200922787 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種加熱裝置，係將利用積層裝置貼附 感光性薄片的基板，在貼附處理之前預先加熱到既定的溫 度。 【先前技術】 例如，在液晶面板用基板、印刷配線用基板、電漿（PDP) 面板用基板中，使用將具有感光材料（感光性樹脂）層的感 光性薄片體（感光性薄片）貼附在基板表面的感光性積層體 。此感光性薄片體係將感光材料層及保護薄膜依序地積層 在可撓性塑膠’支撐體上。 在製造此感光性積層體之時，通常係預先將玻璃基板 或樹脂基板等之基板加熱到既定的溫度。其後，將保護薄 膜局部或全部剝離後的感光性薄片體及加熱後的基板，挾 持於構成積層裝置的一對積層輥子之間並加熱，藉此使感 光材料層被熱壓著於上述基板上。其次，藉由將可撓性塑 膠支撐體從基板剝離，而製造出感光性積層體。 例如，在揭示於日本特開平8 - 1 8 3 1 4 6號公報的乾光阻 膜的積層方法中，如第8圖所示，基板預熱部1、積層部2 、基板冷卻部3、基板上薄膜切斷部4、及薄膜除去部5係 沿著依運送部6對基板7之運送方向而配置。 在基板預熱部1中，經由預熱加熱器la將基板7加熱 到既定的溫度之後，將此基板7送出到積層部2。在積層 部2 ’配置一對積層輥子2a，2b，將基板7及乾保護膜8 200922787 送到上述積層輥子2 a, 2 b之間。因而， 著於基板7。 但是，在上述先前技術中，在基板 子2a，2b的基板插入側之間，有圓滑地 。因此，通常，在積層部2設置有突出 的輸送帶（未圖示）。 但是，在積層部2，當進行積層輥子 換等之維修作業時，輸送帶變成作業的 一次維修時，必須將輸送帶進行裝脫的 業相當的繁雜，因此有無法有效率地進 〇 【發明内容】 本發明係爲了解決此種問題者，其 熱裝置，使積層裝置的維修等之作業有 本發明係關於一種加熱裝置，將利 光性薄片的基板，在貼附處理之前預先 。加熱裝置具備：用於運送基板的運送 述運送機構之運送方向而配置之多個加 其後，配置在相鄰於積層裝置之運 熱機構，具備有：本體部，收容運送機 機構’設置於上述本體部，延伸到上述 用於將基板交付予上述積層裝置；及退 本體部相對於上述積層裝置移動。 本發明在構成加熱機構的本體部， 乾保護膜8被熱壓 預熱部1與積層輥 交付基板7的需要 到基板預熱部1側 2a，2b之清潔或更 障礙。因而，在每 作業，但是此種作 行維持全體的問題 目的在提供一種加 效且容易地進行。 用積層裝置貼附感 加熱到既定的溫度 機構、及沿著依上 熱機構。 送方向最下游的加 構及加熱源；移送 積層裝置之附近且 避機構，可使上述 設置有用於將基板 200922787 交付予積層裝置的移送機構，此本體部係與上述移送機構 一體’可經由退避機構而從上述積層裝置離開間隔。因此 ’在積層裝置維修時，僅使本體部朝既定方向移動，即可 確保維修用之空間。藉此，積層裝置之各種維修作業能有 效率且容易地達成。 下列’由附加圖式之較佳實施形態例的說明，可更了 解上述之目的及其他目的、特徵及優點。 【實施方式】 第1圖係組裝本發明之第1實施形態相關的加熱裝置 的感光性積層體之製造系統2 0的槪略構成圖。此製造系統 20，在液晶或有機（EL)電致發光用彩色濾光片的製作步驟 中，進行將長條狀感光性薄片2 2之感光性樹脂層2 8 (將後 述）熱轉印到玻璃基板2 4的作業。 此感光性薄片22，係將可撓性基底薄膜（支撐體）26、 感光性樹脂層（感光材料層）28、保護薄膜30加以積層而構 成。 如第1圖所示，製造系統2〇具備有：薄片送出機構 32，收容將感光性薄片22捲繞成滾筒狀的感光性薄片捲 22a，由此感光性薄片捲22a將上述感光性薄片22送出； 加工機構36，在被送出的上述感光性薄片22之保護薄膜 30，形成可朝寬度方向切斷的半切割部位34(參照第2圖） ;標籤黏著機構40，將一部分具有非黏著部38a的黏著標 籤38(參照第3圖）黏著在保護薄膜30上。 在標籤黏著機構40的下游，配置有：貯存部機構42 200922787 ’用於將感光性薄片2 2從間歇送料變更爲連續送料；剝離 機構4 4，從上述感光性薄片2 2將保護薄膜3 0以既定之長 度間隔加以剝離；第1實施形態相關的加熱裝置4 5 ,在將 玻璃基板24加熱到既定溫度的狀態，運送到貼附位置；積 層裝置46，將由於上述保護薄膜30之剝離而露出的感光 性樹脂層28貼附在上述玻璃基板24。此外，以下，將利 用積層裝置46將感光性薄片22貼附在玻璃基板24的被處 理物，只稱作貼附基板2 4 a。 在積層裝置46之貼附位置的上游附近，配置有檢測機 構47，用於直接檢測屬於感光性薄片22之境界位置的半 切割部位34，同時在上述積層裝置46之下游，配置有切 斷各玻璃基板24間的上述感光性薄片22之基板間薄片切 斷機構4 8。在此基板間薄片切斷機構4 8的上游，設置有 使用於運轉開始時及運轉結束時之薄片切斷機構48a° 在薄片送出機構32之下游附近，配置有一接合台49 ，用於接合大致使用完畢之感光性薄片2 2的後端 '及新使 用的感光性薄片2 2之前端。在此接合台49之下游’配置 有薄膜端末位置檢測器5 1，用於控制感光性薄片捲22a之 捲繞偏差引起的寬度方向之偏離。 加工機構36配置在輥子對50的下游’用於計算收容 捲繞在薄片送出機構32的感光性薄片捲22a之捲徑。此加 工機構36具備單一的圓刀刃52，此圓刀刃52行走於感光 性薄片22之寬度方向，並在上述感光性薄片22之既定位 置形成半切割部位3 4。 200922787 如第2圖所示，半切割部位3 4必須至少切斷保護薄膜 30’實際上爲了確實地切斷保護薄膜30，圓刀刃52之切 入深度被設定爲切入到感光性樹脂層2 8乃至於基底薄膜 26爲止。 半切割部位3 4係設定玻璃基板24之間隔者，例如， 在雨側的上述玻璃基板24分別逐一地以1 〇mm設定取入位 置。以玻璃基板24之間的半切割部位3 4挾持的部分，係 在後述之積層裝置4 6將感光性樹脂層2 8以框狀地貼附於 上述玻璃基板2 4時作爲遮罩的功能者。 標籤黏著機構4 〇爲了對應於玻璃基板2 4之間而殘留 保護薄膜3 0的殘留部分3 〇 b，而供給連結剝離側前方之剝 離部分3 Oaa及剝離側後方之剝離部分3 Oab的黏著標籤3 8 。如第2圖所示’保護薄膜3 0挾持殘留部分3 Ob，將先剝 離的部分作爲則方之剝離部分3 0 a a，另一方面，將隨後剝 離的部分作爲後方之剝離部分3 0 a b。 如第3圖所示，黏著標籤3 8構成帶冊狀，例如，以和 保護薄膜30同一材料製成。黏著標籤38在中央部具有未 塗布黏著劑的非黏著部（包含微黏著）38a，同時在此非黏著 部3 8 a之兩側’即在上述黏著標籤3 8之長邊方向兩端部， 具有黏著於前方之剝離部分30aa的第1黏著部38b、及黏 著於後方之剝離部分30ab的第2黏著部38c。 如第1圖所示，標籤黏著機構40具備吸附墊54 a〜54g ’可將最多7片的黏著標籤3 8以既定間隔逐一地隔開貼附 ’同時在依上述吸附墊5 4 a〜5 4 g的上述黏著標籤3 8之貼附 200922787 位置，配置有自由昇降的承台5 6，用於從下方保持感光性 薄片22。 貯存部機構42用於吸收上游側之感光性薄片22的間 歇運送、與下游側之上述感光性薄片22的連續運送之速度 差，更爲了防止張力變動，而具備以隨意搖動的2列輥子 60構成的調節輥子61。此外，輥子60亦可因應於貯存量 爲1列或3列。 配置在此貯存部機構42的下游之剝離機構44，具備 有吸入鼓62，用於降低感光性薄片22之送出側的張力變 動，使積層時之張力穩定化。在吸入鼓62之附近配置有剝 離輥子63，同時經由此剝離輥子63從感光性薄片22以銳 角之剝離角度加以剝離的保護薄膜3 0，除了殘留部分3 Ob 以外而被捲繞在保護薄膜捲取部64。 在剝離機構4 4之下游側配置有可賦予張力到感光性 薄片22的張力控制機構66。張力控制機構66具備缸體68 ，在此缸體68的驅動作用下，張力調節輥子70進行搖動 變位，藉此，此張力擺動器70可調整搖接之感光性薄片 22的張力。此外，張力控制機構66因應於需要而使用即 可，亦可省略。 檢測機構47具備雷射感測器或光感測器等之光電感 測器72 ’上述光電感測器72直接檢測半切割部位34之楔 狀的溝形狀部、或保護薄膜3 0之厚度引起的階差、或此等 之組合引起的變化，將此檢測信號作爲境界位置信號。光 電感測器72係對向於支撐輥子73配置。此外，亦可使用 -10- 200922787 非接觸變位計或CCD攝影機等之影像檢查手段等來取代光 電感測器72。 加熱裝置4 5，如第4圖所示，具備有：運送機構7 4 ’使玻璃基板24朝箭號C方向運送；沿著依上述運送機構 74之運送方向配置多個，至少第1加熱機構76及第2加 熱機構78。 運送機構74具備朝箭號C方向排列之多個樹脂製圓盤 狀運送輥子8 0，上述運送輥子8 〇係配置在構成第1加熱 機構76的本體部76a內及構成第2加熱機構78的本體部 78a 內。 第1加熱機’構76係比第2加熱機構78配置在箭號C 方向更上游側，設置有載置於基台82上的固定台84。在 固定台84上，如第4及5圖所示，設置有一對第1導軌 8 6互相平行且朝箭號C方向延伸，在此第1導軌8 6上， 本體部7 6 a配設成朝箭號c方向僅可進退既定距離L 1。 本體部76a設置成分別在箭號C方向前端部及箭號C 方向後端部聯鎖（未圖示），上述本體部7 6 a保持在進退位 置。本體部7 6 a之後退位置，即在玻璃基板2 4之入口側， 設置機益人槪欄88。在本體部76a內，在位於運送輕子80 之上方設置第1紅外線加熱器9 0 a。 第2加熱機構78具備：本體部78a;移送機構92，設 置於上述本體部78a，延伸到積層裝置46之附近且用於將 玻璃基板24交付予上述積層裝置46;及退避機構94，可 使上述本體部78a相對於上述積層裝置46移動。 -11 - 200922787 移送機構92設置有延伸於玻璃基板24之寬度方向（ 第5圖中爲箭號D方向）的框體96’上述框體96係設於本 體部7 8 a之箭號C方向前端側的側面。構成運送機構7 4 的多個樹脂製圓盤狀運送輥子8 0 a沿著箭號C方向配置在 框體96內。在本體部78a形成有連通到框體96內之開口 98，同時在此本體部78a內，在位於運送輥子80之上方， 第2紅外線加熱器9 Ob係設置成延伸於箭號C方向。 退避機構94具備有在基台82上互相平行且朝箭號D 方向延伸的一對第2導軌1 〇 〇，在此第2導軌1 0 0上配置 有可朝箭號D方向進退的可動台1〇2。在可動台102之箭 號D方向的進退位置，設置有未圖示之聯鎖，可保持上述 可動台102在兩位置。 在可動台102上，設置有互相平行且朝箭號C方向延 伸的一對第3導軌104，在上述第3導軌104上配置有可 朝箭號C方向進退的本體部78a。本體部78a在箭號C方 向前端側位置接近積層裝置46而固定’另一方面，可在箭 號C方向後端側固定。 本體部78a相對於箭號C1方向僅移動既定之距離L1 之後，可沿著導軌1〇〇朝箭號D方向移動。朝箭號ci方 向移動之距離L1，係設定移送機構92朝箭號D方向移動 時，不干涉積層裝置46的尺寸，同時朝朝箭號d方向之移 動距離L2，係設定爲作業者相對於上述積層裝置46在進 行各種維修作業時，不干涉本體部7 8 a的尺寸。 此外，在運送機構74亦可採用配置有未圖示之空氣浮 -12- 200922787 上板，用以使玻璃基板24浮上而朝箭號C方向運送的構成 〇 如第1圖所示，在加熱裝置45之上游’設有收容多個 玻璃基板24的基板儲存部110。基板儲存部11〇’在投入 及取出口以外的3方之側面，附設有除塵用風扇單元（或風 道單元）112。風扇單元112在基板儲存部11〇內進行除靜 電清淨空氣之吹出。收容於基板儲存部11〇之各玻璃基板 24，被吸附在設於機器人1 14之手部1 14a的吸附墊1 16而 被取出，並搬入加熱裝置4 5。 積層裝置4 6係具備上下配置，同時加熱到既定溫度的 積層用橡膠輥子120a，120b。支撐輥子122a, 122b搖接在 積層用橡膠輥子120a，120b，同時上述支撐輥子122b經由 輥子夾持部124而按壓在橡膠輥子120b側。 在橡膠輥子1 20a之附近配置有可移動的接觸防止輥 子1 2 6，用於防止感光性薄片2 2接觸到上述橡膠輥子1 2 0 a 。在積層裝置46之上游附近配置有預備加熱部1 27，用於 預先將感光性薄片2 2進行預備加熱到既定溫度。此預備加 熱部1 2 7 ’例如具備有紅外線棒狀加熱器等之加熱手段。 在積層裝置4 6與基板間薄片切斷機構4 8之間配置有 薄膜運送輥子128a及基板運送輥子128b。在基板間薄片 切斷機構4 8之下游側配置有冷卻機構1 3 〇，同時在此冷卻 機構1 3 0之下游側配置有基底剝離機構丨3 2。冷卻機構1 3 〇 經由基板間薄片切斷機構48切斷貼附基板24a間的感光性 薄片2 2之後’將冷風供給此貼附基板2 4 a而實施冷卻處理 -13- 200922787 。具體上，冷風溫度爲10°C，風量設定爲1·〇〜2.0m3/min 。此外，亦可不使用冷卻機構1 3 0，在後述之感光性積層 體儲存器146進行自然冷卻。又，亦可藉由室內風進行送 風來取代冷風。 配置於冷卻機構1 3 0之下游的基底剝離機構1 3 2，具 備從下方吸附貼附基板24a的多個吸附墊1 34，在上述貼 附基板24a被吸附保持於此吸附墊1 34的狀態，經由機器 人手136而剝離基底薄膜26及殘留部分30 b。在吸附墊134 之上游、下游及兩側，配置有去除靜電鼓風機（未圖示）而 從4方向之側面對貼附基板24a的積層部分全體噴射去除 靜電空氣。此外，剝離亦可爲了除塵而將台作成垂直或使 傾斜，或翻轉而進行。 在基底剝離機構1 3 2之下游，設有收容複數個感光性 積層體140的感光性積層體儲存器146。在基底剝離機構 1 32從貼附基板24a剝離基底薄膜26及殘留部分30b後的 感光性積層體140，被設置於機器人142之手部142a的吸 附墊1 44所吸附而取出，並收容在感光性積層體儲存器1 46 。此外，手部1 4 2 a亦可不依賴吸附，而使用藉摩擦之保持 方式。 在感光性積層體儲存器1 4 6，在投入及取出口以外的3 方之側面，附設有除塵用風扇單元（或風道單元）112。風扇 單元112在感光性積層體儲存器146內進行去除靜電清淨 空氣之吹出。 雖然在製造系統20中，薄片送出機構32、加工機構 -14- 200922787 36、標籤黏著機構4〇、貯存部機構42、剝離機構44、張 力控制機構6 6、及檢測機構4 7係被配置在積層裝置4 6之 上方，但是與此相反’亦可將從薄片送出機構3 2到檢測機 構47配置於積層裝置46之下方，使感光性薄片22之上下 變相反而將感光性樹脂層2 8貼附於玻璃基板2 4之下側’ 又，亦可將上述製造系統20之全體構成於直線上。 製造系統2 0經由積層步驟控制部1 5 0而進行全體控制 ，在此製造系統20之各功能部，例如設置積層控制部1 52 、基板加熱控制部1 5 4及基底剝離控制部1 5 6等，此等係 藉由製程內網路而連繫。 積層步驟控制部1 5 0連繫到工廠網路，而進行來自未 圖示之工廠CPU的指示資訊（條件設定及生產資訊）的生產 管理或運轉管理等、用於生產的資訊處理。 積層控制部1 5 2係作爲步驟全體之主機而執行各功能 部之控制者，根據藉由檢測機構47檢測的感光性薄片U 之半切割部位3 4的位置資訊，而構成控制例如加熱裝置 4 5的控制機構。 基底剝離控制部1 5 6從積層裝置4 6供給的貼附基板 24a將基底薄膜26剝離，更在下游步驟中進行排出感光性 積層體140的動作之控制，同時進行上述貼附基板24a及 上述感光性積層體1 4 0的資訊之處理控制。 在製造系統2 0內，經由間隔壁1 6 0而分隔第1無塵室 162a及第2無塵室162b。在第！無麈室i62a收容有從薄 片送出機構32到張力控制機構66,同時在第2無塵室162b -15- 200922787 中收容檢測機構4 7以後者。第1無塵室1 6 2 a及第2無塵 室162b經由貫通部164連通。 以下將針對此製造系統2 0的動作進行說明。 