JP4249930B2 - Pre-positioning mechanism and method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a preliminary positioning mechanism for preliminarily positioning the position of a substrate on which a predetermined pattern is formed by an exposure operation such as a printed circuit board or a liquid crystal substrate, and in particular, an appropriate preliminary positioning operation when the substrate is a thin plate. The present invention relates to a pre-positioning mechanism and a method thereof.
[0002]
[Prior art]
Conventionally, when a predetermined pattern is formed on a substrate by an exposure operation, an exposure apparatus including each stage such as a carry-in stage, an alignment stage, an exposure stage, and a carry-out stage is used. And in order to convey a board | substrate to each stage, the handler which is a conveyance means is generally used. In the carry-in stage, a feed roller for receiving the substrate is provided, the substrate is guided to a predetermined position by the rotation of the feed roller, and the position of the substrate is preliminarily positioned by the preliminary positioning mechanism. When the pre-positioning of the substrate is completed, the handler descends to the vicinity of the feed roller, a suction pad is brought into contact with the substrate, the substrate is vacuum-sucked, and the substrate is transferred from the feed roller to the handler by raising in that state. . The handler moves in the horizontal direction along the guide frame while holding the substrate, and conveys the substrate to the next stage (alignment stage or the like).
[0003]
Here, when the position of the substrate is preliminarily positioned, the substrate is introduced, a feed roller for placing the substrate, and a pushing portion for preliminarily positioning the substrate at the reference position by pushing the end surface of the substrate. There is known a preliminary positioning mechanism composed of a moving mechanism section having the same. In this preliminary positioning mechanism, when the substrate is placed at a predetermined position on the feed roller, the pushing portion of the moving mechanism portion arranged in the vicinity of the four sides of the substrate protrudes from the upper end of the feed roller, and between the feed rollers. And the end surface of the substrate is pushed to move the substrate to the reference position.
[0004]
[Problems to be solved by the invention]
However, the configuration of the conventional substrate preliminary positioning mechanism has the following problems.
[0005]
The substrate on the feed roller is prone to warp on the end surface of the substrate because the substrate itself is not thin, especially when the substrate is thin. Further, when the substrate having such a warped end surface is pushed by the pushing portion, the end surface is submerged under the pushing portion, bent to the end surface, and deformed such as bent (see FIG. 4). . In the conventional preliminary positioning apparatus, such a substrate is also pushed by the pushing portion until the substrate moves to the reference position, so that the end surface of the substrate is deformed without being restored, and appropriate preliminary positioning is performed. There was a problem that a defective substrate could not be generated. There is also a problem that this defective substrate is also transferred to the next stage (alignment stage) by the handler.
[0006]
Therefore, the present invention was created to solve such problems, and its purpose is to perform proper pre-positioning even if the end face of the substrate is warped, and to transport a poorly positioned substrate to the next stage. It is an object of the present invention to provide a pre-positioning mechanism that does not.
[0007]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, the invention according to claim 1 is arranged in the vicinity of a feed roller for introducing a rectangular thin plate-like substrate into a predetermined position and four sides of the substrate supported at the predetermined position of the feed roller. And a moving mechanism having a pusher that pushes the end face of the substrate, and a position facing the periphery of the substrate pushed by the pusher. The deformation of the end face of the substrate is detected by the presence or absence of sensing. It is configured as a preliminary positioning mechanism including a substrate detection sensor and a substrate discharge mechanism for discharging the substrate that could not be detected by the substrate detection sensor from the feed roller.
[0008]
In the above-described configuration, the substrate detection sensor is disposed at a position that becomes the periphery of the substrate pushed by the pushing portion, thereby detecting deformation such as bending or bending of the end surface of the substrate, and pushing the pushing portion. Is stopped and retracted to restore the deformation of the end face of the substrate (the end face of the substrate is not bent, bent, etc., and returns to the horizontal state). Further, the substrate whose deformation is not restored is discharged out of the preliminary positioning mechanism by the substrate discharging mechanism.
[0009]
According to a second aspect of the present invention, a feed roller that guides a rectangular thin plate-shaped substrate to a predetermined position, and the four rollers of the substrate disposed at the predetermined position by the feed roller are moved between the feed rollers. The moving mechanism portion having a pushing portion that pushes the end surface of the substrate, the through-hole through which the upper end of the feed roller protrudes, and the through-hole that moves the pushing portion are mounted on the substrate. The placement plate and the substrate placed on the placement plate are disposed at a position facing the periphery of the substrate where the pushing portion pushes against the placement plate. The deformation of the end face of the substrate is detected by the presence or absence of sensing. A substrate detection sensor, an elevating mechanism for moving up and down at least one of the feed roller or the mounting plate, and a substrate discharge for discharging the substrate that could not be detected by the substrate detection sensor from the mounting plate It is comprised as a preliminary positioning mechanism provided with a mechanism part.
