JP2005272061A - Conveying device and conveying method of substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a conveying device capable of certainly and easily positioning an end support roller for holding an end of a substrate according to variation in width dimension of the substrate, and an end pressing roller. <P>SOLUTION: The conveying device comprises a plurality of conveyance spindles 3 of which both axial ends are supported rotatably and that are arranged at a predetermined interval, a plurality of conveyance rollers 21 disposed in the conveyance spindles, a pair of end support rollers 22 which are movably disposed in the axial direction at both axial ends of the conveyance spindles and support the lower surfaces at both widthwise ends of the substrate, pressing spindles 26 arranged above the conveyance spindles while the axes are in parallel, a pair of end pressing rollers 28 which are movably disposed in the axial direction at both axial ends of the pressing spindles and hold both widthwise ends of the substrate with the end support rollers, and a driving mechanism for integrally driving the end support rollers and the end pressing rollers in the axial direction of the conveyance spindles and pressing spindles according to the width dimension of the substrate. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a transport apparatus and a transport method for transporting a substrate used in a liquid crystal display device.

  For example, in the manufacturing process of a liquid crystal display device, there are processes such as etching a glass substrate and removing a resist used as a mask after the etching process. In such a substrate processing step, there is a case where a single wafer method is employed in which substrates are processed while being conveyed one by one.

  In the case of processing a substrate by a single wafer method, a processing apparatus is known in which a processing liquid is ejected from a shower nozzle onto the upper and lower surfaces or the upper surface of the substrate while the substrate is transported. This processing apparatus has a chamber, and a transport apparatus for transporting the substrate along a predetermined direction is provided in the chamber. Further, when sequentially processing a substrate using a plurality of processing apparatuses, a transport apparatus for transporting a substrate from an upstream processing apparatus to a downstream processing apparatus is also used between adjacent processing apparatuses.

  The transport device is provided with a plurality of transport shafts that can rotate at predetermined intervals along the transport direction of the substrate. A plurality of transport rollers are provided on the transport shaft at predetermined intervals in the axial direction. And the said board | substrate is conveyed with a conveyance roller by rotationally driving the said conveyance axis | shaft.

  The transport device used in the processing apparatus simply deforms the substrate by the pressure received from the processing liquid when the processing liquid is sprayed onto the substrate simply by supporting the lower surface of the substrate with a plurality of transport rollers. The both ends in the width direction may flutter and be damaged, or may be detached from the conveyance path formed by the conveyance rollers. Further, when the substrate is washed with a brush, the substrate is deformed by the frictional force received from the brush, and the end portion may flutter at that time.

  Therefore, when transporting the substrate, not only the lower surface of the substrate is supported by the transport roller provided on the transport shaft, but also the lower surface of the end of the substrate is supported by the end support roller, and is supported by the end support roller. A pressing roller is disposed on the upper surface of the end portion of the substrate so as to face the end supporting roller at a predetermined interval. As a result, both ends in the width direction of the substrate are held by the pair of end rollers, so that the processing liquid is sprayed onto the substrate and the ends are prevented from fluttering when the brush contacts. .

  By the way, there are substrates of various sizes. Therefore, when the size of the substrate supplied to the transport device is changed, an end support roller and an end presser roller provided at both ends in the axial direction of the transport shaft and the presser shaft according to the size change, Is moved along the axial direction in accordance with the width dimension of the substrate to be positioned. The end support roller also has a function of preventing the substrate being conveyed from meandering in the width direction by supporting the end of the substrate with a stepped portion.

  The present applicant has proposed a transport apparatus having a configuration shown in Patent Document 1 as a transport apparatus capable of coping with changes in the width dimension of the substrate. The transport device disclosed in Patent Document 1 has a support roller composed of a flat roller, and a presser shaft is supported above the support roller so as to be rotatable with its axis parallel.