首先，如第1圖所示，在加工機構36中，圓刀刃52 朝感光性薄片22之寬度方向移動，將此感光性薄片22從 保護薄膜30至感光性樹脂層28且甚至到基底薄膜26爲止 切入而形成半切割部位34(參照第2圖）。又，感光性薄片 22,如第1圖所示，對應於保護薄膜30之殘留部分30b的 尺寸而朝箭號A方向運送之後停止，且在圓刀刃52之行走 作用下形成半切割部位34。藉此，在感光性薄片22挾持 殘留部分30b而設置前方之剝離部’分30 aa及後方之剝離部 分30ab(參照第2圖）。 其次，感光性薄片22被運送到標籤黏著機構40，使 保護薄膜3 0之既定之貼附部位配置在承台5 6上。在標籤 黏著機構40,既定片數的黏著標籤38藉由吸附墊54 a〜54g 而吸附保持，各黏著標籤38跨在保護薄膜30之殘留部分 3 Ob上，而一體地黏著到前方之剝離部分3 Oaa及後方之剝 離部分30ab(參照第3圖）。 例如，黏著7張黏著標籤3 8後之感光性薄片2 2，如 第1圖所示，經由貯存部機構42防止送出側之張力變動之 後，而連續地運送到剝離機構44。在剝離機構44，感光性 薄片22之基底薄膜26被吸附保持於吸入鼓62，同時保護 薄膜3 0殘留有殘留部分3 Ob而從上述感光性薄片22剝離 。此保護薄膜3 0經由剝離輥子63以銳角之剝離角度加以 -16 - 200922787 剝離而捲繞在保護薄膜捲取部64。 在剝離機構44的作用下，保護薄膜3 0殘留著殘留部 分3 0b而從基底薄膜26剝離之後，感光性薄片22藉由張 力控制機構66而進行張力調整，更在檢測機構47藉由光 電感測器72而進行半切割部位34之檢測。 感光性薄片2 2根據半切割部位3 4之檢測資訊，在薄 膜運送輥子1 2 8 a的旋轉作用下，被定量地運送到積層裝置 46。此時，接觸防止輥子126在上方待機，同時積層用橡 膠輥子120b配置在下方。 另一方面，在加熱裝置45中，對應於在積層裝置46 之積層溫度而設定°第1及第2加熱機構76，78內之加熱溫 度。例如，當積層溫度爲1 1 〇°C時，經由第1及第2紅外 線加熱器90a, 90b將第1及第2加熱機構76，78內之加熱 溫度設定爲1 2 0°C左右。 因而，機器人1 1 4握住收容在基板儲存部1 1 0的玻璃 基板24，將此玻璃基板24搬入到第1加熱機構76。在第 1加熱機構7 6內，如第4圖所示，在第1紅外線加熱器9 0 a 的加熱作用下使玻璃基板24昇溫之後，經由運送機構74 將上述玻璃基板24搬送到第2加熱機構78。 在第2加熱機構78內，經由第2紅外線加熱器90b將 玻璃基板2 4加熱，在維持於既定的溫度狀態，經由移送機 構92送到積層裝置46。在積層裝置46中，玻璃基板24 對應於感光性薄片22之感光性樹脂層28之貼附部分而暫 時配置在橡膠輥子120a, 120b之間。 -17- 200922787 在此狀態，經由輥子夾持部12 4使支提輥子12 2 b及橡 膠輥子120b上昇，藉以使玻璃基板24在既定的按壓壓力 下挾入於橡膠輕子12〇a, 120b之間。更在橡膠輕子120a 之旋轉作用下，感光性樹脂層2 8藉由加熱熔融而轉印（積 層）在此玻璃基板2 4。 在此，積層條件方面’速度爲 橡膠輥子120a，120b之溫度爲80°C~150°C ’上述橡膠輥子 120a，120b之橡膠硬度爲40度~90度’該橡膠輥子120a， 120b之按壓（線壓）爲50N/cm〜4 0 0N/cm。 當經由橡膠輥子120a, 120b在玻璃基板24上完成感光 性薄片2 2之一片分的積層時，上述橡膠輥子1 2 0 a之旋轉 被停止，另一方面，已積層上述感光性薄片22的上述玻璃 基板24，即貼附基板24a藉由基板運送輥子128b而挾持 〇 其後，橡膠輥子120b從橡膠輥子120a離開的方向退 避而解除挾持，同時開始基板運送輥子1 28b之旋轉，貼附 基板2 4 a朝箭號C方向定量地運送，感光性薄片2 2之基板 間位置移動到橡膠輥子1 20a之下方附近之既定位置。另一 方面，經由加熱裝置4 5使下一個玻璃基板2 4朝貼附位置 運送。 當此下一個玻璃基板24的前端配置在橡膠輥子120a, 120b之間時’上述橡膠輥子12〇b上昇，藉由上述橡膠輥 子120a，12 0b挾持上述下—個玻璃基板24及感光性薄片 22。其後，在橡膠輥子12〇a, 120b及基板運送輥子128b -18 - 200922787[Technical Field] The present invention relates to a heating device in which a substrate to which a photosensitive sheet is attached by a laminating device is heated in advance to a predetermined temperature before the attaching process. [Prior Art] For example, a photosensitive sheet (photosensitive sheet) having a photosensitive material (photosensitive resin) layer is attached to a substrate for a liquid crystal panel, a substrate for a printed wiring, and a substrate for a plasma (PDP) panel. A photosensitive laminate on the surface of the substrate. This photosensitive sheet system sequentially laminates the photosensitive material layer and the protective film on the flexible plastic 'support. When the photosensitive laminate is produced, a substrate such as a glass substrate or a resin substrate is usually heated to a predetermined temperature in advance. Thereafter, the photosensitive sheet and the heated substrate obtained by partially or completely peeling off the protective film are held between a pair of laminated rolls constituting the laminating device and heated, whereby the photosensitive material layer is heat-pressed on the substrate. on. Next, a photosensitive laminate is produced by peeling the flexible plastic support from the substrate. For example, in the method of laminating a dry photoresist film disclosed in Japanese Laid-Open Patent Publication No. Hei No. Hei No. 8-183 3146, as shown in Fig. 8, the substrate preheating unit 1, the laminated portion 2, and the substrate cooling unit 3 are The substrate-cut film portion 4 and the film removing portion 5 are disposed along the transport direction of the substrate 7 by the transport portion 6. In the substrate preheating section 1, after the substrate 7 is heated to a predetermined temperature via the preheating heater 1a, the substrate 7 is sent out to the laminated portion 2. A pair of laminated rolls 2a, 2b are disposed in the laminated portion 2', and the substrate 7 and the dry protective film 8 200922787 are sent between the laminated rolls 2a, 2b. Thus, it is on the substrate 7. However, in the above prior art, there is a smooth transition between the substrate insertion sides of the substrates 2a, 2b. Therefore, generally, a protruding conveyor belt (not shown) is provided in the laminated portion 2. However, in the laminating section 2, when the maintenance work of the laminating roller is changed, the conveyor belt becomes a one-time maintenance of the work, and the conveyor belt must be loaded and unloaded, which is quite complicated, and therefore cannot be efficiently invented. In the present invention, in order to solve such a problem, the heat device and the maintenance of the layering device are provided. The present invention relates to a heating device in which a substrate of a fluorescent sheet is advanced before the attaching process. The heating device includes a plurality of the transporting means for transporting the substrate and transporting the transport mechanism, and is disposed adjacent to the heat transporting mechanism of the stacking device, and includes a main body portion, and the storage transport mechanism is disposed at The main body portion extends to the above-described substrate for delivering the substrate to the laminating device; and the retracting body portion moves relative to the laminating device. According to the present invention, in the main body portion constituting the heating mechanism, the dry protective film 8 is supplied to the substrate 7 by the hot-pressing preheating portion 1 and the build-up roller, and the cleaning/blocking of the substrate preheating portion 1 side 2a, 2b is required. Therefore, in every job, but this kind of work maintains the whole problem, the purpose is to provide an effect and easy to carry out. The affixing device is used to heat the sensation to a predetermined temperature mechanism and along the thermal mechanism. The feeding mechanism and the heating source in the most downstream direction; and the transfer mechanism in the vicinity of the stacking device, the transfer mechanism for delivering the substrate 200922787 to the layering device may be provided, and the body portion may be integrated with the transfer mechanism. The mechanism leaves the interval from the above-mentioned laminated device. Therefore, when the laminating device is repaired, only the main body portion is moved in a predetermined direction to ensure space for maintenance. Thereby, various maintenance work of the laminated device can be efficiently and easily achieved. The above and other objects, features and advantages will be apparent from the following description of the preferred embodiments. [Embodiment] FIG. 1 is a schematic structural view showing a manufacturing system 20 of a photosensitive laminate in a heating apparatus according to a first embodiment of the present invention. In the manufacturing process 20, in the step of producing a color filter for liquid crystal or organic (EL) electroluminescence, the photosensitive resin layer 28 (described later) of the long photosensitive sheet 2 is thermally transferred to The operation of the glass substrate 24. The photosensitive sheet 22 is formed by laminating a flexible base film (support) 26, a photosensitive resin layer (photosensitive material layer) 28, and a protective film 30. As shown in Fig. 1, the manufacturing system 2A includes a sheet feeding mechanism 32 that accommodates the photosensitive sheet roll 22a in which the photosensitive sheet 22 is wound into a roll shape, whereby the photosensitive sheet roll 22a holds the photosensitive sheet 22 The processing mechanism 36 forms a half-cut portion 34 that can be cut in the width direction on the protective film 30 of the photosensitive sheet 22 that is fed out (see FIG. 2); the label adhesive mechanism 40 has a non-adhesive portion. The adhesive label 38 of 38a (refer to Fig. 3) is adhered to the protective film 30. Downstream of the label bonding mechanism 40, a storage unit mechanism 42 200922787' is used to change the photosensitive sheet 2 2 from intermittent feeding to continuous feeding, and a peeling mechanism 44 to protect the film 3 from the photosensitive sheet 2 2 The heating device 45 according to the first embodiment is transported to the attaching position while the glass substrate 24 is heated to a predetermined temperature, and the stacking device 46 is peeled off by the protective film 30. The exposed photosensitive resin layer 28 is attached to the glass substrate 24 described above. In the following, the photosensitive sheet 22 is attached to the processed object of the glass substrate 24 by the layering device 46, and is simply referred to as the attached substrate 24a. In the vicinity of the upstream of the attaching position of the stacking device 46, a detecting mechanism 47 for directly detecting the half-cut portion 34 belonging to the boundary position of the photosensitive sheet 22 is disposed, and at the same time, the cutting device is disposed downstream of the stacking device 46. The inter-substrate sheet cutting mechanism 48 of the photosensitive sheet 22 between the glass substrates 24 . A sheet cutting mechanism 48a for use at the start of operation and at the end of operation is provided upstream of the inter-substrate sheet cutting mechanism 48. At the vicinity of the downstream of the sheet feeding mechanism 32, a bonding table 49 is disposed for bonding. The rear end of the photosensitive sheet 2 2 that has been used and the front end of the newly used photosensitive sheet 2 2 . A film end position detector 51 is disposed downstream of the joining table 49 for controlling the deviation in the width direction caused by the winding deviation of the photosensitive web roll 22a. The processing mechanism 36 is disposed downstream of the roller pair 50' for calculating the winding diameter of the photosensitive web roll 22a accommodated in the sheet feeding mechanism 32. The processing mechanism 36 includes a single circular cutting edge 52 which travels in the width direction of the photosensitive web 22 and forms a half-cut portion 34 in the position of the photosensitive sheet 22. 200922787 As shown in Fig. 2, the half-cut portion 34 must cut at least the protective film 30'. Actually, in order to surely cut the protective film 30, the cutting depth of the circular blade 52 is set to be cut into the photosensitive resin layer 28 or even It is up to the base film 26. The half-cut portion 34 sets the interval between the glass substrates 24, and for example, the glass substrates 24 on the rain side are set to be taken in one by one by one. The portion which is held by the half-cut portion 34 between the glass substrates 24 is a function of the mask when the layering device 46 to be described later attaches the photosensitive resin layer 28 to the glass substrate 24 in a frame shape. . The label adhesive mechanism 4 残留 is provided with a residual portion 3 〇b of the protective film 30 remaining in correspondence with the glass substrate 24, and is supplied with an adhesive label that connects the peeling portion 3 Oaa in front of the peeling side and the peeling portion 3 Oab in the back side of the peeling side. 3 8 . As shown in Fig. 2, the protective film 30 holds the residual portion 3 Ob, and the portion which is first peeled off is taken as the peeled portion 3 0 a a , and on the other hand, the portion which is subsequently peeled off is taken as the peeled portion 3 0 a b of the rear side. As shown in Fig. 3, the adhesive label 38 constitutes a booklet shape, for example, made of the same material as the protective film 30. The adhesive label 38 has a non-adhesive portion (including a micro-adhesive portion) 38a which is not coated with an adhesive at the center portion, and both sides of the non-adhesive portion 38 a, that is, at both end portions of the longitudinal direction of the adhesive label 38, The first adhesive portion 38b adhered to the front peeling portion 30aa and the second adhesive portion 38c adhered to the rear peeling portion 30ab. As shown in Fig. 1, the label sticking mechanism 40 is provided with the adsorption pads 54a to 54g'. Up to seven sheets of the adhesive labels 38 can be attached one by one at a predetermined interval, and at the same time, according to the above adsorption pads 5 4 a to 5 4 g of the above-mentioned adhesive label 38 is attached to the position of 200922787, and a cap 5 6 for freely lifting and lowering is provided for holding the photosensitive sheet 22 from below. The storage unit mechanism 42 absorbs the difference in speed between the intermittent conveyance of the photosensitive sheet 22 on the upstream side and the continuous conveyance of the photosensitive sheet 22 on the downstream side, and further prevents the tension from varying, and includes two rows of rollers 60 that are randomly rocked. The adjustment roller 61 is constructed. Further, the rollers 60 may be arranged in one or three columns depending on the amount of storage. The peeling mechanism 44 disposed downstream of the reservoir unit 42 is provided with a suction drum 62 for reducing the tension change on the delivery side of the photosensitive sheet 22, and stabilizing the tension at the time of lamination. The peeling roller 63 is disposed in the vicinity of the suction drum 62, and the protective film 30 peeled off from the photosensitive sheet 22 at an acute angle by the peeling roller 63 is wound around the protective film roll except for the residual portion 3 Ob Take part 64. On the downstream side of the peeling mechanism 44, a tension control mechanism 66 that can apply tension to the photosensitive sheet 22 is disposed. The tension control mechanism 66 is provided with a cylinder 68. Under the driving action of the cylinder 68, the tension