CN102060193A - Substrate conveying device - Google Patents
Substrate conveying device Download PDFInfo
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- CN102060193A CN102060193A CN2010105651320A CN201010565132A CN102060193A CN 102060193 A CN102060193 A CN 102060193A CN 2010105651320 A CN2010105651320 A CN 2010105651320A CN 201010565132 A CN201010565132 A CN 201010565132A CN 102060193 A CN102060193 A CN 102060193A
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- China
- Prior art keywords
- substrate
- glass substrate
- aforesaid substrate
- delivery device
- base board
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides a substrate conveying device, which enables a substrate to be conveyed in a single shaft way when the substrate is floated. This substrate conveying device comprises substrate floating blocks for floating the substrate, a guide device configured along one side part of the substrate floating blocks, a substrate retaining mechanism for retaining one side part of each floating substrate on the above-mentioned substrate floating blocks, a conveying mechanism provided with the above-mentioned substrate retaining mechanism and applied for driving the substrate to move along the conveying direction by moving on the guide device, and substrate supporting mechanisms configured on one substrate floating part side part that is opposite to the conveying mechanism. The substrate supporting mechanisms contact the lower surface of the other side part of the substrate for support the other side part of the substrate.
Description
The present invention is that application number is 200410085642.2, the applying date is on October 14th, 2004, denomination of invention is divided an application for the Chinese invention patent application of " base board delivery device ".
Technical field
The present invention relates to a kind of large substrate is floated carry out the substrate conveying feedway.
Background technology
In recent years, follow the picture of Liquid Crystal Display (LCD) (the following LCD that slightly is called) and plasma display panel flat-panel monitors (the following FPD that slightly is called) such as (the following PDP that slightly is called) to maximize, the size that is used for the glass substrate of FPD has the trend that becomes maximization year by year.
In the past, in FPD Fabrication procedure, base board delivery device as the transportation large-scale glass substrate, blow out the lower surface blowing out pressurised air of parts (substrate floating parts) from air to glass substrate, glass substrate is blown out on the parts at air float (for example, with reference to TOHKEMY 2000-193604 communique (Fig. 3, Fig. 4)).In the base board delivery device of this structure, can carry glass substrate easily and make its surface injury-free.
And, be provided with at this base board delivery device: from the support rollers mechanism of following side support with the Width two ends of the direct of travel quadrature of glass substrate; A pair of restriction roller mechanism with the both ends of the surface of the Width that contacts glass substrate.The restriction roller mechanism comes the position of Limited width direction by blow out outstanding glass substrate Width both ends, component width direction end (side end) from the sidepiece clamping from air.And support rollers mechanism is near this restriction roller mechanism configuration.
But, the restriction roller mechanism is owing to be to leave air to blow out the Width end that parts come the clamping glass substrate, so when utilizing pressurized air that it is floated, the glass baseplate surface that is floated by pressurized air relatively by the Width end of the glass substrate of restriction roller mechanism clamping and deflection can not on even keel keep whole glass substrate and carry.
In addition, owing to utilize restriction roller mechanism clamping glass substrate,, might cause glass substrate impaired so apply bigger load to the Width end of glass substrate.
And support rollers mechanism disposes near this restriction roller mechanism, thus glass substrate sometimes air blow out between the side end of parts and the support rollers mechanism below deflection.Herein, glass substrate so even the deflection of aforesaid glass substrate is very little, also might blow out the side end of parts because of this deflection causes the glass substrate ingress of air, makes glass substrate impaired based on the very little for example 0.2mm of compressed-air actuated levitation height.
Summary of the invention
The present invention is exactly In view of the foregoing and proposes, and its purpose is to provide a kind of base board delivery device, when substrate floating is carried, alleviates the external load of relative substrate, simultaneously can the on even keel conveying substrate and make its not ingress of air blow out parts.
According to the present invention, a kind of base board delivery device is provided, it is to make substrate floating and the base board delivery device of single shaft mode of movement that substrate is carried is characterized in that this base board delivery device possesses: the substrate floating parts that make substrate floating; Float the guide piece of the sidepiece configuration of parts along aforesaid substrate; Substrate holding mechanism, this substrate holding mechanism keeps a sidepiece that floats the described substrate that floats on the parts at aforesaid substrate; Conveying mechanism is provided with the aforesaid substrate maintaining body in this conveying mechanism, this conveying mechanism is walked on above-mentioned guide piece and aforesaid substrate is moved at throughput direction; Substrate supporting mechanism, this substrate supporting mechanism is configured in the other side that is positioned at an opposite side with above-mentioned conveying mechanism that aforesaid substrate floats parts, and this substrate supporting mechanism contacts the other side of supporting aforesaid substrate with the lower surface of the other side of aforesaid substrate.
In order to achieve the above object,, substrate floating is carried, be it is characterized in that having: the substrate floating parts that make substrate floating with contactless state with contactless state according to base board delivery device provided by the invention; Remain on the sidepiece of the described substrate that floats on the described substrate floating parts and the conveying mechanism of forced conveyance; And substrate supporting mechanism, be arranged on the sidepiece of the described substrate floating parts parallel with the throughput direction of described substrate, support sidepiece from following side from the side-prominent outside described substrate of described substrate floating parts sidepiece.
According to the base board delivery device of said structure, substrate supporting mechanism is located at the sidepiece of substrate floating parts, and the sidepiece from following side support from the side-prominent outside substrate of the sidepiece of substrate floating parts is impaired so can prevent substrate contacts substrate floating parts.And, be horizontality even glass substrate also can be corrected glass substrate during warpage to the lower side.
The base board delivery device that other modes according to the present invention provide, with contactless state glass substrate being floated in the Fabrication procedure of flat-panel monitor carries, it is characterized in that, have: the substrate floating parts, its width dimensions is configured to the width dimensions less than described glass substrate, and roughly the same with the outermost width dimensions in graphics field that is formed on the described glass substrate, with contactless state described glass substrate is floated; Conveying mechanism keeps a side sidepiece or both sides sidepiece and forced conveyance beyond the described graphics field of the described glass substrate that floats by described substrate floating parts; And substrate supporting mechanism, a side sidepiece or both sides sidepiece along the described substrate floating parts parallel with the throughput direction of described glass substrate are provided with, support from a side sidepiece or the both sides sidepiece of the outstanding described graphics field described glass substrate in addition of described substrate floating parts from following side, utilize described substrate supporting mechanism that the one side sidepiece or the both sides side supports of the described glass substrate of giving prominence to from a side sidepiece or the both sides sidepiece of described substrate floating parts are horizontality.