A presser roller is provided on the presser shaft so as to be movable along the axial direction. The presser roller moves along the axial direction of the presser shaft in conjunction with an engagement body provided at the tip of the mounting shaft driven by the cylinder.
JP-A-10-275845

  As shown in Patent Document 1, when a flat roller is used as a support roller for supporting a substrate, the contact length between the flat roller and the end portion in the width direction of the substrate is increased. Therefore, even if the pressing roller is moved in the axial direction in accordance with the change in the width dimension of the substrate, the end portion in the width direction of the substrate can be reliably held by the pressing roller and the flat roller.

  However, using a flat roller as the supporting roller is not preferable because the back surface of the substrate is likely to become dirty due to the long contact length with the substrate. In addition, if only the presser roller is moved along the axial direction of the support roller, the distance between the presser roller and the support roller is likely to change, so that both ends of the substrate cannot be reliably held. .

  Therefore, as described above, both end portions in the width direction of the substrate are sandwiched between the end support rollers and the end pressing rollers, and the contact length with the substrate is made as short as possible. In such a configuration, not only the end pressing roller but also the end supporting roller must be moved along the width direction of the substrate in accordance with the change in the width dimension of the substrate.

  However, a transport device having a configuration in which not only the end pressing roller but also the end supporting roller can be moved along the width direction of the substrate has not been developed. If the end pressing roller and the end supporting roller are simply provided so that they can be moved in the width direction of the substrate, the end supporting roller and the end pressing roller according to the change in the width dimension of the substrate. In addition, it takes time and effort to position and adjust, and it is difficult to perform the adjustment precisely.

  In the configuration in which the end in the width direction of the substrate is held by the end support roller and the end presser roller, the pair of end support rollers and the end presser roller according to the change in the width dimension of the substrate It is an object of the present invention to provide a substrate transport apparatus and a transport method which can be positioned accurately and easily without causing positional deviation.

This invention is a transfer device for transferring a substrate in a predetermined direction,
A plurality of transport shafts that are rotatably supported at both ends in the axial direction and arranged at predetermined intervals by intersecting the axis with respect to the transport direction of the substrate;
A plurality of transport rollers provided on the transport shaft and supporting the lower surface of the portion excluding both ends in the width direction of the substrate;
End support rollers that are provided at both ends in the axial direction of the transport shaft so as to be movable along the axial direction, and that support lower surfaces of both ends in the width direction of the substrate;
A presser shaft that is rotatably supported at both ends in the axial direction and arranged above the transport shaft with the axis line in parallel,
An end presser roller that is provided at both ends in the axial direction of the presser shaft so as to be movable along the axial direction, and that holds both ends in the width direction of the substrate with the end support roller;
A driving mechanism that integrally drives the end support roller and the end pressing roller in the axial direction of the conveying shaft and the pressing shaft in accordance with the width dimension of the substrate. Located in the transport device.

The drive mechanism is
The transport shaft and the presser shaft are rotatably supported on the transport shaft and the presser shaft on the end support roller and the end presser roller in an axially outer portion and movable along the axial direction. A driven member,
A lower connecting member that connects the driving member and the end support roller and is axially movable and integrally rotated with the conveying shaft;
An upper connecting member that connects the drive member and the end presser roller and is axially movable and integrally rotated with the presser shaft;
By driving the drive member along the axial direction of the transport shaft and the presser shaft, the end support roller and the end presser roller are integrated with the shaft via the lower connecting member and the upper connecting member. And a driving source that moves in the direction.

The drive member is attached to a movable body provided movably along the axial direction of the transport shaft,
Preferably, the driving source is a motor, and the movable body is driven along the axial direction of the transport shaft by the motor.

  It is preferable that the end support roller and the end presser roller, which are movably provided at one end and the other end in the axial direction of the transport shaft and the presser shaft, are positioned by separate drive mechanisms that are driven synchronously.

