JP2002176091A - Substrate conveyance equipment and method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently and intermittently convey a glass substrate when the grass substrate is discharged at fixed intervals. SOLUTION: The glass substrate 18 is floated by clean air that is discharged upward from an air float table 30, and both the side edge sections are supported by each of rollers 31 to 33 for conveyance. The glass substrate 18 is discharged from a discharge conveyance section 28 at a conveyance speed V1. When the rear end of the glass substrate 18 passes through a follow-up start center 35d, each glass substrate 18 in each of conveyance sections 25 to 27 starts follow-up conveyance at a faster follow-up speed V2 than the conveyance speed V1. By the follow-up conveyance, the interval of each glass substrate 18 in the discharge conveyance section 28 and a second stock conveyance section 27 becomes specific distance L2. Each glass substrate 18 reaches the conveyance speed V1 again, and the specific distance L2 is maintained. From the discharge conveyance section 28, the glass substrate 18 is successively discharged at the fixed interval (the distance L2).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer method and apparatus, and more particularly, to a substrate transfer apparatus suitable for manufacturing a glass substrate of a large liquid crystal display panel or a plasma display panel.

[0002]

2. Description of the Related Art A color filter used for a liquid crystal display panel (LCD) or a plasma display panel (PDP) includes a pixel pattern of each color of red (R), green (G), and blue (B) on a transparent glass substrate. , Black (K) black matrix. Recently, LCD and PD
With the increase in the size of P, the glass substrate used for this color filter has also increased in width and length to 1 m or more, although it has a considerably small thickness of 1 mm to 10 mm.

As a method for manufacturing a color filter, a film transfer system is generally known. In the film transfer method, a photosensitive layer formed on a film is transferred (hereinafter, referred to as a laminate) onto a transparent glass substrate by a photosensitive layer transfer machine (hereinafter, referred to as a laminator). Next, the photosensitive layer is exposed by irradiating light through a mask on which a predetermined pattern is formed by an exposure device. The exposed glass substrate is developed by a developing machine to form a desired pixel pattern and a black matrix. The glass substrate is supplied horizontally to the laminator at regular intervals,
A photosensitive layer is laminated on the transfer surface excluding the peripheral portion having a predetermined width on the lower surface.

As a device for transporting a glass substrate to a laminator, for example, a pair of walking beams as described in Japanese Patent Application Laid-Open No. Hei 5-8833 is used to move the glass substrate up and down and reciprocate in the transport direction. One that transports a substrate, one that uses a plurality of pallets provided with a movable mechanism as described in JP-A-2000-264418, and that transfers and transports a glass substrate between these pallets, There is a method in which a glass substrate is held and transported using a robot hand as described in JP-A-2000-277587.

[0005]

However, in the above-described substrate transfer apparatuses, when the glass substrates are discharged at regular intervals, the mechanical structure and control for intermittent transfer are complicated, and the size of the substrate is large. There is a problem that it is difficult to change or control conditions for handling a glass substrate.

The present invention has been made in order to solve the above-mentioned problem, and has a simple mechanism. The glass substrate can be efficiently intermittently conveyed when the glass substrate is discharged at regular intervals. It is an object of the present invention to provide a substrate transfer device that can easily handle a glass substrate.

[0007]

In order to achieve the above object, a substrate transport apparatus of the present invention is a substrate transport apparatus for feeding a substrate to a ram roll, comprising: a receiving transport section for receiving a substrate; A stock transport unit that stocks and transports, a discharge transport unit that receives a substrate from the stock transport unit and discharges the substrate at a substrate discharge speed that matches the substrate feed speed of the lami roll, and a substrate that detects the position of the substrate in each transport unit The detecting unit and the substrate detecting unit detect the discharge of the substrate in the discharging and conveying unit, and the stock conveying unit, and subsequently the receiving and conveying so that the interval between the substrates being discharged becomes a predetermined value and the same substrate discharging speed. And a control unit that sends out the substrate from the unit and performs chasing conveyance. The substrate and the photosensitive layer film are fed into the lami-roll, the photosensitive layer film is sent to the lami-roll with the cover film of the part to be transferred to the substrate being peeled off, and the discharging / transporting part is the leading end of the peeling part of the cover film. The substrate is discharged by adjusting the position to the transfer start position of the substrate.

