JP2000072251A - Flotation carrier device and flotation carrier system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To move even a heavy platelike substrate at high speed by pushing and moving a floating platelike substrate. SOLUTION: When a glass plate 300 is carried to a transferring part 1 at the time of a state in which a female screw part 13G reaches the motor side, a driving device 13B lowers a bed plate 13C. As a result, a holding part 13H2 moves downward and holds a glass plate 300. Subsequently, the motor rotates and the female screw part 13G moves. As a result, the holding part 13H2 moves in the same direction as the female screw part 13G and the glass plate 300 moves in a floating state. When the glass plate 300 reaches the supporting part side, the driving device 13B pushes up the bed plate 13C. At this time, the glass plate 300 moves to the next transferring part 1 and a control unit by inertia because the glass plate 300 is in the floating state and friction does not exist between the glass plate 300 and a carrier surface 11A.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plate-like base which is lifted by jetting a gas to the plate-like base. Moves reliably and at high speed even on the substrate,
The present invention relates to a levitation transfer device and a levitation transfer system capable of stopping, stopping, and changing directions. INDUSTRIAL APPLICABILITY The present invention is suitably used for a levitation transport system that transports a glass plate used for a liquid crystal display or the like or a wafer on which a semiconductor device is formed by airflow.

[0002]

2. Description of the Related Art As a system for floating and transporting a plate-like substrate, there is, for example, a system for transporting a glass plate for a TFT type liquid crystal display. This transport system is shown in FIG. This transport system is configured by combining a transfer unit 100 and a control unit 200. The transfer unit 100 has a rectangular glass plate 300.
To move in the direction of movement 310. The control unit 200 stops and stops while the glass plate 300 is floated, and changes the direction in the change direction 311. Further, although not shown, the transport system includes a processing unit that performs various processes on the glass plate 300.

[0005] The transfer unit 100 is usually connected to the glass plate 300 in order to move the glass plate 300 linearly. An example of the transfer unit 100 is shown in FIG. The transfer unit 100 includes a base 110 and an enclosing member 120. The base 110 has a supply system 11 for supplying a gas for floating the wafer, for example, a nitrogen gas, an argon gas, or another gas that does not affect the glass plate 300.
1 is piped. Base 110 covered by enclosure 120
The surface 112 is a transfer surface of the transfer path, and the transfer surface 112 is provided with a plurality of ejection holes 113.

[0004] As shown in FIG. 24, the ejection hole 113 is provided to be inclined with respect to the transport surface 112, and the inclination direction of the ejection hole 113 is the center 1 of the moving direction 310 of the glass plate 300.
It is inclined toward 12A. Further, separately from the ejection holes 113, as shown in FIG.
Are arranged in parallel with the moving direction 310 of the glass plate 300,
In addition, the space is inclined with respect to the transport surface 112.
The ejection holes 113 and 115 are provided between the transfer surface 112 and the gas chamber 11.
It is empty between 4,116. Gas chamber 114,
116 communicates with the supply system 111, respectively.

The gas supplied from the supply system 111 through the ejection holes 113 and 115 is ejected from the ejection holes 113 and 115 through the gas chambers 114 and 116. Vent hole 11
The direction in which the gas is ejected from 3, 115 is inclined obliquely upward with respect to the transport surface 112, and the ejection hole 113 is perpendicular to the moving direction 310, and the ejection hole 115 is parallel. The ejection of such a gas corresponds to the ejection direction 1 in FIG.
13A and 115A represent a plane.

In this manner, the gas ejected from the ejection holes 113 and 115 in the ejection directions 113A and 115A causes the glass plate 300 to float and move in the moving direction 310, and at the same time, the center of the glass plate 300 moves to the center 112 of the transfer surface 112.
Since it moves along A, the side surface of the glass plate 300 does not contact the side wall of the enclosing member 120. That is, the glass plate 300 is moved in a non-contact state with respect to the transport surface 112 and the enclosing member 120.

The control unit 200 includes the transfer unit 10
It receives the glass plate 300 sent from 0, stops the glass plate 300, changes the moving direction of the glass plate 300, and rotates the glass plate 300 itself. Control unit 200
Includes a base 210 and an enclosure 220, as shown in FIG. As in the case of the base 110, a supply system 211 for supplying a gas for floating the glass plate 300 is provided in the enclosure 220. Enclosure 220 covers,
A surface 212 of the base 210 is a transport surface of the transport path, and the transport surface 212 has a suction port and a plurality of ejection holes.

A suction port 213 is provided at the center of the transfer surface 212 as shown in FIG. Suction port 213
Sucks the gas near the center and keeps the glass plate 300 stationary while floating. Around the suction port 213,
Setting lines 221 to 224 are set in order from the inside.

The setting line 222 is provided with a jet hole 215. The ejection hole 215 is provided obliquely upward with respect to the transport surface 212 similarly to the ejection hole 113, but the ejection direction of the gas is a counterclockwise ejection direction 215A.
It is. The gas from the outlet 215 causes the glass plate 3
00 rotates counterclockwise.

[0010] The setting line 222 includes the ejection holes 21.
6 is empty. The ejection holes 216 are formed obliquely upward with respect to the transport surface 212, similarly to the ejection holes 113, but the ejection direction of the gas is the clockwise ejection direction 216.
A. The gas from the ejection hole 216 causes the glass plate 300 to rotate clockwise.

The setting lines 221, 223, and 224 include:
The ejection holes 214, 217, and 218 are open. The ejection holes 214, 217, and 218 are provided obliquely upward with respect to the transport surface 212, similarly to the ejection holes 113.
The gas from the ejection holes 214, 217, and 218 is supplied to the suction port 2
13 are ejected in the ejection directions 214A, 217A, and 218A. The gas from the jetting directions 214A, 217A, and 218A causes the center of the glass
3 will be located.

Further, the control unit 200 has ejection holes 251 to 253 for propelling and capturing the glass plate 300.
Are provided on two sets of setting lines 225 and 226, respectively. The ejection holes 251 move in the moving direction 310 of the glass plate 300.
The gas is ejected in the ejection direction 251A which is 180 ° opposite to the above, and the ejection hole 252 ejects the gas in the ejection direction 252A which is the same direction as the moving direction 310.

The ejection hole 253 ejects gas in an ejection direction 253A which is the same direction as the turning direction 311 of the glass plate 300.