The present invention comprises a plurality of transport shafts that are rotatably supported at both ends in the axial direction and arranged at predetermined intervals with the axis line intersecting the transport direction of the substrate.
A plurality of transport rollers provided on the transport shaft and supporting the lower surface of the portion excluding both ends in the width direction of the substrate;
End support rollers that are provided at both ends in the axial direction of the transport shaft so as to be movable along the axial direction, and that support lower surfaces of both ends in the width direction of the substrate;
A presser shaft that is rotatably supported at both ends in the axial direction and arranged above the transport shaft with the axis line in parallel,
A substrate using a transport device provided at both ends in the axial direction of the presser shaft and provided with an end presser roller that is provided so as to be movable in the axial direction and holds the both end portions in the width direction of the substrate with the end support roller. A method of conveying
According to a width dimension of a substrate to be conveyed, the end portion supporting roller and the end pressing roller are integrally moved along the axial direction of the conveying shaft and the pressing shaft and positioned. It is in the transport method.

  According to this invention, the end support roller and the end presser roller can be integrally driven in the axial direction of the transport shaft and the presser shaft in accordance with the width dimension of the substrate. Not only can the positional displacement of the end pressing roller be prevented, but also the gap between the end supporting roller and the end pressing roller for clamping the end of the substrate can be kept constant.

An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 is a longitudinal sectional view of a processing apparatus for processing a substrate with a processing liquid, FIG. 2 is also a transverse sectional view, and FIG. 3 is a side sectional view. The processing apparatus includes a chamber 1. In the chamber 1, a transfer device 2 is provided for transferring the substrate W indicated by a chain line in FIG. 1 in a predetermined direction. As shown in FIG. 2, the transport device 2 has a plurality of transport shafts whose axes are substantially orthogonal to the transport direction X of the substrate W, and in this embodiment, eight transport shafts 3 are predetermined along the transport direction. Arranged at intervals.

  In the chamber 1, a carry-in port 1a is formed at one end in the transport direction X of the substrate W, and a carry-out port 1b is formed at the other end. Although not shown in detail, the carry-in port 1a and the carry-out port 1b are opened and closed by a shutter.

  At both ends in the width direction in the chamber 1, band-plate-like attachment members 4 are arranged along the transport direction X that intersects the width direction. The mounting member 4 is provided with bearings 5 at positions corresponding to the ends of the plurality of transport shafts 3, and both ends of the transport shaft 3 are rotatably supported by these bearings 5.

  One end portion of each transport shaft 3 protrudes from the bearing 5, and a power transmission shaft 6 rotatably supported by a plurality of bearings 6a is provided along the transport direction X of the substrate W, as shown in FIG. Has been placed. A first bevel gear 7 is provided at the protruding end of each conveyance shaft 3. The power transmission shaft 6 is provided with second bevel gears 8 that mesh with the respective first bevel gears 7.

  A driven sprocket 11 is provided in the middle of the power transmission shaft 6. A conveyance drive source 12 in which a motor and a speed reducer are integrated is provided outside the chamber 1 corresponding to the position where the driven sprocket 11 is provided. A drive sprocket 14 is provided on the output shaft 13 of the conveyance drive source 12. A chain 15 is stretched between the drive sprocket 14 and the driven sprocket 11. Accordingly, when the transport drive source 12 is operated, the transport shafts 3 are rotationally driven in a predetermined direction via the chain 15 and the first and second bevel gears 7 and 8.

  As shown in FIG. 1, 18 machine chambers are formed on the outer surfaces of both ends in the width direction of the chamber 1. The chamber 1 is a transfer chamber 19 for transferring a substrate. Both ends of the transport shaft 3 are located in the machine chamber 18. As a result, even if the bearing 5 supporting the transport shaft 3 and the meshed bevel gears 7 and 8 generate dust, the dust can be prevented from diffusing into the transport chamber 19 that transports the substrate W of the chamber 1. ing.

  A portion where both end portions of the transfer shaft 3 penetrate from the transfer chamber 19 to the machine chamber 18 is closed by a fork-shaped partition plate 20.

  A plurality of, in this embodiment, three conveying rollers 21 are provided at predetermined intervals in the axially intermediate portion of the conveying shaft 3, and end support rollers 22 are provided at both axial ends so as to be movable in the axial direction. It has been. As shown in enlarged views in FIGS. 4 and 5, a stepped portion 23 is formed on the outer peripheral surface of the end portion supporting roller 22, and the lower surface of the end portion in the width direction of the substrate W is supported by the stepped portion 23. Accordingly, the substrate W is transported along the X direction without meandering by the step portion 23.

