JP4373175B2 - Substrate transfer device - Google Patents

Description

  The present invention relates to a substrate transfer apparatus that floats and transfers a large substrate.

In recent years, as the screen of a flat panel display (hereinafter abbreviated as “FPD”) such as a liquid crystal display (hereinafter abbreviated as “LCD”) or a plasma display panel (hereinafter abbreviated as “PDP”) becomes larger, glass used for FPDs. The size of the substrate tends to increase year by year.
Conventionally, as a substrate transport apparatus for transporting a large glass substrate in an FPD manufacturing process, a device that blows compressed air from the air blowing block (substrate floating block) onto the lower surface of the glass substrate to float the glass substrate on the air blowing block. (For example, refer to Patent Document 1). In the substrate transport apparatus having this configuration, the substrate can be easily transported without damaging the surface of the glass substrate.

In addition, the substrate transport device includes a support roller mechanism that supports both ends in the width direction orthogonal to the traveling direction of the glass substrate from the lower surface side, and a pair of regulating roller mechanisms that contact the end surface in the width direction of the glass substrate. ing. The regulating roller mechanism regulates the position in the width direction by sandwiching the end portion of the glass substrate protruding from the end portion (side end portion) in the width direction of the air blowing block. Further, the support roller mechanism is disposed in the vicinity of the restriction roller mechanism.
Japanese Unexamined Patent Publication No. 2000-193604 (FIGS. 3 and 4)

However, regulating roller mechanism, because apart from the air outlet block sandwiching the end portion in the width direction of the glass substrate, when to float in compressed air, the end portion of the glass substrate is held by the regulating roller mechanism The glass substrate surface that is levitated by the compressed air is bent, and the entire glass substrate cannot be held horizontally and conveyed.
Further, since the glass substrate is sandwiched by the regulating roller mechanism, a large addition is added to the end of the glass substrate, and the glass substrate may be damaged.
Further, since the support roller mechanism is disposed close to the restriction roller mechanism, the glass substrate may be bent downward between the side end portion of the air blowing block and the support roller mechanism. Here, since the flying height of the glass substrate by the compressed air is as small as 0.2 mm, for example, even if the glass substrate is bent as described above, the glass substrate is moved to the side end portion of the air blowing block by this bending. There was a possibility that the glass substrate would be damaged by contact.
The present invention has been made in view of the above-described circumstances. When the substrate is lifted and transported, the external load on the substrate can be reduced, and the substrate can be transported horizontally without contacting the air blowing block. An object of the present invention is to provide a substrate transfer device.

In order to achieve the above object, the present invention provides the following means.
The invention according to claim 1, conveying a substrate floating blocks for floating the substrate in a non-contact state, a transport mechanism for transporting by sucking and holding the end portion of the substrate that has emerged in the substrate floating on the block, by the transfer mechanism The plurality of rotation support members that rotate while rolling the lower surface of the substrate to be provided are provided on the side of the substrate floating block along the substrate transfer direction, so that the end of the substrate transferred on the substrate floating block And an end support mechanism for supporting the substrate.

The invention according to claim 2 provides the substrate transport apparatus according to claim 1, wherein the rotation support member is a roller that is rotatable in the transport direction .

The invention according to claim 3, the substrate transport apparatus of claim 1, wherein the rotary support member, to provide a substrate transfer apparatus which is a rotatably supported ball.

The invention according to claim 4 is the substrate transfer apparatus according to claim 3 , wherein the end support mechanism exposes a plurality of the balls on a transfer surface of the floating block facing a lower surface of the substrate, Provided is a substrate transport apparatus comprising a circulation member having a contact track that rolls and moves on a lower surface of a substrate, and a circulation track that is connected to both ends of the contact track and circulates the balls to the contact track. To do.

According to a fifth aspect of the present invention, in the substrate transfer apparatus according to the first aspect, the end support mechanism includes a plurality of units, and each unit is detachably provided on the substrate floating block. The board | substrate conveyance apparatus characterized by these is provided.

The invention according to claim 6 is the substrate transfer apparatus according to claim 1, wherein the transfer mechanism is provided so as to be movable in the transfer direction with respect to the slider provided along the transfer direction of the substrate. And a transport end portion that sucks and holds the end portion of the substrate.

  According to the substrate transfer apparatus of the present invention, since the end support mechanism is disposed at both sides of the substrate floating block and at positions close to both sides, the substrate bends downward at both sides of the substrate floating block. It is possible to prevent the substrate from being damaged by contacting the substrate floating block. Moreover, even if the glass substrate 3 is warped downward, both ends of the glass substrate can be corrected horizontally.

