201036897 六、發明說明： 【發明所屬之技術領域】 本發明是例如從第1上浮式搬運裝置接受玻璃基板等 的基板，朝著第2上浮式搬運裝置送出時，將基板的搬運 方向從第1搬運方向（第1上浮式搬運裝置的搬運方向） 轉換到與第1搬運方向正交的第2搬運方向（第2上浮式 搬運裝置的搬運方向）的搬運方向轉換裝置，及使用該裝 _ 置的上浮式搬運系統。 〇 【先前技術】 近年來，在無麈室搬運的領域中，針對搬運方向轉換 裝置進行種種的開發。搬運方向轉換裝置的先前技術有表 示在下述專利文獻1的裝置。 先前技術涉及的搬運方向轉換裝置是配設在第1上浮 式搬運裝置和第2上浮式搬運裝置的中繼區域，具備方向 Q 轉換裝置主體。並在方向轉換裝置主體設有利用壓縮空氣 的壓力使基板上浮至基準的上浮高度位置爲止的複數個上 浮單元。各上浮單元的上面形成有噴出壓縮空氣的噴嘴。 在方向轉換裝置主體配設有複數個方向轉換用滾子單 元。複數個方向轉換用滾子單元是從第1上浮式搬運裝置 接受基板，將基板送出至第2上浮式搬運裝置。以下說明 各方向轉換用滾子單元的具體構成。 方向轉換裝置主體在各方向轉換用滾子各設有方向轉 換用滾子箱。在方向轉換用滾子箱的上側開口，方向轉換 -5- 201036897 用滾子箱的下面形成有方向轉換用吸孔。並且’在方向轉 換滾子箱的下面設有從方向轉換用吸孔吸引方向轉換用滾 子箱內的空氣的吸引風扇。使方向轉換用吸引風扇作動或 停止，可以將方向轉換用滾子箱的內部切換成負壓狀態與 常壓狀態。另外’在方向轉換用滾子箱內設有直接支撐著 基板內面的方向轉換用滾子可在其軸心周圍轉動。在方向 轉換用滾子箱內的適當位置設有使方向轉換用滾子轉動的 方向轉換用馬達。 在此，雖省略具體的構成，但是方向轉換用滾子的高 度位置藉著高度變更致動器的驅動，可變更爲支撐高度位 置（基準的上浮高度位置）及低於該支撐高度位置的待避 高度位置。又，方向轉換用滾子的姿勢藉著姿勢變更致動 器的驅動，可變更爲方向轉換用滾子的軸心與第2搬運方 向成平行的第1姿勢，及方向轉換用滾子的軸心與第1搬 運方向成平行的第2姿勢。 因此，使各方向轉換用滾子的高度位置維持在支撐高 度位置’且姿勢維持著第1滾子姿勢，並使得各吸引風扇 作動將各方向轉換用滾子箱的內部從常壓狀態切換成負壓 狀態。並且，從各方向轉換用上浮單元的噴嘴持續噴出壓 縮空氣，驅動方向轉換用馬達可使複數個方向轉換用滾子 在與第2搬運方向平行的軸心周圍轉動。其結果，可充分 確保基板內面與方向轉換用滾子的接觸壓，可藉著複數個 方向轉換用滾子單元從第1上浮式搬運裝置接受基板。 藉複數個方向轉換用滚子單元從第1上浮式搬運裝置 -6 - 201036897 接受基板之後，停止方向轉換用旋轉馬達的驅動，並停止 各吸引風扇的作動使各方向轉換用滾子箱的內部從負壓狀 態切換成常壓狀態。並且，驅動各高度變更致動器使得各 方向轉換用滾子的高度位置從支撐高度位置變更爲待避高 度位置。接著，驅動各姿勢變更致動器，使得各方向轉換 用滾子的姿勢從第1姿勢變更爲第2姿勢。另外，驅動各 高度變更致動器使得各方向轉換用滾子的高度位置從待避 高度位置變更爲支撐高度位置之後，作動各吸引風扇將各 方向轉換用滾子箱的內部從常壓狀態切換至負壓狀態。並 且，從各上浮單元的噴嘴持續噴出壓縮空氣，驅動方向轉 換用旋轉馬達，在與第1搬運方向平行的軸心周圍轉動複 數個方向轉換用滾子。其結果，可充分確保基板內面與方 向轉換用滾子的接觸壓，將基板的搬運方向從第1搬運方 向轉換成第2搬運方向，可藉著複數個方向轉換用滾子單 元將基板送至第2上浮式搬運裝置。 〔先前技術文獻〕 〔專利文獻1〕日本國特開2008-2549 1 8號公報 【發明內容】 〔發明所欲解決的課題〕 惟如上述，先前技術涉及的搬運方向轉換裝置中，藉 複數個滾子單元從第1上浮式搬運裝置接受基板後送到第 2上浮式搬運裝置之前，必須進行：從各方向轉換用滾子 的高度位置的支撐高度位置朝著待避高度位置的變更動作 201036897 、從各方向轉換用滾子的姿勢的第1姿勢朝著第2姿勢的 變更動作，及從各方向轉換用滾子的高度位置的待避高度 位置朝著支撐高度位置的變更動作，如此一來’會增長基 板從第1搬運方向上浮搬運到第2搬運方向的搬運時間（ 作業時間），不能充分提升基板之上浮搬運有關的作業效 率。 因此，本發明的目的是提供可解決上述問題之新穎構 成的搬運方向轉換裝置及搬運系統。 〔解決課題用的手段〕 本發明的上浮式搬運裝置是由在第1搬運方向上浮搬 運（以上浮後的狀態搬運）基板的第1上浮式搬運裝置接 受基板，朝著正交於上述第1搬運方向上浮搬運的第2上 浮式搬運裝置送出接受後的基板時，將基板的搬運方向從 上述第1搬運方向轉換成上述第2搬運方向。上述上浮式 搬運裝置，具備：（1)方向轉換裝置主體；（2)設置在 上述方向轉換裝置主體，形成有向上面噴出上浮氣體的噴 嘴’利用上浮氣體的壓力使基板上浮至基準的上浮高度位 置爲止的複數個上浮單元；（3)具備沿著上述第1搬運 方向配設在上述方向轉換裝置主體，在上側開口且內部可 切換成負壓狀態與常壓狀態的第1方向轉換用滾子箱，及 設置在上述第1方向轉換用滾子箱內支撐基板內面的可在 與上述第2搬運方向平行的軸心周圍轉動的第1方向轉換 用滾子，使上述第1方向轉換用滾子的高度位置低於上述 -8 - 201036897 基準的上浮高度位置’從上述第1上浮式搬運裝置接受基 板的複數個第1方向轉換用滾子單元；（4)使上述第1 方向轉換用滾子轉動的第1方向轉換用旋轉致動器；（5 )具備沿著上述第2搬運方向配設在上述方向轉換裝置主 體’在上側開口且內部可切換成負壓狀態與常壓狀態的第 2方向轉換用滾子箱，及設置在上述第2方向轉換用滾子 箱內支撐基板內面的可在與上述第1搬運方向平行的軸心 周圍轉動的第2方向轉換用滾子，使上述第2方向轉換用 〇 滾子的高度位置低於上述基準的上浮高度位置，對上述第 2上浮式搬運裝置送出基板的複數個第2方向轉換用滾子 單元；及（6)使上述第2方向轉換用滾子轉動的第2方 向轉換用旋轉致動器。 另外，在此所謂「設置」是除了直接設置的場合之外 ，包含經由托架等的間隔構件間接設置的場合。同樣地， 所謂「配設」是除了直接配設的場合之外，也包含經由托 Q 架等的間隔構件間接配設的場合。並且，所謂「支撐」是 除了直接支撐的場合之外，也包含間接支撐的場合。「上 浮氣體」是例如包含壓縮空氣、氬氣、氮氣等。 根據上述上浮式搬運裝置，使各第2方向轉換用滾子 箱的內部持續地保持著常壓狀態，將各第1方向轉換用滾 子箱的內部從常壓狀態切換成負壓狀態。並且，從各上、浮 單元的上述噴嘴持續噴出上浮氣體，驅動上述第1方向轉 換用轉動致動氣，使得複數個上述第1方向轉換用滚子在 與上述第2搬運方向平行的軸心周圍轉動。其結果，在基 -9 - 201036897 板的內面與上述第2方向轉換用滾子之間確保有間隙，並 可充分持續確保基板的內面與上述第1方向轉換用滾子的 接觸壓，藉著複數個上述第1方向轉換用滾子單元，從上 述第1上浮式搬運裝置接受基板。 藉複數個上述第1方向轉換用滾子單元接受基板之後 ，停止上述第1方向轉換用旋轉致動器的驅動。並將各第 2方向轉換用滾子箱的內部從常壓狀態切換成負壓狀態。 另一方面，將各第1方向轉換用滚子箱的內部從負壓狀態 切換成常壓狀態。並從各上浮單元的上述噴嘴持續噴出上 浮氣體，驅動上述第2方向轉換用旋轉致動器，使得複數 個上述第2方向轉換用滾子在與上述第1搬運方向平行的 軸心周圍轉動。其結果，在基板的內面與上述第1方向轉 換用滾子之間確保有間隙，並可充分持續確保基板的內面 與上述第2方向轉換用滾子的接觸壓，將基板的搬運方向 從上述第1搬運方向轉換成上述第2搬運方向，藉著複數 個上述第2方向轉換用滾子單元，朝上述第2上浮式搬運 裝置送出基板。 亦即，可在與上述第2搬運方向平行的軸心周圍轉動 的上述第1方向轉換用滾子是被設置在各第1方向轉換用 滾子箱內，可在與上述第1搬運方向平行的軸心周圍轉動 的上述第2方向轉換用滾子是被設置在各第2方向轉換用 滾子箱內，各第1方向轉換用滾子及各第2方向轉換用滾 子的高度位置是低於上述基準的上浮高度位置。因此，不 須進行上述第1方向轉換用滾子及上述第2方向轉換用滾 -10- 201036897 子高度位置的變更動作，或上述第1方向轉換用滾子及上 述第2方向轉換用滾子姿勢的變更動作，即可從上述第1 上浮式搬運裝置接受基板，將接受後的基板送出至上述第 2上浮式搬運裝置。 本發明的上浮式搬運系統是在第1搬運方向上浮搬運 基板之後’朝著與上述第1搬運方向正交的第2搬運方向 上浮搬運基板。上述上浮式搬運系統，具備：在上述第1 _ 搬運方向上浮搬運基板的第1上浮式搬運裝置；配設在上 Ο 述第1上浮式搬運裝置附近，在上述第2搬運方向上浮搬 運基板的第2上浮式搬運裝置；及配設在上述第1上浮式 搬運裝置和上述第2上浮式搬運裝置的中繼區域的上述搬 運方向轉換裝置。 再者’也可以在上述第1上浮式搬運裝置或上述第2 上浮式搬運裝置的構成中合倂上述搬運方向轉換裝置。 並且，根據上述上浮式搬運系統，可實現與上述上浮 式搬運裝置的作用相同的作用。 〔發明效果〕 根據本發明，不須進行上述第1方向轉換用滾子及上 述第2方向轉換用滾子高度位置的變更動作，或上述第i 方向轉換用滾子及上述第2方向轉換用滾子姿勢的變更動 作’即可從上述第1上浮式搬運裝置接受基板後，將接受 後的基板送出至上述第2上浮式搬運裝置。因此，根據本 發明’可縮短從上述第1搬運方向朝著上述第2搬運方向 -11 - 201036897 上浮搬運基板的搬運時間’充分提升基板之上浮搬運相關 的作業效率。 【實施方式】 參閱第1圖至第5圖說明本發明的一實施形態。並且 ，圖示中，r FF」是指前方、「FR」是指後方、「L」是 指左方、「R」是指右方。 如第1圖表示，本實施形態涉及的上浮式搬運系統是 使用在無塵室搬運的領域，在第1搬運方向Dl(本實施 形態的左右方向）上浮搬運（在上浮後的狀態搬運）玻璃 基板等的基板w之後，朝著與上述第1搬運方向D1正交 的第2搬運方向D2 (本實施形態爲前後方向）上浮搬運 的系統。首先，針對上浮式搬運系統1槪說如下。 上浮式搬運系統1具備在第1搬運方向D1上浮搬運 基板W的第1上浮式搬運裝置3。第1上浮式搬運裝置3 的附近，配設有在第2搬運方向D2上浮搬運基板W的第 2上浮式搬運裝置5。並在第1上浮式搬運裝置3的下游 側（搬出側）和第2上浮式搬運裝置5的上游側（搬入側 )的中繼區域（中間區域）配設有搬運方向轉換裝置7。 搬運方向轉換裝置7從第1上浮式搬運裝置3接受基板W 送出至第2上浮式搬運裝置5時，將基板w的搬運方向 從第1搬運方向D1轉換成第2搬運方向D2。 針對第1上浮式搬運裝置3的具體構成說明。 如第1圖及第3圖表示’第1上浮式搬運裝置3具備 -12- 201036897 延伸於第1搬運方向D1的第1搬運裝置主體9。第1搬 運裝置主體9是構成上浮式搬運系統1的系統基礎的一部 分》並在第1搬運裝置主體9沿著第1搬運方向D1成列 狀（本實施形態爲2列）配設有收容壓縮空氣（上浮氣體 )的複數個腔室Η (第1圖中僅圖示有下游側腔室11) 。各腔室11的下面設有可供應壓縮空氣至腔室11內的供 應風扇13 (本實施形態爲風扇濾器單元）。 各腔室11的上面設有利用壓縮空氣的壓力，使基板 Ο W上浮到基準的上浮高度位置LP(參閱第3圖）爲止的 中空狀上浮單元15。即，複數個上浮單元15是經複數個 腔室11設置在第1搬運裝置9。在此，各上浮單元15的 內部是和腔室11連通。各上浮單元15是經腔室11連接 在供應風扇13。並在各上浮單元15的上面，配合上浮單 元15的平面方向的形狀形成有噴出壓縮空氣的開縫狀噴 嘴Ιδη。各噴嘴15η由於在各上浮單元15的上面和基板 Q W的內面之間生成大致均一壓力的壓力儲存層（空氣儲存 層）Τ ’如日本國專利2006- 1 82563號公報所揭示，朝垂 直方向（上浮單元15上面垂直方向）向著各上浮單元15 的中心側（單元中心側）傾斜形成。 再者’噴嘴15η也可以配合上浮單元15的平面方向 形狀排列形成複數個角孔或圓孔來取代配合上浮單元j 5 的平面方向形狀形成框型的開縫。 第1搬運裝置主體9上，沿著第！搬運方向D1呈列 狀（本實施形態爲2列）配設有朝第i搬運方向〇 1搬運 -13- 201036897 基板W的第1搬運用滾子單元17(第1圖僅圖示最下游 側的第1搬運用滾子單元17)。針對各第1搬運用滾子單 元17的具體構成說明如下。 第1搬運裝置主體9設有第1搬運用滾子箱19。第1 搬運用滾子箱19的上側爲開口（開放）’第1搬運用滾 子箱19的下面形成有第1搬運用吸孔19h。並在第1搬運 用滾子箱19的下面設有從第1搬運用吸孔19h吸引第I 搬運用滾子箱19內的空氣的第1搬運用吸引風扇21。使 第1搬運用吸引風扇21作動或停止，可切換第1搬運用 滾子箱19的內部爲負壓狀態與常壓狀態。 第1搬運用滾子箱19內，設有可在第2搬運方向D2 平行的軸心周圍轉動，直接支撐著基板W內面的第1搬 運用滾子23。在此，第1搬運用滾子23是從第1搬運用 滾子箱19的最上部向上方突出。第1搬運用滾子23的高 度位置SP(參閱第3圖）是位在比基準的上浮高度位置 LP還低的位置。並且，在第1搬運用滾子箱19的適當位 置設有使得第1搬運用滾子23在與第2搬運方向D2平行 的軸心周圍轉動的第1搬運用旋轉馬達（第1搬運用旋轉 致動器）25。第1搬運用旋轉馬達25的輸出軸是藉一對 皮帶輪及同步皮帶所成的第1搬運用連動機構27，連動連 結在第1搬運用滾子23的轉軸。 再者，也可以使第1搬運用滾子23的高度位置SP不 低於上浮高度位置LP，形成和上浮高度位置LP相同的高 度。並可省略構成第1搬運用滾子單元17 —部份的第1 -14- 201036897 搬運用旋轉馬達25,在第1搬運裝置主體9的適當位置， 設置轉動複數個第1搬運用滾子23的其他第1搬運用旋 轉馬達等。 針對第2上浮式搬運裝置5的具體構成說明如下。 如第1圖及第4圖表示，第2上浮式搬運裝置5具備 在第2搬運方向D2延伸的第2搬運裝置主體29。第2搬 運裝置主體29是構成上浮式搬運系統1的系統基礎的一 ^ 部份。並在第2搬運裝置主體29沿著第2搬運方向D2呈 〇 列狀（本實施形態爲2列）配設有收容壓縮空氣的腔室3 1 (第1圖僅圖示有最上游側的腔室31)。在各腔室31的 下面設有供應壓縮空氣到腔室31內的供應風扇33 (本實 施形態爲風扇濾器單元）。 各腔室31的上面設有利用壓縮空氣的壓力，使基板 W上浮至基準的上浮高度位置LP(參閱第4圖）爲止的 中空狀上浮單元35。即，複數個上浮單元35是藉著複數 Q 個腔室31，設置在第2搬運裝置主體29。在此，各上浮 單元35的內部是和腔室31連通。各上浮單元35是藉腔 室31連接在供應風扇33。並在各上浮單元35的上面，配 合上浮單元35平面方向形狀形成有噴出壓縮空氣的開縫 狀噴嘴35η。各上浮單元35的噴嘴35η具有和上浮單元 15的各噴嘴15η相同的構成，因此省略其詳細說明。 在第2搬運裝置主體29沿著第2搬運方向D2呈列狀 (本實施形態爲2列）配設有將基板w朝著第2搬運方 向D2搬運的複數個第2搬運用滾子單元37(第1圖僅圖 -15- 201036897 示有最上游側的第2搬運用滾子單元37)。針對各第2搬 運用滾子單元37的具體構成說明如下。 在第2搬運裝置主體29設有第2搬運用滾子箱39。 第2搬運用滾子箱39的上側爲開口，在第2搬運用滾子 箱39的下面形成有第2搬運用吸孔39h。並在第2搬運用 滾子箱39的下面設有從第2搬運用吸孔39h吸引第2搬 運用滾子箱39內的空氣的第2搬運用吸引風扇41。使第 2搬運用吸引風扇41作動或停止，可切換第2搬運用滾子 箱3 9的內部爲負壓狀態與常壓狀態。 第2搬運用滾子箱39內設有可以使直接支撐著基板 W內面的第2搬運用滾子43在與第1搬運方向D1平行的 軸心周圍轉動。在此’第2搬運用滾子43是從第2搬運 用滾子箱39的最上部向上方突出。第2搬運用滾子43的 高度位置SP(參閱第4圖）是與第1搬運用滾子23的高 度位置SP相同，位在比基準的上浮高度位置LP還低的位 置。並在第2搬運用滾子箱39的適當位置設有使得第2 搬運用滾子43在與第1搬運方向D1平行的軸心周圍轉動 的第2搬運用旋轉馬達（第2搬運用旋轉致動器）45。第 2搬運用旋轉馬達45的輸出軸是藉著一對皮帶輪及同步皮 帶所成的第2搬運用連動機構47，連動連結在第2搬運用 滾子43的轉軸。 再者，也可以使第2搬運用滾子43的高度位置SP不 低於上浮高度位置LP，形成和上浮高度位置LP相同的高 度。並可省略構成第2搬運用滾子單元37 —部份的第2 -16- 201036897 搬運用旋轉馬達45，在第2搬運裝置主體29的適當位置 ，設置轉動複數個第2搬運用滾子43的其他第2搬運用 旋轉馬達等。 針對搬運方向轉換裝置7的具體構成說明如下。 