adjusting roller 70 is rocked and displaced, whereby the tension oscillator 70 can adjust the tension of the photosensitive sheet 22 that is rocked. Further, the tension control mechanism 66 may be used as needed or may be omitted. The detecting mechanism 47 is provided with a photodetector 72 such as a laser sensor or a photo sensor. The photodetector 72 directly detects the wedge-shaped groove portion of the half-cut portion 34 or the thickness of the protective film 30. The difference caused by the difference, or the combination of these, is used as the boundary position signal. The photodetector 72 is disposed opposite to the support roller 73. Further, instead of the photo-sensing device 72, an image inspection means such as a non-contact displacement meter or a CCD camera of -10-200922787 may be used. As shown in FIG. 4, the heating device 45 includes a transport mechanism 7 4' for transporting the glass substrate 24 in the direction of the arrow C, and a plurality of at least the first heating mechanism disposed along the transport direction of the transport mechanism 74. 76 and the second heating mechanism 78. The transport mechanism 74 includes a plurality of resin-shaped disk-shaped transport rollers 80 arranged in the direction of the arrow C, and the transport rollers 8 are disposed in the main body portion 76a constituting the first heating mechanism 76 and constitute the second heating mechanism 78. Inside the body portion 78a. The first heating unit constituting 76 is disposed on the upstream side of the arrow C direction than the second heating mechanism 78, and is provided with a fixing table 84 placed on the base 82. As shown in FIGS. 4 and 5, the fixed stage 84 is provided with a pair of first guide rails 8 6 which are parallel to each other and extend in the direction of the arrow C. On the first guide rail 86, the main body portion 76a is disposed so as In the direction of the arrow c, only the predetermined distance L 1 can be advanced and retracted. The main body portion 76a is provided to be interlocked (not shown) in the front end portion of the arrow C direction and the rear end portion in the arrow C direction, and the main body portion 76a is held at the advanced position. The body portion 7 6 a is retracted, that is, on the entrance side of the glass substrate 24, a machine lever 88 is provided. In the main body portion 76a, a first infrared heater 90a is provided above the transport lepton 80. The second heating mechanism 78 includes a main body portion 78a, and the transfer mechanism 92 is provided in the main body portion 78a, extends to the vicinity of the lamination device 46, and is used to deliver the glass substrate 24 to the lamination device 46, and the retracting mechanism 94. The main body portion 78a moves relative to the above-described layer stacking device 46. -11 - 200922787 The transfer mechanism 92 is provided with a frame 96' extending in the width direction of the glass substrate 24 (in the direction of the arrow D in Fig. 5). The frame 96 is provided in the direction of the arrow C of the main body portion 78a. The side of the front end side. A plurality of resin-shaped disk-shaped transport rollers 80 a constituting the transport mechanism 7 4 are disposed in the casing 96 in the direction of the arrow C. An opening 98 communicating with the inside of the casing 96 is formed in the main body portion 78a, and in the main body portion 78a, above the transport roller 80, the second infrared heater 9 Ob is disposed to extend in the direction of the arrow C. The retracting mechanism 94 includes a pair of second guide rails 1 that are parallel to each other on the base 82 and extend in the direction of the arrow D. On the second rail 100, a movable table that can advance and retreat in the direction of the arrow D is disposed. 1〇2. An interlock (not shown) is provided at the advancing and retracting position of the movable table 102 in the direction of the arrow D, and the movable table 102 can be held at two positions. The movable table 102 is provided with a pair of third guide rails 104 which are parallel to each other and extend in the direction of the arrow C, and a main body portion 78a which can advance and retreat in the direction of the arrow C is disposed on the third guide rail 104. The main body portion 78a is fixed to the front end side of the arrow C in a position close to the laminating device 46. On the other hand, it can be fixed to the rear end side in the arrow C direction. After moving only a predetermined distance L1 with respect to the direction of the arrow C1, the main body portion 78a is movable in the direction of the arrow D along the guide rail 1〇〇. When the distance L1 is moved in the direction of the arrow ci, when the transfer mechanism 92 is moved in the direction of the arrow D, the size of the stacking device 46 is not interfered, and the moving distance L2 in the direction of the arrow d is set as the operator relative to The stacking device 46 does not interfere with the size of the main body portion 78 a when performing various maintenance work. Further, in the transport mechanism 74, an air floating -12-200922787 upper plate (not shown) may be used, and the glass substrate 24 may be floated and transported in the direction of the arrow C, as shown in Fig. 1, and heated. The upstream side of the device 45 is provided with a substrate storage portion 110 that houses a plurality of glass substrates 24. The substrate storage unit 11'' is provided with a dust removing fan unit (or duct unit) 112 on the three sides other than the input and the outlet. The fan unit 112 performs blowing of the static clean air in the substrate storage portion 11A. Each of the glass substrates 24 accommodated in the substrate storage portion 11 is sucked by the adsorption pad 16 provided in the hand 1 14a of the robot 1 14 and taken out, and carried into the heating device 45. The laminating device 46 is provided with rubber rollers 120a and 120b for laminating which are arranged to be heated up to a predetermined temperature. The support rollers 122a, 122b are slid to the rubber rollers 120a, 120b for lamination, and the support roller 122b is pressed against the rubber roller 120b via the roller holding portion 124. A movable contact preventing roller 1 2 6 is disposed in the vicinity of the rubber roller 1 20a for preventing the photosensitive sheet 2 2 from coming into contact with the rubber roller 1 2 0 a . A preliminary heating unit 1 27 is disposed in the vicinity of the upstream of the stacking device 46 for preliminarily heating the photosensitive sheet 2 2 to a predetermined temperature. The preliminary heating unit 1 2 7 ' is provided with, for example, a heating means such as an infrared rod heater. A film transport roller 128a and a substrate transport roller 128b are disposed