CN102730401A - 基板中转装置及基板搬运系统 - Google Patents
基板中转装置及基板搬运系统 Download PDFInfo
- Publication number
- CN102730401A CN102730401A CN2012102132788A CN201210213278A CN102730401A CN 102730401 A CN102730401 A CN 102730401A CN 2012102132788 A CN2012102132788 A CN 2012102132788A CN 201210213278 A CN201210213278 A CN 201210213278A CN 102730401 A CN102730401 A CN 102730401A
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- transferring device
- docking
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- 239000000758 substrate Substances 0.000 title claims abstract description 204
- 230000007246 mechanism Effects 0.000 claims abstract description 112
- 238000003032 molecular docking Methods 0.000 claims description 37
- 230000005540 biological transmission Effects 0.000 claims description 34
- 238000000034 method Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 108060008539 Transglutaminase Proteins 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 102000003601 transglutaminase Human genes 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- -1 when docking Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (10)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210213278.8A CN102730401B (zh) | 2012-06-26 | 2012-06-26 | 基板中转装置及基板搬运系统 |
US13/574,603 US8776983B2 (en) | 2012-06-26 | 2012-06-28 | Turntable device for substrate and substrate transporting system |
PCT/CN2012/077687 WO2014000199A1 (zh) | 2012-06-26 | 2012-06-28 | 基板中转装置及基板搬运系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210213278.8A CN102730401B (zh) | 2012-06-26 | 2012-06-26 | 基板中转装置及基板搬运系统 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102730401A true CN102730401A (zh) | 2012-10-17 |
CN102730401B CN102730401B (zh) | 2014-04-02 |
Family
ID=46986839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210213278.8A Expired - Fee Related CN102730401B (zh) | 2012-06-26 | 2012-06-26 | 基板中转装置及基板搬运系统 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102730401B (zh) |
WO (1) | WO2014000199A1 (zh) |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103523503A (zh) * | 2013-10-29 | 2014-01-22 | 南安市信捷机械有限公司 | 一种全自动的旋转调头机 |
CN103569611A (zh) * | 2013-10-23 | 2014-02-12 | 南京熊猫电子股份有限公司 | 一种洁净环境玻璃走行提升装置 |
WO2014079077A1 (zh) * | 2012-11-21 | 2014-05-30 | 深圳市华星光电技术有限公司 | 用于玻璃基板的传输装置和传输方法 |
CN105882709A (zh) * | 2016-06-17 | 2016-08-24 | 费晓杰 | 一种包装箱放置运送机构 |
CN106586138A (zh) * | 2017-02-28 | 2017-04-26 | 江苏创源电子有限公司 | 一种自动检测收料设备以及自动包装机 |
CN106629053A (zh) * | 2016-09-20 | 2017-05-10 | 信义玻璃(天津)有限公司 | 一种千层架和调整玻璃传送顺序的方法 |