  Further, according to the end support mechanism of the present invention, when the substrate is supported by the rotation support member, the roller or ball that is the rotation support member rolls on the lower surface of the substrate when the substrate is transported. The sliding friction between the ball and the substrate is reduced, and the sliding friction can prevent the substrate from being damaged.

  Further, according to the rotation support member of the present invention, even when the ball is used, even if the substrate moves in the width direction orthogonal to the conveyance direction, the ball can contact the substrate and rotate freely, so that the substrate is scratched. It can be surely prevented from sticking.

  Furthermore, according to the rotation support member of the present invention, since a plurality of balls are circulated in the contact track and the circulation track, wear of the ball due to rolling friction with the substrate can be suppressed. It can be used continuously for a long time without any problems.

  Furthermore, according to the end support mechanism of the present invention, a desired unit can be easily replaced by using a plurality of units that can be attached to and detached from the substrate floating block.

1 to 6 show an embodiment according to the present invention, and the embodiment described here is a case where the present invention is applied to an in-line inspection in a manufacturing process of an FPD such as a large LCD or PDP. It is.
A substrate mounting table 1 for carrying in that constitutes a substrate transporting device is provided on a vibration isolation table 2, on which a glass substrate 3 carried on the upper surface (conveying surface) is placed. The dimension of the substrate mounting table 1 in the width direction (the direction perpendicular to the conveyance direction C of the glass substrate 3) is shorter than the width of the glass substrate 3. The substrate mounting table 1 is configured as a substrate floating block in which a plurality of air holes 4 for air blowing are provided on the upper surface thereof to float the glass substrate 3 in the air. The air holes 4 are provided substantially uniformly over the entire surface of the substrate mounting table 1.

In addition, two grooves 5 are formed on the upper surface of the substrate mounting table 1 along the transport direction C at a predetermined interval. Further, the substrate mounting table 1 is provided with a plurality (9 in the illustrated example) of lift pins 6 that are moved up and down when the glass substrate 3 is carried in.
The substrate mounting table 1 is divided into long and narrow rectangular blocks, and the width in the width direction of the substrate mounting table 1 can be changed according to the glass substrates of various sizes by adjusting the interval between the blocks (grooves 5). You may do it. In this case, the width dimension of the substrate platform 1 can be arbitrarily adjusted by a width adjustment mechanism (not shown) that slides the blocks located at both ends of the substrate platform 1 in the width direction.

On the one end side of the substrate platform 1 along the transport direction C (on the left side in the transport direction C), a transport robot 7 for loading is provided. The carry-in transfer robot 7 takes out the uninspected glass substrate 3 from the cassette and carries it onto the substrate mounting table 1 while rotating, advancing and retreating the two hand arms 8 by a multi-joint arm (not shown).
On the exit side of the substrate mounting table 1, a transport frame 9 is arranged in parallel along the transport direction C. The transport frame 9 is formed to have a length from the carry-in side to the carry-out side of the glass substrate 3. This transport base 9 is placed on a vibration isolation base 10.

A substrate floating block (inspection stage) 11 is provided on the upper surface of the transport frame 9 over the entire length of the transport frame 9. The dimension in the width direction of the substrate floating block 11 is shorter than the width of the glass substrate 3 as in the substrate mounting table 1. Similar to the substrate mounting table 1, a plurality of air holes 12 for blowing up air are also provided on the upper surface (conveying surface) of the substrate floating block 11. These air holes 12 are provided substantially uniformly over the entire surface of the substrate floating block 11.
Further, two grooves 13 are formed on the upper surface of the substrate floating block 11 along the transport direction C at a predetermined interval. The height of the upper surface of the substrate floating block 11 is substantially the same as the height of the upper surface of the substrate mounting table 1.
Note that, similarly to the substrate mounting table 1, the substrate floating block 11 may be configured such that the dimension in the width direction of the substrate floating block 11 can be changed by adjusting the interval between each of the divided blocks (grooves 13). Good.

  An inspection unit E that performs various inspections of the glass substrate 3 transported at a constant speed is provided at a substantially intermediate position of the transport base 9 along the transport direction C. In the inspection section E, various inspection devices 15 such as a portal arm 14, a microscope, a line sensor, and a CCD camera are mounted. In the inspection unit E, for example, image data of the glass substrate 3 is acquired by a plurality of line sensors arranged in the width direction, and image processing or the like is performed on the image data to perform pattern inspection or defect inspection of the glass substrate 3. .

