JP2005047675A - Carrying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a carrying device capable of conveying a conveyed object while transferring it between a plurality of conveying means while the conveyed object is supported and conveyed by the conveying means adjacent to the downstream side in the conveying direction in a non-contact state. <P>SOLUTION: In the carrying device, the plurality of conveying means 1 comprising a blast type supporting means for sending air to the lower surface of the conveyed object 2 and supporting the conveyed object 2 in the non-contact state, and a propulsive force applying means for applying a propulsive force in the conveying direction to the conveyed object supported by the blast type supporting means are arranged in parallel in the conveying direction, and a control means H for controlling the plurality of conveying means 1 are disposed. The control means H allows operation start for the conveying means 1 of which the conveying means 1 adjacent to the downstream side in the conveying direction lies in an operation state, and prohibits the operation start for the conveying means 1 of which the conveying means 1 adjacent to the downstream side in the conveying direction lies in the non-operation state. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention blows air toward the lower surface of the conveyed product, and supports the conveyed product in a non-contact state, and conveys the conveyed product supported by the blown-type support unit. The present invention relates to a transfer apparatus in which a plurality of transfer means provided with a propulsion force applying means for applying a propulsive force in a direction are provided side by side in the transfer direction, and a control means for controlling the operation of the plurality of transfer means is provided.

  The transport device as described above transports a transported object such as a glass substrate for liquid crystal by a plurality of transport means arranged in the transport direction. In each of the transport means, a blow-type support means is used. Propulsive force is applied to the transported object supported in a non-contact state by, for example, supporting and supporting a part of the transported object such as both ends of the transported object and the lower end of the transported object with the propulsive force applying means. By doing so, the conveyed product is conveyed while being transferred from the conveying means located on the upstream side in the conveying direction to the conveying means located on the downstream side in the conveying direction.

In the conventional transport apparatus, there are, for example, one that transports a transported object in a horizontal posture or a substantially horizontal posture, and one that transports in a vertical posture or a posture close thereto. To do.
First, a description will be given of a conventional transport device that transports a transported object in a horizontal posture or a substantially horizontal posture. When a blower-type support unit is in a horizontal posture or a substantially horizontal posture, Among them, it is configured to blow air toward an intermediate portion located between both side end portions, and the propulsive force applying means contacts and supports both end portions of the transported object in a horizontal posture or a substantially horizontal posture. And a driving rotating body for applying a propulsive force.
A plurality of conveying means provided with such blower-type supporting means and propulsive force applying means are arranged adjacent to each other in the conveying direction, and the control means starts operation of the conveying means in response to an operation start command or the like. Accordingly, the conveyance object in the horizontal posture or the substantially horizontal posture is transferred to the conveyance means adjacent to the downstream side in the conveyance direction (see, for example, Patent Document 1).

Next, a conventional conveying device that conveys a conveyed product in a vertical posture or a posture close thereto will be described. Among the parts, it is configured to blow air toward the intermediate part located between the two side end parts, and the propulsive force imparting means contacts and supports the lower end part of the transported object in the vertical posture or a posture close thereto. Thus, it is configured to include a drive rotating body that imparts a propulsive force.
A plurality of conveying means provided with such blower-type supporting means and propulsive force applying means are arranged adjacent to each other in the conveying direction, and the control means starts operation of the conveying means in response to an operation start command or the like. Thus, the conveyance object in the vertical posture or a posture close to the vertical posture is transferred to the conveyance means adjacent to the downstream side in the conveyance direction (see, for example, Patent Document 2).

JP 2002-321820 A JP 2002-308423 A

In the transport apparatus in Patent Document 1 and Patent Document 2, the control unit simply starts the operation of the transport unit by an operation start command or the like, and therefore transports adjacent to the downstream side in the transport direction. Even if the means cannot support and transfer the transferred object in a non-contact state, there is a risk of starting the operation of the conveying means located on the upstream side in the conveying direction.
Therefore, the conveyed product cannot be supported and conveyed in a non-contact state, and the conveyed product may come into contact with the conveying means and cause damage to the conveyed product.

In other words, when the transport means adjacent to the downstream side in the transport direction is in a non-operating state, the transport means located on the upstream side in the transport direction is operated so that the transported material is transferred to the transport means. Even if the operation is started, the conveyed product cannot be conveyed in a non-contact state by the conveying means adjacent to the downstream side in the conveying direction.
And in the conveyance apparatus in the said patent document 1 and the patent document 2, even when the conveyance means adjacent to the downstream of a conveyance direction is a non-operation state, the conveyance located in the upstream of a conveyance direction by the instruction | indication of a driving | operation etc. The operation of the means is started, and the conveyed product cannot be conveyed in a non-contact state by the conveying means.

  The present invention has been made paying attention to such a point, and an object of the present invention is to support a transported object in a non-contact state by a transporting unit adjacent to the downstream side in the transporting direction while transporting a plurality of transporting units. It is in the point which provides the conveying apparatus which can transfer and convey a conveyed product between.

