TW418426B - Floating carrier device and floating carrier system - Google Patents
Floating carrier device and floating carrier system Download PDFInfo
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- TW418426B TW418426B TW88114817A TW88114817A TW418426B TW 418426 B TW418426 B TW 418426B TW 88114817 A TW88114817 A TW 88114817A TW 88114817 A TW88114817 A TW 88114817A TW 418426 B TW418426 B TW 418426B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Ί 418426 【 - · _ 一 --1.1 ... - -- 五、發明說明（1) ~~ ' 發明所屬技術領域 本發明係有關於漂浮搬運裝置及漂浮搬運系統，藉著 對板狀基體噴出氣體而將板狀基體設為浮起之狀態後，在 該狀態令板狀基體移動、停止、靜止及轉換方向之情況， 即使重的板狀基體，也可令確實且高速的移動、停止、靜 止及轉換方向。本發明很適合用於氣流搬運形成在液晶顯 示器等使用之之玻璃板或半導體裝置之晶片等之漂浮搬運 系統。 習知技術 、 . 在令板狀基體浮起之搬運系統上例如有搬運TFT型液 晶顯示器用之玻璃板的。該搬運系統如圖22所示。該搬運 系統係由移送單元1 0 0和控制單元2 〇 〇組合而成的。移送單 元100令四角形之玻璃板300浮起後向移動方向31〇方向移 動。控制早元200在令玻璃板300浮起之狀態令停止、靜止 而且令向轉举·方向311轉換方向。此外，搬運系統具有對 於玻璃板300進行各種處理之處理單元，但是省略圖示。 移送平元100為了令坡璃板300直線移動，一般連結使 用。該移送單元1〇〇之一例如圖23所示。移送單元1〇〇具有 基座110和包圍用構件120。在基座11〇進行供給用以令玻 璃板3 〇〇浮起之氣體例如不影響玻璃板3〇〇之氮氣、氬氣或 其他氣體之供給系111之配管。包圍用構件220覆蓋之基座 110之面112係搬運路之搬運面’在搬運面us鑽複數喷出 孔113。Ί 418426 [-· _ I --1.1 ...--V. Description of the invention (1) ~~ 'Technical field of the invention The present invention relates to a floating conveying device and a floating conveying system, which are ejected from a plate-like substrate. When the plate-like substrate is brought into a floating state by gas, the plate-like substrate can be moved, stopped, stopped, or switched in this state. Even a heavy plate-like substrate can be moved and stopped at a high speed. Standstill and change direction. The present invention is very suitable for a floating conveyance system for conveying a glass plate formed on a liquid crystal display or the like or a wafer of a semiconductor device by air flow. Conventional technology. For example, a glass plate for a TFT-type liquid crystal display is carried on a handling system that floats a plate-like substrate. The handling system is shown in FIG. 22. The handling system is a combination of a transfer unit 100 and a control unit 2000. The transfer unit 100 causes the quadrangular glass plate 300 to float and move in the direction of 31 °. In the state where the glass plate 300 is floated, the control early element 200 is stopped and stopped, and the direction is changed to the turning direction 311. The conveyance system includes processing units for performing various processes on the glass plate 300, but the illustration is omitted. The transfer element 100 is generally used for connecting the sloped glass plate 300 in a straight line. One example of the transfer unit 100 is shown in FIG. 23. The transfer unit 100 includes a base 110 and a surrounding member 120. The base 11 is supplied with a pipe for supplying a gas for floating the glass plate 3000, such as nitrogen, argon, or other gas supply system 111 which does not affect the glass plate 300. The surface 112 of the base 110 covered by the surrounding member 220 is a conveying surface of the conveying path ', and a plurality of ejection holes 113 are drilled in the conveying surface us.
第4頁 t 418A26 f 五、發明說明（2) 喷出孔113如圖24所示，相對於搬運面112傾斜設置，· 喷出孔113之傾斜方向朝向玻璃板300之移動方向310之中 心11 2 A傾斜。又，除了喷出孔11 3以外，如圖2 5所示，推 進用喷出孔U5和玻璃板300之移動方向310平行排列，而 且鑽成相對於搬運面112傾斜。在自搬運面Π2至氣體室 114、116之間鑽喷出孔113、115。氣體室114、116各自和 供給系1 11相通。 利用各喷出孔11 3、11 5供給供給系1 11之氣體經由氣 體室114、116由喷出孔113、115喷出。來自喷出孔113、 U5之氣體之喷出方向相對於搬運面112向斜上方傾斜，而 且相對於移動方向310，喷出孔113成直角，喷出孔115成 平行。利用圖26之喷出方向11 3A、11 5A在平面上表示這種 氣體之噴出。 照這樣，玻璃板3 0 0利用自各喷出孔11 3、11 5向喷出 方向113A、115A喷出之氣體浮起而向移動方向31〇移動， 同時因玻璃板3 0 0之中心沿著搬運面}丨2之中心j} 2 a移動， 玻璃板3 0 0之側面不會接觸包圍用構件丨2 〇之側壁。即，玻 璃板3 00以相對於搬運面Π2或包圍用構件12〇非接觸之狀 態移動。Page 4 t 418A26 f V. Description of the invention (2) As shown in FIG. 24, the ejection hole 113 is inclined with respect to the conveying surface 112, and the inclined direction of the ejection hole 113 faces the center 11 of the moving direction 310 of the glass plate 300. 2 A tilt. In addition to the ejection holes 11 3, as shown in FIG. 25, the ejection holes U5 for pushing and the moving direction 310 of the glass plate 300 are arranged in parallel and drilled so as to be inclined with respect to the conveying surface 112. Ejection holes 113 and 115 are drilled between the carrying surface Π2 and the gas chambers 114 and 116. Each of the gas chambers 114 and 116 communicates with the supply system 111. The gas supplied to the supply system 11 through the respective ejection holes 11 3, 11 5 is ejected from the ejection holes 113, 115 through the gas chambers 114, 116. The ejection direction of the gas from the ejection holes 113 and U5 is inclined obliquely upward with respect to the conveying surface 112, and the ejection holes 113 are at a right angle and the ejection holes 115 are parallel with respect to the moving direction 310. The ejection directions 11 3A and 11 5A in FIG. 26 are used to show the ejection of this gas on a plane. In this way, the glass plate 300 moves in the moving direction 31o by using the gas ejected from the respective discharge holes 11 3, 1 15 in the discharge directions 113A and 115A, and at the same time, the center of the glass plate 3 00 follows The conveying surface} 2 center j} 2 a moves so that the side surface of the glass plate 3 0 0 does not contact the side wall of the enclosing member 丨 2 0. That is, the glass plate 300 moves in a non-contact state with respect to the conveying surface Π2 or the surrounding member 120.
控制單元200收取自移送單元IQ。送來之玻璃板3Q〇， 進行該玻璃板300之停止、靜止及移動方向之變更或玻璃 板3 00本身之轉動等。控制單元2(]〇如圖27所示，具有基座 210/和包圍用構件220。在包圍用構件22〇和基座U() 一樣地 進行供給用以令玻璃板300浮起之氣體之供給系21 i之配The control unit 200 receives the self-transfer unit IQ. The sent glass plate 3Q0 is used to stop, stop, and change the direction of the glass plate 300, or to rotate the glass plate 300 itself. As shown in FIG. 27, the control unit 2 () 〇 is provided with a base 210 / and a surrounding member 220. The surrounding member 220 is supplied with the same gas as the base U () to cause the glass plate 300 to float. Supply system 21 i
4^8426 五、發明說明（3) 管。包圍用構件2 20覆蓋之基座210之面212係搬運路之搬 運面’在搬運面21 2鑽吸引孔和複數喷出孔。4 ^ 8426 V. Description of the invention (3) Tube. The surface 212 of the base 210 covered by the enclosing member 2 20 is the conveying surface of the conveying path ', and a suction hole and a plurality of ejection holes are drilled in the conveying surface 21 2.
在搬運面212之中心鑽吸引孔213，如圖28所示。吸引 孔213吸入中心附近之氣體，在令玻璃板300浮起下令靜 止。在吸引孔2 1 3之周圍自内侧依次設定設定線221 ~224 又’在設定線222鑽噴出孔216。喷出孔216和喷出孔 113—樣地鑽成相對於搬運面212斜上方，但是氣體之喷出 方向係反時鐘方向之喷出方向216A。玻璃板300利用來自 喷出孔216之氣體朝時鐘方向轉動。A suction hole 213 is drilled in the center of the conveying surface 212, as shown in FIG. The suction hole 213 sucks in the gas near the center, and makes the glass plate 300 float to a standstill. The setting lines 221 to 224 are sequentially set from the inside around the suction holes 2 1 3 and the ejection holes 216 are drilled at the setting lines 222. The ejection holes 216 and 113 are drilled obliquely upward with respect to the conveying surface 212, but the ejection direction of the gas is the ejection direction 216A in the counterclockwise direction. The glass plate 300 is rotated in the clock direction by the gas from the ejection holes 216.