It is preferable that each transport unit includes a stop sensor for stopping the substrate at each transport unit, and the substrate is positioned at each transport unit based on a substrate detection signal from the stop sensor. Further, a chase start sensor for detecting discharge of the substrate is provided in the discharge / conveyance unit, and after the chase start sensor detects the discharge of the substrate, the substrate of the stock conveyance unit and the reception / conveyance unit is transmitted at a speed exceeding the substrate discharge speed. It is preferable to control each substrate transport unit such that the substrate is transported in a chasing manner, the distance between the substrate and the preceding substrate becomes a predetermined value, and the substrate discharge speed. Further, in each transport unit, a rear-end collision prevention sensor is configured by providing an upstream substrate detection sensor and a downstream substrate sensor separated by a predetermined distance in the substrate transport direction, and when the upstream substrate detection sensor changes from the absence of the substrate to the presence of the substrate. When the downstream substrate sensor has a substrate, it is determined that there is a possibility of collision, and it is preferable to stop the transport of the substrate on the upstream side that is determined to have the possibility of collision, and to detect the presence or absence of the substrate in the substrate receiving unit. It is preferable to provide a loading sensor which receives the substrate from the previous process by the substrate absence signal of the loading sensor.

[0009] Each of the transport sections is constituted by a feed member which rotates while supporting both side edges of the substrate, and a substrate floating panel which floats a central portion of the substrate supported by the feed member by blowing out gas. The feeding member is configured to be movable in the width direction of the substrate in accordance with the width dimension of the substrate. Further, each transport unit is constituted by a feed member which rotates while supporting the side edges of the substrate and a portion avoiding the transfer area of the photosensitive layer film, and the feed member corresponds to a portion avoiding the transfer area in the width direction of the substrate. It is configured to be movable in accordance with the position. It is preferable that each transport unit is provided with a nip member that transports the substrate while sandwiching the substrate between the transport member and the discharge transport unit. It is preferable to adjust the width of the substrate.

Further, a plurality of stock transfer sections are provided, a heater is provided in each transfer section, and each substrate is preheated to a target temperature at the time of substrate discharge, and the receiving transfer section is set at a lower temperature than the target temperature. It is preferable to set the temperature higher to reach the target temperature, and to set it slightly higher than the target temperature in the discharge / transport section.The heater provided in each transport section is divided into small blocks, and the temperature can be set for each block. Is preferred.

Further, according to the substrate transport method of the present invention, in a substrate transport method for transporting a substrate to a lami roll, a receiving transport section for receiving a substrate, a stock transport section for stocking and transporting the substrate from the receive transport section, a stock transport section A discharge transport unit that receives a substrate from the substrate and discharges the substrate at a substrate discharge speed that matches the substrate feed speed of the ram roll, a substrate detection unit that detects the position of the substrate in each transport unit, and a substrate detection unit that detects the substrate A control unit that controls each transfer unit according to the position, a substrate detection unit detects discharge of the substrate in the discharge transfer unit, and a distance between the discharge substrate and the discharge substrate becomes a predetermined value and the same substrate discharge speed. Then, the substrate is sent out from the stock transport unit and subsequently the receiving / transporting unit to perform the chase transport.

[0012]

FIG. 1 is a schematic diagram showing the configuration of a laminator provided with a substrate transfer device according to the present invention. The laminator 10 includes a pre-heating unit 11, a thermocompression unit 12, a laminated film supply unit 13, a cooling unit 14, a peeling unit 15, a substrate take-out unit 16, and a controller 17, which will be described later, as shown in FIG. Then, the photosensitive layer is transferred to a transfer area TA excluding the peripheral portion of the transparent glass substrate 18.

The glass substrate 18 is supplied to the preheating unit 11 by a robot hand (not shown). The hand body of the robot hand is provided with a suction pad. The robot hand uses the suction pad to move the glass substrate 18.
(The non-transfer surface of the photosensitive layer) is adsorbed and held. Then, the robot hand supplies the glass substrate 18 to the preheating unit 11 with the surface (the surface to which the photosensitive layer is to be transferred) turned upside down.

The pre-heating unit 11 includes a substrate transfer device 20 and heaters 21 and 22.
, And first and second stock transport units 26 and 27 and a discharge transport unit 28. The receiving and transporting unit 25 includes:
The glass substrate 18 is received from the robot hand and transferred to the downstream side. The glass substrate 18 is transported to the discharge transport unit 28 via the first and second stock transport units 26 and 27. The glass substrate 18 waits in the discharge / conveyance section 28 and is sent out to a later-described pair of ram rolls of the thermocompression section 12 according to an instruction from the thermocompression section 12.