如第2圖、第5圖及第6圖表示，第1上浮式搬運裝 置3和第2上浮式搬運裝置5的中繼區域配設有方向轉換 裝置主體49。方向轉換裝置主體49是構成上浮式搬運系 統1的系統基礎的一部份。並在方向轉換裝置主體49大 致均等地配設有收容壓縮空氣的複數個（本實施形態爲4 個）腔室51。在各腔室51的下面設有供應壓縮空氣到腔 室51內的供應風扇53 (本實施形態爲風扇濾器單元）。 各腔室51的上面設有利用壓縮空氣的壓力，使基板 W上浮至基準的上浮高度位置LP(參閱第5圖及第6圖 )爲止的中空狀上浮單元55。即，複數個上浮單元55是 藉著複數個腔室51’設置在方向轉換裝置主體49。在此 ’各上浮單元55的內部是和腔室51連通。各上浮單元55 是藉腔室51連接在供應風扇53。並在各上浮車元55的上 面’配合上浮單元55平面方向形狀形成有噴出壓縮空氣 的開縫狀噴嘴55η。各上浮單元55的噴嘴55η具有和上浮 單元15的各噴嘴15η相同的構成，因此省略其詳細說明 〇 在方向轉換裝置主體49沿著第1搬運方向D1呈列狀 (本實施形態爲2列）配設有從第1上浮式搬運裝置3接 受基板W的複數個第i方向轉換用滾子單元57。針對各 -17- 201036897 第1方向轉換用滾子單元57的具體構成說明如下。 在方向轉換裝置主體49設有第1方向轉換用滾子箱 59。第1方向轉換用滾子箱59的上側爲開口，在第1方 向轉換用滾子箱59的下面形成有第1方向轉換用吸孔59h 。並在第1方向轉換用滾子箱59的下面設有從第丨方向 轉換用吸孔59h吸引第1方向轉換用滾子箱59內的空氣 的第1方向轉換用吸引風扇61。使第1方向轉換用吸引風 扇61作動或停止’可切換第1方向轉換用滾子箱59的內 部爲負壓狀態與常壓狀態。 第1方向轉換用滾子箱59內設有可以使直接支撐著 基板W內面的第1方向轉換用滾子63在與第2搬運方向 D2平行的軸心周圍轉動。在此，第1方向轉換用滾子63 是從第1方向轉換用滾子箱59的最上部向上方突出。第1 方向轉換用滾子63的高度位置SP(參閱第5圖及第6圖 )是與第1搬運用滾子23的高度位置SP相同，位在比基 準的上浮高度位置LP還低的位置。並在第1方向轉換用 滾子箱59的適當位置設有使得第1方向轉換用滾子63在 與第2搬運方向D2平行的軸心周圍轉動的第1方向轉換 用旋轉馬達（第1方向轉換用旋轉致動器）65。第1方向 轉換用旋轉馬達65的輸出軸是藉著一對皮帶輪及同步皮 帶所成的第1方向轉換用連動機構67，連動連結在第方向 轉換用滾子63的轉軸。 再者’也可以省略構成第1方向轉換用滾子單元57 一部份的第1方向轉換用旋轉馬達65，在方向轉換裝置主 -18- 201036897 體49的適當位置，設置轉動複數個第1方向轉換用滾子 63的其他第1方向轉換用旋轉馬達等。 並且’在方向轉換裝置主體49沿著第2搬運方向D2 呈列狀（本實施形態爲2列）配設有將基板w送出至第2 上浮式搬運裝置5的複數個第2方向轉換用滾子單元69。 針對各第2方向轉換用滾子單元69的具體構成說明如下 〇 在方向轉換裝置主體49設有第2方向轉換用滾子箱 71°第2方向轉換用滾子箱71的上側爲開口，在第2方 向轉換用滾子箱71的下面形成有第2方向轉換用吸孔71h 。並在第2方向轉換用滾子箱71的下面設有從第2方向 轉換用吸孔71h吸引第2方向轉換用滾子箱71內的空氣 的第2方向轉換用吸引風扇73。使第2方向轉換用吸引風 扇73作動或停止’可切換第2方向轉換用滾子箱ή的內 部爲負壓狀態與常壓狀態。 第2方向轉換用滾子箱71內設有可以使直接支撐著 基板W內面的第2方向轉換用滾子75在與第1搬運方向 D1平行的軸心周圍轉動。在此，第2方向轉換用滾子75 是從第2方向轉換用滾子箱71的最上部向上方突出。第2 方向轉換用滾子75的高度位置SP(參閱第5圖及第6圖 )是與第1搬運用滾子23的高度位置SP相同，位在比基 準的上浮高度位置LP還低的位置。並在第2方向轉換用 滾子箱71的適當位置設有使得第2方向轉換用滾子75在 與第1搬運方向D1平行的軸心周圍轉動的第2方向轉換 19- 201036897 用旋轉馬達（第2方向轉換用旋轉致動器）77。第2方向 轉換用旋轉馬達77的輸出軸是藉著一對皮帶輪及同步皮 帶所成的第2方向轉換用連動機構79，連動連結在第2方 向轉換用滾子75的轉軸。 再者，也可以省略構成第2方向轉換用滾子單元69 一部份的第2方向轉換用旋轉馬達77，在方向轉換裝置主 體49的適當位置，設置轉動複數個第2方向轉換用滾子 75的其他第2方向轉換用旋轉馬達等。 在方向轉換裝置主體49右側的適當位置設有反射型 光電感測器81 (參閱第2圖）。反射型光電感測器81是 以監視著投光後的訊號光的反射，進行藉著複數個第1方 向轉換用滾子單元57接受來自第1上浮式搬運裝置3之 基板W的檢測。並且，反射型光電感測器8 1是被電連接 在控制第1方向轉換用吸引風扇61、第1方向轉換用旋轉 馬達65、第2方向轉換用吸引風扇73及第2方向轉換用 旋轉馬達77等的控制器（省略圖示）。 接著，針對本實施形態的作用及效果說明如下。 使第1上浮式搬運裝置3的各供應風扇13作動，從 各上浮單元15的噴嘴15η噴出壓縮空氣。並使得各第1 搬運用吸引風扇21作動，將各第1搬運用滾子箱19的內 部從常壓狀態適當切換成負壓狀態，並且驅動各第1搬運 用旋轉馬達25，使得各第1搬運用滾子23在與第2搬運 方向D2平行的軸心周圍轉動。其結果，可持續地充分確 保基板W的內面與複數個第1搬運用滾子23的接觸壓， -20- 201036897 在第1搬運方向D1上浮搬運基板W。 基板W在通過第1上浮式搬運裝置3下游側的預定 位置之前，各第2方向轉換用滾子箱71的內部被保持著 常壓狀態，使各第1方向轉換用吸引風扇61作動，將各 第1方向轉換用滾子箱59的內部從常壓狀態切換成負壓 狀態。並且，使得搬運方向轉換裝置7的各供應風扇53 作動，從各上浮單元55的噴嘴55η持續地噴出壓縮空氣 ，驅動各第1方向轉換用旋轉馬達65，使得各第1方向轉 〇 換用滾子63在與第2搬運方向D2平行的軸心周圍轉動。 其結果，基板W的內面與第2方向轉換用滾子75之間可 充分確保間隙，並持續地充分確保基板W的內面與第1 方向轉換用滾子63的接觸壓，可藉著複數個第1方向轉 換用滾子單元57從第1上浮式搬運裝置3接受基板W。 藉複數個第1方向轉換用滾子單元57接受基板W之 後（即，從反射型光電感測器8 1輸出檢測訊號時），停 q 止第1方向轉換用旋轉馬達65的驅動。並使得各第2方 向轉換用吸引風扇73作動，將各第2方向轉換用滾子箱 7 1的內部從常壓狀態切換成負壓狀態。另一方面，停止各 第1方向轉換用吸引風扇61，將各第1方向轉換用滾子箱 59的內部從常壓狀態切換成負壓狀態。並且，從各上浮單 元55的噴嘴5 5η持續噴出壓縮空氣，驅動第2方向轉換 用旋轉馬達77，使得複數個第2方向轉換用滾子75在與 第1搬運方向D1平行的軸心周圍轉動。其結果，基板W 的內面與第1方向轉換用滾子63之間可充分確保間隙， -21 - 201036897 並持續地充分確保基板W的內面與第2方向轉換用滾 75的接觸壓，將基板W的搬運方向從第1搬運方向D1 換成第2搬運方向D2，藉著複數個第2方向轉換用滾 單元將基板W送出至第2上浮式搬運裝置5。 藉複數個第2方向轉換用滾子單元69將基板W送 至第2上浮式搬運裝置5之前或送出時，使得第2上浮 搬運裝置5的各供應風扇3 3作動，從各上浮單元3 5的 嘴35n噴出壓縮空氣。並使得各第2搬運用吸引風扇 作動，將各第2搬運用滾子箱39的內部從常壓狀態適 切換成負壓狀態，並驅動各第2搬運用旋轉馬達45 ,使 各第2搬運用滾子43在與第1搬運方向D1平行的軸心 圍轉動。其結果，可充分確保基板W的內面與複數個第 搬運用滾子43的接觸壓，在第2搬運方向D2上浮搬運 板W。 總之，可在與第2搬運方向D2平行的周圍轉動的 1方向轉換用滾子63被設置在各第1方向轉換用滾子 59內，可在與第1搬運方向D1平行的周圍轉動的第2 向轉換用滾子75被設置在各第2方向轉換用滾子箱71 ’各第1方向轉換用滾子63及各第2方向轉換用滾子 的高度位置比基準的上浮高度位置LP還低。因此，不 進行第1方向轉換用滾子63及第2方向轉換用滾子75 度位置的變更動作，或第1方向轉換用滾子63及第2 向轉換用滾子75姿勢的變更動作，及可從第1上浮式 運裝置3接受基板W，將接受後的基板送出至第2上浮 子 轉 子 出 式 噴 41 當 得 周 2 基 第 箱 方 內 75 須 局 方 搬 式 -22- 201036897 搬運裝置5。 因此，根據本實施形態，在第1搬運方向D1上浮搬 運基板W，轉換搬運方向可縮短在第2搬運方向D2上浮 搬運的搬運時間，可充分提升基板W上浮搬運的相關作 業效率。 (變形例） _ 參閱第7圖及第8圖（第5圖及第6圖的相當圖）說 〇 明上述實施形態的變形例。並且，圖示中，「FF」是指前 方、「FR」是指後方、「L」是指左方、「R」是指右方 〇 如第7圖表示’各第1方向轉換用滾子箱59設有第】 方向轉換用滾子箱59的第1方向轉換用吸孔59h開關用 的第1方向轉換用遮斷器83。並在各第1方向轉換用滾子 箱59的適當位置設有第1方向轉換用遮斷器83開關（朝 Q 開放方向移動）用的無桿式第1方向轉換用開關汽缸（第 1方向轉換用開關致動器）85。各第1方向轉換用開關汽 缸85具備可朝著開關方向移動的活動件87。活動件87被 連結在第1方向轉換用遮斷器83的適當位置。並藉著第1 方向轉換用遮斷器83的開關動作，將第1方向轉換用滾 子箱5 9的內部從負壓狀態切換到常壓狀態。 如第8圖表不’在各第2方向轉換用滾子箱71同樣 設有第2方向轉換用滾子箱71的第2方向轉換用吸孔7ih 開關用的第2方向轉換用遮斷器89。並在各第2方向轉換 -23- 201036897 用滾子箱71的適當位置設有第2方向轉換用遮斷器89開 關用的無桿式第2方向轉換用開關汽缸（第2方向轉換用 開關致動器）91。各第2方向轉換用開關汽缸91具備可 朝著開關方向移動的活動件93。活動件93被連結在第2 方向轉換用遮斷器89的適當位置。並藉著第2方向轉換 用遮斷器89的開關動作，將第2方向轉換用滾子箱71的 內部切換成負壓狀態與常壓狀態。 根據本變形例也可以實現與上述實施形態的作用及效 果相同的作用及效果。 再者，本發明不限於上述實施形態的說明，可實施種 種的樣態，且本發明所包含的申請專利範圍不僅限於上述 實施形態。 【圖式簡單說明】 第1圖爲本發明所涉及上浮式搬運系統之一實施形態 的上視圖。 第2圖爲本發明所涉及搬運方向轉換裝置之一實施形 態的上視圖。 第3圖是沿著第1圖的瓜-瓜線的剖視圖。 第4圖是沿著第1圖的IV-IV線的剖視圖。 第5圖是沿著第2圖的V - V線的剖視圖。 第6圖是沿著第2圖的VI - VI線的剖視圖。 第7圖爲上述實施形態的搬運方向轉換裝置變更例的 剖視圖，第5圖的相當圖。 -24- 201036897 第8圖爲上述變形例的剖視圖，第6圖的相當圖。 【主要元件符號說明】 D 1 :第1搬運方向 D2 :第2搬運方向 LP:基準的上浮高度位置 SP:上浮單元的高度位置 W :基板 〇 1 :上浮式搬運系統 3:第1上浮式搬運裝置 5 :第2上浮式搬運裝置 7:搬運方向轉換裝置 9 :第1搬運裝置主體 15 :上浮單元 15η :噴嘴 q 17:第1搬運用滾子單元 19:第1搬運用滾子箱 23 :第1搬運用滾子 25:第1搬運用旋轉馬達 29:第2搬運裝置主體 35 :上浮單元 3 5η :噴嘴 37:第2搬運用滾子單元 3 9 :第2搬運用滾子箱 -25- 201036897 43 :第1搬運用滾子 45 :第1搬運用旋轉馬達 49:第2搬運裝置主體 55 :上浮單元 55η :噴嘴 57:第1方向轉換用滾子單元 59:第1方向轉換用滾子箱 5 9 h :第1方向轉換用吸孔 61:第1方向轉換用吸引風扇 63 :第1方向轉換用滾子 65 :第1方向轉換用旋轉馬達 69:第2方向轉換用滾子單元 71:第2方向轉換用滾子箱 71h:第2方向轉換用吸孔 73:第2方向轉換用吸引風扇 75:第2方向轉換用滾子 77:第2方向轉換用旋轉馬達 -26-201036897 VI. Description of the invention: [Technical Field of the Invention] The present invention is, for example, a substrate that receives a glass substrate or the like from the first floating transport device. When sending to the second floating transport device, The conveyance direction of the substrate is switched from the first conveyance direction (the conveyance direction of the first floating conveyance device) to the conveyance direction of the second conveyance direction (the conveyance direction of the second floating conveyance device) orthogonal to the first conveyance direction. Device, And the use of the installation of the floating transport system. 〇 【Prior Art】 In recent years, In the field of handling without a chamber, Various developments have been made for the conveyance direction switching device. The prior art of the conveyance direction switching device is shown in the following Patent Document 1. The conveyance direction switching device according to the prior art is a relay region disposed between the first upper floating conveyance device and the second upper floating conveyance device. It has a direction Q converter body. Further, a plurality of floating units are provided in the direction converter main body until the substrate is floated up to the reference floating height position by the pressure of the compressed air. A nozzle that ejects compressed air is formed on the upper surface of each floating unit. A plurality of direction changing roller units are disposed in the main body of the direction changing device. The plurality of direction changing roller units receive the substrate from the first floating transport device. The substrate is sent to the second floating transport device. The specific configuration of each of the direction changing roller units will be described below. The direction changing device main body is provided with a roller box for direction conversion in each of the direction changing rollers. Opening on the upper