In order to achieve this object, the first characteristic configuration of the transport device according to the present invention is a blow-type support unit that blows air toward the lower surface portion of the transported object and supports the transported object in a non-contact state, A plurality of conveying means provided in the conveying direction are arranged side by side in the conveying direction, and a plurality of conveying means provided with a propulsive force applying means for applying a propelling force in the conveying direction to the conveyed object supported by the blowing type supporting means. In the transport device provided with a control means for controlling the operation,
The control means permits the start of operation of the conveying means adjacent to the downstream side in the conveying direction in the operating state, and conveys the conveying means adjacent to the downstream side in the conveying direction in the non-operating state. About a means, it exists in the point comprised so that operation start may be prohibited.

In other words, the control means allows the start of operation for the conveyance means in which the conveyance means adjacent to the downstream side in the conveyance direction is in an operating state, and therefore when the conveyance means adjacent to the downstream side in the conveyance direction is in an operation state. Can start the operation of the conveying means located on the upstream side in the conveying direction so as to transfer the conveyed item to the conveying means.
Therefore, since the conveyance means can be started so that the conveyance object can be transferred to the conveyance means that can support and convey the conveyance object in a non-contact state, the conveyance means adjacent to the downstream side in the conveyance direction Thus, while the conveyed product is supported and conveyed in a non-contact state, the conveyed item can be transferred and conveyed between a plurality of conveying means.

In addition, since the control unit prohibits the start of operation for the transport unit that is in the non-operating state on the transport unit adjacent to the downstream side in the transport direction, the transport unit that is adjacent to the downstream side in the transport direction is in the non-operated state In this case, it is possible to prohibit the start of the operation of the conveyance means located on the upstream side in the conveyance direction so that the conveyance object is transferred to the conveyance means.
Accordingly, since it is possible to prevent the transported object from being transferred to a transport unit that cannot support and transport the transported object in a non-contact state, the transported object is transported by the transport means adjacent to the downstream side in the transport direction. It is possible to prevent a situation in which support is not possible in a non-contact state.

  From the above, depending on whether the transport means adjacent to the downstream side in the transport direction is in the operating state or the non-operating state, the transported object can be supported in the non-contact state by the transport means adjacent to the downstream side in the transport direction. Only when the transport means located upstream in the transport direction can be started, while the transport means adjacent to the downstream side of the transport direction is supported and transported in a non-contact state, It has reached the point where it is possible to provide a transfer device that can transfer a transfer object between a plurality of transfer means.

  According to a second characteristic configuration of the transfer device according to the present invention, an operation command means of an artificial operation type that instructs start of operation for each of the plurality of transfer means is provided, and the control means is provided downstream in the transfer direction. For the transport means in which the adjacent transport means is in an operating state, when the start of operation is commanded by the operation command means, the operation is started and the transport means adjacent to the downstream side in the transport direction is in a non-operating state. About a certain conveyance means, even if the operation start is commanded by the operation command means, the start of the operation is prohibited.

That is, since the operation command means for manipulating operation that commands the start of operation for each of the plurality of transport means is provided, the start of operation is performed only for a part of the transport means by the operation command means. Only a part of the conveying means can be started.
If the transported object stops in the middle of a plurality of transporting means due to a failure or the like, start operation of a part of the transporting means, and remove the transported object that stops in the middle of It can be transported to a place where it can be taken out.
Therefore, even if the conveyed product stops in the middle of a plurality of conveying means, only a part of the conveying means can be operated so as to remove the conveyed item, and part or one of the conveying means can be operated. Since it can be operated and maintenance work can be performed, usability can be improved.

Since the operation start command means of the manipulating operation can command the start of operation for each of the plurality of transfer means, the transfer means adjacent to the downstream side in the transfer direction is not operated due to an operator error or the like. There is a case where the operation means is erroneously commanded to the conveying means in the state.
Even in such a case, as described in the first characteristic configuration, the control unit prohibits the start of operation for the transport unit in which the transport unit adjacent to the downstream side in the transport direction is in the non-operating state. Even if the operation start is erroneously commanded by the means, it is possible to prevent a situation in which the transported object adjacent to the downstream side in the transport direction cannot support the transported object in a non-contact state.
Therefore, while improving the usability, the transported material is transferred between a plurality of transporting means while supporting the transported material in a non-contact state by the transporting device adjacent to the downstream side in the transporting direction. Will be able to.

  A third characteristic configuration of the transport device according to the present invention is configured such that the transport unit includes an entity detection unit that detects whether the transport object is present on the transport path, and the control unit includes: In the conveying means in which the conveying means adjacent to the downstream side in the conveying direction is in a non-operating state, it is configured to prohibit the start of operation when the presence detecting means detects the presence of the conveyed object. Yes.