The base board delivery device that other modes according to the present invention provide, with contactless state glass substrate being floated in the Fabrication procedure of flat-panel monitor carries, it is characterized in that, have: the substrate floating parts, its width dimensions is configured to the width dimensions less than described glass substrate, and roughly the same with the outermost width dimensions in graphics field that is formed on the described glass substrate, with contactless state described glass substrate is floated; Conveying mechanism, along a side sidepiece parallel configuration with the throughput direction of described substrate floating parts, remain on the described glass substrate that floats on the described substrate floating parts side's sidepiece front and back and pars intermedia and carry; And substrate supporting mechanism, the opposing party's sidepiece configuration along the described substrate floating parts that are positioned at the opposition side that has disposed the described conveying mechanism parallel with the throughput direction of described glass substrate, support described graphics field the opposing party's sidepiece in addition of described glass substrate from following side, utilize described conveying mechanism that one side's sidepiece of the described glass substrate that floats on described substrate floating parts is remained horizontality and carry, utilize described substrate supporting mechanism handle to be horizontality from the opposing party's side supports of the outstanding described glass substrate of the described substrate floating parts of the opposition side of described conveying mechanism.
Preferably in the base board delivery device of said structure, described substrate supporting mechanism has a plurality of rotary supporting parts of the sidepiece that is located at described substrate floating parts, described rotary supporting part is utilizing described conveying mechanism to make described substrate when throughput direction moves, the direction rotation of rolling on the lower surface at described substrate.
Preferred described rotary supporting part is can be at the narrower roller of width of described throughput direction rotation.
Preferred described rotary supporting part is to be supported for the ball that rotates freely in a plurality of directions.
Substrate supporting mechanism according to said structure, utilize the rotary supporting part supporting substrate, roller or ball as rotary supporting part when conveying substrate roll on the lower surface of substrate, so the cliding friction of roller or ball and substrate reduces, can prevent that substrate is impaired because of this cliding friction.
And according to the rotary supporting part of said structure, particularly by using ball, even substrate moves at the Width with the throughput direction quadrature, ball also can contact substrate and is rotated freely, so can prevent reliably that substrate is impaired.
Preferably in the base board delivery device of said structure, described substrate supporting mechanism has circulation member, this circulation member has: the contact track, a plurality of balls are exposed on the conveyor surface of the described substrate floating parts relative with the lower surface of described substrate, and it is mobile that it is being rolled on the lower surface of described substrate; Cyclic track connects the two ends of described contact track, makes described ball to the cocycle of described contact track.
According to the rotary supporting part of said structure, by making a plurality of balls in contact track and cyclic track cocycle, can suppress because of and substrate between the ball wearing and tearing that cause of friction of rolling, long-term use ball and do not need replacing for a long time.
Preferred described substrate supporting mechanism is to blow out portion towards the air from the sidepiece blowing out pressurised air of the side-prominent outside described substrate of the sidepiece of described substrate floating parts.
The preferred described air portion of blowing out is the other system that is different from the Air supply system of the described substrate floating parts that make described substrate floating, and is adjusted to the air pressure that is higher than described substrate floating parts.
Preferably in the base board delivery device of said structure, described substrate supporting mechanism is made of a plurality of support units, and each support unit is configured to described relatively substrate floating parts and can changes and can freely load and unload.
According to the substrate supporting mechanism of said structure,, can change desired unit simply by forming a plurality of unit that relative substrate floating parts can load and unload.
Preferably in the base board delivery device of said structure, described substrate supporting mechanism is made of a plurality of support units, and each support unit is configured to described relatively substrate floating parts can adjust height.
Preferably in the base board delivery device of said structure, described substrate supporting mechanism is along the approaching configuration of the sidepiece of described substrate floating parts.
Preferably in the base board delivery device of said structure, has width adjusting mechanism, described substrate floating parts are divided into a plurality of in the elongated rectangular shaped components of throughput direction, and this width adjusting mechanism makes each parts slide at Width, adjusts the interval between each parts.
Preferably in the base board delivery device of said structure, described substrate floating parts have a plurality of air at the upper surface of the described substrate of carrying and blow out and use airport, have the groove of the air-out between the described substrate that the air that is trapped in and blow out by described each airport is floated at described upper surface.
According to the substrate supporting mechanism of said structure, utilize the end of air supporting substrate, can be with the contactless state conveying substrate, so can prevent reliably that the lower surface of substrate is impaired.
Description of drawings
Fig. 1 is the approximate vertical view of the base board delivery device that relates to of expression one embodiment of the present invention.
Fig. 2 is the summary side elevation of the base board delivery device of Fig. 1.
Fig. 3 A is illustrated in the enlarged side view that has the support unit of a plurality of rollers in the base board delivery device of Fig. 1.
Fig. 3 B is the amplification elevation cross-sectional view of this support unit of expression.
Fig. 4 is illustrated in the summary side elevation that makes the state that glass substrate floats in the base board delivery device of Fig. 1 on substrate placing stage.
Fig. 5 is that the air that is illustrated in glass substrate in the base board delivery device of Fig. 1 is carried the summary side elevation of action.
Fig. 6 is that the air that is illustrated in glass substrate in the base board delivery device of Fig. 1 is carried the summary side elevation of action.
Fig. 7 A is illustrated in the enlarged side view that has the support unit of a plurality of balls in the base board delivery device that other embodiments of the present invention relate to.
Fig. 7 B is the amplification elevation cross-sectional view of this support unit of expression.
Fig. 8 A is illustrated in the base board delivery device that other embodiments of the present invention relate to, and has the Zoom Side pseudosection of the support unit that is configured in a plurality of balls on contact track and the cyclic track.
Fig. 8 B is the amplification elevation cross-sectional view of this support unit of expression.
Fig. 9 A is illustrated in the base board delivery device that other embodiments of the present invention relate to have the Zoom Side pseudosection that air blows out the support unit of portion.
Fig. 9 B is the amplification elevation cross-sectional view of this support unit of expression.
The specific embodiment
Fig. 1～Fig. 6 represents one embodiment of the present invention, and Shuo Ming embodiment is that the present invention is applicable in the FPD Fabrication procedurees such as large LCD or PDP that (inline) in order checks the glass substrate feedway of occasion herein.
