JP2004331349A - In-line type vacuum processing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an in-line type vacuum processing device capable of eliminating the use of any carrier and performing the transport with an object in an erected position. <P>SOLUTION: The in-line type vacuum processing device to transport a glass board G inside a vacuum space is equipped with a plurality of feed rollers 67 arranged in the transporting direction, a plurality of upper follower rollers 37 in at least one row arranged in the transporting direction for supporting the upper part of the glass board G transported in the erected position in inclination to the vertical direction, a plurality of lower follower rollers 52 in at least one row arranged in the transporting direction for supporting the lower part of the board G, and a motor 55 to rotate the feed rollers 67 synchronously, whereby the transport is conducted in such a condition that the bottom edge is placed on the peripheral side faces of the feed rollers 67 and that one surface of the board G is supported on the peripheral side faces of the upper 37 and lower follower rollers 52. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an inline vacuum processing apparatus, and more particularly to an inline vacuum processing apparatus that transports and processes a plate-like article, for example, a glass substrate for a plasma display.
[0002]
[Prior art]
The following Patent Document 1 discloses a substrate transport device that horizontally transports a substrate such as a glass substrate constituting a liquid crystal panel in order to perform a predetermined process on the substrate. However, since such a glass substrate for a display having a thickness of 2 mm or less and an area of 1 m × 1 m or more has been used, it is easily bent and easily damaged. Further, since a glass substrate has a considerable area, a large site and floor area are required when processing a large amount in a factory.
[0003]
On the other hand, in [Patent Document 2] described below, a plurality of glass substrates are attached to a vertical carrier in an upright position, and inline vacuum processing is performed. Unlike the above-mentioned publication, there is no problem of bending since it is not horizontal conveyance. However, after performing a predetermined process on the glass substrate, that is, a sputtering process in this publication, it is necessary to collect the carrier in order to mount the next glass substrate. The device becomes larger.
[0004]
Next, in [Patent Document 3] described below, "as shown in FIG. 8, a motor 31 'is mounted on a carrier 30' attached to a base 20 ', and a driving roller 32' and a driven roller 33 ', a support roller 34' and a floating unit 35 'are attached. The floating unit 35 ′ supports the glass substrate 1 ′ in a non-contact manner. As shown in FIG. 9, the floating unit 35 ′ sends a gas 351 to a pressure case 350, and the gas 351 faces a transport surface 36 ′. By passing through the 352, a gas film 353 is formed between the porous body 352 and the vertical glass substrate 1 ', and the gas substrate 353 supports and floats the glass substrate 1'. The position and number of the floating units 35 'can be determined by the dimensions of the glass substrate 1' to be conveyed. That is, the transfer device 2 'can cope with a change in the size of the glass substrate 1'. The driven roller 33 'and the support roller 34' are arranged at equal intervals on the transfer surface 36 'of the transfer table 30' so as to contact the lower end of the glass substrate 1 '. Alternatively, a belt or the like may be stretched between one support roller 34 'and the driven roller 33' to move the glass substrate 1 '. It is preferable that the transfer angle of the transfer surface 36 ', that is, the transfer angle of the glass substrate 1' is slightly inclined. This is because if the glass substrate 1 ′ is set up vertically, the conveyance becomes unstable. By configuring the transfer table 30 ′ to be detachable from the base 20 ′, only the transfer table 30 ′ may be replaced or transferred. The technology has been disclosed.
[0005]
In such an apparatus, since the carrier is certainly unnecessary, the operation of collecting the carrier after performing the predetermined processing on the glass substrate as described in the above publication is eliminated, and the space for collecting the carrier is also reduced. do not need. However, while the glass substrate is transported while being supported by a gas film, many devices as shown in FIG. 9 are required, and such a device is considered to require a considerable cost. Although air is ejected from the perforated plate, it is considered difficult to form a uniform thickness of a gas film between these devices and the substrate arranged in the transport direction, particularly in a vacuum. In this case, it is considered difficult to transport the glass substrate uniformly and smoothly due to unevenness of the gas film existing between the front end and the rear end of the glass substrate.