side of the direction change roller box, Direction change -5- 201036897 A suction hole for direction change is formed on the lower surface of the roller box. Further, a suction fan that sucks air in the direction changing roller case from the direction changing suction hole is provided on the lower surface of the direction change roller case. To make the direction change actuate or stop with a suction fan, The inside of the direction change roller box can be switched to a negative pressure state and a normal pressure state. Further, the direction changing roller that directly supports the inner surface of the substrate in the roller box for direction change can be rotated around the axis. A direction changing motor for rotating the direction changing roller is provided at an appropriate position in the direction changing roller case. here, Although the specific configuration is omitted, However, the height position of the direction changing roller is driven by the height change actuator. The variable support height position (the reference floating height position) and the to-be-avoided position below the support height position. also, The direction of the roller for direction change changes the actuator drive by the posture, The first posture in which the axis of the roller for the direction change conversion is parallel to the second conveyance direction is And the second posture in which the axis of the direction changing roller is parallel to the first transport direction. therefore, The height position of each of the direction changing rollers is maintained at the support height position' and the posture maintains the first roller posture. The suction fan is operated to switch the inside of each of the direction change roller boxes from the normal pressure state to the negative pressure state. and, The nozzles of the floating unit are continuously switched from all directions to continuously discharge the compressed air. The drive direction switching motor can rotate a plurality of the direction change rollers around the axis parallel to the second conveyance direction. the result, The contact pressure between the inner surface of the substrate and the direction changing roller can be sufficiently ensured. The substrate can be received from the first floating transport device by a plurality of direction changing roller units. After receiving the substrate from the first floating transport device -6 - 201036897 by a plurality of direction changing roller units, Stop the direction drive with the drive of the rotary motor, Then, the operation of each of the suction fans is stopped, and the inside of each of the direction change roller boxes is switched from the negative pressure state to the normal pressure state. and, The actuators for changing the heights are driven so that the height positions of the rollers for the respective direction change are changed from the support height position to the position to be avoided. then, Drive each posture change actuator, The posture of the roller for each direction change is changed from the first posture to the second posture. In addition, Driving each height changing actuator so that the height position of each direction changing roller is changed from the to-avoided height position to the supporting height position, Each of the suction fans is operated to switch the inside of each of the direction change roller boxes from the normal pressure state to the negative pressure state. And, Continuously ejecting compressed air from the nozzles of each floating unit, The drive direction is switched by a rotary motor. A plurality of direction changing rollers are rotated around an axis parallel to the first conveying direction. the result, The contact pressure between the inner surface of the substrate and the direction converting roller can be sufficiently ensured. The conveyance direction of the substrate is converted from the first conveyance direction to the second conveyance direction. The substrate can be transported to the second floating transport device by a plurality of direction switching roller units. [Prior Art Document] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2008-2549 No. 8-8 [Invention] [Problems to be Solved by the Invention] However, as described above, In the handling direction conversion device related to the prior art, A plurality of roller units are received from the first floating transport device and then sent to the second floating transport device. Must be carried out: Changing the support height position of the height position of the roller from each direction toward the height position to be avoided 201036897 Changing the first posture of the posture of the roller from the respective directions to the second posture, And the height of the to-be-avoided position of the roller for changing the direction from each direction, the positional movement toward the support height position, In this way, the transportation time (work time) in which the substrate is transported from the first transport direction to the second transport direction is increased. The efficiency of the floating handling on the substrate cannot be sufficiently improved. therefore, SUMMARY OF THE INVENTION An object of the present invention is to provide a conveyance direction changing device and a conveying system which are novel in a solution to the above problems. [Means for Solving the Problem] The floating transport apparatus according to the present invention is a first floating transport apparatus receiving substrate that is transported by floating in the first transport direction (transported in a state where it has been floated). When the received substrate is fed to the second floating transport device that is transported orthogonally to the first transport direction, The conveyance direction of the substrate is converted from the first conveyance direction to the second conveyance direction. The above floating transport device, have: (1) a body of the direction changing device; (2) disposed in the main body of the direction changing device, a plurality of floating units are formed by a nozzle that ejects the floating gas to the upper surface by using the pressure of the floating gas to float the substrate up to the reference floating height position; (3) arranging the main body of the direction changing device along the first conveying direction, The first direction switching roller case that is open at the upper side and can be switched to a negative pressure state and a normal pressure state inside, And a first direction-converting roller that is rotatable around an axis parallel to the second conveyance direction, which is provided on the inner surface of the support substrate in the first direction change roller case, a plurality of first direction changing roller units that receive the substrate from the first floating transporting device by a height position of the first direction changing roller that is lower than a height of the above-mentioned -8 - 201036897; (4) a first direction switching rotary actuator that rotates the first direction changing roller; (5) a