TWI403449B - Transport direction conversion device and floating handling system - Google Patents

Abstract

The present invention provides a conveying direction converter which can reduce the conveying time for performing suspension conveying to a substrate (W) in a second conveying direction (D2) after performing suspension conveying to the substrate (W) in a first conveying direction (D1). In the conveying direction converter, first direction converting rollers (63) which can rotate around axes parallel with the second conveying direction (D2) are respectively provided in each first direction converting roller box (59). Furthermore second direction converting rollers (75) which can rotate around axes parallel with the first conveying direction (D1) are respectively provided in each second direction converting roller box (71). The height position of each first direction converting roller (63) and each second direction converting roller (75) is lower than a reference suspension height position (LP).

Description

Handling direction changing device and floating handling system

In the present invention, when a substrate such as a glass substrate is received from the first floating transport device, the transport direction of the substrate is shifted from the first transport direction (the transport direction of the first floating transport device) when the second floating transport device is transported. The conveyance direction conversion device that shifts to the second conveyance direction (the conveyance direction of the second floating conveyance device) orthogonal to the first conveyance direction, and the floating conveyance system using the same.

In recent years, in the field of clean room transportation, various developments have been made for the conveyance direction switching device. The prior art of the conveyance direction switching device is shown in the following Patent Document 1.

The conveyance direction conversion device according to the prior art is disposed in a relay region of the first floating transport device and the second floating transport device, and includes a direction change device main body. Further, a plurality of floating units are provided in the direction converter main body until the substrate is floated up to the reference floating height position by the pressure of the compressed air. A nozzle that ejects compressed air is formed on the upper surface of each floating unit.

A plurality of direction changing roller units are disposed in the main body of the direction converter. The plurality of direction changing roller units receive the substrate from the first floating conveying device, and feed the substrate to the second floating conveying device. The specific configuration of each of the direction changing roller units will be described below.

Each of the direction changing device main bodies is provided with a direction converting roller case in each of the direction changing rollers. A direction change suction hole is formed in the lower surface of the direction change roller case and on the lower surface of the direction change roller case. Further, a suction fan that sucks air in the direction change roller case from the direction change suction hole is provided on the lower surface of the direction change roller case. When the direction switching suction fan is activated or stopped, the inside of the direction change roller case can be switched to the negative pressure state and the normal pressure state. Further, a direction changing roller that directly supports the inner surface of the substrate in the direction changing roller case is rotatable around its axis. A direction changing motor for rotating the direction changing roller is provided at an appropriate position in the direction changing roller case.

Here, although the specific configuration is omitted, the height position of the direction changing roller is changed by the driving of the height changing actuator, and the height position (the floating height position of the reference) and the position below the supporting height position are changed. Height position. In addition, the direction of the direction change roller is changed by the actuator of the posture change actuator, and the first posture in which the axis of the direction change roller is parallel to the second conveyance direction and the axis of the direction change roller are changed. The second posture in which the heart is parallel to the first conveyance direction.

Therefore, the height position of each of the direction changing rollers is maintained at the support height position, and the posture maintains the first roller posture, and each suction fan is actuated to switch the inside of each of the direction changing roller boxes from the normal pressure state to Negative pressure state. Further, the nozzles for switching the floating unit from each direction continuously discharge the compressed air, and the driving direction switching motor can rotate the plurality of direction changing rollers around the axis parallel to the second conveying direction. As a result, the contact pressure between the inner surface of the substrate and the direction changing roller can be sufficiently ensured, and the substrate can be received from the first floating conveying device by the plurality of direction changing roller units.

After receiving the substrate from the first floating transport device by the plurality of direction changing roller units, the driving of the direction changing rotary motor is stopped, and the operation of each of the suction fans is stopped to cause the inside of each of the direction changing roller boxes to be under a negative pressure state. Switch to the normal pressure state. Then, the height change actuators are driven to change the height position of each of the direction changing rollers from the support height position to the to-be-avoided height position. Next, each of the posture changing actuators is driven such that the posture of each of the direction changing rollers is changed from the first posture to the second posture. Further, after the height changing actuators are driven to change the height position of each of the direction changing rollers from the to-be-avoided height position to the supporting height position, the respective suction fans are operated to switch the inside of each of the direction changing roller boxes from the normal pressure state to the normal pressure state. Negative pressure state. Then, the compressed air is continuously ejected from the nozzles of the respective floating units, and the direction changing rotary motor is driven to rotate a plurality of the direction changing rollers around the axis parallel to the first conveyance direction. As a result, the contact pressure between the inner surface of the substrate and the direction changing roller can be sufficiently ensured, and the conveyance direction of the substrate can be converted from the first conveyance direction to the second conveyance direction, and the substrate can be sent by a plurality of direction conversion roller units. To the second floating transport device.