[0010]
In the above configuration, since the substrate is placed on the mounting plate, it is difficult for the end surface of the substrate to be warped, and even when the end surface of the substrate is pushed by the pushing portion, bending, deformation or the like occurs. It becomes difficult to do. Further, the substrate detection sensor detects the generated deformation of the end face of the substrate, and the substrate is preliminarily positioned. Further, the deformed substrate is discharged out of the preliminary positioning mechanism by the substrate discharge mechanism.
[0011]
According to a third aspect of the present invention, the substrate detection sensor is configured as a preliminary positioning mechanism disposed on a support housing side that supports the pushing portion of the moving mechanism portion.
[0012]
With the above configuration, the deformation of the end surface of the substrate is detected, and the deformation of the end surface of the substrate is restored by stopping and retreating the pushing portion of the pushing portion (bending, bending, etc. of the end surface of the substrate). Will disappear and return to the horizontal state). Further, the substrate whose deformation is not restored is discharged out of the preliminary positioning mechanism by the substrate discharging mechanism.
[0013]
According to a fourth aspect of the present invention, in the method for pre-positioning the substrate, the end surface of the rectangular thin plate-like substrate is pushed by a pushing portion of a moving mechanism portion disposed in the vicinity of the four sides of the substrate. And disposed at a position facing the periphery of the substrate that is pushed by the pushing portion. The deformation of the end face of the substrate is detected by the presence or absence of sensing. While the end surface of the substrate is sensed by the substrate detection sensor and the end surface of the substrate is pushed by the pushing portion, and the sensing of the substrate sensor is not normal, the pushing of the pushing portion is stopped. Retreating, and again pushing the end face of the substrate with the pushing portion, and when the sensing of the substrate detecting sensor is normal, pre-positioning by pushing the pushing portion is performed, and the substrate detecting sensor This is configured as a preliminary positioning method in which the substrate is ejected by the substrate ejection mechanism when sensing is not normal.
[0014]
With the above configuration, the substrate detection sensor detects the deformation of the end face of the substrate and stops and retracts the pushing portion, so that the deformation of the substrate is restored and the substrate is preliminarily positioned again. A substrate whose deformation is not restored is discharged out of the preliminary positioning mechanism by the substrate discharge mechanism.
DETAILED DESCRIPTION OF THE INVENTION
[0015]
Embodiments of a preliminary positioning mechanism according to the present invention will be described below with reference to the drawings.
FIG. 1 is a schematic diagram illustrating a preliminary positioning operation of the first embodiment, FIG. 2 is a perspective view of a moving mechanism unit, FIG. 3 is a plan view of the moving mechanism unit, and FIG. 4 is a schematic diagram illustrating a state of an end surface of a substrate. FIG. 5 is a plan view of the mounting plate according to the second embodiment, FIG. 6 is a schematic view showing a preliminary positioning operation according to the second embodiment, and FIG. 7 is a cross-sectional view of the mounting plate lifting mechanism according to the second embodiment. FIG. 8, FIG. 8 is a schematic view showing the preliminary positioning operation of the third embodiment, FIG. 9 is a plan view of the mounting plate of the third embodiment, and FIG. 10 is a drawing of the feed roller lifting mechanism portion of the third embodiment. It is a fragmentary sectional view.
[0016]
As shown in FIGS. 1 to 3, the preliminary positioning mechanism 1 includes a feed roller 2 a on which the substrate W is placed, and moving mechanisms 31 and 32 for moving the substrate W by pushing the end surface of the substrate W. 41, 42, substrate detection sensors 31h, 32h, 41h, 42h, and a substrate discharge mechanism section 6.
[0017]
As shown in FIG. 5, the feed roller 2a is supported by a rotating shaft 2b arranged in a plurality of rows on a support frame 2f, and an endless belt 2c stretched around pulleys 2d attached to both ends of the rotating shaft 2b. Via a drive motor (not shown).
[0018]
Moreover, you may comprise the feed roller 2a so that it may each rotate via an independent drive source (drive motor) for every row | line or for every predetermined position. And when making the drive source of the feed roller 2a different, it is good also as a structure which provides the driven feed roller (not shown) rotated by a feed roller 2a of a predetermined position without providing a drive source.
[0019]
As shown in FIGS. 1 to 3, the moving mechanism parts 31, 32, 41, 42 are arranged at facing positions on the installation plate 30 in four directions of the substrate W, and the pushing parts 31 a, 32 a, 41 a, 42 a. Then, the substrate W is pushed from four directions toward the center of the substrate W.