In other words, the control means prohibits the start of operation only for the transport means in which the transport means adjacent to the downstream side in the transport direction is in the non-operating state and the transport object is present on the transport path. When there is actually a transported object on the transport path and the article is transferred to the transport means adjacent to the downstream side in the transport direction, the transported object is not contacted by the transport means adjacent to the downstream side in the transport direction. It is possible to prohibit the start of the operation only for the transport means that falls into a situation where it cannot be supported and transported in the state.
Accordingly, in consideration of whether or not there is a transported object on the transport path, the transporting unit which is not likely to fall into a situation where the transported object adjacent to the downstream side in the transporting direction cannot be supported in a non-contact state is also included. Thus, it is possible to prevent the start of operation from being prohibited, and to accurately prevent a situation in which the transported object adjacent to the downstream side in the transport direction cannot support the transported object in a non-contact state.

A conveying apparatus according to the present invention will be described with reference to the drawings.
[First Embodiment]
As shown in FIGS. 1 to 3 and 10, this transport device transports a plate-like body such as a glass substrate for liquid crystal as a transport object, and includes a plurality of transport units 1 serving as transport means, A control unit H serving as a control unit that controls the operation of the plurality of transport units 1 and an artificially operated command unit S that commands control information to the control unit H are configured.
Each of the transport units 1 is configured to transport the glass substrate 2 in a horizontal posture or a substantially horizontal posture.

  Incidentally, FIG. 1 is a perspective view of the transport device, FIG. 2 is a longitudinal front view of the transport device, and FIG. 3 is an enlarged longitudinal front view of the main part of the transport device.

  As shown in FIGS. 1 to 3, the transport unit 1 is provided side by side along the transport direction of the glass substrate 2 and is downstream from the transport unit 1 positioned upstream in the transport direction. The glass substrate 2 is transferred to the transport unit 1 located at the position, and the plurality of transport units 1 are configured to transport the glass substrate 2 from the upstream end portion to the downstream end portion of the transport apparatus.

Further, the transport units 1 are arranged side by side in two stages, and the transport direction in the upper transport unit 1 and the lower transport unit 1 may be the reverse direction or the same direction, and can be changed as appropriate. It is.
For example, when the transport direction between the upper transport unit 1 and the lower transport unit 1 is reversed, the glass substrate 2 transported by the upper transport unit 1 is returned by the lower transport unit 1. Thus, the same process is performed on the glass substrate 2 or the defective glass substrate 2 is returned to its original state.

As shown in FIGS. 2 to 4, the transport unit 1 blows air toward the lower surface of the transported object 2 to support the transported object 2 in a non-contact state, and its air blowing. Propulsive force applying means 4 for applying a propulsive force in the transport direction to the transported object 2 supported by the type support means 3.
Further, as shown in FIG. 11, the transport unit 1 includes a presence sensor T as a presence detection unit that detects whether or not the glass substrate 2 exists on the transport path.

And the presence sensor T detects that the glass substrate 2 exists on the conveyance path if the light from the light projecting unit is not received by the light receiving unit, and the light from the light projecting unit is detected by the light receiving unit. When the light is received, it is configured to detect that the glass substrate 2 does not exist on the transport path.
Moreover, the presence sensor T can change suitably about the number, an installation location, etc., and should just detect whether the glass substrate 2 exists on a conveyance path | route.
Incidentally, FIG. 4 is a longitudinal side view of the transport unit 1, and FIG. 11 is a schematic configuration diagram of the transport device in which a plurality of transport units 1 are shown in plan view.

As shown in FIGS. 2 to 4, the blower-type support means 3 includes a dust removal filter 5 that removes dust, and a blower fan 6 that blows clean air toward the lower surface portion of the glass substrate 2 through the dust removal filter 5. It is configured with.
The blower support means 3 is composed of a plurality of fan filter units 7 in which one dust removal filter 5 and one blower fan 6 are integrally assembled, and above the plurality of fan filter units 7, A perforated plate-shaped air conditioning plate 8 that performs air conditioning of clean air blown toward the lower surface of the glass substrate 2 is provided.
In addition, as shown in FIG. 5 and FIG. 6, the fan filter unit 7 is provided one by one on the left and right sides with an interval at an intermediate position in the width direction orthogonal to the conveyance direction of the glass substrate 2. For example, three are arranged side by side in a state where the glass substrate 2 is also spaced in the conveying direction, and a total of six are provided.
Incidentally, FIG. 5 is a perspective view in a state where the upper part of the transport unit 1 is opened, and FIG. 6 is a plan view of the transport unit 1.

One transport unit 1 is provided with a blast type support means 3 including six fan filter units 7, and a single air conditioning plate 8 is provided so as to cover the top of the six fan filter units 7. Yes.
As shown in FIGS. 2 and 3, the blower fan 6 is configured to suck air below the installation location and blow the air toward the dust filter 5 located above. Yes.

  In this way, the blower-type support means 3 has the clean air that has passed through the dust removal filter 5 conditioned by the conditioned plate 8 between the both ends in the width direction perpendicular to the conveying direction of the glass substrate 2. It blows toward the intermediate part, and it is comprised so that the intermediate part of the horizontal direction of the glass substrate 2 may be supported in a non-contact state.

