JP4373175B2 - Substrate transfer device - Google Patents

Substrate transfer device Download PDF

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JP4373175B2
JP4373175B2 JP2003357576A JP2003357576A JP4373175B2 JP 4373175 B2 JP4373175 B2 JP 4373175B2 JP 2003357576 A JP2003357576 A JP 2003357576A JP 2003357576 A JP2003357576 A JP 2003357576A JP 4373175 B2 JP4373175 B2 JP 4373175B2
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substrate
glass substrate
transport
floating block
mounting
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JP2005119818A (en
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郁三 中村
洋 加藤
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オリンパス株式会社
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • B65G49/065Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/062Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0214Articles of special size, shape or weigh

Description

この発明は、大型の基板を浮上させて搬送する基板搬送装置に関するものである。   The present invention relates to a substrate transfer apparatus that floats and transfers a large substrate.
近年、液晶ディスプレイ(以下、LCDと省略する)やプラズマディスプレイパネル(以下、PDPと省略する)等のフラットパネルディスプレイ(以下、FPDと省略する)の画面の大型化に伴い、FPDに使用するガラス基板のサイズが年々大型化する傾向にある。
従来、FPD製造工程において大型のガラス基板を搬送する基板搬送装置としては、空気吹出ブロック(基板浮上ブロック)からガラス基板の下面に圧搾エアーを吹き付け、ガラス基板を空気吹出ブロック上に浮上させるものがある(例えば、特許文献1参照。)。この構成の基板搬送装置では、ガラス基板の表面を傷付けることなく容易に搬送することができる。
In recent years, as the screen of a flat panel display (hereinafter abbreviated as “FPD”) such as a liquid crystal display (hereinafter abbreviated as “LCD”) or a plasma display panel (hereinafter abbreviated as “PDP”) becomes larger, glass used for FPDs. The size of the substrate tends to increase year by year.
Conventionally, as a substrate transport apparatus for transporting a large glass substrate in an FPD manufacturing process, a device that blows compressed air from the air blowing block (substrate floating block) onto the lower surface of the glass substrate to float the glass substrate on the air blowing block. (For example, refer to Patent Document 1). In the substrate transport apparatus having this configuration, the substrate can be easily transported without damaging the surface of the glass substrate.
また、この基板搬送装置には、ガラス基板の進行方向に直交する幅方向の両端を下面側から支持する支持ローラ機構と、ガラス基板の幅方向の端面に当接する一対の規制ローラ機構とを備えている。規制ローラ機構は、空気吹き出しブロックの幅方向の端部(側端部)から突出するガラス基板の端部を挟み込むことにより幅方向の位置を規制している。また、支持ローラ機構は、この規制ローラ機構に近接して配されている。
特開2000−193604号公報(図3、図4)
In addition, the substrate transport device includes a support roller mechanism that supports both ends in the width direction orthogonal to the traveling direction of the glass substrate from the lower surface side, and a pair of regulating roller mechanisms that contact the end surface in the width direction of the glass substrate. ing. The regulating roller mechanism regulates the position in the width direction by sandwiching the end portion of the glass substrate protruding from the end portion (side end portion) in the width direction of the air blowing block. Further, the support roller mechanism is disposed in the vicinity of the restriction roller mechanism.
Japanese Unexamined Patent Publication No. 2000-193604 (FIGS. 3 and 4)
しかしながら、規制ローラ機構は、空気吹出ブロックから離れてガラス基板の幅方向端部を挟持しているため、圧搾エアーで浮上させる際には、規制ローラ機構により挟持されているガラス基板の端部が、圧搾エアーにより浮上しているガラス基板面に対して撓み、ガラス基板全体を水平に保持して搬送することができない。
また、規制ローラ機構によりガラス基板を挟持するため、ガラス基板の端部に大きな付加が加わり、ガラス基板が傷つく虞があった。
さらに、この規制ローラ機構には支持ローラ機構が近接して配されているため、空気吹出ブロックの側端部と支持ローラ機構との間でガラス基板が下方に撓むことがある。ここで、圧搾エアーによるガラス基板の浮上高さは例えば0.2mmと微少であるため、前述したガラス基板の撓みが微少であっても、この撓みによってガラス基板が空気吹出ブロックの側端部に接触してガラス基板が傷つく虞があった。
この発明は上述した事情に鑑みてなされたものであって、基板を浮上させて搬送する際に、基板に対する外的負荷を軽減すると共に、基板を空気吹出ブロックに接触させることなく水平に搬送できる基板搬送装置を提供することを目的としている。
However, regulating roller mechanism, because apart from the air outlet block sandwiching the end portion in the width direction of the glass substrate, when to float in compressed air, the end portion of the glass substrate is held by the regulating roller mechanism The glass substrate surface that is levitated by the compressed air is bent, and the entire glass substrate cannot be held horizontally and conveyed.
Further, since the glass substrate is sandwiched by the regulating roller mechanism, a large addition is added to the end of the glass substrate, and the glass substrate may be damaged.
Further, since the support roller mechanism is disposed close to the restriction roller mechanism, the glass substrate may be bent downward between the side end portion of the air blowing block and the support roller mechanism. Here, since the flying height of the glass substrate by the compressed air is as small as 0.2 mm, for example, even if the glass substrate is bent as described above, the glass substrate is moved to the side end portion of the air blowing block by this bending. There was a possibility that the glass substrate would be damaged by contact.
The present invention has been made in view of the above-described circumstances. When the substrate is lifted and transported, the external load on the substrate can be reduced, and the substrate can be transported horizontally without contacting the air blowing block. An object of the present invention is to provide a substrate transfer device.
上記目的を達成するために、この発明は、以下の手段を提供する。
請求項1に係る発明は、基板を非接触状態に浮上させる基板浮上ブロックと、前記基板浮上ブロック上に浮上した前記基板の端部を吸着保持して搬送する搬送機構と、前記搬送機構により搬送される前記基板の下面を転がりながら回転する複数の回転支持部材を前記基板の搬送方向に沿う前記基板浮上ブロックの側部に設けることで、前記基板浮上ブロック上において搬送される前記基板の端部を支持する端部支持機構とを備えることを特徴とする基板搬送装置を提供する。
In order to achieve the above object, the present invention provides the following means.
The invention according to claim 1, conveying a substrate floating blocks for floating the substrate in a non-contact state, a transport mechanism for transporting by sucking and holding the end portion of the substrate that has emerged in the substrate floating on the block, by the transfer mechanism The plurality of rotation support members that rotate while rolling the lower surface of the substrate to be provided are provided on the side of the substrate floating block along the substrate transfer direction, so that the end of the substrate transferred on the substrate floating block And an end support mechanism for supporting the substrate.
請求項2に係る発明は、請求項1に記載の基板搬送装置において、前記回転支持部材が、前記搬送方向に回転可能なローラであることを特徴とする基板搬送装置を提供する。
The invention according to claim 2 provides the substrate transport apparatus according to claim 1, wherein the rotation support member is a roller that is rotatable in the transport direction .
請求項3に係る発明は、請求項1に記載の基板搬送装置において、前記回転支持部材が、回転自在に支持された玉であることを特徴とする基板搬送装置を提供する。
The invention according to claim 3, the substrate transport apparatus of claim 1, wherein the rotary support member, to provide a substrate transfer apparatus which is a rotatably supported ball.
請求項4に係る発明は、請求項3に記載の基板搬送装置において、前記端部支持機構が、複数の前記玉を前記基板の下面に対向する前記浮上ブロックの搬送面上に露出させ、前記基板の下面上を転がって移動させる接触軌道と、該接触軌道の両端に連結して前記玉を前記接触軌道へ循環させる循環軌道とを有する循環部材を備えることを特徴とする基板搬送装置を提供する。
The invention according to claim 4 is the substrate transfer apparatus according to claim 3 , wherein the end support mechanism exposes a plurality of the balls on a transfer surface of the floating block facing a lower surface of the substrate, Provided is a substrate transport apparatus comprising a circulation member having a contact track that rolls and moves on a lower surface of a substrate, and a circulation track that is connected to both ends of the contact track and circulates the balls to the contact track. To do.
請求項5に係る発明は、請求項1に記載の基板搬送装置において、前記端部支持機構が複数のユニットからなり、各ユニットが、前記基板浮上ブロックに対して着脱自在に設けられていることを特徴とする基板搬送装置を提供する。
According to a fifth aspect of the present invention, in the substrate transfer apparatus according to the first aspect, the end support mechanism includes a plurality of units, and each unit is detachably provided on the substrate floating block. The board | substrate conveyance apparatus characterized by these is provided.
請求項6に係る発明は、請求項1に記載の基板搬送装置において、前記搬送機構が、前記基板の搬送方向に沿って設けられたスライダと、当該スライダ対して前記搬送方向に移動可能に設けられると共に前記基板の端部を吸着保持する搬送端部とを備えることを特徴とする基板搬送装置を提供する。
The invention according to claim 6 is the substrate transfer apparatus according to claim 1, wherein the transfer mechanism is provided so as to be movable in the transfer direction with respect to the slider provided along the transfer direction of the substrate. And a transport end portion that sucks and holds the end portion of the substrate.