[0006]
In addition, the above-mentioned apparatus is used in the atmosphere, but when a gas is ejected from a porous material in the atmosphere, the glass substrate will be stably transported. It is questionable whether a gas film can be formed stably because the gas is exhausted by the means.
[0007]
[Patent Document 1]
JP-A-10-265018
[Patent Document 2]
JP-A-5-171441
[Patent Document 3]
JP-A-2002-308422
[0008]
[Problems to be solved by the invention]
The present invention has been made in view of the above-mentioned problem, and reduces bending in an upright position for surface treatment of a glass substrate as in the above publication, eliminates damage due to this, and stably transports the glass substrate at low cost. It is an object of the present invention to provide an in-line type vacuum processing apparatus capable of performing the above-described processing.
[0009]
[Means for Solving the Problems]
The above problem is solved in an in-line vacuum processing apparatus for transporting a plate-like article in a vacuum space, in which a plurality of transport rollers arranged along the transport direction and a transport in an upright posture with respect to the vertical direction. A plurality of upper driven rollers arranged in the transport direction to support an upper portion of the plate-shaped article, and arranged along the transport direction to support a lower portion of the plate-shaped article. At least one row of a plurality of lower driven rollers, and a drive source for rotating and driving the plurality of transport rollers in synchronization, a lower edge is placed on a peripheral side surface of the transport rollers, and the upper driven rollers and The problem is solved by an in-line vacuum processing apparatus characterized in that the plate-like article is conveyed while supporting one surface of the plate-like article on a peripheral side surface of a lower driven roller.
[0010]
Or, in an inline vacuum processing apparatus for transporting a plate-like article in a vacuum space, a plurality of transport rollers arranged along the transport direction, and transported in an upright position with respect to the vertical direction. At least one row of a plurality of upper drive rollers arranged along the transport direction to support the upper part of the plate-like article, and at least one row arranged along the transport direction to support the lower part of the plate-like article A plurality of lower drive rollers, a first drive source for synchronously rotating the plurality of transport rollers and a second drive source for synchronously rotating the plurality of upper drive rollers; A third driving source for rotating and driving the lower driving rollers in synchronization with each other, placing a lower edge on the peripheral side surface of the transport roller, and placing the plate on the peripheral side surfaces of the upper driving roller and the lower driving roller. One side of the article It is solved by an inline vacuum processing apparatus being characterized in that so as to be conveyed while supported.
[0011]
Or, in an inline vacuum processing apparatus for transporting a plate-like article in a vacuum space, a plurality of transport rollers arranged along the transport direction, and transported in an upright position with respect to the vertical direction. A plurality of driven rollers arranged in at least two rows along the transport direction to support one surface of the plate-like article, and a drive source for synchronously rotating the plurality of transport rollers. A lower edge is placed on a peripheral side surface of the transport roller, and the one side of the plate-like article is transported while being supported on the peripheral side surface of the driven roller, thereby solving the problem by an in-line vacuum processing apparatus. Is done.
[0012]
Or, in an inline vacuum processing apparatus for transporting a plate-like article in a vacuum space, a plurality of transport rollers arranged along the transport direction, and transported in an upright position with respect to the vertical direction. At least two rows of a plurality of drive rollers arranged along the transport direction to support one surface of the plate-like article, and a first drive source that synchronously drives the plurality of transport rollers to rotate. A second drive source that drives the plurality of drive rollers to rotate in synchronization with each other, a lower edge is placed on a peripheral side surface of the transport roller, and the one surface of the plate-shaped article is disposed on a peripheral side surface of the drive roller. The problem is solved by an in-line vacuum processing apparatus characterized in that the wafer is transported while being supported.
[0013]
Or, in an inline vacuum processing apparatus for transporting a plate-like article in a vacuum space, a plurality of transport rollers arranged along the transport direction, and transported in an upright position with respect to the vertical direction. A plurality of drive rollers arranged in the transport direction to support one surface of the plate-shaped article; and a drive source for synchronously rotating the plurality of drive rollers. The lower edge is placed on the peripheral side surface of the transport roller, and the transport roller is driven and transported while supporting the one surface of the plate-like article on the peripheral side surface of the drive roller. It is solved by an in-line vacuum processing device.
