CN101857141B - Conveying direction converter and suspension conveying system - Google Patents
Conveying direction converter and suspension conveying system Download PDFInfo
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- CN101857141B CN101857141B CN2010101558799A CN201010155879A CN101857141B CN 101857141 B CN101857141 B CN 101857141B CN 2010101558799 A CN2010101558799 A CN 2010101558799A CN 201010155879 A CN201010155879 A CN 201010155879A CN 101857141 B CN101857141 B CN 101857141B
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Abstract
The present invention provides a conveying direction converter which can reduce the conveying time for performing suspension conveying to a substrate (W) in a second conveying direction (D2) after performing suspension conveying to the substrate (W) in a first conveying direction (D1). In the conveying direction converter, first direction converting rollers (63) which can rotate around axes parallel with the second conveying direction (D2) are respectively provided in each first direction converting roller box (59). Furthermore second direction converting rollers (75) which can rotate around axes parallel with the first conveying direction (D1) are respectively provided in each second direction converting roller box (71). The height position of each first direction converting roller (63) and each second direction converting roller (75) is lower than a reference suspension height position (LP).
Description
Technical field
The present invention relates to for example accepting the substrate of glass substrate etc. and when second floating carrier is seen off from first floating carrier, with the throughput direction of substrate from first throughput direction (throughput direction of first floating carrier) to the conveying direction converter of second throughput direction (throughput direction of the second floating carrier) conversion of the first throughput direction quadrature and use the levitation transportation system of this device.
Background technology
In recent years, in the field that cleaning is carried, various exploitations have been carried out about conveying direction converter.Prior art as conveying direction converter has following patent documentation 1 disclosed technology.
The conveying direction converter of prior art is configured in the transition region between first floating carrier and second floating carrier, and possesses the direction-changing device main body.In addition, the direction-changing device main body is provided with and utilizes compressed-air actuated pressure to make substrate be suspended to a plurality of floating units of the hoverheight position of benchmark.Upper surface at each floating unit is formed with the compressed-air actuated nozzle of ejection.
On the direction-changing device main body, dispose a plurality of direction conversions and use roller unit.A plurality of direction conversions are accepted substrate with roller unit from first floating carrier, and substrate is passed out to second floating carrier.About describing below the concrete structure of all directions conversion with roller unit.
On the direction-changing device main body, each direction conversion is provided with the direction conversion with roller and uses the roller case.The direction conversion is with the last side opening of roller case, and the lower surface of changing with the roller case in direction is formed with the direction conversion with attracting the hole.In addition, be provided with from the direction conversion with attracting the hole to attract the attraction fan of direction conversion at the lower surface of direction conversion with the air in the roller case with the roller case.Through making the direction conversion, can the inside that direction is changed with the roller case be switched to negative pressure state or atmospheric pressure state with attracting fan running or stopping.And directly the conversion of the direction at the back side of supporting substrate is arranged on the direction conversion with in the roller case with roller with the mode that can rotate around the axle center.Be provided with the appropriate location in the roller case in direction conversion and make the direction conversion use rotation motor with the direction conversion of roller rotation.
Here; Though omitted concrete structure; But the direction conversion is highly to change driver drives through making, thereby can be altered to bearing height position (the hoverheight position of benchmark) and the to be kept away height and position lower than this bearing height position with the height and position of roller.In addition; The direction conversion with the posture of roller is; Through making the posture changing driver drives, change with the axle center of the roller second parallel with direction with the axle center of the roller prime parallel with first throughput direction with second throughput direction thereby can be altered to the direction conversion.
Therefore, the height and position that all directions are changed with roller remains on the bearing height position, and, posture is held in the first roller posture, make the inside that respectively attracts fan running and all directions are changed with the roller case switch to negative pressure state simultaneously from atmospheric pressure state.And pressurized air is ejected from the nozzle of all directions conversion with floating unit, uses rotation motor through the driving direction conversion simultaneously, and a plurality of direction conversions are rotated around the axle center parallel with second throughput direction with roller.Its result can fully guarantee the conversion of substrate back and direction with the pressure of the contact between the roller, and can accept substrate with roller unit from first floating carrier through a plurality of directions conversions.
Change with roller unit after first floating carrier is accepted substrate through a plurality of directions; Direction conversion is stopped with the driving of rotation motor, and stop respectively to attract the running of fan and inside that all directions are changed with the roller case switches to atmospheric pressure state from negative pressure state.And, highly changing actuator through driving each, the height and position that all directions are changed with roller becomes height and position to be kept away from the bearing height location change.Secondly, through driving each posture changing actuator, the posture that all directions are changed with roller is altered to second from prime.And; Highly change actuator through driving each; With all directions conversions with the height and position of roller after height and position to be kept away is altered to the bearing height position, switch to negative pressure state through making the inside that respectively attracts fan running and all directions are changed with the roller case from atmospheric pressure state.And pressurized air is ejected from the nozzle of each floating unit, and rotation motor is used in driving direction conversion simultaneously, and a plurality of direction conversions are rotated around the axle center parallel with first throughput direction with roller.Its result; Substrate back and the direction conversions of can guaranteeing are fully pressed with the contact between the roller; And can the throughput direction of substrate be transformed into second throughput direction from first throughput direction, thereby with roller unit substrate is passed out to second floating carrier through a plurality of direction conversions.