[0020]
The moving mechanism units 31 and 32 include pushing units 31a and 32a that push the opposing ends of the substrate W, support housings 31b and 32b that support the pushing units 31a and 32a, and support housings 31b and 32b. And bases 31d and 32d for supporting the bases 31j and 32j. The mounts 31d and 32d are slidably held by guides 31c and 32c provided along the moving direction of the support housings 31b and 32b, and are connected to a driving belt 31e driven by a driving motor 31f (moving). Shared between the mechanism units 31 and 32).
[0021]
Accordingly, when the drive belt 31e is driven by the rotation of the drive motor 31f, the gantry 31d and 32d move along the guides 31c and 32c, and the supporting housings 31b and 32b supported by the gantry 31d and 32d, the pushing portion 31a, 32a moves to the substrate W side. Further, the pushing portions 31a and 32a move in the direction away from the substrate W by the reverse drive of the drive motor 31f. Moreover, it is good also as a structure with each of the two moving mechanism parts 31 and 32 which face each other provided with the drive belt 31e and the drive motor 31f.
[0022]
The bases 31j and 32j are configured to support one or more pushers 31a and 32a corresponding to the size of the substrate W and the reference position for preliminary positioning. And in the rear of the support housings 31b and 32b, when the pushing portions 31a and 32a come into contact with the end surface of the substrate W, the elastic member expands and contracts and the pushing portions 31a and 32a absorb the impact. The elastic members 31g and 32g are provided so that the movement direction of the
[0023]
Further, when the substrate W is carried into the feed roller 2a, the support casings 31b and 32b are arranged so that the pushing portions 31a and 32a move up and down so that they can protrude and retract from the feed roller 2a so as not to get in the way. Are provided with vertical drive units 31i and 32i.
[0024]
As the drive motor 31f, an AC (or DC) motor, a pulse motor, or the like is used. In particular, since the pulse motor controls the power control by the amount of pulses, the movement accuracy of the support housings 31b and 32b is improved, and the pushing portions 31a and 32a can be controlled in units of several mm. In the pulse motor, since the control width of the pushing portions 31a and 32a is narrow, adjustment corresponding to the thickness of the substrate W is not necessary. Therefore, it is preferable to use the pulse motor from the viewpoint of work efficiency.
[0025]
Further, the moving mechanism parts 41 and 42 have the same structure as the moving mechanism parts 31 and 32, the pushing parts 41a and 42a in FIG. 3 are the pushing parts 31a and 32a, and the supporting housings 41b and 42b are the supporting housings 31b and 32b. The guides 41c and 42c are guides 31c and 32c, the mounts 41d and 42d are mounts 31d and 32d, the drive belt 41e is a drive belt 31e, the drive motor 41f is a drive motor 31f, and the elastic members 41g and 42g are elastic members 31g and 32g. The drive units 41i and 42i are the same as the base units 31j and 32j, but the distance between the push units 41a and 42a and the lengths of the guides 41c and 42c are pushing. There may be a difference between the portions 31a and 32a and the guides 31c and 32c. Moreover, since the pushing parts 41a and 42a do not become an obstacle at the time of carrying in the substrate W (in the carrying-in direction A), the vertical movements by the vertical driving parts 41i and 42i may not be performed.
[0026]
Substrate detection sensors 31h, 32h, 41h, and 42h are arranged at positions facing the periphery of the substrate W pushed by the pushing portions 31a, 32a, 41a, and 42a. The position facing the peripheral edge is limited to the position on the moving mechanism parts 31, 32, 41, and 42 as long as the end face of the substrate W can be detected in front of the pushing parts 31a, 32a, 41a, and 42a (on the substrate W side). For example, it may be on the installation plate 30. From the viewpoint of workability or detection accuracy, the pushers 31a, 32a, 41a, and 42a are disposed on the support housings 31b, 32b, 41b, and 42b that support the pushers 31a, 32a, 41a, and 42a. , 41a, 42a are preferably disposed on the substrate W side (the tips of the support housings 31b, 32b, 41b, 42b) in the vicinity of the base ends.
[0027]
For the substrate detection sensors 31h, 32h, 41h, and 42h, photoelectric sensors, capacitance sensors, or the like are used. The substrate detection sensors 31h, 32h, 41h, and 42h determine that the case where the substrate W is sensed is normal and the case where the substrate W is not sensed is abnormal. That is, the substrate W in which the substrate W is bent or deformed such that it is bent horizontally cannot be detected by the substrate detection sensors 31h, 32h, 41h, and 42h, and is determined to be abnormal. As shown in FIG. 4, the deformation of the substrate W is performed by pushing the substrate W whose end face is warped by pushing portions 31 a, 32 a, 41 a, 42 a (32 a, 41 a, 42 a are not shown). This occurs when the end surface of the substrate W has entered the lower portion of the pushing portion.