When the glass plate 300 enters the control unit 200 from the moving direction 310, the gas outlet 215 blows out gas in a direction opposite to the moving direction 310. Thus, the glass plate 300 is captured by the deceleration action of the ejected gas, and is smoothly stopped at the center of the transport surface 212. Thereby, the stationary and rotating operations of the glass plate 300 can be performed smoothly. For example, when the glass plate 300 is turned in the turning direction 311, the ejection holes 253 eject gas. As a result, the glass plate 300 moves in the turning direction 3
It is promoted to 11.

By such an operation, the glass plate 300
Direction change is performed. When the glass plate 300 is sent out in the same direction as the moving direction 310, the ejection holes 252 eject gas.

By combining a transport system composed of such a transfer unit 100 and a control unit 200 with various processing units, a processing system for the glass plate 300 is constructed. One example of such an airflow transport system is International Application No. PCT / JP91 / 0.
1469.

However, the airflow transport system has the following problems. That is, when the thickness and the like of the glass plate 300 increase and the glass plate 300 becomes heavy, the transfer unit 10
In the ejection of the gas from the ejection holes 115 of the glass plate 30,
0 cannot be moved at high speed.

When the glass plate 300 becomes heavy, the glass plate 300 cannot be completely stopped at the ejection holes 251 and 252 of the control unit 200. In addition, the stationary glass plate 300 cannot be turned at high speed by the ejection of gas through the ejection holes 215 and 216,
Further, in the ejection of gas from the ejection holes 251 to 253, the glass plate 300 cannot be sent at high speed.

As described above, according to the conventional airflow transport system, there are the following problems. That is, in the case where the lifted heavy plate-like substrate is moved, stopped, stopped, and changed direction by the gas from the ejection hole, the plate-like substrate cannot be moved at high speed by the force applied by the gas. Further, since the plate-shaped substrate is heavy, the moving plate-shaped substrate cannot be reliably stopped by the gas ejected from the ejection holes. Further, there has been a problem that the stationary plate-like substrate cannot be moved or changed direction at a high speed by the gas from the ejection holes.

[0020]

SUMMARY OF THE INVENTION According to the present invention, when the plate-like substrate is made to float by jetting gas to the plate-like substrate, and when the plate-like substrate is moved, stopped, stopped and turned in this state, it is heavy. It is an object of the present invention to provide a levitation transport device and a levitation transport system that can move and change the direction of a plate-shaped substrate at high speed and can stop the plate-shaped substrate reliably.

[0021]

According to a first aspect of the present invention, there is provided a levitation transfer apparatus including a plurality of ejection holes provided on a transfer surface.
In the levitation transporting device for moving the plate-like substrate in a state of being floated by the gas ejected from the ejection holes, a moving means for pushing and moving the floating plate-like substrate is provided.

According to a second aspect of the present invention, there is provided a levitation transfer apparatus including a plurality of ejection holes provided on a conveyance surface, wherein the plate-like base is moved in a floating state by gas ejected from the ejection holes. In the apparatus, a moving means for moving the floating plate-like substrate is provided, and the moving means includes a plurality of rollers installed so as to hit both side surfaces of the plate-like substrate, and a device for moving the plate-like substrate. And a driving device for rotating and driving each of the rollers.

According to a third aspect of the present invention, there is provided a levitation transfer device including a plurality of ejection holes provided on a conveyance surface, wherein the plate-like base is moved in a state of being floated by gas ejected from the ejection holes. In the apparatus, a moving means for moving the floating plate-like substrate is provided, and the moving means has at least one of the first and second plates provided so as to hit both side surfaces of the plate-like substrate.
A set of belts and a driving device for feeding each of the belts for moving the plate-shaped substrate are provided.

According to the levitation transfer device of the first to third aspects, the plate-like substrate is moved by mechanical means. That is, the plate-shaped substrate is pushed and moved, moved by rotation of a roller, or moved by a belt. As a result, even if the plate-shaped substrate is heavy, the plate-shaped substrate can be moved at a high speed.

According to a fifth aspect of the present invention, there is provided a levitation transport system comprising a plurality of ejection holes provided on a conveyance surface, and a transfer unit for moving the plate-like substrate in a floating state by gas ejected from the ejection holes. And a control unit comprising: a plurality of ejection holes provided on a transport surface, and at least one of moving, stopping, stopping, and changing direction in a state where the plate-like base is floated by gas ejected from the ejection holes. And a moving means for pushing and moving the floating plate-like substrate is provided in the transfer section.

According to a sixth aspect of the present invention, there is provided a levitation transport system including a plurality of ejection holes provided on a transport surface, wherein the gas ejected from the ejection holes moves the plate-like substrate in a floating state. And a control unit comprising: a plurality of ejection holes provided on a transport surface, and at least one of moving, stopping, stopping, and changing direction in a state where the plate-like base is floated by gas ejected from the ejection holes. A moving means for moving the floating plate-like substrate is provided in the transfer section, and the moving means includes a plurality of rollers installed so as to hit both side surfaces of the plate-like substrate. And a driving device for rotating each of the rollers in order to move the plate-shaped substrate.

According to a seventh aspect of the present invention, there is provided a levitation transport system including a plurality of ejection holes provided on a transport surface, and a transfer unit for moving the plate-like substrate in a floating state by gas ejected from the ejection holes. And a control unit comprising: a plurality of ejection holes provided on a transport surface, and at least one of moving, stopping, stopping, and changing direction in a state where the plate-like base is floated by gas ejected from the ejection holes. A moving means for moving the floating plate-like substrate is provided in the transfer section, and the moving means has at least one set provided so as to hit both side surfaces of the plate-like substrate. And a driving device for feeding each of the belts to move the plate-shaped substrate.

According to the levitation transfer system of the fifth to seventh aspects, the transfer unit moves the plate-like substrate using mechanical means. In other words, the transfer unit pushes and moves the plate-shaped substrate, moves by rotating the roller,
Move by belt. As a result, even if the plate-shaped substrate is heavy, the transfer unit can move the plate-shaped substrate at high speed.

According to a ninth aspect of the present invention, there is provided a levitation transfer system including a plurality of ejection holes provided on a conveyance surface, wherein the gas ejected from the ejection holes moves the plate-like substrate in a floating state. And a control unit comprising: a plurality of ejection holes provided on a transport surface, and at least one of moving, stopping, stopping, and changing direction in a state where the plate-like base is floated by gas ejected from the ejection holes. In the levitation transfer system, at least one rod-like body is provided below the transfer surface of the control unit, and at least one rod-shaped member is provided on the transfer surface for stopping or positioning the moving or rotating plate-like substrate. A first control means for projecting the plate-shaped base, and a second control means for rotating or moving the plate-shaped base by projecting the plate-shaped base stopped by the first control. Characterized in that provided in the knit.