Patent documentation 1: the spy of Japan opens the 2008-254918 communique
Yet; As stated; In the conveying direction converter of prior art; Accept substrate and pass out to before second floating carrier from first floating carrier through a plurality of roller units, need change to the change action of second and from all directions with the prime of the posture of roller to the change action of waiting to keep away height and position, from all directions conversion with the bearing height position of the height and position of roller from all directions conversion and wait that with the height and position of roller keeping away height and position moves to the change of bearing height position.Thus, substrate is elongated to the time of delivery (production time) of second throughput direction suspension conveying from first throughput direction, can not improve fully with the suspension of substrate and carry relevant operating efficiency.
Summary of the invention
The purpose of this invention is to provide can conveying direction converter the problems referred to above, new construction and delivery system.
Floating carrier of the present invention is; Carry first floating carrier of (carrying) substrate to accept substrate with suspended state from suspending to first throughput direction; And with the substrate of accepting to second throughput direction of the said first throughput direction quadrature on suspend second floating carrier carried when seeing off, the throughput direction of substrate is switched to said second throughput direction from said first throughput direction.Said floating carrier possesses: (1) direction-changing device main body; (2) be arranged at said direction-changing device main body and upper surface be formed with the ejection levitation gas nozzle and utilize the pressure of levitation gas to make substrate be suspended to a plurality of floating units of the hoverheight position of benchmark; (3) roller unit is used in a plurality of first direction conversions; Have the first direction conversion that is disposed on the said direction-changing device main body and goes up side opening and inner changeable one-tenth negative pressure state and atmospheric pressure state along said first throughput direction and use the roller case; And be arranged at the conversion of said first direction with in the roller case and the back side of supporting substrate, can use roller around the first direction conversion of the axle center rotation parallel with said second throughput direction; And said first direction conversion is lower than the hoverheight position of said benchmark with the height and position of roller, and accepts substrate from said first floating carrier; (4) make said first direction conversion use rotating driver with the first direction conversion of roller rotation; (5) roller unit is used in a plurality of second direction conversions; Have along said second throughput direction and be disposed on the said direction-changing device main body and go up side opening and the roller case is used in the inner second direction conversion that can switch to negative pressure state and atmospheric pressure state; And be arranged at the conversion of said second direction with in the roller case and the back side of supporting substrate, can use roller around the second direction conversion of the axle center rotation parallel with said first throughput direction; And said second direction conversion is lower than the hoverheight position of said benchmark with the height and position of roller, and sees substrate off to said second floating carrier; And (6) make said second direction conversion use rotating driver with the second direction conversion of roller rotation.
In addition, here, so-called " setting " is except the situation of direct setting, comprises that also the intermediary's parts through carriage etc. are provided with indirectly.Likewise, so-called " configuration " is except the situation of direct configuration, comprises that also the intermediary's parts through carriage etc. dispose indirectly.In addition, so-called " support " is except the situation of direct support, also comprises situation about supporting indirectly." levitation gas " comprises for example pressurized air, argon gas, nitrogen etc.
According to above-mentioned floating carrier, each second direction conversion is held in atmospheric pressure state with the inside of roller case, and each first direction conversion simultaneously switches to negative pressure state with the inside of roller case from atmospheric pressure state.And from the said nozzle ejection levitation gas of each floating unit, simultaneously said first direction conversion drives with rotating driver, and a plurality of said first direction conversions are rotated around the axle center parallel with said second throughput direction with roller.Its result; Between the back side of substrate and the conversion of said second direction are with roller, guarantee the gap; And; The back side of substrate and the conversion of said first direction are pressed with the contact between the roller and are guaranteed fully, and accept substrate with roller unit from said first floating carrier through a plurality of said first direction conversions.
Accept after the substrate with roller unit through a plurality of said first directions conversions, said first direction conversion stops with the driving of rotating driver.In addition, each second direction conversion switches to negative pressure state with the inside of roller case from atmospheric pressure state.On the other hand, each first direction conversion switches to atmospheric pressure state with the inside of roller case from negative pressure state.And from the said nozzle ejection suspension air of each floating unit, simultaneously said second direction conversion drives with rotating driver, and a plurality of said second direction conversions are rotated around the axle center parallel with said first throughput direction with roller.Its result; Between the back side of substrate and first direction conversion are with roller, guarantee the gap; And; The conversion of the back side of substrate and second direction is pressed with the contact between the roller and is guaranteed fully, and the throughput direction of substrate converts said second throughput direction to from said first throughput direction, sees substrate with roller unit to said second floating carrier through a plurality of said second direction conversions.
In a word; Can be set at roller around the said first direction conversion of the axle center parallel rotation with said second throughput direction each first direction conversion with the roller case in; Can be set at roller around the said second direction conversion of the axle center parallel rotation with said first throughput direction each second direction conversion with the roller case in, each first direction conversion is changed lower than the hoverheight position of benchmark with the height and position of roller with roller and each second direction.Therefore; Need not carry out said first direction conversion and change change action with the change action of the height and position of roller, the conversion of said first direction with roller and said second direction with the posture of roller with roller and the conversion of said second direction; Just can accept substrate, and the substrate of accepting is seen off to second floating carrier from said first floating carrier.
Levitation transportation system of the present invention, after the first throughput direction suspension conveying substrate, to the second throughput direction suspension conveying substrate of the said first throughput direction quadrature.Said levitation transportation system possesses: to first floating carrier of the said first throughput direction suspension conveying substrate; Be configured near the of said first floating carrier and to second floating carrier of the said second throughput direction suspension conveying substrate; And the above-mentioned conveying direction converter that is configured in the transition region between said first floating carrier and said second floating carrier.