  In the transport unit 1, as shown in FIG. 2 and FIGS. 4 to 6, the intermediate portion in the width direction orthogonal to the transport direction of the glass substrate 2 and the interval on the center side in the transport direction of the glass substrate 2 are separated. A vent passage 9 for exhausting clean air downward is formed at the location.

In other words, since there is a gap between the six fan filter units 7, an air passage 9 that communicates with the same width in the thickness direction of the fan filter unit 7 is formed using the gap. Has been.
Incidentally, a hole is formed in the air conditioning plate 8 at a position above the air passage 9, and the air passage 9 guides clean air supplied through the hole downward and exhausts it downward. Is configured to do.

As described above, by providing the air passage 9 at the intermediate position in the width direction orthogonal to the transport direction of the glass substrate 2 and the center side in the transport direction of the glass substrate 2, It is configured so that clean air is exhausted downward through the air passage 9 without accumulating clean air at an intermediate portion in the width direction or at the center in the transport direction.
And since there is no accumulation of clean air, the glass substrate 2 can be conveyed in a horizontal posture or a substantially horizontal posture without the glass substrate 2 being curved upward.

As shown in FIGS. 2 and 7, the propulsive force applying means 3 is configured to drive and drive the drive roller 14 via the transmission shaft 15 that contacts and supports both ends of the glass substrate 2 in the lateral width direction. The electric motor 16 is configured.
Incidentally, FIG. 7 is a longitudinal side view of the transport unit 1 and shows one side of the propelling force applying means 3 provided in a pair of left and right.

If it demonstrates, the drive roller 14 will be provided with two or more spacing in the conveyance direction of the glass substrate 2, and the conduction shaft 15 will be interlockingly connected by the coupling 17 in the state which arranged two or more in the conveyance direction.
The electric motor 16 is provided so that its output gear 16 a meshes with a spur gear 18 a provided on the transmission shaft 15, and the transmission shaft 15 is rotationally driven by the operation of the electric motor 16.
Further, an output shaft 19 is provided at a position corresponding to the location of the plurality of drive rollers 14 in the conveying direction of the glass substrate 2, and is driven at one end of the output shaft 19 as shown in FIGS. A roller 14 is provided.
The drive roller 14 is provided to rotate integrally with the output shaft 19, and an input gear 20 that meshes with a spur gear 18 provided on the transmission shaft 15 is provided at the other end of the output shaft 19.
Incidentally, FIG. 8 is a longitudinal front view of the end of the transport unit 1 in the lateral width direction, and FIG. 9 is a longitudinal side view of the end of the transport unit 1 in the lateral width direction.

In this manner, the transmission shaft 15 is rotationally driven by the operation of the electric motor 16, and the transmission shaft 15 is rotationally driven to engage the spur gear 18 of the transmission shaft 15 and the input gear 20 to rotate the output shaft 19. Thus, the drive roller 14 is configured to rotate.
Then, the driving roller 14 is rotated by the operation of the electric motor 16, and the driving roller 14 supports both ends in the widthwise direction of the glass substrate 2 in contact with each other while supporting the glass substrate 2 in the conveying direction. It is configured to provide propulsion.
Further, the glass substrate 2 is configured to be transported along the transport direction while restricting the positional deviation in the lateral width direction at the large diameter portion 14a of the drive roller 14.

  As shown in FIGS. 3 and 4, the frame 10 of the transport unit 1 includes a rectangular unit frame 11 for mounting and supporting a plurality of fan filter units 7, and both sides of the unit frame 11. It is comprised from the left-right paired storage frame 12 arrange | positioned by this.

The unit frame 11 includes a plate-like unit bottom body 11a disposed on the bottom surface side, a side wall portion 11b extending from both end portions of the unit bottom surface body 11a and extending upward, and between the side wall portions 11b. It is comprised from the cover body 11c for units which covers the upper part, and it is comprised so that the side wall part 11b may be combined with the frame 12 for storage.
The internal space of the unit frame 11 is configured as a conveyance space A in which the blower-type support means 3 including the plurality of fan filter units 7 and the glass substrate 2 are accommodated, and the unit frame 11 is configured as a conveyance space. A is configured to cover A in a sealed state or almost in a sealed state.
The unit bottom body 11 a is formed with an air inlet 13 for introducing external air into the conveyance space A at a position located below the blower fan 6.

And by the action | operation of the ventilation fan 6, the air of the conveyance space A is attracted | sucked, the clean air is blown toward the lower surface part of the glass substrate 2 through the dust removal filter 5 and the wind regulation board 8, and the conveyance space A It is comprised so that the air in A may be circulated.
Further, by the operation of the blower fan 6, external air is introduced into the transfer space A from the air introduction port 13, pressurizes the transfer space A, and part of the air circulating in the transfer space A is unit frame. 11 and the storage frame 12 are discharged to the outside through a gap or the like, and a part of the air circulated in the transfer space A is exchanged with external air.

The storage frame 12 includes a storage frame 12a having a U-shaped side view and a storage cover 12b that closes a side opening of the storage frame 12a.
The internal space of the storage frame 12 is configured as a storage space B that stores drive mechanisms such as the electric motor 16 and the transmission shaft 15, and the storage frame 12 seals the storage space B in a sealed state or a substantially sealed state. It is comprised so that it may cover.