[Previous Technical Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2008-254918

However, as described above, in the conveyance direction switching device according to the prior art, it is necessary to perform the conversion of the rollers from the respective directions before the plurality of roller units receive the substrate from the first floating transport device and then send them to the second floating transport device. The change of the support height position of the height position to the height position to be avoided, the change of the first posture of the posture of the roller for each direction change to the second posture, and the height position of the roller for each direction change In the change operation of the height position to the support height position, the conveyance time (work time) of the substrate transporting from the first conveyance direction to the second conveyance direction is increased, and the work efficiency related to the floating conveyance of the substrate cannot be sufficiently improved. .

Accordingly, it is an object of the present invention to provide a conveyance direction changing device and a conveyance system which are capable of solving the above-described problems.

In the floating transport apparatus of the present invention, the first floating transport apparatus receives the substrate by the first transport direction (the state in which the float is transported) in the first transport direction, and the second transport is transported orthogonally to the first transport direction. When the floating conveyance device feeds the received substrate, the conveyance direction of the substrate is converted from the first conveyance direction to the second conveyance direction. The floating transporting apparatus includes: (1) a direction changing device main body; (2) a main body of the direction changing device, and a nozzle that discharges the floating gas to the upper surface, and the substrate is floated to a reference floating height by the pressure of the floating gas. (3) a plurality of floating units that are disposed in the first conveying direction, and that are disposed in the first conveying direction, and are open to the upper side, and are internally switchable to a negative pressure state and a normal pressure state. The sub-tank and the first direction-converting roller that is rotatable around the axial center parallel to the second conveyance direction, which is provided on the inner surface of the support substrate in the first direction change roller case, and converts the first direction The plurality of first direction changing roller units of the substrate are received from the first floating transporting device by the height position of the roller lower than the reference floating height position; (4) the first direction changing roller is rotated The first direction-converting rotary actuator (5) is provided in the direction in which the direction changing device is disposed along the second conveyance direction, and is open at the upper side and is switchable to a negative pressure state inside The second direction switching roller case in the pressure state, and the second direction conversion for the inner surface of the support substrate provided in the second direction changing roller case to be rotatable around the axis parallel to the first conveyance direction a plurality of second direction changing roller units for feeding the substrate to the second floating conveying device, wherein the height position of the second direction changing roller is lower than the reference floating height position; and (6) The second direction changing rotary actuator that rotates the second direction changing roller.

In addition, the "setting" here is a case where it is indirectly provided via a spacer member such as a bracket, in addition to the case where it is directly provided. Similarly, the term "arrangement" includes a case where it is disposed indirectly via a spacer member such as a bracket, in addition to the case where it is directly disposed. Further, the term "support" is used in the case of indirect support in addition to direct support. The "floating gas" includes, for example, compressed air, argon gas, nitrogen gas, or the like.

According to the above-described floating transporting device, the inside of each of the second direction changing roller cases is continuously maintained in a normal pressure state, and the inside of each of the first direction changing roller boxes is switched from the normal pressure state to the negative pressure state. Then, the floating gas is continuously ejected from the nozzles of the respective floating units, and the first direction changing rotary actuating gas is driven to rotate a plurality of the first direction changing rollers around the axis parallel to the second conveying direction. As a result, a gap is ensured between the inner surface of the substrate and the second direction changing roller, and the contact pressure between the inner surface of the substrate and the first direction changing roller can be sufficiently maintained. The first direction switching roller unit receives the substrate from the first floating transport device.

After receiving the substrate by the plurality of first direction changing roller units, the driving of the first direction converting rotary actuator is stopped. The inside of each of the second direction converting roller boxes is switched from the normal pressure state to the negative pressure state. On the other hand, the inside of each of the first direction converting roller boxes is switched from the negative pressure state to the normal pressure state. The floating gas is continuously ejected from the nozzles of the respective floating units, and the second direction changing rotary actuator is driven to rotate a plurality of the second direction changing rollers around an axis parallel to the first conveying direction. As a result, a gap is ensured between the inner surface of the substrate and the first direction changing roller, and the contact pressure between the inner surface of the substrate and the second direction changing roller can be sufficiently maintained, and the substrate can be conveyed. The first conveyance direction is converted into the second conveyance direction, and the plurality of the second direction change roller units are fed to the second floating conveyance device.

In other words, the first direction changing roller that is rotatable about the axis parallel to the second conveyance direction is provided in each of the first direction changing roller boxes, and is parallel to the first conveying direction. The second direction changing roller that rotates around the axis is provided in each of the second direction changing roller boxes, and the height positions of the first direction changing rollers and the second direction changing rollers are The floating height position lower than the above reference. Therefore, it is not necessary to change the height direction of the first direction change roller and the second direction change roller, or to change the first direction change roller and the second direction change roller posture. The substrate can be received from the first floating transport device, and the received substrate can be sent to the second floating transport device.