The heaters 21 and 22 are arranged vertically so as to sandwich the transfer path of the glass substrate 18 of the substrate transfer device 20, and heat the transferred glass substrate 18 to a predetermined temperature. As the heater, a far-infrared heater, a nichrome wire heater, a hot air heater, or the like can be used.

The heaters 21 and 22 are set at a low temperature in the receiving / transporting section 25 to suppress thermal deformation, and in the first and second stock transporting sections 26 and 27, the glass substrate 18 is brought to a predetermined temperature in a short time. If the set temperature is high,
Then, the set temperature is slightly increased so that the temperature of the glass substrate 18 does not decrease during standby. For example, each set temperature when the glass substrate 18 is heated to 110 ° C.
22a is 100 ° C., heaters 21b, 22b and 21c,
The temperature of the heater 22d is set to 180 ° C, and the heaters 21d and 22d are set to 120 ° C. Thereby, the glass substrate 18 is heated to a predetermined temperature in a short time without being thermally deformed, and the temperature does not decrease during standby. The heaters 21 and 22
Is not limited to this, and is appropriately determined according to the substrate size and the required predetermined temperature. In addition, heaters 21 and
Numeral 2 is configured by arranging small-sized surface heating elements, and is individually provided with a controller (not shown). Therefore,
It is also possible to individually change the set temperature in order to make the temperature distribution of the glass substrate 18 uniform.
It is also possible to set both sides of 8 higher. further,
The minimum stop time is set in each of the transport units 25 to 28,
The temperature is reliably increased to a predetermined temperature.

As shown in FIG. 3, the substrate transfer device 20
It comprises an air floating table 30, a feed roller 31, a feed roller 32 with a flange, a width approach roller 33, a nip roller 34, sensors 35 to 39, and the like. The glass substrate 18 is conveyed with both side edges supported by a feed roller 31 and a feed roller 32 with a flange. The air floating table 30 is arranged so as to face the lower surface of the glass substrate 18, and a large number of air outlets 30a are formed on the surface thereof. By blowing clean air from the outlet 30a toward the glass substrate 18, the central portion of the glass substrate 18 bent by its own weight floats.

Feed roller 31 and feed roller 32 with flange
Are arranged in cutouts 30 b formed on both sides of the air floating stage 30, respectively, are rotatably supported, and have a width of the glass substrate 18 in a direction orthogonal to the direction in which the glass substrate 18 is conveyed. It can be moved according to the dimensions. Each of the feed rollers 31 and 32 is rotationally driven by a pulse motor 40, and each of the sensors 35 to 3 to be described later.
The controller 17 controls the driving of the pulse motor 40 via the motor driver 41 according to the substrate detection signal from the controller 9. Further, each of the feed rollers 31 and 32 can be adapted to transport a multi-size glass substrate by moving along the cutout portion 30b according to the width of the glass substrate 18.

Feed roller 31 and feed roller 32 with brim
Contacts the both side edges of the lower surface of the glass substrate 18 and conveys the glass substrate 18 by rotating. At this time, although the surface of the glass substrate 18 (the surface to which the photosensitive layer is transferred) is on the lower side, each of the feed rollers 31 and 32 comes into contact with the periphery of the glass substrate 18 on which the photosensitive layer is not transferred. The transfer area TA is not damaged or dust is attached. The flange 32a of the flanged roller 32 functions as a guide for the glass substrate 18 and regulates the position of the glass substrate 18 in the width direction.

The width adjusting roller 33 is provided with a width adjusting mechanism 42. The controller 17 selectively sets the width adjustment roller 33 between the correction position where the width adjustment roller 33 contacts the side surface of the glass substrate 18 and the retreat position where the width adjustment roller 33 is separated from the glass substrate 18 via the width adjustment mechanism 42. When the width adjustment roller 33 is set at the correction position, the position and the inclination of the glass substrate 18 in the width direction are corrected, and the straight traveling accuracy of the glass substrate 18 is increased. In order to prevent the glass substrate 18 from being damaged,
The controller 17 sets a nip roller 34 to be described later to a retract position when setting the width adjusting roller 33 to the correction position, and sets the width adjusting roller 33 to the retract position when setting the nip roller 34 to the transport position. Perform control.

