Micromachined inertial sensor devices
US8266961B2 (en) 2009-08-04 2012-09-18 Analog Devices, Inc. Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies
US8593155B2 (en) 2009-08-13 2013-11-26 Analog Devices, Inc. MEMS in-plane resonators
US8783103B2 (en) 2009-08-21 2014-07-22 Analog Devices, Inc. Offset detection and compensation for micromachined inertial sensors
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
US8701459B2 (en) * 2009-10-20 2014-04-22 Analog Devices, Inc. Apparatus and method for calibrating MEMS inertial sensors
US8424383B2 (en) * 2010-01-05 2013-04-23 Pixart Imaging Incorporation Mass for use in a micro-electro-mechanical-system sensor and 3-dimensional micro-electro-mechanical-system sensor using same
US8459111B1 (en) 2010-01-23 2013-06-11 Minyao Mao Angular rate sensor with suppressed linear acceleration response
US8453504B1 (en) 2010-01-23 2013-06-04 Minyao Mao Angular rate sensor with suppressed linear acceleration response
US8616057B1 (en) * 2010-01-23 2013-12-31 Minyao Mao Angular rate sensor with suppressed linear acceleration response
CN102510995B (zh) * 2010-06-16 2015-03-04 丰田自动车株式会社 复合传感器
CN103238075B (zh) 2010-09-18 2015-11-25 快捷半导体公司 具有单质量块的微机械三轴加速计
EP2616388A4 (de) 2010-09-18 2014-08-13 Fairchild Semiconductor Versiegelte verpackung für mikroelektromechanische systeme
US9352961B2 (en) 2010-09-18 2016-05-31 Fairchild Semiconductor Corporation Flexure bearing to reduce quadrature for resonating micromachined devices
US8813564B2 (en) 2010-09-18 2014-08-26 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope with central suspension and gimbal structure
US9095072B2 (en) 2010-09-18 2015-07-28 Fairchild Semiconductor Corporation Multi-die MEMS package
WO2012037538A2 (en) 2010-09-18 2012-03-22 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
KR101311966B1 (ko) 2010-09-20 2013-10-14 페어차일드 세미컨덕터 코포레이션 감소된 션트 커패시턴스를 갖는 관통 실리콘 비아
WO2012040211A2 (en) 2010-09-20 2012-03-29 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
US20120103909A1 (en) * 2010-09-23 2012-05-03 Molycorp Minerals, Llc Particulate cerium dioxide and an in situ method for making and using the same
US9091544B2 (en) 2010-11-05 2015-07-28 Analog Devices, Inc. XY-axis shell-type gyroscopes with reduced cross-talk sensitivity and/or mode matching
US8631700B2 (en) 2010-11-05 2014-01-21 Analog Devices, Inc. Resonating sensor with mechanical constraints
US8616056B2 (en) 2010-11-05 2013-12-31 Analog Devices, Inc. BAW gyroscope with bottom electrode
WO2012075226A1 (en) 2010-12-01 2012-06-07 Analog Devices, Inc. Apparatus and method for anchoring electrodes in mems devices
US9039976B2 (en) 2011-01-31 2015-05-26 Analog Devices, Inc. MEMS sensors with closed nodal anchors for operation in an in-plane contour mode
ITTO20110782A1 (it) * 2011-08-31 2013-03-01 Milano Politecnico Struttura di rilevamento perfezionata per un accelerometro risonante ad asse z
TWI467179B (zh) 2011-12-02 2015-01-01 Pixart Imaging Inc 三維微機電感測器
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
US9157928B2 (en) 2012-03-19 2015-10-13 Analog Devices, Inc. Microelectronic device testing apparatus and method
US8754694B2 (en) 2012-04-03 2014-06-17 Fairchild Semiconductor Corporation Accurate ninety-degree phase shifter
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
US9027403B2 (en) * 2012-04-04 2015-05-12 Analog Devices, Inc. Wide G range accelerometer
US8742964B2 (en) 2012-04-04 2014-06-03 Fairchild Semiconductor Corporation Noise reduction method with chopping for a merged MEMS accelerometer sensor