  A lower connecting member 24 made of a pipe material is externally held so as to be movable in the axial direction outside the end support roller 22 of the transport shaft 3 in the axial direction. One end of the lower connecting member 24 is connected and fixed to the outer surface of the end support roller 22 via an end member 25.

  As shown in FIG. 1, a presser shaft 26 is disposed above the transport shaft 3 with the axis line parallel to the transport shaft 3. The presser shaft 26 may be provided so as to face all the transport shafts 3, but in this embodiment, as shown in FIG. 3, the presser shaft 26 is provided so as to face two of the eight transport shafts 3.

  As shown in FIG. 1, spur gears 30a and 30b that mesh with each other are provided at the ends of the transport shaft 3 and the presser shaft 26 provided in parallel above the transport shaft 3. Accordingly, when the transport shaft 3 rotates, the rotation is transmitted to the presser shaft 26. In FIG. 2, spur gears 30a are provided on all the conveying shafts 3, so that the number of presser shafts 26 can be increased as appropriate.

  Both ends of the presser shaft 26 are rotatably supported by bearings 27 provided on the attachment member 4. At both ends of the presser shaft 26, end presser rollers 28 are provided so as to face the end support roller 22 and be movable in the axial direction.

  As shown in FIG. 5, on the outer peripheral surface of the end pressing roller 28, a ridge 29 is formed that faces the stepped portion 23 of the end supporting roller 22 at a predetermined interval G. This protrusion 29 is formed by an O-ring. Then, both end portions in the width direction of the substrate W enter the gap G and are transported. Thereby, both end portions in the width direction of the substrate W are held and conveyed by the end portion supporting roller 22 and the end pressing roller 28 without fluttering. The gap G is set to be substantially the same as or slightly larger than the thickness of the substrate W.

  A cylindrical upper connecting member 31 is fitted on the end of the presser shaft 26 which is axially outward from the end presser roller 28 so as to be movable in the axial direction. One end of the upper connecting member 31 is connected to the outer surface of the end pressing roller 28 via an end member 32.

  As shown in FIG. 4, long holes 3 a and 26 a along the axial direction penetrate through the portions where the lower connecting member 24 and the upper connecting member 31 of the transport shaft 3 and the presser shaft 26 are fitted externally, respectively. Is formed. The elongated holes 3a and 26a are provided with interlocking pins 24a and 31a attached to the lower connecting member 24 and the upper connecting member 31, respectively. Accordingly, the end support roller 22 and the presser roller 28 are interlocked with the rotation of the transport shaft 3 and the presser shaft 26 via the lower connecting member 24, the upper connecting member 31, and the interlocking pins 24a and 31a. It has become.

  The end support roller 22 and the presser roller 28 move along the axial direction of the transport shaft 3 and the presser shaft 26 within a range in which the interlocking pins 24a and 31a can move along the long holes 3a and 26a. It is possible.

  End members 25 and 32 similar to one end are provided at the other ends of the lower connecting member 24 and the upper connecting member 31, respectively. A plate-like drive member 35 is provided along the longitudinal direction of the chamber 1 at a portion between the other end of each of the connecting members 24 and 31 of the transport shaft 3 and the presser shaft 26 and the bearings 5 and 27. It has been. As shown in FIG. 4, the drive member 35 is provided with a pair of bearings 33 that rotatably support the conveyance shaft 3 and the presser shaft 26.

  Each bearing 33 is provided via a collar 34 slidably provided along the axial direction on the transport shaft 3 and the presser shaft 26. That is, the drive member 35 is provided with the bearings 33 at intervals corresponding to the arrangement interval of the conveying shafts 3, and the two bearings 33 are provided in the vertical direction as shown in FIG. It has been.