In addition, in the structure of said first floating carrier or said second floating carrier, also can integrate said conveying direction converter.
In addition, according to above-mentioned levitation transportation system, can bring into play the effect same with the effect of above-mentioned floating carrier.
The effect of invention
According to the present invention; Need not carry out said first direction conversion and change change action with the change action of the height and position of roller, the conversion of said first direction with roller and said second direction with the posture of roller with roller and the conversion of said second direction; Just can accept substrate, and the substrate of accepting is seen off to said second floating carrier from said first floating carrier.Thus,, can shorten the time of delivery that substrate is suspended and carries to said second throughput direction from said first throughput direction, and can improve fully with the suspension of substrate and carry relevant operating efficiency according to the present invention.
Description of drawings
Fig. 1 is the birds-eye view of an embodiment of levitation transportation system of the present invention.
Fig. 2 is the birds-eye view of an embodiment of conveying direction converter of the present invention.
Fig. 3 is the cutaway view along the III-III line of Fig. 1.
Fig. 4 is the cutaway view along the IV-IV line of Fig. 1.
Fig. 5 is the cutaway view along the V-V line of Fig. 2.
Fig. 6 is the cutaway view along the VI-VI line of Fig. 2.
Fig. 7 is the cutaway view of variation of the conveying direction converter of above-mentioned embodiment, is and the cooresponding figure of Fig. 5.
Fig. 8 is the cutaway view of above-mentioned variation, is and the cooresponding figure of Fig. 6.
Among the figure:
D1-first throughput direction, D2-second throughput direction, the hoverheight position of LP-benchmark, the height and position of SP-floating unit, W-substrate; The 1-levitation transportation system, 3-first floating carrier, 5-second floating carrier, 7-conveying direction converter, 9-first delivery device body; The 15-floating unit, the 15n-nozzle, 17-first roller unit for conveying, 19-first carries and uses the roller case; 23-first carries and uses roller, and 25-first carries and uses rotation motor, 29-second delivery device body, 35-floating unit; The 35n-nozzle, 37-second roller unit for conveying, 39-second carries and uses the roller case, and 43-second carries and uses roller; 45-second carries and uses rotation motor, 49-direction-changing device main body, 55-floating unit, 55n-nozzle; Roller unit is used in the conversion of 57-first direction, and the roller case is used in the conversion of 59-first direction, and the conversion of 59h-first direction is with attracting the hole, and the conversion of 61-first direction is with attracting fan; Roller is used in the conversion of 63-first direction, and rotation motor is used in the conversion of 65-first direction, and roller unit is used in the conversion of 69-second direction, and the roller case is used in the conversion of 71-second direction; The conversion of 71h-second direction is with attracting the hole, and the conversion of 73-second direction is with attracting fan, and roller is used in the conversion of 75-second direction, and rotation motor is used in the conversion of 77-second direction.
The specific embodiment
Referring to figs. 1 through Fig. 5 an embodiment of the present invention is described.In addition, in the accompanying drawing, " FF " expression the place ahead to, " FR " expression rear to, " L " expression left to, " R " expression right-hand to.
As shown in Figure 1; The levitation transportation system 1 of this embodiment is used to clean the field of conveying; Be to suspend to the first throughput direction D1 (being left and right directions in this embodiment) at substrate W to carry (carrying the state of suspension under) afterwards, again to the suspend system of conveying of the second throughput direction D2 (being fore-and-aft direction in this embodiment) with the first throughput direction D1 quadrature with glass substrate etc.At first, levitation transportation system 1 is carried out summary description.
Levitation transportation system 1 possesses first floating carrier 3 that substrate W is suspended and carries to the first throughput direction D1.Near first floating carrier 3, dispose second floating carrier 5 that substrate W is suspended and carries to the second throughput direction D2.And the transition region (zone line) between the upstream side (moving into side) of the downstream of first floating carrier 3 (taking out of side) and second floating carrier 5 disposes conveying direction converter 7.Conveying direction converter 7 is accepted substrate W and when second floating carrier 5 is seen off from first floating carrier 3, converts the throughput direction of substrate W to second throughput direction D2 from the first throughput direction D1.
Concrete structure to first floating carrier 3 describes.
Like Fig. 1 and shown in Figure 3, first floating carrier 3 possesses first delivery device body 9 of extending along the first throughput direction D1.First delivery device body 9 constitutes the part of the system base of levitation transportation system 1.In addition, on first delivery device body 9, a plurality of chambers 11 that hold pressurized air (levitation gas) are configured to row shape (the being 2 row) chamber 11 of downstream (in Fig. 1, only illustrate) along the first throughput direction D1 in this embodiment.Lower surface at each chamber 11 is provided with supply compressed-air actuated supply fan 13 (being fan filter unit) in chamber 11 in this embodiment.
Be provided with at the upper surface of each chamber 11 and utilize compressed-air actuated pressure to make substrate W be suspended to the floating unit 15 of hollow form of the hoverheight position LP (with reference to Fig. 3) of benchmark.That is, a plurality of floating units 15 are set at first delivery device body 9 via a plurality of chambers 11.Here, the inside of each floating unit 15 is communicated with chamber 11.Each floating unit 15 is connected with supply fan 13 through chamber 11.And, at the upper surface of each floating unit 15, as one man form the nozzle 15n of the compressed-air actuated slit-shaped of ejection with the plan view shape of floating unit 15.Each nozzle 15n is; The pressure of pressure accumulates layer (airtrapping layer) T in order between the back side of the upper surface of each floating unit 15 and substrate W, to generate roughly uniformly; Open shown in the 2006-182563 communique like the spy of Japan, and be formed obliquely towards the central side (unit center side) of vertical direction (direction vertical) to each floating unit 15 with the upper surface of floating unit 15.