The levitation transport system according to claim 10 is
It has a plurality of ejection holes provided on the transfer surface, a transfer unit for moving the plate-like substrate in a floating state by gas ejected from the ejection holes, and a plurality of ejection holes provided on the transfer surface. In the levitation transport system, the control unit performs at least one of moving, stopping, stopping, and changing direction while the plate-like base is floated by the gas ejected from the ejection holes. A first control unit that is provided below the transfer surface and projects at least one rod-like body onto the transfer surface for stopping or positioning the moving or rotating plate-like base; and the first control unit. A second control means for rotating or moving the plate-like substrate with the plate-like substrate stationary therebetween is provided in the control unit.

According to the levitation transport system according to the ninth and tenth aspects, the control unit moves, stops, stops and changes the direction of the plate-like substrate by using mechanical means. As a result, even if the plate-shaped substrate is heavy, the control unit can reliably stop the plate-shaped substrate. Further, the stationary plate-like substrate can be moved or changed direction at high speed.

[0032]

Embodiments of the present invention will be described below in detail with reference to the drawings.

[First Embodiment] Next, a first embodiment of the present invention will be described. FIG. 1 is a perspective view illustrating a transfer unit according to the first embodiment. FIG. 2 is a sectional view showing an II section of FIG. FIG. 3 is a cross-sectional view showing a II-II cross section of FIG.

In the first embodiment, the transfer unit 1 shown in FIG. 1 is used in place of the plurality of transfer units 100 in the floating transfer system shown in FIG. The transfer unit 1 is a floating transfer device, and includes a plurality of transfer units 1 shown in FIG.
00 are connected. The transfer unit 1 is a base 1
1, an enclosure 12 and a moving device 13. As shown in FIG. 2, the base 11 has an ejection hole 11B, which is the same as the ejection hole 113 shown in FIG. 24, on the transfer surface 11A, and a gas, which is the same as the gas chamber 114 shown in FIG. It has room 11C. In Embodiment 1, FIG.
The one corresponding to the ejection hole 115 and the gas chamber 116 is not provided.

The moving device 13 is a moving means for moving the glass plate 300. The moving device 13 includes the base 11
Is installed so as to extend from the side surface 11D of the transfer member 1 to the side surface 12A of the enclosing member 12. As shown in FIG. 3, the moving device 13 includes a case 13A, a driving device 13B, a base plate 13C, a motor 13D,
E, a male screw portion 13F and a female screw portion 13G.

The case 13A includes a driving device 13B, a base plate 1
3C, motor 13D, support 13E, male screw 13F
And a female screw portion 13G therein. In addition, when the levitation transport system is kept closed, the case 13
A keeps the transport space closed.

The driving device 13B is fixed to the bottom of the case 13A. Shaft 13B1 of drive device 13B
Is fixed to the base plate 13C. Then, when the female screw portion 13G moves to the end of the male screw portion 13F, the driving device 13B raises the shaft 13B1 in the direction of the arrow 321.

Between the motor 13D and the support 13E,
A male screw portion 13F, which is a bar-shaped male screw, is attached. The rotation of the motor 13D causes the male screw 13
The rotation of F causes the female screw portion 13G to move in the longitudinal direction of the male screw portion 13F, that is, in the direction of the arrow 310 (the moving direction of the glass plate 300) or in the opposite direction.

The female screw portion 13G is a female screw that engages with the male screw portion 13F. A moving portion 13H for moving the glass plate 300 is fixed to the female screw portion 13G. As shown in FIG. 4, one end of the rod-shaped support 13H1 of the moving portion 13H is fixed to the female screw portion 13G, and the other end protrudes from the moving window 12A1 into the transport space. The moving window 12A1 is an elongated window opened along the side surface 12A on the side where the moving device 13 is installed.
A holding portion 13H2 for holding the glass plate 300 is fixed to the other end of the support 13H1. Both ends of a rod-shaped body whose surface is covered with an elastic material are bent into an L shape,
A sandwiching portion 13H2 is formed. Thus, when the sandwiching portion 13H2 sandwiches the glass plate 300, even when the glass plate 300 hits the sandwiching portion 13H2, the glass plate 3
00 can be prevented from being damaged.

The above is the configuration of the transfer section 1 according to the first embodiment. Next, the operation of the first embodiment will be described.

In order for the transfer section 1 to receive the glass plate 300, the driving device 13B of the moving device 13 pushes the base plate 13C in the direction of the arrow 321. Also, the motor 13D
Rotates the male screw 13F, and the female screw 13G moves in the direction opposite to the direction of the arrow 310, that is, toward the motor 13D.

When the glass plate 300 is conveyed to the transfer unit 1 while the female screw portion 13G has reached the motor 13D side, the driving device 13B lowers the base plate 13C.
As a result, the sandwiching portion 13H2 moves downward, and sandwiches the glass plate 300. Thereafter, the motor 13D rotates,
The female screw portion 13G moves in the direction of arrow 310. Accordingly, the sandwiching portion 13H2 also moves in the direction of the arrow 310, and moves while the glass plate 300 floats.

When the glass plate 300 reaches the support portion 13E, the driving device 13B pushes up the base plate 13C. At this time, since the glass plate 300 is in a floating state and there is no friction between the glass plate 300 and the transfer surface 11C, the glass plate 300 moves to the next transfer unit 1 or control unit by inertia. Go.

Thus, according to the first embodiment, even if the glass plate 300 is heavy, the moving device 13 mechanically moves the glass plate 300, so that the glass plate 300 can be moved at high speed. .

Further, since the moving speed of the glass plate 300 is determined by the number of rotations of the motor 13D, it is easy to control the moving speed.

[Second Embodiment] Next, a second embodiment of the present invention will be described. FIG. 5 is a perspective view illustrating a transfer unit according to the second embodiment. FIG. 6 is a sectional view taken along the line III-I of FIG.
It is sectional drawing which shows II section. FIG. 7 is a sectional view taken along the line IV-I in FIG.
It is sectional drawing which shows V section.