[0014]
With any of the above-described in-line vacuum processing apparatuses, a plate-shaped article, in particular, a glass substrate can be conveyed in a standing position at low cost without damage. The area occupied by the device can be minimized.
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an inline vacuum processing apparatus according to an embodiment of the present invention will be described with reference to the drawings.
[0015]
FIG. 1 shows the entire in-line type vacuum processing apparatus 10, which comprises a charging chamber 12, a processing chamber 14, and an unloading chamber 16 in order from the left. Each room is provided with a transporter 18 according to the present invention. These transporters 18 have the same configuration. Although the details will be described later, the glass substrate G is transported in the direction of arrow A by these. Gate valves 20, 22, 24, and 26 are provided at the entrance, between the chambers, and at the exit, respectively, so as to be openable and closable in a known manner. The glass substrate G to be processed is introduced from the direction of arrow B by opening the gate valve 20. After a predetermined process, that is, a sputtering process according to the embodiment of the present invention, is performed in the processing chamber 14, the gate valve 26 is opened from the extraction chamber 16 to be taken out into the atmosphere in the direction of arrow C.
[0016]
First, the details of the preparation room 12 will be described.
The charging chamber main body 30 forming the vacuum chamber has a rectangular cross section as shown in FIG. 3, and includes a left wall portion 31, a right wall portion 32, an upper wall portion 33 and a lower wall portion 34 which integrate these components. I have.
[0017]
As shown in FIGS. 2 and 4, seven vacuum seal bearings 35 are fixed to the upper wall portion 33 at equal intervals, and the upper rotation shaft 36 is rotatably supported by the vacuum seal bearings 35. A pulley 38 is fixed to a lower end of the upper rotary shaft 36 at a protruding end from the vacuum seal bearing 35 which is supported by a bearing member 100 fixed to the left side wall 31.
[0018]
On the other hand, a first motor 40 is disposed outside the main body 30 of the charging chamber, and a pulley 39 is fixed to a tip end of a rotating shaft thereof. The belt 41 is wound via a guide roller 44 so as to be rotated. Further, as clearly shown in FIG. 4, a roller 42 of the tension device 43 is disposed so as to press the belt 41 'between the pulleys 38, 38. An annular body 37 (hereinafter, also referred to as an upper roller) is fixed concentrically to the upper rotating shaft 36 at intervals as shown in the drawing. This may be configured as a diameter increasing portion of the rotating shaft 36.
[0019]
As shown in FIG. 3, a vacuum seal bearing 50 is attached to the lower wall portion 34 so as to face the upper vacuum seal bearing 35, that is, at the same interval. A pulley 53 is fixed to a protruding portion of the lower rotating shaft 51 from the vacuum seal bearing 50. A second motor 55 is disposed outside and below the lower wall portion 34 of the charging chamber main body 12, and the rotating shaft 56 is connected to a gear box 57, and a first output shaft of the gear box 57 is provided. A pulley 59 is fixed to 58, and a belt 54 is wound between the pulley 59 and the pulley 53.
[0020]
A lower roller 52 of the same type as the above-described upper roller 37 is integrally fixed to the lower rotating shaft 51. This may be formed as a diameter increasing portion of the rotating shaft 51. A pulley 61 is attached to a tip end of a second output shaft 60 of the gear box 57, and a corrugated belt is provided between the pulley 61 and a guide roller 63 as shown in FIG. 62 are wound. Further, vacuum seal bearings 65 for conveying rollers are attached below the left side wall 31 at equal intervals, and the tip of the rotating shaft protruding into the charging chamber 12 has a diameter smaller than that of the upper roller 37 and the lower roller 52. A large transport roller 67 is fixed.
[0021]
On the other hand, a pulley 68 is attached to a portion protruding toward the atmosphere, and a belt 62 is wound between the guide roller 63 and the pulley 68 fixed to the rotating shaft of the adjacent vacuum seal bearing 65. Have been.
[0022]
As clearly shown in FIG. 2, a pair of cylinders 70a and 70b are mounted on the upper portion of the upper wall portion 35, as shown in FIG. 4, and racks 71a and 71b are fixed to these drive rods. Have been. These racks 71a, 71b are engaged with pinions 72a, 72b. Rotating shafts 73a and 73b are fixed to the centers of these pinions 72a and 72b, and gates 74a and 74b are attached to these, as clearly shown in FIG.