The nip roller 34 is made of Teflon (registered trademark).
And a nip mechanism 43 is provided.
The controller 17 selectively sets, via the nip mechanism 43, the nip roller 34 between a transport position where the glass substrate 18 is held between the feed roller 31 and a retracted position where the glass substrate 18 is separated from the glass substrate 18. By sandwiching both side edges of the glass substrate 18 between the nip roller 34 and the feed roller 31, slippage of the glass substrate 18 during transport is prevented. In order to prevent the glass substrate 18 from being damaged, when setting the nip roller 34 to the transfer position, the glass substrate 1
The nip roller 34 is slowly moved just before contact with the nip roller 8. When the glass substrate 18 is held between the pair of ram rolls, the nip roller 34 is set to the retracted position.
Furthermore, in the present embodiment, the nip roller is formed of Teflon, but if there is no problem in function, it is formed by using another material or a more elastic rubber material, for example, fluorine rubber, silicon rubber, or the like. Is also good.

In the notch 30c formed at the center of the air levitation table 30, sensors 35 to 39, which are heat-resistant reflective optical fiber sensors, are arranged. Each of the sensors 35 to 39 is arranged along the transport direction of the glass substrate 18 and is connected to the controller 17 (not shown). When the glass substrate 18 is detected, a substrate detection signal is sent to the controller 17. The controller 17 controls the conveyance by specifying the position of the glass substrate 18 based on the substrate detection signals from the sensors 35 to 39.

FIG. 4 shows the arrangement positions of the rollers 31 to 34 and the sensors 35 to 39 in the transport sections 25 to 28. The presence sensors 35a to 35d detect the presence or absence of the glass substrate 18 in each of the transport units 25 to 28. When the presence sensor 35a of the discharge / conveyance unit 28 is turned on, the thermocompression bonding unit 12 prepares for transfer of the photosensitive layer. Then, when a sending start signal is sent from the thermocompression bonding section 12, the glass substrate 18 is sent out at a transfer speed V1 in accordance with a feeding speed to a lami roll pair described later. When one of the presence sensors 35c and 35d of the receiving / transporting unit 25 is turned on, the robot hand does not supply the glass substrate 18 to the receiving / transporting unit 25, and the glass substrate 18 is Will not be placed on the When both of the presence sensors 35c and 35d are turned off, the next glass substrate 18 is supplied by the robot hand.

Each of the stop sensors 36a to 36d
The glass substrates 18 are provided at downstream end portions of Nos. 5 to 28. When the glass substrate 18 reaches the position and is turned on, the conveyance of the glass substrate 18 is stopped. When the leading end of the glass substrate 18 reaches the position of the stop sensor 35a, the discharge and transport unit 28 stops the transport. In addition, in the other transfer units 25 to 27, when the glass substrate 18 is located in the transfer unit downstream of the transfer unit and the tip of the glass substrate 18 reaches the position of each of the stop sensors 35b to 35d, the transfer unit Then, the conveyance of the glass substrate 18 is stopped.

The nip sensors 37a to 37h are provided in the vicinity of the nip rollers 34. When the tip of the glass substrate 18 reaches that position, the corresponding nip rollers 34 are set at the transport position. When the rear end of the glass substrate 18 passes through the nip roller 34, the corresponding nip roller 34 is set to the retracted position before passing the rear end.

The additional feed start sensor 38 is provided at a distance L1 from the stop sensor 36b of the second stock transport section 28. The glass substrate 18 is sent out from the discharging / conveying unit 28 to the thermocompression bonding unit 12, and the trailing end of the glass substrate 18
8, the feed start sensor 38 is turned off. When the additional feed start sensor 38 is turned off, the receiving and transporting unit 25, the first
And the glass substrate 1 in the second stock transfer units 26 and 27
8 starts the chase conveyance at the additional transport speed V2 higher than the transport speed V1.

The follow-up transport is performed for the additional transport time T. The additional speed V2 and additional time T are determined according to the size of each substrate, and the glass substrate 18
At a predetermined distance L2 (see FIG. 3).
Is set appropriately so as to be supplied. This allows
After the lapse of the additional feeding time T, the distance between the glass substrate 18 sent from the discharge conveyance unit 28 and the glass substrate 18 in the second stock conveyance unit 28 becomes a predetermined distance L2. After the elapse of the additional transport time T, the glass substrate 18 that has been chased and transported also reaches the transport speed V1 and is transported toward the thermocompression bonding unit 12 while maintaining the predetermined distance L2.