EP2647952B1 (de) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Automatische Verstärkungsregelungsschleife einer MEMS-Vorrichtung für mechanischen Amplitudenantrieb
EP2647955B8 (de) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS-Vorrichtung mit Quadraturphasenverschiebungsauslöschung
US9069006B2 (en) 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
KR102058489B1 (ko) 2012-04-05 2019-12-23 페어차일드 세미컨덕터 코포레이션 멤스 장치 프론트 엔드 전하 증폭기
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
KR101999745B1 (ko) 2012-04-12 2019-10-01 페어차일드 세미컨덕터 코포레이션 미세 전자 기계 시스템 구동기
US9212908B2 (en) 2012-04-26 2015-12-15 Analog Devices, Inc. MEMS gyroscopes with reduced errors
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
US9599471B2 (en) 2013-11-14 2017-03-21 Analog Devices, Inc. Dual use of a ring structure as gyroscope and accelerometer
US9709595B2 (en) 2013-11-14 2017-07-18 Analog Devices, Inc. Method and apparatus for detecting linear and rotational movement
JP6398348B2 (ja) * 2014-06-12 2018-10-03 セイコーエプソン株式会社 機能素子、機能素子の製造方法、電子機器、および移動体
US9917243B2 (en) 2014-10-16 2018-03-13 Analog Devices, Inc. Method of fabricating piezoelectric MEMS devices
US10746548B2 (en) 2014-11-04 2020-08-18 Analog Devices, Inc. Ring gyroscope structural features
US9869552B2 (en) * 2015-03-20 2018-01-16 Analog Devices, Inc. Gyroscope that compensates for fluctuations in sensitivity
CN104897144B (zh) * 2015-05-29 2019-05-24 上海交通大学 多驱动电极模态耦合微固体模态陀螺
US10371521B2 (en) 2016-05-26 2019-08-06 Honeywell International Inc. Systems and methods for a four-mass vibrating MEMS structure
US10696541B2 (en) 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
US10514259B2 (en) 2016-08-31 2019-12-24 Analog Devices, Inc. Quad proof mass MEMS gyroscope with outer couplers and related methods
EP3336485B1 (de) * 2016-12-15 2020-09-23 Safran Landing Systems UK Limited Flugzeuganordnung mit ablenkungssensor
US10627235B2 (en) 2016-12-19 2020-04-21 Analog Devices, Inc. Flexural couplers for microelectromechanical systems (MEMS) devices
US10697774B2 (en) 2016-12-19 2020-06-30 Analog Devices, Inc. Balanced runners synchronizing motion of masses in micromachined devices
US10415968B2 (en) 2016-12-19 2019-09-17 Analog Devices, Inc. Synchronized mass gyroscope
US10551191B2 (en) 2017-02-17 2020-02-04 Invensense, Inc. Deformation rejection mechanism for offset minimization of out-of-plane sensing MEMS device
WO2018152507A1 (en) * 2017-02-17 2018-08-23 Invensense, Inc. Anchoring structure for a sensor insensitive to anchor movement
US10697994B2 (en) 2017-02-22 2020-06-30 Semiconductor Components Industries, Llc Accelerometer techniques to compensate package stress
US10948294B2 (en) 2018-04-05 2021-03-16 Analog Devices, Inc. MEMS gyroscopes with in-line springs and related systems and methods
US10760909B2 (en) 2018-06-18 2020-09-01 Nxp Usa, Inc. Angular rate sensor with in-phase drive and sense motion suppression
US11320448B2 (en) 2018-08-02 2022-05-03 Logiquip Llc Pivoting stock divider with motion detector
US10482423B1 (en) * 2018-08-02 2019-11-19 Logiquip Llc Automated inventory control system
US10648998B2 (en) * 2018-08-02 2020-05-12 Logiquip Llc Automated inventory control system using pivotable divider
US20200141732A1 (en) * 2018-11-02 2020-05-07 Semiconductor Components Industries, Llc Multi-axis gyroscope with reduced bias drift
JP7225817B2 (ja) * 2019-01-17 2023-02-21 セイコーエプソン株式会社 角速度センサー、慣性計測装置、電子機器および移動体
US11656077B2 (en) 2019-01-31 2023-05-23 Analog Devices, Inc. Pseudo-extensional mode MEMS ring gyroscope
FR3102240B1 (fr) * 2019-10-18 2021-10-01 Safran Electronics & Defense Capteur à compensation mécanique de l’anisotropie de fréquence