[0023]
As shown in FIG. 3, a pair of heaters 75a and 75b are fixed to the left side wall 31 and the right side wall 32 via the mounting blocks a and b, respectively, in the charging chamber main body 30.
[0024]
In particular, as clearly shown in FIG. 3, the light emitting side sensor device 76 is fixed to the left side wall portion 31, and the light receiving side sensor device 77 that receives the light beam L projected therefrom is fixed to the right side wall portion 32. . Light ray L is also inclined about 30 ° with respect to the vertical, as also clearly shown in FIG. As a result, light enters the glass substrate G to be conveyed at an angle as shown in the figure. However, the glass substrate surface is a reflection surface having a certain degree of reflectivity, and is projected at this angle to produce reflected light. Is larger than the right angle, the light beam L is not received thereby, and the light path intersects the light path by the glass substrate G. A large difference can be provided in the light receiving level.
[0025]
Both the light emitting side sensor device 76 and the light receiving side sensor device 77 are composed of three sensors 76a, 76b, 76c and 77a, 77b, 77c. The sensors 76a, 77a function to detect the arrival of the tip of the glass substrate G. The second light emitting side sensors 76b and 77b also function to detect the arrival of the tip, but switch the transport speed of the glass substrate G to a low speed by the former detection. A stop command is given to the drive source by the latter sensors 76b and 77b.
[0026]
Thereafter, the sheet is slightly conveyed by inertia. The stop position is confirmed by the third light-emitting sensor 76c and the light-receiving sensor 77c to make sure that the tip of the glass substrate G is at this position. . Stop here.
[0027]
Next, the sputter chamber 14 connected to the preparation chamber 12 will be described.
A film of a predetermined material is formed on the other surface of the glass substrate G in the sputtering chamber 14, and a sputtering device S is provided at a position as shown in FIG. A heater 80 is fixed to the left side wall by a member c so as to face the target portion. The mechanism for transporting the glass substrate G is the same as the charging chamber 12. Therefore, corresponding parts are denoted by the same reference numerals, and detailed description thereof will be omitted.
[0028]
In the embodiment of the present invention, so-called continuous film formation is performed, the glass substrate G is continuously transferred, and a sputtered film is formed on the entire surface in the process. Although not shown, a light-emitting side sensor device and a light-receiving side sensor device similar to those in the charging chamber 12 are provided in a similar arrangement on the unloading chamber 16 side.
[0029]
As shown in FIG. 7, a gas ejector 86 is provided in the upper wall of the mounting member 84 in the sputter chamber 14 so as to eject a gas flow toward the peripheral surface of the transport roller 67. Further, a cover member 82 is provided outside this.
[0030]
An unloading chamber 16 is connected to the downstream side of the sputtering chamber 14, and a transfer mechanism 18 similar to the upstream charging chamber 12 and the sputtering chamber 14 is provided inside the unloading chamber 16. In addition, the heater provided in the preparation chamber 12 and the sputtering chamber 14 is not provided in the extraction chamber 16. However, a light-emitting side sensor device and a light-receiving side sensor device are provided at the tip portion in the same arrangement as the upstream charging chamber 12 and the sputtering chamber 14. The brewing chamber main body 30 is inclined rightward in FIG. 3 by 5 degrees with respect to the vertical line. The same applies to other rooms.
[0031]
The configuration of the in-line vacuum processing apparatus according to the embodiment of the present invention has been described above. Next, this operation will be described.
[0032]
In using the inline vacuum processing apparatus according to the embodiment of the present invention, first, a pair of tension devices 43 shown in FIG. 4 are operated to operate the tension of the belt 41 wound as shown in FIG. Is adjusted so that each roller is driven smoothly and slip does not occur. Further, power is supplied to the heaters 75a, 75b, and 80, and the interiors of the preparation chamber 12 and the sputtering chamber 14 are heated. In order to open the inlet-side gate valve 20 of the charging chamber 12, the left cylinder 70a in FIG. 4 is driven to move the rack 71a forward and rotate the pinion 72a, and the rotating shaft 73a fixed to this is moved to the position shown in FIG. , The gate plate 74a is opened.