In the second embodiment, the transfer unit 2 shown in FIG. 5 is used instead of the plurality of transfer units 100 in the floating transfer system shown in FIG. The transfer unit 2 is a floating transfer device, and includes a plurality of transfer units 1 shown in FIG.
00 are connected. The transfer unit 2 is a base 2
1, an enclosure 22 and a moving device 23. As shown in FIG. 6, the base 21 has, on the transfer surface 21A, an ejection hole 21B which is the same as the ejection hole 113 shown in FIG. 24, and similarly, on the lower side of the transfer surface 21A, the same gas as the gas chamber 114 shown in FIG. Room 21C is provided. In Embodiment 2, FIG.
The one corresponding to the ejection hole 115 and the gas chamber 116 is not provided.

The moving device 23 is a moving means for moving the glass plate 300. The moving device 23 includes a driving device 23A and guide rollers 23B and 23C. The guide rollers 23B and 23C are rotating bodies for moving the glass plate 300. Guide roller 23B,
The surface of 23C is covered with an elastic material. Thereby, even if the glass plate 300 hits the guide rollers 23B and 23C, it is possible to prevent the glass plate 300 from being damaged.
Distance b1 between guide roller 23B and guide roller 23C
Is set to be equal to or slightly smaller than the width of the glass plate 300. Thus, the guide roller 23B and the guide roller 23C reliably contact the side surfaces of the glass plate 300, respectively.

One end of the guide roller 23B is
A, and the other end protrudes into the transport space through the through hole 21D. The through hole 21D extends from the driving device 23A to the transport surface 21A, and as shown in FIG.
Holes formed on both sides of the transfer surface 21A. The same number of through holes 21D as the guide rollers 23B and 23C are provided. The length b2 of the protruding portion of the guide roller 23B is set longer than the sum of the thickness of the glass plate 300 and the floating distance of the glass plate 300.

Similarly, one end of the guide roller 23C is connected to the driving device 23A, and the other end protrudes into the transport space through the through hole 21A. The length of the protruding portion at the other end of the guide roller 23B is the same length b2 as the guide roller 23B.

The guide roller 23B and the guide roller 23C hit both side surfaces of the glass plate 300,
The glass plate 300 is sandwiched.

The driving device 23A includes guide rollers 23B,
23C is driven to rotate. That is, the driving device 23A rotates the guide roller 23B counterclockwise, and at the same time, rotates the guide roller 23C clockwise. In addition, when the levitation transport system is maintained in a sealed state, the driving device 23
A closes each through hole 21D and keeps the transport space tightly closed.

The configuration of the transfer unit 2 according to the second embodiment has been described above. Next, the operation of the second embodiment will be described.

The drive unit 23A of the transfer unit 2 rotates the guide roller 23B counterclockwise as shown in FIG.
The guide roller 23C is rotated clockwise. In FIG. 8, the illustration of the ejection holes 21B is omitted. When the glass plate 300 enters the transfer unit 2 while the guide roller 23C is rotating, the guide rollers 23B and 23C hit both side surfaces of the glass plate 300. At this time, since the guide rollers 23B and 23C are rotating, the glass plate 300 moves in the moving direction indicated by the arrow 310.

Thus, according to the second embodiment, even if the glass plate 300 is heavy, the moving device 23 moves the glass plate 300 mechanically, so that the glass plate 300 can be moved at high speed. .

Since the moving speed of the glass plate 300 is determined by the number of rotations of the guide rollers 23B and 23C, it is easy to control the moving speed by the driving device 23A.

Third Embodiment Next, a third embodiment of the present invention will be described. FIG. 9 is a perspective view illustrating a transfer unit according to the third embodiment. FIG. 10 is a sectional view showing a VV section of FIG. 9. FIG. 11 is a cross-sectional view showing a VI-VI cross section of FIG.

In the third embodiment, the transfer unit 3 shown in FIG. 9 is used instead of the plurality of transfer units 100 in the floating transfer system shown in FIG. The transfer unit 3 is a floating transfer device, and includes a plurality of transfer units 1 shown in FIG.
00 are connected. The transfer unit 3 is a base 3
1, an enclosure 32 and a moving device 33 are provided. As shown in FIG. 10, the base 31 is provided on the transfer surface 31A, as shown in FIG.
24, and the same gas chamber 31C as the gas chamber 114 in FIG. 24 below the transfer surface 31A. In Embodiment 3, FIG.
Nothing corresponding to the 5 ejection holes 115 and the gas chamber 116 is provided.

The moving device 33 is a moving means for moving the glass plate 300. The moving device 33 includes a driving device 33A and side belts 33B and 33C. The side belts 33B and 33C are rotators for moving the glass plate 300. The side belt 33B and the side belt 33C are provided on the transport surface 31A so as to face each other on both sides of the transport surface 31A along the transport surface 31A in the longitudinal direction.

The side belt 33B has a shaft portion 33B1 and a belt portion 33B2. Shaft part 33B1
Are used in pairs as shown in FIG. The two shaft portions 33B1 are installed on the driving device 33A through the base 31 at regular intervals. That is, one end of the shaft portion 33B1 is connected to the driving device 33A, and the other end protrudes into the transport space through the through hole 31D.
The through holes 31D are holes formed from the driving device 33A to the transport surface 31A and on both sides of the transport surface 31A. The through holes 31D are provided in the same number as the shaft portions 33B1. The length c1 of the protruding portion of the shaft portion 33B1 is set longer than the sum of the thickness of the glass plate 300 and the floating distance of the glass plate 300.

The belt portion 33B2 is made of a bendable elastic material, for example, silicone rubber. As a result, the side belts 33B and 33C are
Can prevent the glass plate 300 from being damaged. The belt portion 33B2 is bridged between one shaft portion 33B1 and the other shaft portion 33B1. And,
There are multiple installations.

The side belt 33C including the shaft portion 33C1 and the belt portion 33C2 is mounted on the driving device 33A, like the side belt 33B. At this time, the distance c2 between the belt portion 33C2 and the belt portion 33B2 is set to be equal to or slightly smaller than the width of the glass plate 300. This makes it possible to reliably sandwich the glass plate 300 between the belt portion 33C2 and the belt portion 33B2.

The driving device 33A includes shaft portions 33B1, 33
C1 is rotationally driven. That is, the driving device 33A rotates each shaft portion 33B1 counterclockwise, and at the same time, rotates each shaft portion 33C1 clockwise.

The configuration of the transfer unit 2 according to the third embodiment has been described above. Next, the operation of the third embodiment will be described.