Constitute moving into substrate placing stage 1 of base board delivery device and be located on the vibration isolators (removing the platform that shakes) 2, (conveyor surface) places the glass substrate of being moved into 3 (making the mother glass substrate of the multiaspect the obtained substrate of a plurality of FPD) in the above.The size of the Width of substrate placing stage 1 (the vertical direction of throughput direction C of glass substrate 3 relatively) is shorter than the width of glass substrate 3.This substrate placing stage 1 constitutes and is provided with the substrate floating parts that air blows out a plurality of airports 4 of usefulness and makes glass substrate 3 gas suspensions in the above.Airport 4 roughly is arranged on the whole surface of substrate placing stage 1 equably.
And, form two grooves 5 of the predetermined distance that separates each other above the substrate placing stage 1 along throughput direction C at this.In addition, be provided with a plurality of (being 9 in illustrated example) lift pins 6 (lift pin) of lifting when moving into glass substrate 3 at this substrate placing stage 1.
In addition, substrate placing stage 1 also can be dividing in the elongated rectangular shaped components of throughput direction C, adjusts the interval that is split into (groove 5) between each a plurality of parts, changes the Width size of substrate placing stage 1 according to the different size of various glass substrates.During this situation, can utilize each parts that makes the Width two ends that are positioned at substrate placing stage 1 to adjust the width dimensions of substrate placing stage 1 arbitrarily in the width adjusting mechanism (not shown) of Width slip.
Side sidepiece (left side of throughput direction C) setting at the substrate placing stage parallel with throughput direction C 1 is moved into conveying mechanical arm 7.This is moved into conveying mechanical arm 7 and utilizes not shown multi-joint arm simultaneously to make two conveying arms 8 rotate, advance, retreat, and one side is taken out unchecked glass substrate 3 and moved on the substrate placing stage 1 from box.
Downstream at substrate placing stage 1 is set up in parallel conveying pallet 9 along throughput direction C.The length of this conveying pallet 9 forms moves into side up to taking out of side from glass substrate 3.This conveying pallet 9 is placed on the vibration-damped table 10.
At this substrate floating parts (inspecting stand) 11 of crossing over conveying pallet 9 total lengths are set above the conveying pallet 9.The size of the Width of substrate floating parts 11 is identical with substrate placing stage 1, is shorter than the width of glass substrate 3.Above substrate floating parts 11 (conveyor surface), identical at this with substrate placing stage 1, a plurality of airports 12 that air blows out usefulness also are set.These airports 12 roughly are located on the whole surface of substrate floating parts 11 equably.
And, above the substrate floating parts 11, form two grooves 13 of the predetermined distance that separates each other along throughput direction C at this.The top height of these substrate floating parts 11 and substrate placing stage 1 top highly roughly the same.
In addition, these substrate floating parts 11 are also identical with substrate placing stage 1, can change the Width size of substrate floating parts 11 by the interval that adjustment is split into (groove 13) between each a plurality of parts.
At roughly midway location, the E of inspection portion of the various inspections of carrying out the glass substrate 3 carried with certain speed is set along the conveying pallet 9 of throughput direction C.Be provided with the various inspections machine 15 of a type arm 14, microscope, line sensor, ccd video camera etc. at the E of this inspection portion.At the E of this inspection portion, for example, utilize a plurality of line sensors of arranging at Width to obtain the view data of glass substrate 3, this view data is implemented image processing etc., carry out the figure cross-check sum detection of defects of glass substrate 3 etc.
Be set up in parallel along throughput direction C in the downstream of carrying pallet 9 and take out of with substrate placing stage 16.This substrate placing stage 16 is located on the vibration-damped table 17, in order will to take out of and to be used for placing from the glass substrate 3 that substrate floating parts 11 transport temporarily.The width dimensions of substrate placing stage 16 is identical with substrate placing stage 1 and substrate floating parts 11, is shorter than the width of glass substrate 3.Substrate placing stage 16 is identical with substrate placing stage 1 and substrate floating parts 11, constitutes in the above (conveyor surface) and is provided with the substrate floating parts that air blows out a plurality of airports 18 of usefulness and makes glass substrate 3 gas suspensions.Airport 18 roughly is arranged on the whole surface of substrate placing stage 16 equably.
And, on this substrate placing stage 16, form two grooves 19 of the predetermined distance that separates each other along throughput direction C, be used to discharge the air that blows out from each airport 18.In addition, be provided with a plurality of (being 9 in illustrated example) lift pin 20 of lifting when taking out of glass substrate 3 at this substrate placing stage 16.The top height of this substrate placing stage 16 and substrate floating parts 11 top highly roughly the same.
In addition, this substrate placing stage 16 is also identical with substrate placing stage 1, can change the Width size of substrate placing stage 16 by the interval that adjustment is split into (groove 19) between each a plurality of parts.
Side sidepiece (left side of throughput direction C) setting at the substrate placing stage parallel with throughput direction C 16 is taken out of with conveying mechanical arm 21.This is taken out of with conveying mechanical arm 21 and utilizes not shown multi-joint arm simultaneously to make two hand conveying arms 22 rotate, advance, retreat, and the glass substrate 3 that one side finishes inspected is accommodated in the box.
At the conveying mechanism of carrying sidepiece that the glass substrate 3 that maintenance floats is set on pallet 9 and the vibration-damped table 17 or both sides and carrying fast.This conveying mechanism is by constituting with the lower part: remain on a sidepiece of the glass substrate that floats on the substrate floating parts or the delivery section of both sides and forced conveyance; Along a sidepiece of the substrate floating parts parallel or the guide piece of both sides configuration with the throughput direction C of glass substrate 3.As conveying mechanism, can use by the linear motor of going up shifter (delivery section) formation of walking by coil magnetization at linear guide apparatus (linear guide) (slide plate (slider)).The slide plate 23～28 that constitutes linear guide apparatus with a pair of be one group, across substrate floating parts 11 and substrate placing stage 16, and this slide plates of many groups are set in parallel with each other along throughput direction C.
Be positioned at two groups of slide plates 23,24,27,28 of the upstream and downstream side of throughput direction C, be set in place in the Width outside of one group of slide plate 25,26 of the pars intermedia of throughput direction C.