The storage space B is provided with a sub fan filter unit 21 having an air blowing function and a dust removing mechanism in the same manner as the fan filter unit 7.
And in the location of the sub fan filter unit 21 in the conveyance direction of the glass substrate 2, an external discharge port 22 for exhausting the air in the storage space B to the outside is formed on the lower surface of the storage frame 12a. An air discharge port 23 that communicates the transfer space A and the storage space B is formed on the side surface of the frame 12a.

  In this way, part of the air in the transport space A is discharged to the storage space B by the operation of the sub fan filter unit 21, and the air in the storage space B is sucked by the operation of the sub fan filter 21, The air removed by the fan filter 21 is configured to be discharged to the outside through the external discharge port 22.

The transport unit 1 is arranged in two upper and lower stages, and as shown in FIG. 2, the upper transport unit 1 opens the upper side of the lower transport unit 1 so that It is configured to be swingable upward with one end side as a fulcrum.
In other words, the frame 10 in the upper transport unit 1 is pivotally supported around the swing axis P, and the frame 10 in the upper transport unit 1 is moved upwardly around the swing axis P. The upper part of the frame body 10 in the lower transport unit 1 is opened by swinging in the lower direction.

When maintenance work is performed on the lower transport unit 1, the upper transport unit 1 is swung, and then the unit cover of the unit frame 11 in the frame 10 of the lower transport unit 1 is used. By removing the body 11c, the conveyance space A in the lower conveyance unit 1 is opened, and maintenance work for the conveyance space A is made possible.
Further, when performing maintenance work on the upper transport unit 1, the unit cover body 11 c of the unit frame 11 is removed to open the transport space A in the upper transport unit 1 and It is configured to perform maintenance work.

  By the way, when performing maintenance work on the storage space B in the transport unit 1, the storage cover body 12b of the storage frame 12 is removed for both the upper transport unit 1 and the lower transport unit 1. The storage space B is opened to perform maintenance work on the storage space B.

As shown in FIG. 10, the control unit H is configured to control operation start and operation stop for each of the plurality of transport units 1 based on a command from the command unit S.
If it adds explanation, control part H will start operation of electric motor 26, fan filter unit 7, and sub fan filter unit 21, operation of conveyance unit 1 will be started, electric motor 26, fan filter unit 7, And it is comprised so that the operation | movement of the conveyance unit 1 may be stopped by stopping the operation of the sub fan filter unit 21.
And the control part H supports and conveys the glass substrate 2 in a non-contact state by operation | movement of the electric motor 26, the fan filter unit 7, and the sub fan filter unit 21 in the driving | running state of the conveyance unit 1. FIG. It is configured.

The command section S is a manual operation type operation changeover switch S1 for switching between automatic operation and manual operation, and a manual operation type operation command for instructing a plurality of transport units 1 to start and stop operation individually in manual operation. A switch S2 is provided.
Incidentally, as shown in FIG. 11, the operation command switches S2 are provided with the same number of operation command switches as the number of the transport units 1 arranged in the transport direction, and one operation command switch corresponds to which transport unit 1. A command for instructing the start of operation is associated.

Then, when an automatic operation is commanded by the operation changeover switch S1, the control unit H operates the electric motor 26 and the sub fan filter unit 21 in the operation target conveyance unit 1 with all the conveyance units 1 as operation targets. In addition, the blower fan 6 is configured to operate so that the amount of air blown toward the lower surface portion of the glass substrate 2 becomes the amount of air for support.
In this way, in the automatic operation, all the transport units 1 are operated, and the glass substrate 2 is transferred from the transport unit 1 located on the upstream side in the transport direction to the transport unit 1 located on the downstream side in the transport direction. However, the plurality of transfer units 1 are configured to transfer the glass substrate 2 from the upstream end portion to the downstream end portion of the transfer apparatus.

Incidentally, regarding the operation of the control unit H in the automatic operation, the plurality of transport units 1 are controlled so that all of the plurality of transport units 1 are simultaneously operated, or only a part of the plurality of transport units 1 is operated. It is possible to control a plurality of transport units 1 so that are simultaneously operated.
Then, when controlling the plurality of transport units 1 so that all of the plurality of transport units 1 are simultaneously in an operating state, for example, all the transport units 1 are started to operate simultaneously by an operation start command or the like. In response to a stop command, all the transport units 1 are stopped simultaneously.
Further, when controlling the plurality of transport units 1 so that only a part of the plurality of transport units 1 is in the operating state at the same time, for example, which glass substrate 2 is transported based on the detection information of the presence sensor T. Depending on whether the unit 1 exists on the transport path, the transport unit 1 to start operation and the transport unit 1 to stop operation are selected, and the selected transport unit 1 is started and stopped.