As shown in FIG. 12, the driving device 33A of the transfer section 3 rotates each shaft portion 33B1 in a counterclockwise direction and simultaneously rotates each shaft portion 33C1 in a clockwise direction. In addition,
In FIG. 12, the illustration of the ejection holes 31B is omitted. By rotating each shaft portion 33C1 clockwise, the belt portions 33B2 and 33C2 rotate in the movement direction indicated by the arrow 310. In this state, the glass plate 300 is
When entering, the belt portions 33B2 and 33C2
00 on both sides. At this time, the belt portion 33B
Since 2, 33C2 is rotating, the glass plate 3
00 moves in the movement direction indicated by the arrow 310.

Thus, according to the third embodiment, even if the glass plate 300 is heavy, the moving device 33 mechanically moves the glass plate 300, so that the glass plate 300 can be moved at high speed. .

Since the moving speed of the glass plate 300 is determined by the number of rotations of the belt portions 33B2 and 33C2, it is easy to control the moving speed by the driving device 33A.

[Fourth Embodiment] Next, a fourth embodiment of the present invention will be described. FIG. 13 is a perspective view showing a control unit according to the fourth embodiment. FIG.
FIG. 7 is a sectional view showing a VII-VII section of FIG.

In the fourth embodiment, in the levitation transport system shown in FIG.
The control unit 4 shown in FIG. Control unit 4
As shown in FIG. 14, the base 41, the enclosing member 42, the first
Positioning pin portions 43A to 43D are provided as control means, and drive pin portions 44A to 44C are provided as second control means.

In the center of the transfer surface 41A of the base 41, FIG.
The same suction port 41B as the suction port 213 shown in FIG. 8 is provided. Around the suction port 41B, the ejection hole 2 shown in FIG.
The same ejection holes 41C, 41D, 4 as 14, 217, 218
Only 1E is provided.

The positioning pins 43A to 43D are provided on the transport surface 41A so as to be located on the respective side surfaces of the glass plate 300 that is stationary. The positioning pin 43A is
As shown in FIG. 15, an installation hole 41 provided in a base 41 is provided.
It is installed in F. The positioning pin 43A is attached to the body 4
3A1 and a pin 43A2 as a rod.
The main body 43A1 uses air pressure or hydraulic pressure to
2 is projected from the transport surface 41A. At this time, the main body 43A
The length d1 of the pin 43A2 protruding from the glass plate 30
The length is set longer than the sum of the thickness of 0 and the floating distance of the glass plate 300. The surface of the pin 43A2 is covered with an elastic material. Thereby, even if the glass plate 300 hits the pin 43A2, it is possible to prevent the glass plate 300 from being damaged.

The positioning pin portions 43B to 43D are the same as the positioning pin portions 43A.
Description of B to 43D is omitted.

The movement of the moving glass plate 300 and the movement of the rotating glass plate 300 can be stopped by these positioning pin portions 43A to 43D to position the glass plate 300. .

The drive pin portions 44A to 44C face the transport surface 41A so as to face the openings 41G to 41I of the control unit 4 and surround the stationary glass plate 300.
It is installed in three places. The drive pin portion 44A corresponds to FIG.
As shown in FIG. 6, it is installed in an installation hole 41J provided in the base 41. The positioning drive pin portion 44A is
4A1 and a storage section 44A2. Body 44A
1 protrudes the storage section 44A2 from the transport surface 41A using air pressure or hydraulic pressure. At this time, the length e1 of the storage portion 44A2 from which the main body 44A1 protrudes is set longer than the sum of the thickness of the glass plate 300 and the floating distance of the glass plate 300.

The storage section 44 protruding above the transport surface 41A
A2 is a rod 4 that expands and contracts in parallel with the transport surface 41A.
4A3 is provided inside. The installation position of the rod 44A3 is set to be longer than the floating distance of the glass plate 300 and shorter than the sum of the thickness of the glass plate 300 and the floating distance of the glass plate 300. The storage section 44A2 extends the rod 44A3 toward the opening 41G using air pressure or hydraulic pressure. Thereby, the tip of the rod 44A3 comes into contact with the glass plate 300. Since the tip of the rod 44A3 is made of an elastic material, even if the tip of the rod 44A3 hits the glass plate 300, it is possible to prevent the glass plate 300 from being damaged. Since the glass plate 300 is floating, even with a small force by the rod 44A3, the driving pin portion 44A
Can move the glass plate 300 toward the opening 41G.

Since the drive pin portions 44B and 44C are the same as the drive pin portion 44A, the description of the drive pin portions 44B and 44C is omitted.

The configuration of the control unit 4 according to the fourth embodiment has been described above. Next, the operation of the fourth embodiment will be described.

In the control unit 4, the pins 43A2 to 43A
The positioning pins 43A to 43D lower the pins 43A2 to 43D2 to the same position as the transport surface 41A so that the D2 and the storage portions 44A2 to 44C2 do not become unnecessary obstacles to the glass plate 300 that floats. Pin part 44
A to 44C transfer the storage sections 44A2 to 44C2 to the transport surface 41A.
Down to the same position. In this state, for example, when the glass plate 300 enters the control unit 4 through the opening 41I, the pins 43A2 of the positioning pin portions 43A protrude above the transport surface 41A.

Thus, the glass plate 300 coming through the opening 41I hits the pin 43A2 and stops. Thereafter, the glass plate 300 keeps a stationary state.

When the stationary glass plate 300 is rotated, for example, when the glass plate 300 is rotated clockwise, the positioning pins 43A2 to 43D2 are moved to the transfer surface 41.
After being lowered to the same position as A, the drive pin portion 44A projects the storage portion 44A2 onto the transport surface 41A. Thereafter, the drive pin portion 44A projects the rod 44A3 onto the glass plate 300. As a result, the force of the rod 44A3 is applied to the end of the side surface of the glass plate 300, and the glass plate 300 rotates clockwise.

The rotation of the rotating glass plate 300 is performed by the positioning pins 43A to 43D.

When the stationary glass plate 300 is sent out, for example, when the glass plate 300 is moved toward the opening 41G, the positioning pins 43A and 43C are connected to the pins 43A.
2, 43C2 is moved below the transport surface 41A. Thereafter, when the drive pin 44A extends the rod 44A3, a clockwise rotating force is applied to the glass plate 300. At this time, the glass plate 300 is moved to the positioning pin portions 43B, 43.
D, the glass plate 300
Starts moving toward the opening 41G.