A glass substrate G for a liquid crystal display is carried in from the atmosphere. Each motor provided in the preparation room 12 is driven. Therefore, the front end of the glass substrate G is placed on the peripheral surface of the transport roller 67, and the rear side of the glass substrate G is supported by the upper roller 37 and the lower roller 52. The glass substrate G is immediately sent into the preparation chamber 12 by the rotation. When the leading end of the glass substrate G reaches the sensor units 76a and 77a of the light emitting side sensor device 76 and the light receiving side sensor device 77, the light receiving level up to that point is oblique as shown in the optical path L. The arrival is detected with a large level difference. By this detection signal, the number of rotations of the motor is reduced, that is, switching to slow conveyance is performed.
[0033]
Next, when the leading end reaches the second light emitting side sensor unit 76b and the light receiving side sensor unit 77b, a stop command is issued to the motor. As a result, the glass substrate G heads for stopping, but stops completely when it slightly passes through the light emitting side sensor section 76c and the light receiving side sensor section 77c due to its inertia. Therefore, it is confirmed that the front end of the glass substrate G is stopped on the light emitting side sensor part 76c, the light receiving side sensor part 77c, or slightly.
[0034]
The outlet-side gate valve 22 of the charging chamber 12 is now closed, but after confirming the position of the inlet-side gate valve 20 as well, the cylinder 70a is double-acted, the rack 71a is also double-acted, and the pinion 72a is moved counterclockwise. Rotate to close the inlet side gate valve 20. Therefore, the inside of the charging chamber 12 becomes a sealed closed space, and is heated to a predetermined temperature.
[0035]
Now, it is assumed that the glass substrate G does not exist in the next sputtering chamber 14. The outlet-side gate valve 26 of the charging chamber 12 moves the rack 71b rightward by driving the cylinder 70b, and the pinion 72b engaged with the rack 71b rotates clockwise, and the rotating shaft 73b fixed to this rotates the pinion 72b. By turning clockwise, the outlet side gate valve 22 is opened. Although the vacuum exhaust system is not shown in the drawing, it is assumed that the preparation chamber 12, which is a closed space, has been exhausted to a predetermined pressure reduction degree.
[0036]
Similarly, the next sputtering chamber 14 is also evacuated in a closed space, and by opening the gate valve 22 (also used as the charging chamber 22 and the sputtering chamber 14), the vacuum chamber of the charging chamber 12 and the vacuum chamber of the sputtering chamber 14 are separated. Communicate. The transport roller 67, the upper roller 37, and the lower roller 52 of the transport mechanism 18 in the sputter chamber 14 are also driven, and the glass substrate G is sent into the sputter chamber 14 simultaneously with the opening of the gate valve 22.
[0037]
The sputter device S in the sputter chamber 14 is configured in a known manner, but atoms or molecules knocked out from the target plate T by plasma, that is, atoms or molecules of a material to be formed into a film are indicated by arrows. And hits one surface of the glass substrate G, and a film is formed here.
[0038]
In the embodiment of the present invention, since continuous film formation is adopted, the film is conveyed at a predetermined speed as it is, and during this conveyance, a film is formed on the entire surface from the front end to the rear end. When reaching the sensor device section, slow conveyance is performed in the sensor sections 76a and 77a similarly to the charging chamber 12, and a stop command is given to the motor by the sensor sections 76b and 77b, and on the optical path L between the sensor sections 76c and 77c, or The tip part stops when passing slightly.