[0028]
As shown in FIG. 1, the substrate discharge mechanism unit 6 is not particularly limited as long as it has a function of discharging the substrate W whose end face is deformed to the outside of the preliminary positioning mechanism 1. The handler 20 that is transporting the substrate W to a stage or the like can also be used for the discharge function of the substrate W whose end face has been deformed to cause positioning failure. The handler 20 is arranged so as to be movable in the horizontal and vertical directions along the guide rail. The handler 20 supports a suction pad 21 that sucks the substrate W, a holding plate 22 that supports the suction pad 21, a buffer portion 23 that supports the holding plate 22 so as to move up and down, and a buffer portion 23. And a support frame 24. The buffer portion 23 is composed of an elastic member such as a coil spring, a rubber tube, a leaf spring, an air cushion or the like so as to absorb an impact when contacting the substrate W on the placement plate 5.
[0029]
The preliminary positioning method of the preliminary positioning mechanism 1 is as follows.
(First Step) As shown in FIG. 1A, when a substrate W is received on the feed roller 2a, the feed roller 2a rotates, moves the substrate W to a predetermined position, and stops.
[0030]
(Second Step) As shown in FIG. 1B, the pushing portions 31a, 32a, 41a, 42a (41a, 42a) of the moving mechanism portions 31, 32, 41, 42 (41, 42 are not shown) (Not shown) protrudes from the upper end of the feed roller 2a by the vertical drive units 31i, 32i, 41i, 42i (41i, 42i are not shown). Further, the pushing portions 31a, 32a, 41a, 42a (41a, 42a are not shown) are moved between the feed rollers 2a by driving of the drive motors 31f, 41f (41f are not shown), and the end face of the substrate W is moved. To perform preliminary positioning.
[0031]
(Third Step) When the substrate detection sensors 31h, 32h, 41h, 42h sense the substrate W and are determined to be normal, the drive motors 31f, 41f are stopped and the pushing portions 31a, 32a, 41a, 42a Is stopped, and an instruction to carry the substrate W to the next stage (alignment stage or the like) is output to the substrate discharge mechanism 6. The operation proceeds to (Sixth Step).
[0032]
(4th process) When the board | substrate detection sensors 31h, 32h, 41h, and 42h cannot detect the board | substrate W and it is judged that it is abnormal, ie, when the board | substrate W which the end surface deform | transformed as shown in FIG. 4 generate | occur | produces The pushing portions 31a, 32a, 41a, 42a (32a, 41a, 42a are not shown) are stopped, and the drive motors 31f, 41f (not shown) are driven in reverse to push the pushing portion 31a. , 32a, 41a, 42a (32a, 41a, 42a not shown) move backward. And the instruction | indication which redoes preliminary positioning by the pushing parts 31a, 32a, 41a, 42a is output to the movement mechanism parts 31, 32, 41, 42 again.
[0033]
(Fifth step) If the substrate W is detected in the preliminary positioning again (third step), if the substrate W is not detected, an instruction to eject the substrate W out of the preliminary positioning mechanism 1 is given. Output to the discharge mechanism section 6.
[0034]
(Sixth Step) As shown in FIG. 1C, the handler 20 of the substrate discharge mechanism unit 6 descends to the vicinity of the feed roller 2a, the suction pad 21 comes into contact with the substrate W, and vacuum sucks the substrate W. . In this state, the handler 20 is raised, so that the substrate W is transferred from the feed roller 2a to the handler 20. With the handler 20 holding the substrate W, the handler 20 moves in the horizontal direction along the guide frame, and the substrate W is carried out to the next stage or discharged out of the preliminary positioning mechanism 1.
[0035]
In the operation of the above (fourth step), the pushing parts 31a, 32a, 41a, 42a are stopped, the drive motors 31f, 41f are driven reversely, and the pushing parts 31a, 32a, 41a, 42a move backward. Then, the deformation of the end surface of the substrate W such as bending or bending is restored and the substrate W can be pushed again by the pushing portions 31a, 32a, 41a, and 42a, and the substrate W is preliminarily positioned at an appropriate position.
[0036]
Further, when the deformation of the end face of the substrate W is not restored in the operation of the (fourth step), the substrate discharge mechanism unit 6 moves the substrate W to the preliminary positioning mechanism 1 in the operation of the (sixth step). Discharged outside.
[0037]
Next, a second embodiment of the present invention will be described. As shown in FIG. 6, the preliminary positioning mechanism 10 is placed on the preliminary positioning mechanism 1 as a mounting plate 5 for preventing the substrate W from warping and a lifting mechanism unit for moving the mounting plate 5 up and down. This is a preliminary positioning mechanism to which a plate lifting mechanism unit 9 is added. In addition, about the same member as the above-mentioned structure, the same code | symbol is attached | subjected and description is abbreviate | omitted.