Be disposed at from the downstream of substrate placing stage 1 to the pair of slide 23,24 the pars intermedia of carrying pallet 9, be provided with respectively that absorption keeps glass substrate 3 and in the delivery section 29,30 of throughput direction C and reversing sense quick travel thereof.Each delivery section 29,30 has: be installed into arm 29a, the 30a that can stretch and rotate freely in vertical direction; Be located at the leading section of arm 29a, 30a, absorption layer (sorption pad) 29b, the 30b of the both sides lower surface of the glass substrate 3 that the absorption maintenance is parallel with throughput direction C; Be located on the delivery section 29,30 push rod (plunger) that arm 29a, 30a are moved in throughput direction C and vertical direction.
And, the delivery section 31,32 that can move at throughput direction C and reversing sense thereof also is set being located at respectively from the pars intermedia of carrying pallet 9 to the pair of slide the end of downstream side 25,26.Each delivery section 31,32 is identical with aforesaid delivery section 29,30, has arm 31a, 32a and absorption layer 31b, 32b.
In addition, the delivery section 33,34 that can move at throughput direction C and reversing sense thereof also is set being located at respectively from the end of downstream side of carrying pallet 9 to the pair of slide the end of downstream side of substrate placing stage 16 27,28.Each delivery section 33,34 is identical with aforesaid delivery section 29,30, has arm 33a, 34a and absorption layer 33b, 34b.
In addition, be positioned at two groups of slide plates 23,24,27,28 in upstream and the downstream of throughput direction C, be set in place in the outside of one group of slide plate 25,26 of the pars intermedia of throughput direction C, so set the length of each arm 29a, 30a, 33a, 34a, make absorption layer 29b, 30b, 33b, 34b identical with the width position of absorption layer 31b, 32b.
This base board delivery device has compressed-air supply portion 46, vacuum suction portion 47, mobile control division 48 and substrate supporting mechanism 49 except that said structure.
Compressed-air supply portion 46 moves into substrate placing stage 1, substrate floating parts 11 by the pipe arrangement connection and takes out of each space part of using substrate placing stage 16, optionally supplies with pressurized air to each space part, from each airport 4,12,18 blowing out pressurised air.Utilize this pressurized air that glass substrate 3 is floated moving into substrate placing stage 1, substrate floating parts 11 or on taking out of with substrate placing stage 16.And this compressed-air supply portion 46 also can blow out the air with the effect of destaticing from each airport 4,12,18, for example, is ionized into the air of positive ion or negative ion.Utilize these airports 4,12,18 and compressed-air supply portion 46 to constitute the substrate floating mechanism 101 that glass substrate 3 is floated.
Vacuum suction portion 47 is communicated with each absorption layer 29b～34b by pipe arrangement, and 29b～34b optionally vacuumizes to these absorption layers, keeps glass substrate 3 with absorption.Mobile control division 48 is used to carry out the mobile control of the delivery section 29～34 on each slide plate 23～28.
Utilize these slide plates 23～28, delivery section 29～34, vacuum suction portion 47 and mobile control division 48 to constitute the conveying mechanism 102 that glass substrate 3 is moved at throughput direction C.
At each support unit 51 according to shown in Fig. 3 A, Fig. 3 B, rotatable a plurality of roller (rotary supporting part) 53 is installed as rotary supporting part, the part that each roller 53 is configured to make its periphery is outstanding in the roughly the same position of distance substrate placing stage 1,16 and the height above the substrate floating parts 11 and substrate floating height.Height adjustment mechanism with height of adjusting substrate floating parts 11 is so that the outstanding length of each roller 53 reaches the levitation height based on compressed-air actuated glass substrate 3.And, constitute by synthetic resin geometric ratio glass substrate 3 more soft anti-abrasive materials at the periphery of the contact glass substrate 3 of the adjacent roller 53 arranged side by side of throughput direction C, near configuration but do not contact each other.These rollers 53, rotate to the direction of rolling on the lower surface of glass substrate 3 (J direction) when throughput direction C moves at glass substrate 3.And roller 53 has narrower width dimensions, so that can obtain relative glass substrate 3 skid-resistant friction force.
In addition, form the graphics field G that a plurality of (for example 4,6 faces) constitute telltale at glass substrate 3, the width dimensions of substrate placing stage 1,16 and substrate floating parts 11 is configured to roughly the same with the outermost width dimensions of the graphics field G parallel with throughput direction C.Thus, give prominence to from the both sides of substrate placing stage 1,16 and substrate floating parts 11 both sides that do not form the glass substrate 3 of graphics field G.And, each roller 53 along the both sides of substrate placing stage 1,16 and substrate floating parts 11 according to compact configuration shown in Fig. 3 A, according to shown in Fig. 3 B from the both sides of following side support glass substrate 3.
Below, the action of the base board delivery device that as above constitutes is described.
When on substrate placing stage 1, placing glass substrate 3, as shown in Figure 1 and Figure 2, make the delivery section 29,30 that is positioned on the slide plate 23,24 of moving into side move to substrate placing stage 1 side and standby in advance.
From this state, move into to make hand conveying arm 8 one side rotate, advance and retreat one side and from box, take out unchecked glass substrate 3 with manipulator 7, be transported to the top of substrate placing stage 1.And when carrying, each lift pin 6 of substrate placing stage 1 rises.Then, move into manipulator 7 hand conveying arm 8 is descended, withdraw from after being placed on glass substrate 3 on each lift pin 6.Each lift pin 6 descends, and glass substrate 3 is placed on the substrate placing stage 1 thus.
Under this state, the width dimensions of glass substrate 3 is longer than the width of substrate placing stage 1, so the both sides of the glass substrate 3 parallel with throughput direction C are outstanding from the both sides of substrate placing stage 1.And, under this state, shown in Fig. 3 B, be positioned at contact roller 53 below the sidepiece of glass substrate 3 in the graphics field G outside.
After the placement of finishing glass substrate 3, be positioned at move into side delivery section 29,30 as shown in Figure 4, arm 29a, 30a are risen, utilize vacuum suction portion 47 to carry out vacuumizing of absorption layer 29b, 30b simultaneously, absorption layer 29b, 30b are adsorbed on the lower surface of glass substrate 3.The contact position that the absorption position of these absorption layers 29b, 30b is compared aforesaid roller 53 is in foreign side's side of the Width of glass substrate 3, and is the front side towards the glass substrate 3 of throughput direction C.Under this state, absorption layer 29b, 30b compare the top of substrate placing stage 1 and rise highly slightly, are positioned at and contact position (substrate floating height) the roughly the same height of glass substrate 3 with roller 53.