[0039]
As clearly shown in FIGS. 2 and 3, each sensor section 76a, 76b, 76c of the light emitting side sensor apparatus 76 and each sensor section 77a, 77b, 77c of the light receiving side sensor apparatus 77 opposed thereto are shown in FIG. As described above, they are disposed so as to face each other diagonally. Although this oblique direction is set to 30 ° in the embodiment of the present invention, it is desirable that the angle of total reflection be at the boundary between the vacuum, the glass substrate G, and the vacuum for the following reason. Generally, when light is transmitted from a transparent body to the air, all light is reflected toward the transparent body at a reflection angle which is a boundary surface between the transparent body and the air. This is the principle of light transmission. When the total reflection angle is set as such, when the glass substrate G blocks the optical path L between the opposing light-emitting sensor device 76 and light-receiving sensor device 77, the light is blocked. The light receiving level of the previous light receiving side sensor device 77 can be greatly reduced, and the arrival of the tip of the glass substrate can be reliably detected. In the embodiment of the present invention, the upper side is the light emitting side sensor device 76 and the lower side is the light emitting side sensor device 77, but may be reversed.
[0040]
Next, the outlet-side gate valve 24 of the sputtering chamber 14 is opened in the same manner as described above, and is introduced into the extraction chamber 16 in which the closed space has been exhausted by the same transport mechanism 18. Also in the unloading chamber 16, a light-emitting sensor device and a light-receiving sensor device similar to those of the preparation chamber 12 and the sputter chamber 14 are provided, and the glass substrate G on which a film has been formed is stopped at a predetermined position. At the same time or immediately before this, the outlet-side gate valve 24 of the sputtering chamber 14 is closed. Next, the exit side gate valve 26 is opened, and the formed glass substrate G is carried out to the atmosphere.
[0041]
Next, the glass substrate G is introduced into the sputtering chamber 14, and in the preparation chamber 12, the glass substrate G heated to a predetermined temperature in the vacuum chamber which has been closed as described above is on standby. As described above, the outlet side gate valve 22 of the preparation chamber 12 is opened and connected to the sputtering chamber 14. The glass substrate G is introduced into the sputtering chamber 14 and undergoes the same film forming action as the glass substrate G. After the predetermined film formation, the gate valve 24 is opened to be taken out into the extraction chamber 16, and then the gate valve 26 of the extraction chamber 16 is opened and carried out to the atmosphere. This is the same as above.
[0042]
According to the embodiment of the present invention, the upper roller 37 and the lower roller 52 are controlled by a control circuit (not shown) so as to rotate at the same rotation speed by independent motors 45 and 55, respectively. The transport roller 67 is also driven by the motor 55 via the gear box 57, and is driven at a speed inversely proportional to the diameter of the transport roller 67 and the diameters of the upper roller 37 and the lower roller 52. Therefore, the upper roller 37, the lower roller 52, and the transport roller 67 rotate synchronously at the same peripheral speed. Therefore, since the glass substrate G is positively driven by the rollers both on the rear surface and the lower edge, even when the frictional force between the rollers 37, 52, 67 and the glass substrate G is large, the glass substrate G can be reliably driven at a desired speed. It can be transported downstream.
[0043]
In FIG. 7, a gas ejecting body 86 is provided above the vicinity of the peripheral surface of the transport roller 67 in the sputtering chamber 14, from which gas h is ejected as indicated by an arrow. Since a frictional force always acts between the lower edge of the glass substrate G and the peripheral surface of the transport roller 67, dust g adheres to the peripheral surface. This is removed by a gas flow. Due to the suction of the exhaust system (not shown), the dust g flows downward without rising.
[0044]
Further, in the embodiment of the present invention, since the carrier as described in the related art is not used, the operation of returning the carrier to the initial position after forming the film on the glass substrate is unnecessary, and the entire apparatus is not required. Can be reduced in size.
[0045]
The embodiments of the present invention have been described above, but of course, the present invention is not limited thereto, and various modifications can be made based on the technical idea of the present invention.
[0046]
For example, in the above-described embodiment of the present invention, the transfer mechanism according to the present invention is used in all of the charging chamber, the sputter chamber as the processing chamber, and the unloading chamber of the ordinary in-line vacuum processing apparatus. The effect of the present invention can also be obtained by using this method.
[0047]
In the above embodiment of the present invention, the upper roller 37, the lower roller 52, and the transport roller 67 are all driven by independent motors (the lower roller 52 and the transport roller 67 are driven by the same motor 55 via the gear box 57). However, when the frictional force between the glass substrate G and the peripheral surfaces of the upper roller 37 and the lower roller 52 is small, only the transport roller 67 is used as the driving roller. The roller 37 and the lower roller 52 may be driven rollers. In this case, the belt winding specified in FIGS.