In the floating transport system of the present invention, after the substrate is transported in the first transport direction, the substrate is transported in the second transport direction orthogonal to the first transport direction. The floating transport system includes: a first floating transport device that floats the transport substrate in the first transport direction; and a second floating transport substrate in the second transport direction in the vicinity of the first floating transport device The conveyance device; and the conveyance direction conversion device disposed in the relay region of the first floating transport device and the second floating transport device.

Further, the conveyance direction changing device may be incorporated in the configuration of the first floating transporting device or the second floating transporting device.

Further, according to the above-described floating transport system, the same action as that of the above-described floating transport device can be achieved.

According to the present invention, it is not necessary to perform the first direction changing roller and the second direction changing roller height position changing operation, or the first direction changing roller and the second direction changing roller posture. After the change operation, the substrate can be received from the first floating transport device, and the received substrate can be sent to the second floating transport device. Therefore, according to the present invention, it is possible to shorten the conveyance time for transporting the substrate from the first conveyance direction toward the second conveyance direction, and to sufficiently improve the work efficiency related to the floating conveyance of the substrate.

An embodiment of the present invention will be described with reference to Figs. 1 to 5 . In the figure, "FF" means the front, "FR" means the back, "L" means the left, and "R" means the right.

As shown in Fig. 1, the floating transport system according to the present embodiment is used in a clean room transport, and is transported in the first transport direction D1 (the horizontal direction in the present embodiment) (transported in a state after being floated). After the substrate W such as a substrate, the system is lifted and transported in the second conveyance direction D2 (the front-rear direction in the present embodiment) orthogonal to the first conveyance direction D1. First, the floating transport system 1 will be described as follows.

The floating transport system 1 includes a first floating transport device 3 that transports the substrate W in the first transport direction D1. In the vicinity of the first floating transport device 3, a second floating transport device 5 that transports the substrate W in the second transport direction D2 is disposed. The conveyance direction switching device 7 is disposed in the relay region (intermediate region) on the downstream side (the carry-out side) of the first floating transport apparatus 3 and the upstream side (the carry-in side) of the second floating transport apparatus 5. When the conveyance direction conversion device 7 receives the substrate W from the first floating transport device 3 and sends it to the second floating transport device 5, the conveyance direction of the substrate W is converted from the first conveyance direction D1 to the second conveyance direction D2.

The specific configuration of the first floating transport device 3 will be described.

As shown in FIGS. 1 and 3 , the first floating transport device 3 includes a first transport device main body 9 that extends in the first transport direction D1 . The first conveyance device main body 9 is a part of the system foundation that constitutes the floating transportation system 1. In the first conveying device main body 9 in a row along the first conveying direction D1 (two rows in the present embodiment), a plurality of chambers 11 for accommodating compressed air (upward floating gas) are disposed (only the first drawing is illustrated in the first drawing). There is a downstream side chamber 11). A supply fan 13 (in this embodiment, a fan filter unit) that supplies compressed air into the chamber 11 is provided on the lower surface of each chamber 11.

The upper surface of each chamber 11 is provided with a hollow floating unit 15 that uses the pressure of the compressed air to float the substrate W up to the reference floating height position LP (see Fig. 3). That is, the plurality of floating units 15 are provided in the first conveying device 9 via the plurality of chambers 11. Here, the inside of each floating unit 15 is in communication with the chamber 11. Each of the floating units 15 is connected to the supply fan 13 via the chamber 11. A slit nozzle 15n that discharges compressed air is formed on the upper surface of each of the floating units 15 in accordance with the shape of the floating unit 15 in the planar direction. Each nozzle 15n generates a pressure storage layer (air storage layer) T having a substantially uniform pressure between the upper surface of each floating unit 15 and the inner surface of the substrate W, as disclosed in Japanese Patent Publication No. 2006-182563, in the vertical direction ( The upper surface of the floating unit 15 is vertically inclined toward the center side (unit center side) of each floating unit 15.

Further, the nozzles 15n may be formed in a plurality of angular holes or round holes in alignment with the planar direction of the floating unit 15, instead of forming a frame-type slit in accordance with the planar direction shape of the floating unit 15.

In the first conveyance device main body 9 , the first conveyance roller unit 17 that conveys the substrate W in the first conveyance direction D1 is disposed in the first conveyance direction D1 (two rows in the present embodiment) (first The figure shows only the first transport roller unit 17) on the most downstream side. The specific configuration of each of the first transport roller units 17 will be described below.