On the exit side of the transport gantry 9, a substrate mounting table 16 for unloading is provided in parallel along the transport direction C. The substrate mounting table 16 is provided on the vibration isolation table 17 and is temporarily mounted to carry out the glass substrate 3 conveyed from the substrate floating block 11. The width dimension of the substrate mounting table 16 is shorter than the width of the glass substrate 3 in the same manner as the substrate mounting table 1 and the substrate floating block 11. Similar to the substrate mounting table 1 and the substrate floating block 11, the substrate mounting table 16 is configured as a substrate floating block in which a plurality of air holes 18 for air blowing are provided on the upper surface (conveying surface) to float the glass substrate 3 in the air. Has been. The air holes 18 are provided substantially uniformly over the entire surface of the substrate mounting table 16.
Further, two grooves 19 are formed on the substrate mounting table 16 along the transport direction C at a predetermined interval. Furthermore, the substrate mounting table 16 is provided with a plurality of (9 in the illustrated example) lift pins 20 that move up and down when the glass substrate 3 is unloaded. The height of the upper surface of the substrate mounting table 16 is substantially the same as the height of the upper surface of the substrate floating block 11.
Note that, similarly to the substrate mounting table 1, the substrate mounting table 16 can be adjusted in the width direction of the substrate mounting table 16 by adjusting the interval between the blocks (grooves 19) divided into a plurality of blocks. I do not care.

On the one end side in the width direction of the substrate platform 16, a carry-out transfer robot 21 is provided. The unloading transfer robot 21 stores the inspected glass substrate 3 in a cassette while rotating, advancing and retreating two hand arms 22 by a multi-joint arm (not shown).
A plurality of sliders 23 to 28 are provided on the transport platform 9 and the vibration isolation table 17 in parallel with each other along the transport direction C as a pair, with the substrate floating block 11 and the substrate mounting table 16 interposed therebetween.
The two sets of sliders 23, 24, 27, and 28 located at both ends in the transport direction C are provided on the outer side in the width direction than the pair of sliders 25 and 26 located in the intermediate part in the transport direction C.

  A pair of sliders 23 and 24 arranged between the exit side of the substrate mounting table 1 and the intermediate portion of the transport platform 9 are provided with transport end portions 29 and 30 that are movable in the transport direction C and in the opposite direction, respectively. It has been. The transport end portions 29 and 30 are provided at arms 29a and 30a that are vertically extendable and rotatable, and at the tip ends of the arms 29a and 30a, and are provided at both ends of the glass substrate 3 along the transport direction C. Suction pads 29b, 30b for sucking and holding the lower surface of the glass substrate 3 positioned, and plungers provided inside the transport end portions 29, 30 for moving the arms 29a, 30a in the transport direction C and the vertical direction. .

Further, the pair of sliders 25 and 26 arranged between the intermediate part of the transport base 9 and the outlet side are also provided with transport end portions 31 and 32 that are movable in the transport direction C and in the opposite direction, respectively. . Each conveyance end part 31 and 32 is provided with arms 31a and 32a and suction pads 31b and 32b, similarly to the conveyance end parts 29 and 30 described above.
Further, the pair of sliders 27 and 28 arranged between the exit side of the transport platform 9 and the exit side of the substrate mounting table 16 also have transport end portions 33 and 34 that can move in the transport direction C and in the opposite direction. Each is provided. Each conveyance end 33, 34 is provided with arms 33a, 34a and suction pads 33b, 34b, similarly to the conveyance ends 29, 30 described above.

  The two sets of sliders 23, 24, 27, and 28 located at both ends in the transport direction C are provided on the outer side in the width direction than the pair of sliders 25 and 26 located in the intermediate part in the transport direction C. Therefore, the positions in the width direction of the suction pads 29b, 30b, 33b, and 34b of the sliders 23, 24, 27, and 28 located at both ends are the positions of the suction pads 31b and 32b of the sliders 25 and 26 located at the intermediate part. The length of each arm 29a, 30a, 33a, 34a is set so as to be the same as the position in the width direction.

In addition to the above-described configuration, the substrate transfer apparatus includes a compressed air supply unit 46, a vacuum suction unit 47, a movement control unit 48, and an end support mechanism 49.
The compressed air supply unit 46 communicates with the respective gaps of the substrate mounting table 1 for loading, the substrate floating block 11 and the substrate mounting table 16 for unloading through a pipe, and selectively supplies compressed air to each of the gaps. The compressed air is blown out from the air holes 4, 12, 18. The glass substrate 3 can be floated on the substrate mounting table 1 for loading, the substrate floating block 11 or the substrate mounting table 16 for unloading by the compressed air. Further, the compressed air supply unit 46 blows up air having a charge removing effect from each of the air holes 4, 12, 18, for example, air ionized into positive ions or negative ions. These air holes 4, 12, 18 and the compressed air supply unit 46 constitute a substrate floating mechanism 101.
The vacuum suction portion 47 communicates with the suction pads 29b to 34b through piping, and selectively sucks and holds the glass substrate 3 by vacuuming the suction pads 29b to 34b. The movement control unit 48 performs movement control of the conveyance end portions 29 to 34 on the sliders 23 to 28.
The sliders 23 to 28, the conveyance end portions 29 to 34, the vacuum suction unit 47, and the movement control unit 48 constitute a conveyance mechanism 102 that moves the glass substrate 3 in the conveyance direction C.