second direction changing roller case that is disposed in the second conveying direction and that is disposed on the upper side of the direction changing device main body and that is switchable to a negative pressure state and a normal pressure state. And a second direction changing roller that is rotatable about an axial center of the support substrate in the second direction changing roller case and that is rotatable about an axis parallel to the first conveyance direction, The height position of the second direction converting 〇 roller is lower than the reference floating height position. a plurality of second direction changing roller units for feeding the substrate to the second floating conveying device; And (6) a second-direction conversion rotary actuator that rotates the second direction changing roller. In addition, The so-called "setting" here is in addition to the case where it is directly set. It includes a case where it is indirectly provided via a spacer member such as a bracket. Similarly, The so-called "distribution" is in addition to the direct arrangement. It also includes a case where it is indirectly arranged via a spacer member such as a carriage. and, The so-called "support" is in addition to the direct support. It also includes occasions for indirect support. "Floating gas" is, for example, containing compressed air, Argon, Nitrogen, etc. According to the above floating transport device, The inside of each of the second direction converting roller boxes is continuously maintained at a normal pressure state. The inside of each of the first direction converting roller boxes is switched from the normal pressure state to the negative pressure state. and, From each, The above nozzle of the floating unit continuously ejects the floating gas, Driving the above-described first direction switching rotary actuating gas, The plurality of first direction changing rollers are rotated around an axis parallel to the second conveyance direction. the result, A gap is ensured between the inner surface of the base -9 - 201036897 and the second direction changing roller. Further, the contact pressure between the inner surface of the substrate and the first direction changing roller can be sufficiently ensured. By a plurality of the above-described first direction conversion roller units, The substrate is received from the first floating transport device described above. After receiving the substrate by the plurality of the first direction converting roller units, The driving of the first direction changing rotary actuator is stopped. The inside of each of the second direction converting roller boxes is switched from the normal pressure state to the negative pressure state. on the other hand, The inside of each of the first direction converting roller boxes is switched from the negative pressure state to the normal pressure state. And continuously ejecting the floating gas from the above nozzles of each floating unit, Driving the above-described second direction switching rotary actuator, The plurality of second direction changing rollers are rotated around an axis parallel to the first conveyance direction. the result, A gap is ensured between the inner surface of the substrate and the first direction converting roller. The contact pressure between the inner surface of the substrate and the second direction changing roller can be sufficiently ensured. The conveyance direction of the substrate is converted from the first conveyance direction to the second conveyance direction. By a plurality of the above-described second direction conversion roller units, The substrate is fed to the second floating transport device. that is, The first direction changing roller that is rotatable about an axis parallel to the second conveyance direction is provided in each of the first direction conversion roller boxes. The second direction changing roller that is rotatable about an axis parallel to the first conveyance direction is provided in each of the second direction conversion roller boxes. The height position of each of the first direction changing rollers and each of the second direction changing rollers is a floating height position lower than the above reference. therefore, It is not necessary to perform the above-described first direction change roller and the second direction change roller -10- 201036897 sub-height position change operation. Or the first direction changing roller and the second direction changing roller posture changing operation, The substrate can be received from the first floating transport device described above. The received substrate is sent to the second floating transport device. In the floating transport system of the present invention, after the substrate is transported in the first transport direction, the transport substrate is transported in the second transport direction orthogonal to the first transport direction. The above floating handling system, have: a first floating transport device that transports a substrate in the first _ transport direction; It is disposed near the first floating transport device of the above description. a second floating transport device that transports the substrate in the second transport direction; And the above-described transport direction switching device disposed in the relay region of the first floating transporting device and the second floating transporting device. Further, the conveyance direction changing device may be combined with the configuration of the first floating transporting device or the second floating transporting device. and, According to the above floating handling system, The same effect as that of the above-described floating handling device can be achieved. [Effect of the Invention] According to the present invention, It is not necessary to perform the above-described first direction changing roller and the above-described second direction changing roller height position changing operation. Or the change operation of the first i-direction switching roller and the second direction changing roller posture can be received from the first floating transport device. The received substrate is sent to the second floating transport device. therefore, According to the present invention, it is possible to shorten the conveyance time of the transport substrate from the first conveyance direction toward the second conveyance direction -11 - 201036897, and to sufficiently improve the work efficiency in the floating conveyance of the substrate. [Embodiment] An embodiment of the present invention will be described with reference to Figs. 1 to 5 . And , In the illustration, r FF" means the front, "FR" means the rear, "L" means the left side, "R" means the right side. As shown in Figure 1, The floating transport system according to the present embodiment is used in the field of clean room transportation. After the substrate w such as a glass substrate is transported by the first transport direction D1 (the horizontal direction in the present embodiment) (after transporting in a state of being floated), The system is transported to the second transport direction