[0038]
As shown in FIG. 5, the mounting plate 5 has a through hole 5 a that does not obstruct the rotation of the feed roller 2 a, and the upper end of the feed roller 2 a can protrude at least above the placement plate 5. It is configured. Then, the feed roller is arranged so that the through-hole 5b for preliminary positioning does not become an obstacle to the movement of the pushing portions 31a, 32a, 41a, 42a of the moving mechanism portions 31, 32, 41, 42 toward the center of the substrate W. Two through long holes 5b are formed in the A direction along the feed direction 2a, and two through long holes 5b are formed in the B direction perpendicular to the feed direction of the feed roller 2a.
[0039]
Further, the through hole 5a and the through long hole 5b are formed so as to chamfer the peripheral edges of the respective openings, and are configured so that the substrate W on the mounting plate 5 can be moved smoothly. The chamfering of the through hole 5a and the through long hole 5b is important when the substrate W is a thin plate. The end of the substrate W is prevented from being caught by the through hole 5a and the through long hole 5b, and the movement is made smooth. Yes.
[0040]
Further, in FIG. 5, openings 5 c (four places in FIG. 5) are formed in the mounting plate 5. The opening 5c blows air at the time of preliminary positioning of the substrate W to smoothly move the substrate W, and at the end of preliminary positioning, vacuum suction is performed to fix the position of the substrate W on the mounting plate 5.
[0041]
The mounting plate elevating mechanism unit 9 is not particularly limited as long as it has a function of moving the mounting plate 5 up and down. For example, as shown in FIG. 7, a support leg 7 that detachably supports the mounting plate 5. And the buffer part 8 provided in the upper part of this support leg 7, and the drive part 9A which hold | maintains the support leg 7 so that vertical movement is possible.
[0042]
The buffer portion 8 includes a cylindrical abutting portion 8a provided connected to the mounting plate 5, a support rod 8c provided on the abutting portion 8a, and an elastic member provided around the support rod 8c. It is comprised from the coil spring 8b which is a member. The support ring 7a attached to the upper end of the support leg 7 supports the lower end of the coil spring 8b, and the support rod 8c is slidable along the inside of the support leg 7. Therefore, when the substrate W on the mounting plate 5 comes into contact with a handler 20 as the substrate discharge mechanism 6 described later, the coil spring 8b contracts, and the support ring 7a and the support leg 7 are moved to the support rod 8c side. It is configured to absorb the impact by sliding. Moreover, you may use a rubber cylinder, a leaf | plate spring, an air cushion etc. as an elastic member.
[0043]
Further, the drive unit 9A is provided below the installation plate 30, and a holding unit 9h that holds the lower end of the support leg 7 disposed through the installation plate 30, and the holding unit 9h is fixedly supported. A fixing plate 9g to be moved, a moving block 9d provided on the fixing plate 9g, a feed screw 9c for moving the moving block 9d, a drive motor 9a for rotating the feed screw 9c via a transmission belt 9b, The guide frame 9f is arranged in parallel to the feed screw 9c and guides the movement of the moving block 9d through a sliding portion 9e attached to the fixed plate 9g. Instead of the feed screw mechanism, the support leg 7 may be moved up and down by a cylinder mechanism, rack and pinion or the like, and the mounting plate 5 may be moved up and down.
[0044]
As shown in FIG. 6, the substrate discharge mechanism 6 can use a handler 20 that transports the substrate W from the carry-in stage to the next stage (alignment stage or the like).
The preliminary positioning method of the preliminary positioning mechanism 10 is as follows.
[0045]
(Process A) As shown in FIG. 6A, when the substrate W is received on the feed roller 2a protruding from the through hole 5a (not shown) of the mounting plate 5, the feed roller 2a rotates. Then, the substrate W is moved to a predetermined position and stopped.
[0046]
(Step B) As shown in FIG. 6 (b), the support leg 7 is moved upward through the drive portion 9A of the placement plate lifting mechanism portion 9 to raise the placement plate 5, and the feed roller 2a. The substrate W is supported on the mounting plate 5 in a state where the upper end does not contact the substrate W. Pushing parts 31a, 32a, 41a, 42a by vertical drive parts 31i, 32i, 41i, 42i (41i, 42i not shown) of the moving mechanism parts 31, 32, 41, 42 (41, 42 not shown). (41a and 42a are not shown) protrude from the upper end of the feed roller 2a, and by driving of drive motors 31f and 41f (41f not shown), the pushing portions 31a, 32a, 41a and 42a (41a and 42a are shown) (Not shown) moves along a through-hole 5b (not shown) of the mounting plate 5 and pushes the end face of the substrate W to perform preliminary positioning. At this time, air flows out from the opening 5c, and the movement of the substrate W is made smooth.