The first conveyance device main body 9 is provided with a first conveyance roller case 19. The upper side of the first transporting roller case 19 is open (open), and the first transporting suction hole 19h is formed in the lower surface of the first transporting roller case 19. In the lower surface of the first transporting roller case 19, the first transporting suction fan 21 that sucks the air in the first transporting roller case 19 from the first transporting suction hole 19h is provided. When the first transporting suction fan 21 is actuated or stopped, the inside of the first transporting roller case 19 can be switched to a negative pressure state and a normal pressure state.

The first transport roller case 19 is provided with a first transport roller 23 that can rotate around the axis parallel to the second transport direction D2 and directly support the inner surface of the substrate W. Here, the first transport roller 23 protrudes upward from the uppermost portion of the first transport roller case 19. The height position SP (see FIG. 3) of the first transport roller 23 is at a position lower than the reference floating height position LP. In addition, the first conveyance rotation motor (the first conveyance rotation) that rotates the first conveyance roller 23 around the axial center parallel to the second conveyance direction D2 is provided at an appropriate position of the first conveyance roller case 19. Actuator) 25. The output shaft of the first transporting rotary motor 25 is a first transport interlocking mechanism 27 formed by a pair of pulleys and a timing belt, and is coupled to the rotating shaft of the first transporting roller 23 in conjunction with each other.

In addition, the height position SP of the first conveyance roller 23 may not be lower than the floating height position LP, and the height equal to the floating height position LP may be formed. The first transporting rotary motor 25 constituting a part of the first transporting roller unit 17 can be omitted, and the first one of the plurality of first transporting rollers 23 can be provided at an appropriate position of the first transporting device main body 9. Rotating motor for transportation, etc.

The specific configuration of the second floating transport device 5 will be described below.

As shown in FIG. 1 and FIG. 4 , the second floating transport device 5 includes a second transport device main body 29 that extends in the second transport direction D2 . The second transport device main body 29 is a part of the system foundation constituting the floating transport system 1. In the second transporting device main body 29, the chambers 31 for accommodating compressed air are arranged in a row (two rows in the present embodiment) (the first drawing shows only the most upstream chamber). 31). A supply fan 33 (in this embodiment, a fan filter unit) that supplies compressed air into the chamber 31 is provided below the respective chambers 31.

The upper surface of each chamber 31 is provided with a hollow floating unit 35 that uses the pressure of the compressed air to float the substrate W up to the reference floating height position LP (see FIG. 4). That is, the plurality of floating units 35 are provided in the second conveying device main body 29 by the plurality of chambers 31. Here, the inside of each floating unit 35 is in communication with the chamber 31. Each of the floating units 35 is connected to the supply fan 33 by a chamber 31. On the upper surface of each of the floating units 35, a slit nozzle 35n that discharges compressed air is formed in a shape in the plane direction of the floating unit 35. The nozzle 35n of each floating unit 35 has the same configuration as each nozzle 15n of the floating unit 15, and thus detailed description thereof will be omitted.

A plurality of second transport roller units 37 that transport the substrate W in the second transport direction D2 are disposed in the second transport direction main body 29 in the second transport direction D2 (two rows in the present embodiment). (The first figure shows only the second transport roller unit 37 on the most upstream side). The specific configuration of each of the second transport roller units 37 will be described below.

The second transport roller case 39 is provided in the second transport device main body 29. The upper side of the second transporting roller case 39 is an opening, and the second transporting suction hole 39h is formed in the lower surface of the second transporting roller case 39. In the lower surface of the second transporting roller case 39, the second transporting suction fan 41 that sucks the air in the second transporting roller case 39 from the second transporting suction hole 39h is provided. When the second transporting suction fan 41 is actuated or stopped, the inside of the second transporting roller case 39 can be switched to a negative pressure state and a normal pressure state.

In the second transport roller case 39, the second transport roller 43 that directly supports the inner surface of the substrate W is rotatable around the axis parallel to the first transport direction D1. Here, the second transport roller 43 protrudes upward from the uppermost portion of the second transport roller case 39. The height position SP (see FIG. 4) of the second transport roller 43 is the same as the height position SP of the first transport roller 23, and is located at a position lower than the reference floating height position LP. The second conveyance rotation motor (the second conveyance rotation) that rotates the second conveyance roller 43 around the axis parallel to the first conveyance direction D1 is provided at an appropriate position of the second conveyance roller box 39. Actuator) 45. The output shaft of the second transporting rotary motor 45 is connected to the second transporting interlocking mechanism 47 by a pair of pulleys and a timing belt, and is coupled to the rotating shaft of the second transporting roller 43.