本発明の基板搬送装置によれば、端部支持機構が基板浮上ブロックの両側部や両側部に近接する位置に配されているため、基板浮上ブロックの両側部において基板が下方側に撓むことを防止して、基板が基板浮上ブロックに接触して傷つくことを防止できる。また、ガラス基板3が下方側に反っていてもガラス基板の両端部を水平に矯正できる。   According to the substrate transfer apparatus of the present invention, since the end support mechanism is disposed at both sides of the substrate floating block and at positions close to both sides, the substrate bends downward at both sides of the substrate floating block. It is possible to prevent the substrate from being damaged by contacting the substrate floating block. Moreover, even if the glass substrate 3 is warped downward, both ends of the glass substrate can be corrected horizontally.
また、本発明の端部支持機構によれば、基板を回転支持部材で支持する場合には、基板の搬送の際に回転支持部材であるローラや玉が基板の下面上を転がるため、ローラや玉と基板との滑り摩擦が小さくなり、この滑り摩擦によって基板が傷つくことを防止できる。   Further, according to the end support mechanism of the present invention, when the substrate is supported by the rotation support member, the roller or ball that is the rotation support member rolls on the lower surface of the substrate when the substrate is transported. The sliding friction between the ball and the substrate is reduced, and the sliding friction can prevent the substrate from being damaged.
また、本発明の回転支持部材によれば、特に玉を用いることにより基板が搬送方向に直交する幅方向に移動したとしても、玉が基板に接触して自由に回転できるため、基板に傷が付くことを確実に防止できる。   Further, according to the rotation support member of the present invention, even when the ball is used, even if the substrate moves in the width direction orthogonal to the conveyance direction, the ball can contact the substrate and rotate freely, so that the substrate is scratched. It can be surely prevented from sticking.
さらに、本発明の回転支持部材によれば、複数の玉を接触軌道及び循環軌道において循環させることにより、基板との間の転がり摩擦による玉の摩耗を抑制することができるため、玉を交換することなく長時間連続して使用することができる。   Furthermore, according to the rotation support member of the present invention, since a plurality of balls are circulated in the contact track and the circulation track, wear of the ball due to rolling friction with the substrate can be suppressed. It can be used continuously for a long time without any problems.
さらに、本発明の端部支持機構によれば、基板浮上ブロックに対して着脱可能な複数のユニットにすることにより、所望のユニットを簡単に交換できる。   Furthermore, according to the end support mechanism of the present invention, a desired unit can be easily replaced by using a plurality of units that can be attached to and detached from the substrate floating block.
図1から図6は本発明に係る一実施形態を示しており、ここで説明する実施の形態は、この発明を大型のLCDやPDP等のFPDの製造工程におけるインライン検査に適用した場合のものである。
基板搬送装置を構成する搬入用の基板載置台1は、除振台2の上に設けられており、その上面(搬送面)に搬入されたガラス基板3を載置するものである。基板載置台1の幅方向(ガラス基板3の搬送方向Cに対する垂直方向)の寸法は、ガラス基板3の幅よりも短くなっている。この基板載置台1は、その上面にエアー吹き上げ用の複数の空気孔4を設けてガラス基板3をエアー浮上させる基板浮上ブロックに構成されている。空気孔4は、基板載置台1の全面にほぼ均一に設けられている。
1 to 6 show an embodiment according to the present invention, and the embodiment described here is a case where the present invention is applied to an in-line inspection in a manufacturing process of an FPD such as a large LCD or PDP. It is.
A substrate mounting table 1 for carrying in that constitutes a substrate transporting device is provided on a vibration isolation table 2, on which a glass substrate 3 carried on the upper surface (conveying surface) is placed. The dimension of the substrate mounting table 1 in the width direction (the direction perpendicular to the conveyance direction C of the glass substrate 3) is shorter than the width of the glass substrate 3. The substrate mounting table 1 is configured as a substrate floating block in which a plurality of air holes 4 for air blowing are provided on the upper surface thereof to float the glass substrate 3 in the air. The air holes 4 are provided substantially uniformly over the entire surface of the substrate mounting table 1.
また、この基板載置台1の上面には、2本の溝5が互いに所定の間隔をおいて搬送方向Cに沿って形成されている。さらに、この基板載置台1には、ガラス基板3の搬入時に昇降する複数(図示例では9個)のリフトピン6が設けられている。
なお、基板載置台1は、細長い矩形状のブロックに分割し、各ブロック間(溝5)の間隔を調整して各種サイズのガラス基板に合わせて基板載置台1の幅方向の寸法を変えられるようにしてもよい。この場合、基板載置台1の幅方向の両端に位置する各ブロックを幅方向にスライドさせる幅調整機構(不図示)により基板載置台1の幅寸法を任意に調整できる。
In addition, two grooves 5 are formed on the upper surface of the substrate mounting table 1 along the transport direction C at a predetermined interval. Further, the substrate mounting table 1 is provided with a plurality (9 in the illustrated example) of lift pins 6 that are moved up and down when the glass substrate 3 is carried in.
The substrate mounting table 1 is divided into long and narrow rectangular blocks, and the width in the width direction of the substrate mounting table 1 can be changed according to the glass substrates of various sizes by adjusting the interval between the blocks (grooves 5). You may do it. In this case, the width dimension of the substrate platform 1 can be arbitrarily adjusted by a width adjustment mechanism (not shown) that slides the blocks located at both ends of the substrate platform 1 in the width direction.
搬送方向Cに沿う基板載置台1の一端部側(搬送方向Cの左側)には、搬入用搬送ロボット7が設けられている。この搬入用搬送ロボット7は、図示しない多関節アームにより2本のハンドアーム8を回転、前進及び後退させながら未検査のガラス基板3をカセットから取り出して基板載置台1上に搬入する。
基板載置台1の出口側には、搬送架台9が搬送方向Cに沿って並設されている。この搬送架台9は、ガラス基板3の搬入側から搬出側に至る長さに形成されている。この搬送架台9は、除振台10上に載せられている。
On the one end side of the substrate platform 1 along the transport direction C (on the left side in the transport direction C), a transport robot 7 for loading is provided. The carry-in transfer robot 7 takes out the uninspected glass substrate 3 from the cassette and carries it onto the substrate mounting table 1 while rotating, advancing and retreating the two hand arms 8 by a multi-joint arm (not shown).
On the exit side of the substrate mounting table 1, a transport frame 9 is arranged in parallel along the transport direction C. The transport frame 9 is formed to have a length from the carry-in side to the carry-out side of the glass substrate 3. This transport base 9 is placed on a vibration isolation base 10.
この搬送架台9の上面には、搬送架台9の全長に亘って基板浮上ブロック(検査ステージ)11が設けられている。基板浮上ブロック11の幅方向の寸法は、基板載置台1と同様に、ガラス基板3の幅よりも短くなっている。この基板浮上ブロック11の上面(搬送面)にも、基板載置台1と同様に、エアー吹き上げ用の複数の空気孔12が設けられている。これら空気孔12は、基板浮上ブロック11の全面にほぼ均一に設けられている。
また、この基板浮上ブロック11の上面には、2本の溝13が互いに所定の間隔をおいて搬送方向Cに沿って形成されている。この基板浮上ブロック11の上面の高さは、基板載置台1の上面の高さとほぼ同一となっている。
なお、この基板浮上ブロック11も基板載置台1と同様に、複数に分割された各ブロック間(溝13)の間隔を調整して基板浮上ブロック11の幅方向の寸法を変えられるようにしてもよい。
A substrate floating block (inspection stage) 11 is provided on the upper surface of the transport frame 9 over the entire length of the transport frame 9. The dimension in the width direction of the substrate floating block 11 is shorter than the width of the glass substrate 3 as in the substrate mounting table 1. Similar to the substrate mounting table 1, a plurality of air holes 12 for blowing up air are also provided on the upper surface (conveying surface) of the substrate floating block 11. These air holes 12 are provided substantially uniformly over the entire surface of the substrate floating block 11.
Further, two grooves 13 are formed on the upper surface of the substrate floating block 11 along the transport direction C at a predetermined interval. The height of the upper surface of the substrate floating block 11 is substantially the same as the height of the upper surface of the substrate mounting table 1.
Note that, similarly to the substrate mounting table 1, the substrate floating block 11 may be configured such that the dimension in the width direction of the substrate floating block 11 can be changed by adjusting the interval between each of the divided blocks (grooves 13). Good.
搬送方向Cに沿う搬送架台9の略中間位置には、一定速度で搬送されるガラス基板3の各種検査を行う検査部Eが設けられている。この検査部Eには、門型のアーム14、顕微鏡、ラインセンサ、CCDカメラ等の各種検査用機器15が搭載されている。この検査部Eにおいては、例えば、幅方向に複数配列したラインセンサによりガラス基板3の画像データを取得し、この画像データに画像処理等を施してガラス基板3のパターン検査や欠陥検査等を行う。   An inspection unit E that performs various inspections of the glass substrate 3 transported at a constant speed is provided at a substantially intermediate position of the transport base 9 along the transport direction C. In the inspection section E, various inspection devices 15 such as a portal arm 14, a microscope, a line sensor, and a CCD camera are mounted. In the inspection unit E, for example, image data of the glass substrate 3 is acquired by a plurality of line sensors arranged in the width direction, and image processing or the like is performed on the image data to perform pattern inspection or defect inspection of the glass substrate 3. .