在設定線221、223、224鑽喷出孔214、217、218。嗔 出孔214、217、218和噴出孔113—樣地鑽成相對於搬運面 212斜上方。來自喷出孔214、21 7、218之氣體往朝向吸引 口 213之喷出方向214A、217A、218A噴出。利用來自喷出 方向2144、2174、218人之氣體，玻璃板3〇〇之中心位於吸 引口 213。 此外，在控制單元200 ’在各2列之設定線225、226鑽 玻璃板300之推進及捕捉用之喷出孔251〜253。喷出孔25Ϊ 朝方向係和玻璃板3 00之移動方向31〇反向18〇度之喷出方 向251A噴出氣體，喷出孔252朝方向係和移動方向31〇相同 之噴出方向252A喷出氣體。 噴出孔253朝方向係和玻璃板3〇〇之轉換方向311相同 之喷出方向253A喷出氣體。 玻璃板3 00自移動方向31〇進入控制單元2〇〇時，喷出 孔215朝和移動方向310相反之方向喷出氣體。藉此，玻璃The ejection holes 214, 217, and 218 are drilled at the setting lines 221, 223, and 224.嗔 Outlet holes 214, 217, 218 and ejection holes 113—The sample is drilled obliquely above the conveying surface 212. The gas from the ejection holes 214, 21 7, 218 is ejected in the ejection directions 214A, 217A, and 218A toward the suction port 213. The center of the glass plate 300 is located at the suction inlet 213 using the gas from the ejection directions of 2144, 2174, and 218 people. In addition, in the control unit 200 ', setting holes 225 and 226 in each two rows are drilled with ejection holes 251 to 253 for advancing and capturing the glass plate 300. The ejection hole 25Ϊ ejects the gas in a direction of 251A in the direction of the direction of movement and the glass plate 3 00 31 °, and the ejection hole 252 ejects the gas in the same direction as the direction of movement in the direction of movement 30 °. . The ejection hole 253 ejects a gas in an ejection direction 253A which is the same direction as that of the glass plate 300 conversion direction 311. When the glass plate 300 enters the control unit 200 from the moving direction 31o, the ejection hole 215 ejects gas in a direction opposite to the moving direction 310. With this, glass
Γ 418426Γ 418426
板30 0利用所噴出之氣體之減速作用捕捉，圓滑地停在搬 運面212之中心。因而，玻璃板3 〇〇之靜止、轉動動作圓 滑。例如’在璩璃板300朝轉換方向3U轉換方向之情況， 喷出孔253喷出氣體。藉此，玻璃板3〇〇朝轉換方向311推 進。 ' 利用這樣的動作轉換玻璃板3 〇 〇之方向。此外，在朝 和移動方向310相同之方向送出玻璃板3 〇〇之情況.，喷出孔 2 5 2喷出氣體。 ' 藉著組合由這種移送單元〗00和控制單元2 〇 〇構成之搬 運系統與各種處理單元，建立玻璃板3〇〇之處理系統。這 種搬運系統之一例如國際專利申請號碼!^"^…/^^^。 可是，在漂浮搬運系統有如下之問題。即，因玻璃板 300之厚度等增加而玻璃板3〇〇變重時，利用移送單元丨 之喷出孔115喷出氣體，無法令玻璃板3 〇〇高速移動。 又，玻璃板300變重時，用控制單元2 〇〇之喷出孔251 無法使玻璃板30 0完全停止。此外，利用噴出孔21 5、216 喷出氣體，無法使靜止之玻璃板30 0高逮的轉換方向又 利用喷出孔251〜253喷出氣體，無法高速的送出玻璃板 3 00 0 如上述所示， 問題點。即，在利 基體移動、停止、 用力無法令板狀基 自喷出孔噴出之氣 若利用習知之漂浮搬 用來自喷出孔之氣體 靜止及轉換方向之情 體高速移動。又，因 體無法使移來之板狀 運系統，有如下之 +浮起之重的板狀 況’利用氣體之作 板狀基體重，利用 基體確實停止。此The plate 300 is captured by the deceleration effect of the ejected gas, and smoothly stops at the center of the carrying surface 212. As a result, the glass plate 300 is stationary and smoothly rotated. For example, in the case where the glass plate 300 is switched in the 3U switching direction, the spray holes 253 spray gas. Thereby, the glass plate 300 is advanced in the switching direction 311. 'Use this action to change the direction of the glass plate 300. When the glass plate 300 is ejected in the same direction as the moving direction 310, the ejection holes 2 5 2 eject the gas. 'By combining a transfer system consisting of such a transfer unit 00 and a control unit 2000, and various processing units, a processing system of glass plate 300 is established. One such handling system is, for example, the international patent application number! ^ &Quot; ^ ... / ^^^. However, the floating transportation system has the following problems. That is, when the glass plate 300 becomes heavy due to an increase in the thickness or the like of the glass plate 300, the gas is ejected from the ejection hole 115 of the transfer unit 丨, and the glass plate 300 cannot be moved at a high speed. When the glass plate 300 becomes heavy, the glass plate 300 cannot be completely stopped by the ejection hole 251 of the control unit 2000. In addition, the ejection holes 21 5 and 216 are used to eject the gas, and the stationary glass plate 300 cannot be changed in direction. The ejection holes 251 to 253 are also used to eject the gas, and the glass plate 3 00 0 cannot be ejected at high speed. The problem points. That is, when the substrate is moved, stopped, or forced, the gas ejected from the ejection hole by the plate-shaped substrate cannot be moved at high speed by using the conventional floatation to move the gas from the ejection hole to stand still and change direction. In addition, because the body cannot move the plate-shaped transport system, there are the following conditions of the plate + floating heavy weight: ‘the use of gas as the plate-like base body weight, the use of the substrate does stop. this
418426 五、發明說明（5) 外’有利用來自噴出孔之氣體無法高速地進行靜止之板狀 基體之移動及方向轉換之問題點。 發明所欲解決之課題 本發明之目的在於提供一種漂浮搬運裝置及漂浮搬運 系統’藉著對板狀基體喷出氣體而將板狀基體設為浮起之 狀態後，在該狀態令板狀基體移動、停止、靜止及轉換方 向之情況，即使重的板狀基體，也可高速的進行移動及方 向轉換，而且可令板狀基體確實停止。 用以解決課題之手段 ’ ’ 若依據如申請專利範圍第1項之漂浮搬運裝置，係關 於具備在搬運面所設置之複數喷出孔並在利用自該喷出孔 噴出之氣體在令板狀基體浮起之狀態下令移動之漂浮搬運 裝置’其特徵在於設置推浮起之板狀基體並令移勢之斧動 / ’ r 裝置。 若依據如申請專利範圍第2項之漂浮搬運裝置’係關， 於具備在搬運面所設置之複數喷出孔並在利用自該喷出孔 嘴出之氣體在令板狀基體浮起之狀態下令移動之漂浮搬運 裝置，其特徵在於：設置令浮起之板狀基體移動之移動裝 置；在該移動裝置設置設置成碰到該板狀基體之兩侧面之 複數輥和為了令該板狀基體移動而驅動該各輥轉動之驅動 裴置。 若依據如申請專利範圍第3項之漂浮搬運裝置’係關418426 V. Description of the invention (5) Outside 'There are problems that the gas from the ejection holes cannot move the plate-like substrate at rest at high speed and change the direction. Problems to be Solved by the Invention An object of the present invention is to provide a floating conveying device and a floating conveying system 'after the gas is ejected from the plate-shaped substrate, the plate-shaped substrate is brought into a floating state, and the plate-shaped substrate is made in this state In the case of moving, stopping, stationary, and changing direction, even a heavy plate-shaped substrate can be moved and changed in direction at high speed, and the plate-shaped substrate can be stopped reliably. Means to solve the problem 'If the floating conveying device according to item 1 of the scope of patent application is based on a plurality of ejection holes provided on the conveying surface and the gas ejected from the ejection holes is used to make the plate shape The floating conveying device for ordering movement when the substrate is floating is characterized in that a plate-shaped substrate that pushes and floats and a moving axe / 'r device are provided. If the floating conveying device according to item 2 of the scope of the patent application is related, it is in a state in which the plate-shaped substrate is floated by using a plurality of ejection holes provided on the conveying surface and using the gas from the nozzle of the ejection holes. The floating conveying device for ordering movement is characterized in that: a moving device for moving the floating plate-shaped substrate is provided; a plurality of rollers arranged to touch both sides of the plate-shaped substrate and a plate-shaped substrate are provided in the moving device; The driving mechanism that moves and drives the rollers to rotate. If it is related to the floating handling device according to item 3 of the scope of patent application,
418426 五、發明說明（6) 於具備在搬運面 喷出之氣體在令 裝置，其特徵在 置；在該移動裝 至少一組之皮帶 之驅動裝置。 若依據如申 置，板狀基體利 移動，或利用輥 板狀基體係重的 若依據如申 於由具備在搬運 孔喷出之氣體在 部、及具備在搬 出孔喷出之氣體 止、靜止及方向 浮搬運系統，其 之移動裝置。 若依據如申 於由具備在搬運 孔噴出之氣體在 ^ 及具備在搬 出孔喷出之氣體 止、靜止及方向 請專利範圍 用機械式裝 之轉動而移 ，也可令該 請專利範圍 面所設置之 令板狀基體 運面所設置 在令板狀基 轉換之至少 特徵在於設 所設置之複數喷出孔並在利用自該喷出孔 板狀基體浮起之狀態下令移動之漂浮搬運 於：設置令浮起之板狀基體移動之移動装 置設置設置成碰到該板狀基體之兩侧面之 和為了令該板狀基體移動而驅動該各皮帶 第1項至第3項之漂浮搬運裝 置移動。即，板狀基體被推而 動’或利用皮帶移動。結果， 板狀基體高速移動。 第5項之漂浮搬運系統，係關 複數喷出孔並在利用自該喷出 浮起之狀態下令移動之移送 之複數喷出孔並在利用自該喷 體浮起之狀態下進行移動、停 一種之控制單元組合而成之漂 置推浮起之板狀基體並令移動 請專利範圍第6項之潭洋撫；重么 面所設置之複數噴出孔系統’，關 令板狀基體浮起之狀態下令^ 運面所設置之複數噴：孔：在 在令板狀基體浮起之狀態】= 轉換之至少一種之控制單元組Π:之；418426 V. Description of the invention (6) It is provided with a device for ordering the gas sprayed on the conveying surface, which is characterized in that it is equipped with a driving device of at least one set of belts in the movement. If the basis is applied, the plate-like substrate is moved easily, or if the roller-based base system is used, the basis is provided by the gas provided in the carrying hole and the gas provided in the carrying hole. And directional floating handling system, its moving device. If the application is based on the application of the gas with the gas ejected in the conveying hole, and the gas with the gas ejected in the conveying hole, the stationary, static, and direction of the patented range can be moved by mechanical installation, and the patented range can also be made. The installed plate-like substrate transport surface is provided with at least the characteristics of switching the plate-like substrate by setting a plurality of ejection holes and using the floating state of the plate-like substrate from the ejection holes to move the floating carrier to: A moving device for moving the floating plate-shaped substrate is provided. The moving device is arranged to touch the sum of the two side surfaces of the plate-shaped substrate to move the plate-shaped substrate to move the floating conveying devices of items 1 to 3 of the belts. . That is, the plate-like substrate is pushed 'or moved by a belt. As a result, the plate-like substrate moves at high speed. The floating conveying system of item 5 is to close a plurality of ejection holes and use a plurality of ejection holes that are moved in a state of floating from the ejection to move and stop while using the ejection body to float. A kind of control unit is combined with a floating plate-shaped substrate and the movement is requested by Tan Yangfu of the patent scope No. 6; the plural ejection hole system provided by the heavy surface is used to lift the plate-shaped substrate In the state, ^ plural sprays set on the transport surface: holes: in a state where the plate-like substrate is floating] = at least one type of control unit group Π: which is converted;
第9頁 '1 418426 五、發明說明（？） 浮搬運系統，其特徵在於：在該移送部設置令浮起之板狀-基體移動之移動裝置；在該移動裝置設置設置成碰到該板」 狀基體之兩侧面之複數輥和為了令該板狀基體移動而驅動 該各輥轉動之驅動裝置。 若依據如申請專利範圍第7項之漂浮搬運系統，係關 於由具備在搬運面所設置之複數噴出孔並在利用自該嘴出 孔喷出之氣體在令板狀基體浮起之狀態下令移動之移送 、及具備在搬運面所設置之複數噴出孔並在利用自該噴 出孔喷出之氣體在令板狀基體浮起之狀態下進行移動、停 止、靜止及方向轉換之至少一種之控制單元組合而成之漂 ， 浮搬運系統，其特徵在於：在該移送部設置令浮起之板狀 基體移動之移動裝置；在該移動裝置設置設置成碰到該板 狀基體之兩侧面之至少一組之皮帶和為了令該板狀基體移 動而驅動該各皮帶之驅動裝置。 若依據如申請專利範圍第5項至第7項之漂浮搬運系 統’移送部使用機械式裝置令板狀基體移動。即，移送部 推板狀基體而令移動，或利用輥之轉動令移動，或利用皮 帶令移動。結果，板狀基體係重的’移送部也可令該板狀 基體局速移動。 若依據如申請專利範圍第9項之漂浮搬運糸統，係關 ， 於由具備在搬運面所設置之複數喷出孔並在利用自該喷出 孔噴出之氣體在令板狀基體浮起之狀態下令移動之移送 部、及具備在搬運面所設置之複數喷出孔並在利用自該喷 出孔喷出之氣體在令板狀基體浮起之狀態下進行移動、停Page 9 '1 418426 V. Description of the invention (?) The floating handling system is characterized in that: a moving device for moving the floating plate-substrate is provided in the transfer unit; and the mobile device is provided so as to touch the plate A plurality of rollers on both sides of the substrate and a driving device for driving the rollers to rotate in order to move the plate-shaped substrate. According to the floating handling system according to item 7 of the scope of the patent application, it is about the movement of the plate-like substrate by having a plurality of ejection holes provided on the conveying surface and using the gas ejected from the nozzle ejection holes to float the plate-like substrate. And a control unit provided with at least one of a plurality of ejection holes provided on the conveying surface and moving, stopping, stationary, and changing the direction while using a gas ejected from the ejection holes to float the plate-like substrate. The combined floating and floating conveying system is characterized in that: a moving device for moving the floating plate-shaped substrate is provided in the transfer part; and at least one of two side surfaces of the plate-shaped substrate is provided in the moving device. The belts of the group and the driving device for driving the belts to move the plate-like substrate. In accordance with the floating conveyance system according to items 5 to 7 of the scope of patent application, the transfer unit uses a mechanical device to move the plate-like substrate. That is, the transfer unit pushes the plate-like substrate to move, or rotates by a roller, or moves by a belt. As a result, the plate-shaped substrate's heavy 'transfer portion' can also cause the plate-shaped substrate to move at a local speed. If it is based on the floating conveyance system as described in item 9 of the scope of the patent application, it is related to the fact that a plurality of ejection holes provided on the conveying surface are used to float the plate-shaped substrate by using gas ejected from the ejection holes. The transfer unit that is ordered to move and a plurality of ejection holes provided on the conveying surface are used to move and stop the plate-shaped substrate by using the gas ejected from the ejection holes.