CN106944896A (zh) * | 2017-03-15 | 2017-07-14 | 东旭科技集团有限公司 | 平板玻璃的磨边系统及磨边方法 |
CN107089512A (zh) * | 2017-06-07 | 2017-08-25 | 武汉华星光电技术有限公司 | 易于清理保养和维护的输送机 |
CN107673074A (zh) * | 2017-09-20 | 2018-02-09 | 武汉华星光电技术有限公司 | 转向装置及基板传输装置 |
CN109019025A (zh) * | 2018-08-28 | 2018-12-18 | 杜鑫 | 一种建筑安装用玻璃转运装置 |
CN109368157A (zh) * | 2018-09-25 | 2019-02-22 | 江苏森蓝智能系统有限公司 | 一种自动双层真空罐对接转运设备 |
CN110282373A (zh) * | 2019-07-31 | 2019-09-27 | 上海梅山工业民用工程设计研究院有限公司 | 钢卷运输系统 |
CN110817325A (zh) * | 2020-01-13 | 2020-02-21 | 广东原点智能技术有限公司 | 一种发动机缸体的下料系统 |
CN111392395A (zh) * | 2020-03-30 | 2020-07-10 | 武汉华星光电半导体显示技术有限公司 | 上料装置 |
CN113927532A (zh) * | 2021-11-30 | 2022-01-14 | 重庆工程职业技术学院 | 一种中转模块及其地铁受电弓检修平台 |
CN114408572A (zh) * | 2021-12-20 | 2022-04-29 | 江苏长欣车辆装备有限公司 | 一种玻璃生产车间使用的转运装置 |
CN114769130A (zh) * | 2022-04-29 | 2022-07-22 | 北京京东乾石科技有限公司 | 分拣装置和分拣系统 |
CN116553148A (zh) * | 2023-07-12 | 2023-08-08 | 前海晶方云(深圳)测试设备有限公司 | 上料机构 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5564889A (en) * | 1993-06-18 | 1996-10-15 | Tokyo Electron Limited | Semiconductor treatment system and method for exchanging and treating substrate |
JP2006151524A (ja) * | 2004-11-25 | 2006-06-15 | Mitsubishi Materials Techno Corp | 昇降型の搬送受け渡し装置 |
CN1816907A (zh) * | 2003-07-04 | 2006-08-09 | 乐华股份有限公司 | 薄板状基板的运送装置及其运送控制方法 |
CN201638799U (zh) * | 2010-03-05 | 2010-11-17 | 东莞宏威数码机械有限公司 | 移动式旋转装载装置 |
CN102464210A (zh) * | 2010-11-11 | 2012-05-23 | 株式会社Siti | 基板搬运装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4313284B2 (ja) * | 2004-11-15 | 2009-08-12 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP5128148B2 (ja) * | 2007-03-02 | 2013-01-23 | 株式会社オーク製作所 | 搬送装置 |
TW201206803A (en) * | 2010-04-14 | 2012-02-16 | Tae Sung Eng Co Ltd | Multi-gate conveyor |
CN201990257U (zh) * | 2011-01-18 | 2011-09-28 | 东莞宏威数码机械有限公司 | 丝杆定位装置 |
-
2012
- 2012-06-26 CN CN201210213278.8A patent/CN102730401B/zh not_active Expired - Fee Related
- 2012-06-28 WO PCT/CN2012/077687 patent/WO2014000199A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5564889A (en) * | 1993-06-18 | 1996-10-15 | Tokyo Electron Limited | Semiconductor treatment system and method for exchanging and treating substrate |
CN1816907A (zh) * | 2003-07-04 | 2006-08-09 | 乐华股份有限公司 | 薄板状基板的运送装置及其运送控制方法 |
JP2006151524A (ja) * | 2004-11-25 | 2006-06-15 | Mitsubishi Materials Techno Corp | 昇降型の搬送受け渡し装置 |
CN201638799U (zh) * | 2010-03-05 | 2010-11-17 | 东莞宏威数码机械有限公司 | 移动式旋转装载装置 |
CN102464210A (zh) * | 2010-11-11 | 2012-05-23 | 株式会社Siti | 基板搬运装置 |
Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014079077A1 (zh) * | 2012-11-21 | 2014-05-30 | 深圳市华星光电技术有限公司 | 用于玻璃基板的传输装置和传输方法 |
CN103569611A (zh) * | 2013-10-23 | 2014-02-12 | 南京熊猫电子股份有限公司 | 一种洁净环境玻璃走行提升装置 |
CN103523503A (zh) * | 2013-10-29 | 2014-01-22 | 南安市信捷机械有限公司 | 一种全自动的旋转调头机 |
CN105882709A (zh) * | 2016-06-17 | 2016-08-24 | 费晓杰 | 一种包装箱放置运送机构 |
CN106629053B (zh) * | 2016-09-20 | 2019-09-27 | 信义玻璃(天津)有限公司 | 一种千层架和调整玻璃传送顺序的方法 |
CN106629053A (zh) * | 2016-09-20 | 2017-05-10 | 信义玻璃(天津)有限公司 | 一种千层架和调整玻璃传送顺序的方法 |
CN106586138A (zh) * | 2017-02-28 | 2017-04-26 | 江苏创源电子有限公司 | 一种自动检测收料设备以及自动包装机 |
CN106586138B (zh) * | 2017-02-28 | 2022-06-03 | 江苏创源电子有限公司 | 一种自动检测收料设备以及自动包装机 |
CN106944896A (zh) * | 2017-03-15 | 2017-07-14 | 东旭科技集团有限公司 | 平板玻璃的磨边系统及磨边方法 |
CN106944896B (zh) * | 2017-03-15 | 2020-01-10 | 东旭科技集团有限公司 | 平板玻璃的磨边系统及磨边方法 |
CN107089512A (zh) * | 2017-06-07 | 2017-08-25 | 武汉华星光电技术有限公司 | 易于清理保养和维护的输送机 |
CN107673074B (zh) * | 2017-09-20 | 2019-09-06 | 武汉华星光电技术有限公司 | 转向装置及基板传输装置 |
CN107673074A (zh) * | 2017-09-20 | 2018-02-09 | 武汉华星光电技术有限公司 | 转向装置及基板传输装置 |
CN109019025B (zh) * | 2018-08-28 | 2020-08-14 | 湖北盛荣建设有限公司 | 一种建筑安装用玻璃转运装置 |
CN109019025A (zh) * | 2018-08-28 | 2018-12-18 | 杜鑫 | 一种建筑安装用玻璃转运装置 |
CN109368157A (zh) * | 2018-09-25 | 2019-02-22 | 江苏森蓝智能系统有限公司 | 一种自动双层真空罐对接转运设备 |
CN110282373A (zh) * | 2019-07-31 | 2019-09-27 | 上海梅山工业民用工程设计研究院有限公司 | 钢卷运输系统 |
CN110817325B (zh) * | 2020-01-13 | 2020-04-21 | 广东原点智能技术有限公司 | 一种发动机缸体的下料系统 |
CN110817325A (zh) * | 2020-01-13 | 2020-02-21 | 广东原点智能技术有限公司 | 一种发动机缸体的下料系统 |
CN111392395A (zh) * | 2020-03-30 | 2020-07-10 | 武汉华星光电半导体显示技术有限公司 | 上料装置 |
CN113927532A (zh) * | 2021-11-30 | 2022-01-14 | 重庆工程职业技术学院 | 一种中转模块及其地铁受电弓检修平台 |
CN113927532B (zh) * | 2021-11-30 | 2023-01-24 | 重庆工程职业技术学院 | 一种中转模块及其地铁受电弓检修平台 |
CN114408572A (zh) * | 2021-12-20 | 2022-04-29 | 江苏长欣车辆装备有限公司 | 一种玻璃生产车间使用的转运装置 |
CN114408572B (zh) * | 2021-12-20 | 2024-04-26 | 江苏长欣车辆装备有限公司 | 一种玻璃生产车间使用的转运装置 |
CN114769130A (zh) * | 2022-04-29 | 2022-07-22 | 北京京东乾石科技有限公司 | 分拣装置和分拣系统 |
CN116553148A (zh) * | 2023-07-12 | 2023-08-08 | 前海晶方云(深圳)测试设备有限公司 | 上料机构 |
CN116553148B (zh) * | 2023-07-12 | 2023-12-08 | 前海晶方云(深圳)测试设备有限公司 | 上料机构 |
Also Published As
Publication number | Publication date |
---|---|
CN102730401B (zh) | 2014-04-02 |
WO2014000199A1 (zh) | 2014-01-03 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Substrate transfer device and substrate carrying system Effective date of registration: 20190426 Granted publication date: 20140402 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: 2019440020032 |
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