between the stacking device 46 and the inter-substrate sheet cutting mechanism 48. A cooling mechanism 13 3 is disposed on the downstream side of the inter-substrate sheet cutting mechanism 48, and a substrate peeling mechanism 丨3 2 is disposed on the downstream side of the cooling mechanism 130. Cooling mechanism 1 3 切断 After the photosensitive sheet 2 2 between the attached substrates 24a is cut by the inter-substrate sheet cutting mechanism 48, cold air is supplied to the attached substrate 2 4 a to perform cooling treatment -13-200922787. Specifically, the cold air temperature is 10 ° C, and the air volume is set to 1 · 〇 ~ 2.0 m3 / min. Further, it is also possible to perform natural cooling in the photosensitive laminate storage unit 146 which will be described later without using the cooling mechanism 130. In addition, cold air can be replaced by air blown by indoor air. The substrate peeling mechanism 133 disposed downstream of the cooling mechanism 130 includes a plurality of adsorption pads 134 that adsorb the substrate 24a from below, and the attached substrate 24a is adsorbed and held by the adsorption pad 134. The base film 26 and the residual portion 30 b are peeled off via the robot hand 136. On the upstream, downstream, and both sides of the adsorption pad 134, an electrostatic blower (not shown) is disposed, and the entire portion of the laminated portion of the attached substrate 24a is ejected and removed from the side surface in the four directions. Further, the peeling may be performed by vertically or tilting or tilting the table for dust removal. Downstream of the substrate peeling mechanism 133, a photosensitive layer reservoir 146 for accommodating a plurality of photosensitive laminates 140 is provided. The photosensitive laminate 140 after the base peeling mechanism 1 32 peels off the base film 26 and the remaining portion 30b from the attached substrate 24a is sucked by the adsorption pad 1 44 provided in the hand 142a of the robot 142, and is taken in the photosensitive Stomatology reservoir 1 46 . In addition, the hand 1 4 2 a can also be used without the aid of adsorption. A dust removing fan unit (or duct unit) 112 is attached to the side surface of the photosensitive laminate storage unit 146 on the three sides other than the input and the outlet. The fan unit 112 performs the discharge of the static clean air in the photosensitive laminate storage unit 146. In the manufacturing system 20, the sheet feeding mechanism 32, the processing mechanism-14-200922787 36, the label sticking mechanism 4, the reservoir mechanism 42, the peeling mechanism 44, the tension control mechanism 66, and the detecting mechanism 47 are disposed in The upper layer of the layering device 46 is opposite to the above, but the sheet feeding mechanism 3 2 to the detecting unit 47 may be disposed below the layering device 46, and the photosensitive sheet 22 may be reversed and the photosensitive resin layer 28 may be attached. Attached to the lower side of the glass substrate 24, the entire manufacturing system 20 may be formed on a straight line. The manufacturing system 20 performs overall control via the stacking step control unit 150, and the functional units of the manufacturing system 20 are provided with, for example, a buildup control unit 152, a substrate heating control unit 154, and a base peeling control unit 156. Etc. These are connected by the in-process network. The lamination step control unit 150 connects to the factory network, and performs information processing for production such as production management or operation management of instruction information (condition setting and production information) from a factory CPU (not shown). The build-up control unit 152 executes the controller of each functional unit as the main unit of the steps, and controls the position of the half-cut portion 34 of the photosensitive sheet U detected by the detecting unit 47 to control, for example, the heating device 4. 5 control mechanism. The substrate peeling control unit 156 peels off the base film 26 from the attached substrate 24a supplied from the layering device 46, and further controls the operation of discharging the photosensitive layered body 140 in the downstream step, and simultaneously performs the above-described attached substrate 24a and the above-described substrate Processing control of information of the photosensitive laminate 110. In the manufacturing system 20, the first clean room 162a and the second clean room 162b are separated by the partition 160. In the first! The chamber i62a accommodates the detection mechanism 47 from the sheet feeding mechanism 32 to the tension control mechanism 66 and the second clean room 162b -15-200922787. The first clean room 1 6 2 a and the second clean room 162b communicate via the penetration portion 164. The operation of this manufacturing system 20 will be described below. First, as shown in Fig. 1, in the processing mechanism 36, the circular blade 52 is moved in the width direction of the photosensitive sheet 22, and the photosensitive sheet 22 is removed from the protective film 30 to the photosensitive resin layer 28 and even to the base film 26. The half-cut portion 34 is formed so as to cut in (see Fig. 2). Further, as shown in Fig. 1, the photosensitive sheet 22 is stopped in the direction of the arrow A in accordance with the size of the remaining portion 30b of the protective film 30, and the half-cut portion 34 is formed by the running of the circular blade 52. Thereby, the photosensitive sheet 22 is held by the residual portion 30b, and the front peeling portion is divided into 30 aa and the rear peeling portion 30ab (see Fig. 2). Next, the photosensitive sheet 22 is conveyed to the label attaching mechanism 40, and the predetermined attachment portion of the protective film 30 is placed on the cap 56. In the label attaching mechanism 40, a predetermined number of adhesive labels 38 are adsorbed and held by the adsorption pads 54a to 54g, and the adhesive labels 38 are straddled on the residual portion 3ob of the protective film 30, and are integrally adhered to the front peeling portion. 