In addition, when the manual operation is commanded by the operation changeover switch S1, the control unit H sets only the transport unit 1 that is instructed to start the operation by the operation command switch S2 as the operation target, in the transport unit 1 to be operated. The electric motor 26, the sub fan filter unit 21, and the blower fan 6 are configured to operate.
In this way, in manual operation, only the transport unit 1 that is instructed to start operation by the operation command switches S2 is operated, and the glass substrate 2 is supported in a non-contact state by the operated transport unit 1. It is comprised so that it may convey.

  In the manual operation, the control unit H does not simply start the operation of the conveyance unit 1 that is instructed to start operation by the operation command switches S2, but is adjacent to the downstream side in the conveyance direction. Depending on whether or not 1 is in the operating state, the operation is started only when the glass substrate 2 on which the transport unit 1 adjacent to the downstream side in the transport direction is transferred can be supported and transported in a non-contact state.

In other words, the control unit H allows the start of operation for the transport unit 1 in which the transport unit 1 adjacent to the downstream side in the transport direction is in operation, and the transport unit 1 adjacent to the downstream side in the transport direction About the conveyance unit 1 which is a non-operation state, it is comprised so that an operation start may be prohibited.
And about the conveyance unit 1 with which the conveyance unit 1 adjacent to the downstream of the conveyance direction is a driving | running state, the control part H will start an operation, if operation start is commanded by operation command switch S2, and conveyance will be carried out. For the transport unit 1 in which the transport unit 1 adjacent to the downstream side in the direction is in the non-operating state, the start of operation is prohibited even if the start of operation is commanded by the operation command switches S2.
In addition, the control unit H does not simply prohibit the start of the operation of the conveyance unit 1 in which the conveyance unit 1 adjacent to the downstream side in the conveyance direction is in the non-operating state, but adjacent to the downstream side in the conveyance direction. In the transport unit 1 in which the transport unit 1 to be operated is in operation, when the presence sensor T detects the presence of the glass substrate 2, the operation start is prohibited.

More specifically, the control unit H operates with the operation command switches S2 because there is no transport unit 1 adjacent to the downstream side in the transport direction for the transport unit 1 located on the most downstream side in the transport direction. When the start is instructed, the operation is started unconditionally.
Then, when a description is given of the transport units 1 other than the transport unit 1 located on the most downstream side in the transport direction, the control unit H indicates that the transport unit 1 adjacent to the downstream side in the transport direction is in an operating state or transport. Even if the conveyance unit 1 adjacent to the downstream side in the direction is in the non-operating state, if the presence sensor T does not detect the presence of the glass substrate 2, the operation command switch S2 instructs the start of operation. And is configured to start operation.
Further, when the transport unit 1 adjacent to the downstream side in the transport direction is in a non-operating state and the presence sensor T detects the presence of the glass substrate 2, the control means H detects the operation command switches S2. Even if the operation start is commanded at, the start of the operation is prohibited.

As for the operation start and the operation stop for the conveyance units 1 other than the conveyance unit 1 located on the most downstream side in the conveyance direction, since all the conveyance units 1 perform the same operation, as shown in FIG. A certain two of the plurality of transport units 1 arranged will be picked up and a description will be added based on the flowchart of FIG.
Incidentally, in FIG. 11, the transport unit 1 located upstream in the transport direction is referred to as an upstream transport unit 1a, the transport unit 1 located downstream in the transport direction is referred to as a downstream transport unit 1b, and the operation switches S2 Among them, the operation command switch for instructing the upstream transfer unit 1a to start operation is referred to as an operation command switch SW1, and the operation command switch for instructing the downstream transfer unit 1b to start operation is referred to as an operation command switch SW2. explain.

First, when the operation command switch SW1 instructs the upstream conveyance unit 1a to start operation, the control unit H determines whether or not the downstream conveyance unit 1b is in an operating state, and When the transport unit 1b on the side is in an operating state, the operation of the transport unit 1a on the upstream side is started (steps 1 to 3).
When the downstream transport unit 1b is in a non-operating state and the presence of the glass substrate 2 is detected by the presence sensor T in the upstream transport unit 1a, the control unit H detects that the upstream transport unit 1b The start of operation 1a is prohibited (steps 2, 4, 5).
In addition, even if the downstream transport unit 1b is not in operation, the control unit H does not detect the presence of the glass substrate 2 with the presence sensor T in the upstream transport unit 1a. The operation of the transport unit 1a is started (steps 2, 4, 3).

  When the control unit H detects the presence of the glass substrate 2 by the presence sensor T in the downstream transport unit 1b in the state where the upstream transport unit 1a is started, the upstream transport unit 1a and The operation of the transport unit 1b on the downstream side is stopped (Steps 6 and 7).

[Second Embodiment]
This 2nd Embodiment shows another embodiment of the attitude | position of the conveyed product conveyed in the said 1st Embodiment, and adds description below based on drawing centering on the point below.
Incidentally, since other configurations are the same as those in the first embodiment, detailed description thereof will be omitted by using the same reference numerals.