第10頁 i 418426 ---------- 五、發明說明（8) ^、靜止及方向轉換之至少一種之控制單元組合而成之漂心 =搬運系統，其特徵在於：在該控制單元設置設於該控制. 几之該搬運面下而且為了移動或轉動之板狀基體之停止 ^定位將至少一個棒狀物向該搬運面上推出之第1控制裝 及利用該第1控制裝置推靜止之該板狀基體後進行板狀 土體之轉動或移動之第2控制裝置。 於右依據如申請專利範圍第1 0項之漂浮搬運系統，係關 :$具備在搬運面所設置之複數喷出孔並在利用自該喷出 ^喷出之氣體在令板狀基體浮起之狀態下令移動之移送 =、及具備在搬運面所設置之複數噴出孔並在利用自該喷 孔噴出之氣體在令板狀基體浮起之狀態下進行移動、停 =、靜止及方向轉換之至少一種之控制單元組合而成之漂 I搬運系統’其特徵在於：在該控制單元設置設於該控制 η元之該搬運面下而且為了移動或轉動之板狀基體之停止 或定位將至少一個棒狀物向該搬運面上推出之第1控制裝 置及利用該第1控制裝置夾靜止之該板狀基體後進行板狀 基體之轉動或移動之第2控制裝置。 若依據如申請專利範圍第9、1 0項之漂浮搬運系統， 控制單元使用機械式裝置令板狀基體移動、停止、靜止及 轉換方向。結果，板狀基體係重的，控制單元也可令該板 狀基體確實停止。又’可令靜止之板狀基體高速移動或轉 換方向。 發明之實施例Page 10 i 418426 ---------- V. Description of the invention (8) ^, at least one control unit of stationary and direction conversion = Blind center = handling system, characterized by: The control unit is provided under the control. The first control device that pushes at least one rod toward the conveying surface under the conveying surface and stops or moves the plate-like substrate ^ positioning and uses the first control The device is a second control device that rotates or moves the plate-shaped soil body after pushing the plate-shaped substrate that is stationary. On the right, according to the floating handling system of item 10 in the scope of patent application, it is related to: $ It has a plurality of ejection holes provided on the conveying surface and uses the gas ejected from the ejection ^ to make the plate-shaped substrate float Under the state of moving the transfer =, and equipped with a plurality of ejection holes provided on the conveying surface, and using the gas ejected from the ejection holes to move, stop =, stand still and change the direction of the plate-shaped substrate It is characterized in that at least one type of control unit is combined with a drifting I transportation system, characterized in that at least one of the control unit is provided under the control surface of the control unit and is used for stopping or positioning the plate-like substrate for movement or rotation. The first control device that the rod-shaped object pushes out to the conveying surface and the second control device that rotates or moves the plate-shaped substrate after the plate-shaped substrate is held stationary by the first control device. In accordance with the floating handling system such as the scope of patent applications No. 9, 10, the control unit uses a mechanical device to move, stop, stand still and change the direction of the plate-like substrate. As a result, the plate-like substrate is heavy, and the control unit can actually stop the plate-like substrate. It can also make the stationary plate-like substrate move or change direction at high speed. Examples of invention
第11頁 (418A26 -_ 1 五、發明說明（9) 以下參照圖面詳述本發明之實施例。 實施例1 、 其次說明本發明之實施例1。圖1係表示實施例1之移 送部之立體圖。圖2係表示圖1之I — I剖面之剖面圖。圖3 係表示圖2之π - Π剖面之剖面圖。 ^ 在實施例1 ’使用圖1所示之移送部1替代圖2 2所示之 漂浮搬運系統中之多台移送單元丨〇 〇。移送部1係漂浮搬運 裝置’成連結了圖22所示多台移送單元1〇〇之形狀。移送 部1具備基座11、包圍用構件丨2以及移動裝置13。基座u 如圖2所示’在搬運面iiA具有和圖24所示噴出孔113 —樣 之喷出孔11B及一樣地在搬運面ha之下側具有和圖24之氣 體室Π 4 —樣之氣體室11 c。又，在實施例1，未設置和圖 25之喷出孔115及氣體室116對應的。 移動裝置13係用以令玻璃板300移動之移動裝置。移 動裝置1 3如自基座11之側面11 d跨至包圍用構件丨2之側面 12A般設置於移送部1之縱向。移動裝置13如圖3所示，具 備箱13A、驅動裝置13B、台板13C、馬達13D、支標部 1 3E、陽螺紋部1 3F以及陰螺紋部i 3 G。箱1 3 A在内部具備驅 動裝置13B、台板13C、馬達13D、支撐部13E、陽螺紋部 1 3F以及陰螺紋部1 3G。又，在漂浮搬運系統保持密閉狀態 之情況，箱1 3A保持搬運空間密閉狀態。 " 驅動裝置13B固定於箱13A之底部。驅動裝置ΐ3β之轴 13Β1固定於台板13C。而，陰螺紋部13G移至陽螺紋部13F 之端部時，驅動裝置13B將軸13B1朝箭號321之方向升高。Page 11 (418A26-_ 1 V. Description of the invention (9) Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. Embodiment 1 Next, the embodiment 1 of the present invention will be described. FIG. 1 shows a transfer unit of Embodiment 1. A perspective view. Fig. 2 is a cross-sectional view showing the I-I cross-section of Fig. 1. Fig. 3 is a cross-sectional view showing the π-Π cross-section of Fig. 2. ^ In Example 1, the use of the transfer unit 1 shown in Fig. 1 is used instead. 22 A plurality of transfer units in the floating transfer system shown in FIG. 2. The transfer unit 1 is a floating transfer device that is connected to a plurality of transfer units 100 shown in FIG. 22. The transfer unit 1 includes a base 11. , Enclosing member 2 and moving device 13. As shown in FIG. 2, the base u has the ejection hole 113 on the conveying surface iiA as shown in FIG. 24-the same ejection hole 11B as the lower side of the conveying surface ha The gas chamber 11 c is the same as the gas chamber Π 4 in FIG. 24. In the first embodiment, no corresponding to the ejection hole 115 and the gas chamber 116 in FIG. 25 is provided. The moving device 13 is used to make the glass plate 300 mobile device for moving. The mobile device 1 3 is from the side 11 d of the base 11 to the side 12A of the surrounding member 2 It is provided in the longitudinal direction of the transfer unit 1. As shown in Fig. 3, the moving device 13 includes a box 13A, a driving device 13B, a platen 13C, a motor 13D, a support portion 1 3E, a male screw portion 1 3F, and a female screw portion i 3 G. The box 1 3 A includes a driving device 13B, a platen 13C, a motor 13D, a support portion 13E, a male screw portion 13F, and a female screw portion 13G. The box 1 3A is also kept in a closed state when the floating transport system is kept closed. Keep the transportation space closed. &Quot; The drive unit 13B is fixed to the bottom of the box 13A. The shaft 13B1 of the drive unit β3β is fixed to the platen 13C. When the female screw portion 13G moves to the end of the male screw portion 13F, the drive device 13B Raise shaft 13B1 in the direction of arrow 321.