US11193771B1 (en) 2020-06-05 2021-12-07 Analog Devices, Inc. 3-axis gyroscope with rotational vibration rejection
WO2021252364A1 (en) 2020-06-08 2021-12-16 Analog Devices, Inc. Stress-relief mems gyroscope
CN116075728A (zh) 2020-06-08 2023-05-05 美国亚德诺半导体公司 驱动和感测应力释放装置
US11519726B2 (en) 2020-06-19 2022-12-06 Analog Devices, Inc. Mechanism for selective coupling in microelectromechanical systems inertial sensors
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope

Family Cites Families (100)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US519371A (en) * 1894-05-08 Fruit-picker
US2309853A (en) 1941-04-10 1943-02-02 Sperry Gyroscope Co Inc Rate and attitude indicating instrument
US4381672A (en) 1981-03-04 1983-05-03 The Bendix Corporation Vibrating beam rotation sensor
US4654663A (en) 1981-11-16 1987-03-31 Piezoelectric Technology Investors, Ltd. Angular rate sensor system
US4510802A (en) 1983-09-02 1985-04-16 Sundstrand Data Control, Inc. Angular rate sensor utilizing two vibrating accelerometers secured to a parallelogram linkage
US4524619A (en) 1984-01-23 1985-06-25 Piezoelectric Technology Investors, Limited Vibratory angular rate sensor system
US4598585A (en) 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US4744249A (en) 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4744248A (en) 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4884446A (en) 1987-03-12 1989-12-05 Ljung Per B Solid state vibrating gyro
US5016072A (en) 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
US5216490A (en) 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
US5195371A (en) 1988-01-13 1993-03-23 The Charles Stark Draper Laboratory, Inc. Semiconductor chip transducer
US5111693A (en) 1988-01-13 1992-05-12 The Charles Stark Draper Laboratory, Inc. Motion restraints for micromechanical devices
US5025346A (en) 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5056366A (en) 1989-12-26 1991-10-15 Litton Systems, Inc. Piezoelectric vibratory rate sensor
US5144184A (en) 1990-01-26 1992-09-01 The Charles Stark Draper Laboratory, Inc. Micromechanical device with a trimmable resonant frequency structure and method of trimming same
US5016076A (en) 1990-02-28 1991-05-14 At&T Bell Laboratories Lateral MOS controlled thyristor
US5537144A (en) 1990-06-11 1996-07-16 Revfo, Inc. Electro-optical display system for visually displaying polarized spatially multiplexed images of 3-D objects for use in stereoscopically viewing the same with high image quality and resolution
US6155115A (en) 1991-01-02 2000-12-05 Ljung; Per Vibratory angular rate sensor
US5205171A (en) 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
US5241861A (en) 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US6295870B1 (en) * 1991-02-08 2001-10-02 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
DE4106288C2 (de) 1991-02-28 2001-05-31 Bosch Gmbh Robert Sensor zur Messung von Drücken oder Beschleunigungen
DE4107658A1 (de) 1991-03-09 1992-09-17 Bosch Gmbh Robert Montageverfahren fuer mikromechanische sensoren
EP0503807B1 (de) 1991-03-12 1996-09-25 New Sd, Inc. Stimmgabelinertialsensor mit einem Ende und Verfahren
US5203208A (en) 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5331852A (en) 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5635639A (en) 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5329815A (en) 1991-12-19 1994-07-19 Motorola, Inc. Vibration monolithic gyroscope
US5359893A (en) 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