D2 (the front-rear direction in the present embodiment) orthogonal to the first transport direction D1. First of all, The following is a description of the floating transport system. The floating transport system 1 includes a first floating transport device 3 that transports the substrate W in the first transport direction D1. In the vicinity of the first floating transport device 3, The second floating transport device 5 that transports the substrate W in the second transport direction D2 is disposed. The conveyance direction switching device 7 is disposed in the relay region (intermediate region) on the downstream side (the carry-out side) of the first floating transport apparatus 3 and the upstream side (the carry-in side) of the second floating transport apparatus 5. When the conveyance direction switching device 7 receives the substrate W from the first floating transport device 3 and sends it to the second floating transport device 5, The conveyance direction of the substrate w is converted from the first conveyance direction D1 to the second conveyance direction D2. The specific configuration of the first floating transport device 3 will be described. As shown in Fig. 1 and Fig. 3, the first floating transport apparatus 3 includes a first transporter main body 9 extending from the first transport direction D1 to -12-201036897. The first conveyance device main body 9 is a part of the system foundation of the floating conveyance system 1 and is arranged in the first conveyance device main body 9 in the first conveyance direction D1 (two rows in the present embodiment). A plurality of chambers 空气 of air (floating gas) (only the downstream side chamber 11 is illustrated in Fig. 1). A supply fan 13 (a fan filter unit in the present embodiment) for supplying compressed air into the chamber 11 is provided on the lower surface of each chamber 11. The upper surface of each chamber 11 is provided with a pressure using compressed air. The hollow floating unit 15 that floats the substrate Ο W up to the reference floating height position LP (see Fig. 3). which is, The plurality of floating units 15 are provided in the first conveying device 9 via a plurality of chambers 11. here, The interior of each of the floating units 15 is in communication with the chamber 11. Each of the floating units 15 is connected to the supply fan 13 via the chamber 11. And on the top of each floating unit 15, A slit-like nozzle Ιδη that discharges compressed air is formed in conformity with the shape of the floating unit 15 in the planar direction. Each of the nozzles 15n has a pressure storage layer (air storage layer) 生成' which generates a substantially uniform pressure between the upper surface of each of the floating unit 15 and the inner surface of the substrate Q W as disclosed in Japanese Patent Laid-Open Publication No. 2006-182563. The vertical direction (the vertical direction of the upper floating unit 15) is inclined toward the center side (unit center side) of each floating unit 15. Further, the nozzles 15n may be formed in a plurality of angular holes or round holes in accordance with the planar direction of the floating unit 15, instead of forming a frame type slit in accordance with the planar direction shape of the floating unit j5. On the first transport device main body 9, Along the first! The first transport roller unit 17 that transports the -13 to 201036897 substrate W in the ith transport direction 〇1 is disposed in the transport direction D1 (two rows in the present embodiment) (the first map shows only the most downstream side) The first transport roller unit 17). The specific configuration of each of the first transport roller units 17 will be described below. The first conveyance device main body 9 is provided with a first conveyance roller case 19. The upper side of the first transporting roller case 19 is open (open). The first transporting suction hole 19h is formed on the lower surface of the first transporting roller case 19. In the lower surface of the first transporting roller case 19, the first transporting suction fan 21 that sucks the air in the first transporting roller case 19 from the first transporting suction hole 19h is provided. The first transporting suction fan 21 is actuated or stopped. The inside of the first transport roller case 19 can be switched between a negative pressure state and a normal pressure state. In the first transport roller box 19, It is arranged to rotate around the axis parallel to the second conveying direction D2. The first transfer roller 23 that directly supports the inner surface of the substrate W is supported. here, The first transport roller 23 protrudes upward from the uppermost portion of the first transport roller case 19. The height position SP (see Fig. 3) of the first transport roller 23 is at a position lower than the reference floating height position LP. and, The first conveyance rotation motor (the first conveyance rotation actuation) that rotates the first conveyance roller 23 around the axial center parallel to the second conveyance direction D2 is provided at an appropriate position of the first conveyance roller case 19 25). The output shaft of the first conveying rotary motor 25 is a first conveying interlocking mechanism 27 formed by a pair of pulleys and a timing belt. The interlocking shaft is coupled to the rotating shaft of the first conveying roller 23. Furthermore, The height position SP of the first transport roller 23 may be not lower than the floating height position LP. The same height as the floating height position LP is formed. The 1st to 14th - 201036897 conveying rotary motor 25 constituting the first conveying roller unit 17 may be omitted. At the appropriate position of the first conveying device main body 9, The other first conveying rotary motor or the like that rotates the plurality of first conveying rollers 23 is provided. The specific configuration of the second floating transport device 5 will be described below. As shown in Figures 1 and 4, The second floating transporting device 5 includes a second transporting device main body 29 that extends in the second transporting direction D2. The second transporting device main body 29 is a part of the system foundation constituting the floating transport system 1. The second transporting device main body 29 is arranged in a matrix (two rows in the second embodiment) along the second transporting direction D2 (the second embodiment of the present embodiment) is provided with a chamber 3 1 for accommodating compressed air (the first drawing shows only the most upstream side). Chamber 31). A supply fan 33 (in this embodiment, a fan filter unit) that supplies compressed air into the chamber 31 is provided below each chamber 31. The upper surface of each chamber 31 is provided with a pressure using compressed air, The hollow floating unit 35 that floats the substrate W up to the reference floating height position LP (see Fig. 4). which is, The plurality of floating units 35 are by a plurality of Q chambers 31, It is provided in the 2nd conveyance apparatus main body 29. here, The inside of each of