Parts can be omitted. Of course, a motor for driving these can be omitted, and the entire apparatus can be further simplified.
[0048]
Further, the upper roller 37 and the lower roller 52 may be drive rollers as described in the embodiment of the present invention, and the transport roller 67 may be a driven roller. Of course, in this case, the drive source for driving the transport roller is omitted.
[0049]
Further, in the above embodiment of the present invention, one lower roller 52 is provided near the transport roller 64, that is, in the lower part of the preparation chamber (the same applies to other chambers). The sheet is transported in an inclined and upright posture, and functions to stably support the lower edge. The upper rollers 37 are provided at four pitches as shown in FIG. 2 so that they can be stably supported when the height of the glass substrate to be processed changes. In the above-described embodiment of the present invention, the upper rotary shaft 56 and the lower rotary shaft 51 are separately protruded from above and below, respectively, but these are vertically penetrated to form a single rotary shaft. The rollers may be mounted at a pitch of. Also in this case, these may be driven rollers and the transport roller may be a drive roller, or conversely, the transport roller may be a driven roller, and the upper and lower rollers may be drive rollers. Alternatively, all the rollers may be drive rollers.
[0050]
Further, in the embodiment of the present invention, a glass substrate has been described as a plate-shaped article. Of course, the plate-shaped article is not limited to this, and an LCD (liquid crystal) as a flat panel display is typically used for a glass substrate. Display), but also applicable to glass substrates for PDP (plasma display), EL (electroluminescent display), FED (field emission display), flat CRT, etc. In short, any material may be used if it is a flat plate. The material of the flat panel may be a material other than glass, for example, a synthetic resin such as plastic, or a semiconductor such as silicon.
As the surface treatment apparatus described above, a sputtering apparatus has been described, but of course, the surface treatment apparatus is not limited to this, and other general film forming apparatuses, an exposure apparatus, a development apparatus, and a surface treatment apparatus can also be considered. , An inspection device, a cleaning device, or the like.
【The invention's effect】
As described above, according to the in-line type vacuum processing apparatus of the present invention, the carrier required conventionally is unnecessary, so that the entire apparatus can be reduced in size, and the glass substrate is transported in an upright state. Especially when the area is large, there was a problem of bending in the horizontal transfer, but such a problem can be transported before, during, or after the processing without damaging the glass substrate at all without any problem. it can.
[Brief description of the drawings]
FIG. 1 is a partially broken front view of an inline vacuum processing apparatus according to an embodiment of the present invention.
FIG. 2 is a partially cutaway front view of the charging chamber in the embodiment of the present invention.
FIG. 3 is a sectional view taken along the line [3]-[3] in FIG.
FIG. 4 is a plan view of a preparation room.
FIG. 5 is a sectional view taken along the line [5]-[5] in FIG.
FIG. 6 is a partial cross-sectional perspective view showing a relationship between a preparation chamber and a sputter chamber.
FIG. 7 is an enlarged sectional view of a main part in a sputtering chamber.
FIG. 8 is a side view of a conventional glass substrate transfer device.
FIG. 9 is a partially enlarged sectional view of the device.