第12頁 (4^8426 五、發明說明（10) -------- 在馬達13D和支撐部13E之間安裝係棒狀之陽螺紋 ，螺紋部13F。藉著馬達13D之旋轉轉動陽螺紋部13f , 著該轉動，陰螺紋部1 3G朝陽螺紋部1 3F之縱向即箭號 310(玻璃板300之移動方向）之方向或其反向移動。 陰螺紋部1 3G係和陽螺紋部丨3F嚙合之陰螺紋部。在陰 螺紋部13G固定用以移動玻璃板3〇〇之移動部13H。移動部= 13H之棒形支柱13H1之一端如圖4所示，固定於陰螺紋部 13G，另一端自移動窗12人1向搬運空間突出。移動窗19八丄 係沿著設置移動裝置13之侧之側面12A鑽之細長形窗f在 支柱13H1之另一端固定用以夾住玻璃板3〇〇之夾入部 13H2。表面由彈性物質覆蓋之棒形物之兩端部彎曲成匕字 形，產生夾入部13H2。因而，夾入部13H2夹玻璃板3〇〇 時，玻璃板300撞到夾入部13H2，也可防止玻璃板3〇〇 損。 以上係實施例1之移送部丨之構造。其次說明實施例立 之動作。 移送部1為了揍收玻璃板3〇〇，移動裝置13之驅動裝置 13B將台板13C朝箭號321之方向向上推。又，馬達13])轉動 陽螺紋部13F，陰螺紋部13G朝和箭號31〇之方向相反之方 向移動，即移至馬達1 3D侧。 在陰螺紋部1 3G到達馬達1 3D側之狀態時，將玻璃板 300搬至移送部1後，驅動裝置13b將台板13C降低。因而， 夾入部13H2向下移動，夾入破璃板3〇〇。然後，馬達13))轉 動’陰螺紋部13G朝箭號310之方向移動。因而，夾入部Page 12 (4 ^ 8426 V. Description of the invention (10) -------- Install a rod-shaped male thread between the motor 13D and the support portion 13E, and the thread portion 13F. Rotate by the rotation of the motor 13D With the rotation of the male screw portion 13f, the female screw portion 13G moves in the direction of the arrow 310 (moving direction of the glass plate 300) or the reverse direction of the longitudinal direction of the male screw portion 1 3F. The female screw portion 1 3G is a male screw丨 3F meshed female threaded part. The female threaded part 13G is fixed to the moving part 13H for moving the glass plate 300. One end of the rod-shaped pillar 13H1 of the moving part = 13H is fixed to the female threaded part as shown in FIG. 4. 13G, the other end protrudes from the moving window 12 people 1 to the carrying space. The moving window 19 is a slender window f drilled along the side 12A of the side on which the moving device 13 is installed. The clamping portion 13H2 of the plate 300. The two ends of the rod-shaped object covered by the elastic material are bent into a dagger shape to generate the clamping portion 13H2. Therefore, when the clamping portion 13H2 sandwiches the glass plate 300, the glass plate 300 hits The clamping portion 13H2 can also prevent 300-degree damage to the glass plate. The above is the structure of the transfer unit in Example 1. Next, the operation of the embodiment will be explained. In order to collect the glass plate 300, the transfer unit 1 pushes the platen 13C upward in the direction of the arrow 321 to drive the platen 13C. The motor 13]) rotates the sun. The threaded portion 13F and the female threaded portion 13G move in a direction opposite to the direction of the arrow 31 °, that is, to the motor 1 3D side. When the female screw portion 13G reaches the 3D side of the motor 1, after the glass plate 300 is moved to the transfer portion 1, the driving device 13b lowers the platen 13C. Therefore, the pinching portion 13H2 moves downward to pinch the glass breaker 300. Then, the motor 13)) rotates and the female screw portion 13G moves in the direction of arrow 310. Therefore, the clamping portion
第13胃 ί Α18426 五、發明說明（10 13Η2 —樣的.朝箭號310之方向移動，以玻璃板30 0浮起之狀 態移動。 玻璃板300到達支摟部13Ε側時，驅動裝置13Β將台板 1 3C向上推。此時，玻璃板300處於浮起之狀態，因在玻璃 板3 0 0和搬運面11 C之間無摩擦，玻璃板3 0 0利用慣性移至 下一移送部1或控制單元。 照這樣，若利用實施例1，玻璃板3 0 0係重的，也因移 動裝置13令玻璃板300機械式移動，玻璃板300可高速移 動。 又，因玻璃板3 00之移動速度由馬達13D之轉速決定， 移動速度之控制容易。 實施例2 其次說明本發明之實施例2。圖5係表示實施例2之移 送部之立體圖。圖6係表示圖5之m-m剖面之剖面圖。圖7 係表示圖5之IV - IV剖面之剖面圖。 在實施例2，使用圖5所示之移送部2替代圖2 2所示之 漂浮搬運系統中之多台移送單元1 〇 0。移送部2係漂浮搬運 裝置，成連結了圖22所示多台移送單元100之形狀。移送 部2具備基座21、包圍用構件22以及移動裝置23。基座21 如圖6所示，在搬運面21A具有和圖24所示喷出孔113 一樣 之喷出孔21B及一樣地在搬運面21A之下側具有和圖24之氣 體室114 一樣之氣體室2 1 C。又，在實施例2，未設置和圖 25之噴出孔115及氣體室116對應的。 移動裝置23係用以令玻璃板30 0移動之移動裝置。移13th stomach Α18426 V. Description of the invention (10 13Η2—like. Move in the direction of arrow 310 and move in a state where the glass plate 300 floats. When the glass plate 300 reaches the side of the support 13E, the driving device 13B will The platen 1 3C is pushed upward. At this time, the glass plate 300 is in a floating state. Since there is no friction between the glass plate 300 and the conveying surface 11 C, the glass plate 300 moves to the next transfer unit 1 by inertia. In this way, if the glass plate 300 is heavy according to the embodiment 1, the glass plate 300 can be moved mechanically by the moving device 13 and the glass plate 300 can be moved at a high speed. The moving speed is determined by the rotation speed of the motor 13D, and the control of the moving speed is easy. Embodiment 2 Next, Embodiment 2 of the present invention will be described. FIG. 5 is a perspective view showing a transfer portion of Embodiment 2. FIG. Sectional view. Fig. 7 is a cross-sectional view showing the IV-IV section of Fig. 5. In Example 2, the transfer unit 2 shown in Fig. 5 is used instead of the plurality of transfer units 1 in the floating transfer system shown in Fig. 2 〇 0. The transfer unit 2 is a floating conveying device, which is connected to many as shown in FIG. 22 The shape of the stage transfer unit 100. The transfer unit 2 includes a base 21, a surrounding member 22, and a moving device 23. As shown in FIG. 6, the base 21 has the same spray on the conveying surface 21A as the ejection hole 113 shown in FIG. The outlet hole 21B has the same gas chamber 2 1 C as the gas chamber 114 of FIG. 24 below the conveying surface 21A. In the second embodiment, the nozzle hole 115 and the gas chamber 116 of FIG. 25 are not provided. The mobile device 23 is a mobile device for moving the glass plate 300.
第14頁 f 41842^ 五、發明說明（12) 動裝置23具備驅動裝置23A及導輥23B、23c。用彈性物質 覆蓋導輥23B、23C之表面。因而’破璃板3〇〇撞到導輥Page 14 f 41842 ^ V. Description of the invention (12) The moving device 23 includes a driving device 23A and guide rollers 23B and 23c. The surfaces of the guide rollers 23B, 23C are covered with an elastic substance. So ‘broken plate 300 hits the guide roller
23B、23C ’也可防止玻璃板300破損。導輥mb和導輕23C 之間隔bl設成和玻璃板300之寬度—樣或稍窄。因而，導 ϊ輕23B和導親23C各自和玻璃板3 Q 〇之側面確實接觸。 導輥23B之一端和驅動裝置23A連接，另一端通過貫穿孔 21D後向搬運空間突出。貫穿孔21D係自驅動裝置23A至搬 運面21A為止鑽在搬運面21A之兩側之孔，如圖7所示。 而’貫穿孔21D之個數和導輥23B、23C的一樣。導^/⑽之 突出部分之長度b2設成比玻璃板3 0 〇之厚度和破璃=3〇〇之 浮起距離之和長。 同樣的，導輥23C之一端和驅動裝置23A連接，另一端 通過貫穿孔21D後向搬運空間突出。導輥23c# s I 另 端突 出部分之長度係和導輥23B —樣之長度b2。 這種導輥23B和導輥23C碰到玻璃板3〇〇之兩命 住玻璃板300。 、ϊ 驅動裝置23A驅動導輥23B、23C轉動。即，驅動裝置 23A朝反時鐘方向轉動導輥2 3B，同時朝時鐘方向轉動導親 23C。又，在漂浮搬運系統保持密閉狀態之情況，驅動裝 置2 3 A塞住各貫穿孔21D，保持搬運空間密閉狀熊。~ 以上係實施例2之移送部2之構造’其次說日^實施例2 之動作。 移送部2之驅動裝置23A如圖8所示，令導報23B朝反時 鐘方向轉動，令導輥2 3C朝時鐘方向轉動。此外，在圖8 了23B, 23C 'can also prevent the glass plate 300 from being damaged. The interval b1 between the guide roller mb and the guide light 23C is set to be the same as or slightly narrower than the width of the glass plate 300. Therefore, each of the guide light 23B and the guide 23C is surely in contact with the side surface of the glass plate 3 Q 〇. One end of the guide roller 23B is connected to the driving device 23A, and the other end protrudes into the conveyance space through the through hole 21D. The through hole 21D is a hole drilled on both sides of the carrying surface 21A from the driving device 23A to the carrying surface 21A, as shown in FIG. 7. The number of the through holes 21D is the same as that of the guide rollers 23B and 23C. The length b2 of the protruding portion of the guide ^ / ⑽ is set to be longer than the sum of the thickness of the glass plate 300 and the floating distance of the broken glass = 300. Similarly, one end of the guide roller 23C is connected to the driving device 23A, and the other end protrudes into the conveyance space through the through hole 21D. The length of the protruding portion of the guide roller 23c # s I is the same length as the guide roller 23B. This guide roller 23B and guide roller 23C hit the glass plate 300 and kill the glass plate 300. The ϊ drive device 23A drives the guide rollers 23B and 23C to rotate. That is, the driving device 23A rotates the guide roller 23B in the counterclockwise direction, and simultaneously rotates the guide roller 23C in the clockwise direction. When the floating transportation system is kept closed, the driving device 2 3 A plugs each of the through holes 21D to keep the transportation space closed. ~ The above is the structure of the transfer unit 2 of the second embodiment '. Next, the operation of the second embodiment will be described. As shown in Fig. 8, the driving device 23A of the transfer unit 2 causes the guide 23B to rotate in the counterclockwise direction, and causes the guide roller 23c to rotate in the clockwise direction. In addition, in Figure 8
f 418426 五、發明說明（13) 省略噴出孔21B之圖示。在導輥23C轉動時’玻璃板3〇()進 入移送部2後，導輥23B、23C碰到玻璃板30〇之兩側。此 時，因導輥23B、23C自轉動，玻璃板3〇〇朝箭號31〇所示方 向移動下去。 照這樣，若利用實施例2，玻璃板3 〇 〇係重的，也因務 動裝置23令玻璃板300機械式移動，玻璃板3〇〇可高速移 動。 又，因玻璃板300之移動速度由導輥23B、23C之轉速 決定’利用驅動裝置2 3 A容易控制移動速度。 實施例3 其次說明本發明之實施例3。圖9係表示實施例3之移 送部之立體圖。圖1 〇係表示圖9之v - V剖面之剖面圖。圖 11係表示圖9之VI-VI面之剖面圖。 在實施例3 ’使用圊9所示之移送部3替代圖2 2所示之 漂浮搬運系統中之多台移送單元丨〇 〇。移送部3係漂浮搬運 裝置，成連結了圖23所示多台移送單元1〇〇之形狀。移送 部3具備基座31、包圍用構件32以及移動裝置33。基座31 如圖10所示，在搬運面31 A具有和圖24所示喷出孔113 —樣 之喷出孔31B及一樣地在搬運面31A之下側具有和圖24之氣 體室Π4—樣之氣體室31C。又，在實施例3，未設置和圖 25之噴出孔1 15及氣體室116對應的。 移動裝置33係用以令玻璃板3 0 0移動之移動裝置。移 動裝置33具備驅動裝置33A及侧皮帶33B、33C。侧皮帶 33B、33C係用以令玻璃板3 0 0移動之轉動體^側皮帶33B和 f 418426 五、發明說明（14) 側皮帶33C在搬運面31A沿著縱向如在搬運面31A之兩側相 向般設置於搬運面31A。 側皮帶33B具有軸部分33B1和皮帶部分33B2。軸部分 33B1如圖11所示，使用2個一组。2個軸部分33B1彼此以固 定間隔經由基座31設於驅動裝置33A。即，軸部分33B1之 一端和驅動裝置33A連接’另一端經由貫穿孔31D向搬運空 間突出。貫穿孔31D係自驅動裝置33A至搬運面31A為止鑽 在搬運面31A之兩侧之孔。而，貫穿孔3丨d之個數和軸部分 33B1的一樣。軸部分33B1之突出部分之長度ci設成比破璃 板300之厚度和玻璃板goo之浮起距離之和長。 皮帶部分33B2用自由彎曲之彈性材料例如矽橡膠製 造。因而’侧皮帶33B、33C撞到玻璃板300，也可防止玻 璃板300破損。皮帶部分33B2架設於一方轴 另-方之軸部分_之間。而且，設置複數^33Β1和 具備轴部分33C1和皮帶部分33C2之側皮帶33c和侧皮 帶33B —樣設置於驅動裝置33A ^此時，皮帶部分”以和 帶部分33B2之間隔C2設成和玻璃板3〇〇之寬度一樣或稍 窄。因而，在皮帶部分33C2和皮帶部分33B2之間可痛音+ 住玻璃板300。 ^ T爽 驅動裝置33A驅動軸部分33B1、33C1轉動。即，驅叙 裝置33A朝反時鐘方向轉動各軸部分33B1，同時 向轉動各軸部分33C1。 里万 其次說明實施例3 以上係實施例3之移送部3之構造 之動作。f 418426 V. Description of the invention (13) The illustration of the ejection hole 21B is omitted. When the guide roller 23C rotates, the 'glass plate 30 () enters the transfer unit 2, and the guide rollers 23B, 23C hit both sides of the glass plate 30o. At this time, as the guide rollers 23B and 23C rotate automatically, the glass plate 300 moves in the direction shown by arrow 31. In this way, if the glass plate 300 is heavy in Example 2, the glass plate 300 is mechanically moved by the work device 23, and the glass plate 300 can be moved at high speed. In addition, since the moving speed of the glass plate 300 is determined by the rotation speeds of the guide rollers 23B and 23C ', it is easy to control the moving speed by the driving device 2 3A. Embodiment 3 Next, Embodiment 3 of the present invention will be described. Fig. 9 is a perspective view showing a transfer unit of the third embodiment. FIG. 10 is a cross-sectional view showing a v-V cross-section of FIG. 9. Fig. 11 is a sectional view showing a VI-VI plane of Fig. 9. In Embodiment 3 ', a plurality of transfer units in the floating transfer system shown in Fig. 22 are replaced by a transfer unit 3 shown in Fig. 9 and replaced with a transfer unit 3 shown in Fig. 22. The transfer unit 3 is a floating transfer device and has a shape in which a plurality of transfer units 100 shown in Fig. 23 are connected. The transfer unit 3 includes a base 31, a surrounding member 32, and a moving device 33. As shown in FIG. 10, the base 31 has the ejection hole 113 on the conveying surface 31A as shown in FIG. 24—the same as the ejection hole 31B on the conveying surface 31A and the gas chamber Π4—as shown in FIG. 24 below the conveying surface 31A. Like the gas chamber 31C. In the third embodiment, the nozzle holes 115 and the gas chamber 116 shown in Fig. 25 are not provided. The mobile device 33 is a mobile device for moving the glass plate 300. The moving device 33 includes a driving device 33A and side belts 33B and 33C. The side belts 33B and 33C are rotating bodies used to move the glass plate 3 0. ^ Side belts 33B and f 418426 V. Description of the invention (14) The side belt 33C is along the longitudinal direction of the carrying surface 31A, such as on both sides of the carrying surface 31A. They are arranged on the conveying surface 31A in the opposite direction. The side belt 33B has a shaft portion 33B1 and a belt portion 33B2. As shown in FIG. 11, the shaft portion 33B1 is used in groups of two. The two shaft portions 33B1 are provided to the driving device 33A via the base 31 at fixed intervals. That is, one end of the shaft portion 33B1 is connected to the driving device 33A 'and the other end protrudes into the conveyance space through the through hole 31D. The through hole 31D is a hole drilled on both sides of the conveying surface 31A from the drive device 33A to the conveying surface 31A. The number of the through holes 3d is the same as that of the shaft portion 33B1. The length ci of the protruding portion of the shaft portion 33B1 is set to be longer than the sum of the thickness of the broken glass plate 300 and the floating distance of the glass plate goo. The belt portion 33B2 is made of a free-bending elastic material such as silicone rubber. Therefore, the 'side belts 33B, 33C hit the glass plate 300, and the glass plate 300 can be prevented from being damaged. The belt portion 33B2 is erected between one shaft and the other shaft portion. Furthermore, a plurality of ^ 33B1 and a side belt 33c and a side belt 33B provided with a shaft portion 33C1 and a belt portion 33C2 are provided in the same manner as the driving device 33A. At this time, the belt portion "is spaced from the belt portion 33B2 and is set to a glass plate The width of 300 is the same or slightly narrower. Therefore, there can be a painful sound between the belt portion 33C2 and the belt portion 33B + the glass plate 300. ^ T cool drive device 33A drives the shaft portions 33B1 and 33C1 to rotate. That is, the drive device 33A rotates each shaft portion 33B1 in the counterclockwise direction, and rotates each shaft portion 33C1 at the same time. Next, the operation of the structure of the transfer unit 3 of the third embodiment described above will be described.