In the absorption of carrying out this glass substrate 3, compressed-air supply portion 46 supplies with pressurized air by pipe arrangement to the space part of moving into substrate placing stage 1 and substrate floating parts 11, from airport 4,12 blowing out pressurised air.
At this moment, form air layer between substrate placing stage 1 and glass substrate 3, glass substrate 3 floats above substrate placing stage 1.And the air that blows out from airport 4 does not circulate by the groove 5 of substrate placing stage 1 at described air layer with stopping.Therefore, glass substrate 3 floats on substrate placing stage 1 with the state that keeps planeness.In addition, roller 53 and the glass substrate 3 that floats by pressurized air following highly roughly the same, even so glass substrate 3 below when warpage or deflection, also can correct be that horizontality, glass substrate 3 are floated to the both sides of glass substrate 3 and conveyor surface that can contact substrate plummer 1 by each roller 53.
Then, as shown in Figure 5, mobile control division 48 make have two delivery section 29,30 of being adsorbed on absorption layer 29b, 30b below the glass substrate 3 with identical speed on each slide plate 23,24 to the same moved further of throughput direction C.Thus, glass substrate 3 is used to float above substrate placing stage 1 and substrate floating parts 11 from the pressurized air of each airport 4,12, is transported to substrate floating parts 11 from substrate placing stage 1 fast by delivery section 29,30.At this moment, the roller 53 that is located at substrate placing stage 1 and substrate floating parts 11 contacts below the both sides of glass substrate 3 of the foreign side's side that is positioned at graphics field G, and rotates to the J direction.
When finishing glass substrate 3 to the conveying of substrate floating parts 11, compressed-air supply portion 46 stops to supply with pressurized airs to the airport of moving into substrate placing stage 14.And at this moment, mobile control division 48 moves delivery section 31,32 reversing senses to throughput direction C on two slide plates 25,26 that are positioned at pars intermedia.
These delivery section 31,32 arrive glass substrate 3 below the time substrate that stops on the slide plate 25,26 shift the reference position, each arm 31a, 32a are risen, utilize vacuum suction portion 47 absorption layer 31b, 32b be adsorbed on glass substrate 3 below.The contact position that the absorption position of these absorption layers 31b, 32b is compared roller 53 is in foreign side's side of the Width of glass substrate 3, and is the front side towards the glass substrate 3 of throughput direction C.
When absorption layer 31b, 32b are adsorbed on the glass substrate 3, be disengaged based on the absorption of each absorption layer 29b, 30b of the delivery section 29,30 of vacuum suction portion 47, each arm 29a, 30a descend.Thus, the absorption of glass substrate 3 keeps transferring to delivery section 31,32 from delivery section 29,30.Then, two delivery section 29,30 reversing sense to throughput direction C on slide plate 23,24 separately moves, and stops at the substrate of moving into substrate placing stage 1 and shifts reference position and standby.
After the transfer of finishing glass substrate 3, the delivery section 31,32 of absorption maintenance glass substrate 3 moves to throughput direction C on each slide plate 25,26 simultaneously and rapidly with identical speed as shown in Figure 6.At this moment, roller 53 contacts that are provided with near the both sides of substrate floating parts 11 are positioned at below the Width both ends of glass substrate 3 of foreign side's side of graphics field G, and rotate to the J direction.Thus, the glass substrate 3 that floats on substrate floating parts 11 is transferred portion's 31,32 tractives and the arrival inspection E of portion.
At the E of inspection portion, is the speed of delivery section 29,30 low speed from High-speed Control, so that glass substrate 3 reaches the speed that is fit to inspection, for example, the inspection that use has a line sensor is obtained the view data of glass substrate 3 with machine 15, carries out figure inspection, detection of defects of glass substrate 3 etc. according to this view data.
After the inspection of the E of inspection portion finished, absorption kept the delivery section 31,32 of glass substrate 3 to move simultaneously and rapidly on each slide plate 25,26 with identical speed, carries glass substrate 3 to throughput direction C.At this moment, the roller 53 that is located at substrate floating parts 11 and substrate placing stage 16 contacts below the both sides of glass substrate 3 of the foreign side's side that is positioned at graphics field G, and rotates to the J direction.
When glass substrate 3 arrives the downstream of substrate floating parts 11, the absorption of glass substrate 3 keeps shifting (being subjected to け to cross The) to being positioned at the delivery section 33,34 of taking out of with substrate placing stage 16 sides from the delivery section 31,32 that is positioned at substrate floating parts 11 sides, and compressed-air supply portion 46 supplies with pressurized air to the airport 18 of taking out of with substrate placing stage 16 simultaneously.From of the transfer of these delivery section 31,32, with identical to the transfer of delivery section 31,32 from aforesaid delivery section 29,30 to the glass substrate 3 of delivery section 33,34.
After the transfer of glass substrate 3 finished, delivery section 33,34 is quick travel on slide plate 27,28, carried glass substrate 3 to throughput direction C.And in the time of above usefulness substrate placing stage 16 is taken out of in glass substrate 3 arrival, each delivery section 33,34 stops at substrate and shifts the reference position.
At substrate placing stage 16, compressed-air supply portion 46 stops to supply with pressurized air to the airport 18 of substrate placing stage 16.At this moment, remove absorption, each arm 33a, 34a are descended, lift pin 20 is risen, pick up glass substrate 3 by the lower surface of 47 pairs of glass substrates 3 of vacuum suction portion.Thus, glass substrate 3 is placed on the lift pin 20.Take out of with conveying mechanical arm 21 one side and make 22 rotations of hand conveying arm, advance and retreat, one side is taken out the glass substrate 3 that inspecteds finish and is accommodated in the box from lift pin 20.
Afterwards, at a plurality of glass substrates 3, sequentially carry out repeatedly carrying, checking and take out of from substrate placing stage 16 to the moving into of substrate placing stage 1, air.
As mentioned above, according to this base board delivery device, roller 53 contacts are also supported below the sidepiece of the outstanding glass substrate 3 in the both sides of substrate placing stage 1,16 and substrate floating parts 11, so when carrying glass substrate 3, the both sides that can stop glass substrate 3 are in the lower side deflection, even and glass substrate 3 when the lower side warpage, also can correct glass substrate 3 and be horizontality.
Therefore, utilize pressurized air that the graphics field G of glass substrate 3 is floated from conveyor surface, and utilize the both sides of roller 53 support glass substrates 3, can stablize thus and carry glass substrate 3 apace and its both sides are not contacted with substrate floating parts 11 with substrate placing stage 1,16, and can prevent glass substrate 3 contact substrate plummers 1,16 and substrate floating parts 11 and impaired.In addition, utilize the graphics field G outside of roller 53 support glass substrates 3 not have the both sides of figure, therefore the graphics field G that can make roller 53 not contact glass substrate 3 thus carries, and can prevent the lower surface of glass substrate 3 that should graphics field G impaired.
In addition, keep by absorption below the sidepiece of glass substrate, compare during with the both side edges portion that utilized restriction roller mechanism clamping glass substrate 3 in the past, can alleviate the external load of relative glass substrate 3.
And, make glass substrate 3 on substrate placing stage 1,16 and substrate floating parts 11 when throughput direction C moves, roller 53 rotation and roll to the throughput direction C of glass substrate 3 is so the cliding friction of glass substrate 3 and roller 53 is very little.Therefore, can prevent that glass substrate 3 is impaired because of this cliding friction.
In addition, when changing roller 53, a plurality of support units 51 relative substrate placing stages 1,16 and substrate floating parts 11 that a plurality of rollers 53 have been installed can be loaded and unloaded, can change desired support unit 51 simply thus, each support unit 51 can be changed in the lump a plurality of rollers 53.Therefore, can carry out the replacing of roller 53 at short notice easily.
In addition, in the above-described embodiment, at support unit 51 roller 53 that rotates to throughput direction C is installed, but is not limited thereto, for example shown in Fig. 7 A, the 7B, also can be installed in the rotatable a plurality of balls 55 of a plurality of directions at support unit 51.
That is, each ball 55 serves as that axle can rotate by the center-point that ball distance ring 57 is retained with ball 55, and this ball distance ring 57 is fixed on the support unit 51.And each ball 55 is identical with the situation of roller 53, be configured in the roughly the same position of distance substrate placing stage 1,16 and the height above the substrate floating parts 11 and substrate floating height outstanding, and contact glass substrate 3 below.
In this structure, not only at glass substrate 3 when throughput direction C moves, even when the Width with the substrate placing stage 1,16 of throughput direction C quadrature and substrate floating parts 11 moves, between glass substrate 3 and ball 55, do not produce cliding friction, so can prevent reliably that glass substrate 3 is impaired yet.Particularly under the situation of the location of carrying out glass substrate 3 (alignment), make glass substrate 3 with the gas suspension state when the direction with throughput direction C quadrature moves, compare with using roller 53, cliding friction reduces, and locate easily, can prevent that the back side of glass substrate 3 is impaired.
And, for example shown in Fig. 8 A, the 8B, also can form following structure, the support unit 63 that can load and unload at relatively substrate placing stage 1,16 and substrate floating parts 11 is provided with circulation member, and this circulation member has: form along throughput direction C, contact track 59 what the upper face side of substrate placing stage 1,16 and substrate floating parts 11 exposed; Form, will contact the two ends cyclic track 61 connected to one another of the formation direction of track 59 with the upper face side that leaves substrate placing stage 1,16 and substrate floating parts 11, can dispose a plurality of balls 55 at these contact tracks 59 and cyclic track 61.In addition, each ball 55 preferred disposition becomes other adjacent balls 55 of contact.
In this structure, make glass substrate 3 when throughput direction C moves, the ball 55 of contact glass substrate 3 rolls, and moves to other end 59b from an end 59a of contact track 59.And the ball 55 that arrives the other end 59b of contact track 59 turns back to an end 59a side of contact track 59 by the cyclic track 61 that leaves glass substrate 3.
In this structure, ball 55 circulates in contact track 59 and in the cyclic track 61 and one side is simultaneously rolled at a plurality of direction change of directions, thus ball 55 frequent contact glass substrates 3, so can not form asymmetrical wear.Therefore, can suppress because of and glass substrate 3 between the wearing and tearing of the ball 55 that causes of friction of rolling, long-term use ball 55 and need not changing for a long time.
And, be positioned at the substrate supporting mechanism of both sides of the glass substrate 3 in the graphics field G outside as support, be not limited to roller 53 and ball 55, for example shown in Fig. 9 A, the 9B, also can be below the sidepiece of glass substrate 3 blowing out pressurised air carry out noncontact and support.
That is, the support unit 64 that can load and unload at relatively substrate placing stage 1,16 and substrate floating parts 11 forms substrate supporting mechanisms 65.This substrate supporting mechanism 65 has: with substrate placing stage 1,16 and above the substrate floating parts 11 roughly the same height expose, and along throughput direction C a plurality of airports (air blows out portion) 67 arranged side by side; The communication passage 69 that connects these a plurality of airports 67 and compressed-air supply portion 46.
In this structure, by each airport 67 blowing out pressurised air below glass substrate 3 from substrate supporting mechanism 65, the both sides of glass substrate 3 can utilize pressurized air up by jack-up and support, can carry the whole glass substrate 3 that on substrate placing stage 16 and substrate floating parts 11, floats with contactless state, so can prevent reliably that glass substrate 3 is impaired.
And, a plurality of airports 67 of blowing out pressurised air are set respectively at a plurality of support units 64, so by each support unit 64 relative substrate placing stage 1,16 and substrate floating parts 11 can be loaded and unloaded, can change desired support unit 64 simply, each support unit 64 can be changed in the lump a plurality of airports 67.Therefore, can carry out the replacing of airport 67 at short notice easily.
In addition, as mentioned above, under the situation of the sidepiece that utilizes pressurized air support glass substrate 3, also can directly form along the sidepiece of substrate placing stage parallel 1,16 and substrate floating parts 11 airport to the sidepiece blowing out pressurised air of glass substrate 3 with throughput direction C.
During this situation, the airport (air blows out portion) 67 that constitutes substrate support structure 65 becomes other compressed-air supply systems different with the airport 4,12,18 that glass substrate 3 is floated from conveyor surface, and set pressure to such an extent that be higher than the compressed-air actuated pressure of substrate floating, form the structure that can adjust pressure according to the warpage of glass substrate 3 simultaneously.