3 Oaa and the stripping portion 30ab at the rear (refer to Fig. 3). For example, as shown in Fig. 1, the photosensitive sheet 2 2 to which the label 38 is adhered is adhered to the peeling mechanism 44 after the tension of the delivery side is prevented by the reservoir mechanism 42. In the peeling mechanism 44, the base film 26 of the photosensitive web 22 is adsorbed and held by the suction drum 62, and the protective film 30 is left with the remaining portion 3 Ob peeled off from the photosensitive sheet 22. The protective film 30 is peeled off by the peeling roller 63 at an acute angle of peeling angle -16 - 200922787 and wound around the protective film take-up portion 64. Under the action of the peeling mechanism 44, after the protective film 30 remains in the residual portion 30b and is peeled off from the base film 26, the photosensitive sheet 22 is tension-adjusted by the tension control mechanism 66, and the detecting means 47 is made of a photo-inductance. The detector 72 performs the detection of the half-cut portion 34. The photosensitive sheet 2 2 is quantitatively transported to the layering device 46 by the rotation of the film transport roller 1 28 a in accordance with the detection information of the half-cut portion 34. At this time, the contact preventing roller 126 stands by above, and the laminated rubber roller 120b is disposed below. On the other hand, in the heating device 45, the heating temperatures in the first and second heating mechanisms 76, 78 are set in accordance with the laminated temperature of the stacking device 46. For example, when the build-up temperature is 1 1 〇 °C, the heating temperatures in the first and second heating mechanisms 76, 78 are set to about 120 °C via the first and second infrared heaters 90a, 90b. Therefore, the robot 1 14 grips the glass substrate 24 housed in the substrate storage portion 110, and carries the glass substrate 24 to the first heating mechanism 76. In the first heating mechanism 76, as shown in Fig. 4, after the glass substrate 24 is heated by the heating of the first infrared heater 90a, the glass substrate 24 is transferred to the second heating via the transport mechanism 74. Agency 78. In the second heating means 78, the glass substrate 24 is heated by the second infrared heater 90b, and is maintained at a predetermined temperature state, and sent to the layering device 46 via the transfer mechanism 92. In the layering device 46, the glass substrate 24 is temporarily disposed between the rubber rolls 120a, 120b in accordance with the attachment portion of the photosensitive resin layer 28 of the photosensitive sheet 22. -17- 200922787 In this state, the support roller 12 2 b and the rubber roller 120b are raised via the roller holding portion 124, whereby the glass substrate 24 is smashed into the rubber lep 12a, 120b under a predetermined pressing pressure. between. Further, the photosensitive resin layer 28 is transferred (laminated) on the glass substrate 24 by heating and melting under the action of the rotation of the rubber driver 120a. Here, in terms of the build-up condition, the speed is such that the temperature of the rubber rolls 120a, 120b is 80 ° C to 150 ° C. The rubber hardness of the rubber rolls 120a, 120b is 40 to 90 degrees 'the pressing of the rubber rolls 120a, 120b ( The line pressure is 50 N/cm to 4 0 0 N/cm. When the lamination of one of the photosensitive sheets 2 2 is completed on the glass substrate 24 via the rubber rollers 120a, 120b, the rotation of the rubber roller 120a is stopped, and on the other hand, the above-mentioned photosensitive sheet 22 is laminated. The glass substrate 24, that is, the attached substrate 24a is held by the substrate transport roller 128b, and then the rubber roller 120b is retracted from the direction in which the rubber roller 120a is separated to release the grip, and the rotation of the substrate transport roller 1 28b is started, and the substrate 2 is attached. 4 a is quantitatively conveyed in the direction of the arrow C, and the position between the substrates of the photosensitive sheet 2 2 is moved to a predetermined position near the lower side of the rubber roller 1 20a. On the other hand, the next glass substrate 24 is transported toward the attaching position via the heating device 45. When the front end of the next glass substrate 24 is disposed between the rubber rollers 120a, 120b, the rubber roller 12b is raised, and the lower glass substrate 24 and the photosensitive sheet 22 are held by the rubber roller 120a, 120b. . Thereafter, the rubber rollers 12〇a, 120b and the substrate transport rollers 128b-18 - 200922787
之旋轉作用下開始進行積層’同時貼附基板2 4 a朝箭號C 方向運送。 貼附基板24a朝箭號C方向定量地運送’經由基板間 薄片切斷機構48切斷玻璃基板24間的感光性薄片22之後 ，通過冷卻機構1 3 0冷卻，更進一步被移送到基底剝離機 構132。在此基底剝離機構132，在將貼附基板24a吸附保 持於吸附墊1 3 4的狀態，經由機器人1 3 6剝離基底薄膜2 6 及殘留部分3 Ob，而獲得感光性積層體1 40。 此時，在吸附墊1 3 4之上游、下游及兩側方，從4方 向之側面對貼附基板24a的積層部分全體噴射去除靜電空 氣。此外，感光性積層體1 4 0被保持於機器人1 4 2之手部 M2a，並僅以既定之數量收容到感光性積層體儲存器146 〇 此時，在第1實施形態，如第4圖所示，在構成第2 加熱機構7 8的本體部7 8 a之箭號C方向前端面，設置有移 送機構92，上述移送機構92係靠近積層裝置46配置。 因此，即使尤其在使用厚度薄且大型的玻璃基板2 4之 時’亦可確實地保持此玻璃基板2 4之運送方向前端側，可 圓滑且確實地運送上述玻璃基板24到構成積層裝置46之 橡膠輥子1 2 0 a，1 2 0 b之間。 又’在進行積層裝置4 6之維修作業等之時，如以下般 ’第1加熱機構7 6及第2加熱機構7 8進行退避動作。即 ’第1加熱機構76之本體部76a沿著第：導軌86朝箭號 Cl方向僅移動既定之距離L1，同時構成第2加熱機構78 -19- 200922787 的本體部7 8 a同樣地沿著第3導軌1 0 4朝箭號C 1方向僅移 動既定之距離L 1。在此，第1加熱機構7 6及第2加熱機 構7 8欲阻止朝箭號C方向之移動的聯鎖起動作。 其次，在第2加熱機構78，本體部78a與可動台ι〇2 一體沿著第2導軌1 00朝箭號D方向（參照第5圖）僅移動 既定之距離L2，聯鎖起動作。 因此’在積層裝置4 6，在加熱裝置4 5側形成維修作 業用之空間’使用此空間時，作業者可進行構成積層裝置 4 6之橡膠輥子1 2 0 a，1 2 0 b的清潔或更換等的維修作業。 依此方式’在第2加熱機構7 8之本體部7 8 a，設置有 將玻璃基板2 4從加熱裝置4 5交付到積層裝置4 6的移送機 構9 2。其後’在進行積層裝置4 6的維修作業等之時，先 將第2加熱機構78暫時朝箭號C1方向僅移動既定之距離 L1’即將本體部78a朝箭號D方向移動之時，先移送機構 92在暫時移動到不與積層裝置46干涉的位置之後，才將 本體部78a朝箭號d方向移動。 因此’藉由僅將第2加熱機構78之本體部78a，朝箭 號C1方向及箭號D方向移動，可使移送機構92與上述本 體部78a —體地從積層裝置46退避。藉此，以簡單的操作 可確保維修用空間，故積層裝置4 6之各種維修作業可有效 且容易地達成。 此外’雖然在第1實施形態中，玻璃基板24係間歇送 料’即進行所i胃批量運送，但是並未限定於此，亦可適用 於連續地運送上述玻璃基板24的構成。 -20- 200922787 第6圖係本發明之第2實施形態相關的加熱裝置丨7〇 之槪略構成說明圖。此外，與第i實施形態之加熱裝置4 5 同一之構成要素賦予相同的符號，而省略其詳細之說明。 加熱裝置170具備：沿著依運送機構74之運送方向配 置之至少第1加熱機構172及第2加熱機構174。構成第1 加熱機構172的本體部172a係經由固定台176而固定在基 台8 2上。 第2加熱機構174具備有：本體部174a;移送機構178 ’設置於上述本體部174a且延伸到積層裝置46之附近而 將玻璃基板2 4交付到上述積層裝置4 6 ;退避機構1 8 0，可 將上述本體部l74a相對於上述積層裝置46朝與箭諕C方 向交叉的方向（第5圖中爲箭號D方向）移動。 移送機構1 7 8係構成相對於第2加熱機構1 74之本體 部174a可從水平姿勢搖動爲筆直下姿勢。此移送機構178 具備有配置多個運送輥子80a的搖動台182，此搖動台182 經由固定於本體部1 7 4 a內的支軸1 8 4而在一端部搖動自如 地被支撐。在本體部174a內，缸體186配置成搖動自如， 從此缸體1 8 6延伸的桿1 8 6 a係連結到搖動台丨8 2的搖動前 端側。 退避機構180具備有在搖動台182上朝交叉於箭號C 方向的方向延伸的一對導軌188。本體部174a可進退配置 在此導軌1 8 8上。 在此第2實施形態中’如第6圖所示，構成移送機構 178的搖動台182在向水平方向被支撐的狀態，靠近積層 -21 - 200922787 裝置4ό。因而，藉由第1加熱機構172及第2加熱 而加熱到既定溫度的玻璃基板24，經由構成移送機 的運送輥子80a而可圓滑且確實地交付到積層裝置 其次，在進行積層裝置4 6之維修作業之時，首 成移送機構178的缸體186被驅動，使桿186a移動 。藉此，連結到桿186a的搖動台182以支軸184爲 朝筆直下方向搖動（參照第6圖中二點破折線）。 因而，沿著構成退避機構180的導軌188,本體 朝正交於箭號C方向的方向移動。因此，在加熱裝 ，可對應於第2加熱機構1 74的作業用配置空間而 修用空間。 ' 依此方式，在第2實施形態中，構成移送機構 設置運送輥子8 0 a的搖動台1 8 2，係構成可作水平 筆直姿勢的姿勢變換。藉此，在玻璃基板2 4的交付 動台1 8 2係配置於水平姿勢，藉以可使尤其係大尺 度薄的玻璃基板24確實地送入到構成積層裝置46 輥子1 2 0 a, 1 2 0 b之間。 另一方面，在積層裝置46之維修時，搖動台1 從水平姿勢變換爲筆直姿勢之姿勢變換後，僅使 174a沿著導軌188移動即可。因而，移送機構178 涉到積層裝置4 6，而可確保所要的維修用空間，並 業性之提高。 此外，在第2實施形態中，雖然搖動台1 8 2係 由缸體186而可自動地搖動’但是亦可構成例如藉 !構 1 74 構17 8 4 6 ° 先，構 到內方 支點而 部 1 7 4 a 置170 確保維 178且 姿勢及 時，搖 寸且厚 之橡膠 82進行 本體部 不致干 達成作 構成經 手動操 -22- 200922787 作使搖動台182在水平姿勢與筆直姿勢作姿勢變換。 第7圖係本發明之第3實施形態相關的加熱裝置1 90 之槪略構成說明圖。此外，與第2實施形態之加熱裝置1 70 同一之構成要素賦予相同的符號，而省略其詳細之說明。 加熱裝置190具備：沿著依運送機構74之運送方向配 置之至少第1加熱機構1 72及第2加熱機構1 92。第2加 熱機構1 9 2具備有相對於本體部1 9 2 a可收容的移送機構 194° 移送機構194具備有：滑動基部196，設置多個運送 輥子80a ;及滑軌198，設置於本體部192a內，使上述滑 動基部196可移動到1述本體部192a之內部及上述本體部 1 9 2 a之外部。在滑動基部1 9 6的端部設置有導銷2 0 〇，係 被引導於形成在滑軌198的導溝198a中。 