搬送架台9の出口側には、搬出用の基板載置台16が搬送方向Cに沿って並設されている。この基板載置台16は、除振台17上に設けられており、基板浮上ブロック11から搬送されてきたガラス基板3を搬出するために一時的に載置するものである。基板載置台16の幅寸法は、基板載置台1及び基板浮上ブロック11と同様に、ガラス基板3の幅よりも短くなっている。基板載置台16は、基板載置台1や基板浮上ブロック11と同様に、その上面(搬送面)にエアー吹き上げ用の複数の空気孔18を設けてガラス基板3をエアー浮上させる基板浮上ブロックに構成されている。空気孔18は、基板載置台16の全面にほぼ均一に設けられている。
また、この基板載置台16上には、2本の溝19が互いに所定の間隔をおいて搬送方向Cに沿って形成されている。さらに、この基板載置台16には、ガラス基板3の搬出時に昇降する複数(図示例では9個)のリフトピン20が設けられている。この基板載置台16の上面の高さは、基板浮上ブロック11の上面の高さとほぼ同一となっている。
なお、この基板載置台16も基板載置台1と同様に、複数に分割された各ブロック間(溝19)の間隔を調整して基板載置台16の幅方向の寸法を変えられるようにしても構わない。
On the exit side of the transport gantry 9, a substrate mounting table 16 for unloading is provided in parallel along the transport direction C. The substrate mounting table 16 is provided on the vibration isolation table 17 and is temporarily mounted to carry out the glass substrate 3 conveyed from the substrate floating block 11. The width dimension of the substrate mounting table 16 is shorter than the width of the glass substrate 3 in the same manner as the substrate mounting table 1 and the substrate floating block 11. Similar to the substrate mounting table 1 and the substrate floating block 11, the substrate mounting table 16 is configured as a substrate floating block in which a plurality of air holes 18 for air blowing are provided on the upper surface (conveying surface) to float the glass substrate 3 in the air. Has been. The air holes 18 are provided substantially uniformly over the entire surface of the substrate mounting table 16.
Further, two grooves 19 are formed on the substrate mounting table 16 along the transport direction C at a predetermined interval. Furthermore, the substrate mounting table 16 is provided with a plurality of (9 in the illustrated example) lift pins 20 that move up and down when the glass substrate 3 is unloaded. The height of the upper surface of the substrate mounting table 16 is substantially the same as the height of the upper surface of the substrate floating block 11.
Note that, similarly to the substrate mounting table 1, the substrate mounting table 16 can be adjusted in the width direction of the substrate mounting table 16 by adjusting the interval between the blocks (grooves 19) divided into a plurality of blocks. I do not care.
基板載置台16の幅方向の一端部側には、搬出用搬送ロボット21が設けられている。この搬出用搬送ロボット21は、図示しない多関節アームにより2本のハンドアーム22を回転、前進及び後退させながら検査済みのガラス基板3をカセット内に収納する。
搬送架台9及び除振台17上には、基板浮上ブロック11及び基板載置台16を挟んで各スライダ23〜28が一対一組として複数組み搬送方向Cに沿って互いに平行に設けられている。
搬送方向Cの両端部に位置する二組のスライダ23,24,27,28は、搬送方向Cの中間部に位置する一組のスライダ25,26よりも幅方向外側に設けられている。
On the one end side in the width direction of the substrate platform 16, a carry-out transfer robot 21 is provided. The unloading transfer robot 21 stores the inspected glass substrate 3 in a cassette while rotating, advancing and retreating two hand arms 22 by a multi-joint arm (not shown).
A plurality of sliders 23 to 28 are provided on the transport platform 9 and the vibration isolation table 17 in parallel with each other along the transport direction C as a pair, with the substrate floating block 11 and the substrate mounting table 16 interposed therebetween.
The two sets of sliders 23, 24, 27, and 28 located at both ends in the transport direction C are provided on the outer side in the width direction than the pair of sliders 25 and 26 located in the intermediate part in the transport direction C.
基板載置台1の出口側から搬送架台9の中間部までの間に配された一対のスライダ23,24には、搬送方向C及びその逆方向に移動可能な搬送端部29,30が各々設けられている。各搬送端部29,30は、鉛直方向に伸縮可能かつ回転自在に取り付けられたアーム29a,30aと、アーム29a,30aの先端部に設けられ、搬送方向Cに沿うガラス基板3の両端部に位置するガラス基板3の下面を吸着保持する吸着パッド29b,30bと、搬送端部29,30の内部に設けられ、アーム29a,30aを搬送方向C及び鉛直方向に移動させるプランジャとを備えている。   A pair of sliders 23 and 24 arranged between the exit side of the substrate mounting table 1 and the intermediate portion of the transport platform 9 are provided with transport end portions 29 and 30 that are movable in the transport direction C and in the opposite direction, respectively. It has been. The transport end portions 29 and 30 are provided at arms 29a and 30a that are vertically extendable and rotatable, and at the tip ends of the arms 29a and 30a, and are provided at both ends of the glass substrate 3 along the transport direction C. Suction pads 29b, 30b for sucking and holding the lower surface of the glass substrate 3 positioned, and plungers provided inside the transport end portions 29, 30 for moving the arms 29a, 30a in the transport direction C and the vertical direction. .
また、搬送架台9の中間部から出口側までの間に配された一対のスライダ25,26にも、搬送方向C及びその逆方向に移動可能な搬送端部31,32が各々設けられている。各搬送端部31,32は、前述した搬送端部29,30と同様に、アーム31a,32aと吸着パッド31b,32bとを備えている。
さらに、搬送架台9の出口側から基板載置台16の出口側までの間に配された一対のスライダ27,28にも、搬送方向C及びその逆方向に移動可能な搬送端部33,34が各々設けられている。各搬送端部33,34は、前述した搬送端部29,30と同様に、アーム33a,34aと吸着パッド33b,34bとを備えている。
Further, the pair of sliders 25 and 26 arranged between the intermediate part of the transport base 9 and the outlet side are also provided with transport end portions 31 and 32 that are movable in the transport direction C and in the opposite direction, respectively. . Each conveyance end part 31 and 32 is provided with arms 31a and 32a and suction pads 31b and 32b, similarly to the conveyance end parts 29 and 30 described above.
Further, the pair of sliders 27 and 28 arranged between the exit side of the transport platform 9 and the exit side of the substrate mounting table 16 also have transport end portions 33 and 34 that can move in the transport direction C and in the opposite direction. Each is provided. Each conveyance end 33, 34 is provided with arms 33a, 34a and suction pads 33b, 34b, similarly to the conveyance ends 29, 30 described above.
なお、搬送方向Cの両端部に位置する二組のスライダ23,24,27,28は、搬送方向Cの中間部に位置する一組のスライダ25,26よりも幅方向外側に設けられているため、両端部に位置する各スライダ23,24,27,28の吸着パッド29b,30b,33b,34bの幅方向の位置は、中間部に位置する各スライダ25,26の吸着パッド31b,32bの幅方向の位置と同一となるように各アーム29a,30a,33a,34aの長さが設定されている。   The two sets of sliders 23, 24, 27, and 28 located at both ends in the transport direction C are provided on the outer side in the width direction than the pair of sliders 25 and 26 located in the intermediate part in the transport direction C. Therefore, the positions in the width direction of the suction pads 29b, 30b, 33b, and 34b of the sliders 23, 24, 27, and 28 located at both ends are the positions of the suction pads 31b and 32b of the sliders 25 and 26 located at the intermediate part. The length of each arm 29a, 30a, 33a, 34a is set so as to be the same as the position in the width direction.
この基板搬送装置は、上記構成の他に、圧搾空気供給部46、真空吸着部47、移動制御部48及び端部支持機構49を備えている。
圧搾空気供給部46は、配管を通して搬入用の基板載置台1、基板浮上ブロック11及び搬出用の基板載置台16の各空隙部に連通し、各空隙部に選択的に圧搾エアーを供給して各空気孔4,12,18から圧搾エアーを吹き上げるものである。この圧搾エアーにより搬入用の基板載置台1、基板浮上ブロック11または搬出用の基板載置台16上においてガラス基板3を浮上させることができる。また、この圧搾空気供給部46は、各空気孔4,12,18から除電効果を有するエアー、例えば、プラスイオンまたはマイナスイオンにイオン化されたエアーを吹き上げるようになっている。これら空気孔4,12,18及び圧搾空気供給部46により基板浮上機構101が構成されている。
真空吸着部47は、配管を通して各吸着パッド29b〜34bに連通し、これら吸着パッド29b〜34bを選択的に真空引きしてガラス基板3を吸着保持するものである。移動制御部48は、各スライダ23〜28上における搬送端部29〜34の移動制御を行うものである。
これらスライダ23〜28、搬送端部29〜34、真空吸着部47及び移動制御部48によりガラス基板3を搬送方向Cに移動させる搬送機構102が構成されている。
In addition to the above-described configuration, the substrate transfer apparatus includes a compressed air supply unit 46, a vacuum suction unit 47, a movement control unit 48, and an end support mechanism 49.