And the air portion of blowing out of the both sides of support glass substrate 3 is not limited to the structure that blows out from a plurality of airports of arranging along throughput direction C, for example, also can form the structure that blows out from the elongated slots that forms along throughput direction C.
And, be discharged to the sidepiece foreign side of substrate placing stage 1,16 or substrate floating parts 11 for the pressurized air that makes contact glass substrate 3 sidepieces, by compressed-air actuated blow-off direction is set for obliquely toward the outer side, can make glass substrate 3 stablize to float carries, and can be around the interior direction of going into glass substrate 3, so be preferred structure from the pressurized air that airport 67 blows out.
In addition, make the compressed-air actuated pressure that blows to glass substrate 3 sidepieces be higher than the compressed-air actuated pressure of substrate floating, can pick up the sidepiece of glass substrate 3 up, can correct the both sides of glass substrate 3 warpage to the lower side for horizontality, so be preferred structure.
And, can adjust the compressed-air actuated pressure that mechanism 65 is floated in the end according to the amount of warpage or the deflection of glass substrate 3, can positively above conveyor surface, pick up the sidepiece and stable conveying of glass substrate 3, so be preferred structure.
And in the above-described embodiment, glass substrate 3 floats by the pressurized air that the airport 4,12,18 from substrate placing stage 1,16 and substrate floating parts 11 blows out, but is not limited thereto, and for example also can utilize electrostatic means to realize floating.During this structure, as long as can carry out destaticing of relative glass substrate.
And, carry the delivery section 29～34 of glass substrate 3 on the slide plate 23～28 of the both sides of being located at substrate placing stage 1,16 and substrate floating parts 11, to move, but be not limited thereto.That is, for example can be at a pair of groove 5,13, the 19 configuration slide plates of substrate placing stage 1,16 and substrate floating parts 11, be arranged on delivery section on this slide plate and it can be moved.
In addition, the absorption position of each absorption layer 29b～34b is the both sides front side of the glass substrate 3 parallel with the throughput direction C of glass substrate 3, but being not limited thereto, for example can be arbitrary position of the rear side or the central portion of glass substrate 3, also can be a plurality of in these each positional alignment.And, when come and go carrying glass substrate 3,, can stablize and carry glass substrate 3 and can not move and shake, so be preferred structure because of coming and going of glass substrate 3 by each end configuration absorption layer at the fore-and-aft direction at least of glass substrate 3.
And, the part that departs from based on the absorption holding position of the glass substrate 3 of absorption layer so long as from graphics field G, can be the top or top of glass substrate 3 and below, also can utilize from the chuck of top and bottom clamping glass substrate to replace absorption layer.
In addition, glass substrate 3 on substrate placing stage 1 placement and glass substrate 3 from the taking-up of substrate placing stage 16, can use other any mechanisms except that conveying mechanical arm 7,21, also can be the substrate floating supply unit that adopts pneumatic conveying etc. from All other routes.
And, in the above-described embodiment, conveying mechanism is formed along the both sides of substrate floating parts to be disposed, two vertex angle parts of the glass substrate that maintenance is floated by the substrate floating parts and the twin shaft mode of movement of carrying, utilize the both sides of substrate supporting mechanism support from the side-prominent outside glass substrate of the both sides face of substrate floating parts, but be not limited thereto, the sidepiece that conveying mechanism is formed at the substrate floating parts disposes, whole keep and carry, substrate supporting mechanism in the other side of the other side configuration support glass substrate of the substrate floating parts of the opposition side that is positioned at this conveying mechanism from the front and back of the sidepiece (one side parallel) of the outstanding glass substrate of substrate floating parts and the conveying single shaft mode of movement of pars intermedia with throughput direction C.
By adopting single shaft mode of movement at the side configuration conveying mechanism of substrate floating parts, compare with the twin shaft mode of movement, can reduce the width dimensions of base board delivery device.The maximization year by year of the glass substrate (mother glass substrate) that uses during particularly along with the manufacturing flat-panel monitor, the large substrate of 2000mm has appearred surpassing recently, when transporting the base board delivery device of corresponding this large-size glass substrate, because road limits is transported the difficulty that also becomes.By adopting the single shaft mode of movement, can be reduced to Min. to the width dimensions of base board delivery device, so can solve the above-mentioned problem of transporting.
And, utilize the sidepiece that conveying mechanism can on even keel integrated support glass substrate, so can omit the substrate supporting mechanism of a side, can omit the conveying mechanism of a side simultaneously, can cost-cutting.
During this situation, be not limited at support unit 51 rotatable roller 53 is installed, also can install can be at a plurality of balls 55 of a plurality of direction rotations.And, can circulation member be set at support unit 51, dispose a plurality of balls 55 thereon.In addition, also can support by blowing out pressurised air.
When only support unit 51 being set in an end of the Width of substrate placing stage 1,16 and substrate floating parts 11, absorption layer 29b～the 34b of glass substrate 3 by each delivery section 29～34 is adsorbed and keeping, so the unit that limits the width position of glass substrate 3 need not be arranged to contact the Width one or both ends of glass substrate 3, suitable similar units can be set.
Abovely describe embodiments of the present invention in detail, but concrete structure is not limited to this embodiment, also comprises design modification in the scope that does not break away from aim of the present invention etc. with reference to accompanying drawing.
Claims (7)
1. base board delivery device, it is to make substrate floating and the base board delivery device of single shaft mode of movement that substrate is carried is characterized in that,
This base board delivery device possesses:
Make the substrate floating parts of substrate floating;
Float the guide piece of the sidepiece configuration of parts along aforesaid substrate;
Substrate holding mechanism, this substrate holding mechanism keeps a sidepiece that floats the described substrate that floats on the parts at aforesaid substrate;
Conveying mechanism is provided with the aforesaid substrate maintaining body in this conveying mechanism, this conveying mechanism is walked on above-mentioned guide piece and aforesaid substrate is moved at throughput direction;
Substrate supporting mechanism, this substrate supporting mechanism is configured in the other side that is positioned at an opposite side with above-mentioned conveying mechanism that aforesaid substrate floats parts, and this substrate supporting mechanism contacts the other side of supporting aforesaid substrate with the lower surface of the other side of aforesaid substrate.
2. base board delivery device according to claim 1 is characterized in that,
The aforesaid substrate supporting mechanism mode parallel with above-mentioned guide piece to float parts across aforesaid substrate extended setting at above-mentioned throughput direction.