In addition, nozzle 15n also can replace as one man forming with the plan view shape of floating unit 15 situation of the slit of frame shape, forms through the plan view shape of a plurality of ribs hole or circular hole and floating unit 15 is as one man arranged.
On first delivery device body 9, a plurality of first roller unit for conveying 17 that substrate W is carried to the first throughput direction D1 are configured to row shape (being 2 row) first roller unit for conveying 17 of downstream (in Fig. 1, only illustrate) along the first throughput direction D1 in this embodiment.Concrete structure to each first roller unit for conveying 17 describes.
First delivery device body 9 is provided with first and carries with roller case 19.First carries the last side opening (opening) with roller case 19, carries the lower surface with roller case 19 to be formed with first conveying with attracting hole 19h first.In addition, carrying lower surface with roller case 19 to be provided with from first first carries with attracting hole 19h to attract first to carry with first conveying of the air roller case 19 in and use attraction fan 21.Through making first to carry, can carry inside to switch to negative pressure state and atmospheric pressure state with first with roller case 19 with attracting fan 21 runnings or stopping.
In first carries with roller case 19 with first conveying at the back side that can be provided with direct supporting substrate W around the mode that the axle center parallel with the second throughput direction D2 rotates with roller 23.Here, first conveying is carried with the topmost of roller case 19 outstanding to the top with roller 23 from first.First carries the height and position SP (with reference to Fig. 3) with roller 23 to be positioned at the low position of LP, hoverheight position than benchmark.And, carry appropriate location with roller case 19 to be provided with to make first to carry with roller 23 around first conveying of the axle center rotation parallel first with rotation motor (rotating driver is used in first conveying) 25 with the second throughput direction D2.First carries with the output shaft of rotation motor 25 and first carries with interlinked mechanism 27 through what be made up of a pair of belt wheel and band synchronously, with the S. A. interlock binding of first conveying with roller 23.
In addition, also can not make first carry lower with the height and position SP of roller 23 than hoverheight position LP, but with the identical height of hoverheight position LP.In addition, also can omit first of the part that constitutes first roller unit for conveying 17 and carry, be provided with in the appropriate location of first delivery device body 9 and make a plurality of first to carry other first conveying of rotating with rotation motor etc. with roller 23 with rotation motor 25.
Concrete structure to second floating carrier 5 describes.
Like Fig. 1 and shown in Figure 4, second floating carrier 5 possesses second delivery device body 29 of extending along the second throughput direction D2.Second delivery device body 29 constitutes the part of the system base of levitation transportation system 1.In addition, on second delivery device body 29, hold compressed-air actuated a plurality of chamber 31 and be configured to row shape (the being 2 row) chamber 31 of upstream side (in Fig. 1, only illustrate) in this embodiment along the second throughput direction D2.Lower surface at each chamber 31 is provided with supply compressed-air actuated supply fan 33 (being fan filter unit) in chamber 31 in this embodiment.
Be provided with at the upper surface of each chamber 31 and utilize compressed-air actuated pressure to make substrate W be suspended to the floating unit 35 of hollow form of the hoverheight position LP (with reference to Fig. 4) of benchmark.That is, a plurality of floating units 35 are arranged on second delivery device body 29 through a plurality of chambers 31.Here, the inside of each floating unit 35 is communicated with chamber 31.Each floating unit 35 is connected with supply fan 33 through chamber 31.And, at the upper surface of each floating unit 35, as one man be formed with the nozzle 35n of the compressed-air actuated slit-shaped of ejection with the plan view shape of floating unit 35.Because the nozzle 35n of each floating unit 35 has the structure identical with each nozzle 15n of floating unit 15, so omit its detailed description.
On second delivery device body 29, a plurality of second roller unit for conveying 37 that substrate W is carried to the second throughput direction D2 are configured to row shape (being 2 row) second roller unit for conveying 37 of upstream side (in Fig. 1, only illustrate) along the second throughput direction D2 in this embodiment.Concrete structure to each second roller unit for conveying 37 describes.
Second delivery device body 29 is provided with second and carries with roller case 39.Second carries the last side opening with roller case 39, carries the lower surface with roller case 39 to be formed with second conveying with attracting hole 39h second.In addition, carrying lower surface with roller case 39 to be provided with from second second carries with attracting hole 39h to attract second to carry with second conveying of the air roller case 39 in and use attraction fan 41.Through making second to carry, can carry inside to switch to negative pressure state and atmospheric pressure state with second with roller case 39 with attracting fan 41 runnings or stopping.
In second carries with roller case 39 with second conveying at the back side that can be provided with direct supporting substrate W around the mode that the axle center parallel with the first throughput direction D1 rotates with roller 43.Here, second conveying is carried with the topmost of roller case 39 outstanding to the top with roller 43 from second.Second conveying is identical with the height and position SP of roller 23 with first conveying with the height and position SP (with reference to Fig. 4) of roller 43, is positioned at the low position of LP, hoverheight position than benchmark.And, carry appropriate location with roller case 39 to be provided with to make second to carry with roller 43 around second conveying of the axle center rotation parallel second with rotation motor (rotating driver is used in second conveying) 45 with the first throughput direction D1.Second carries with the output shaft of rotation motor 45 and second carries with interlinked mechanism 47 through what be made up of a pair of belt wheel and band synchronously, with the S. A. interlock binding of second conveying with roller 43.