The compressed air supply unit 46 communicates with the respective gaps of the substrate mounting table 1 for loading, the substrate floating block 11 and the substrate mounting table 16 for unloading through a pipe, and selectively supplies compressed air to each of the gaps. The compressed air is blown out from the air holes 4, 12, 18. The glass substrate 3 can be floated on the substrate mounting table 1 for loading, the substrate floating block 11 or the substrate mounting table 16 for unloading by the compressed air. Further, the compressed air supply unit 46 blows up air having a charge removing effect from each of the air holes 4, 12, 18, for example, air ionized into positive ions or negative ions. These air holes 4, 12, 18 and the compressed air supply unit 46 constitute a substrate floating mechanism 101.
The vacuum suction portion 47 communicates with the suction pads 29b to 34b through piping, and selectively sucks and holds the glass substrate 3 by vacuuming the suction pads 29b to 34b. The movement control unit 48 performs movement control of the conveyance end portions 29 to 34 on the sliders 23 to 28.
The sliders 23 to 28, the conveyance end portions 29 to 34, the vacuum suction unit 47, and the movement control unit 48 constitute a conveyance mechanism 102 that moves the glass substrate 3 in the conveyance direction C.
端部支持機構49は、搬送方向Cに沿う基板載置台1,16及び基板浮上ブロック11の両端部(両側部)に近接して設けられ、ガラス基板3の両端部を下面側から支持するものである。この端部支持機構49は、基板載置台1,16及び基板浮上ブロック11の両側部に対して着脱可能に取り付けられた複数の支持ユニット51を備えている。
各支持ユニット51には、図3に示すように、複数のローラ(回転支持部材)53が回転可能に取り付けられており、各ローラ53は、その周面の一部が基板載置台1,16及び基板浮上ブロック11の上面から微小に突出するように配されている。各ローラ53の突出長さは、圧搾エアーによるガラス基板3の浮上高さとなるように設定されている。また、搬送方向Cに隣接して並べられたローラ53は、ガラス基板3に接触する周面が合成樹脂等のガラス基板3よりも柔らかい耐摩耗性材料からなり、互いに接触しない程度に近づけて配されている。これらローラ53は、ガラス基板3が搬送方向Cに移動した際に、ガラス基板3の下面を転がる方向(J方向)に回転するようになっている。また、ローラ53は、ガラス基板3に対してスリップしない摩擦力が得られる程度に細い幅寸法を有しているとよい。
The end support mechanism 49 is provided close to both ends (both sides) of the substrate mounting tables 1 and 16 and the substrate floating block 11 along the transport direction C, and supports both ends of the glass substrate 3 from the lower surface side. It is. The end support mechanism 49 includes a plurality of support units 51 that are detachably attached to both sides of the substrate mounting tables 1 and 16 and the substrate floating block 11.
As shown in FIG. 3, a plurality of rollers (rotation support members) 53 are rotatably attached to each support unit 51, and each roller 53 has a part of its peripheral surface on the substrate platform 1, 16. And it is arranged so as to protrude minutely from the upper surface of the substrate floating block 11. The protruding length of each roller 53 is set to be the flying height of the glass substrate 3 by compressed air. The rollers 53 arranged adjacent to each other in the transport direction C are made of a wear-resistant material whose peripheral surface that comes into contact with the glass substrate 3 is softer than the glass substrate 3 such as synthetic resin, and is arranged so as not to contact each other. Has been. When the glass substrate 3 moves in the transport direction C, the rollers 53 rotate in a direction (J direction) that rolls the lower surface of the glass substrate 3. The roller 53 preferably has a width dimension that is thin enough to obtain a frictional force that does not slip with respect to the glass substrate 3.
なお、ガラス基板3には、ディスプレイを構成するパターン領域Gが複数(例えば、4面、6面)形成されており、基板載置台1,16及び基板浮上ブロック11の幅寸法は、搬送方向Cに沿うパターン領域Gの最も外側の幅寸法と略同一となるように設定される。これにより、パターン領域Gが形成されていないガラス基板3の両端部が、基板載置台1,16及び基板浮上ブロック11の両側部から突出することになる。そして、各ローラ53は、基板載置台1,16及び基板浮上ブロック11の両側部に沿って密に配置され、ガラス基板3の両端部を下面側から支持するようになっている。   The glass substrate 3 is formed with a plurality of pattern areas G (for example, four surfaces and six surfaces) constituting the display, and the width dimensions of the substrate mounting tables 1 and 16 and the substrate floating block 11 are determined in the conveyance direction C. Is set to be substantially the same as the outermost width dimension of the pattern region G along the line. As a result, both end portions of the glass substrate 3 where the pattern region G is not formed protrude from both side portions of the substrate mounting tables 1 and 16 and the substrate floating block 11. Each roller 53 is densely arranged along both side portions of the substrate mounting tables 1 and 16 and the substrate floating block 11, and supports both end portions of the glass substrate 3 from the lower surface side.
次に、上記のように構成された基板搬送装置の動作について説明する。
基板載置台1にガラス基板3を載置する際には、図1,2に示すように、予め搬入側に位置するスライダ23,24上の搬送端部29,30を基板載置台1側に移動させ、待機させておく。
この状態から、搬入用搬送ロボット7は、ハンドアーム8を回転、前進及び後退して未検査のガラス基板3をカセットから取り出し、基板載置台1の上方に搬送する。また、この搬送と同時に、基板載置台1の各リフトピン6が上昇する。次いで、搬入用搬送ロボット7は、ハンドアーム8を下降させてガラス基板3を各リフトピン6上に載置する。そして、各リフトピン6が下降することにより、ガラス基板3が基板載置台1上に載置されることになる。
この状態においては、ガラス基板3の幅寸法が基板載置台1の幅よりも長いため、搬送方向Cに沿うガラス基板3の両端部が基板載置台1の両側部から突出する。また、この状態においては、図3(b)に示すように、パターン領域Gの最も外側の両端部より外側に位置するガラス基板3の端部下面がローラ53に接触することになる。
Next, the operation of the substrate transport apparatus configured as described above will be described.
When placing the glass substrate 3 on the substrate platform 1, as shown in FIGS. 1 and 2, the transport end portions 29 and 30 on the sliders 23 and 24 positioned on the carry-in side are placed on the substrate platform 1 side in advance. Move and wait.
From this state, the carry-in transfer robot 7 rotates, advances, and retracts the hand arm 8 to take out the uninspected glass substrate 3 from the cassette, and transfers the glass substrate 3 above the substrate mounting table 1. Simultaneously with this conveyance, each lift pin 6 of the substrate mounting table 1 rises. Next, the carry-in transfer robot 7 lowers the hand arm 8 to place the glass substrate 3 on each lift pin 6. Then, when each lift pin 6 is lowered, the glass substrate 3 is placed on the substrate platform 1.
In this state, since the width dimension of the glass substrate 3 is longer than the width of the substrate mounting table 1, both end portions of the glass substrate 3 along the transport direction C protrude from both side portions of the substrate mounting table 1. Further, in this state, as shown in FIG. 3B, the lower surface of the end portion of the glass substrate 3 positioned outside the outermost both end portions of the pattern region G comes into contact with the roller 53.
ガラス基板3の載置が終了すると、搬入側に位置する搬送端部29,30は、図4に示すように、それぞれアーム29a,30aを上昇させると共に、真空吸着部47により吸着パッド29b,30bの真空引きを行い、吸着パッド29b,30bをガラス基板3の下面に吸着させる。これら吸着パッド29b,30bの吸着位置は、前述したローラ53の接触位置よりもさらにガラス基板3の幅方向の外方側であり、かつ、搬送方向Cに向かうガラス基板3の前方側である。この状態において、吸着パッド29b,30bは、基板載置台1の上面高さよりも僅かに上昇し、ガラス基板3とローラ53との接触位置と略同一の高さに位置する。   When the placement of the glass substrate 3 is completed, the transport end portions 29 and 30 located on the carry-in side raise the arms 29a and 30a, respectively, and the vacuum pads 47b and 30b are lifted by the vacuum suction unit 47 as shown in FIG. The suction pads 29b and 30b are sucked to the lower surface of the glass substrate 3. The suction positions of the suction pads 29b and 30b are further outward in the width direction of the glass substrate 3 than the contact position of the roller 53 described above, and in front of the glass substrate 3 in the transport direction C. In this state, the suction pads 29 b and 30 b are slightly raised from the height of the upper surface of the substrate mounting table 1 and are positioned at substantially the same height as the contact position between the glass substrate 3 and the roller 53.
