TW200621608A - Substrate conveyance equipment - Google Patents

Substrate conveyance equipment

Info

Publication number
TW200621608A
TW200621608A TW094139893A TW94139893A TW200621608A TW 200621608 A TW200621608 A TW 200621608A TW 094139893 A TW094139893 A TW 094139893A TW 94139893 A TW94139893 A TW 94139893A TW 200621608 A TW200621608 A TW 200621608A
Authority
TW
Taiwan
Prior art keywords
air platform
substrates
substrate
horizontal direction
supporting means
Prior art date
Application number
TW094139893A
Other languages
Chinese (zh)
Other versions
TWI272235B (en
Inventor
Ryusuke Tsubota
Hirofumi Ishida
Kunio Fukuma
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Publication of TW200621608A publication Critical patent/TW200621608A/en
Application granted granted Critical
Publication of TWI272235B publication Critical patent/TWI272235B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B65G49/069—Means for avoiding damage to stacked plate glass, e.g. by interposing paper or powder spacers in the stack
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67184—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the presence of more than one transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/40—Safety features of loads, equipment or persons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Coating Apparatus (AREA)
  • Registering Or Overturning Sheets (AREA)

Abstract

This invention relates to a substrate conveyance equipment capable of keeping the substrate in horizontal and changing the direction of substrates for conveying, which comprises an air platform (1), supporting means (2A and 2B), and a rotary means (3). A shock-absorbing layer is formed between the air platform (1) and the underside of the substrate by using pneumatic pressure; the supporting means (2A, 2B) are installed adjacent to the air platform (1) and are capable of moving up and down; When moved to a predetermined upper position, the supporting means (2A, 2B) will move the substrates, which are laid on the air platform on the air platform, at their side edges along a first horizontal direction (F1). The rotary means (3) is installed at the center of the air platform and is capable of moving up and down and rotating around a vertical axis. When the rotary means (3) moves upward to a predetermined position, it may support the substrates, which are laid on the air platform, at their underside center and change the direction of the substrates from the first horizontal direction F1 to a second horizontal direction F2, which is different from F1, by rotating around the vertical axis.
TW094139893A 2004-11-30 2005-11-14 Substrate carrying device TWI272235B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004346075 2004-11-30
JP2005174727A JP4754885B2 (en) 2004-11-30 2005-06-15 Substrate transfer device

Publications (2)

Publication Number Publication Date
TW200621608A true TW200621608A (en) 2006-07-01
TWI272235B TWI272235B (en) 2007-02-01

Family

ID=36735954

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094139893A TWI272235B (en) 2004-11-30 2005-11-14 Substrate carrying device

Country Status (3)

Country Link
JP (1) JP4754885B2 (en)
KR (1) KR100730037B1 (en)
TW (1) TWI272235B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI403449B (en) * 2009-04-07 2013-08-01 Ihi Corp Transport direction conversion device and floating handling system

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KR100788876B1 (en) * 2006-08-25 2007-12-27 주식회사 태성기연 Apparatus for turning of direction of glass panel
KR101303053B1 (en) * 2006-12-27 2013-09-03 엘지디스플레이 주식회사 Dispensing apparatus for fabricating the liquid crystal display device
JP4344755B2 (en) * 2007-04-09 2009-10-14 株式会社日本設計工業 Roller unit for thin plate material conveyance and thin plate material conveyance device
JP5125290B2 (en) * 2007-07-27 2013-01-23 株式会社Ｉｈｉ Levitation transfer device and processing transfer system
JP4900115B2 (en) * 2007-07-27 2012-03-21 株式会社Ｉｈｉ Conveyance direction changing device and levitating conveyance system
KR100959286B1 (en) 2008-01-18 2010-05-26 주식회사 에스에프에이 Apparatus for transferring substrate
KR100924266B1 (en) * 2008-01-18 2009-10-30 주식회사 에스에프에이 Apparatus for transferring substrate
JP5355056B2 (en) * 2008-12-01 2013-11-27 株式会社妙徳 Levitation device and fluid ejector unit
KR200470005Y1 (en) 2008-12-29 2013-11-21 주식회사 탑 엔지니어링 Stage in use for dispenser
JP2011031143A (en) * 2009-07-30 2011-02-17 Ulvac Japan Ltd Stage with rotation function
JP5445863B2 (en) * 2010-08-04 2014-03-19 株式会社ダイフク Plate-shaped body transfer device
JP5645709B2 (en) * 2011-02-25 2014-12-24 オイレス工業株式会社 Non-contact transfer device
CN103508187A (en) * 2012-06-29 2014-01-15 江苏瑞新科技股份有限公司 Automatic turning-over feeding device
KR101533370B1 (en) * 2013-10-10 2015-07-02 이노이엔지주식회사 Substrate transfer apparatus
KR102463088B1 (en) * 2019-01-11 2022-11-02 동우 화인켐 주식회사 Optical film bonding method and bonding device
KR20220005790A (en) * 2020-07-07 2022-01-14 세메스 주식회사 Apparatus for dispensing droplet

Family Cites Families (12)

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JPS63178229A (en) * 1987-01-20 1988-07-22 Fuji Photo Film Co Ltd Positive type photosensitive composition
JPH0333700Y2 (en) * 1987-05-07 1991-07-17
JPH08282842A (en) * 1995-04-18 1996-10-29 Hitachi Kiden Kogyo Ltd Branching device in pneumatic floating type linear motor drive conveying route
JP2000072251A (en) * 1998-08-31 2000-03-07 Watanabe Shoko:Kk Flotation carrier device and flotation carrier system
JP2000340635A (en) * 1999-05-28 2000-12-08 Orc Mfg Co Ltd Substrate carrying means and mechanism, and pattern exposure system
JP2001085496A (en) * 1999-09-10 2001-03-30 Daiichi Shisetsu Kogyo Kk Carrying device of plate-like member
JP3960087B2 (en) * 2001-05-30 2007-08-15 東京エレクトロン株式会社 Transport device
JP4249930B2 (en) * 2002-02-06 2009-04-08 株式会社オーク製作所 Pre-positioning mechanism and method
JP4312475B2 (en) * 2003-03-05 2009-08-12 株式会社渡辺商行 Substrate transport guide, unit and substrate transport apparatus
KR101053770B1 (en) * 2003-04-30 2011-08-02 올림푸스 가부시키가이샤 PCB Wound Device
JP4244000B2 (en) * 2003-08-29 2009-03-25 株式会社ダイフク Transport device
JP4244007B2 (en) * 2003-11-14 2009-03-25 株式会社ダイフク Transport device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI403449B (en) * 2009-04-07 2013-08-01 Ihi Corp Transport direction conversion device and floating handling system

Also Published As

Publication number Publication date
JP4754885B2 (en) 2011-08-24
KR20060060569A (en) 2006-06-05
TWI272235B (en) 2007-02-01
KR100730037B1 (en) 2007-06-20
JP2006182560A (en) 2006-07-13

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees