JP2005029360A - Plate-like body conveyance device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a plate-like body conveyance device capable of reducing load for a plate-like body by supplying clean air by an air blowing type support means. <P>SOLUTION: This air blowing type support means 3 is provided with a dust removing filter 12 for removing dust and an air blowing means 13 for supplying clean air toward a lower face of the plate-like body 2 through the dust removing filter 12. An air vent passage 17 for exhausting the clean air supplied onto the lower face of the plate-like body 2 downward is formed in an intermediate section in the direction of lateral width crossing the direction of conveyance of the plate-like body 2 orthogonally. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a plate-like body conveying device provided with blower-type support means for supplying clean air toward the lower surface of a plate-like body to be conveyed and supporting the plate-like body in a non-contact state.

Such a plate-like body conveying device is used for conveying a plate-like body such as a glass substrate for liquid crystal, and conventionally, a propulsive force applying means for applying a propulsive force in the conveying direction is the plate. A plate-like body that is configured to include a drive rotating body that applies propulsive force while supporting and supporting both ends of the rod-shaped body, and is conveyed in a horizontal or substantially horizontal state with both ends being contacted and supported by the propulsive force applying means. The middle part of the body was supported by the air-blowing support means. The blower-type support means includes a large number of air ejection portions provided at predetermined intervals along the conveyance path of the plate-like body, and a supply source including a compression pump, and the compressed air from the supply source is supplied to the large number of air. A supply source and an air ejection part are connected by a supply pipe so as to be distributed and supplied to the ejection part, and compressed air ejected from the air ejection part is positioned between both ends of the plate-like body. Is configured to support the intermediate part of the plate-like body in a non-contact state, and the blower-type support means connects the supply source and a large number of air ejection parts arranged in the transport direction with a supply pipe Therefore, it requires a complicated operation to connect the supply source and a large number of air ejection parts so that the compressed air does not leak, and the production of the plate-shaped body conveyance device becomes complicated. It was. (For example, refer to Patent Document 1).
Therefore, the dust removing filter and the air blowing means include: a dust removing filter that removes dust; and an air blowing means that supplies clean air to the lower surface of the plate-like body through the dust removing filter. Can be installed in the conveying direction of the plate-like body, and it is possible to install blower-type support means for supplying clean air toward the lower surface of the plate-like body to be conveyed and supporting the plate-like body in a non-contact state. As a result, the installation of the air-blowing support means becomes simple, and there is a device that can be easily manufactured (see, for example, Patent Document 2).

JP 2002-321820 A Japanese Patent Application No. 2003-109137

  In the plate-like body conveyance device of Patent Document 2, since the blower-type support means is located below the plate-like body to be conveyed, the discharge path of the clean air supplied to the lower surface of the plate-like body is: There is only a path that passes between the plate-like body and the blower-type support means and discharges to the side of the blower-type support means, and it is easy to stay because clean air is difficult to be discharged below the middle part of the plate-like body, Due to this stay, the plate-like body is transported in a state of being deformed into a raised shape at the intermediate portion, so that a large load is applied to the plate-like body.

  An object of the present invention is to provide a plate-like body transporting device that can reduce the load on the plate-like body due to the supply of clean air from the blowing type support means.

The plate-like body conveyance device of the present invention is a plate-like shape provided with blower-type support means for supplying clean air toward the lower surface of the plate-like body to be conveyed and supporting the plate-like body in a non-contact state. A body transport device,
The first characteristic configuration is configured such that the blowing type support means includes a dust removing filter that removes dust, and a blowing means that supplies clean air to the lower surface of the plate-like body through the dust removing filter. An air passage that exhausts the clean air supplied to the lower surface of the plate-like member downward is formed at an intermediate position in the widthwise direction perpendicular to the conveying direction of the plate-like member.

That is, the blowing type support means is provided with a dust removing filter for removing dust and a blowing means for supplying clean air to the lower surface of the plate-like body through the dust removal filter. Since the function of supplying clean air toward the lower surface is provided, the blower support means can supply clean air toward the lower surface of the plate-like body to support the plate-like body in a non-contact state. it can. And since the ventilation path which exhausts clean air below is formed in the middle part of the width direction in the blow type support means, that is, the lower part of the middle part of the conveyed plate-like body, the lower surface of the plate-like body The clean air supplied to the side is discharged to the side passing between the plate-like body and the blower-type support means and to the lower side passing through the air passage formed at the intermediate position in the width direction of the blower-type support means. Since the clean air is easily discharged even below the middle part of the plate-like body, it is difficult for the clean air to stay below the middle part of the plate-like body. Therefore, the sheet is transported in a state close to a horizontal posture where it is suppressed, and the load on the plate-like body can be reduced.
Accordingly, the clean air supplied to the lower surface of the plate-like body is discharged from the air passage formed at the intermediate position in the lateral width direction of the blower-type support means, so that the clean air stays below the intermediate portion of the plate-like body. Since the rise of the plate-like body can be suppressed, it is possible to provide a plate-like body conveyance device that can reduce the load on the plate-like body due to the supply of clean air from the blower-type support means.

  In the second feature configuration, in addition to the first feature configuration, the blow type support means arranges the blow unit in which the dust filter and the blow unit are integrally assembled in the transport direction and the lateral width direction. It is comprised and the said ventilation path is formed by separating the ventilation units located in a line in the said width direction.

In other words, it is possible to install a blower support means for supporting the plate-like body in a non-contact state simply by arranging blower units in which the blower and the dust removal filter are integrally assembled in the transport direction. The installation of the means becomes simple, and when the blower units are arranged side by side in the width direction, a ventilation path can be formed simply by arranging the blower units arranged in the width direction apart from each other. Can be easily formed.
In addition, in the case where the plate-shaped body is transported while supporting both ends in the width direction, the supply of clean air makes it easier for the intermediate portion to rise up so that the plate-shaped body has a semi-cylindrical shape as viewed in the transport direction. By separating the air blowing units arranged in the width direction, a long air passage can be formed along the transport direction, effectively suppressing the bulge of the intermediate part that becomes a semi-cylindrical shape when viewed in the transport direction of the plate-like body. can do.

  The third feature configuration is characterized in that, in addition to the first feature configuration or the second feature configuration, an exhaust amount adjusting means capable of adjusting the exhaust amount of the air passage is provided.

  In other words, since the exhaust amount of the air passage can be adjusted by the exhaust amount adjusting means, even if the thickness, size, shape, etc. of the transported plate-like body changes, the thickness, size, shape of the plate-like body changes. Therefore, it is possible to provide a plate-like body transporting device that is easy to use.

  In addition to any one of the first to third feature configurations described above, the fourth feature configuration is the clean air supplied to the lower surface of the plate-like body, wherein the blowing type support means is positioned on the upper side. A porous plate-like body that performs air conditioning is provided, and the porous plate-like body includes a ventilation portion that ventilates the air passage.

  That is, the clean air supplied toward the lower surface of the plate-like body is conditioned by the porous plate-like body and supplied to the lower surface of the plate-like body. Air can be supplied, and the rise of the plate-like body due to the concentrated supply of clean air to a part of the lower surface of the plate-like body can be suppressed, and it is located on the upper side of the blower-type support means Even if the porous plate-like body is provided as described above, since the porous plate-like body is provided with a ventilation portion for ventilating the ventilation path, the clean air supplied to the lower surface of the plate-like body is It can be discharged downward through the road. Therefore, by providing the porous plate-like body, the load on the plate-like body due to the supply of clean air can be further reduced.

  In the fifth feature configuration, in addition to the fourth feature configuration, the perforated plate-like body is divided into the lateral width direction and configured by a plurality of plate-like portions, and the plurality of plate-like portions are arranged in the lateral width direction. It is comprised so that what is spaced apart may be located at intervals, and may form the ventilation part, and the above-mentioned exhaust amount adjusting means adjusts the interval between the plate-like portions in the porous plate-like body. It is configured to adjust the exhaust amount of the air passage.

  That is, the porous plate-like body is divided into a plurality of plate-like portions by dividing the porous plate-like body in the width direction, and the ventilation portions are formed by positioning the plate-like portions adjacent to each other in the width direction at an interval. Since it is comprised, it is not necessary to form a hole etc. in a porous plate-shaped body, and a ventilation part can be formed easily.

  The sixth feature configuration is characterized in that, in addition to the fourth feature configuration, the exhaust amount adjusting means includes an adjusting plate for adjusting an opening amount of the ventilation portion.

  That is, since the exhaust amount adjusting means is configured to adjust the opening amount of the ventilation portion provided in the porous plate-shaped body with the adjusting plate, the adjusting plate is easily configured smaller than the porous plate-shaped body, and is configured to be smaller. Since the power for moving the adjusting plate is small, it is easy to configure the drive structure of the displacement adjusting means to be small.

  In addition to any one of the first to sixth feature configurations described above, the seventh feature configuration includes the blower-type support unit configured by arranging the blower units in the transport direction, and the blower units arranged in the transport direction. By being separated, an exhaust passage for exhausting the clean air supplied to the lower surface of the plate-like body downward is formed.

That is, when arranging the blower units in the transport direction, the exhaust path can be formed simply by arranging the blower units arranged in the transport direction so as to be separated from each other, so that the exhaust path can be easily formed.
In addition, by separating the air blowing units arranged in the transport direction, a long ventilation path can be formed along the width direction, so that the rise of the intermediate portion that becomes a semi-cylindrical shape when viewed in the width direction of the plate-like body is effective. Can be suppressed.

  In the eighth feature configuration, in addition to the seventh feature configuration, the driving force imparting means for imparting a propulsive force in the transport direction to the plate-like body contacts and supports one end side of the plate-like body. Body, a driven rotator that contacts and supports the other end, a drive mechanism for the drive rotator, and a transmission mechanism that transmits the power of the drive mechanism to the driven rotator. The driving rotator and the driven rotator are in contact with each other to provide a propulsive force, and the transmission mechanism is disposed in the exhaust passage.

That is, since only one driving mechanism for rotating the driving rotating body supporting one end side of the plate-like body and the driven rotating body supporting the other end side is required, wiring and the like for the driving mechanism can be simplified. Moreover, since it becomes easy to synchronize a drive rotary body and a driven rotary body, the shift | offset | difference of a plate-shaped body by the difference in the rotational speed of a drive rotary body and a driven rotary body can be suppressed.
When the drive rotator and the driven rotator are provided in the horizontal width direction and the drive mechanism is provided near the drive rotator, the blower-type support means is located between the drive rotator and the driven rotator. Therefore, it is difficult to provide a transmission mechanism that transmits the power of the drive mechanism to the driven rotating body, but the air blowing units are spaced apart from each other in the conveying direction of the air blowing type support means. Therefore, by deploying the transmission mechanism using this air exhaust passage, it is not necessary to bypass the transmission mechanism around the lower side of the blower-type support means, and the configuration of the transmission mechanism, that is, the configuration of the propulsive force applying means. It can be simple.

  Hereinafter, the case where the plate-shaped body conveyance device according to the present invention is applied to a glass substrate for liquid crystal as a plate-shaped body will be described based on the drawings.

  As shown in FIG. 1, the plate-shaped body conveyance device H uses the plate-shaped body conveyance units 1 arranged side by side in the conveyance direction of the glass substrate 2, and the plate-shaped body conveyance unit 1 is located on the upper conveyance side. While supporting the transferred glass substrate 2 with the blower-type support means 3 and the propulsion force applying means 4, the propelling force applying means 4 conveys the glass substrate 2 from the upper transfer side to the lower transfer side, It conveys to the plate-shaped object conveyance unit 1 located in a conveyance lower side. In addition, transfer of the glass substrate 2 to the plate-shaped body conveyance unit 1 located on the upper conveyance side and transfer from the plate-shaped body conveyance unit 1 located on the lower conveyance side to other places are not shown. It is done at.

  As shown in FIGS. 2 and 3, each of the plate-like body conveyance units 1 supplies clean air toward the intermediate portion 2 c of the lower surface 2 a of the glass substrate 2 that is conveyed in a horizontal or substantially horizontal state, The blower-type support means 3 that supports the substrate 2 in a non-contact state, the propulsion force imparting means 4 that imparts a propulsive force in the transport direction to the glass substrate 2, and the transport space A and the storage space B described later are substantially sealed. And a case body 7 that covers the state.

  As shown in FIGS. 2 to 4, a dust removing filter 12 for removing dust and a blower fan 13 as a blowing means for supplying clean air to the lower surface 2 a of the glass substrate 2 through the dust removing filter 12 are integrated. The fan filter unit 14 is configured, and the blower-type support means 3 is configured by arranging the fan filter unit 14 in the transport direction of the glass substrate 2 and the lateral width direction orthogonal to the transport direction.

  That is, as shown in FIG. 2, the fan filter unit 14 is configured by integrally assembling one blower fan 13 and one dust filter 12 covering the top of the one blower fan 13, As shown in FIG. 6, the blower-type support means 3 is configured by a total of six fan filter units 14 that are arranged along the conveying direction and arranged along the lateral width direction. In addition, the blower-type support means 3 includes six air filter plates 16 as a porous plate-like body that is positioned on the upper side thereof and that controls the clean air supplied to the lower surface 2 a of the glass substrate 2. 14 is provided so as to cover the upper part of 14. The blower fan 13 is configured to be electrically driven such that the fan is rotationally driven by an electric motor provided in the blower fan 13, and the air conditioning plate 16 is formed by punching at a position located directly above the fan filter unit. The vent hole 16a is provided.

  The blower support means 3 is configured to suck the air below the blower fan 13 and supply the air toward the upper side where the dust filter 12 is located by the blower action of the blower fan 13. The air supplied upward passes through the dust filter 12, passes through the ventilation holes 16a of the air conditioning plate 16, and is supplied as clean air to the intermediate portion 2c on the lower surface 2a of the glass substrate 2, and the clean air It is comprised so that the intermediate part 2c of the glass substrate 2 may be supported.

  As shown in FIGS. 2 to 4, the case body 7 includes a unit frame body 15 having a substantially rectangular shape in plan view for mounting and supporting the six fan filter units 14, and both ends of the unit frame body 15. A pair of left and right storage frames 8 provided along the transport direction and a transport cover 20 provided from the upper end of the right storage frame 8 to the upper end of the left storage frame 8 are provided. Each of the storage frames 8 is integrally formed in a substantially U-shape when viewed in the transport direction provided with an upper wall 8c, a lower wall 8b, and an inner peripheral wall 8a on the transport space A side, and on the opposite side to the transport space A side. A storage cover 8d is provided. The unit frame 15 includes a support frame portion 15a assembled with a frame member, and an air introduction port 11 that is positioned below the support frame portion 15a and introduces external air into the transfer space A. It is comprised by the plate-shaped plate-shaped frame part 15b.

  The transport space A and the storage space B are communicated with each other by the upper transport plate-side transport unit 1 and the lower transport plate transport unit 1 arranged side by side in the transport direction. In the apparatus H, the plate-like body conveyance unit 1 located closest to the conveyance upper side is closed at the conveyance upper side end portions of the conveyance space A and the storage space B by a blocking member (not shown), and is plate-like located closest to the conveyance lower side. In the body conveyance unit 1, the conveyance lower side end portions of the conveyance space A and the storage space B are closed by a closing member. Accordingly, the transport space A is formed in a substantially sealed state by the unit frame 15, the inner peripheral wall 8 a of the storage frame 8, the transport cover 20 and the closing member, and the storage space B is formed by the storage frame 8 and the closing member. It is formed in a substantially sealed state.

  The transport space A is configured to be openable by removing the transport cover 20, and the storage space B is configured to be openable by removing the storage cover 8d. Further, in the conveyance space A, a driving roller 43 and a driven roller 44, which will be described later, in the blower-type support means 3 and the propulsion force applying means 4, and the conveyance path of the glass substrate 2 are accommodated. The electric motor 10 for the drive roller 43 in the means 4 is accommodated. The lower wall 8b of the storage frame 8 is provided with an external discharge port 24 for discharging the air in the storage space B to the outside, and has an air blowing function and a dust removal function so as to close the external discharge port 24. A sub blower unit 23 is provided as a discharge means.

  Therefore, in the transfer space A, the fan filter unit 14 sucks the air in the transfer space A, and the sucked air is directed toward the lower surface 2a of the glass substrate 2 through the dust filter 12 and the air conditioning plate 16. The air in the transport space A circulates in a form that is supplied as clean air. Further, external air is introduced into the transfer space A from the air inlet 11 by the fan filter unit 14 and the transfer space A is pressurized, so that a part of the air circulating in the transfer space A is stored in the storage frame. Part of the circulating air in the transfer space A is exchanged by being discharged to the outside through a gap between the transfer cover 20 and the transfer cover 20. In the storage space B, the sub-air blower unit 23 discharges the air in the storage space B to the outside from the external discharge port 24, and the storage space B is decompressed, so that the external air is stored in the upper wall 8c. External air is introduced into the storage space B through a gap between the cover 8d and the like, and a part of the air in the storage space B is exchanged. Therefore, since the transport space A is in a pressurized state, it is possible to prevent the outside air from entering from the gap between the storage frame 8 and the transport cover 20 and the storage space B is depressurized. Therefore, it is possible to prevent air from entering the storage space B from the gap between the upper wall 8c and the storage cover 8d.

  In the state where the fan filter unit 14 is placed and supported on the unit frame 15, a circulation path 19 is formed between the fan filter unit 14 and the storage frame 8 located on the side of the fan filter unit 14. An air passage 17 is formed by separating the fan filter units 14 arranged in the direction, and an air exhaust path 18 is formed by separating the fan filter units 14 arranged in the transport direction. The exhaust path 18 and the circulation path 19 are formed in communication with each other. As shown in FIG. 6, a ventilation portion 16 b is formed by punching in a portion of the air conditioning plate 16 located immediately above the air passage 17, and the air conditioning portion 16 is positioned immediately above the air exhaust passage 18. A sub-venting portion 16c is formed by punching in the portion to be performed.

  Therefore, as a path for exhausting the clean air supplied toward the lower surface 2a of the glass substrate 2 to the space below the blower fan 13, a path between the blower-type support means 3 and the storage frame 8 positioned on the side thereof is used. In addition to the path passing through the circulation path 19, the path passing through the ventilation path 17 between the fan filter units 14 arranged in the width direction via the ventilation part 16 b and the fan arranged in the transport direction via the sub ventilation part 16 c. There is a path that passes through the air exhaust path 18 between the filter units 14, and the clean air that tends to stay below the intermediate portion 2 c of the plate-like body 2 is the path through which the clean air passes through the ventilation path 17 or the air exhaust path 18. By exhausting downward through a path passing through the air passage, in particular, a path passing through the ventilation path 17, the rising of the intermediate portion 2c of the plate-like body is suppressed.

  That is, as shown in FIG. 11A, in the case where the air passage 17 is not formed at the intermediate position in the lateral width direction of the blower-type support means 3, the plate-like body at the intermediate position in the lateral width direction of the blower-type support means 3 Clean air is likely to stay between the air blower support means 3 and the blower support means 3, and the plate-like body 2 is conveyed with the intermediate portion 2 c raised. By forming 17, as shown in FIG. 11 (b), the plate-like body 2 and the blower support are discharged by discharging clean air from the air passage 17 even at an intermediate position in the width direction of the blower support means 3. Clean air is less likely to stay with the means 3, and the plate-like body 2 can suppress the state in which the intermediate portion 2c is raised, and can be conveyed in a substantially horizontal state.

  As shown in FIG. 2, the plate-like body transport means H is provided with an upper and lower two-stage transport section M that transports the glass substrate 2, and the upper transport section M of the upper and lower two-stage transport section M is In order to open the upper side of the lower conveyance section M, the upper end is pivoted about one end side as a fulcrum. That is, each of the plate-like body transport units 1 is provided with a case body 7 in two upper and lower stages, and each storage space A of the case body 7 is constituted by a blower-type support means 3 or a propulsion force applying means 4. The conveyance part M to be carried is accommodated. Then, by swinging the upper case body 7 upward about the swing axis P, the upper transport body M is also swung upward together with the upper case body 7, and the lower case body 7 is moved. The inside of the transport space A can be maintained from above by removing the cover 20 of the lower case body 7. In addition, as a usage form of the upper and lower two-stage transport unit M, the transport direction of the upper transport unit M and the lower transport unit M is reversed, and the glass substrate 2 is moved from the transport source by the upper transport unit M. In the lower transfer unit M, the glass substrate 2 that performs the same process, the defective glass substrate 2 or the like is transferred from the transfer destination to the transfer source, or the upper transfer unit M and the lower transfer unit M are transferred to the transfer destination. There is a mode in which the conveyance direction with the conveyance unit M is the same direction, and the plate-like body is conveyed from the conveyance source to the conveyance destination by the upper conveyance unit M and the lower conveyance unit M. In addition, the plate-shaped body transport unit 1 includes a one-stage transport section M that can be moved up and down in place of the upper and lower transport sections M, and the upper transport of the adjacent plate-shaped body transport unit 1 is provided. When the glass substrate 2 received from the section M is transferred to the lower transport section M of the adjacent plate-shaped body transport unit 1, for example, when the glass substrate 2 is transferred between the upper transport section M and the lower transport section M. Used for.

  Next, the propulsion force applying means 4 will be described. As shown in FIGS. 8 to 10, the driving force applying means 4 that applies a driving force in the transport direction to the glass substrate 2 is a plurality of driving rotating bodies that contact and support one end side of the glass substrate 2. A plurality of driven rollers 43, a plurality of driven rollers 44 as driven rotating bodies that contact and support the other end side, an electric motor 10 as a driving mechanism for the driving roller 43, and the power of the electric motor 10 as a driven roller And a transmission shaft 45 serving as a transmission mechanism for transmitting to 44. The propulsive force applying means 4 is configured to apply the propulsive force while the two end portions 2 a of the glass substrate 2 in the horizontal or substantially horizontal state are contact-supported by the driving roller 43 and the driven roller 44. The transmission shaft 45 is disposed in the air passage 17 formed between the fan filter units 14 adjacent to each other in the conveyance direction of the glass substrate 2.

  That is, the drive-side propulsive force imparting mechanism 4a is provided on the side where the swing axis P is present in the pair of storage frames 8, and on the side opposite to the side where the axis P is present in the pair of storage frames. Is provided with a driven-side propulsive force imparting mechanism 4b. Hereinafter, the drive-side propulsive force imparting mechanism 4a will be described. In the storage space B on the side where the swing shaft core P is present, a plurality of transmission shafts 27 arranged in the transport direction and coupled to each other by coupling 31; An electric motor 10 in which an output gear meshes with a spur gear 28 provided on one of the transmission shafts 27 is provided. A large number of output shafts 26 projecting toward the storage space B side and the transfer space A side are supported on the inner wall 8a of the storage frame 8 so as to be rotatable along the transfer direction. A drive roller 43 provided with a large-diameter portion 46 is provided in a portion protruding to the A side, and a portion that protrudes to the storage space B side of the output shaft 26 is configured as a screw gear and provided for the transmission shaft. An input gear portion 30 that meshes with the output gear portion 29 is provided. The driven-side propulsive force applying mechanism 4b is provided with a driven roller 44 in place of the driving-side propelling force applying mechanism 4a and the drive roller 43, and is not provided with the transmission motor 10 or the spur gear 28. Since the configuration is the same except for the point, the description is omitted.

  6 and 7, a transmission gear 47 is provided on each of the transmission shaft 27 of the driving-side thrust applying mechanism 4a and one of the transmission shaft 27 of the driven-side thrust applying mechanism 4b. Transmission of power from the transmission gear 47 of the driving side propulsive force imparting mechanism 4a to the transmission gear 47 of the driven side power transmission mechanism 4b is performed by interlocking connection with the transmission shaft 45, and the transmission shaft 45 is The fan filter unit 14 is provided using an air passage 17 formed between adjacent ones in the conveyance direction of the glass substrate 2.

  Accordingly, the drive roller 43 is driven and rotated by the power of the electric motor 10, and the driven roller 44 is also driven and rotated by the power transmitted from the electric motor 10 via the transmission shaft 45. The glass substrate 2 is supported by the driving roller 43 and the driven roller 44 of the propelling force support means 3 in a contact state at both ends 2b, and the intermediate part 2c is in a non-contact state by the clean air of the blowing type support means 4. A propulsive force is applied by the drive roller 43 and the driven roller 44 that are supported and driven to rotate, and thereby the displacement of the large-diameter portion 46 in the direction that intersects the conveyance direction is regulated along the conveyance direction. Are transported.

[Another embodiment]
(1) In the above-described embodiment, an exhaust air amount adjusting means capable of adjusting the exhaust air amount of the air passage may be provided.
That is, as shown in FIGS. 12 and 13, the divided wind control plate 51 as a porous plate-like body is configured by a plurality of plate-like portions 51 a divided in the lateral width direction, and the plurality of plate-like portions 51 a The adjacent parts in the width direction are spaced apart from each other to form a ventilation part 16b for ventilating the ventilation path 17, and the plate-like parts 51a in the divided air conditioning plate 51 are formed by the exhaust amount adjusting means 50. It may be configured to adjust the exhaust air amount of the air passage 17 by adjusting the interval of the air flow.

  More specifically, the divided air conditioning plate 51 includes a plate-like portion 51a covering the upper side of the three fan filter units 14 located on one side of the lateral width direction, and three fan filter units located on the other side of the lateral width direction. 14 is divided into two pieces, a plate-like portion 51a covering the upper part of 14, and a ventilation portion 16b is formed between the two plate-like portions 51a. The plate-like portion 51a closer to one side in the lateral width direction will be described. The plate-like portion 51a includes a porous portion 51b in which a large number of ventilation holes 16a are formed above the fan filter unit 14, and the ventilation portion. It is comprised by the obstruction | occlusion part 51c which is not formed in the ventilation hole 16a located above a path | route, and is supported by the upper part side of the fan filter unit 14 so that sliding movement is possible in a horizontal width direction. In addition, an electric cylinder 52 is provided on each of the upper conveyance side wall of the fan filter unit 14 on the upper conveyance side of the three fan filter units 14 and the lower conveyance side wall of the fan filter unit 14 on the lower conveyance side. Each of the cylinders 52 is connected to the plate-like portion 51a, and the cylinder-like portion 51a slides in the horizontal direction by the expansion and contraction operation of the cylinder 52. The upper part is configured to move in and out in the lateral width direction. The plate-like portion 51a closer to the multi-lateral side in the horizontal width direction is configured in the same manner as the plate-like portion 51a closer to one side in the horizontal width direction, and the description thereof will be omitted.

  That is, the exhaust amount adjusting means 50 is composed of the above-described four cylinders 52, and the distance between the plate-like portions 51a can be adjusted by expanding and contracting each of the cylinders 52 in a synchronized state. It is configured. Therefore, as shown in FIG. 12 (a), the distance between the plate-like portions 51a is narrowed by extending each of the cylinders 52, and the amount of ventilation in the ventilation portion 16b is reduced, whereby the exhaust amount in the ventilation passage 17 is reduced. 12 (b), the distance between the plate-like portions 51a is widened by shortening each of the cylinders 52, and the amount of air flow in the ventilation portion 16b is increased. The displacement is also increased.

(2) In the above embodiment, when providing the exhaust air amount adjusting means capable of adjusting the exhaust air amount of the air passage, the following configuration may be adopted.
As shown in FIGS. 14 and 15, the exhaust air amount adjusting means 50 includes an adjusting plate 55 that adjusts the opening amount of the ventilation portion 16 b, and the adjusting plate 55 is moved by the exhaust air amount adjusting means 50. Thus, the opening amount of the ventilation part 16b is adjusted, and the exhaust air amount of the ventilation path 17 is adjusted.

  More specifically, one adjustment plate 55 is slidably supported in the lateral width direction on the lower surface side of the air conditioning plate 16 configured in the same manner as in the above embodiment, and the adjustment plate 55 slides in the lateral width direction. Thus, a part of each of the plurality of ventilation portions 16b is blocked or the entire ventilation portion 16b is closed to adjust the opening amount of the ventilation portion 16b. An electric motor 56 is placed and supported on the support frame portion 15 a so as to be positioned in the ventilation path 17, and a gear portion 56 a provided on the output shaft of the motor 56 is formed on the lower surface of the adjustment plate 55. Is engaged with the gear groove 55a.

  That is, the exhaust air amount adjusting means 50 includes the adjusting plate 55 and the motor 56, and adjusting the opening amount of the ventilation portion 16b by rotating the motor 56 forward and backward to slide the adjusting plate 55. The exhaust amount in the ventilation path 17 is also adjusted by adjusting the ventilation amount in the ventilation part 16b.

(3) In the above embodiment, when providing the exhaust air amount adjusting means capable of adjusting the exhaust air amount of the air passage, the blower unit is configured to be adjustable in the lateral width direction, and the exhaust air amount adjusting means are arranged in the lateral width direction. You may comprise so that the exhaust_gas | exhaustion amount of a ventilation path may be adjusted by changing and adjusting the separation distance of ventilation units.
That is, as shown in FIGS. 16 and 17, the fan filter unit 14 is supported by the support frame portion 15a of the unit frame 15 so as to be slidable in the lateral width direction, and the three fan filter units 14 arranged in the transport direction are integrated. In general, they are connected by a connecting member so as to slide in the width direction. As shown in FIG. 16, the support frame portion 15a is provided with four electric unit cylinders 58, each of the bottoms on the upper transport side of the two fan filter units 14 on the upper transport side, and The tip of the unit cylinder 58 is connected to the bottom part of the lower conveyance side of the two fan filter units 14 on the lower conveyance side. Further, the air conditioning plate 16 is fixedly supported by a fixed portion of the plate-like body transport device H such as the unit frame 15.

That is, the exhaust gas amount adjusting means 50 is composed of the four unit cylinders 58 described above, and the fan filter units 14 arranged in the lateral width direction are expanded by extending and contracting each of the unit cylinders 58 in a synchronized state. The interval is adjusted. Therefore, as shown in FIG. 16 (a), by extending each of the unit cylinders 58, the interval between the fan filter units 14 arranged in the width direction is narrowed, and the exhaust amount in the air passage 17 is reduced. Further, as shown in FIG. 16B, by shortening each of the unit cylinders 58, the interval between the fan filter units 14 arranged in the horizontal width direction is widened so that the exhaust amount in the air passage 17 is increased. It is configured. When the unit cylinder 58 is expanded and contracted, the fan filter unit 14 moves in the lateral width direction with respect to the air conditioning plate 16, and when the unit cylinder 58 is extended, the fan filter unit 14 causes a part of the ventilation portion 16b. Is closed, and the amount of ventilation of the ventilation portion 16b is reduced, so that the ventilation amount of the ventilation portion 16b is also adjusted by the movement of the fan filter unit 14.
In addition, although the magnitude | size of a vent hole differs in the said embodiment and another embodiment (3) and another embodiment (4), according to the wind force of a ventilation type support means or the plate-shaped body to support, What is necessary is just to change suitably so that the wind pressure of the clean air of the plate-shaped body supplied to the lower surface of a plate-shaped body may be suitable.

(4) In the above embodiment, both the ventilation path formed by separating the blowing units arranged in the width direction and the exhaust path formed by separating the blowing units arranged in the transport direction are provided. A configuration including only one of the ventilation path and the exhaust path may be used. That is, as shown in FIG. 18, the fan filter units 14 arranged in the width direction are separated from each other to be provided with the air passage 17, and the air blowing units arranged in the transport direction are arranged close to each other so that the air exhaust path 18 is not provided. May be.

(5) In the above embodiment, the blower unit is constructed by integrally assembling one blower means and one dust removing filter covering the upper part of the blower means. Has two air blow units arranged side by side,
The blower unit is constructed by integrally assembling two blower means arranged in the width direction and one dust filter covering the upper side of the two blower means, and when the blower support means is constructed, the blower unit is 1 in the width direction. You may comprise so that one ventilation unit may be provided.
And as shown in FIG. 19, the ventilation path 17 is formed in the location between the two ventilation means in the fan filter unit as a ventilation unit, and thereby the ventilation path is formed at the intermediate position in the lateral width direction of the blowing type support means. You may comprise so that it may be formed.

(6) In the above embodiment, the blast type support means is constituted by a plurality of the blast units in which the dust filter and the blast means are integrally assembled. However, the blast means and the dust filter are individually assembled to the case body. The air-blowing support means may be configured.

(7) In the above embodiment, both ends of the plate-like body are supported in a contact state by the drive rotating body of the propulsive force support means, and the drive rotating body that supports and supports the rotation is driven to rotate against the plate-like body. Although the plate-like body is configured to be conveyed along the conveyance direction by applying a propulsive force, both ends of the plate-like body are supported by a rotating body that freely rotates, and the plate is automatically or artificially formed. Propulsion in the transport direction is given to the preceding plate by pushing the preceding plate using the force to transfer the plate to the plate transport device located on the upper side of the transfer You may comprise, and you may comprise so that the propulsive force in a conveyance direction may be provided with respect to a plate-shaped object with the clean air supplied with a ventilation type support means. Furthermore, you may comprise so that the conveyance direction of a plate-shaped body may be set to an inclination direction, and a propulsive force may be provided with the weight of a plate-shaped body.
Moreover, you may comprise a drive rotation body and a driven rotary body with endless strip | belt-shaped bodies, such as a timing belt.