As described above, the interval between the glass substrates 18 is adjusted to the predetermined distance L2 in the discharge / conveyance section 28 located immediately before the thermocompression bonding section 12, so that the glass substrates 18 can be precisely and regularly attached to the thermocompression bonding section 12. Can be sequentially supplied. In addition, since the interval between the glass substrates 18 is adjusted immediately before the thermocompression bonding section 12, there is no problem even if a deviation occurs in the conveyance until the glass substrate 18 reaches the discharge conveyance section 28. Further, each transport unit 25-2
8, the glass substrate 1 is accurately fixed to the thermocompression bonding section 12 at a constant interval regardless of the variation in the time interval of the loading of the glass substrate 18 into the receiving and transporting section 25 and the substrate size.
8 can be supplied sequentially. By increasing the additional transport speed V2, the follow-up transport distance can be reduced, and the size of the entire substrate transport apparatus can be reduced accordingly.

The rear-end collision prevention sensors 39a to 39f and the stop sensors 36b and 36c are provided to prevent the upstream-side glass substrate 18 from colliding with the downstream-side glass substrate 18 to be conveyed. Is a predetermined distance L
It is detected whether or not they are separated by two. Each sensor is 39a and 39b, 39c and 39d, 36b and 39e, 36c and 3
9f are paired, and are each set to a predetermined distance L2. When the upstream sensor of the pair of sensors changes from the absence of the glass substrate to the presence of the glass substrate, and the downstream sensor has the glass substrate, the distance between the front and rear glass substrates 18 is a predetermined distance L2. This indicates that the transfer of the glass substrate 18 that has been being chased and conveyed is stopped. When the preceding glass substrate 18 on the downstream side is conveyed and the distance between the front and rear glass substrates 18 becomes a predetermined distance L2, the conveyance of the glass substrate 18 that has been chasing and conveyed again is restarted. The transport speed at this time is a transport speed V that matches the feeding speed to the lami roll pair.
It is one.

In FIG. 1, the thermocompression bonding section 12 is composed of a pair of Rami rolls 50 and a backup roller 51. The Lami roll pair 50 is composed of Lami rolls 50a and 50b arranged in the vertical direction, and these Rami rolls 50a and 50b have a built-in heater. The lami-roll pair 50 sandwiches and transports the glass substrate 18 and the laminated film 52, thereby bonding the laminated film 52 to the glass substrate 18 by thermocompression bonding. The backup roller 51 is configured to contact and rotate with the Lami rolls 50a, 50b.
Ob is suppressed, and thermocompression bonding with uniform force is enabled. An air levitation table 53 having the same configuration as the above-described air levitation table 30 is provided between the substrate transfer device 20 and the thermocompression bonding section 12. As a result, the glass substrate 18 is kept horizontal, and the glass substrate 18 is
The center portion of the glass substrate 18 is prevented from being bent when the glass substrate 18 is supplied, and colliding with the lower ram roll 50a.

The laminated film supply unit 13 includes a mounting shaft 54a of the laminated film roll 54, a half cutter 55, a cover film peeling unit 56, and a back tension roller 57.
And so on. This laminated film supply unit 13
The cover film 52 is moved from the laminate film roll 54 to the cover film 52.
Then, the base film 52b is supplied to the ramirole pair 50 with the photosensitive layer facing upward.

The laminated film 52 is composed of a base film 5
2b, a photosensitive layer 5 via an auxiliary layer, an intermediate layer and the like (not shown).
2a, a cover film 52c is provided on the photosensitive layer 52a, and an antistatic layer is provided on the other surface of the base film 52b.

The half cutter 55 cuts the laminated film 52 in half according to the length of the glass substrate 18. In this half cut, the cover film 52c and the photosensitive layer 52a are cut, and the base film 52b is not cut.

The cover film peeling section 56 peels the half-cut cover film 52c, which is the surface to be attached to the glass substrate 18, from the laminate film 52. This peeling is performed by sticking the adhesive tape 56c pulled out from the adhesive tape roll 56a to the cover film 52c by the pressing roller 56b.
The adhesive tape 56c to which 2c is attached is a tape winding shaft 5.
It is wound and collected by 6d. Further, the cover film 52c of the laminated film 52 which is to be located between the glass substrates 18 is left without being peeled off.

In the thermocompression bonding section 12, when the half-cut line passes through a predetermined position, a sending start signal is sent to the substrate transfer device 20. Thus, the glass substrate 1 is aligned with the glass substrate 18 and the half-cut line.
8, the photosensitive layer 52a of the laminated film 52 is attached. Then, the base film 52b is also sent to the downstream side in the feed direction of the pair of Rami rolls 50 as the glass substrate 18 moves.

The cooling unit 14 is provided with a cooling air blowing board 60
And a transport roller 61. The cooling air blowing board 60 blows clean cooling air that has passed through the HEPA filter toward the glass substrate 18 to cool the temperature of the glass substrate 18 being conveyed by the conveying rollers 61 to almost room temperature (30 ° C. or lower).