このガラス基板3の吸着と同時に、圧搾空気供給部46は、配管を通して搬入用の基板載置台1及び基板浮上ブロック11の空隙部に圧搾エアーを供給し、空気孔4,12から圧搾エアーを吹き上がらせる。この際には、除電効果を有するイオン化された圧搾エアーをガラス基板3に吹き付けるため、ガラス基板3の静電気を中和してガラス基板3の帯電を阻止することができる。
また、この際には、基板載置台1とガラス基板3との間にはエアー層が形成され、ガラス基板3が基板載置台1の上面から浮上する。そして、空気孔4から吹き上げられたエアーは、前述のエアー層に留まることなく基板載置台1の溝5を通して流れる。このため、ガラス基板3は平面度を保って基板載置台1上に浮上することになる。なお、ローラ53は、圧搾エアーによって浮上したガラス基板3の下面の高さと略同一となっているため、ガラス基板3が下方に反ったり、撓んでいてもガラス基板3の両端部が各ローラ53により水平に矯正され、ガラス基板3は基板載置台1の搬送面に接することなく浮上する。
Simultaneously with the adsorption of the glass substrate 3, the compressed air supply unit 46 supplies compressed air to the gap between the substrate mounting table 1 for loading and the substrate floating block 11 through the pipe, and blows the compressed air from the air holes 4 and 12. Raise it. At this time, since ionized compressed air having a charge eliminating effect is blown onto the glass substrate 3, static electricity of the glass substrate 3 can be neutralized and charging of the glass substrate 3 can be prevented.
At this time, an air layer is formed between the substrate mounting table 1 and the glass substrate 3, and the glass substrate 3 floats from the upper surface of the substrate mounting table 1. The air blown from the air holes 4 flows through the grooves 5 of the substrate mounting table 1 without staying in the air layer. For this reason, the glass substrate 3 floats on the substrate mounting table 1 while maintaining flatness. In addition, since the roller 53 is substantially the same as the height of the lower surface of the glass substrate 3 that has been levitated by the compressed air, both end portions of the glass substrate 3 remain at the respective rollers 53 even if the glass substrate 3 warps downward or bends. The glass substrate 3 floats without contacting the transport surface of the substrate mounting table 1.
その後、移動制御部48は、図5に示すように、ガラス基板3の下面に吸着した吸着パッド29b,30bを有する2つの搬送端部29,30を同一の速度で同期させて各スライダ23,24上を搬送方向Cに移動させる。これにより、ガラス基板3は、浮上して基板載置台1及び基板浮上ブロック11の上面に接触しない状態で搬送端部29,30により基板載置台1から基板浮上ブロック11に搬送されることになる。また、この際には、基板載置台1及び基板浮上ブロック11に設けられたローラ53が、パターン領域Gの外方側に位置するガラス基板3の両端部の下面に接触してJ方向に回転する。   Thereafter, as shown in FIG. 5, the movement control unit 48 synchronizes the two transport end portions 29 and 30 having the suction pads 29 b and 30 b sucked on the lower surface of the glass substrate 3 at the same speed, and moves each slider 23, 24 is moved in the transport direction C. As a result, the glass substrate 3 is transported from the substrate mounting table 1 to the substrate floating block 11 by the transport end portions 29 and 30 in a state where the glass substrate 3 floats and does not contact the upper surfaces of the substrate mounting table 1 and the substrate floating block 11. . At this time, the rollers 53 provided on the substrate mounting table 1 and the substrate floating block 11 are in contact with the lower surfaces of both ends of the glass substrate 3 located on the outer side of the pattern region G and rotate in the J direction. To do.
ガラス基板3の基板浮上ブロック11への搬送が終了した際には、圧搾空気供給部46が、搬入用の基板載置台1の空気孔4への圧搾エアーの供給を停止する。また、この際には、移動制御部48が、中間部に位置する2つのスライダ25,26上の搬送端部31,32を搬送方向Cとは逆方向に移動させる。
これら搬送端部31,32は、ガラス基板3の下方に到達すると、スライダ25,26上の基板受け渡し基準位置に停止し、各アーム31a,32aを上昇させて、真空吸着部47により吸着パッド31b,32bをガラス基板3の下面に吸着させる。これら吸着パッド31b,32bの吸着位置は、ローラ53の接触位置よりもさらにガラス基板3の幅方向の外方側で、搬送方向Cに向かうガラス基板3の前方側である。
吸着パッド31b,32bがガラス基板3に吸着すると、真空吸着部47による搬送端部29,30の各吸着パッド29b,30bの吸着が解除され、各アーム29a,30aが下降する。これにより、ガラス基板3の吸着保持が搬送端部29,30から搬送端部31,32に受け渡される。その後、2つの搬送端部29,30は、それぞれのスライダ23,24上を搬送方向Cとは逆方向(後方)に移動し、搬入用の基板載置台1の基板受け渡し基準位置に停止して待機する。
When the conveyance of the glass substrate 3 to the substrate floating block 11 is completed, the compressed air supply unit 46 stops the supply of the compressed air to the air holes 4 of the substrate mounting table 1 for loading. At this time, the movement control unit 48 moves the conveyance end portions 31 and 32 on the two sliders 25 and 26 located at the intermediate portion in the direction opposite to the conveyance direction C.
When the transport end portions 31 and 32 reach below the glass substrate 3, they stop at the substrate delivery reference position on the sliders 25 and 26, raise the arms 31 a and 32 a, and the suction pad 31 b is lifted by the vacuum suction portion 47. , 32b is adsorbed to the lower surface of the glass substrate 3. The suction positions of these suction pads 31 b and 32 b are further outward in the width direction of the glass substrate 3 than the contact position of the roller 53 and on the front side of the glass substrate 3 in the transport direction C.
When the suction pads 31b and 32b are attracted to the glass substrate 3, the suction of the suction pads 29b and 30b of the transport end portions 29 and 30 by the vacuum suction portion 47 is released, and the arms 29a and 30a are lowered. Accordingly, the suction holding of the glass substrate 3 is transferred from the transport end portions 29 and 30 to the transport end portions 31 and 32. Thereafter, the two transport end portions 29 and 30 move on the sliders 23 and 24 in the direction opposite to the transport direction C (rearward), and stop at the substrate transfer reference position of the substrate mounting table 1 for loading. stand by.
ガラス基板3の受け渡しが終了すると、ガラス基板3を吸着保持した搬送端部31,32は、図6に示すように、同一の速度で同期して各スライダ25,26上を搬送方向Cに移動する。この際には、基板浮上ブロック11の両側部に近接して設けられたローラ53が、パターン領域Gの外方側に位置するガラス基板3の両端部の下面に接触してJ方向に回転する。これにより、基板浮上ブロック11上に浮上しているガラス基板3は、搬送端部31,32により引っ張られて検査部Eに到達する。
検査部Eでは、例えば、ラインセンサを備えた検査用機器15を用いてガラス基板3の各種検査により取得された画像データに基づいてガラス基板3のパターン検査、欠陥検査等が行われる。
When the delivery of the glass substrate 3 is completed, the transport end portions 31 and 32 holding the glass substrate 3 by suction move in the transport direction C on the sliders 25 and 26 in synchronization with each other at the same speed as shown in FIG. To do. At this time, the rollers 53 provided close to both sides of the substrate floating block 11 come into contact with the lower surfaces of both ends of the glass substrate 3 located on the outer side of the pattern region G and rotate in the J direction. . As a result, the glass substrate 3 floating on the substrate floating block 11 is pulled by the transport end portions 31 and 32 and reaches the inspection unit E.
In the inspection unit E, for example, pattern inspection, defect inspection, and the like of the glass substrate 3 are performed based on image data acquired by various inspections of the glass substrate 3 using an inspection device 15 including a line sensor.
検査部Eでの検査が終了すると、ガラス基板3を吸着保持した搬送端部31,32が、同一の速度で同期して各スライダ25,26上を移動して、ガラス基板3を搬送方向Cに搬送する。この際には、基板浮上ブロック11及び基板載置台16に設けられたローラ53が、パターン領域Gの外方側に位置するガラス基板3の両端部の下面に接触してJ方向に回転する。
ガラス基板3が基板浮上ブロック11の出口側に到達すると、ガラス基板3の吸着保持が基板浮上ブロック11側に位置する搬送端部31,32から搬出用の基板載置台16側に位置する搬送端部33,34に受け渡されると共に、圧搾空気供給部46が搬出用の基板載置台16の空気孔18に圧搾エアーを供給する。これら搬送端部31,32から搬送端部33,34へのガラス基板3の受け渡しは、前述した搬送端部29,30から搬送端部31,32への受け渡しと同様に行われる。
When the inspection in the inspection unit E is completed, the conveyance end portions 31 and 32 holding the glass substrate 3 by suction move synchronously at the same speed and move on the sliders 25 and 26 to move the glass substrate 3 in the conveyance direction C. Transport to. At this time, the rollers 53 provided on the substrate floating block 11 and the substrate mounting table 16 contact the lower surfaces of both ends of the glass substrate 3 located on the outer side of the pattern region G and rotate in the J direction.