Thus, according to the fourth embodiment, even if glass plate 300 is heavy, positioning pin portion 43A
Since the stop and positioning of the glass plate 300 are performed mechanically by the steps 43D to 43D, the stop and positioning of the glass plate 300 can be ensured. Also, the drive pin portions 44A, 4
4B, 44C, a little force, heavy glass plate 3
00 can be quickly moved toward the openings 41G, 41H, 41I. As a result, it is possible to quickly and reliably stop, stop, change direction, and send out the heavy glass plate 300.

[Fifth Embodiment] Next, a fifth embodiment of the present invention will be described. FIG. 17 is a perspective view showing a control unit according to the fifth embodiment. FIG.
It is sectional drawing which shows the VIII-VIII cross section.

In the fifth embodiment, instead of the control unit 200 in the levitation transfer system shown in FIG.
The control unit 5 shown in FIG. Control unit 5
As shown in FIG. 18, the base 51, the enclosing member 52, the first
It has positioning pin portions 53A to 53D as control means and a rotating portion 54 as second control means.

In the center of the transfer surface 51A of the base 51, FIG.
The same suction port 51B as the suction port 213 shown in FIG. 8 is provided. Around the suction port 51B, the ejection hole 2 shown in FIG.
The same ejection holes 51C, 51D, 5 as 14, 217, 218
Only 1E is provided. Also, on the transfer surface 51A,
The same positioning pin portions 53A to 53D as the positioning pin portions 43A to 43D of FIG. 14 are provided.

As shown in FIG. 19, the rotating section 54 is installed on the ceiling 52A of the enclosure 52. Rotating part 54
Has a main body 54A and a rotating body 54B.

As shown in FIG. 20, the rotating body 54B has a rod-shaped rotating shaft 54B having one end connected to the main body 54A.
An L-shaped member 54 whose end is bent into an L-shape
B1 to 54B4. L-shaped fittings 54B1 to 54B
The surface of No. 4 is covered with an elastic material. by this,
Even if the L-shaped tools 54B1 to 54B4 hit the glass plate 300, the glass plate 300 can be prevented from being damaged. The distance f1 between the L-shaped member 54B2 and the L-shaped member 54B3 is
00, the distance f2 between the L-shaped pieces 54B4 and 54B5 is slightly wider than the vertical width of the glass plate 300. Thereby, the rotating body 54B can reliably supplement the glass plate 300.

The rotating body 54B having such a shape is attached to the main body 5
4A moves the rotation shaft 54B1 in a direction perpendicular to the ceiling portion 52A, that is, in a direction indicated by an arrow 331 shown in FIG. The main body 54A is the same as that shown in FIG.
As shown in FIG. 1, the rotation shaft 54B1 is rotated in the rotation direction indicated by the arrow 332 and in the opposite direction. Furthermore, the main body 5
4A moves the rotating shaft 54B1 in the movement direction indicated by the arrow 333 and the opposite direction, and in the movement direction indicated by the arrow 334 and the opposite direction.

The above is the configuration of the control unit 5 according to the fifth embodiment. Next, the operation of the fifth embodiment will be described.

In the control unit 5, the positioning pin 54
A to 54D lower the pins 54A2 to 54D2 to the same position as the transport surface 51A. In this state, for example,
When the glass plate 300 enters the control unit 5 through the opening 51I, the pin 53A2 of the positioning pin 53A is moved to the transfer surface 51.
Stick out over A.

As a result, the glass plate 300 coming through the opening 51I hits the pin 53A2 and stops. Thereafter, the glass plate 300 keeps a stationary state.

When the stationary glass plate 300 is rotated, for example, when the glass plate 300 is rotated clockwise, the rotating unit 54 moves the rotating body 54B in the direction of the arrow 331,
That is, it is lowered toward the glass plate 300. As a result, the glass plate 300 is sandwiched between the rotating bodies 54B. Then, after the main body 54A rotates the rotating body 54B clockwise, the rotating body 54B is raised in the direction opposite to the arrow 331. At this time, since the glass plate 300 is floating, it keeps rotating clockwise due to inertia.

The rotating glass plate 300 is stopped by the positioning pins 53A to 53D.

When the stationary glass plate 300 is sent out, for example, when the glass plate 300 is moved toward the opening 51G, the rotating unit 54 lowers the rotating body 54B and sandwiches the glass plate 300. Thereafter, the positioning pin portions 53A to 53D
Moves the pins 53A2 to 53D2 below the transport surface 51A. When the glass plate 300 is sandwiched, the rotating unit 54 moves the rotating body 54B in the direction opposite to the arrow 334, that is, in the direction of the opening 51G, and raises the rotating body 54B. Glass plate 300
Is floating and moves toward the opening 51G by inertia.

As described above, according to the fifth embodiment, even if the glass plate 300 is heavy, the positioning pin portions 53A to 53A can be used.
Since the stopping and positioning of the glass plate 300 are performed mechanically by 53D, the stopping and positioning of the glass plate 300 can be ensured. In addition, the small force generated by the slight movement of the rotating unit 54 causes the heavy glass plate 30
0 can be sent out quickly. As a result, it is possible to stop and stop the heavy glass plate 300 at high speed and reliably.

[Sixth Embodiment] Next, a sixth embodiment of the present invention will be described.

In the sixth embodiment, one of the transfer units 1 to 3 of the first to third embodiments and the fourth and fourth embodiments are different.
One of the five control units 4 and 5 is selected, and at least one of the selected type of transfer unit and control unit is used to configure a floating transport system.

Thus, the glass plate 300 is lifted using the gas, and the movement, the stop, the rest, and the direction change of the glass plate 300 are performed by mechanical means using pins and arms. 300 conveyance at high speed,
And it can be performed reliably.

[Seventh Embodiment] Next, a seventh embodiment of the present invention will be described. In the first to sixth embodiments, the ejection holes of the transfer unit and the ejection holes of the control unit eject the gas obliquely upward with respect to the transport surface. However, in the first to sixth embodiments, the movement, stop, rest, and direction change of the glass plate 300 are performed by mechanical means using pins and arms.
The direction in which the ejection holes eject gas is perpendicular to the transport surface.

When such ejection holes are provided on the transport surface of the base, drilling may be performed in a direction perpendicular to the transport surface, so that the drilling process is simplified and the processing time is shortened. be able to.

[Eighth Embodiment] Next, an eighth embodiment of the present invention will be described. In Embodiments 4 to 7, a suction hole is provided at the center of the control unit. However, in the fourth to seventh embodiments, the glass plate 300
Since the stop, stop and change of direction are performed by mechanical means using pins and arms, the eighth embodiment has a structure in which suction holes are not provided on the transport surface.