In addition, the height position SP of the second transport roller 43 may be not lower than the floating height position LP, and the height equal to the floating height position LP may be formed. The second transporting rotary motor 45 constituting a part of the second transporting roller unit 37 can be omitted, and the second of the plurality of second transporting rollers 43 can be provided at an appropriate position of the second transporting device main body 29. Rotating motor for transportation, etc.

The specific configuration of the conveyance direction switching device 7 will be described below.

As shown in FIG. 2, FIG. 5, and FIG. 6, the direction change device main body 49 is disposed in the relay region of the first floating transport apparatus 3 and the second floating transport apparatus 5. The direction changing device body 49 is part of the system foundation that constitutes the floating handling system 1. A plurality of (four in the present embodiment) chambers 51 for accommodating compressed air are disposed substantially uniformly in the direction converter main body 49. A supply fan 53 (in this embodiment, a fan filter unit) that supplies compressed air into the chamber 51 is provided below the respective chambers 51.

The upper surface of each chamber 51 is provided with a hollow floating unit 55 that uses the pressure of the compressed air to float the substrate W up to the reference floating height position LP (see FIGS. 5 and 6). That is, the plurality of floating units 55 are provided in the direction converter main body 49 by a plurality of chambers 51. Here, the inside of each floating unit 55 is in communication with the chamber 51. Each of the floating units 55 is connected to the supply fan 53 by a chamber 51. On the upper surface of each of the floating units 55, a slit nozzle 55n that discharges compressed air is formed in a shape in the plane direction of the floating unit 55. The nozzle 55n of each floating unit 55 has the same configuration as each nozzle 15n of the floating unit 15, and thus detailed description thereof will be omitted.

The plurality of first direction changing roller units 57 that receive the substrate W from the first floating transport device 3 are disposed in the first direction (D1 in the present embodiment) in the direction in which the direction switching device main body 49 is arranged along the first transport direction D1. . The specific configuration of each of the first direction changing roller units 57 will be described below.

The first direction changing roller case 59 is provided in the direction converter main body 49. The upper side of the first direction change roller case 59 is an opening, and the first direction change suction hole 59h is formed on the lower surface of the first direction change roller case 59. The first direction change suction fan 61 that sucks the air in the first direction change roller case 59 from the first direction change suction hole 59h is provided on the lower surface of the first direction change roller case 59. When the first direction switching suction fan 61 is actuated or stopped, the inside of the first direction changing roller case 59 can be switched to a negative pressure state and a normal pressure state.

In the first direction changing roller case 59, the first direction changing roller 63 that directly supports the inner surface of the substrate W is rotatable around the axis parallel to the second conveying direction D2. Here, the first direction changing roller 63 protrudes upward from the uppermost portion of the first direction changing roller case 59. The height position SP of the first direction changing roller 63 (see FIGS. 5 and 6) is the same as the height position SP of the first conveying roller 23, and is located at a position lower than the reference floating height position LP. . The first direction switching rotary motor (the first direction) that rotates the first direction changing roller 63 around the axis parallel to the second conveying direction D2 is provided at an appropriate position of the first direction changing roller case 59. Rotary actuator for conversion) 65. The output shaft of the first direction switching rotary motor 65 is a first direction switching interlocking mechanism 67 formed by a pair of pulleys and a timing belt, and is coupled to the rotating shaft of the first direction converting roller 63.

In addition, the first direction change rotation motor 65 constituting a part of the first direction change roller unit 57 may be omitted, and a plurality of first direction change rollers may be provided at appropriate positions of the direction change device main body 49. 63 other first direction rotation rotary motor or the like.

Further, the direction conversion device main body 49 is arranged in a row along the second conveyance direction D2 (two rows in the present embodiment), and a plurality of second direction conversion rollers for feeding the substrate W to the second floating transport device 5 are disposed. Subunit 69. The specific configuration of each of the second direction changing roller units 69 will be described below.

The second direction changing roller case 71 is provided in the direction converter main body 49. The upper side of the second direction changing roller case 71 is an opening, and the second direction changing suction hole 71h is formed on the lower surface of the second direction changing roller case 71. In the lower surface of the second direction changing roller case 71, the second direction changing suction fan 73 that sucks the air in the second direction changing roller case 71 from the second direction changing suction hole 71h is provided. When the second direction switching suction fan 73 is actuated or stopped, the inside of the second direction changing roller case 71 can be switched to a negative pressure state and a normal pressure state.