In addition, also can not make second carry lower with the height and position SP of roller 43 than hoverheight position LP, but with the identical height of hoverheight position LP.In addition, also can omit second of the part that constitutes second roller unit for conveying 37 and carry, be provided with in the appropriate location of second delivery device body 29 and make a plurality of second to carry other second conveying of rotating with rotation motor etc. with roller 43 with rotation motor 45.
Concrete structure to conveying direction converter 7 describes.
Like Fig. 2, Fig. 5 and shown in Figure 6, the transition region configuration direction-changing device main body 49 between first floating carrier 3 and second floating carrier 5.Direction-changing device main body 49 constitutes the part of the system base of levitation transportation system 1.In addition, on direction-changing device main body 49, dispose to approximate equality hold compressed-air actuated a plurality of (being 4) chamber 51 in this embodiment.Lower surface at each chamber 51 is provided with supply compressed-air actuated supply fan 53 (being fan filter unit) in chamber 51 in this embodiment.
Be provided with at the upper surface of each chamber 51 and utilize compressed-air actuated pressure to make substrate W be suspended to the floating unit 55 of hollow form of the hoverheight position LP (with reference to Fig. 5 and Fig. 6) of benchmark.That is, a plurality of floating units 55 are arranged on direction-changing device main body 49 through a plurality of chambers 51.Here, the inside of each floating unit 55 is communicated with chamber 51.Each floating unit 55 is connected with supply fan 53 through chamber 51.And, at the upper surface of each floating unit 55, as one man be formed with the nozzle 55n of the compressed-air actuated slit-shaped of ejection with the plan view shape of floating unit 55.Because the nozzle 55n of each floating unit 55 has the structure identical with each nozzle 15n of floating unit 15, so omit its detailed description.
On direction-changing device main body 49, a plurality of first direction conversions of accepting substrate W from first floating carrier 3 are configured to row shape (being 2 row) with roller unit 57 along the first throughput direction D1 this embodiment.The concrete structure of each first direction conversion with roller unit 57 described.
Direction-changing device main body 49 is provided with the first direction conversion with roller case 59.The first direction conversion is with the last side opening of roller case 59, and the lower surface of changing with roller case 59 at first direction is formed with the first direction conversion with attracting hole 59h.In addition, be provided with from the first direction conversion with attracting hole 59h to attract the first direction conversion to use attraction fan 61 at first direction conversion lower surface with the first direction conversion of the air roller case 59 in roller case 59.Through making the first direction conversion, can the inside that first direction is changed with roller case 59 be switched to negative pressure state and atmospheric pressure state with attracting fan 61 runnings or stopping.
, changes with roller 63 first direction in changing with roller case 59 with the first direction that can be provided with the back side of direct supporting substrate W around the mode of the axle center rotation parallel with the second throughput direction D2.Here, the first direction conversion is outstanding to the top with the topmost of roller case 59 from the first direction conversion with roller 63.The first direction conversion is identical with the height and position SP of roller 23 with first conveying with the height and position SP (with reference to Fig. 5 and Fig. 6) of roller 63, is positioned at the low position of LP, hoverheight position than benchmark.And, be provided with the appropriate location of roller case 59 in first direction conversion the first direction conversion is changed with rotation motor (first direction conversion is used rotating driver) 65 around the first direction of the axle center rotation parallel with the second throughput direction D2 with roller 63.The first direction conversion is changed with interlinked mechanism 67 through the first direction that is made up of a pair of belt wheel and synchronous band with the output shaft of rotation motor 65, links with the S. A. interlock of first direction conversion with roller 63.
In addition; Also can omit constitute the first direction conversion with the first direction conversion of the part of roller unit 57 with rotation motor 65, other the first direction that makes that a plurality of first directions conversions rotate with roller 63 is set in the appropriate location of direction-changing device main body 49 changes with rotation motor etc.
In addition, on direction-changing device main body 49, a plurality of second direction conversions that substrate W is seen off to second floating carrier 5 are configured to row shape (being 2 row) with roller unit 69 along the second throughput direction D2 in this embodiment.The concrete structure of each second direction conversion with roller unit 69 described.
Direction-changing device main body 49 is provided with the second direction conversion with roller case 71.The second direction conversion is with the last side opening of roller case 71, and the lower surface of changing with roller case 71 in second direction is formed with the second direction conversion with attracting hole 71h.In addition, be provided with from the second direction conversion with attracting hole 71h to attract the second direction conversion to use attraction fan 73 at second direction conversion lower surface with the second direction conversion of the air roller case 71 in roller case 71.Through making the second direction conversion, can the inside that second direction is changed with roller case 71 be switched to negative pressure state and atmospheric pressure state with attracting fan 73 runnings or stopping.
, second direction changes with roller 75 in changing with roller case 71 with the second direction that can be provided with the back side of direct supporting substrate W around the mode of the axle center rotation parallel with the first throughput direction D1.Here, the second direction conversion is outstanding to the top with the topmost of roller case 71 from the second direction conversion with roller 75.The second direction conversion is identical with the height and position SP of roller 23 with first conveying with the height and position SP (with reference to Fig. 5 and Fig. 6) of roller 75, is positioned at the low position of LP, hoverheight position than benchmark.And, be provided with the appropriate location of roller case 71 in second direction conversion the second direction conversion is changed with rotation motor (second direction conversion is used rotating driver) 77 around the second direction of the axle center rotation parallel with the first throughput direction D1 with roller 75.The second direction conversion is changed with interlinked mechanism 79 through the second direction that is made up of a pair of belt wheel and synchronous band with the output shaft of rotation motor 77, links with the S. A. interlock of second direction conversion with roller 75.