With such a structure, it is possible to reduce the number of steps for the transport surface of the control unit.

The first to eighth embodiments have been described above, but the present invention is not limited to these embodiments. For example, an example in which a glass plate or the like for a TFT-type liquid crystal display is transported by air flow is described as an example. However, the present invention is not limited to a glass plate and is applicable to a system for transporting various plate-like substrates.

Although there are various arrangements of the ejection holes provided in the transfer section and the control unit, the present invention is also applicable to these various arrangements.

Further, a system for linearly transporting a plate-like substrate using only the transfer section may be configured.

[0107]

As described above, according to the present invention, a moving means for pushing and moving a floating plate-like substrate is provided in a floating transport system. Further, a moving means for moving the floating plate-like substrate is provided, and the moving means includes a plurality of rollers installed so as to hit both side surfaces of the plate-like substrate, and each roller for moving the plate-like substrate. And a driving device for rotating the. Furthermore, moving means for moving the floating plate-like substrate is provided, and the moving means includes
At least one set of belts provided so as to contact both side surfaces of the plate-like substrate, and a driving device for feeding each belt to move the plate-like substrate were provided. Thus, the plate-like substrate is moved by mechanical means, so that a heavy plate-like substrate can be moved at a high speed.

According to the present invention, since the jetting direction of the gas ejected from the ejection holes is substantially perpendicular to the conveying surface, the ejection direction of the ejection holes is substantially perpendicular to the conveying surface. Thus, the processing for opening the ejection holes on the transport surface is performed in a direction perpendicular to the transport surface, so that the processing can be simplified.

According to the present invention, in the levitation transport system, the transfer unit is provided with the moving means for pressing and moving the floating plate-like substrate. Further, a moving unit for moving the floating plate-like substrate is provided in the transfer unit, and the moving unit includes a plurality of rollers installed so as to hit both side surfaces of the plate-like substrate,
In order to move the plate-like substrate, a driving device for rotating each roller is provided. Further, a moving means for moving the floating plate-like substrate is provided in the transfer section, and the moving means has at least one of the first and second plates provided so as to contact both side surfaces of the plate-like substrate.
A set of belts and a driving device for feeding each belt to move the plate-like substrate were provided. This allows the transfer unit to move the plate-like substrate using mechanical means, so that even a heavy plate-like substrate can be moved at a high speed.

According to the present invention, the direction in which the gas ejected from the ejection holes of the transfer section is ejected is substantially perpendicular to the transfer surface of the transfer section. Since the processing is performed from a direction perpendicular to the transfer surface, the processing can be simplified.

According to the present invention, at least one rod-shaped member provided below the transfer surface of the control unit and projecting onto the transfer surface for stopping or positioning the moving or rotating plate-like substrate. The control unit is provided with 1 control means and a second control means for rotating or moving the plate-like substrate by projecting the plate-like substrate stopped by the first control means. A first control means provided below the transport surface of the control unit and for projecting at least one rod-shaped body onto the transport surface for stopping or positioning the moving or rotating plate-like base; The second control means for rotating or moving the plate-like base, which is stationary by the first control means, is provided in the control unit. This allows the control unit to stop the plate-shaped substrate using mechanical means, so that the plate-shaped substrate can be reliably stopped, and movement and movement of the plate-shaped substrate can be performed using mechanical means. Since the rotation is performed, the stationary plate-like substrate can be moved or changed direction at high speed.

According to the present invention, the direction in which the gas ejected from the ejection holes of the control unit is ejected is made substantially perpendicular to the transport surface of the transfer section.
Since the processing is performed from a direction perpendicular to the transfer surface, the processing can be simplified.

According to the present invention, the system is configured by combining the selected transfer unit and the control unit. Accordingly, since the movement, stop, rest, and change of direction of the plate-like substrate are performed by mechanical means in the system, even a heavy plate-like substrate can be moved or changed in direction in the system at high speed.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a transfer unit according to Embodiment 1.

FIG. 2 is a sectional view showing an II section of FIG. 1;

FIG. 3 is a sectional view showing a II-II section of FIG. 2;

FIG. 4 is a cross-sectional view illustrating a moving unit according to the first embodiment.

FIG. 5 is a perspective view illustrating a transfer unit according to the second embodiment.

FIG. 6 is a sectional view showing a section taken along line III-III of FIG. 5;

FIG. 7 is a sectional view showing a section taken along line IV-IV of FIG. 5;

FIG. 8 is a cross-sectional view for explaining the operation of the second embodiment.

FIG. 9 is a perspective view showing a transfer unit according to the third embodiment.

FIG. 10 is a sectional view showing a VV section of FIG. 9;

FIG. 11 is a sectional view showing a section taken along line VI-VI of FIG. 9;

FIG. 12 is a cross-sectional view for explaining the operation of the third embodiment.

FIG. 13 is a perspective view showing a control unit according to a fourth embodiment.

FIG. 14 is a sectional view showing a section taken along line VII-VII of FIG. 13;

FIG. 15 is a sectional view showing a positioning pin portion.

FIG. 16 is a cross-sectional view showing a driving pin portion.

FIG. 17 is a perspective view showing a control unit according to the fifth embodiment.

FIG. 18 is a sectional view showing a section taken along line VIII-VIII of FIG. 17;

FIG. 19 is a cross-sectional view showing a state of attachment of a rotating unit according to the fifth embodiment.

FIG. 20 is a perspective view showing a rotating body of the rotating unit.

FIG. 21 is an explanatory view showing the movement of the rotating body.

FIG. 22 is a plan view showing a conventional plate-shaped substrate transfer system.

FIG. 23 is a perspective view showing a conventional transfer unit.

24 is a sectional view taken along the line XI-XI in FIG.

25 is a sectional view taken along line XII-XII of FIG.

FIG. 26 is an explanatory view showing a jetting direction by a conventional transfer unit.

FIG. 27 is a perspective view showing a conventional control unit.

FIG. 28 is an explanatory view showing a jetting direction by a conventional transfer unit.