As shown in FIGS. 13 and 14, a plurality of vertical posture transport units 24 are provided side by side in the transport direction of the glass substrate 2, and are configured to transport the glass substrate 2 as a transported object in a posture close to the vertical posture. It is configured to act as a conveying means.
The vertical posture transport unit 24 includes a vertical posture blowing type support means 25 provided in a posture close to the vertical posture and a vertical posture propelling force applying means 26 provided in a posture close to the vertical posture. It is prepared for.
Incidentally, in this 2nd Embodiment, since the glass substrate 2 is conveyed with the attitude | position close | similar to a vertical attitude | position, the side in which the conveyance unit 24 for vertical attitude | positions becomes a lower surface part of the glass substrate 2. FIG.

The vertical air blowing type support means 26 is configured to supply clean air toward the lower surface of the glass substrate 2 that is transported in a posture close to the vertical posture to support the glass substrate 2 in a non-contact state. ing.
Incidentally, the blower support means 26 for the vertical posture is configured by a fan filter unit 7a in which the dust removal filter 5 and the blower fan 6 are integrally assembled, like the blower support means 3 in the first embodiment. In this fan filter unit 7a, two blower fans 6 arranged in the vertical direction and one dust filter 5 are integrally assembled.
An air conditioning plate 8 is also provided to condition the clean air from the fan filter unit 7a.

The vertical posture propulsion applying means 26 includes a timing belt 27 that applies propulsive force while contacting and supporting one end of the glass substrate 2, and applies propulsive force in the transport direction to the glass substrate 2. It is configured as follows.
In other words, the vertical-position propulsive force applying means 26 includes a driving wheel 29 that is positioned on the lower conveyance side and is rotated by the electric motor 28, a rotatable driven wheel 30 that is positioned on the upper conveyance side, and these driving units. A timing belt 27 wound around the wheel 29 and the driven wheel 30 is provided.
The timing belt 27 is supported by an inner support ring 31 from the inner peripheral surface side of the feed path portion, and is supported by an outer support wheel 32 from the outer peripheral surface side of the return path portion.

  In addition, a transport case 34 is provided that covers the transport space C in which the vertical air blowing type support means 25 and the transport path of the glass substrate 2 are housed in a sealed state or a substantially sealed state.

As in the first embodiment, the control unit H controls the start and stop of operation for each of the plurality of vertical posture transport units 24 based on the command from the command unit S, and performs automatic operation and It is configured to perform manual operation.
Similarly to the first embodiment, in the case of manual operation, the control unit H does not simply start the operation for the vertical posture transport unit 24 that is instructed to start operation by the operation command switches S2. The glass substrate 2 on which the vertical posture conveyance unit 24 adjacent to the downstream side in the conveyance direction is transferred in a non-contact state depending on whether or not the vertical posture conveyance unit 24 adjacent to the downstream side in the conveyance direction is in an operating state. It is configured to start operation only when it can be supported and conveyed.

In other words, the control unit H allows the start of operation of the vertical posture transport unit 24 adjacent to the downstream side in the transport direction and in the operation state, and moves the control unit H to the downstream side in the transport direction. The vertical posture conveyance unit 24 in which the adjacent vertical posture conveyance unit 24 is in a non-operating state is configured to prohibit the start of operation.
Then, the control unit H, for the vertical posture conveyance unit 24 in which the vertical posture conveyance unit 24 adjacent to the downstream side in the conveyance direction is in an operating state, is instructed to start operation by the operation command switches S2. For the vertical posture conveyance unit 24 that has started operation and the vertical posture conveyance unit 24 adjacent to the downstream side in the conveyance direction is in a non-operating state, the operation command switch S2 is instructed to start operation. Is configured to be prohibited from starting.
In addition, the control unit H does not simply prohibit the start of driving for the vertical posture transport unit 24 in which the vertical posture transport unit 24 adjacent to the downstream side in the transport direction is in a non-operating state. If the presence sensor T detects the presence of the glass substrate 2 in the vertical posture conveyance unit 24 in which the vertical posture conveyance unit 24 adjacent to the downstream side in the direction is in operation, the start of operation is prohibited. It is configured.

  Incidentally, in the second embodiment, since the sub fan filter 21 is not provided, in the control block diagram, the sub fan fill 21 is omitted in FIG. 10 and the electric motor 16 is changed to the electric motor 28.

[Another embodiment]
(1) In the first embodiment, the control unit H permits the start of operation of the transport unit 1 in which the transport unit 1 adjacent to the downstream side in the transport direction is in the operating state only in the manual operation, and the transport direction. For the transport unit 1 in which the transport unit 1 adjacent to the downstream side is in a non-operating state, the start of operation is prohibited, but the transport direction is only in both manual operation and automatic operation or only in automatic operation. For the transport unit 1 in which the transport unit 1 adjacent to the downstream side is in the operating state, the start of the operation is permitted, and for the transport unit 1 in which the transport unit 1 adjacent to the downstream side in the transport direction is in the non-operating state, the operation is performed. It is also possible to implement such that the start is prohibited.