第17頁 f 418426 五、發明說明（15) 移送部3之驅動裝置33A如圖12所示，各軸部分33B1朝 反時鐘方向轉動’同時各軸部分33C1朝時鐘方向轉動。此 外’在圖12 ’省略噴出孔31B之圖示。藉著各軸部分33C1 朝時鐘方向轉動’皮帶部分33B2、33C2朝箭號310所示方 向轉動。在此狀態時，玻璃板3〇〇進入移送部3後，皮帶部 分3 3B2、33C2碰到玻璃板3〇〇之兩側面。此時，因皮帶部 分3 3B2、33C2各自轉動，玻璃板30 0朝箭號310所示方向移 動下去。 照這樣，若利用實施例3，玻璃板3 0 0係重的，也因移 動裝置33令玻璃板300機械式移動，玻璃板3〇〇可高速移 動0 又’因玻璃板3 00之移動速度由皮帶部分3362、33(：2 之轉速決定’利用驅動裝置33A容易控制移動速度。 實施例4 其认s兒明本發明之實施例4。圖1 3係表示實施例4之控 制單元之立體圖。圖1 4係表示圖1 3之VH - W剖面之剖面 圖。 在實施例4 ’在圖2 2所示之漂浮搬運系統中，使用圖 13所示控制單元4替代控制單元200。控制單元4如圖14所 示，具備基座41、包圍用構件42、作為第1控制裝置之定 位銷部43A〜43D以及作為第2控制裝置之驅動銷部 44A-44C 。 在基座41之搬運面41A之中心設置和圖28所示之吸引 孔213 —樣之吸引孔41B。在吸引孔41B之周圍只設置和圖Page 17 f 418426 V. Description of the invention (15) As shown in Fig. 12, the drive unit 33A of the transfer section 3 rotates each shaft portion 33B1 in the counterclockwise direction 'while each shaft portion 33C1 rotates in the clock direction. In addition, the illustration of the ejection holes 31B is omitted in Fig. 12 '. By rotating each shaft portion 33C1 in the clock direction ', the belt portions 33B2 and 33C2 are rotated in the direction shown by arrow 310. In this state, after the glass plate 300 enters the transfer portion 3, the belt portion 3 3B2, 33C2 hits both sides of the glass plate 300. At this time, as the belt portions 3 3B2 and 33C2 are each rotated, the glass plate 300 moves in the direction shown by arrow 310. In this way, if the glass plate 300 is heavy in Example 3, the glass plate 300 is mechanically moved by the moving device 33, and the glass plate 300 can move at a high speed. The speed of the belt portion 3362, 33 (: 2 is determined by 'the driving device 33A is used to easily control the moving speed. Embodiment 4] The fourth embodiment of the present invention will be described. Fig. 13 is a perspective view showing a control unit of the fourth embodiment. Fig. 14 is a cross-sectional view showing the VH-W section of Fig. 13. In Example 4 ', in the floating handling system shown in Fig. 22, the control unit 4 shown in Fig. 13 is used instead of the control unit 200. The control unit As shown in FIG. 14, the base 41 includes a base 41, a surrounding member 42, positioning pin portions 43A to 43D as the first control device, and drive pin portions 44A- 44C as the second control device. On the carrying surface of the base 41 The center of 41A is provided with the same suction hole 213 as shown in FIG. 28-the same type of suction hole 41B. Only the drawing and the drawing are provided around the suction hole 41B.
第18頁 f 418426P. 18 f 418426
五、發明說明（16) 28所示之喷出孔214、217、218—樣之噴出孔41C、41D 41E ° 定位銷部4 3A〜431)在搬運面41A設置成位於靜止之破璃 板3 0 0之各侧面《定位銷部4 3 A如圖1 5所示，設置於在基座 41所設置之設置孔41F。定位銷部43A〜43D具備本體43A1和 作棒狀物之銷43A2。本體43A1利用氣壓或油壓自搬運面 41A將銷43A2推出。此時，本體43A1推出銷43A2之長度dl 設為比玻璃板300之厚度和玻璃板300之浮起距離之和長。 用彈性材料覆蓋銷4 3 A 2之表面。因而，玻璃板3 0 0撞到鎖 4 3 A 2，也可防止玻璃板3 0 〇破損》 因定位銷部4 3 B〜4 3 D和定位銷部4 3 A相同，省略定位銷 部43B〜43D之說明。 利用這些定位鎖部43A〜43D停止移來之玻璃板3〇〇之動 作，又停止轉動中之玻璃板300之動作，可進行玻璃板3〇〇 之定位。 驅動銷部44A-44C在搬運面41A之3處設置成和控制單 元4之開口41G〜411相向’而且包圍靜止之玻璃板3〇〇。驅 動銷部44A如圖16所示，設置於在基座41所設置之設置孔 41J。定位驅動銷部44A具備本體44A1和收藏部44A2。本體 4 4 A1利用氣壓或油壓自搬運面41A將收藏部4 4 A 2推出。此 ' 時，本體43A1推出收藏部44A2之長度ei設為比玻璃板3〇〇 之厚度和玻璃板3 0 0之浮起距離之和長。 在搬運面41A上所推出之收藏部44A2在内部具備相對 於搬運面41A平行伸縮之桿44A3。桿44A3之設置位置設成V. Description of the invention (16) The ejection holes 214, 217, and 218 shown in (28) —sample ejection holes 41C, 41D, 41E ° positioning pin section 4 3A ~ 431) are provided on the conveying surface 41A so as to be located on the stationary broken glass plate 3 As shown in FIG. 15, the positioning pins 4 3 A on each side of 0 0 are provided in the setting holes 41F provided in the base 41. The positioning pin portions 43A to 43D include a main body 43A1 and a pin 43A2 serving as a rod. The main body 43A1 pushes out the pin 43A2 from the carrying surface 41A by using air pressure or oil pressure. At this time, the length dl of the main body 43A1 pushing pin 43A2 is set to be longer than the sum of the thickness of the glass plate 300 and the floating distance of the glass plate 300. Cover the surface of the pins 4 3 A 2 with an elastic material. Therefore, if the glass plate 300 hits the lock 4 3 A 2, the glass plate 300 can be prevented from being damaged. Since the positioning pin portions 4 3 B to 4 3 D are the same as the positioning pin portion 4 3 A, the positioning pin portion 43B is omitted. ~ 43D description. The positioning lock portions 43A to 43D stop the movement of the moved glass plate 300, and stop the movement of the glass plate 300 in rotation, thereby positioning the glass plate 300. The drive pin portions 44A-44C are provided at three positions of the conveying surface 41A so as to face the openings 41G to 411 of the control unit 4 'and surround the stationary glass plate 300. As shown in FIG. 16, the driving pin portion 44A is provided in an installation hole 41J provided in the base 41. The positioning driving pin portion 44A includes a main body 44A1 and a storage portion 44A2. The main body 4 4 A1 pushes out the storage section 4 4 A 2 from the carrying surface 41A using air pressure or oil pressure. At this time, the length ei of the main body 43A1 pushing out the storing portion 44A2 is set to be longer than the sum of the thickness of the glass plate 300 and the floating distance of the glass plate 300. The storing portion 44A2 pushed out on the carrying surface 41A is provided with a rod 44A3 which is retractable in parallel with the carrying surface 41A inside. The setting position of the lever 44A3 is set to
ί( 4184 26ί (4184 26
五、發明說明（17) 比玻璃板300之浮起距離長， 璃板3 0 0之浮起距離之和短。 將桿44Α3向開口 41G伸長。因 板300。因桿44Α3之前端利用 端撞到玻璃板3 0 0，也可防止 3 0 0浮起，桿4 4 A 3之力小，驅 向開口 41 G移動。 而且比玻璃板3 00之厚度和玻 收藏部44A2利用氣壓或油壓 而’桿4 4A3之前端接觸玻璃 彈性材料製造，桿44A3之前 玻璃板300破損。因玻璃板 動銷部44A也可令玻璃板3〇〇 因驅動銷部44B、44C和驅動銷部44A 一樣，省略驅動 銷部44B、44C之說明。5. Description of the invention (17) The floating distance is longer than the glass plate 300, and the sum of the floating distance of the glass plate 300 is shorter. The rod 44A3 is extended toward the opening 41G. Because of board 300. Because the front end of the rod 44Α3 hits the glass plate 300 with the end, the 300 can also be prevented from floating, and the force of the rod 4 4 A 3 is small, and it moves toward the opening 41 G. Further, the thickness of the glass plate 300 and the glass holding portion 44A2 are made of air or oil pressure, and the front end of the 'rod 4 4A3 contacts the glass elastic material, and the glass plate 300 before the rod 44A3 is damaged. The glass plate moving pin portion 44A can also make the glass plate 300. The driving pin portions 44B and 44C are the same as the driving pin portion 44A, and the description of the driving pin portions 44B and 44C is omitted.