The end support mechanism 49 is provided close to both ends (both sides) of the substrate mounting tables 1 and 16 and the substrate floating block 11 along the transport direction C, and supports both ends of the glass substrate 3 from the lower surface side. It is. The end support mechanism 49 includes a plurality of support units 51 that are detachably attached to both sides of the substrate mounting tables 1 and 16 and the substrate floating block 11.
As shown in FIG. 3, a plurality of rollers (rotation support members) 53 are rotatably attached to each support unit 51, and each roller 53 has a part of its peripheral surface on the substrate platform 1, 16. And it is arranged so as to protrude minutely from the upper surface of the substrate floating block 11. The protruding length of each roller 53 is set to be the flying height of the glass substrate 3 by compressed air. The rollers 53 arranged adjacent to each other in the transport direction C are made of a wear-resistant material whose peripheral surface that comes into contact with the glass substrate 3 is softer than the glass substrate 3 such as synthetic resin, and is arranged so as not to contact each other. Has been. When the glass substrate 3 moves in the transport direction C, the rollers 53 rotate in a direction (J direction) that rolls the lower surface of the glass substrate 3. The roller 53 preferably has a width dimension that is thin enough to obtain a frictional force that does not slip with respect to the glass substrate 3.

  The glass substrate 3 is formed with a plurality of pattern areas G (for example, four surfaces and six surfaces) constituting the display, and the width dimensions of the substrate mounting tables 1 and 16 and the substrate floating block 11 are determined in the conveyance direction C. Is set to be substantially the same as the outermost width dimension of the pattern region G along the line. As a result, both end portions of the glass substrate 3 where the pattern region G is not formed protrude from both side portions of the substrate mounting tables 1 and 16 and the substrate floating block 11. Each roller 53 is densely arranged along both side portions of the substrate mounting tables 1 and 16 and the substrate floating block 11, and supports both end portions of the glass substrate 3 from the lower surface side.

Next, the operation of the substrate transport apparatus configured as described above will be described.
When placing the glass substrate 3 on the substrate platform 1, as shown in FIGS. 1 and 2, the transport end portions 29 and 30 on the sliders 23 and 24 positioned on the carry-in side are placed on the substrate platform 1 side in advance. Move and wait.
From this state, the carry-in transfer robot 7 rotates, advances, and retracts the hand arm 8 to take out the uninspected glass substrate 3 from the cassette, and transfers the glass substrate 3 above the substrate mounting table 1. Simultaneously with this conveyance, each lift pin 6 of the substrate mounting table 1 rises. Next, the carry-in transfer robot 7 lowers the hand arm 8 to place the glass substrate 3 on each lift pin 6. Then, when each lift pin 6 is lowered, the glass substrate 3 is placed on the substrate platform 1.
In this state, since the width dimension of the glass substrate 3 is longer than the width of the substrate mounting table 1, both end portions of the glass substrate 3 along the transport direction C protrude from both side portions of the substrate mounting table 1. Further, in this state, as shown in FIG. 3B, the lower surface of the end portion of the glass substrate 3 positioned outside the outermost both end portions of the pattern region G comes into contact with the roller 53.

  When the placement of the glass substrate 3 is completed, the transport end portions 29 and 30 located on the carry-in side raise the arms 29a and 30a, respectively, and the vacuum pads 47b and 30b are lifted by the vacuum suction unit 47 as shown in FIG. The suction pads 29b and 30b are sucked to the lower surface of the glass substrate 3. The suction positions of the suction pads 29b and 30b are further outward in the width direction of the glass substrate 3 than the contact position of the roller 53 described above, and in front of the glass substrate 3 in the transport direction C. In this state, the suction pads 29 b and 30 b are slightly raised from the height of the upper surface of the substrate mounting table 1 and are positioned at substantially the same height as the contact position between the glass substrate 3 and the roller 53.