  As shown in FIG. 3, the drive member 35 is provided with a convex portion 35a only in the middle in the width direction where the presser shaft 26 is provided, but the height of the drive member 35 is increased over the entire length in the width direction. The presser shaft 26 may be provided so as to face all the transport shafts 3.

The inner case of the bearing 33 provided on the drive member 35 is connected to the end member 32 provided on the other end of the upper and lower connecting members 24, 31 via the collar 34. Accordingly, when the drive member 35 is driven in the axial direction of the transport shaft 3 as will be described later, the end support roller 22 and the end presser roller 28 are moved by the lower connecting member 24 and the upper connecting member 31 through the movement. Interlocked. Further, if the transport shaft 3 and the presser shaft 26 rotate, the lower connecting member 24 and the upper connecting member 31 are interlocked with this rotation.

  One end of a pair of connecting shafts 36 having a horizontal axis is connected and fixed to both longitudinal ends of the lower end of each drive member 35 positioned at one end and the other end in the axial direction of the transport shaft 3 and the presser shaft 26. ing. The other end of the connecting shaft 36 is connected and fixed to a base 37 as a movable body via an attachment member 38. As shown in FIG. 1, the pair of bases 37 is disposed below the machine room 18 formed on both sides in the width direction of the chamber 1, and the connecting shaft 36 is hermetically sealed with the side wall of the machine room 18 through an O-ring 36a. And it penetrates so that it can move forward and backward.

  As shown in FIG. 3, the base 37 is movably supported by a linear guide 39 provided along the width direction of the chamber 1, that is, the direction intersecting the transport direction of the substrate W. A rack 41 is provided on the lower surface of the base 37 along the moving direction of the base 37. A spur gear 44 is engaged with the rack 41. The spur gear 44 is fitted to an output shaft 43 of a positioning drive source 42 in which a motor and a speed reducer are integrated.

  When the positioning drive source 42 is actuated to drive the base 37 along with the rack 41 along the width direction of the chamber 1 by the spur gear 44, the lower connecting member 24 and the upper connecting member together with the driving member 35 interlocking with the base 37. 31 moves along the axial direction of the transport shaft 3 and the presser shaft 26.

As a result, the end support roller 22 and the end presser roller 28 connected to one end of each of the connecting members 24 and 31 move integrally along the axial direction of the transport shaft 3 and the presser shaft 26. . The end support roller 22 and the end pressing roller 28 can be positioned between a position of maximum distance L ₁ indicated by a solid line in FIG. 1, a position of minimum distance L ₂ indicated by the chain line.

  Since the end support roller 22 and the end presser roller 28 are integrally moved along the axial direction of the transport shaft 3 and the presser shaft 26, the relative positional relationship between these rollers 22 and 28 is determined by the transport shaft 3. Even if the position of the presser shaft 26 in the axial direction is changed, there is no change. In other words, if the end support roller 22 and the end presser roller 28 are positioned, the relative positional relationship is maintained constant without changing even if the rollers 22 and 28 are moved.

  A pair of left and right drives that drives the end support roller 22 and the end presser roller 28 along the transport shaft 3 and the presser shaft 26 by the lower connecting member 24, the upper connecting member 31, the drive member 35 and the positioning drive source 42. A mechanism 50 is configured.

The pair of left and right positioning drive sources 42 are driven and controlled by a control device 45. The control device 45 drives the pair of left and right bases 37 in synchronization. Accordingly, the left and right end support rollers 22 and the end presser rollers 28 can be positioned symmetrically with respect to the center line in the width direction of the chamber 1.
Although not shown, a plurality of nozzle bodies for injecting the processing liquid onto the upper surface of the substrate W to be transported are arranged in the chamber 1 at predetermined intervals along the width direction of the substrate W.

Next, a case where the substrate W is transferred by the transfer apparatus 2 having the above-described configuration will be described.
When transporting the wafer W in a large width dimension slightly larger than the width dimension indicated by L ₁ in FIG. 1, the end support roller 22 is positioned at the position shown in solid lines in FIG. 1. Thereby, the substrate W fed from the carry-in port 1a of the chamber 1 is supported by the step portions 23 of the end support rollers 22 at both ends in the width direction, and the center portion in the width direction excluding both ends is supported by the transport roller 21. Supported and transported.

