CN101857141B - 输送方向转换装置及悬浮输送系统 - Google Patents

输送方向转换装置及悬浮输送系统 Download PDF

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CN101857141B
CN101857141B CN2010101558799A CN201010155879A CN101857141B CN 101857141 B CN101857141 B CN 101857141B CN 2010101558799 A CN2010101558799 A CN 2010101558799A CN 201010155879 A CN201010155879 A CN 201010155879A CN 101857141 B CN101857141 B CN 101857141B
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roller
conversion
direction conversion
substrate
throughput
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CN101857141A (zh
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中川敏彦
和田芳幸
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IHI Corp
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IHI Corp
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CN2010101558799A 2009-04-07 2010-04-02 输送方向转换装置及悬浮输送系统 Active CN101857141B (zh)

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JP2009-093026 2009-04-07
JP2009093026A JP5446403B2 (ja) 2009-04-07 2009-04-07 搬送方向転換装置及び浮上搬送システム

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CN101857141A CN101857141A (zh) 2010-10-13
CN101857141B true CN101857141B (zh) 2012-10-10

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TW (1) TWI403449B (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5495065B2 (ja) * 2010-12-06 2014-05-21 株式会社ダイフク 板状体搬送装置
JP5790121B2 (ja) * 2011-04-26 2015-10-07 株式会社Ihi 浮上搬送装置
KR20130065620A (ko) * 2011-12-09 2013-06-19 가부시키가이샤묘토쿠 부상 반송 유닛
TWI448861B (zh) * 2012-02-29 2014-08-11 Chia Nan Wang Shorten the handling time of handling time
KR102089356B1 (ko) * 2013-12-31 2020-03-16 세메스 주식회사 광 배향막 형성 장치
US10189661B1 (en) * 2017-08-15 2019-01-29 Core Flow Ltd. Vacuum wheel with separate contact and vacuum surfaces
DE102018211839A1 (de) * 2018-07-17 2020-01-23 Bausch + Ströbel Maschinenfabrik Ilshofen GmbH + Co. KG Transportsystem
CN113825711B (zh) * 2019-03-22 2024-03-29 费孚内部物流公司 输送机转向器轮防堵塞组件

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004077592A (ja) * 2002-08-12 2004-03-11 Dainippon Printing Co Ltd ワークの処理方法、ワークの処理装置、及びガラス基板の搬送装置
JP2006182560A (ja) * 2004-11-30 2006-07-13 Daihen Corp 基板搬送装置
CN1891648A (zh) * 2005-07-07 2007-01-10 株式会社太星技研 平板玻璃的方向转换装置
JP2007269477A (ja) * 2006-03-31 2007-10-18 Toyo Kanetsu Solutions Kk 搬送物姿勢制御装置及び制御方法
CN101284603A (zh) * 2007-04-09 2008-10-15 株式会社日本设计工业 薄板状材料输送用辊单元以及薄板状材料输送装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0891559A (ja) * 1994-09-21 1996-04-09 Kikukawa Tekkosho:Kk 物体の搬送装置
JP2002301438A (ja) * 2001-04-06 2002-10-15 Takatori Corp 基板の搬送方法と装置
JP4186129B2 (ja) * 2003-04-14 2008-11-26 株式会社ダイフク 板状体搬送装置
JP4563191B2 (ja) * 2005-01-17 2010-10-13 大日本スクリーン製造株式会社 基板処理装置
JP5012278B2 (ja) * 2007-07-20 2012-08-29 株式会社Ｉｈｉ 浮上搬送システム
JP4900115B2 (ja) * 2007-07-27 2012-03-21 株式会社Ｉｈｉ 搬送方向転換装置及び浮上搬送システム
JP5233212B2 (ja) * 2007-09-05 2013-07-10 株式会社Ｉｈｉ クリーン搬送システム

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004077592A (ja) * 2002-08-12 2004-03-11 Dainippon Printing Co Ltd ワークの処理方法、ワークの処理装置、及びガラス基板の搬送装置
JP2006182560A (ja) * 2004-11-30 2006-07-13 Daihen Corp 基板搬送装置
CN1891648A (zh) * 2005-07-07 2007-01-10 株式会社太星技研 平板玻璃的方向转换装置
JP2007269477A (ja) * 2006-03-31 2007-10-18 Toyo Kanetsu Solutions Kk 搬送物姿勢制御装置及び制御方法
CN101284603A (zh) * 2007-04-09 2008-10-15 株式会社日本设计工业 薄板状材料输送用辊单元以及薄板状材料输送装置

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JP5446403B2 (ja) 2014-03-19
JP2010245336A (ja) 2010-10-28
TW201036897A (en) 2010-10-16
CN101857141A (zh) 2010-10-13
TWI403449B (zh) 2013-08-01

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