[0047]
(Step C) When the substrate detection sensors 31h, 32h, 41h, 42h sense the substrate W and are determined to be normal, the drive motors 31f, 41f are stopped and the pushing portions 31a, 32a, 41a, 42a Is stopped, and an instruction to carry the substrate W to the next stage (alignment stage or the like) is output to the substrate discharge mechanism 6. The operation proceeds to (Step F).
[0048]
(Step D) When the substrate detection sensors 31h, 32h, 41h, and 42h cannot detect the substrate W and are determined to be abnormal, that is, when the substrate W having a deformed end surface as shown in FIG. 4 occurs. The pushing portions 31a, 32a, 41a, 42a (32a, 41a, 42a are not shown) are stopped, and the drive motors 31f, 41f (not shown) are driven in reverse to push the pushing portion 31a. , 32a, 41a, 42a (32a, 41a, 42a not shown) move backward. And the instruction | indication which redoes preliminary positioning by the pushing parts 31a, 32a, 41a, 42a is output to the movement mechanism parts 31, 32, 41, 42 again.
[0049]
(Step E) If the substrate W is detected in the preliminary positioning again (step C), if the substrate W is not detected, an instruction to discharge the substrate W out of the preliminary positioning mechanism 10 is given. Output to the discharge mechanism section 6.
[0050]
(Step F) As shown in FIG. 6C, the support leg 7 is further moved upward by the drive unit 9A of the mounting plate elevating mechanism unit 9, and the mounting plate 5 is lifted and stands by. The suction pad 21 of the handler 20 of the substrate discharge mechanism unit 6 comes into contact with the substrate W and vacuum-sucks the substrate W. In this state, the placement plate 5 is lowered, so that the substrate W is transferred from the placement plate 5 to the handler 20. With the handler 20 holding the substrate W, the handler 20 moves in the horizontal direction along the guide frame, and the substrate W is carried out to the next stage or discharged out of the preliminary positioning mechanism 10.
[0051]
In the operation of the above (Step B), since the substrate W is supported and held on the mounting plate 5, the end surface of the substrate W is less likely to be warped, and the pushing portions 31 a, 32 a, 41 a, and 42 a are pushed. The end face of the substrate W is hardly deformed, and the substrate W is preliminarily positioned at an appropriate position.
[0052]
In the operation (step D), the pushing portions 31a, 32a, 41a, 42a are stopped, the drive motors 31f, 41f are driven reversely, and the pushing portions 31a, 32a, 41a, 42a move backward. Then, the deformation of the end surface of the substrate W such as bending or bending is restored and the substrate W can be pushed again by the pushing portions 31a, 32a, 41a, and 42a, and the substrate W is preliminarily positioned at an appropriate position.
[0053]
Further, when the deformation of the end face of the substrate W is not restored in the operation of the (D process), the substrate discharge mechanism 6 performs the preliminary positioning mechanism 10 in the operation of the (F process). Discharged outside.
[0054]
Next, a third embodiment of the present invention will be described. As shown in FIG. 8, the preliminary positioning mechanism 40 includes a delivery mechanism unit 51 for arranging the mounting plate 5 on the feed roller 2a, instead of the mounting plate lifting mechanism unit 9 of the preliminary positioning mechanism 10. The preliminary positioning mechanism includes a feed roller lifting mechanism 2g (FIG. 10) for supporting the substrate W on the placement plate 5. In addition, about the same member as the above-mentioned structure, the same code | symbol is attached | subjected and description is abbreviate | omitted.
[0055]
As shown in FIG. 9, the delivery mechanism 51 includes a delivery arm 51 c connected to the end surface of the placement plate 5, and the delivery arm 51 c for raising the placement plate 5 from the feed roller 2 a in the vertical direction. The rotary shaft 51b and a drive motor 51a that rotates the rotary shaft 51b are configured. By the delivery mechanism 51, the substrate W fixed on the placement plate 5 by vacuum suction of the opening 5c is delivered to the next stage (alignment stage or the like).
[0056]
The feed roller elevating mechanism 2g is not particularly limited as long as it has a function of raising and lowering the feed roller 2a. For example, as shown in FIG. 10, the drive motor 2e fixed to the support frame 2f by the cylinder mechanism is lowered. The upper end of the feed roller 2a is not in contact with the substrate W, and the substrate W is supported on the mounting plate 5. The feed screw mechanism, rack and pinion, etc. are used instead of the cylinder mechanism. Thus, the drive motor 2e may be moved up and down to move the feed roller 2a up and down.
[0057]
The preliminary positioning method of the preliminary positioning mechanism 40 is as follows.
(First Step) As shown in FIG. 8 (a), the mounting plate 5 is closed on the feed roller 2a via the delivery mechanism 51, and from the through hole 5a (not shown) of the mounting plate 5. When the substrate W is received on the feed roller 2a protruding from the upper end, the feed roller 2a rotates, moves the substrate W to a predetermined position, and stops.