When the glass substrate 3 reaches the exit side of the substrate floating block 11, the suction end of the glass substrate 3 is transported from the transport end portions 31 and 32 positioned on the substrate floating block 11 side to the transport substrate end 16 side for transporting. The compressed air supply unit 46 supplies the compressed air to the air holes 18 of the substrate mounting table 16 for unloading. The transfer of the glass substrate 3 from the transfer end portions 31 and 32 to the transfer end portions 33 and 34 is performed in the same manner as the transfer from the transfer end portions 29 and 30 to the transfer end portions 31 and 32 described above.
ガラス基板3の受け渡しが終了すると、搬送端部33,34は、スライダ27,28上を移動してガラス基板3を搬送方向Cに搬送する。そして、ガラス基板3が搬出用の基板載置台16の上方に到達すると、各搬送端部33,34は、基板受け渡し基準位置に停止する。
基板載置台16においては、圧搾空気供給部46が基板載置台16の空気孔18への圧搾エアーの供給を停止する。この際には、真空吸着部47によるガラス基板3の下面に対する吸着を解除し、各アーム33a,34aを下降させると共に、リフトピン20を上昇させてガラス基板3を持ち上げる。これにより、ガラス基板3は、リフトピン20上に載置されることになる。搬出用搬送ロボット21は、ハンドアーム22を回転、前進及び後退させて、リフトピン20上から検査済みのガラス基板3を受け取りカセット内に収納する。
これ以降、複数のガラス基板3に対して基板載置台1への搬入、エアー搬送、検査及び基板載置台16からの搬出が順次繰り返される。
When the delivery of the glass substrate 3 is completed, the transport end portions 33 and 34 move on the sliders 27 and 28 to transport the glass substrate 3 in the transport direction C. Then, when the glass substrate 3 reaches above the substrate mounting table 16 for carrying out, the respective transport end portions 33 and 34 stop at the substrate delivery reference position.
In the substrate mounting table 16, the compressed air supply unit 46 stops supplying compressed air to the air holes 18 of the substrate mounting table 16. At this time, the suction to the lower surface of the glass substrate 3 by the vacuum suction portion 47 is released, the arms 33a and 34a are lowered, and the lift pins 20 are raised to lift the glass substrate 3. As a result, the glass substrate 3 is placed on the lift pins 20. The carry-out transfer robot 21 rotates, advances, and retracts the hand arm 22 to receive the inspected glass substrate 3 from the lift pins 20 and store it in the cassette.
Thereafter, the loading of the plurality of glass substrates 3 into the substrate mounting table 1, the air conveyance, the inspection, and the carrying out of the substrate mounting table 16 are sequentially repeated.
上記のように、この基板搬送装置によれば、ローラ53が基板載置台1,16及び基板浮上ブロック11の両側部より突出するガラス基板3の端部下面に接触して支持するため、ガラス基板3を搬送する際には、搬送方向Cに沿うガラス基板3の両端部が下方側に撓むことを防止でき、また、ガラス基板3が下方側に反っていてもガラス基板3の両端部を水平に矯正できる。
したがって、ガラス基板3の両端部が基板載置台1,16及び基板浮上ブロック11に接することなく安定して搬送でき、かつ、ガラス基板3が基板載置台1,16及び基板浮上ブロック11に接して傷つくことを防止できる。さらに、ガラス基板3のパターン領域Gの外側をローラ53が支持することにより、ガラス基板3のパターン領域Gを非接触状態で搬送することができるため、このパターン領域Gに対応するガラス基板3の下面が傷つくことも防止できる。
さらに、従来のように、ガラス基板3の両端部を挟持することもないため、ガラス基板3に対する外的負荷を軽減することもできる。
As described above, according to this substrate transport apparatus, since the roller 53 contacts and supports the lower surfaces of the end portions of the glass substrate 3 protruding from both sides of the substrate mounting tables 1 and 16 and the substrate floating block 11, the glass substrate 3, both end portions of the glass substrate 3 along the transport direction C can be prevented from bending downward, and even if the glass substrate 3 is warped downward, both end portions of the glass substrate 3 are Can be leveled.
Therefore, both ends of the glass substrate 3 can be stably conveyed without being in contact with the substrate mounting table 1, 16 and the substrate floating block 11, and the glass substrate 3 is in contact with the substrate mounting table 1, 16 and the substrate floating block 11. Can prevent injury. Furthermore, since the roller 53 supports the outside of the pattern area G of the glass substrate 3, the pattern area G of the glass substrate 3 can be conveyed in a non-contact state, and therefore the glass substrate 3 corresponding to the pattern area G It is possible to prevent the lower surface from being damaged.
Further, since both ends of the glass substrate 3 are not sandwiched as in the prior art, an external load on the glass substrate 3 can be reduced.
また、ガラス基板3が基板載置台1,16及び基板浮上ブロック11上を搬送方向Cに移動する際には、ローラ53がガラス基板3の搬送方向Cに転がるように回転するため、ガラス基板3とローラ53との滑り摩擦が非常に小さくなる。したがって、この滑り摩擦によってガラス基板3が傷つくことも防止できる。
さらに、ローラ53を交換する際には、複数のローラ53を取り付けた複数の支持ユニット51を基板載置台1,16や基板浮上ブロック11に対して着脱可能にすることにより、所望の支持ユニット51を簡単に交換でき、多数のローラ53を支持ユニット51毎に一括して取り替えることができる。したがって、ローラ53の交換を短時間で容易に行うことができる。
Further, when the glass substrate 3 moves on the substrate mounting tables 1, 16 and the substrate floating block 11 in the transport direction C, the roller 53 rotates so as to roll in the transport direction C of the glass substrate 3. The sliding friction between the roller 53 and the roller 53 becomes very small. Therefore, it is possible to prevent the glass substrate 3 from being damaged by this sliding friction.
Further, when the rollers 53 are replaced, a plurality of support units 51 to which a plurality of rollers 53 are attached can be attached to and detached from the substrate platform 1, 16 or the substrate floating block 11, thereby obtaining a desired support unit 51. Can be easily replaced, and a large number of rollers 53 can be replaced at once for each support unit 51. Therefore, the replacement of the roller 53 can be easily performed in a short time.
なお、上記の実施の形態においては、支持ユニット51にローラ53を回転可能に取り付けるとしたが、これに限ることはなく、例えば、図7に示すように、搬送方向Cに加えて基板載置台1,16及び基板浮上ブロック11の幅方向を含む多方向に回転可能な複数の玉55を支持ユニット51に取り付けるとしても良い。
すなわち、各玉55は、玉保持器57によって玉55の中心点を軸に回転可能に保持されており、この玉保持器57が支持ユニット51に固定されている。また、各玉55は、ローラ53の場合と同様に、基板載置台1,16及び基板浮上ブロック11の上面から微小に突出して配されており、ガラス基板3の下面に接触するようになっている。そして、基板浮上機構101により浮上したガラス基板3の下面の高さ位置は、ガラス基板3と玉55との接触位置と略同一となっている。
In the above embodiment, the roller 53 is rotatably attached to the support unit 51. However, the present invention is not limited to this. For example, as shown in FIG. A plurality of balls 55 that can be rotated in multiple directions including the width direction of 1 and 16 and the substrate floating block 11 may be attached to the support unit 51.
That is, each ball 55 is held by a ball holder 57 so as to be rotatable about the center point of the ball 55, and the ball holder 57 is fixed to the support unit 51. Further, each ball 55 is arranged so as to slightly protrude from the upper surfaces of the substrate mounting tables 1, 16 and the substrate floating block 11 as in the case of the roller 53, and comes into contact with the lower surface of the glass substrate 3. Yes. The height position of the lower surface of the glass substrate 3 levitated by the substrate levitating mechanism 101 is substantially the same as the contact position between the glass substrate 3 and the ball 55.
この構成においては、ガラス基板3が搬送方向Cに移動する場合だけでなく、搬送方向Cに直交する基板載置台1,16及び基板浮上ブロック11の幅方向に移動しても、ガラス基板3と玉55との間に滑り摩擦が発生しないため、ガラス基板3が傷つくことを確実に防止できる。特に、基板搬入側の基板載置台1又は基板浮上ブロック11上においてガラス基板3の位置調整を行う場合には、ガラス基板3をエアー浮上させた状態で目標とする基準位置に向けて、基板載置台1又は基板浮上ブロック11の搬送面に沿う方向に移動させる際に有効である。   In this configuration, not only when the glass substrate 3 moves in the transport direction C, but also when the glass substrate 3 moves in the width direction of the substrate mounting tables 1 and 16 and the substrate floating block 11 orthogonal to the transport direction C, Since sliding friction does not occur between the balls 55, the glass substrate 3 can be reliably prevented from being damaged. In particular, when the position of the glass substrate 3 is adjusted on the substrate loading table 1 or the substrate floating block 11 on the substrate carry-in side, the substrate mounting is directed toward the target reference position in a state where the glass substrate 3 is floated on the air. This is effective when moving the stage 1 or the substrate floating block 11 along the transport surface.