The second direction changing roller case 71 is provided with a second direction changing roller 75 that can directly support the inner surface of the substrate W so as to rotate around the axis parallel to the first conveying direction D1. Here, the second direction changing roller 75 protrudes upward from the uppermost portion of the second direction changing roller case 71. The height position SP (see FIGS. 5 and 6) of the second direction changing roller 75 is the same as the height position SP of the first conveying roller 23, and is located lower than the reference floating height position LP. . The second direction changing rotary motor (the second direction) that rotates the second direction changing roller 75 around the axis parallel to the first conveying direction D1 is provided at an appropriate position of the second direction changing roller case 71. Rotary actuator for conversion) 77. The output shaft of the second direction changing rotary motor 77 is a second direction changing interlocking mechanism 79 formed by a pair of pulleys and a timing belt, and is coupled to the rotating shaft of the second direction changing roller 75.

In addition, the second direction changing rotary motor 77 constituting a part of the second direction changing roller unit 69 may be omitted, and a plurality of second direction converting rollers may be provided at appropriate positions of the direction changing device main body 49. Another rotation motor of the second direction of 75 or the like.

A reflective photodetector 81 is provided at an appropriate position on the right side of the direction converter main body 49 (see Fig. 2). The reflective photo-sensing device 81 detects the reflection of the signal light after the light-emission, and detects the substrate W from the first floating-transporting device 3 by the plurality of first-direction switching roller units 57. In addition, the reflection type photodetector 81 is electrically connected to the first direction conversion suction fan 61, the first direction conversion rotation motor 65, the second direction conversion suction fan 73, and the second direction conversion rotation motor 77. Controller (etc. omitted).

Next, the actions and effects of the present embodiment will be described below.

The supply fans 13 of the first floating transport apparatus 3 are actuated to discharge compressed air from the nozzles 15n of the respective floating units 15. The first transporting suction fan 21 is actuated, and the inside of each of the first transporting roller boxes 19 is appropriately switched from the normal pressure state to the negative pressure state, and each of the first transporting rotary motors 25 is driven to make each of the first The conveyance roller 23 rotates around the axis parallel to the second conveyance direction D2. As a result, the contact pressure between the inner surface of the substrate W and the plurality of first transport rollers 23 is sufficiently ensured, and the substrate W is transported in the first transport direction D1.

Before the substrate W passes through a predetermined position on the downstream side of the first floating transport device 3, the inside of each of the second direction changing roller boxes 71 is maintained in a normal pressure state, and each of the first direction changing suction fans 61 is actuated. The inside of each of the first direction changing roller boxes 59 is switched from the normal pressure state to the negative pressure state. In addition, the supply fan 53 of the conveyance direction switching device 7 is actuated, and the compressed air is continuously discharged from the nozzles 55n of the respective floating units 55, and the first direction change rotation motors 65 are driven so that the first direction change rollers 63 are provided. Rotate around the axis parallel to the second conveyance direction D2. As a result, the gap between the inner surface of the substrate W and the second direction changing roller 75 can be sufficiently ensured, and the contact pressure between the inner surface of the substrate W and the first direction changing roller 63 can be sufficiently ensured. The plurality of first direction changing roller units 57 receive the substrate W from the first floating transport device 3.

After the plurality of first direction changing roller units 57 receive the substrate W (that is, when the detection signal is output from the reflective photodetector 81), the driving of the first direction converting rotary motor 65 is stopped. Each of the second direction changing suction fans 73 is actuated to switch the inside of each of the second direction changing roller boxes 71 from the normal pressure state to the negative pressure state. On the other hand, the first direction change suction fan 61 is stopped, and the inside of each of the first direction change roller boxes 59 is switched from the normal pressure state to the negative pressure state. Then, the compressed air is continuously discharged from the nozzle 55n of each of the floating units 55, and the second direction changing rotary motor 77 is driven to rotate the plurality of second direction changing rollers 75 around the axis parallel to the first conveying direction D1. As a result, a gap can be sufficiently ensured between the inner surface of the substrate W and the first direction changing roller 63, and the contact pressure between the inner surface of the substrate W and the second direction changing roller 75 can be sufficiently ensured, and the substrate W can be sufficiently The conveyance direction is converted from the first conveyance direction D1 to the second conveyance direction D2, and the substrate W is sent to the second floating conveyance device 5 by a plurality of second direction conversion roller units.

When the plurality of second direction changing roller units 69 send the substrate W to the second floating transport device 5 or when it is sent out, the supply fans 33 of the second floating transport device 5 are actuated from the respective floating units 35. The nozzle 35n ejects compressed air. The second transporting suction fan 41 is actuated, and the inside of each of the second transporting roller boxes 39 is appropriately switched from the normal pressure state to the negative pressure state, and each of the second transporting rotary motors 45 is driven to make each of the second The conveyance roller 43 rotates around the axis parallel to the first conveyance direction D1. As a result, the contact pressure between the inner surface of the substrate W and the plurality of second transport rollers 43 can be sufficiently ensured, and the substrate W can be transported in the second transport direction D2.