[0058]
(Step B) As shown in FIG. 8B, the feed roller 2a is lowered by the cylinder mechanism of the feed roller lifting mechanism 2g (FIG. 10), and the upper end of the feed roller 2a is not in contact with the substrate W. The substrate W is supported on the mounting plate 5. Pushing parts 31a, 32a, 41a, 42a by vertical drive parts 31i, 32i, 41i, 42i (41i, 42i not shown) of the moving mechanism parts 31, 32, 41, 42 (41, 42 not shown). (41a and 42a are not shown) protrude from the upper end of the feed roller 2a, and by driving of drive motors 31f and 41f (41f not shown), the pushing portions 31a, 32a, 41a and 42a (41a and 42a are shown) (Not shown) moves along a through-hole 5b (not shown) of the mounting plate 5 and pushes the end face of the substrate W to perform preliminary positioning.
[0059]
(Step C) When the substrate detection sensors 31h, 32h, 41h, and 42h sense the substrate W and are determined to be normal, the drive motors 31f and 41f stop and the pushing portions 31a, 32a, 41a, and 42a Is stopped, the substrate W is vacuum-sucked through the opening 5c of the mounting plate 5, the substrate W is fixed on the mounting plate 5, and the substrate W is moved to the next stage (alignment stage or the like) by the delivery mechanism unit 51. ).
[0060]
(Second Step) When the substrate detection sensors 31h, 32h, 41h, and 42h cannot detect the substrate W and are determined to be abnormal, that is, when the substrate W having a deformed end surface as shown in FIG. 4 is generated. The pushing portions 31a, 32a, 41a, 42a (32a, 41a, 42a are not shown) are stopped, and the drive motors 31f, 41f (not shown) are driven in reverse to push the pushing portion 31a. , 32a, 41a, 42a (32a, 41a, 42a not shown) move backward. And the instruction | indication which redoes preliminary positioning by the pushing parts 31a, 32a, 41a, 42a is output to the movement mechanism parts 31, 32, 41, 42 again.
[0061]
(Step E) If the substrate W is detected in the preliminary positioning again (step C), and if the substrate W is not detected, an instruction to discharge the substrate W out of the preliminary positioning mechanism 40 is given. Output to the discharge mechanism section 6.
[0062]
(Step F) As shown in FIG. 8C, the handler 20 of the substrate discharge mechanism unit 6 descends to the vicinity of the feed roller 2a, the suction pad 21 comes into contact with the substrate W, and the substrate W is vacuum-sucked. . In this state, the handler 20 is raised, so that the substrate W is transferred from the feed roller 2a to the handler 20. With the handler 20 holding the substrate W, the handler 20 moves in the horizontal direction along the guide frame and discharges the substrate W out of the preliminary positioning mechanism 40.
[0063]
The substrate W is supported and held on the mounting plate 5 by the above-described operation (b), so that the end surface of the substrate W is less likely to warp, and the pushing portions 31a, 32a, 41a, and 42a are pushed. The end face of the substrate W is hardly deformed, and the substrate W is preliminarily positioned at an appropriate position.
[0064]
In the operation of the above (the above-mentioned two steps), the pushing portions 31a, 32a, 41a, 42a are stopped, the drive motors 31f, 41f are driven reversely, and the pushing portions 31a, 32a, 41a, 42a move backward Then, the deformation of the end surface of the substrate W such as bending or bending is restored and the substrate W can be pushed again by the pushing portions 31a, 32a, 41a, and 42a, and the substrate W is preliminarily positioned at an appropriate position.
[0065]
Further, when the deformation of the end face of the substrate W is not restored in the operation (the second step), the substrate discharge mechanism 6 performs the preliminary positioning mechanism 40 in the operation (the step F). Discharged outside.
[0066]
【The invention's effect】
As described above, in the present invention, the substrate detection sensor is disposed at the position of the periphery of the substrate pushed by the pushing portion or the support housing side that supports the pushing portion of the moving mechanism portion. Even if the end face is warped, it is possible to perform proper preliminary positioning, and it is possible to provide a preliminary positioning mechanism that does not transport a poorly positioned substrate to the next stage.
[0067]
Further, in the present invention, since the mounting plate elevating mechanism unit or the feed roller elevating mechanism unit for supporting the substrate on the mounting plate is provided, the end surface of the substrate is less likely to be warped, and more appropriate. Preliminary positioning is possible.