The peeling section 15 is composed of a peeling roller 62 and a base film winding mechanism 63. The peeling section 15 peels the base film 52b from the glass substrate 18, and winds the base film 62b in a roll around a collecting shaft 63a. The collection shaft 63a is driven to rotate by a winding motor (not shown). The take-up motor is torque-controlled so as to keep the tension of the base film 52b after the pair of Rami rolls 50 constant so that the base film 52b does not loosen.

On the downstream side of the peeling section 15, a substrate take-out section 16 composed of an air floating table 65 is provided.
The air levitation table 65 is configured similarly to the air levitation table 30 of the preliminary heating unit 11. The upper surface of the glass substrate 18 sent out from the peeling section 15 is sucked by a robot hand (not shown) and is taken out.

Next, the operation of the above configuration will be described.
When the first glass substrate 18 is put into the receiving and transporting unit 25 by the robot hand, the first glass substrate 18
The sheet is transported in the order of the stock transport section 26, the second stock transport section 27, and the discharge transport section 28, and is heated to a predetermined temperature by the heaters 21 and 22. When the tip of the glass substrate 18 reaches the stop sensor 36a of the discharge / transport section, the transport is stopped. Thereafter, the second, third, and fourth glass substrates 18 are sequentially loaded and transported, and the stop sensors 36 of the transport units 25 to 27 are transported.
It stops at the positions of b to 36d.

In the thermocompression bonding section 12, the lami-roll pair 50 rotates to feed the laminated film 52, and the laminated film 52
When the half-cut line reaches a predetermined position, a sending start signal is sent to the substrate transfer device 20. Substrate transfer device 20
Sends out the first glass substrate 18 from the discharge / conveyance unit 28 at the conveyance speed V1 that matches the speed of feeding into the pair of Rami rolls 50 in response to the input of the feeding start signal. When the rear end of the glass substrate 18 passes through the additional feed start sensor 38, the second glass substrate 18 starts chasing and transporting at an additional transport speed V2 higher than the transport speed V1. After the additional transport time T has elapsed, the second glass substrate 18 is also transported at the transport speed V1. At this time, the distance between the first glass substrate 18 and the second glass substrate 18 is a predetermined distance L2.

Hereinafter, the third and fourth glass substrates 18 are similarly placed on the glass substrate
8 is fed at a feed speed V2 higher than the transfer speed V1 and the distance between the glass substrate 18 fed to the pair of Rami rolls 50 is set to a predetermined distance L2 before being sent to the Rami roll pair 50. Further, the glass substrate 18 that has been stopped by the receiving and transporting unit 25 is transported to the downstream side, and the presence sensors 35c and 35d.
Are turned off, the robot hand throws in the next glass substrate 18 and repeats the transfer of the same glass substrate 18 as described above.

In the state where the alignment between the glass substrate 18 and the half-cut line is performed, the photosensitive layer 52 a of the laminated film 52 is bonded to the glass substrate 18 by thermocompression bonding. The glass substrate 18 is cooled to approximately room temperature in the cooling unit 14 and then the base film 5
2b is peeled off. Thus, the photosensitive layer is transferred to the transfer area TA on the lower surface (front surface) of the transparent glass substrate 18.
Thereafter, the glass substrate 18 is sent out to the substrate take-out section 16, and its upper surface (back surface) is sucked and taken out by the robot hand.

In the above-described embodiment, a pulse motor is connected to all the feed rollers to rotate them. However, a motor is arranged for each block to drive the rollers in a belt, or a rotatable roller without a drive source. A free roller, a tension drive roller, and a torque motor drive roller may be arranged in combination as necessary, and the mounting interval of the feed roller and the like is preferably shorter in order to stably transfer a multi-size glass substrate. . Further, the friction between the feed roller and the glass substrate is sufficiently ensured, and there is no need to provide a nip roller if there is no concern about slippage of the glass substrate during transfer.In this case, the control of the transfer system becomes easy, Concerns about dust generation are also reduced. Further, a feed roller with a flange is used in the receiving and conveying section, and the first and second stock conveying sections.
As shown in the figure, a feed roller 71 similar to the discharge conveyance section,
The glass substrate 18 may be transported and guided using a guide roller 72 that regulates the position of the glass substrate 18 in the width direction.