In short, the first direction change roller 63 that is rotatable in the vicinity of the second conveyance direction D2 is provided in each of the first direction change roller boxes 59, and is rotatable around the first conveyance direction D1. The second direction changing roller 75 is provided in each of the second direction changing roller boxes 71, and the height positions of the first direction changing rollers 63 and the second direction changing rollers 75 are higher than the reference height. The height position LP is also low. Therefore, it is not necessary to change the height position of the first direction changing roller 63 and the second direction changing roller 75, or to change the posture of the first direction changing roller 63 and the second direction changing roller 75. And the substrate W can be received from the first floating transport device 3, and the received substrate can be sent to the second floating transport device 5.

Therefore, according to the present embodiment, the substrate W is transported in the first transport direction D1, and the transport direction can be shortened by shortening the transport time in the second transport direction D2, and the work efficiency associated with the transport of the substrate W can be sufficiently improved.

(Modification)

A modification of the above embodiment will be described with reference to Figs. 7 and 8 (corresponding to Figs. 5 and 6). In the figure, "FF" means the front, "FR" means the back, "L" means the left, and "R" means the right.

As shown in Fig. 7, each of the first direction changing roller boxes 59 is provided with a first direction switching breaker 83 for switching the first direction switching suction holes 59h of the first direction converting roller case 59. The rodless first direction switching cylinder for the first direction switching breaker 83 (moving in the opening direction) is provided at an appropriate position of each of the first direction switching roller boxes 59 (first direction switching) Use a switch actuator) 85. Each of the first direction switching cylinders 85 includes a movable member 87 that is movable in the switching direction. The movable member 87 is coupled to an appropriate position of the first direction switching breaker 83. By the switching operation of the first direction switching shutter 83, the inside of the first direction changing roller case 59 is switched from the negative pressure state to the normal pressure state.

In the second direction changing roller case 71, the second direction switching suction hole 71h of the second direction changing roller case 71 is provided with a second direction switching breaker 89 for switching. . The rod-less second direction switching switch cylinder (second direction switching switch actuator) for switching the second direction switching breaker 89 is provided at an appropriate position of each of the second direction switching roller boxes 71. 91. Each of the second direction switching cylinders 91 includes a movable member 93 that is movable in the switching direction. The movable member 93 is coupled to an appropriate position of the second direction switching breaker 89. By the switching operation of the second direction switching shutter 89, the inside of the second direction changing roller case 71 is switched to the negative pressure state and the normal pressure state.

According to the present modification, the same actions and effects as those of the above-described embodiment can be achieved.

Furthermore, the present invention is not limited to the description of the above embodiments, and various embodiments can be implemented, and the scope of the invention included in the present invention is not limited to the above embodiments.

D1‧‧‧1st conveyance direction

D2‧‧‧2nd transport direction

LP ‧ ‧ benchmark height position

SP‧‧‧ height position of the floating unit

W‧‧‧Substrate

1‧‧‧Floating handling system

3‧‧‧1st floating handling device

5‧‧‧2nd floating handling device

7‧‧‧Transportation direction conversion device

9‧‧‧1st handling device body

15‧‧‧Upper floating unit

15n‧‧‧ nozzle

17‧‧‧1st transport roller unit

19‧‧‧1st transport roller box

23‧‧‧1st transport roller

25‧‧‧1st handling rotary motor

29‧‧‧The second handling device body

35‧‧‧Upper floating unit

35n‧‧‧ nozzle

37‧‧‧2nd transport roller unit

39‧‧‧2nd transport roller box

43‧‧‧1st transport roller

45‧‧‧1st handling rotary motor

49‧‧‧The second handling device body

55‧‧‧Upper floating unit

55n‧‧‧ nozzle

57‧‧‧1st direction conversion roller unit

59‧‧‧1st direction conversion roller box

59h‧‧‧1st direction conversion suction hole

61‧‧‧First direction conversion suction fan

63‧‧‧1st direction conversion roller

65‧‧‧Rotary motor for first direction conversion (rotary actuator for first direction conversion)

69‧‧‧Roller unit for the second direction conversion

71‧‧‧Roller box for the second direction conversion

71h‧‧‧2nd direction conversion suction hole

73‧‧‧ attracting fan for the second direction conversion

75‧‧‧2nd direction conversion roller

77‧‧‧Rotary motor for second direction conversion (rotary actuator for second direction conversion)

Fig. 1 is a top plan view showing an embodiment of the floating transport system according to the present invention.

Fig. 2 is a top view showing an embodiment of a conveyance direction switching device according to the present invention.

Fig. 3 is a cross-sectional view taken along line III-III of Fig. 1.

Fig. 4 is a cross-sectional view taken along line IV-IV of Fig. 1.