(8) As shown in FIG. 5, the space below the air exhaust path 18 and the blower fan 13 is formed by recessing an intermediate portion in the longitudinal direction along the horizontal width direction of the support frame 15a. The sub-exhaust passage 21 may be formed so that air exhausted from the exhaust passage 18 is smoothly circulated below the blower fan 13.

(9) In the above embodiment, a glass substrate for liquid crystal is used as the plate-like body, but a semiconductor wafer or the like may be used, and the shape and size of the supported body are not limited to the embodiment.

Perspective view of plate-shaped body conveyance device Front cross-sectional view of plate-shaped body transport device Partially enlarged view of the front cross-section of the plate-like material transport device Side cross-sectional view of a plate-shaped material transport device The perspective view of the conveyance unit in another embodiment (8) Plan view of plate-like body transport device Front view showing transmission mechanism Side cross-sectional view of the storage frame on the side where the pivot axis exists Front sectional view of the propulsive force applying means Side cross-sectional view of propulsion force applying means Action diagram showing the rise of the plate Front view showing the displacement adjustment means of another embodiment (1) The top view which shows the exhaust gas amount adjustment means of another embodiment (1) Front view showing the displacement adjustment means of another embodiment (2) The top view which shows the displacement adjustment means of another embodiment (2) Front view showing the displacement adjusting means of another embodiment (3) The top view which shows the exhaust gas amount adjustment means of another embodiment (3) The top view which shows the conveyance unit of another embodiment (4) The top view which shows the conveyance unit of another embodiment (5)

Explanation of symbols

2 Glass substrate (plate-like body)
2a Lower surface 3 Air blow type support means 12 Dust removal filter 13 Air blow fan (air blow means)
14 Fan filter unit (Blower unit)
16 Air conditioning plate (perforated plate)
16b Ventilation portion 17 Ventilation passage 18 Exhaust passage 50 Exhaust amount adjusting means 51 Divided air conditioning plate (porous plate-like body)
51a Plate-shaped part 51d Ventilation part 55 Adjustment board H Plate-shaped body conveyance apparatus

Claims (8)

A plate-shaped body transport device provided with blower-type support means for supplying clean air toward the lower surface of the transported plate-shaped body and supporting the plate-shaped body in a non-contact state,
The blowing type support means includes a dust removing filter that removes dust, and a blowing means that supplies clean air to the lower surface of the plate-like body through the dust removal filter, and a conveying direction of the plate-like body, A plate-shaped material transport apparatus in which a ventilation path for exhausting the clean air supplied to the lower surface of the plate-shaped material downward is formed at an intermediate position in the transverse width direction orthogonal to each other. The blower support means is configured by arranging a blower unit in which the dust filter and the blower means are assembled together in the transport direction and the lateral width direction,
The plate-shaped body conveyance device according to claim 1, wherein the air passage is formed by separating the air blowing units arranged in the lateral width direction.   The plate-shaped body conveyance device according to claim 1 or 2, wherein an exhaust amount adjusting means capable of adjusting an exhaust amount of the air passage is provided. The blower-type support means is configured to include a porous plate-like body that is positioned on the upper side thereof and that regulates clean air supplied to the lower surface of the plate-like body,
The plate-shaped body conveyance device according to any one of claims 1 to 3, wherein the porous plate-shaped body is configured to include a ventilation portion that ventilates the ventilation path. The perforated plate-like body is divided into the lateral width direction and is composed of a plurality of plate-like portions, and the plurality of plate-like portions are adjacent to each other in the lateral width direction with a space therebetween, and the ventilation Configured to form a part,
The plate-shaped body conveyance device according to claim 4, wherein the exhaust amount adjusting means is configured to adjust an exhaust amount of the air passage by adjusting an interval between the plate-shaped portions in the porous plate-shaped body.   The plate-shaped body conveyance device according to claim 4, wherein the exhaust amount adjusting means includes an adjustment plate that adjusts an opening amount of the ventilation portion.   The blower-type support means is configured by arranging the blower units in the transport direction, and exhausts the clean air supplied to the lower surface of the plate-like body downward by separating the blower units arranged in the transport direction. The plate-shaped object conveyance apparatus of any one of Claims 2-6 in which the air path is formed. Propulsive force applying means for applying a propulsive force in the conveying direction to the plate-like body, a drive rotator that contacts and supports one end side of the plate-like body, a driven rotator that contacts and supports the other end side, A drive mechanism for the drive rotator and a transmission mechanism for transmitting the power of the drive mechanism to the driven rotator, and propelling while supporting both ends of the plate-like body by the drive rotator and the driven rotator Configured to give power,
The plate-like body conveyance device according to claim 7, wherein the transmission mechanism is arranged in the exhaust path.

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