(2) In the second embodiment, the controller H starts the operation for the vertical posture transport unit 24 in which the vertical posture transport unit 24 adjacent to the downstream side in the transport direction is in the operating state only in the manual operation. The vertical posture transport unit 24 adjacent to the downstream side in the transport direction is in a non-operating state, but the start of operation is prohibited. In both or only in the automatic operation, the vertical posture conveyance unit 24 adjacent to the downstream side in the conveyance direction is in an operating state, and the start of operation is permitted, and the vertical posture conveyance unit 24 is arranged downstream in the conveyance direction. The vertical posture transport unit 24 in which the adjacent vertical posture transport unit 24 is in a non-operating state may be implemented so as to prohibit the start of operation.

(3) In the first embodiment, the control unit H detects the presence of the glass substrate 2 with the presence sensor T in the transport unit 1 in which the transport unit 1 adjacent to the downstream side in the transport direction is not in operation. In this case, the start of operation is prohibited, but regardless of whether the presence sensor T detects the presence of the glass substrate 2, the transport unit 1 adjacent to the downstream side in the transport direction It is also possible to carry out such that the start of operation is prohibited for all of the transport units 1 in the non-operating state.
Incidentally, in this case, the presence sensor T may not be provided.

(4) In the second embodiment, the control unit H uses the material sensor T in the vertical posture transport unit 24 in which the vertical posture transport unit 24 adjacent to the downstream side in the transport direction is in the non-operating state. When the presence of the substrate 2 is detected, the start of operation is prohibited. However, the presence sensor T detects whether the presence of the glass substrate 2 is detected by the presence sensor T, and the downstream side in the transport direction. It is also possible to prohibit the start of operation for all the vertical posture conveyance units 24 in which the adjacent vertical posture conveyance units 24 are in the non-operating state.
Incidentally, in this case, the presence sensor T may not be provided.

(5) In the first embodiment, the air discharge port 23 that connects the conveyance space A and the storage space B is formed in the side surface portion of the storage frame 12a. However, the air discharge port 23 is not formed. In addition, it is also possible to configure and carry the conveyance space A and the storage space B so as not to communicate with each other.

(6) In the first and second embodiments, the fan filter units 7 and 7a in which the dust removal filter 5 and the blower fan 6 are integrally assembled are exemplified. However, the dust removal filter 5 and the blower fan 6 are not necessarily integrated. For example, a guide path for guiding the air blown by the blower fan 6 to the dust filter 6 is provided, and the dust filter 5 and the blower fan 6 are configured separately. It is also possible.

(7) In the first and second embodiments, the glass substrate 2 is exemplified as the conveyed product. However, various articles such as other plate-like bodies and disk-like bodies can be applied.

The perspective view which abbreviate | omitted a part of conveying apparatus in 1st Embodiment Longitudinal front view of the transport apparatus in the first embodiment Longitudinal enlarged front view of the transport device in the first embodiment 1 is a longitudinal side view of a conveying device according to a first embodiment. The perspective view of the conveyance unit in 1st Embodiment The top view of the conveyance unit in 1st Embodiment 1 is a longitudinal side view of a conveying apparatus showing a propulsive force applying means in the first embodiment. Longitudinal front view showing the main part of the propulsive force applying means in the first embodiment Longitudinal side view showing the main part of the propulsive force applying means in the first embodiment Control block diagram of transfer device in first embodiment The figure which shows the outline of the conveying apparatus in 1st Embodiment. Flowchart of manual operation in the first embodiment The perspective view which abbreviate | omitted a part of conveying apparatus in 2nd Embodiment. Partially cutaway side view of a transfer apparatus according to the second embodiment

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Conveyance means 2 Conveyed object 3 Blower-type support means 4 Propulsive force provision means H Control means S2 Operation command means T Existence detection means

Claims (3)

Blower-type support means that blows air toward the lower surface of the conveyed product and supports the conveyed product in a non-contact state, and propulsion in the conveyance direction with respect to the conveyed product supported by the blow-type support means A plurality of conveying means provided with propulsive force applying means for applying force are provided side by side in the conveying direction,
A transfer device provided with a control means for controlling the operation of the plurality of transfer means,
The control means permits the start of operation of the conveying means adjacent to the downstream side in the conveying direction in the operating state, and conveys the conveying means adjacent to the downstream side in the conveying direction in the non-operating state. About a means, the conveying apparatus comprised so that operation start might be prohibited. An operation command means of an artificial operation type that instructs start of operation for each of the plurality of transport means is provided,
The control means starts the operation of the conveying means adjacent to the downstream side in the conveying direction when the conveying instruction is instructed to start the operation, and the downstream side in the conveying direction. 2. The transport according to claim 1, wherein the transport means adjacent to the transport means is in a non-operating state, and is configured to prohibit the start of operation even if the start of operation is commanded by the operation command means. apparatus. The transport means is configured to include presence detection means for detecting whether the transport object is present on the transport path;
The control means prohibits start of operation when the presence of the transported object is detected by the presence detection means in the transport means in which the transport means adjacent to the downstream side in the transport direction is in a non-operating state. The transport apparatus according to claim 1 or 2, configured as described above.

Images