また、例えば、図8に示すように、搬送方向Cに沿って形成され、基板載置台1,16及び基板浮上ブロック11の上面側に露出する接触軌道59と、基板載置台1,16及び基板浮上ブロック11の上面側から離して形成され、接触軌道59の形成方向の両端を相互に連結する循環軌道61とを有する循環部材を基板載置台1,16及び基板浮上ブロック11に対して着脱可能な支持ユニット63に設け、これら接触軌道59及び循環軌道61に複数の玉55を配するとしても構わない。なお、各玉55は、隣接する他の玉55に接触するように配されることが好ましい。
この構成では、ガラス基板3を搬送方向Cに移動させた際に、ガラス基板3に接触している玉55が転がって接触軌道59の一端59aから他端59bまで移動することになる。そして、接触軌道59の他端59bに到達した玉55は、ガラス基板3から離れた循環軌道61を通り、接触軌道59の一端59a側に戻ることになる。
この構成においては、循環軌道61に位置している玉55がガラス基板3に接触しないため、1つの玉55が常時ガラス基板3に接触することがなくなる。したがって、ガラス基板3との間の転がり摩擦による玉55の摩耗を抑制することができ、玉55を交換することなく長時間連続して使用することができる。
Further, for example, as shown in FIG. 8, the contact track 59 formed along the transport direction C and exposed on the upper surface side of the substrate mounting table 1, 16 and the substrate floating block 11, the substrate mounting table 1, 16, and the substrate A circulating member that is formed apart from the upper surface side of the floating block 11 and has a circulation track 61 that interconnects both ends in the direction in which the contact track 59 is formed can be attached to and detached from the substrate platform 1 and 16 and the substrate floating block 11. A plurality of balls 55 may be arranged on the contact track 59 and the circulation track 61. Each ball 55 is preferably arranged so as to come into contact with another adjacent ball 55.
In this configuration, when the glass substrate 3 is moved in the transport direction C, the balls 55 in contact with the glass substrate 3 roll and move from one end 59a to the other end 59b of the contact track 59. Then, the ball 55 that has reached the other end 59b of the contact track 59 passes through the circulation track 61 away from the glass substrate 3 and returns to the one end 59a side of the contact track 59.
In this configuration, since the balls 55 positioned on the circulation track 61 do not contact the glass substrate 3, one ball 55 does not always contact the glass substrate 3. Therefore, the wear of the ball 55 due to rolling friction with the glass substrate 3 can be suppressed, and the ball 55 can be used continuously for a long time without replacement.
また、パターン領域Gの外方側に近接して位置するガラス基板3の両端部の支持は、ガラス基板3の下面に接触させるローラ53や玉55により行われるとしたが、これに限ることはなく、例えば、図9に示すように、パターン領域Gの外方側に近接して位置するガラス基板3の下面に圧搾エアーを吹き付けて支持するとしても良い。
すなわち、基板載置台1,16及び基板浮上ブロック11に対して着脱可能な支持ユニット64には、端部浮上機構65が形成されている。この端部浮上機構65は、基板載置台1,16及び基板浮上ブロック11の上面側に露出し、搬送方向Cに沿って並べられた複数の空気孔(空気吹出部)67と、これら複数の空気孔67と圧搾空気供給部46とを結ぶ連通路69とを備えている。
Moreover, although the support of the both ends of the glass substrate 3 located close to the outer side of the pattern region G is performed by the roller 53 and the ball 55 which are brought into contact with the lower surface of the glass substrate 3, it is not limited to this. Instead, for example, as shown in FIG. 9, compressed air may be blown onto and supported by the lower surface of the glass substrate 3 located close to the outer side of the pattern region G.
That is, the end floating mechanism 65 is formed in the support unit 64 that can be attached to and detached from the substrate mounting tables 1 and 16 and the substrate floating block 11. The end floating mechanism 65 is exposed to the upper surface side of the substrate mounting tables 1 and 16 and the substrate floating block 11, and has a plurality of air holes (air blowing portions) 67 arranged along the transport direction C, A communication passage 69 connecting the air hole 67 and the compressed air supply unit 46 is provided.
この構成においては、端部浮上機構65の各空気孔67からガラス基板3の下面に向けて圧搾エアーを吹き出すことにより、ガラス基板3の両端部も非接触で支持することが可能となり、ガラス基板3全体を非接触で搬送できるため、ガラス基板3が傷つくことを確実に防止できる。
また、複数の支持ユニット64には、それぞれ圧搾エアーを吹き出す空気孔67が複数設けられているため、各支持ユニット64を基板載置台1,16及び基板浮上ブロック11に対して着脱することにより、所望の支持ユニット64を簡単に交換でき、支持ユニット64毎に多数の空気孔67を一括して交換することができる。したがって、空気孔67の交換を短時間で容易に行うことができる。
In this configuration, it is possible to support both ends of the glass substrate 3 in a non-contact manner by blowing compressed air from the air holes 67 of the end portion floating mechanism 65 toward the lower surface of the glass substrate 3. Since the whole 3 can be conveyed in a non-contact manner, the glass substrate 3 can be reliably prevented from being damaged.
Further, since the plurality of support units 64 are provided with a plurality of air holes 67 for blowing compressed air, respectively, by attaching and detaching each support unit 64 to and from the substrate mounting table 1, 16 and the substrate floating block 11, A desired support unit 64 can be easily replaced, and a large number of air holes 67 can be replaced together for each support unit 64. Accordingly, the air hole 67 can be easily replaced in a short time.
なお、上記のように、圧搾エアーを利用してパターン領域Gの外方側に近接するガラス基板3の両端部を支持する場合には、搬送方向Cに沿う基板載置台1,16又は基板浮上ブロック11の両側部にガラス基板3の両端部に向けて圧搾エアーを吹き出す空気孔を直接形成しても構わない。
また、ガラス基板3の両端部を支持する圧搾エアーは、搬送方向Cに沿って配列された複数の空気孔から吹き出されることに限らず、例えば、搬送方向Cに沿って形成された細長いスリットから吹き出されるとしても構わない。
In addition, as mentioned above, when supporting the both ends of the glass substrate 3 which adjoins the outer side of the pattern area | region G using compressed air, the substrate mounting bases 1 and 16 or substrate floating along the conveyance direction C are carried out. You may directly form the air hole which blows out compressed air toward the both ends of the glass substrate 3 in the both sides of the block 11. FIG.
In addition, the compressed air that supports both ends of the glass substrate 3 is not limited to being blown out from the plurality of air holes arranged along the transport direction C, and is, for example, an elongated slit formed along the transport direction C. It does not matter if it is blown out from.
また、ガラス基板3の両端部に当たった圧搾エアーが基板載置台1,16又は基板浮上ブロック11の両側部の外方に抜けるように、圧搾エアーの吹き出し方向を設定しておくことは、ガラス基板3を安定して浮上させて搬送できるので好ましい。
さらに、ガラス基板3の両端部に吹き付ける圧搾エアーの圧力を基板浮上用の圧搾エアーの圧力よりも高くすることは、ガラス基板3の両端部を搬送面よりもさらに上方に持ち上げてガラス基板3の両端部の下方側への反りを水平に矯正できるので好ましい。
また、端部浮上機構65の圧搾エアーの圧力をガラス基板3の反り量や撓み量に応じて調整できるように構成することは、ガラス基板3の両端部を確実に搬送面よりも上方に持ち上げて安定して搬送できるので好ましい。
Moreover, it is possible to set the blowing direction of the compressed air so that the compressed air hitting both ends of the glass substrate 3 escapes to the outside of both sides of the substrate mounting table 1, 16 or the substrate floating block 11. It is preferable because the substrate 3 can be stably lifted and transported.
Furthermore, making the pressure of the compressed air blown to both ends of the glass substrate 3 higher than the pressure of the compressed air for floating the substrate lifts both ends of the glass substrate 3 further upward than the conveying surface. This is preferable because the downward warping of both ends can be corrected horizontally.
Moreover, it is configured so that the pressure of the compressed air of the end portion floating mechanism 65 can be adjusted according to the amount of warpage or the amount of deflection of the glass substrate 3, so that both end portions of the glass substrate 3 are reliably lifted above the conveyance surface. And can be stably conveyed.
また、上記の実施の形態においては、ガラス基板3が、基板載置台1,16及び基板浮上ブロック11の空気孔4,12,18から吹き出す圧搾エアーにより浮上するとしたが、これに限ることはなく、例えば、静電方式により浮上するとしても良い。この構成の場合には、ガラス基板に対する除電を行うと良い。
また、ガラス基板3を搬送する搬送端部29〜34は、基板載置台1,16及び基板浮上ブロック11の両端部に設けられたスライダ23〜28上を移動するとしたが、これに限ることはない。すなわち、例えば、基板載置台1,16及び基板浮上ブロック11の一対の溝5,13,19にスライダを配し、このスライダに搬送端部を移動可能に設けるとしても構わない。
Moreover, in said embodiment, although the glass substrate 3 floated by the compressed air which blows off from the air holes 4, 12, 18 of the substrate mounting bases 1 and 16 and the substrate floating block 11, it is not restricted to this. For example, it may be levitated by an electrostatic method. In the case of this configuration, it is preferable to perform static elimination on the glass substrate.