  When the substrate W is transported to the position where the end pressing roller 28 is provided, both end portions in the width direction of the substrate W are formed by the stepped portion 23 of the end supporting roller 22 and the protrusion 29 of the end pressing roller 28. The distance G is formed and held. Thereby, even if the processing liquid is sprayed from the nozzle body onto the upper surface of the substrate W, both ends of the substrate W are transported without fluttering.

On the other hand, when the width dimension of the substrate W is changed to a width dimension smaller than L ₁ shown in FIG. 1, for example, a width dimension slightly larger than L ₂ , this is input to the controller 45. Accordingly, the control device 45 operates in synchronization with the pair of left and right positioning drive sources 42, and moves the pair of left and right bases 37 toward the inside in the width direction of the chamber 1, that is, {(L ₁ −L ₂ ). / 2} is driven for the distance.

When the base 37 is driven, the drive member 35 is interlocked with the base 37. When the driving member 35 is driven, the end support roller 22 and the end pressing roller 28 are connected to the transport shaft 3 and the pressing shaft 26 via the lower connecting member 24 and the upper connecting member 31 connected to the driving member 35. And move inwardly in the width direction of the chamber 1. Thereby, so that the distance between the transport shaft 3 and the pressing shaft 26 and a pair of left and right end support roller 22 provided at both ends of the end portion pressing roller 28 is set to L _2.

  Therefore, when the substrate W whose width dimension has been changed is sent from the carry-in port 1 a of the chamber 1, the substrate W is transported with both end portions in the width direction being supported by the step portions 23 of the end support rollers 3. When the end pressing roller 28 is conveyed to the position where it is conveyed, it enters the gap G formed by the step portion 23 and the protrusion 29 of the end pressing roller 28, and the end is held. The end portion is conveyed without flapping by the pressure of the processing liquid.

  As described above, when the width of the substrate W is changed to change the positions of the end support roller 22 and the end pressing roller 28, the rollers 22 and 28 are integrally driven by the driving member 35. Therefore, the end support roller 22 and the end presser roller 28 move along the transport shaft 3 and the presser shaft 26 without changing a preset relative positional relationship.

  As a result, there is no displacement between the rollers 22 and 28 along the axial direction, and the gap G between the step portion 23 and the protrusion 29 does not change, so the width dimension of the substrate W is changed. Even in this case, both end portions in the width direction of the substrate W to be transported can be reliably held. In addition, since the end support roller 22 and the end presser roller 28 can be positioned by operating the positioning drive source 42, the operation is performed as compared with the case where the rollers 22 and 28 are manually positioned. It can be done easily and reliably.

  The pair of left and right drive members 35 are driven by separate drive mechanisms 50, and the pair of drive mechanisms 50 are synchronized by the control device 45. Therefore, the end support rollers 22 and the end presser rollers 28 provided at both ends of the transport shaft 3 and the presser shaft 26 are accurately positioned so as to be symmetric with respect to the center line in the width direction of the chamber 1. can do.

  Therefore, even if the width dimension of the substrate W to be transferred is changed, if the substrate W is fed into the chamber 1 with the center in the width direction of the substrate W aligned with the center in the width direction of the chamber 1, the width direction of the substrate W is changed. The two end portions of the first and second end portions can be securely held and transported by the end portion supporting roller 22 and the end portion pressing roller 28.

  The present invention is not limited to the one embodiment described above and can be variously modified. For example, one positioning drive source is provided at the center in the width direction at the bottom of the chamber, and two racks are engaged with a spur gear provided on the output shaft of the positioning drive source. These racks are driven in different directions as the spur gear rotates. Bases provided at both ends in the width direction of the chamber are connected to each rack. Thereby, it becomes possible to drive two drive mechanisms by one positioning drive source.