[0068]
In addition, when the substrate guided to a predetermined position is preliminarily positioned by the pushing of the pushing portion of the moving mechanism portion, the substrate detection arranged at the position that becomes the periphery of the substrate pushed by the pushing portion. If the sensor sensing is not normal, stop the pushing of the pusher and move it backward and then perform pre-positioning by pushing again, or if the substrate detection sensor sense does not become normal, eject the board Since the substrate is discharged by the mechanism portion, it is possible to provide an appropriate preliminary positioning even if the end face of the substrate is warped, and to provide a preliminary positioning method that does not transport a poorly positioned substrate to the next stage.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a preliminary positioning operation according to a first embodiment of the present invention.
FIG. 2 is a perspective view of a moving mechanism unit of the present invention.
FIG. 3 is a plan view of a moving mechanism unit of the present invention.
FIG. 4 is a schematic view showing a state of an end face of the substrate of the present invention.
FIG. 5 is a plan view of a mounting plate according to a second embodiment of the present invention.
FIG. 6 is a schematic diagram showing a preliminary positioning operation according to a second embodiment of the present invention.
FIG. 7 is a cross-sectional view of a mounting plate lifting mechanism according to a second embodiment of the present invention.
FIG. 8 is a schematic diagram showing a preliminary positioning operation according to a third embodiment of the present invention.
FIG. 9 is a plan view of a mounting plate according to a third embodiment of the present invention.
FIG. 10 is a partial cross-sectional view showing a feed roller lifting mechanism according to a third embodiment of the present invention.
[Explanation of symbols]
1, 10, 40 Preliminary positioning mechanism
2a Feed roller
2b Rotating shaft
2c endless belt
2d pulley
2e Drive motor
2f Support frame
2g Feed roller lifting mechanism
30 Installation board
31, 32, 41, 42 Moving mechanism
31a, 32a, 41a, 42a Pushing part
31b, 32b, 41b, 42b support housing
31c, 32c, 41c, 42c Guide
31d, 32d, 41d, 42d
31e, 41e Drive belt
31f, 41f Drive motor
31g, 32g, 41g, 42g Elastic member
31h, 32h, 41h, 42h Substrate detection sensor
31i, 32i, 41i, 42i Vertical drive unit
31j, 32j, 41j, 42j Base
5 Mounting plate
5a Through hole
5b Through long hole
5c opening
51 Delivery mechanism
51a Drive motor
51b Rotating shaft
51c Delivery arm
6 Substrate ejection mechanism
7 Support legs
8 Buffer part
9 Mounting plate lifting mechanism
9A Drive unit

Claims (4)

A feed roller for guiding a rectangular thin plate-like substrate into a predetermined position;
A moving mechanism portion that is disposed in the vicinity of the four sides of the substrate supported at a predetermined position of the feed roller and has a pushing portion that pushes the end face of the substrate;
A substrate detection sensor that is arranged at a position facing the periphery of the substrate pushed by the pushing unit and detects deformation of the end face of the substrate by the presence or absence of sensing ;
A preliminary positioning mechanism, comprising: a substrate discharge mechanism for discharging the substrate that could not be detected by the substrate detection sensor from above the feed roller. A feed roller for guiding a rectangular thin plate-like substrate into a predetermined position;
A moving mechanism unit that is disposed in the vicinity of the four sides of the substrate disposed at a predetermined position by the feed roller, and has a pushing unit that moves between the feed rollers and pushes the end surface of the substrate;
The substrate mounting plate having a through hole from which the upper end of the feed roller protrudes, and a through long hole through which the pushing portion moves,
A substrate detection sensor that is disposed at a position facing a peripheral edge of the substrate on which the pushing portion is pushed with respect to the substrate placed on the placement plate and detects the deformation of the end surface of the substrate based on the presence or absence of sensing ;
An elevating mechanism for elevating and lowering at least one of the feed roller or the mounting plate;
A preliminary positioning mechanism, comprising: a substrate discharge mechanism section for discharging the substrate that could not be detected by the substrate detection sensor from the mounting plate.   The preliminary positioning mechanism according to claim 1, wherein the substrate detection sensor is arranged on a support housing side that supports a pushing portion of the moving mechanism portion. In the method of pre-positioning the substrate by pushing the end face of the rectangular thin plate-like substrate with the pushing portion of the moving mechanism portion arranged in the vicinity of the four sides of the substrate,
The end surface of the substrate is detected while detecting the end surface of the substrate by a substrate detection sensor that is disposed at a position opposite to the peripheral edge of the substrate that is pushed by the pushing portion and detects deformation of the end surface of the substrate based on the presence or absence of sensing. When the substrate detecting sensor is not normally sensed by pushing the pushing portion, the first step of stopping and pushing backward the pushing portion, and again, the end face of the substrate is moved to the end face. When the detection of the substrate detection sensor is normal by pushing by the pressing unit, preliminary positioning is performed by the pressing of the pressing unit, and when the detection of the substrate detection sensor is not normal, the substrate discharge mechanism unit performs the positioning. And a second step of discharging the pre-positioning method.

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