滑動基部1 9 6，在導銷2 0 0配置於導溝1 9 8 a的外方側 端部之時，靠近積層裝置46且與多個運送輥子80同一面 狀的方式配置多個運送輥子80a，藉由承台202而支撐成 水平姿勢。滑動基部196，在導銷200配置於導溝198a的 內方側端部之時，退避到運送輥子8 0之下方，同時前端部 側支撐在承台2 0 4。 在此第3實施形態中，滑動基部丨9 6，從本體部1 9 2 a 被拉出而支撐於承台202，藉此，運送輥子80a配置成與 構成運送機構74的其他運送輥子80爲同一面狀，同時靠 近積層裝置46而定位。因而，可使玻璃基板24圓滑地從 第2加熱機構192交付到積層裝置46。 -23- 200922787 另一方面，在進行積層裝置4 6之維修作業之時，滑動 基部196在導銷200及滑軌198的引導作用下，收容於本 體部192a之後（第7圖參照二點破折線），上述本體部192a 沿著導軌1 8 8而退避。 藉此，以簡單且迅速的操作，可獲得：可確保維修用 空間，有效地提高作業性等與第1及第2實施形態同樣的 效果。 【圖式簡單說明】 第1圖係組裝本發明之第1實施形態相關的加熱裝置 的製造系統之槪略構成圖。 第2圖係使用於上述製造系統的長條狀感光性薄片的 剖面圖。 第3圖係黏著標籤被黏著在上述長條狀感光性薄片的 狀態之說明圖。 第4圖係上述加熱裝置的槪略構成說明圖。 第5圖係上述加熱裝置的平面說明圖。 第6圖係本發明之第2實施形態相關的加熱裝置之槪 略構成說明圖。 第7圖係本發明之第3實施形態相關的加熱裝置之槪 略構成說明圖。 第8圖係揭示於日本特開平8 - 1 8 3 1 4 6號公報的乾保護 膜的積層方法之說明圖。 【主要元件符號說明】 20 製造系統 -24- 200922787 22 感 光 性 薄 片 22a 感 光 性 薄 片 捲 24 玻 璃 基 板 2 6 基 底 薄 膜 2 8 感 光 性 樹 脂 層 3 0 保 護 薄 膜 45, 170, 190 加 熱 裝 置 46 積 層 裝 置 74 運 送 機 構 76, 78，1 72，174, 1 92 加 熱 機 構 76a ,78a ,172a, 1 74a, 192a 本體部 80, 80a 運 送 輥 子 84, 176 固 定 台 90a ，90b 紅 外 線 加 熱 器 92, 17 8, 194 移 送 機 構 94, 18 0 退 避 機 構 96 框 體 1 02 可 動 台 1 82 振 動 台 1 86 缸 體 120a, 120b 橡膠輥子 200922787 198a 導溝 200 導銷 202 承台 -26The layering is started under the action of rotation, and the substrate 2 4 a is attached in the direction of the arrow C. The attached substrate 24a is quantitatively conveyed in the direction of the arrow C. The photosensitive sheet 22 between the glass substrates 24 is cut by the inter-substrate sheet cutting mechanism 48, and then cooled by the cooling mechanism 130, and further transferred to the substrate peeling mechanism. 132. In the substrate peeling mechanism 132, the substrate substrate 24a is adsorbed and held by the adsorption pad 134, and the base film 26 and the residual portion 3 Ob are peeled off by the robot 136 to obtain the photosensitive layered body 140. At this time, on the upstream, downstream, and both sides of the adsorption pad 134, the entire surface of the laminated substrate 24a is ejected from the side faces in the four directions to remove the static electricity. Further, the photosensitive laminated body 1404 is held by the hand M2a of the robot 142, and is accommodated in the photosensitive laminated body reservoir 146 only in a predetermined number. In this case, in the first embodiment, as shown in Fig. 4 As shown in the figure, the transfer mechanism 92 is provided on the front end surface of the main body portion 78a of the second heating mechanism 78, which is disposed in the direction of the arrow C, and the transfer mechanism 92 is disposed adjacent to the stacking device 46. Therefore, even when the glass substrate 24 having a small thickness and a large size is used, the front end side of the glass substrate 24 can be surely held, and the glass substrate 24 can be smoothly and surely conveyed to constitute the layering device 46. The rubber roller is between 1 2 0 a and 1 2 0 b. Further, when the maintenance work or the like of the build-up device 46 is performed, the first heating mechanism 716 and the second heating mechanism 78 perform the retracting operation as follows. That is, the main body portion 76a of the first heating mechanism 76 moves only along the first guide rail 86 in the direction of the arrow C1 by a predetermined distance L1, and the body portion 78 8 a constituting the second heating mechanism 78 -19-200922787 is similarly along The third rail 1 0 4 moves only a predetermined distance L 1 in the direction of the arrow C 1 . Here, the first heating mechanism 76 and the second heating mechanism 7 are intended to block the interlocking movement in the direction of the arrow C. Then, in the second heating mechanism 78, the main body portion 78a and the movable table ι are integrally moved along the second guide rail 1 in the direction of the arrow D (see Fig. 5) by only a predetermined distance L2, and interlocked. Therefore, when the space is formed in the stacking device 4 6 on the side of the heating device 45, the operator can perform the cleaning of the rubber roller 1 2 0 a, 1 2 0 b constituting the laminating device 46. Replacement and other maintenance work. In this manner, the transfer mechanism 9 2 that delivers the glass substrate 24 from the heating device 45 to the laminating device 46 is provided in the main portion 78 8 a of the second heating mechanism 7 8 . Then, when the maintenance operation of the build-up device 46 is performed, the second heating mechanism 78 is temporarily moved only in the direction of the arrow C1 by a predetermined distance L1', that is, when the main body portion 78a is moved in the direction of the arrow D, The transfer mechanism 92 moves the body portion 78a in the direction of the arrow d after temporarily moving to a position that does not interfere with the layering device 46. Therefore, by merely moving the main body portion 78a of the second heating mechanism 78 in the direction of the arrow C1 and the direction of the arrow D, the transfer mechanism 92 and the body portion 78a can be integrally evacuated from the laminating device 46. Thereby, the maintenance space can be secured by a simple operation, and various maintenance work of the build-up device 46 can be efficiently and easily achieved. In the first embodiment, the glass substrate 24 is intermittently fed, i.e., it is transported in batches. However, the present invention is not limited thereto, and may be applied to a configuration in which the glass substrate 24 is continuously conveyed. -20- 200922787 Fig. 6 is a schematic explanatory view showing a configuration of a heating device 丨7〇 according to a second embodiment of the present invention. The same components as those of the heating device 455 of the i-th embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. The heating device 170 includes at least a first heating mechanism 172 and a second heating mechanism 174 disposed along the transport direction of the transport mechanism 74. The main body portion 172a constituting the first heating mechanism 172 is fixed to the base 8 2 via the fixing base 176. The second heating mechanism 174 includes a main body portion 174a, and the transfer mechanism 178' is disposed in the main body portion 174a and extends to the vicinity of the laminating device 46 to deliver the glass substrate 24 to the laminating device 46; the retracting mechanism 1880. The main body portion 174a can be moved in the direction intersecting the arrow C direction (the direction of the arrow D in Fig. 5) with respect to the above-described laminated device 46. The transfer mechanism 1 7 8 is configured to be tiltable from the horizontal posture to the straight downward posture with respect to the main body portion 174a of the second heating mechanism 1 74. The transfer mechanism 178 is provided with a rocking table 182 on which a plurality of transport rollers 80a are disposed. The rocking table 182 