以上係實施例4之控制單元4之構造，其次說明實施例 4之動作。 在控制單元4，為了避免銷43A2〜43D2或收藏部 44A2〜44C2成為序起之破璃板3〇〇之不必要之障礙，定位銷 部43A~43D將銷43A2〜43D2降至和搬運面41A相同之位置為 止’同樣的’驅動銷部44A~44C將收藏部44A2〜44C2降至和 搬運面41A相同之位置為止。在此狀態時，例如玻璃板3〇〇 自開口41 I進入控制單元4時，將定位銷部43A之銷43A2向 搬運面41A上推出。The above is the configuration of the control unit 4 of the fourth embodiment, and the operation of the fourth embodiment will be described next. In the control unit 4, in order to avoid that the pins 43A2 to 43D2 or the storage sections 44A2 to 44C2 become unnecessary obstacles to the sequential glass plate 300, the positioning pin sections 43A to 43D lower the pins 43A2 to 43D2 to the carrying surface 41A. Until the same position, the 'same' drive pin portions 44A to 44C lower the storage portions 44A2 to 44C2 to the same position as the conveyance surface 41A. In this state, for example, when the glass plate 300 enters the control unit 4 through the opening 41I, the pin 43A2 of the positioning pin portion 43A is pushed out onto the conveying surface 41A.
因而，通過開口411之玻璃板3 00碰到銷43A2而停止。 然後，玻璃板3 0 0保持靜止之狀態。 在轉動靜止之狀態之玻璃板3 0 〇之情況，例如朝時鐘 方向轉動玻璃板300之情況，將定位用銷43A2〜43D2降至和 搬運面41A相同之位置為止後，驅動銷部44A將收藏部44A2 向搬運面41A上推出。然後，驅動銷部44A將桿44A3向破璃Therefore, the glass plate 300 passing through the opening 411 hits the pin 43A2 and stops. Then, the glass plate 300 remains stationary. In the case of rotating the stationary glass plate 300, for example, when the glass plate 300 is rotated in the clock direction, the positioning pins 43A2 to 43D2 are lowered to the same position as the carrying surface 41A, and the driving pin portion 44A stores the The part 44A2 is pushed out on the carrying surface 41A. Then, the driving pin portion 44A moves the lever 44A3 toward the glass.
ί 418426 I 、 五、發明說明（18) 板300推出。結果’桿44A3之力作用於玻璃板300之侧面之 端部，玻璃板300就朝時鐘方向轉動。 轉動中之玻璃板3 00利用定位銷部43A~43D靜止。 在送出靜止中之玻璃板3 〇 〇之情況，例如，使玻璃板 300移向開口41G之情況’定位銷部43A、43C令銷43A2、 43C2移向搬運面41A之下側。然後，驅動銷部44A伸長桿 4 4 A3時，朝時鐘方向轉動之力作用於玻璃板3 〇〇。此時， 因玻璃板3 0 0利用定位銷部4 3 B、4 3 D定位，玻璃板3 〇 〇朝開 口 4 1 G動起來。 照這樣，若利用實施例4，玻璃板300係重的，也因利 用定位銷部43A〜43D機械式的進行玻璃板30〇之停止或定 位’可使得玻璃板3 0 0之停止或定位確實。又，利用驅動 銷部44A、44B、44C之小力可將重的玻璃板300朝開口 41G、41H、411側迅速的動作。結果，可迅速且確實的進 行重的玻璃板300之停止、靜止、方向轉換以及送出。 實施例5 其次說明本發明之實施例5。圖1 7係表示實施例5之控 制單元之立體圖。圖1 8係表示圖ί 7之Μ- w剖面之剖面 圖。 在實施例5，在圖2 2所示之漂浮搬運系統中，使用圖 17所示控制單元5替代控制單元20〇。控制單元5如圖18所 示，具備基座51、包圍用構件52、作為第ί控制裝置之定 位銷部53A〜53D以及作為第2控制裝置之旋轉部54。 在基座51之搬運面51A之中心設置和圖28所示之吸引 111 11 _ I mill 11 HH 1 I ill 第21頁 丨418426 五、發明說明（19) ''^ 孔2 1 3 —樣之吸引孔51Β。在吸引孔51Β之周圍只設置和圖 χ 28所示之喷出孔214、217、218—樣之喷出孔51C、51D、 51E。又，在搬運面51A設置和圖14之定位銷部43A〜43D — 樣之定位銷部53A〜53D。 旋轉部54如圖19所示，設置於包圍用構件52之頂部 52A。旋轉部54具備本體54A和旋轉體54B。 旋轉體54B如圖20所示，在一端和本體54A連接之棒狀 之旋轉軸54B1之另一端具備端部彎曲成L字形之L治具 54B卜54B4 °L治具54B卜54B4之表面用彈性物質覆蓋。因 而，L治具54B卜54B4碰到玻璃板3.00，也可防止玻璃板3〇Q 破損。L治具5 4 B 2和L治具5 4 B 3之間隔Π比玻璃板3 〇 0之横 寬稍寬，L治具54B4和]L治具54B5之間隔f 2比玻璃板3 0 0之 縱寬稍寬。因而，旋轉體5 4B可確實捕捉玻璃板3〇〇。 在這種形狀之旋轉體54B，本體54A令旋轉軸54B1朝相 對於頂部52A直角之方向’即朝圖20所示箭號331所示之方 向及其反方向移動。又，本體54A如圖21所示，令旋轉軸 54B1朝箭號333所示移動方向及其反方向、與箭號334所示 移動方向及其反方向轉動。 以上係實施例5之控制單元5之構造，其次說明實施例 5之動作。 ：.... 在控制單元5 ’定位銷部54A〜54D將銷54A2〜54D2降至 和搬運面51A相同之位置為止。在此狀態時，例如玻璃板 300自開口 511進入控制單元5時，將定位銷部53A之銷53A2 向搬運面51A上推出。ί 418426 I. V. Description of the invention (18) The board 300 was launched. As a result, the force of the lever 44A3 is applied to the end of the side surface of the glass plate 300, and the glass plate 300 rotates in the clock direction. The glass plate 3 00 in rotation is stopped by the positioning pin portions 43A to 43D. In the case where the stationary glass plate 300 is sent out, for example, when the glass plate 300 is moved to the opening 41G, the positioning pin portions 43A and 43C cause the pins 43A2 and 43C2 to move below the conveying surface 41A. Then, when the driving pin portion 44A extends the lever 4 4 A3, a force rotating in the clock direction acts on the glass plate 300. At this time, since the glass plate 300 is positioned by the positioning pin portions 4 3 B and 4 3 D, the glass plate 300 moves toward the opening 41 G. In this way, if the glass plate 300 is heavy in Example 4, the glass plate 300 is stopped or positioned mechanically by using the positioning pin portions 43A to 43D, so that the glass plate 300 can be stopped or positioned reliably. . In addition, a small force of the driving pin portions 44A, 44B, and 44C can quickly move the heavy glass plate 300 toward the openings 41G, 41H, and 411. As a result, it is possible to quickly and reliably stop, stop, change the direction, and send out the heavy glass plate 300. Embodiment 5 Next, Embodiment 5 of the present invention will be described. Fig. 17 is a perspective view showing a control unit of the fifth embodiment. Fig. 18 is a cross-sectional view showing the MW section of Fig. 7; In the fifth embodiment, in the floating conveyance system shown in Fig. 22, the control unit 5 shown in Fig. 17 is used instead of the control unit 20. As shown in FIG. 18, the control unit 5 includes a base 51, a surrounding member 52, positioning pin portions 53A to 53D as the first control device, and a rotating portion 54 as the second control device. Set at the center of the carrying surface 51A of the base 51 and the attraction 111 shown in Fig. 28 11 11 _ I mill 11 HH 1 I ill Page 21 丨 418426 V. Description of the invention (19) ^^ Hole 2 1 3-sample Suction hole 51B. Only the ejection holes 214, 217, and 218 shown in Fig. 28 are provided around the suction hole 51B-the same ejection holes 51C, 51D, and 51E. Moreover, positioning pins 53A to 53D similar to the positioning pin portions 43A to 43D of FIG. 14 are provided on the conveying surface 51A. As shown in FIG. 19, the rotating portion 54 is provided on the top portion 52A of the surrounding member 52. The rotating portion 54 includes a main body 54A and a rotating body 54B. As shown in FIG. 20, the rotating body 54B is provided with an L jig 54B, 54B4 ° L jig 54B, 54B4 at the other end of the rod-shaped rotating shaft 54B1 connected to the main body 54A at one end and bent in an L shape. Material coverage. Therefore, the L fixture 54B and 54B4 hit the glass plate 3.00, which can also prevent the glass plate 30Q from being damaged. The distance between the L jig 5 4 B 2 and the L jig 5 4 B 3 is slightly wider than the horizontal width of the glass plate 3 00, and the interval between the L jig 54B4 and the L jig 54B5 f 2 is greater than the glass plate 3 0 0 Its width is slightly wider. Therefore, the rotating body 54B can reliably capture the glass plate 300. In the rotating body 54B of this shape, the main body 54A moves the rotating shaft 54B1 in a direction at right angles to the top 52A ', i.e., in the direction shown by arrow 331 shown in Fig. 20 and the opposite direction thereof. Further, as shown in FIG. 21, the main body 54A rotates the rotation shaft 54B1 in the moving direction shown by arrow 333 and its reverse direction, and the moving direction shown by arrow 334 and its reverse direction. The above is the configuration of the control unit 5 of the fifth embodiment, and the operation of the fifth embodiment will be described next. : ... In the control unit 5 ', the positioning pin portions 54A to 54D lower the pins 54A2 to 54D2 to the same position as the conveying surface 51A. In this state, for example, when the glass plate 300 enters the control unit 5 through the opening 511, the pin 53A2 of the positioning pin portion 53A is pushed onto the carrying surface 51A.