the floating units 35 is in communication with the chamber 31. Each of the floating units 35 is connected to the supply fan 33 by a chamber 31. And on the top of each floating unit 35, A slit nozzle 35n that discharges compressed air is formed in a shape in the plane direction of the matching floating unit 35. The nozzle 35n of each floating unit 35 has the same configuration as each nozzle 15n of the floating unit 15, Therefore, a detailed description thereof will be omitted. In the second transporting device main body 29, the second transport roller unit 37 that transports the substrate w in the second transport direction D2 is disposed in a row (two rows in the present embodiment). (Fig. 1 shows only the second transport roller unit 37 on the most upstream side in Fig. -15 - 201036897). The specific configuration of each of the second transport roller units 37 will be described below. The second transport roller case 39 is provided in the second transport device main body 29. The upper side of the second transport roller case 39 is an opening. The second conveyance suction hole 39h is formed in the lower surface of the second conveyance roller box 39. The second transport suction fan 41 that sucks the air in the second transport roller case 39 from the second transport suction hole 39h is provided on the lower surface of the second transport roller box 39. The second transporting suction fan 41 is actuated or stopped. The inside of the second transport roller case 39 can be switched between a negative pressure state and a normal pressure state. In the second transport roller case 39, the second transport roller 43 that directly supports the inner surface of the substrate W is rotatable around the axis parallel to the first transport direction D1. Here, the second transport roller 43 protrudes upward from the uppermost portion of the second transport roller case 39. The height position SP (see Fig. 4) of the second transport roller 43 is the same as the height position SP of the first transport roller 23. The bit is at a position lower than the reference floating height position LP. At the appropriate position of the second transporting roller case 39, the second transporting rotary motor (the second transporting rotary motor) that rotates the second transporting roller 43 around the axial center parallel to the first transporting direction D1 is provided. Actuator) 45. The output shaft of the second transport rotary motor 45 is a second transport interlock mechanism 47 formed by a pair of pulleys and a synchronous belt. The rotation shaft of the second conveying roller 43 is interlocked. Furthermore, The height position SP of the second transport roller 43 may be not lower than the floating height position LP. The same height as the floating height position LP is formed. The second to -16-201036897 conveying rotary motor 45 constituting the second conveying roller unit 37 can be omitted. In the appropriate position of the second conveying device main body 29, The other second conveying rotary motor or the like that rotates the plurality of second conveying rollers 43 is provided. The specific configuration of the conveyance direction switching device 7 will be described below. As shown in Figure 2, Figures 5 and 6 show that The direction change device main body 49 is disposed in the relay region of the first floating transport apparatus 3 and the second floating transport apparatus 5. The direction changing device main body 49 is a part of the system foundation constituting the floating transport system 1. A plurality of (four in the present embodiment) chambers 51 for containing compressed air are disposed substantially uniformly in the direction converter main body 49. A supply fan 53 (in the present embodiment, a fan filter unit) that supplies compressed air into the chamber 51 is provided under the respective chambers 51. The upper surface of each chamber 51 is provided with a pressure using compressed air. The hollow floating unit 55 is floated up to the reference floating height position LP (see Figs. 5 and 6). which is, A plurality of floating units 55 are provided in the direction changing device main body 49 by a plurality of chambers 51'. Here, the inside of each of the floating units 55 is in communication with the chamber 51. Each of the floating units 55 is connected to the supply fan 53 by the chamber 51. Further, a slit nozzle 55n that discharges compressed air is formed in a plane direction of the upper floating unit 55 in the upper surface of each of the upper float units 55. The nozzle 55n of each floating unit 55 has the same configuration as each nozzle 15n of the floating unit 15, Therefore, a detailed description of the ith direction is adopted in which the direction switching device main body 49 is arranged in the first conveying direction D1 (two rows in the present embodiment) and the plurality of ith directions in which the substrate W is received from the first floating conveying device 3 The conversion roller unit 57. The specific configuration of each of the -17-201036897 first-direction switching roller units 57 will be described below. The first direction changing roller case 59 is provided in the direction converter main body 49. The upper side of the first direction change roller case 59 is an opening. The first direction changing suction hole 59h is formed in the lower surface of the first direction converting roller case 59. In the lower surface of the first direction changing roller case 59, the first direction switching suction fan 61 that sucks the air in the first direction changing roller case 59 from the second direction switching suction hole 59h is provided. The first direction switching suction fan 61 is actuated or stopped. The inner portion of the switchable first direction switching roller case 59 is in a negative pressure state and a normal pressure state. In the first direction changing roller case 59, the first direction changing roller 63 that directly supports the inner surface of the substrate W is rotatable around the axis parallel to the second conveying direction D2. here, The first direction changing roller 63 protrudes upward from the uppermost portion of the first direction converting roller case 59. The height position SP (see FIGS. 5 and 6) of the first direction changing roller 63 is the same as the height position SP of the first conveying roller 23, The bit is at a position lower than the reference floating height position LP. The first direction switching rotary motor (the first direction) that rotates the first direction changing roller 63 around the axis parallel to the second conveying direction D2 is provided at an appropriate position of the first direction changing roller case 59. Rotary actuator for conversion) 65. The output shaft of the first direction switching rotary motor 65 is a first direction switching interlocking mechanism 67 formed by a pair of pulleys and a synchronous belt. The rotation shaft of the roller 63 for the first direction is interlocked. Further, the first direction changing rotary motor 65 constituting a part of the first direction