Fig. 5 is a cross-sectional view taken along line V-V of Fig. 2;

Fig. 6 is a cross-sectional view taken along line VI-VI of Fig. 2.

Fig. 7 is a cross-sectional view showing a modified example of the conveyance direction changing device of the above embodiment, and a corresponding view of Fig. 5.

Fig. 8 is a cross-sectional view of the above modification, and a corresponding view of Fig. 6.

D1. . . First transport direction

D2. . . Second transport direction

W. . . Substrate

1. . . Floating handling system

3. . . First floating transport device

5. . . Second floating handling device

7. . . Handling direction switching device

9. . . First conveying device main body

11. . . Chamber

15. . . Floating unit

15n. . . nozzle

17. . . First transport roller unit

twenty three. . . First carrying roller

29. . . Second handling device body

31. . . Chamber

35. . . Floating unit

35n. . . nozzle

37. . . Second transport roller unit

43. . . First carrying roller

49. . . Second handling device body

51. . . Chamber

55. . . Floating unit

55n. . . nozzle

57. . . Roller unit for first direction conversion

63. . . First direction conversion roller

69. . . Roller unit for second direction conversion

75. . . Second direction conversion roller

81. . . Reflective photoinductor

Claims (4)

The conveyance direction conversion device is a second floating type that receives the substrate by the first floating transport device that lifts the transport substrate in the first transport direction, and transports the substrate to the second transport direction orthogonal to the first transport direction. When the conveyance device feeds the received substrate, the conveyance direction of the substrate is converted from the first conveyance direction to the second conveyance direction, and is characterized in that: the direction conversion device main body is provided, and the main body of the direction conversion device is formed upward. a nozzle that ejects the floating gas on the surface, and a plurality of floating units that are floated to the reference floating height position by the pressure of the floating gas; and the main body of the direction changing device is disposed along the first conveying direction, and is opened at the upper side and inside. The first direction switching roller case that can be switched between the negative pressure state and the normal pressure state, and the axial center of the support substrate provided in the first direction change roller case that is parallel to the second conveyance direction a first direction changing roller that rotates around, and a height position of the first direction changing roller is lower than a floating height position of the reference a plurality of first direction changing roller units that receive the substrate from the first floating transporting device, and a first direction converting rotary actuator that rotates the first direction changing roller; The second direction change roller case that is open to the upper side and is open to the negative pressure state and the normal pressure state, and the second direction change roller case is disposed in the second direction change roller case. a second direction changing roller that is rotatable about an axis parallel to the first conveyance direction on the inner surface of the substrate, wherein the height position of the second direction changing roller is lower than the reference floating height position A plurality of second direction changing roller units for feeding the substrate by the second floating conveying device; and a second direction converting rotary actuator for rotating the second direction changing roller. The conveyance direction conversion device according to the first aspect of the invention, wherein the first direction change roller case is formed with a first direction change suction hole, and each of the first direction change roller units is provided from the above The first direction change suction fan that sucks the air in the first direction change roller case in the first direction change suction hole, and the first direction change drive roller is operated or stopped by the first direction change suction fan The inside of the case is switchable to a negative pressure state and a normal pressure state, and the second direction change roller case is formed with a second direction change suction hole, and each of the second direction change roller units is provided with the second The second direction change suction fan that sucks the air in the second direction change roller case by the suction hole for the direction change, and the second direction change roller case is operated or stopped by the second direction change suction fan The internal can be switched to a negative pressure state and a normal pressure state. The conveyance direction conversion device according to the first aspect of the invention, wherein the first direction change roller case is formed with a first direction change suction hole, and each of the first direction change roller units is provided from the above The first direction change suction fan that sucks the air in the first direction change roller case, and the first direction change cutoff that switches the first direction change suction hole, by the first direction switching suction hole In the switching operation of the first direction switching breaker, the inside of the first direction switching roller case can be switched to a negative pressure state and a normal pressure state, and the second direction switching roller case is formed with a second direction. Each of the second direction changing roller units includes a second direction switching suction fan that sucks air in the second direction changing roller case from the second direction changing suction hole, and the switch In the second direction switching breaker for the two-direction switching suction hole, the second direction switching roller can be switched to a negative pressure state and a normal pressure by the switching operation of the second direction switching breaker. status. The floating transport system is configured to transport the substrate to the second transport direction orthogonal to the first transport direction after the substrate is transported to the first transport direction, and is characterized in that the first transport direction is provided in the first transport direction. a first floating transport device that floats the transport substrate; a second floating transport device that floats the substrate in the second transport direction in the vicinity of the first floating transport device; and is disposed in the first floating transport The conveyance direction conversion device according to any one of the first to third aspects of the invention, wherein the apparatus and the relaying region of the second floating transporting device are in the above-mentioned.