Simultaneously with the adsorption of the glass substrate 3, the compressed air supply unit 46 supplies compressed air to the gap between the substrate mounting table 1 for loading and the substrate floating block 11 through the pipe, and blows the compressed air from the air holes 4 and 12. Raise it. At this time, since ionized compressed air having a charge eliminating effect is blown onto the glass substrate 3, static electricity of the glass substrate 3 can be neutralized and charging of the glass substrate 3 can be prevented.
At this time, an air layer is formed between the substrate mounting table 1 and the glass substrate 3, and the glass substrate 3 floats from the upper surface of the substrate mounting table 1. The air blown from the air holes 4 flows through the grooves 5 of the substrate mounting table 1 without staying in the air layer. For this reason, the glass substrate 3 floats on the substrate mounting table 1 while maintaining flatness. In addition, since the roller 53 is substantially the same as the height of the lower surface of the glass substrate 3 that has been levitated by the compressed air, both end portions of the glass substrate 3 remain at the respective rollers 53 even if the glass substrate 3 warps downward or bends. The glass substrate 3 floats without contacting the transport surface of the substrate mounting table 1.

  Thereafter, as shown in FIG. 5, the movement control unit 48 synchronizes the two transport end portions 29 and 30 having the suction pads 29 b and 30 b sucked on the lower surface of the glass substrate 3 at the same speed, and moves each slider 23, 24 is moved in the transport direction C. As a result, the glass substrate 3 is transported from the substrate mounting table 1 to the substrate floating block 11 by the transport end portions 29 and 30 in a state where the glass substrate 3 floats and does not contact the upper surfaces of the substrate mounting table 1 and the substrate floating block 11. . At this time, the rollers 53 provided on the substrate mounting table 1 and the substrate floating block 11 are in contact with the lower surfaces of both ends of the glass substrate 3 located on the outer side of the pattern region G and rotate in the J direction. To do.

When the conveyance of the glass substrate 3 to the substrate floating block 11 is completed, the compressed air supply unit 46 stops the supply of the compressed air to the air holes 4 of the substrate mounting table 1 for loading. At this time, the movement control unit 48 moves the conveyance end portions 31 and 32 on the two sliders 25 and 26 located at the intermediate portion in the direction opposite to the conveyance direction C.
When the transport end portions 31 and 32 reach below the glass substrate 3, they stop at the substrate delivery reference position on the sliders 25 and 26, raise the arms 31 a and 32 a, and the suction pad 31 b is lifted by the vacuum suction portion 47. , 32b is adsorbed to the lower surface of the glass substrate 3. The suction positions of these suction pads 31 b and 32 b are further outward in the width direction of the glass substrate 3 than the contact position of the roller 53 and on the front side of the glass substrate 3 in the transport direction C.
When the suction pads 31b and 32b are attracted to the glass substrate 3, the suction of the suction pads 29b and 30b of the transport end portions 29 and 30 by the vacuum suction portion 47 is released, and the arms 29a and 30a are lowered. Accordingly, the suction holding of the glass substrate 3 is transferred from the transport end portions 29 and 30 to the transport end portions 31 and 32. Thereafter, the two transport end portions 29 and 30 move on the sliders 23 and 24 in the direction opposite to the transport direction C (rearward), and stop at the substrate transfer reference position of the substrate mounting table 1 for loading. stand by.

When the delivery of the glass substrate 3 is completed, the transport end portions 31 and 32 holding the glass substrate 3 by suction move in the transport direction C on the sliders 25 and 26 in synchronization with each other at the same speed as shown in FIG. To do. At this time, the rollers 53 provided close to both sides of the substrate floating block 11 come into contact with the lower surfaces of both ends of the glass substrate 3 located on the outer side of the pattern region G and rotate in the J direction. . As a result, the glass substrate 3 floating on the substrate floating block 11 is pulled by the transport end portions 31 and 32 and reaches the inspection unit E.
In the inspection unit E, for example, pattern inspection, defect inspection, and the like of the glass substrate 3 are performed based on image data acquired by various inspections of the glass substrate 3 using an inspection device 15 including a line sensor.

When the inspection in the inspection unit E is completed, the conveyance end portions 31 and 32 holding the glass substrate 3 by suction move synchronously at the same speed and move on the sliders 25 and 26 to move the glass substrate 3 in the conveyance direction C. Transport to. At this time, the rollers 53 provided on the substrate floating block 11 and the substrate mounting table 16 contact the lower surfaces of both ends of the glass substrate 3 located on the outer side of the pattern region G and rotate in the J direction.
When the glass substrate 3 reaches the exit side of the substrate floating block 11, the suction end of the glass substrate 3 is transported from the transport end portions 31 and 32 positioned on the substrate floating block 11 side to the transport substrate end 16 side for transporting. The compressed air supply unit 46 supplies the compressed air to the air holes 18 of the substrate mounting table 16 for unloading. The transfer of the glass substrate 3 from the transfer end portions 31 and 32 to the transfer end portions 33 and 34 is performed in the same manner as the transfer from the transfer end portions 29 and 30 to the transfer end portions 31 and 32 described above.