changing roller unit 57 may be omitted. In the appropriate position of the direction conversion device main -18- 201036897 body 49, The other first direction changing rotary motor or the like that rotates the plurality of first direction changing rollers 63 is provided. Further, in the direction in which the direction conversion device main body 49 is arranged in the second conveyance direction D2 (two rows in the present embodiment), a plurality of second direction conversion rollers for feeding the substrate w to the second floating conveyance device 5 are disposed. Subunit 69. The specific configuration of each of the second direction changing roller units 69 is as follows: 第 The second direction changing roller case 71 is provided in the direction changing device main body 49. The upper side of the second direction changing roller case 71 is an opening. The second direction changing suction hole 71h is formed on the lower surface of the second direction converting roller case 71. In the lower surface of the second direction changing roller case 71, the second direction changing suction fan 73 that sucks the air in the second direction changing roller case 71 from the second direction changing suction hole 71h is provided. The second direction switching suction fan 73 is actuated or stopped. The inner portion of the switchable second direction switching roller case 为 is in a negative pressure state and a normal pressure state. In the second direction changing roller case 71, the second direction changing roller 75 that directly supports the inner surface of the substrate W is rotatable around the axis parallel to the first conveying direction D1. here, The second direction changing roller 75 protrudes upward from the uppermost portion of the second direction changing roller case 71. The height position SP (see FIGS. 5 and 6) of the second direction changing roller 75 is the same as the height position SP of the first conveying roller 23, The bit is at a position lower than the reference floating height position LP. At the appropriate position of the second direction changing roller case 71, a second direction change 19-201036897 for rotating the second direction changing roller 75 around the axis parallel to the first conveying direction D1 is provided. The second direction conversion rotary actuator) 77. The output shaft of the second direction switching rotary motor 77 is a second direction changing interlocking mechanism 79 formed by a pair of pulleys and a synchronous belt. The rotation shaft of the second direction conversion roller 75 is interlocked. Furthermore, The second direction changing rotary motor 77 constituting a part of the second direction changing roller unit 69 may be omitted. In the appropriate position of the direction changing device main body 49, The other second direction changing rotary motor or the like that rotates the plurality of second direction changing rollers 75 is provided. A reflective photodetector 81 is provided at an appropriate position on the right side of the direction converter main body 49 (see Fig. 2). The reflective photodetector 81 monitors the reflection of the signal light after the light is projected. The detection of the substrate W from the first floating transport apparatus 3 is performed by the plurality of first direction converting roller units 57. and, The reflective photo-electrical sensor 8 1 is electrically connected to the first direction-conversion suction fan 61, The first direction switching rotary motor 65, A controller (not shown) such as the second direction change suction fan 73 and the second direction change rotation motor 77. then, The actions and effects of the present embodiment will be described below. The supply fans 13 of the first floating transport device 3 are activated. The compressed air is ejected from the nozzles 15n of the respective floating units 15. And each of the first transporting suction fans 21 is activated. The inner portion of each of the first transport roller boxes 19 is appropriately switched from the normal pressure state to the negative pressure state. And driving each of the first conveying rotary motors 25, Each of the first transport rollers 23 is rotated around an axis parallel to the second transport direction D2. the result, The contact pressure between the inner surface of the substrate W and the plurality of first transport rollers 23 is sufficiently ensured. -20- 201036897 The substrate W is transported in the first transport direction D1. Before the substrate W passes the predetermined position on the downstream side of the first floating transport device 3, The inside of each of the second direction changing roller boxes 71 is maintained in a normal pressure state. Each of the first direction changing suction fans 61 is actuated. The inside of each of the first direction converting roller boxes 59 is switched from the normal pressure state to the negative pressure state. and, The supply fans 53 of the conveyance direction switching device 7 are caused to operate, Continuously ejecting compressed air from the nozzles 55n of the respective floating units 55, Driving each of the first direction switching rotary motors 65, Each of the first direction turning rollers 63 is rotated around the axis parallel to the second conveying direction D2. the result, The gap between the inner surface of the substrate W and the second direction changing roller 75 can be sufficiently ensured. The contact pressure between the inner surface of the substrate W and the first direction changing roller 63 is continuously ensured. The substrate W can be received from the first floating transport apparatus 3 by the plurality of first direction switching roller units 57. After the plurality of first direction converting roller units 57 receive the substrate W (ie, When the detection signal is output from the reflective photo-electrical sensor 8 1), The drive of the first direction switching rotary motor 65 is stopped. And each of the second direction conversion suction fans 73 is activated. The inside of each of the second direction changing roller boxes 7 1 is switched from the normal pressure state to the negative pressure state. on the other hand, The first direction switching suction fan 61 is stopped, The inside of each of the first direction converting roller boxes 59 is switched from the normal pressure state to the negative pressure state. and, The compressed air is continuously ejected from the nozzles 5 5 n of the respective floating units 55, Driving the second direction conversion with the rotary motor 77, The plurality of second direction changing rollers 75 are rotated around the axis parallel to the first conveyance direction D1. the result, The gap between the inner surface of the substrate W and the first direction changing roller 63 can be sufficiently ensured. -21 - 201036897 and continuously ensure the contact pressure between the inner surface of the substrate W and the second direction changing roller 75, The conveyance direction of the substrate W is changed from the first conveyance direction D1 to the second conveyance