第22頁 f 418426Page 22 f 418426
因而，通過開口511之玻璃板3 00碰到銷5342而停止。 然後，玻璃板3 0 0保持靜止之狀態。 在轉動靜止之狀態之玻璃板30 〇之情況，例如朝時鐘 方向轉動玻璃板300之情況，旋轉部54將旋轉體54B朝箭號 331之方向’即朝玻璃板3〇〇降低。結果，利用旋轉體54b 夾玻璃板300。然後，旋轉部54將旋轉體54B朝時鐘方向轉 動後’旋轉體54B朝和箭號331相反之方向上升。此時，因 玻璃板3 0 0浮起，利用慣性繼續朝時鐘方向轉動。 轉動中之玻璃板300利用定位銷部53A~53D靜iL。 在送出靜止中之玻璃板3〇〇之情況，例如，使玻璃板 300移向開口51 G之情況，旋轉部54將旋轉體54β降低，夾 玻璃板30 0。然後，定位銷部53A〜53D令銷53A2~53D2移向 搬運面51A之下側。夾住破璃板300時，旋轉部54將旋轉體 54B朝和箭號334反方向，即朝開口51G之方向動作，將旋 轉體54B上升。因玻璃板3〇〇浮起’利用慣性朝開口51G移 動。 照這樣，若利用實施例5，玻璃板3 〇 〇係重的，也因利 用定位銷部53A~53D機械式的進行玻璃板30〇之停止或定 位’可使得玻璃板3 0 〇之停止或定位確實。又，利用旋轉 部54之小移動所產生之小力可迅速送出重的破璃板3〇〇。 結果’可高速且確實的進行重的玻璃板3〇〇之停止、靜 止、方向轉換以及送出。 實施例6 其次說明本發明之實施例6。Therefore, the glass plate 300 passing through the opening 511 hits the pin 5342 and stops. Then, the glass plate 300 remains stationary. In the case of rotating the glass plate 30 in a stationary state, for example, when the glass plate 300 is rotated in the clock direction, the rotating portion 54 lowers the rotating body 54B in the direction of the arrow 331 ', that is, toward the glass plate 300. As a result, the glass plate 300 is sandwiched by the rotating body 54b. Then, after the rotating portion 54 rotates the rotating body 54B in the clock direction, the rotating body 54B rises in the direction opposite to the arrow 331. At this time, the glass plate 300 floats and continues to rotate in the clock direction by inertia. The glass plate 300 in rotation uses the positioning pin portions 53A to 53D to static iL. In the case where the stationary glass plate 300 is sent out, for example, when the glass plate 300 is moved toward the opening 51 G, the rotating portion 54 lowers the rotating body 54β and sandwiches the glass plate 300. Then, the positioning pin portions 53A to 53D move the pins 53A2 to 53D2 to the lower side of the conveying surface 51A. When the broken glass plate 300 is clamped, the rotating portion 54 moves the rotating body 54B in the direction opposite to the arrow 334, that is, toward the opening 51G, and raises the rotating body 54B. As the glass plate 300 floats', it moves toward the opening 51G by inertia. In this way, if the glass plate 300 is heavy in Example 5, the glass plate 300 may be stopped or positioned mechanically by using the positioning pin portions 53A to 53D, so that the glass plate 300 may be stopped or positioned. The positioning is correct. In addition, a small force generated by a small movement of the rotating portion 54 can quickly send out the heavy glass breaker 300. As a result, the heavy glass plate 300 can be stopped, stopped, reversed, and fed out at high speed and reliably. Embodiment 6 Next, Embodiment 6 of the present invention will be described.
(418426(418426
五、發明說明（21) 在實施例6 ’選擇實施例卜實施例3之移送部卜3之中 之一種和實施例4、5之控制單元4、5之中之一種用 至少一個所選擇種類之移送部及 之用 系統。 、1汉&制早兀，構成漂浮搬運 機赫ΐίϊ用氣體使玻璃板3〇0浮起，因以使用鎖或臂之 H高速且綠實的進行重的玻璃轉 貫施例7 其=說明本發明之實施例7。在實施例 达部之喷出孔和控制單元 、Ε例6 ’移 喷出氣體。可是，在Ϊ二，”孔朝相對於搬運面斜上方 2械式裝置進行玻璃板300之移動、停止、靜止方^之 搬運面垂直之方向噴出孔喷出氣體之方向設為相對於 在基座之搬運面兮§·甚、丄^ 广 搬運面垂直之方向種噴出孔時…要自相對於 短加工時間。白鑽孔即可’可使得鑽孔加工簡單而且： 實施例8 其久纟兒明本發明+破 控制單元之中心讲;；："施例8。在實施例4〜實施例7 ’在 7 , r. ,, ^ 叹置吸弓丨孔。可是，在實施例4〜實输/在 、耩μ ^«+二 機械式裝置進行玻璃板3 0 0之移動 置吸引孔之構造。換而在實施例8，採用在搬運面不毁 利用這種構造，可減少對於控制單S之搬運面之製V. Description of the invention (21) At least one selected type is used in the embodiment 6 'selecting the embodiment and one of the transfer unit 3 of the embodiment 3 and one of the control units 4 and 5 of the embodiments 4 and 5 Transfer department and system. , 1 Han & early manufacturing system, constitute a floating transporter He ΐ ϊ using glass to float the glass plate 300, because the use of locks or arms of H at high speed and green to carry out heavy glass transition Example 7 which = A seventh embodiment of the present invention will be described. The gas is ejected from the ejection hole and the control unit of the embodiment, Example 6 '. However, in the second, "the hole is perpendicular to the conveying surface, and the glass plate 300 is moved, stopped, and stopped. The conveying surface of the glass plate 300 is perpendicular to the conveying surface. The direction of the ejection gas is set relative to that in the base. The conveying surface of the seat § · Very, 丄 ^ When the wide conveying surface is vertical in the direction of the ejection hole ... It must be relative to a short processing time. White drilling can be used to make drilling processing simple and: Example 8 Its long time Er Ming, the center of the present invention + broken control unit ;: " Example 8. In Example 4 ~ Example 7 'at 7, r. ,, ^ sighing suction bow 丨 hole. However, in Example 4 ~ Actual input / in, 耩 μ ^ «+ Two mechanical devices are used to move the glass plate into the structure of the suction hole. Instead, in Example 8, this structure is used without damage on the conveying surface, which can reduce the System of handling surface of control sheet S
第24頁 I 418426 五、發明說明（22) 程。 以上說明了實施例1〜實施例8，但是本發明未限定為 這些實施例。例如，以氣流搬運TFT型液晶顯示器用之玻 璃板等為例’但是本發明未限定為玻璃板，可應用於搬運 各種板狀基體。 又’在移送部和控制單元所設置之喷出孔之排列方式 上’有各種方式，本發明也可應用於這些各種排列方式。 此外’也可只使用移送部構成直線搬運板狀基體之系 統。 發明之效果 如上述所示，若依據本發明，在漂浮搬運裝置設置推 浮起之板狀基體並令移動之移動裝置。又，設置令浮起之 板狀基體移動之移動裝置，在該移動裝置設置設置成碰到 該板狀基體之兩側面之複數輥和為了令該板狀基體移動而 驅動該各輥轉動之驅動裝置。此外，設置令浮起之板狀基 體移動之移動裝置，在該移動裝置設置設置成碰到該板狀 基體之兩侧面之至少一組之皮帶和為了令該板狀基體移動 而驅動該各皮帶之驅動裝置。因而，因板狀基體利用機械 式裝置移動’即使重的板狀基體也可令以高速移動。 若依據本發明，因將該喷出孔喷出氣體之方向設成相 對於该搬運面大致垂直，喷出孔之喷出方向相對於該搬運 面大致垂直。因而，因在搬運面鑽喷出孔之加工自垂直於 該搬運面之方向進行，可使得加工簡單。Page 24 I 418426 V. Description of Invention (22) Process. The first to eighth embodiments have been described above, but the present invention is not limited to these embodiments. For example, a glass plate for a TFT liquid crystal display is conveyed by air flow as an example ', but the present invention is not limited to a glass plate, and can be applied to convey various plate-shaped substrates. There are various ways of arranging the ejection holes provided in the transfer unit and the control unit, and the present invention can also be applied to these various arrangements. In addition, a system for linearly conveying a plate-like substrate using only a transfer portion may be used. EFFECT OF THE INVENTION As described above, according to the present invention, a floating device is provided with a mobile device that pushes a plate-like substrate and moves it. Further, a moving device for moving the floating plate-shaped substrate is provided, and a plurality of rollers arranged to touch both sides of the plate-shaped substrate and a drive for driving the rollers to rotate the plate-shaped substrate are provided in the moving device. Device. In addition, a moving device for moving the floating plate-shaped substrate is provided, and at least one set of belts arranged to touch both sides of the plate-shaped substrate is provided in the moving device, and the belts are driven to move the plate-shaped substrate. Of the drive. Therefore, since the plate-like substrate is moved by a mechanical device ', even a heavy plate-like substrate can be moved at a high speed. According to the present invention, since the direction of the gas ejected from the ejection hole is set to be substantially perpendicular to the conveying surface, the ejection direction of the ejection hole is substantially perpendicular to the conveying surface. Therefore, the processing of drilling the ejection holes in the conveying surface is performed from a direction perpendicular to the conveying surface, so that the processing can be simplified.
第25頁 i 418426 、發明說明（23) 右依據本發明，在漂浮搬運系統’在該移送部設置推 浮起之板狀基體並令移動之移動裝置。又，在移送部設置 令序起之板狀基體移動之移動裝置，在移動裝置設置設置 成碰到該板狀基體之兩側面之複數輥和為了令該板狀基體 移動而驅動該各親轉動之驅動裝置。此外，在移送部設置 7浮起之板狀基體移動之移動裝置，在移動裝置設置設置 成碰到該板狀基體之兩側面之至少一組之皮帶和為了令該 板狀基體移動而驅動該各皮帶之驅動裝置。因而，因板狀 基體利用機械式裝置移動，即使重的板狀基體也可令以高 速移動。 若依據本發明，因將該喷出孔喷出氣體之方向設成相 對於該搬運面大致垂直’喷出孔之喷出方向相對於該搬運 面大致垂直。因而，因在搬運面鑽喷出孔之加工自垂直於 該搬運面之方向進行，可使得加工簡單。 若依據本發明，在控制單元設置設於該控制單元之該 搬運面下而且為了移動或轉動之板狀基體之停止或定位將 至少一個棒狀物向搬運面上推出之第1控制裝置及利用該 第1控制裝置推靜止之板狀基體後進行板狀基體之轉動或 移動之第2控制裝置。又，在控制單元設置設於該控制單 元之該搬運面下而且為了移動或轉動之板狀基體之停止或 定位將至少一個棒狀物向該搬運面上推出之第1控制裝置 及利用該第1控制裝置夾靜止之板狀基體後進行該板狀基 體之轉動或移動之第2控制裝置。因而，因可令板狀基體 確實停止而且使用機械裝置將板狀基體停止，可令板狀基Page 25 i 418426, description of the invention (23) Right according to the present invention, a floating device is provided in the floating conveying system 'at the transfer unit to push a floating plate-like substrate and move the device. Further, a moving device for moving the plate-like substrate in sequence is provided in the transfer section, and a plurality of rollers provided to touch both sides of the plate-like substrate are provided in the moving device, and the pro-rotations are driven to move the plate-like substrate. Of the drive. In addition, a moving device for 7 floating plate-shaped substrates to move is provided in the transfer section, and at least one set of belts arranged to touch both sides of the plate-shaped substrate is provided to the moving device, and the plate-shaped substrate is driven to move Driving device for each belt. Therefore, since the plate-shaped substrate is moved by a mechanical device, even a heavy plate-shaped substrate can be moved at a high speed. According to the present invention, the direction of the gas ejected from the ejection hole is set to be substantially perpendicular to the conveyance surface. The ejection direction of the ejection hole is substantially perpendicular to the conveyance surface. Therefore, the processing of drilling the ejection holes in the conveying surface is performed from a direction perpendicular to the conveying surface, so that the processing can be simplified. According to the present invention, the first control device and the use of a control unit that is provided below the carrying surface of the control unit and pushes at least one rod toward the carrying surface for the purpose of stopping or positioning the moving or rotating plate-like substrate is provided. The first control device is a second control device that rotates or moves the plate-shaped substrate after pushing the stationary plate-shaped substrate. In addition, a first control device is provided under the control unit under the conveying surface of the control unit and pushes at least one rod-shaped object toward the conveying surface for stopping or positioning of the plate-like substrate that moves or rotates and uses the first control device. 1 Control device A second control device that rotates or moves the plate-like substrate after clamping the plate-like substrate that is stationary. Therefore, since the plate-like substrate can be reliably stopped and the plate-like substrate is stopped by using a mechanical device, the plate-like substrate can be made