[Explanation of symbols]

1,2,3 Transfer unit 4,5,200 Control unit 11,21,31,41,51,110,210 Base 11A, 21A, 31A, 41A, 51A, 112,2
12 Conveying surface 12, 22, 32, 42, 52, 120, 220 Enclosure 11B, 21B, 31B, 41C to 41E, 51C to 5
1E, 113, 215 to 218, 251 to 253 Jet holes 11C, 21C, 31C, 114 Gas chamber 11D, 12A Side surface 12A1 Moving window 13, 23, 33 Moving device 13A Case 13B, 23A, 33A Drive device 13B1 Shaft 13C Base plate 13D Motor 13E Supporting part 13F Male screw part 13G Female screw part 13H Moving part 13H1 Support 13H2 Nipping part 21D, 31D Through hole 23B, 23C Guide roller 33B, 33C Side belt 33B1, 33C1 Shaft part 33B2, 33C2 Belt part 41B51 Suction holes 41F, 41J Installation holes 41G to 41I, 51G, 51I Openings 43A to 43D, 53A to 53D Positioning pin portions 43A1, 44A1, 54A Main bodies 43A2 to 43D2, 53A1 to 53D1 Pins 4 A2 storage section 44A3 rods 44A to 44C drive pin section 52A ceiling section 54 rotating section 54B rotating body 54B1 rotating shaft 54B2 to 54B4 L-shaped tool 100 transfer unit 111, 211 supply system 112A center 113A ejection direction 214A to 214D setting line 215A to 218A Spouting direction 300 Glass plate 310,311,321,331,332,333,3
34 arrow b1, c2, f1, f2 interval b2, c1, d1, e1 length

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Michio Yakai 4-2-16-1 Nihonbashi Muromachi, Chuo-ku, Tokyo Inside Watanabe Shoko Co., Ltd. Inventor Masaki Kusuhara 4-2-1, Nihonbashi-Muromachi, Chuo-ku, Tokyo F-term (reference) 5F031 CC04 CC15 CC20 CC52 CC54 HH10

Claims (12)

[Claims] 1. A floating conveyance device comprising a plurality of ejection holes provided on a conveyance surface, wherein a gas ejected from the ejection holes moves a plate-like substrate in a floating state. A levitation transfer device provided with a moving means for pressing and moving a base. 2. A floating conveyance device comprising a plurality of ejection holes provided on a conveyance surface, wherein a gas ejected from the ejection holes moves a plate-like base in a floating state. Moving means for moving the substrate is provided. The moving means includes a plurality of rollers installed so as to be in contact with both side surfaces of the plate-shaped substrate, and each of the rollers is rotationally driven to move the plate-shaped substrate. A levitation transport device comprising a drive device. 3. A floating conveyance device comprising a plurality of ejection holes provided on a conveyance surface, wherein a gas ejected from the ejection holes moves a plate-like substrate in a floating state. Moving means for moving the base is provided. The moving means sends at least one set of belts installed so as to contact both side surfaces of the plate-shaped base, and the belts for moving the plate-shaped base. A levitation transport device comprising a drive device. 4. The levitation transport device according to claim 1, wherein a direction of the gas ejected from the ejection holes is substantially perpendicular to the transport surface. 5. A transfer section comprising a plurality of ejection holes provided on a transfer surface, and a transfer section for moving a plate-like substrate in a floating state by gas ejected from the discharge holes, and a plurality of transfer holes provided on the transfer surface. With the gas ejected from the ejection hole, the plate-shaped substrate moves, stops,
What is claimed is: 1. A levitation transfer system, comprising: a levitation transfer system that combines a control unit that performs at least one of stationary operation and direction change, wherein a moving unit that pushes and moves a floating plate-shaped substrate is provided in the transfer unit. 6. A transfer section comprising a plurality of ejection holes provided on a transfer surface, and a transfer section for moving the plate-like base in a floating state by gas ejected from the discharge holes, and a plurality of transfer holes provided on the transfer surface. With the gas ejected from the ejection hole, the plate-shaped substrate moves, stops,
In a levitation transport system that combines a control unit that performs at least one of stationary and direction changing, a moving unit that moves a floating plate-shaped substrate is provided in the transfer unit, and the moving unit includes the plate-shaped substrate. A plurality of rollers provided so as to contact both side surfaces of the substrate, and a driving device for rotating each of the rollers in order to move the plate-shaped substrate. 7. A transfer section having a plurality of ejection holes provided on a transfer surface, and a transfer section for moving the plate-like substrate in a floating state by gas ejected from the discharge holes, and a plurality of transfer portions provided on the transfer surface. With the gas ejected from the ejection hole, the plate-shaped substrate moves, stops,
In a levitation transport system that combines a control unit that performs at least one of stationary and direction changing, a moving unit that moves a floating plate-shaped substrate is provided in the transfer unit, and the moving unit includes the plate-shaped substrate. And a driving device for feeding each of the belts to move the plate-shaped base body. 8. The transfer device according to claim 5, wherein a jet direction of the gas ejected from the ejection holes of the transfer unit is substantially perpendicular to the transfer surface of the transfer unit. Floating transfer system. 9. A transfer unit having a plurality of ejection holes provided on a transfer surface, and a transfer unit for moving the plate-like base in a floating state by gas ejected from the discharge holes, and a plurality of transfer units provided on the transfer surface. With the gas ejected from the ejection hole, the plate-shaped substrate moves, stops,
In a levitation transport system that combines a control unit that performs at least one of stationary and redirection, provided under the transport surface of the control unit,
First control means for projecting at least one rod-shaped body onto the transport surface for stopping or positioning the moving or rotating plate-like substrate, and the plate-like substrate stopped by the first control means. A levitation transfer system, wherein the control unit is provided with second control means for rotating or moving the plate-shaped substrate. 10. A transfer section comprising a plurality of ejection holes provided on a transfer surface, and a transfer section for moving a plate-like substrate in a floating state by gas ejected from the discharge holes, and a plurality of transfer portions provided on the transfer surface. In the levitation transport system, comprising a control unit that performs at least one of moving, stopping, stationary, and changing direction in a state where the plate-shaped substrate is floated by the gas ejected from the ejection hole, Along with being provided below the transport surface of the control unit,
First control means for projecting at least one rod-shaped body onto the transport surface for stopping or positioning the moving or rotating plate-like substrate, and the plate-like substrate stopped by the first control means. A second control means for rotating or moving the plate-like body with the control unit provided therebetween; 11. The levitation transport according to claim 9, wherein the direction of ejection of the gas ejected from the ejection holes of the control unit is substantially perpendicular to the transfer surface of the transfer unit. system. 12. A combination of a transfer unit selected from the transfer units according to claims 5 to 8 and a control unit selected from the control units according to claims 9 to 11. A floating transport system characterized by the following.