In addition; Also can omit constitute the second direction conversion with the second direction conversion of the part of roller unit 69 with rotation motor 77, other the second direction that makes that a plurality of second directions conversions rotate with roller 75 is set in the appropriate location of direction-changing device main body 49 changes with rotation motor etc.
Appropriate location on the right side of direction-changing device main body 49 is provided with reflective photoelectric sensor 81 (with reference to Fig. 2).Reflective photoelectric sensor 81 detects the situation of being accepted substrate W by a plurality of first direction conversions with roller unit 57 from first floating carrier 3 through the signal reflection of light that supervision projects.In addition, reflective photoelectric sensor 81 and control first direction conversion are with attracting fan 61, first direction conversion to be electrically connected with the controller (omission illustrates) that attracts the conversion of fan 73 and second direction with rotation motor 77 etc. with rotation motor 65, second direction conversion.
Then, effect and the effect to this embodiment describes.
The fan 13 of respectively supplying with of first floating carrier 3 turns round, from the nozzle 15n ejection pressurized air of each floating unit 15.In addition; Each first conveying is with attracting fan 21 runnings; Each first conveying suitably switches to negative pressure state from atmospheric pressure state with the inside of roller case 19, and respectively first conveying is driven with rotation motor 25, and each first conveying is rotated around the axle center parallel with the second throughput direction D2 with roller 23.Its result, the back side of substrate W and a plurality of first is carried with the pressure of the contact between the roller 23 and is guaranteed fully, and substrate W is to the first throughput direction D1 conveying that suspended.
Before the assigned position of substrate W through the downstream of first floating carrier 3; Each second direction conversion is retained as atmospheric pressure state with the inside of roller case 71; And each first direction conversion is with attracting fan 61 runnings, and each first direction conversion switches to negative pressure state with the inside of roller case 59 from atmospheric pressure state.And; The fan 53 of respectively supplying with of conveying direction converter 7 turns round; From the nozzle 55n of each floating unit 55 ejection pressurized air, and each first direction conversion drives with rotation motor 65, and each first direction conversion is rotated around the axle center parallel with the second throughput direction D2 with roller 63.Its result; Between the back side of substrate W and second direction conversion are with roller 75, guarantee the gap; And the back side of substrate W and first direction conversion are pressed with the contact between the roller 63 and are guaranteed fully, and accept substrate W with roller unit 57 from first floating carrier 3 through a plurality of first direction conversions.
Accept (that is, during from reflective photoelectric sensor 81 output detection signals) after the substrate W through the conversion of a plurality of first directions with roller unit 57, the driving that first direction is changed with rotation motor 65 stops.In addition, each second direction conversion is with attracting fan 73 runnings, and each second direction conversion switches to negative pressure state with the inside of roller case 71 from atmospheric pressure state.On the other hand, each first direction conversion is with attracting fan 61 to stop, and each first direction conversion switches to atmospheric pressure state with the inside of roller case 59 from negative pressure state.And from the nozzle 55n ejection pressurized air of each floating unit 55, second direction conversion simultaneously drives with rotation motor 77, and a plurality of second direction conversions are rotated around the axle center parallel with the first throughput direction D1 with roller 75.Its result; Between the back side of substrate W and first direction conversion are with roller 63, guarantee the gap; And; The conversion of the back side of substrate W and second direction is pressed with the contact between the roller 75 and is guaranteed fully, and the throughput direction of substrate W converts the second throughput direction D2 to from the first throughput direction D1, sees substrate W with roller unit 69 to second floating carrier 5 through the conversion of a plurality of second directions.
Through the conversion of a plurality of second directions with roller unit 69 before second floating carrier 5 is seen substrate W off or when seeing off, second floating carrier 5 respectively supply with fan 33 runnings, spray pressurized air from the nozzle 35n of each floating unit 35.In addition; Each second conveying is with attracting fan 41 runnings; Respectively second conveying switches to negative pressure state with the inside of roller case 39 from atmospheric pressure state, and respectively second conveying drives with rotation motor 45, and each second conveying is rotated around the axle center parallel with the first throughput direction D1 with roller 43.Its result, the back side of substrate W and a plurality of second is carried with the pressure of the contact between the roller 43 and is guaranteed fully, and substrate W is to the second throughput direction D2 conveying that suspended.
In a word; Can be set at roller 63 around the first direction conversion of the axle center parallel rotation in each first direction changes with roller case 59 with the second throughput direction D2; Can be set at roller 75 around the second direction conversion of the axle center parallel rotation with the first throughput direction D1 each second direction conversion with roller case 71 in, each first direction is changed and is changed lower than the hoverheight position LP of benchmark with the height and position of roller 75 with roller 63 and each second direction.Thus; Need not carry out the first direction conversion moves with the change of the posture of roller 75 with roller 63 and second direction conversion with change action, the first direction conversion of the height and position of roller 75 with roller 63 and second direction conversion; Just can accept substrate W, and the substrate of accepting is seen off to second floating carrier 5 from first floating carrier 3.