Moreover, although the conveyance end parts 29-34 which convey the glass substrate 3 moved on the sliders 23-28 provided in the both ends of the substrate mounting bases 1 and 16 and the substrate floating block 11, it is not restricted to this. Absent. That is, for example, a slider may be arranged in the pair of grooves 5, 13, 19 of the substrate mounting tables 1, 16 and the substrate floating block 11, and the transport end portion may be movably provided on the slider.
さらに、各吸着パッド29b〜34bの吸着位置は、ガラス基板3の搬送方向Cに向かうガラス基板3の前方側としたが、これに限ることはなく、例えば、ガラス基板3の後方側としても良い。また、例えば、各吸着パッド29b〜34bは、搬送方向Cの中央部に位置するガラス基板3の幅方向端部に吸着保持しても構わない。また、ガラス基板3を搬送する際には、ガラス基板3の幅方向の各端部に複数の吸着パッドを吸着させるとしてもよい。   Furthermore, although the suction position of each suction pad 29b-34b was made into the front side of the glass substrate 3 which goes to the conveyance direction C of the glass substrate 3, it is not restricted to this, For example, it is good also as the back side of the glass substrate 3. . Further, for example, each of the suction pads 29b to 34b may be sucked and held at the end portion in the width direction of the glass substrate 3 located in the center portion in the transport direction C. Further, when the glass substrate 3 is transported, a plurality of suction pads may be sucked to each end portion in the width direction of the glass substrate 3.
また、吸着パッドによるガラス基板3の吸着保持位置は、パターン領域Gから外れた部分であれば、ガラス基板3の上面、若しくは上面及び下面であってもよい。
さらに、基板載置台1へのガラス基板3の載置や基板載置台16からのガラス基板3の取り出しは、搬送ロボット7,21の他に如何なる機構を用いてもよいし、他のラインからエアー搬送等の基板浮上搬送手段であっても構わない。
Further, the suction holding position of the glass substrate 3 by the suction pad may be the upper surface or the upper surface and the lower surface of the glass substrate 3 as long as it is a portion deviated from the pattern region G.
Furthermore, any mechanism other than the transfer robots 7 and 21 may be used to place the glass substrate 3 on the substrate platform 1 and to remove the glass substrate 3 from the substrate platform 16. Substrate floating conveyance means such as conveyance may be used.
以上、本発明の実施形態について図面を参照して詳述したが、具体的な構成はこの実施形態に限られるものではなく、本発明の要旨を逸脱しない範囲の設計変更等も含まれる。   As mentioned above, although embodiment of this invention was explained in full detail with reference to drawings, the concrete structure is not restricted to this embodiment, The design change etc. of the range which does not deviate from the summary of this invention are included.
この発明の一実施形態に係る基板搬送装置を示す概略上面図である。It is a schematic top view which shows the board | substrate conveyance apparatus which concerns on one Embodiment of this invention. 図1の基板搬送装置の概略側面図である。It is a schematic side view of the board | substrate conveyance apparatus of FIG. 図1の基板搬送装置において、複数のローラを備えた支持ユニットを示しており、(a)は、拡大側面図であり、(b)は、拡大正断面図である。FIG. 2 shows a support unit including a plurality of rollers in the substrate transfer apparatus of FIG. 1, (a) is an enlarged side view, and (b) is an enlarged front sectional view. 図1の基板搬送装置において、基板載置台上にガラス基板を浮上させた状態を示す概略側面図である。FIG. 2 is a schematic side view showing a state where a glass substrate is levitated on a substrate mounting table in the substrate transfer apparatus of FIG. 1. 図1の基板搬送装置において、ガラス基板のエアー搬送動作を示す概略側面図である。FIG. 2 is a schematic side view showing an air transfer operation of a glass substrate in the substrate transfer apparatus of FIG. 1. 図1の基板搬送装置において、ガラス基板のエアー搬送動作を示す概略側面図である。FIG. 2 is a schematic side view showing an air transfer operation of a glass substrate in the substrate transfer apparatus of FIG. 1. この発明の他の実施形態に係る基板搬送装置において、複数の玉を備えた支持ユニットを示しており、(a)は、拡大側面図であり、(b)は、拡大正断面図である。In the board | substrate conveyance apparatus which concerns on other embodiment of this invention, the support unit provided with the some ball is shown, (a) is an enlarged side view, (b) is an enlarged front sectional view. この発明の他の実施形態に係る基板搬送装置において、接触軌道及び循環軌道に配された複数の玉を備えた支持ユニットを示しており、(a)は、拡大側断面図であり、(b)は、拡大正断面図である。In the board | substrate conveyance apparatus which concerns on other embodiment of this invention, the support unit provided with the some ball distribute | arranged to the contact track | orbit and the circulation track | orbit is shown, (a) is an expanded sectional side view, (b ) Is an enlarged front sectional view. この発明の他の実施形態に係る基板搬送装置において、空気吹出部を備えた支持ユニットを示しており、(a)は、拡大側断面図であり、(b)は、拡大正断面図である。In the board | substrate conveyance apparatus which concerns on other embodiment of this invention, the support unit provided with the air blowing part is shown, (a) is an expanded sectional side view, (b) is an expanded front sectional view. .
符号の説明Explanation of symbols
1,16 基板載置台(基板浮上ブロック)
3 ガラス基板
11 基板浮上ブロック
49 端部支持機構
51,63,64 支持ユニット
53 ローラ(回転支持部材)
55 玉
67 空気孔(空気吹出部)
102 搬送機構
C 搬送方向
G パターン領域

1,16 Substrate mounting table (Substrate floating block)
3 Glass substrate 11 Substrate floating block 49 End support mechanism 51, 63, 64 Support unit 53 Roller (rotation support member)
55 balls 67 Air hole (air blowing part)
102 Conveying mechanism C Conveying direction G Pattern area

Claims (6)

  1. 基板を非接触状態に浮上させる基板浮上ブロックと、
    前記基板浮上ブロック上に浮上した前記基板の端部を吸着保持して搬送する搬送機構と、
    前記搬送機構により搬送される前記基板の下面を転がりながら回転する複数の回転支持部材を前記基板の搬送方向に沿う前記基板浮上ブロックの側部に設けることで、前記基板浮上ブロック上において搬送される前記基板の端部を支持する端部支持機構とを備えることを特徴とする基板搬送装置。
    A substrate floating block for floating the substrate in a non-contact state;
    A transport mechanism that sucks and holds the end of the substrate that has floated on the substrate floating block; and
    A plurality of rotation support members that rotate while rolling on the lower surface of the substrate conveyed by the conveyance mechanism are provided on the side of the substrate floating block along the substrate conveyance direction, so that the substrate is conveyed on the substrate floating block. A substrate transfer apparatus comprising: an end support mechanism that supports an end of the substrate.
  2. 前記回転支持部材が、前記搬送方向に回転可能なローラであることを特徴とする請求項1に記載の基板搬送装置。 The substrate transport apparatus according to claim 1 , wherein the rotation support member is a roller that is rotatable in the transport direction.
  3. 前記回転支持部材が、回転自在に支持された玉であることを特徴とする請求項1に記載の基板搬送装置。 The substrate transfer apparatus according to claim 1 , wherein the rotation support member is a ball that is rotatably supported .
  4. 前記端部支持機構が、複数の前記玉を前記基板の下面に対向する前記浮上ブロックの搬送面上に露出させ、前記基板の下面上を転がって移動させる接触軌道と、該接触軌道の両端に連結して前記玉を前記接触軌道へ循環させる循環軌道とを有する循環部材を備えることを特徴とする請求項3に記載の基板搬送装置。 The end support mechanism exposes a plurality of the balls on the conveying surface of the floating block facing the lower surface of the substrate and rolls and moves the ball on the lower surface of the substrate, and at both ends of the contact track. The substrate transfer apparatus according to claim 3 , further comprising a circulation member having a circulation track that connects and circulates the balls to the contact track.
  5. 前記端部支持機構が複数のユニットからなり、
    各ユニットが、前記基板浮上ブロックに対して着脱自在に設けられていることを特徴とする請求項1に記載の基板搬送装置。
    The end support mechanism is composed of a plurality of units,
    The substrate transfer apparatus according to claim 1, wherein each unit is provided detachably with respect to the substrate floating block.
  6. 前記搬送機構が、前記基板の搬送方向に沿って設けられたスライダと、当該スライダ対して前記搬送方向に移動可能に設けられると共に前記基板の端部を吸着保持する搬送端部とを備えることを特徴とする請求項1に記載の基板搬送装置。The transport mechanism includes a slider provided along the transport direction of the substrate, and a transport end that is provided so as to be movable in the transport direction with respect to the slider and that holds the end of the substrate by suction. The substrate transfer apparatus according to claim 1, wherein
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