US5313835A (en) 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits
US5377544A (en) 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
US5408877A (en) 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5767405A (en) 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5349855A (en) 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
GB9212099D0 (en) 1992-06-06 1992-07-22 Lucas Ind Plc Angular rate sensor and method of production thereof
US5734105A (en) 1992-10-13 1998-03-31 Nippondenso Co., Ltd. Dynamic quantity sensor
US5367217A (en) 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
US5650568A (en) 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5555765A (en) 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5492596A (en) 1994-02-04 1996-02-20 The Charles Stark Draper Laboratory, Inc. Method of making a micromechanical silicon-on-glass tuning fork gyroscope
US5481914A (en) 1994-03-28 1996-01-09 The Charles Stark Draper Laboratory, Inc. Electronics for coriolis force and other sensors
DE4414237A1 (de) 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
US5987986A (en) 1994-07-29 1999-11-23 Litton Systems, Inc. Navigation grade micromachined rotation sensor system
US5581035A (en) 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5646348A (en) 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
DE4431338C2 (de) 1994-09-02 2003-07-31 Bosch Gmbh Robert Beschleunigungssensor
US5530342A (en) 1994-09-30 1996-06-25 Rockwell International Corporation Micromachined rate sensor comb drive device and method
JP3412293B2 (ja) 1994-11-17 2003-06-03 株式会社デンソー 半導体ヨーレートセンサおよびその製造方法
DE4442033C2 (de) 1994-11-25 1997-12-18 Bosch Gmbh Robert Drehratensensor
DE4447005A1 (de) * 1994-12-29 1996-07-04 Bosch Gmbh Robert Vorrichtung zur Ermittlung einer Drehrate
US5763781A (en) 1995-02-23 1998-06-09 Netzer; Yishay Coupled resonator vibratory rate sensor
GB2301671B (en) 1995-05-30 1999-10-13 Allied Signal Inc Angular rate sensor electronic balance
US5635640A (en) 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
US5635638A (en) 1995-06-06 1997-06-03 Analog Devices, Inc. Coupling for multiple masses in a micromachined device
US6064169A (en) 1995-10-11 2000-05-16 The Charles Stark Draper Laboratory, Inc. Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope
US5747961A (en) 1995-10-11 1998-05-05 The Charles Stark Draper Laboratory, Inc. Beat frequency motor position detection scheme for tuning fork gyroscope and other sensors
US5600065A (en) * 1995-10-25 1997-02-04 Motorola, Inc. Angular velocity sensor
JPH09196682A (ja) 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
JP3039364B2 (ja) 1996-03-11 2000-05-08 株式会社村田製作所 角速度センサ
US5880369A (en) 1996-03-15 1999-03-09 Analog Devices, Inc. Micromachined device with enhanced dimensional control
US5992233A (en) 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6250156B1 (en) 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
US5696323A (en) 1996-06-25 1997-12-09 Alliedsignal, Inc. Two bar resonant beam Coriolis rate sensor
US5795988A (en) 1996-07-01 1998-08-18 Alliedsignal Inc. Gyroscope noise reduction and drift compensation
JP3702412B2 (ja) 1996-07-29 2005-10-05 アイシン精機株式会社 角速度検出装置
JPH1047966A (ja) 1996-07-31 1998-02-20 Aisin Seiki Co Ltd 角速度センサ
DE19641284C1 (de) * 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
US5892153A (en) 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
GB2320571B (en) 1996-12-20 2000-09-27 Aisin Seiki Semiconductor micromachine and manufacturing method thereof
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro
US5783973A (en) 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5911156A (en) 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
DE19827688A1 (de) 1997-06-20 1999-01-28 Aisin Seiki Winkelgeschwindigkeitssensor
US6032531A (en) 1997-08-04 2000-03-07 Kearfott Guidance & Navigation Corporation Micromachined acceleration and coriolis sensor
US6122961A (en) 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
US6070464A (en) 1997-09-05 2000-06-06 Motorola, Inc. Sensing structure comprising a movable mass and a self-test structure
JP2001520385A (ja) 1997-10-14 2001-10-30 アービン・センサーズ・コーポレイション 複数要素のマイクロジャイロ
US6230563B1 (en) 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
US5920012A (en) 1998-06-16 1999-07-06 Boeing North American Micromechanical inertial sensor
JP3882973B2 (ja) * 1998-06-22 2007-02-21 アイシン精機株式会社 角速度センサ
US6009751A (en) 1998-10-27 2000-01-04 Ljung; Bo Hans Gunnar Coriolis gyro sensor
US6164134A (en) 1999-01-29 2000-12-26 Hughes Electronics Corporation Balanced vibratory gyroscope and amplitude control for same
JP4126833B2 (ja) 1999-03-12 2008-07-30 株式会社デンソー 角速度センサ装置
JP3407689B2 (ja) * 1999-04-22 2003-05-19 株式会社村田製作所 振動ジャイロ
US6189381B1 (en) 1999-04-26 2001-02-20 Sitek, Inc. Angular rate sensor made from a structural wafer of single crystal silicon
US6289733B1 (en) 1999-05-12 2001-09-18 Hughes Electronics Corporation Planar vibratory gyroscopes
US6257059B1 (en) 1999-09-24 2001-07-10 The Charles Stark Draper Laboratory, Inc. Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
US6311555B1 (en) 1999-11-17 2001-11-06 American Gnc Corporation Angular rate producer with microelectromechanical system technology
US6370937B2 (en) * 2000-03-17 2002-04-16 Microsensors, Inc. Method of canceling quadrature error in an angular rate sensor
WO2001079862A1 (en) * 2000-04-14 2001-10-25 Microsensors, Inc. Z-axis micro-gyro
DE10029317A1 (de) * 2000-06-20 2002-01-10 Hasse & Wrede Gmbh Verfahren zur Herstellung eines Drehschwingungsdämfergehäuses, insbesondere eines Gehäuses für einen Viskositätsdrehschwingungsdämpfer
KR100493151B1 (ko) * 2000-07-19 2005-06-02 삼성전자주식회사 멀티폴디스 스프링을 이용한 다축 구동을 위한싱글스테이지 마이크로 구동기
US6516666B1 (en) * 2000-09-19 2003-02-11 Motorola, Inc. Yaw rate motion sensor
JP2003185482A (ja) * 2001-12-17 2003-07-03 Yokogawa Electric Corp コリオリ質量流量計
JP3870895B2 (ja) * 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
AU2003209031A1 (en) * 2002-02-06 2003-09-02 Analog Devices, Inc. Micromachined gyroscope
US6860151B2 (en) * 2003-02-07 2005-03-01 Honeywell International Inc. Methods and systems for controlling movement within MEMS structures
US6767758B1 (en) * 2003-04-28 2004-07-27 Analog Devices, Inc. Micro-machined device structures having on and off-axis orientations

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Publication number Publication date
EP2325604B1 (de) 2013-04-24
EP1472507A1 (de) 2004-11-03
US7204144B2 (en) 2007-04-17
JP2005526959A (ja) 2005-09-08
US20060191339A1 (en) 2006-08-31
US20060191340A1 (en) 2006-08-31
EP1472507B1 (de) 2011-05-11
US7357025B2 (en) 2008-04-15
EP2325604A1 (de) 2011-05-25
US20060179945A1 (en) 2006-08-17
AU2003209031A8 (en) 2003-09-02
US7032451B2 (en) 2006-04-25
US20050139005A1 (en) 2005-06-30
WO2003067190A8 (en) 2005-08-18
US6877374B2 (en) 2005-04-12
US20030172753A1 (en) 2003-09-18
WO2003067190A1 (en) 2003-08-14
EP2327959A1 (de) 2011-06-01
EP2327959B1 (de) 2012-09-12
AU2003209031A1 (en) 2003-09-02
CN1628238B (zh) 2012-05-23
CN1628238A (zh) 2005-06-15
DE03707756T1 (de) 2005-05-04
JP4392246B2 (ja) 2009-12-24
US7216539B2 (en) 2007-05-15

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