In the above-described embodiment, the distance between the glass substrates is adjusted to be a predetermined distance L2 in the discharge / conveyance unit. However, as shown in FIG. A stopper 85 is provided which is movable between a locking position where the transfer of the glass substrate 18 is prohibited and a retracted position where the transfer of the glass substrate 18 is allowed. The substrate transfer timing may be adjusted to be the distance L2. In this case, the interval between the glass substrates 18 after the chasing transport is set to a distance L3 shorter than the predetermined distance L2.

In the above embodiment, both side edges of the glass substrate are supported by the feed roller, but as shown in FIG.
In the case where a plurality of transfer surfaces TA are formed at regular intervals on a single glass substrate 18 or when the back surface, which is a non-transfer surface, faces downward and supports it, a plurality of feed rollers 9 are provided.
1 may be arranged on the support shaft 90 to support the glass substrate 18. In addition, the interval and the number of the feed rollers 91 can be set arbitrarily, and can correspond to a multi-size glass substrate. Although the substrate to be transported is a glass substrate, the present invention is not limited to this, and may be formed of another material such as metal or resin.

[0046]

As described above, according to the substrate transfer apparatus of the present invention, the receiving and transferring section for receiving the substrate, the stock transferring section for storing and transferring the substrate from the receiving and transferring section, and the substrate from the stock transferring section. And a discharge unit that discharges the substrate at a substrate discharge speed that matches the substrate feed speed of the lami-roll, a substrate detection unit that detects the position of the substrate in each of the transfer units, and a substrate detection unit that discharges the substrate. A stock transport unit, and then a control unit that sends out the substrate from the receiving and transporting unit and performs a chasing transport so that the interval between the substrate and the substrate being discharged is a predetermined value and the same substrate discharging speed is detected. Since the glass substrate is provided, the glass substrate can be efficiently transported at a constant interval by a simple mechanism. Further, it is possible to easily cope with a multi-size glass substrate.

Further, according to the substrate transporting method of the present invention, the substrate detecting unit detects the discharge of the substrate in the discharging and transporting unit, and sets the distance between the substrate and the substrate being discharged to a predetermined value and the same substrate discharging speed. Since the substrate is sent out from the stock transport unit and subsequently the receiving and transporting unit to perform the chasing transport, the glass substrate can be efficiently transported at a constant interval by a simple mechanism.

[Brief description of the drawings]

FIG. 1 is a schematic view of a photosensitive layer transfer machine embodying the present invention.

FIG. 2 is a plan view showing a photosensitive layer transfer surface of a glass substrate.

FIG. 3 is a perspective view schematically showing a substrate transfer device.

FIG. 4 is a plan view showing a sensor mounting position of the substrate transfer device.

FIG. 5 is a perspective view schematically showing a substrate transfer device according to a second embodiment.

FIG. 6 is a perspective view schematically illustrating a substrate transfer device according to a third embodiment.

FIG. 7 is a plan view schematically showing a substrate transfer device according to a fourth embodiment.

[Explanation of symbols]

 Reference Signs List 10 Laminator 17 Controller 18, 98 Glass substrate 20, 70, 80 Substrate transfer device 25 Receiving transfer unit 26 First stock transfer unit 27 Second stock transfer unit 28 Discharge transfer unit 30, 53, 65 Air floating table 31, 71, 81 , 91 feed roller 32 feed roller with brim 33, 83 width shift roller 34, 84 nip roller 35 stock sensor 36 stop sensor 37 nip sensor 38 additional feed start sensor 39 rear impact prevention sensor 40 pulse motor 41 motor driver 42 width adjuster 43 nip mechanism 50 Rami roll vs. 52 laminated film

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Hiroshi Nagashi, Fuji Photo Film Co., Ltd., 200, Onakasato, Fujinomiya City, Shizuoka Prefecture In-house (72) Inventor Katsuyoshi Watanabe 794 Higashi-Toyoi, Kudamatsu City, Yamaguchi Prefecture Hitachi Techno Engineering Co., Ltd.Kasado Office F-term (reference) 3F081 AA10 AA22 BC04 BC07 BD08 BD11 BD15 BF12 BF23 CC08 CC12 CE13 DA02 DA10 DA12 EA09 EA10 FB01 FB02 FB05 FB06 5F031 CA05 GA08 GA36 GA37 GA53 GA62 JA17 JA19 JA22 MA37 MA38 PA16

Claims (13)