When the delivery of the glass substrate 3 is completed, the transport end portions 33 and 34 move on the sliders 27 and 28 to transport the glass substrate 3 in the transport direction C. Then, when the glass substrate 3 reaches above the substrate mounting table 16 for carrying out, the respective transport end portions 33 and 34 stop at the substrate delivery reference position.
In the substrate mounting table 16, the compressed air supply unit 46 stops supplying compressed air to the air holes 18 of the substrate mounting table 16. At this time, the suction to the lower surface of the glass substrate 3 by the vacuum suction portion 47 is released, the arms 33a and 34a are lowered, and the lift pins 20 are raised to lift the glass substrate 3. As a result, the glass substrate 3 is placed on the lift pins 20. The carry-out transfer robot 21 rotates, advances, and retracts the hand arm 22 to receive the inspected glass substrate 3 from the lift pins 20 and store it in the cassette.
Thereafter, the loading of the plurality of glass substrates 3 into the substrate mounting table 1, the air conveyance, the inspection, and the carrying out of the substrate mounting table 16 are sequentially repeated.

As described above, according to this substrate transport apparatus, since the roller 53 contacts and supports the lower surfaces of the end portions of the glass substrate 3 protruding from both sides of the substrate mounting tables 1 and 16 and the substrate floating block 11, the glass substrate 3, both end portions of the glass substrate 3 along the transport direction C can be prevented from bending downward, and even if the glass substrate 3 is warped downward, both end portions of the glass substrate 3 are Can be leveled.
Therefore, both ends of the glass substrate 3 can be stably conveyed without being in contact with the substrate mounting table 1, 16 and the substrate floating block 11, and the glass substrate 3 is in contact with the substrate mounting table 1, 16 and the substrate floating block 11. Can prevent injury. Furthermore, since the roller 53 supports the outside of the pattern area G of the glass substrate 3, the pattern area G of the glass substrate 3 can be conveyed in a non-contact state, and therefore the glass substrate 3 corresponding to the pattern area G It is possible to prevent the lower surface from being damaged.
Further, since both ends of the glass substrate 3 are not sandwiched as in the prior art, an external load on the glass substrate 3 can be reduced.

Further, when the glass substrate 3 moves on the substrate mounting tables 1, 16 and the substrate floating block 11 in the transport direction C, the roller 53 rotates so as to roll in the transport direction C of the glass substrate 3. The sliding friction between the roller 53 and the roller 53 becomes very small. Therefore, it is possible to prevent the glass substrate 3 from being damaged by this sliding friction.
Further, when the rollers 53 are replaced, a plurality of support units 51 to which a plurality of rollers 53 are attached can be attached to and detached from the substrate platform 1, 16 or the substrate floating block 11, thereby obtaining a desired support unit 51. Can be easily replaced, and a large number of rollers 53 can be replaced at once for each support unit 51. Therefore, the replacement of the roller 53 can be easily performed in a short time.

In the above embodiment, the roller 53 is rotatably attached to the support unit 51. However, the present invention is not limited to this. For example, as shown in FIG. A plurality of balls 55 that can be rotated in multiple directions including the width direction of 1 and 16 and the substrate floating block 11 may be attached to the support unit 51.
That is, each ball 55 is held by a ball holder 57 so as to be rotatable about the center point of the ball 55, and the ball holder 57 is fixed to the support unit 51. Further, each ball 55 is arranged so as to slightly protrude from the upper surfaces of the substrate mounting tables 1, 16 and the substrate floating block 11 as in the case of the roller 53, and comes into contact with the lower surface of the glass substrate 3. Yes. The height position of the lower surface of the glass substrate 3 levitated by the substrate levitating mechanism 101 is substantially the same as the contact position between the glass substrate 3 and the ball 55.

  In this configuration, not only when the glass substrate 3 moves in the transport direction C, but also when the glass substrate 3 moves in the width direction of the substrate mounting tables 1 and 16 and the substrate floating block 11 orthogonal to the transport direction C, Since sliding friction does not occur between the balls 55, the glass substrate 3 can be reliably prevented from being damaged. In particular, when the position of the glass substrate 3 is adjusted on the substrate loading table 1 or the substrate floating block 11 on the substrate carry-in side, the substrate mounting is directed toward the target reference position in a state where the glass substrate 3 is floated on the air. This is effective when moving the stage 1 or the substrate floating block 11 along the transport surface.