第26頁Page 26
…若依據本發明’組合所選擇之移送部和控制單元而構 成系統。因而，因在系統内以機械式裝置進行板狀基體之 移動、停止、靜止及方向轉換，即使重的板狀基體5也可 令lij速的移動及方向轉換。 圖式簡單說明 圖1係表示實施例1之移送部之立體圖。 圖2係表示圖1之I — I剖面之剔面圖。 圖3係表示圖2之Π - Π剖面之刹面圖。 圖4係表示實施例1之移動部之剖面圖。 圖5係表示實施例2之移送部之立體圖。 圖6係表示圖5之Μ -皿剖面之剖面圖。 圖7係表示圖5之IV - IV剖面之剖面圖。 ‘V. 圖8係用以說明實施例2之動作之剖面圖。 圖9係表示實施例3之移送部之立體圖。 圖1 0係表示圖9之V - V剖面之劄面圖。 圖11係表示圖9之VI-VI面之剖面圖。 圖1 2係用以說明實施例3之動作之剖面圖... if the selected transfer unit and control unit are combined to form a system according to the present invention '. Therefore, since the plate-shaped substrate is moved, stopped, stopped, and changed in direction by a mechanical device in the system, even a heavy plate-shaped substrate 5 can move and change direction at a speed of lij. Brief Description of Drawings Fig. 1 is a perspective view showing a transfer unit of the first embodiment. FIG. 2 is a cut-away view showing the I-I section of FIG. 1. FIG. FIG. 3 is a sectional view showing a section taken along the line Π-Π in FIG. 2. FIG. Fig. 4 is a sectional view showing a moving portion of the first embodiment. Fig. 5 is a perspective view showing a transfer unit of the second embodiment. Fig. 6 is a cross-sectional view showing a cross section of the M-plate of Fig. 5. FIG. 7 is a cross-sectional view showing the IV-IV cross section of FIG. 5. FIG. 'V. Fig. 8 is a sectional view for explaining the operation of the second embodiment. Fig. 9 is a perspective view showing a transfer unit of the third embodiment. FIG. 10 is a block diagram showing the V-V section of FIG. 9. FIG. 11 is a cross-sectional view showing the VI-VI plane of FIG. 9. Fig. 12 is a sectional view for explaining the operation of the third embodiment
第27頁 'f 41 84 26 五、發明說明（25) 圖1 3係表示實施例4之控制單元之立體圖。 圖1 4係表示圖1 3之W- W剖面之剖面圖。 圖1 5係表示定位鎖部之剖面圖。 圖1 6係表示驅動銷部之剖面圖。 圖1 7係表示實施例5之控制單元之立體圖。 圖1 8係表示圖1 7之M- 剖面之剖面圖。 圖1 9係表示實施例5之旋轉部之安裝之情況之剖面 圖。 圖20係表示該旋轉部之旋轉體之立體圖。 圖2 1係表示該旋轉體之動作之說明圖。 圖2 2係表示習知之板狀基體搬運系統之平面圖。 圖2 3係表示習知之移送單元之立體圖。 圖24係表示圖23之X I - X I剖面之剖面圖。 圖25係表示圖23之ΧΠ-ΧΠ剖面之剖面圖。 圖26係表示習知之移送單元之喷出方向之說明圖。 圖27係表示習知之控制單元之立體圖。 圖2 8係表示習知之移送單元之喷出方向之說明圖。 符號說明 I、 2、3〜移送部 4、5、2 0 0〜控制單元 II、 21 '31 ' 41、51、：I 10、210 〜基座 11A、21A、31A、41A、51A、112、212〜搬運面 12、22、32、42、52、120、220〜包圍用構件Page 27 'f 41 84 26 V. Description of the invention (25) Figure 1 3 is a perspective view showing the control unit of the fourth embodiment. Fig. 14 is a sectional view showing a W-W section of Fig. 13; Fig. 15 is a sectional view showing a positioning lock portion. Fig. 16 is a sectional view showing a driving pin portion. Fig. 17 is a perspective view showing a control unit of the fifth embodiment. FIG. 18 is a cross-sectional view showing the M- section of FIG. 17. Fig. 19 is a cross-sectional view showing a state in which the rotating portion is mounted in the fifth embodiment. FIG. 20 is a perspective view showing a rotating body of the rotating portion. FIG. 21 is an explanatory diagram showing the operation of the rotating body. Fig. 22 is a plan view showing a conventional plate-shaped substrate conveying system. Fig. 23 is a perspective view showing a conventional transfer unit. FIG. 24 is a cross-sectional view showing the X I-X I cross section of FIG. 23. FIG. 25 is a cross-sectional view showing the XΠ-XΠ cross section of FIG. 23. Fig. 26 is an explanatory view showing a discharge direction of a conventional transfer unit. Fig. 27 is a perspective view showing a conventional control unit. Fig. 28 is an explanatory view showing a discharge direction of a conventional transfer unit. Explanation of Symbols I, 2, 3 to 4, 4, 2 to 0, to the control unit II, 21 '31' 41, 51 :: I 10, 210 to the base 11A, 21A, 31A, 41A, 51A, 112, 212 to conveying surface 12, 22, 32, 42, 52, 120, 220 to surrounding members
第28頁 ί 418428 五、發明說明（26) 13 11Β、21Β、31Β、41C-41E、51051Ε 215〜218 、 25卜253〜喷出孔 11C、21C、31C、114〜氣體室 11D 、 12Α〜側面 12Α1〜移動窗 13、23、33〜移動裝置 13Α〜箱 13Β1 130 13D~ 13E〜 13F〜 13G〜Page 28 ί 418428 V. Description of the invention (26) 13 11B, 21B, 31B, 41C-41E, 51051E 215 ~ 218, 25b 253 ~ Ejection holes 11C, 21C, 31C, 114 ~ Gas chamber 11D, 12Α ~ side 12Α1 ~ Mobile window 13, 23, 33 ~ Mobile device 13Α ~ Box 13B1 130 13D ~ 13E ~ 13F ~ 13G ~
第29頁 13Β、23Α、33Α〜驅動裝置 -轴 台板 馬達 支撐部 陽螺紋部 陰螺紋部 13Η~移動部 13Η1〜支柱 13Η2〜夾入部 21D、31D〜貫穿孔 23Β、230 導輥 33Β、33C侧〜皮帶 33Β1、33C1〜軸部分 33Β2、33C2〜皮帶部分 41珏、518、213~吸引孔 41F、41 J〜設置孔Page 29 13B, 23A, 33A ~ Drive unit-Spindle plate motor support part male screw part female screw part 13Η ~ moving part 13Η1 ~ post 13Η2 ~ clamping part 21D, 31D ~ through hole 23B, 230 guide roller 33B, 33C side ~ Belt 33B1, 33C1 ~ Shaft section 33B2, 33C2 ~ Belt section 41 珏, 518, 213 ~ Suction holes 41F, 41 J ~ Installation holes
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24464598A JP2000072251A (en) | 1998-08-31 | 1998-08-31 | Flotation carrier device and flotation carrier system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW418426B true TW418426B (en) | 2001-01-11 |
Family
ID=17121838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW88114817A TW418426B (en) | 1998-08-31 | 1999-08-30 | Floating carrier device and floating carrier system |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2000072251A (en) |
| TW (1) | TW418426B (en) |
| WO (1) | WO2000012416A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI386354B (en) * | 2003-10-17 | 2013-02-21 | Olympus Corp | Substrate conveying system |
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|---|---|---|---|---|
| TWI226303B (en) * | 2002-04-18 | 2005-01-11 | Olympus Corp | Substrate carrying device |
| JP4842348B2 (en) * | 2003-10-06 | 2011-12-21 | 住友重機械工業株式会社 | Conveying device, coating system, coating method, inspection system, and holding mechanism |
| WO2005074020A1 (en) | 2004-01-30 | 2005-08-11 | Sharp Kabushiki Kaisha | Semiconductor manufacturing apparatus and semiconductor manufacturing method using same |
| JP4754885B2 (en) * | 2004-11-30 | 2011-08-24 | 株式会社ダイヘン | Substrate transfer device |
| US7656506B2 (en) | 2004-12-23 | 2010-02-02 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing a substrate handler |
| JP4949439B2 (en) * | 2004-12-30 | 2012-06-06 | エーエスエムエル ネザーランズ ビー．ブイ． | PCB handler |
| JP4554397B2 (en) | 2005-02-23 | 2010-09-29 | 東京エレクトロン株式会社 | Stage device and coating treatment device |
| JP4553376B2 (en) * | 2005-07-19 | 2010-09-29 | 東京エレクトロン株式会社 | Floating substrate transfer processing apparatus and floating substrate transfer processing method |
| JP4755498B2 (en) * | 2006-01-06 | 2011-08-24 | 東京エレクトロン株式会社 | Heating apparatus and heating method |
| JP2007194508A (en) * | 2006-01-20 | 2007-08-02 | Tokyo Electron Ltd | Substrate transport device, substrate transport method, and computer program |
| JP2008016543A (en) * | 2006-07-04 | 2008-01-24 | Dainippon Screen Mfg Co Ltd | Substrate processing apparatus |
| JP2008039408A (en) * | 2006-08-01 | 2008-02-21 | Justem:Kk | Thickness multipoint measurement method and its apparatus |
| JP5003107B2 (en) * | 2006-11-10 | 2012-08-15 | 凸版印刷株式会社 | Glass plate conveyor |
| KR101432825B1 (en) | 2008-03-06 | 2014-08-26 | 도쿄엘렉트론가부시키가이샤 | Substrate processing apparatus |
| KR20120003455A (en) * | 2009-03-16 | 2012-01-10 | 알타 디바이씨즈, 인크. | Vapor deposition reactor system and methods thereof |
| JP6018659B2 (en) | 2015-02-27 | 2016-11-02 | 株式会社日本製鋼所 | Atmosphere forming apparatus and levitation conveyance method |
| CN107316834A (en) * | 2017-07-31 | 2017-11-03 | 武汉华星光电半导体显示技术有限公司 | Base plate transfer device |
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|---|---|---|---|---|
| JPS517667A (en) * | 1974-07-11 | 1976-01-22 | Central Glass Co Ltd | Ryutainyotsute shijisarenagaraisosareruhihansobutsuno shiseihenkanhohooyobisochi |
| JPS63202516A (en) * | 1987-02-17 | 1988-08-22 | Hitachi Plant Eng & Constr Co Ltd | Board like object transfer device |
| JPS63225028A (en) * | 1987-03-16 | 1988-09-20 | Hitachi Ltd | Conveying device |
| JPH02130849A (en) * | 1988-11-11 | 1990-05-18 | Hitachi Ltd | Conveyor |
| JPH0635287B2 (en) * | 1988-12-16 | 1994-05-11 | 大阪府 | Fluid ejection direction control device |
| JPH06340333A (en) * | 1993-05-31 | 1994-12-13 | Hitachi Ltd | Conveying device by gas flow |
| JPH07257715A (en) * | 1994-03-17 | 1995-10-09 | Hiroshi Akashi | Afloat conveying device |
-
1998
- 1998-08-31 JP JP24464598A patent/JP2000072251A/en active Pending
-
1999
- 1999-08-30 TW TW88114817A patent/TW418426B/en not_active IP Right Cessation
- 1999-08-31 WO PCT/JP1999/004699 patent/WO2000012416A1/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI386354B (en) * | 2003-10-17 | 2013-02-21 | Olympus Corp | Substrate conveying system |
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| WO2000012416A1 (en) | 2000-03-09 |
| JP2000072251A (en) | 2000-03-07 |
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