direction D2. The substrate W is sent to the second floating transport device 5 by a plurality of second direction changing roller units. When the plurality of second direction changing roller units 69 send the substrate W to the second floating transport device 5 or when it is sent out, The supply fans 3 3 of the second floating transport device 5 are activated, The compressed air is ejected from the nozzles 35n of the respective floating units 35. And each of the second transporting suction fans is activated. The inside of each of the second transport roller boxes 39 is appropriately switched from the normal pressure state to the negative pressure state. And driving each of the second conveying rotary motors 45, Each of the second transport rollers 43 is rotated in the axial center parallel to the first transport direction D1. the result, The contact pressure between the inner surface of the substrate W and the plurality of first transport rollers 43 can be sufficiently ensured. The carrier W is floated in the second conveyance direction D2. In short, The one-direction switching roller 63 that is rotatable around the second conveying direction D2 is provided in each of the first direction changing rollers 59. The second direction changing roller 75 that is rotatable in the vicinity of the first conveying direction D1 is provided in each of the second direction changing roller boxes 71' each of the first direction changing rollers 63 and each of the second direction conversions. The height position of the roller is lower than the reference floating height position LP. therefore, The change operation of the first direction change roller 63 and the second direction change roller 75 degrees is not performed. Or the change operation of the posture of the first direction changing roller 63 and the second direction converting roller 75, And receiving the substrate W from the first floating device 3, The accepted substrate is sent out to the second upper float rotor. The spray nozzle 41 is obtained in the second base of the tank. 75 is required to be moved -22- 201036897. therefore, According to this embodiment, The substrate W is transported in the first transport direction D1, The transfer direction can be shortened, and the transport time of floating transport in the second transport direction D2 can be shortened. The efficiency of the work related to the floating handling of the substrate W can be sufficiently improved. (Modification) _ Referring to Fig. 7 and Fig. 8 (corresponding to Fig. 5 and Fig. 6), a modification of the above embodiment will be described. and, In the illustration, "FF" means the front, "FR" means the rear, "L" means the left side, "R" is the first direction for switching the first direction switching suction hole 59h of the first direction switching roller case 59 in the first direction switching roller case 59 as shown in Fig. 7 The conversion interrupter 83 is used. The rodless first direction switching cylinder (the first direction) for the first direction switching breaker 83 (moving in the Q opening direction) is provided at an appropriate position of each of the first direction switching roller boxes 59. Switch actuator for conversion) 85. Each of the first direction switching cylinders 85 includes a movable member 87 that is movable in the switching direction. The movable member 87 is coupled to an appropriate position of the first direction switching breaker 83. And by the switching operation of the first direction switching interrupter 83, The inside of the first direction change roller case 59 is switched from the negative pressure state to the normal pressure state. In the second embodiment, the second direction change suction hole 7ih for the second direction change roller case 71 is provided in the same manner as the second direction change roller case 71. . In the second direction, the second direction change switch cylinder (the second direction change switch) for the switch of the second direction switching breaker 89 is provided at the appropriate position of the roller box 71. Actuator) 91. Each of the second direction switching cylinders 91 has a movable member 93 that is movable in the switching direction. The movable member 93 is coupled to an appropriate position of the second direction switching breaker 89. And by the second direction conversion, the switching operation of the interrupter 89 is performed. The inside of the second direction converting roller case 71 is switched to a negative pressure state and a normal pressure state. According to the present modification, the same actions and effects as those of the above embodiment can be achieved. Furthermore, The present invention is not limited to the description of the above embodiment, Various forms can be implemented, Further, the scope of the patent application included in the present invention is not limited to the above embodiment. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a top plan view showing an embodiment of a floating transport system according to the present invention. Fig. 2 is a top view showing an embodiment of the conveyance direction switching device according to the present invention. Fig. 3 is a cross-sectional view along the melon-melon line of Fig. 1. Fig. 4 is a cross-sectional view taken along line IV-IV of Fig. 1. Fig. 5 is a cross-sectional view taken along line V - V of Fig. 2; Fig. 6 is a cross-sectional view taken along line VI-VI of Fig. 2. Figure 7 is a cross-sectional view showing a modified example of the conveyance direction changing device of the above embodiment. Figure 5 is a comparable diagram. -24- 201036897 Figure 8 is a cross-sectional view of the above modification, Figure 6 is a comparable diagram. [Main component symbol description] D 1 : The first conveying direction D2: 2nd direction of transport LP: Base height of the reference SP: Height position of the floating unit W : Substrate 〇 1 : Floating handling system 3: 1st floating handling device 5 : 2nd floating handling device 7: Handling direction switching device 9 : The first conveying device main body 15 : Floating unit 15η : Nozzle q 17: The first transport roller unit 19: The first transport roller box 23 : The first transport roller 25: First conveying rotary motor 29: Second conveying device main body 35 : Floating unit 3 5η : Nozzle 37: The second transport roller unit 3 9 : The second transport roller box -25- 201036897 43 : First transport roller 45 : First conveying rotary motor 49: The second conveying device main body 55: Floating unit 55η: Nozzle 57: Roller unit for the first direction conversion 59: Roller box for the first direction conversion 5 9 h : First direction conversion suction hole 61: The first direction conversion suction fan 63: The first direction conversion roller 65: First direction switching rotary motor 69: The second direction conversion roller unit 71: The second direction conversion roller box 71h: The second direction conversion suction hole 73: The second direction conversion suction fan 75: The second direction conversion roller 77: Rotary motor for second direction conversion -26-