Further, for example, as shown in FIG. 8, the contact track 59 formed along the transport direction C and exposed on the upper surface side of the substrate mounting table 1, 16 and the substrate floating block 11, the substrate mounting table 1, 16, and the substrate A circulating member that is formed apart from the upper surface side of the floating block 11 and has a circulation track 61 that interconnects both ends in the direction in which the contact track 59 is formed can be attached to and detached from the substrate platform 1 and 16 and the substrate floating block 11. A plurality of balls 55 may be arranged on the contact track 59 and the circulation track 61. Each ball 55 is preferably arranged so as to come into contact with another adjacent ball 55.
In this configuration, when the glass substrate 3 is moved in the transport direction C, the balls 55 in contact with the glass substrate 3 roll and move from one end 59a to the other end 59b of the contact track 59. Then, the ball 55 that has reached the other end 59b of the contact track 59 passes through the circulation track 61 away from the glass substrate 3 and returns to the one end 59a side of the contact track 59.
In this configuration, since the balls 55 positioned on the circulation track 61 do not contact the glass substrate 3, one ball 55 does not always contact the glass substrate 3. Therefore, the wear of the ball 55 due to rolling friction with the glass substrate 3 can be suppressed, and the ball 55 can be used continuously for a long time without replacement.

Moreover, although the support of the both ends of the glass substrate 3 located close to the outer side of the pattern region G is performed by the roller 53 and the ball 55 which are brought into contact with the lower surface of the glass substrate 3, it is not limited to this. Instead, for example, as shown in FIG. 9, compressed air may be blown onto and supported by the lower surface of the glass substrate 3 located close to the outer side of the pattern region G.
That is, the end floating mechanism 65 is formed in the support unit 64 that can be attached to and detached from the substrate mounting tables 1 and 16 and the substrate floating block 11. The end floating mechanism 65 is exposed to the upper surface side of the substrate mounting tables 1 and 16 and the substrate floating block 11, and has a plurality of air holes (air blowing portions) 67 arranged along the transport direction C, A communication passage 69 connecting the air hole 67 and the compressed air supply unit 46 is provided.

In this configuration, it is possible to support both ends of the glass substrate 3 in a non-contact manner by blowing compressed air from the air holes 67 of the end portion floating mechanism 65 toward the lower surface of the glass substrate 3. Since the whole 3 can be conveyed in a non-contact manner, the glass substrate 3 can be reliably prevented from being damaged.
Further, since the plurality of support units 64 are provided with a plurality of air holes 67 for blowing compressed air, respectively, by attaching and detaching each support unit 64 to and from the substrate mounting table 1, 16 and the substrate floating block 11, A desired support unit 64 can be easily replaced, and a large number of air holes 67 can be replaced together for each support unit 64. Accordingly, the air hole 67 can be easily replaced in a short time.

In addition, as mentioned above, when supporting the both ends of the glass substrate 3 which adjoins the outer side of the pattern area | region G using compressed air, the substrate mounting bases 1 and 16 or substrate floating along the conveyance direction C are carried out. You may directly form the air hole which blows out compressed air toward the both ends of the glass substrate 3 in the both sides of the block 11. FIG.
In addition, the compressed air that supports both ends of the glass substrate 3 is not limited to being blown out from the plurality of air holes arranged along the transport direction C, and is, for example, an elongated slit formed along the transport direction C. It does not matter if it is blown out from.

Moreover, it is possible to set the blowing direction of the compressed air so that the compressed air hitting both ends of the glass substrate 3 escapes to the outside of both sides of the substrate mounting table 1, 16 or the substrate floating block 11. It is preferable because the substrate 3 can be stably lifted and transported.
Furthermore, making the pressure of the compressed air blown to both ends of the glass substrate 3 higher than the pressure of the compressed air for floating the substrate lifts both ends of the glass substrate 3 further upward than the conveying surface. This is preferable because the downward warping of both ends can be corrected horizontally.
Moreover, it is configured so that the pressure of the compressed air of the end portion floating mechanism 65 can be adjusted according to the amount of warpage or the amount of deflection of the glass substrate 3, so that both end portions of the glass substrate 3 are reliably lifted above the conveyance surface. And can be stably conveyed.