3. base board delivery device according to claim 1 is characterized in that,
The aforesaid substrate supporting mechanism is arranged to, so that the height that contacts with the lower surface of aforesaid substrate is for outstanding with respect to the upper surface that aforesaid substrate floats parts with the mode of the roughly the same height of the levitation height of aforesaid substrate.
4. base board delivery device according to claim 1 is characterized in that,
Lower surface outside the graphics field that does not form figure of aforesaid substrate supporting mechanism and aforesaid substrate contacts and supports aforesaid substrate.
5. substrate carrying mechanism according to claim 1 is characterized in that,
The aforesaid substrate supporting mechanism has a plurality of rotary supporting parts that contact with the lower surface of the other side of aforesaid substrate, and this rotary supporting part to above-mentioned throughput direction rotation, supports the other side of aforesaid substrate when carrying aforesaid substrate.
6. base board delivery device according to claim 5 is characterized in that,
Above-mentioned rotary supporting part is can be to the roller of above-mentioned throughput direction rotation, or is supported for the ball that can rotate freely to a plurality of directions.
7. base board delivery device according to claim 1 is characterized in that,
The aforesaid substrate maintaining body has absorption and keeps the upper surface of aforesaid substrate and the adsorbing mechanism of at least one side in the lower surface, or has the chuck mechanism of the top and bottom of controlling aforesaid substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003357576A JP4373175B2 (en) | 2003-10-17 | 2003-10-17 | Substrate transfer device |
| JP2003-357576 | 2003-10-17 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2004100856422A Division CN1608961B (en) | 2003-10-17 | 2004-10-14 | Base plate conveying apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102060193A true CN102060193A (en) | 2011-05-18 |
| CN102060193B CN102060193B (en) | 2013-04-10 |
Family
ID=34614430
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2004100856422A Expired - Fee Related CN1608961B (en) | 2003-10-17 | 2004-10-14 | Base plate conveying apparatus |
| CN2010105651320A Expired - Fee Related CN102060193B (en) | 2003-10-17 | 2004-10-14 | Substrate conveying device |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2004100856422A Expired - Fee Related CN1608961B (en) | 2003-10-17 | 2004-10-14 | Base plate conveying apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4373175B2 (en) |
| KR (1) | KR101213529B1 (en) |
| CN (2) | CN1608961B (en) |
| TW (1) | TWI386354B (en) |
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| CN103449179A (en) * | 2012-06-01 | 2013-12-18 | 三星钻石工业股份有限公司 | Vertical conveying device of substrate |
| US10377578B2 (en) | 2017-05-24 | 2019-08-13 | Delta Electronics, Inc. | Transmission equipment |
| US10427889B2 (en) | 2017-05-24 | 2019-10-01 | Delta Electronics, Inc. | Transmission equipment |
| TWI684563B (en) * | 2017-05-24 | 2020-02-11 | 台達電子工業股份有限公司 | Transmission equipment |
| CN111063653A (en) * | 2018-10-16 | 2020-04-24 | 先进装配系统有限责任两合公司 | Ejector device and method for facilitating the detachment of a component arranged on a holding membrane |
| CN112888572A (en) * | 2018-10-10 | 2021-06-01 | 科迪华公司 | System and method for supporting and transporting substrates |
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| KR100531209B1 (en) * | 2004-12-30 | 2005-11-29 | 지 . 텍 (주) | A glass panel conveyance apparatus having the function for rising to the surface |
| WO2007074798A1 (en) * | 2005-12-27 | 2007-07-05 | Sharp Kabushiki Kaisha | Method of conveying substrate to substrate processing device |
| KR100721597B1 (en) * | 2006-03-31 | 2007-05-23 | 주식회사 태성기연 | Apparatus for transferring of glass panel |
| JP2008016543A (en) * | 2006-07-04 | 2008-01-24 | Dainippon Screen Mfg Co Ltd | Substrate processing apparatus |
| JP4842746B2 (en) * | 2006-09-20 | 2011-12-21 | オリンパス株式会社 | Substrate transfer device |
| JP2011519796A (en) * | 2008-03-11 | 2011-07-14 | コアフロー リミテッド | Method and system for locally controlling the support of a flat object |
| JP2009256029A (en) * | 2008-04-15 | 2009-11-05 | Toray Eng Co Ltd | Conveyance device for tabular member and conveyance method for tabular plate-like member |
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| TWI400513B (en) * | 2008-07-10 | 2013-07-01 | Shuz Tung Machinery Ind Co Ltd | Laser repair apparatus for a panel |
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| JP6605871B2 (en) * | 2015-08-03 | 2019-11-13 | 東レエンジニアリング株式会社 | Substrate floating transfer device |
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- 2004-10-14 KR KR1020040082286A patent/KR101213529B1/en not_active IP Right Cessation
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| CN103449179A (en) * | 2012-06-01 | 2013-12-18 | 三星钻石工业股份有限公司 | Vertical conveying device of substrate |
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| CN103449179B (en) * | 2012-06-01 | 2019-10-11 | 三星钻石工业股份有限公司 | The vertical carrying device of substrate |
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| US10427889B2 (en) | 2017-05-24 | 2019-10-01 | Delta Electronics, Inc. | Transmission equipment |
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| CN112888572A (en) * | 2018-10-10 | 2021-06-01 | 科迪华公司 | System and method for supporting and transporting substrates |
| CN112888572B (en) * | 2018-10-10 | 2024-04-16 | 科迪华公司 | System and method for supporting and transporting a substrate |
| US11985887B2 (en) | 2018-10-10 | 2024-05-14 | Kateeva, Inc. | Systems and methods for supporting and conveying a substrate |
| CN111063653A (en) * | 2018-10-16 | 2020-04-24 | 先进装配系统有限责任两合公司 | Ejector device and method for facilitating the detachment of a component arranged on a holding membrane |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4373175B2 (en) | 2009-11-25 |
| CN1608961A (en) | 2005-04-27 |
| JP2005119818A (en) | 2005-05-12 |
| KR20050037365A (en) | 2005-04-21 |
| CN1608961B (en) | 2011-01-26 |
| TWI386354B (en) | 2013-02-21 |
| CN102060193B (en) | 2013-04-10 |
| TW200519011A (en) | 2005-06-16 |
| KR101213529B1 (en) | 2012-12-18 |
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