[Claims] 1. A substrate transport apparatus for feeding a substrate to a ram roll, a receiving / transporting section for receiving the substrate, a stock transporting section for stocking and transporting the substrate from the receiving / transporting section, and receiving a substrate from the stock transporting section. A discharge transport unit that discharges the substrate at a substrate discharge speed that matches the substrate feed speed of the lami-roll, a substrate detection unit that detects the position of the substrate in each transport unit, A stock transport unit, and a control unit that sends out the substrate from the receiving / transporting unit and performs chasing transport so that the interval between the substrate and the substrate being discharged is a predetermined value and the same substrate discharging speed is detected. A substrate transport device comprising: 2. A substrate and a photosensitive layer film are fed into the lami-roll, and the photosensitive layer film is sent to the lami-roll with the cover film of a portion to be transferred to the substrate being peeled off, and the discharge / transport section 2. The substrate transport apparatus according to claim 1, wherein the substrate is discharged by adjusting a leading end position of a peeling portion of the cover film to a transfer start position of the substrate. 3. The transport unit according to claim 1, further comprising a stop sensor for stopping the substrate at each transport unit, and positioning the substrate at each transport unit based on a substrate detection signal of the stop sensor. 3. The substrate transfer device according to 2. 4. A chase start sensor for detecting discharge of the substrate is provided in the discharge / conveyance unit, and after the chase start sensor detects discharge of the substrate, the stock conveyance unit at a speed exceeding the substrate discharge speed. 4. The method according to claim 3, wherein each of the substrate transport units is controlled so that the substrate of the receiving and transporting unit is sent and chased and transported, and a distance between the substrate and the preceding substrate becomes the predetermined value and the substrate discharging speed. Substrate transfer equipment. 5. A rear-end collision prevention sensor comprising an upstream substrate detection sensor and a downstream substrate sensor which are separated from each other by a predetermined distance in a substrate transport direction in each of the transport units, and wherein the upstream substrate detection sensor determines whether the substrate has no substrate. 5. The method according to claim 4, wherein when the downstream substrate sensor is changed to "exist", when the downstream substrate sensor has the substrate, it is determined that there is a possibility of collision, and the upstream substrate transfer determined to be possible of the collision is stopped. The substrate transfer device according to any one of the preceding claims. 6. The substrate receiving unit according to claim 1, further comprising a presence sensor for detecting the presence or absence of the substrate, wherein the substrate is received from a previous process by a substrate absence signal of the presence sensor. The substrate transfer device according to any one of the preceding claims. 7. Each of the transport units includes a feed member that rotates while supporting both side edges of the substrate, and a substrate floating panel that floats a central portion of the substrate supported by the feed member by blowing out gas. 7. The substrate transport apparatus according to claim 1, wherein the feed member is configured to be movable in a width direction of the substrate in accordance with a width dimension of the substrate. 8. Each of the transport sections is constituted by a feed member which rotates while supporting the side edges of the substrate and portions avoiding the transfer area of the photosensitive layer film, wherein the feed members are arranged in the width direction of the substrate. 7. The substrate transfer device according to claim 2, wherein the substrate transfer device is configured to be movable in accordance with a position of a portion avoiding the transfer area. 9. The substrate transfer apparatus according to claim 7, wherein each of the transfer units is provided with a nip member for holding the substrate between the transfer member and the transfer member. 10. The discharge conveyance section according to claim 9, wherein a width shifting member is provided near the nip member, and the width of the substrate is shifted while the nip member is released. Substrate transfer device. 11. A method according to claim 11, wherein a plurality of stock transport units are provided, and a heater is provided in each of the transport units to preheat each substrate to a target temperature at the time of discharging the substrate. The substrate according to any one of claims 1 to 10, wherein the stock transport unit is set to be higher than the target temperature so as to reach the target temperature, and the discharge transport unit is set to be slightly higher than the target temperature. Transport device. 12. The substrate transfer apparatus according to claim 11, wherein the heater provided in each of said transfer units is divided into small blocks, and a temperature can be set for each block. 13. A substrate transport method for transporting a substrate to a lami roll, comprising: a receiving / transporting section for receiving the substrate; a stock transporting section for stocking and transporting the substrate from the receiving / transporting section; and receiving a substrate from the stock transporting section. A discharge transport unit that discharges a substrate at a substrate discharge speed corresponding to the substrate feed speed of the lami-roll, a substrate detection unit that detects a position of the substrate in each transport unit, and a position of the substrate detected by the substrate detection unit And a control unit that controls each transfer unit in accordance with the above. The substrate detection unit detects discharge of the substrate in the discharge transfer unit, and a distance between the discharge substrate and the discharge substrate becomes a predetermined value and the same substrate discharge speed. Thus, the substrate transport method is characterized in that the substrate is transported from the stock transport unit and subsequently the receiving and transporting unit to carry out chasing transport.