Therefore; According to this embodiment; Can shorten the time of delivery that substrate W is suspended and carries and make the throughput direction conversion and suspend and carry to the second throughput direction D2 to the first throughput direction D1, and can improve fully with the suspension of substrate W and carry relevant operating efficiency.
(variation)
The variation of above-mentioned embodiment is described with reference to Fig. 7 and Fig. 8 (with Fig. 5 and the cooresponding figure of Fig. 6).In addition, in the accompanying drawing, " FF " expression the place ahead to, " FR " expression rear to, " L " expression left to, " R " expression right-hand to.
As shown in Figure 7, each first direction conversion is provided with roller case 59 the first direction conversion is changed with the first direction conversion that attracts hole 59h to open and close with gate 83 with the first direction of roller case 59.In addition, be provided with the first direction conversion that makes the first direction conversion open and close the no bar type of (moving) with gate 83 in the conversion of each first direction with the appropriate location of roller case 59 and use switching cylinder (first direction conversion is used the driven for opening and closing device) 85 to open direction.Each first direction conversion has with switching cylinder 85 can be along opening and closing the movable piece 87 that direction moves.Movable piece 87 is attached at the appropriate location of first direction conversion with gate 83.And through the on-off action of first direction conversion with gate 83, the first direction conversion is switched to negative pressure state and atmospheric pressure state with the inside of roller case 59.
As shown in Figure 8, on each second direction is changed with roller case 71, likewise be provided with the second direction conversion is changed with gate 89 with the second direction that attracts hole 71h to open and close with the second direction conversion of roller case 71.In addition, the conversion of each second direction with the appropriate location of roller case 71 be provided with make the no bar type that the second direction conversion opens and closes with gate 89 the second direction conversion with switching cylinder (second direction conversion is used the driven for opening and closing device) 91.Each second direction conversion has with switching cylinder 91 can be along opening and closing the movable piece 93 that direction moves.Movable piece 93 is attached at the appropriate location of second direction conversion with gate 89.And through the on-off action of second direction conversion with gate 89, the second direction conversion is switched to negative pressure state and atmospheric pressure state with the inside of roller case 71.
According to this variation, also can bring into play effect and same effect and the effect of effect with above-mentioned embodiment.
In addition, the invention is not restricted to the explanation of above-mentioned embodiment, can implement in every way.In addition, scope of the present invention is not limited to these embodiments.
Claims (4)
1. conveying direction converter; From accepting substrate to first floating carrier of the first throughput direction suspension conveying substrate; And with the substrate of accepting to second throughput direction of the said first throughput direction quadrature on suspend second floating carrier carried when seeing off; Convert the throughput direction of substrate to said second throughput direction from said first throughput direction, it is characterized in that possessing:
The direction-changing device main body;
A plurality of floating units are arranged on the said direction-changing device main body, and are formed with the nozzle of ejection levitation gas at upper surface, and utilize the pressure of levitation gas to make substrate be suspended to the hoverheight position of benchmark;
Roller unit is used in a plurality of first direction conversions; Have along said first throughput direction and be configured on the said direction-changing device main body and go up side opening and the roller case is used in the inner first direction conversion that can switch to negative pressure state and atmospheric pressure state; And be arranged at the conversion of said first direction with in the roller case and the back side of supporting substrate, can use roller around the first direction conversion of the axle center rotation parallel with said second throughput direction; And said first direction conversion is lower than the hoverheight position of said benchmark with the height and position of roller, and accepts substrate from said first floating carrier;
Make said first direction conversion use rotating driver with the first direction conversion of roller rotation;
Roller unit is used in a plurality of second direction conversions; Have along said second throughput direction and be disposed on the said direction-changing device main body and go up side opening and the roller case is used in the inner second direction conversion that can switch to negative pressure state and atmospheric pressure state; And be arranged at the conversion of said second direction with in the roller case and the back side of supporting substrate, can use roller around the second direction conversion of the axle center rotation parallel with said first throughput direction; And said second direction conversion is lower than the hoverheight position of said benchmark with the height and position of roller, and sees substrate off to said second floating carrier; And
Make said second direction conversion use rotating driver with the second direction conversion of roller rotation;
Wherein:
, said first direction is formed with the first direction conversion respectively on changing with the roller case with the attraction hole,
Said each first direction conversion has from said first direction conversion with roller unit and attracts said first direction conversion to use the attraction fan with the first direction conversion of the air in the roller case with the attraction hole,
With the running that attracts fan, said first direction conversion becomes negative pressure state with the inside of roller case through said first direction conversion,
, said second direction is formed with the second direction conversion respectively on changing with the roller case with the attraction hole,
Said each second direction conversion has from said second direction conversion with roller unit and attracts said second direction conversion to use the attraction fan with the second direction conversion of the air in the roller case with the attraction hole,
With the running that attracts fan, said second direction conversion becomes negative pressure state with the inside of roller case through said second direction conversion.
2. conveying direction converter according to claim 1 is characterized in that,
With attracting stopping of fan, said first direction conversion becomes atmospheric pressure state with the inside of roller case through said first direction conversion,
With attracting stopping of fan, said second direction conversion becomes atmospheric pressure state with the inside of roller case through said second direction conversion.
3. conveying direction converter according to claim 1 is characterized in that,
Said each first direction conversion also has with roller unit: said first direction conversion is used gate with the first direction conversion that the attraction hole opens and closes,
Through the closed action of said first direction conversion with gate, said first direction conversion becomes atmospheric pressure state with the inside of roller case,
Said each second direction conversion also has with roller unit: said second direction conversion is used gate with the second direction conversion that the attraction hole opens and closes,
Through the closed action of said second direction conversion with gate, said second direction conversion becomes atmospheric pressure state with the inside of roller case.