  Moreover, although the processing apparatus which processes a board | substrate with a process liquid was demonstrated, this invention is applicable also to the processing apparatus etc. which wash | clean a board | substrate with a washing brush. Furthermore, the transfer apparatus of the present invention can be applied even when the substrate is simply transferred instead of the processing apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS The longitudinal cross-sectional view of the processing apparatus which shows one Embodiment of this invention. The cross-sectional view of the processing apparatus shown in FIG. The side view of the processing apparatus shown in FIG. The enlarged view of the edge part of a conveyance axis | shaft and a presser axis | shaft. The enlarged view of an edge part supporting roller and an edge part pressing roller.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 3 ... Conveying shaft, 21 ... Conveying roller, 22 ... End support roller, 24 ... Lower connecting member, 26 ... Pressing shaft, 28 ... End pressing roller, 31 ... Upper connecting member, 35 ... Driving member, 37 ... Base ( Movable body), 42 ... positioning drive source (drive source), 50 ... drive mechanism.

Claims (5)

A transport device for transporting a substrate in a predetermined direction,
A plurality of transport shafts that are rotatably supported at both ends in the axial direction and arranged at predetermined intervals by intersecting the axis with respect to the transport direction of the substrate;
A plurality of transport rollers provided on the transport shaft and supporting the lower surface of the portion excluding both ends in the width direction of the substrate;
End support rollers that are provided at both ends in the axial direction of the transport shaft so as to be movable along the axial direction, and that support lower surfaces of both ends in the width direction of the substrate;
A presser shaft that is rotatably supported at both ends in the axial direction and arranged above the transport shaft with the axis line in parallel,
An end presser roller that is provided at both ends in the axial direction of the presser shaft so as to be movable along the axial direction, and that holds both ends in the width direction of the substrate with the end support roller;
A driving mechanism that integrally drives the end support roller and the end pressing roller in the axial direction of the conveying shaft and the pressing shaft in accordance with the width dimension of the substrate. Conveying device. The drive mechanism is
The transport shaft and the presser shaft are rotatably supported on the transport shaft and the presser shaft on the end support roller and the end presser roller in an axially outer portion and movable along the axial direction. A driven member,
A lower connecting member that connects the driving member and the end support roller and is axially movable and integrally rotated with the conveying shaft;
An upper connecting member that connects the drive member and the end presser roller and is axially movable and integrally rotated with the presser shaft;
By driving the drive member along the axial direction of the transport shaft and the presser shaft, the end support roller and the end presser roller are integrated with the shaft via the lower connecting member and the upper connecting member. The substrate transport apparatus according to claim 1, comprising: a drive source that moves in a direction. The drive member is attached to a movable body provided movably along the axial direction of the transport shaft,
3. The substrate transport apparatus according to claim 2, wherein the driving source is a motor, and the movable body is driven along the axial direction of the transport shaft by the motor.   An end support roller and an end presser roller that are movably provided at one end and the other end in the axial direction of the transport shaft and the presser shaft are positioned by separate drive mechanisms that are driven synchronously. The substrate transfer apparatus according to claim 1. A plurality of transport shafts that are rotatably supported at both ends in the axial direction and arranged at predetermined intervals by intersecting the axis with respect to the transport direction of the substrate;
A plurality of transport rollers provided on the transport shaft and supporting the lower surface of the portion excluding both ends in the width direction of the substrate;
End support rollers that are provided at both ends in the axial direction of the transport shaft so as to be movable along the axial direction, and that support lower surfaces of both ends in the width direction of the substrate;
A presser shaft that is rotatably supported at both ends in the axial direction and arranged above the transport shaft with the axis line in parallel,
A substrate using a transport device provided at both ends in the axial direction of the presser shaft and provided with an end presser roller that is provided so as to be movable in the axial direction and holds the both end portions in the width direction of the substrate with the end support roller. A method of conveying
According to a width dimension of a substrate to be conveyed, the end portion supporting roller and the end pressing roller are integrally moved along the axial direction of the conveying shaft and the pressing shaft and positioned. Transport method.

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