Moreover, in said embodiment, although the glass substrate 3 floated by the compressed air which blows off from the air holes 4, 12, 18 of the substrate mounting bases 1 and 16 and the substrate floating block 11, it is not restricted to this. For example, it may be levitated by an electrostatic method. In the case of this configuration, it is preferable to perform static elimination on the glass substrate.
Moreover, although the conveyance end parts 29-34 which convey the glass substrate 3 moved on the sliders 23-28 provided in the both ends of the substrate mounting bases 1 and 16 and the substrate floating block 11, it is not restricted to this. Absent. That is, for example, a slider may be arranged in the pair of grooves 5, 13, 19 of the substrate mounting tables 1, 16 and the substrate floating block 11, and the transport end portion may be movably provided on the slider.

  Furthermore, although the suction position of each suction pad 29b-34b was made into the front side of the glass substrate 3 which goes to the conveyance direction C of the glass substrate 3, it is not restricted to this, For example, it is good also as the back side of the glass substrate 3. . Further, for example, each of the suction pads 29b to 34b may be sucked and held at the end portion in the width direction of the glass substrate 3 located in the center portion in the transport direction C. Further, when the glass substrate 3 is transported, a plurality of suction pads may be sucked to each end portion in the width direction of the glass substrate 3.

Further, the suction holding position of the glass substrate 3 by the suction pad may be the upper surface or the upper surface and the lower surface of the glass substrate 3 as long as it is a portion deviated from the pattern region G.
Furthermore, any mechanism other than the transfer robots 7 and 21 may be used to place the glass substrate 3 on the substrate platform 1 and to remove the glass substrate 3 from the substrate platform 16. Substrate floating conveyance means such as conveyance may be used.

  As mentioned above, although embodiment of this invention was explained in full detail with reference to drawings, the concrete structure is not restricted to this embodiment, The design change etc. of the range which does not deviate from the summary of this invention are included.

It is a schematic top view which shows the board | substrate conveyance apparatus which concerns on one Embodiment of this invention. It is a schematic side view of the board | substrate conveyance apparatus of FIG. FIG. 2 shows a support unit including a plurality of rollers in the substrate transfer apparatus of FIG. 1, (a) is an enlarged side view, and (b) is an enlarged front sectional view. FIG. 2 is a schematic side view showing a state where a glass substrate is levitated on a substrate mounting table in the substrate transfer apparatus of FIG. 1. FIG. 2 is a schematic side view showing an air transfer operation of a glass substrate in the substrate transfer apparatus of FIG. 1. FIG. 2 is a schematic side view showing an air transfer operation of a glass substrate in the substrate transfer apparatus of FIG. 1. In the board | substrate conveyance apparatus which concerns on other embodiment of this invention, the support unit provided with the some ball is shown, (a) is an enlarged side view, (b) is an enlarged front sectional view. In the board | substrate conveyance apparatus which concerns on other embodiment of this invention, the support unit provided with the some ball distribute | arranged to the contact track | orbit and the circulation track | orbit is shown, (a) is an expanded sectional side view, (b ) Is an enlarged front sectional view. In the board | substrate conveyance apparatus which concerns on other embodiment of this invention, the support unit provided with the air blowing part is shown, (a) is an expanded sectional side view, (b) is an expanded front sectional view. .

Explanation of symbols

1,16 Substrate mounting table (Substrate floating block)
3 Glass substrate 11 Substrate floating block 49 End support mechanism 51, 63, 64 Support unit 53 Roller (rotation support member)
55 balls 67 Air hole (air blowing part)
102 Conveying mechanism C Conveying direction G Pattern area

Claims (6)

A substrate floating block for floating the substrate in a non-contact state;
A transport mechanism that sucks and holds the end of the substrate that has floated on the substrate floating block; and
A plurality of rotation support members that rotate while rolling on the lower surface of the substrate conveyed by the conveyance mechanism are provided on the side of the substrate floating block along the substrate conveyance direction, so that the substrate is conveyed on the substrate floating block. A substrate transfer apparatus comprising: an end support mechanism that supports an end of the substrate. The substrate transport apparatus according to claim 1 , wherein the rotation support member is a roller that is rotatable in the transport direction. The substrate transfer apparatus according to claim 1 , wherein the rotation support member is a ball that is rotatably supported . The end support mechanism exposes a plurality of the balls on the conveying surface of the floating block facing the lower surface of the substrate and rolls and moves the ball on the lower surface of the substrate, and at both ends of the contact track. The substrate transfer apparatus according to claim 3 , further comprising a circulation member having a circulation track that connects and circulates the balls to the contact track. The end support mechanism is composed of a plurality of units,
The substrate transfer apparatus according to claim 1, wherein each unit is provided detachably with respect to the substrate floating block. The transport mechanism includes a slider provided along the transport direction of the substrate, and a transport end that is provided so as to be movable in the transport direction with respect to the slider and that holds the end of the substrate by suction. The substrate transfer apparatus according to claim 1, wherein

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