[Explanation of symbols]
30 Preparation room main body
35 Vacuum sealed bearing
37 Upper roller
40 motor
50 Vacuum sealed bearing
52 Lower roller
55 motor
57 Gearbox
58 1st output shaft
60 2nd output shaft
61 pulley
62 belt
63 Guide roller
65 Vacuum sealed bearing
66 Rotation axis
67 Transport roller
68 pulley
69 belt
73a, 73b Rotation axis
76a, 76b, 76c Light emitting side sensor unit
77a, 77b, 77c Light receiving side sensor unit
S sputtering equipment

Claims (11)

In an inline vacuum processing apparatus for transporting a plate-like article in a vacuum space, a plurality of transport rollers arranged along the transport direction, and the plate-like transported in an upright position with respect to a vertical direction At least one row of a plurality of upper driven rollers arranged along the transport direction to support an upper part of the article, and at least one row of a plurality of upper driven rollers arranged along the transport direction to support a lower part of the plate-like article A plurality of lower driven rollers, and a drive source for driving the plurality of transport rollers to rotate in synchronization with each other, a lower edge is placed on a peripheral side surface of the transport roller, and the upper driven roller and the lower driven roller are disposed. An in-line vacuum processing apparatus wherein the plate-shaped article is conveyed while being supported on one side of the plate-shaped article on a peripheral side surface. In an inline vacuum processing apparatus for transporting a plate-like article in a vacuum space, a plurality of transport rollers arranged along the transport direction, and the plate-like transported in an upright position with respect to a vertical direction At least one row of a plurality of upper drive rollers arranged along the transport direction to support an upper part of the article, and at least one row of a plurality of upper drive rollers arranged along the transport direction to support a lower part of the plate-shaped article A plurality of lower drive rollers, a first drive source for synchronously rotating the plurality of transport rollers, a second drive source for synchronously rotating the plurality of upper drive rollers, and the plurality of upper drive rollers. A third drive source for rotating and driving the lower drive roller in synchronization with the third drive source, placing a lower edge on a peripheral side surface of the transport roller, and placing the plate-shaped article on a peripheral side surface of the upper drive roller and the lower drive roller. Supports one side of Inline vacuum processing apparatus being characterized in that so as to be conveyed while. In an inline vacuum processing apparatus for transporting a plate-like article in a vacuum space, a plurality of transport rollers arranged along the transport direction, and the plate-like transported in an upright position with respect to a vertical direction A plurality of driven rollers arranged in at least two rows along the transport direction to support one surface of the article, and a drive source for synchronously rotating the plurality of transport rollers, and An in-line vacuum processing apparatus, wherein a lower edge is placed on a peripheral side surface of a transport roller, and the plate-like article is transported while supporting the one surface of the plate-like article on a peripheral side surface of the driven roller. In an inline vacuum processing apparatus for transporting a plate-like article in a vacuum space, a plurality of transport rollers arranged along the transport direction, and the plate-like transported in an upright position with respect to a vertical direction At least two rows of a plurality of drive rollers arranged along the transport direction to support one surface of the article, a first drive source for synchronously rotating the plurality of transport rollers, A second driving source that drives the driving rollers in synchronization with each other, a lower edge is placed on the peripheral side surface of the transport roller, and the one side of the plate-shaped article is supported on the peripheral side surface of the driving roller. An in-line vacuum processing apparatus characterized in that it is transported while being moved. In an inline vacuum processing apparatus for transporting a plate-like article in a vacuum space, a plurality of transport rollers arranged along the transport direction, and the plate-like transported in an upright position with respect to a vertical direction A plurality of drive rollers arranged in at least two rows along the transport direction to support one surface of the article, and a drive source for synchronously rotating the plurality of drive rollers, and An in-line type wherein the lower edge is placed on the peripheral side surface of the transport roller, and the transport roller is driven and transported while supporting the one surface of the plate-shaped article on the peripheral side surface of the drive roller. Vacuum processing equipment. 6. A vacuum chamber is defined by providing a gate valve at each of an inlet and an outlet, and a sensor device for detecting a tip end of the plate-shaped article is provided at the outlet side. The described in-line vacuum processing apparatus. The method according to claim 1, wherein a surface treatment unit for performing surface treatment on the other surface of the plate-shaped article is disposed to face the other surface of the plate-shaped article while the plate-shaped article is being conveyed. 6. The in-line vacuum processing apparatus according to any one of 6. The in-line vacuum processing apparatus according to claim 7, wherein the surface unit is a sputtering apparatus. The in-line vacuum according to any one of claims 6 to 8, wherein another vacuum chamber is defined by being connected to the inlet and the outlet of the one vacuum chamber, respectively, and a charging chamber and an extracting chamber are respectively provided. Processing equipment. The in-line vacuum processing apparatus according to any one of claims 1 to 9, wherein the plate-like article is a glass substrate. The plate-shaped article is a glass substrate, and the sensor device includes a light emitter and a light receiver, and the light from the light emitter is projected on the light receiver in an oblique direction with respect to the glass substrate. The in-line vacuum processing apparatus according to claim 6, wherein:

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