4. levitation transportation system, after the first throughput direction suspension conveying substrate, to the second throughput direction suspension conveying substrate of the said first throughput direction quadrature, it is characterized in that having:
First floating carrier to the said first throughput direction suspension conveying substrate;
Be configured in said first floating carrier near, and to second floating carrier of the said second throughput direction suspension conveying substrate; And
Be configured in transition region between said first floating carrier and said second floating carrier, each described conveying direction converter in claim 1 to the claim 3.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009093026A JP5446403B2 (en) | 2009-04-07 | 2009-04-07 | Conveyance direction changing device and levitating conveyance system |
| JP2009-093026 | 2009-04-07 |
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| Publication Number | Publication Date |
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| CN101857141A CN101857141A (en) | 2010-10-13 |
| CN101857141B true CN101857141B (en) | 2012-10-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010101558799A Active CN101857141B (en) | 2009-04-07 | 2010-04-02 | Conveying direction converter and suspension conveying system |
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| JP (1) | JP5446403B2 (en) |
| CN (1) | CN101857141B (en) |
| TW (1) | TWI403449B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5495065B2 (en) * | 2010-12-06 | 2014-05-21 | 株式会社ダイフク | Plate-shaped body transfer device |
| JP5790121B2 (en) * | 2011-04-26 | 2015-10-07 | 株式会社Ihi | Levitation transfer device |
| CN103159028B (en) * | 2011-12-09 | 2017-05-03 | 株式会社妙德 | Floating transfer unit |
| TWI448861B (en) * | 2012-02-29 | 2014-08-11 | Chia Nan Wang | Shorten the handling time of handling time |
| KR102089356B1 (en) * | 2013-12-31 | 2020-03-16 | 세메스 주식회사 | apparatus for forming photo alignment film |
| US10189661B1 (en) * | 2017-08-15 | 2019-01-29 | Core Flow Ltd. | Vacuum wheel with separate contact and vacuum surfaces |
| DE102018211839A1 (en) * | 2018-07-17 | 2020-01-23 | Bausch + Ströbel Maschinenfabrik Ilshofen GmbH + Co. KG | transport system |
| CN113825711B (en) * | 2019-03-22 | 2024-03-29 | 费孚内部物流公司 | Anti-blocking assembly for steering gear wheel of conveyor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004077592A (en) * | 2002-08-12 | 2004-03-11 | Dainippon Printing Co Ltd | Method and apparatus for processing work, and conveying apparatus for glass substrate |
| JP2006182560A (en) * | 2004-11-30 | 2006-07-13 | Daihen Corp | Substrate carrying device |
| CN1891648A (en) * | 2005-07-07 | 2007-01-10 | 株式会社太星技研 | Plate glass direction conversion device |
| JP2007269477A (en) * | 2006-03-31 | 2007-10-18 | Toyo Kanetsu Solutions Kk | Conveyed article posture controller and control method |
| CN101284603A (en) * | 2007-04-09 | 2008-10-15 | 株式会社日本设计工业 | Roller unit for conveying sheet material and conveyer for sheet material |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0891559A (en) * | 1994-09-21 | 1996-04-09 | Kikukawa Tekkosho:Kk | Carrying device for object |
| JP2002301438A (en) * | 2001-04-06 | 2002-10-15 | Takatori Corp | Method and apparatus for conveying substrate |
| JP4186129B2 (en) * | 2003-04-14 | 2008-11-26 | 株式会社ダイフク | Plate-shaped body transfer device |
| JP4563191B2 (en) * | 2005-01-17 | 2010-10-13 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| JP5012278B2 (en) * | 2007-07-20 | 2012-08-29 | 株式会社Ｉｈｉ | Levitation transfer system |
| JP4900115B2 (en) * | 2007-07-27 | 2012-03-21 | 株式会社Ｉｈｉ | Conveyance direction changing device and levitating conveyance system |
| JP5233212B2 (en) * | 2007-09-05 | 2013-07-10 | 株式会社Ｉｈｉ | Clean transfer system |
-
2009
- 2009-04-07 JP JP2009093026A patent/JP5446403B2/en active Active
-
2010
- 2010-04-01 TW TW99110172A patent/TWI403449B/en active
- 2010-04-02 CN CN2010101558799A patent/CN101857141B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004077592A (en) * | 2002-08-12 | 2004-03-11 | Dainippon Printing Co Ltd | Method and apparatus for processing work, and conveying apparatus for glass substrate |
| JP2006182560A (en) * | 2004-11-30 | 2006-07-13 | Daihen Corp | Substrate carrying device |
| CN1891648A (en) * | 2005-07-07 | 2007-01-10 | 株式会社太星技研 | Plate glass direction conversion device |
| JP2007269477A (en) * | 2006-03-31 | 2007-10-18 | Toyo Kanetsu Solutions Kk | Conveyed article posture controller and control method |
| CN101284603A (en) * | 2007-04-09 | 2008-10-15 | 株式会社日本设计工业 | Roller unit for conveying sheet material and conveyer for sheet material |
Also Published As
| Publication number | Publication date |
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| CN101857141A (en) | 2010-10-13 |
| TWI403449B (en) | 2013-08-01 |
| JP2010245336A (en) | 2010-10-28 |
| TW201036897A (en) | 2010-10-16 |
| JP5446403B2 (en) | 2014-03-19 |
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