is slidably supported at one end via a support shaft 84 fixed in the main body portion 174a. In the body portion 174a, the cylinder 186 is disposed to be rockable, and the rod 1 8 6 a extending from the cylinder 186 is coupled to the rocking front end side of the rocking table 8 2 . The retracting mechanism 180 is provided with a pair of guide rails 188 that extend in the direction crossing the arrow C direction on the rocking table 182. The body portion 174a is retractable and disposed on the guide rail 88. In the second embodiment, as shown in Fig. 6, the rocking table 182 constituting the transfer mechanism 178 is supported in the horizontal direction, and is close to the laminated layer -21 - 200922787. Therefore, the glass substrate 24 heated to a predetermined temperature by the first heating means 172 and the second heating can be smoothly and surely delivered to the laminating apparatus via the transporting roller 80a constituting the transfer machine, and the laminating apparatus 46 is performed. At the time of the maintenance work, the cylinder 186 of the first transfer mechanism 178 is driven to move the rod 186a. Thereby, the rocking table 182 coupled to the rod 186a is swung in the straight downward direction with the support shaft 184 (refer to the two-point broken line in Fig. 6). Therefore, along the guide rail 188 constituting the retracting mechanism 180, the main body moves in a direction orthogonal to the direction of the arrow C. Therefore, in the heating device, the space can be repaired in accordance with the work arrangement space of the second heating mechanism 1740. In this manner, in the second embodiment, the rocking table 182 which constitutes the transporting mechanism and the transport roller 80a is configured to change the posture in a horizontally straight posture. Thereby, the delivery table 18 2 of the glass substrate 24 is placed in a horizontal posture, whereby the glass substrate 24, which is particularly thin and large in size, can be surely fed to constitute the laminating device 46. The roller 1 2 0 a, 1 2 Between 0 b. On the other hand, at the time of maintenance of the laminating device 46, the posture of the rocking table 1 from the horizontal posture to the straight posture is changed, and only the 174a is moved along the guide rail 188. Therefore, the transfer mechanism 178 is involved in the laminating device 46, and the required maintenance space can be secured, and the commerciality is improved. Further, in the second embodiment, the rocking table 182 can be automatically swung by the cylinder 186, but it can be configured, for example, by constructing a structure of the inner fulcrum. Part 1 7 4 a Set 170 to ensure the dimension 178 and the posture is timely, the inch and thick rubber 82 does not dry the body part to achieve the composition of the manual operation -22-200922787 to make the rocking table 182 posture change in the horizontal posture and the straight posture . Fig. 7 is a schematic explanatory view showing a configuration of a heating device 1 90 according to a third embodiment of the present invention. The same components as those of the heating device 1 70 of the second embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. The heating device 190 includes at least a first heating mechanism 172 and a second heating mechanism 192 disposed along the transport direction of the transport mechanism 74. The second heating mechanism 192 is provided with a transfer mechanism 194 that can be accommodated with respect to the main body portion 192. The transfer mechanism 194 includes a slide base portion 196 that is provided with a plurality of transport rollers 80a, and a slide rail 198 that is provided in the main body portion. In 192a, the sliding base portion 196 is movable to the inside of the body portion 192a and the outside of the body portion 192a. A guide pin 20 〇 is provided at the end of the sliding base 196 and is guided into the guide groove 198a formed in the slide rail 198. When the guide pin 200 is disposed at the outer end portion of the guide groove 1 9 8 a, the slide base portion 196 is disposed adjacent to the stacking device 46 and disposed in the same plane shape as the plurality of transport rollers 80. 80a is supported in a horizontal posture by the platform 202. When the guide pin 200 is disposed at the inner end portion of the guide groove 198a, the slide base portion 196 is retracted below the transport roller 80, and the front end portion side is supported by the cap 220. In the third embodiment, the slide base 丨9, 6 is pulled out from the main body portion 192a and supported by the susceptor 202, whereby the transport roller 80a is disposed so as to be the other transport roller 80 constituting the transport mechanism 74. The same surface shape is simultaneously positioned adjacent to the layering device 46. Therefore, the glass substrate 24 can be smoothly conveyed from the second heating mechanism 192 to the layering device 46. -23- 200922787 On the other hand, at the time of performing the maintenance work of the laminating device 46, the sliding base portion 196 is housed behind the main body portion 192a under the guidance of the guide pin 200 and the slide rail 198 (refer to the two-point dashed line in Fig. 7) The body portion 192a is retracted along the guide rails 188. As a result, in the simple and rapid operation, it is possible to obtain the same effects as those of the first and second embodiments, such as ensuring the maintenance space and effectively improving the workability. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic structural view showing a manufacturing system of a heating device according to a first embodiment of the present invention. Fig. 2 is a cross-sectional view of a long photosensitive sheet used in the above-described manufacturing system. Fig. 3 is an explanatory view showing a state in which the adhesive label is adhered to the long-length photosensitive sheet. Fig. 4 is a schematic view showing the outline of the above heating device. Fig. 5 is a plan explanatory view of the above heating device. Fig. 6 is a schematic explanatory view showing a configuration of a heating device according to a second embodiment of the present invention. Fig. 7 is a schematic explanatory view showing a configuration of a heating device according to a third embodiment of the present invention. Fig. 8 is an explanatory view showing a method of laminating a dry protective film disclosed in Japanese Laid-Open Patent Publication No. Hei 08-128. [Description of main components] 20 Manufacturing system-24- 200922787 22 Photosensitive sheet 22a Photosensitive sheet roll 24 Glass substrate 2 6 Base film 2 8 Photosensitive resin layer 3 0 Protective film 45, 170, 190 Heating device 46 Laminating device 74 Transport mechanism 76, 78, 1 72, 174, 1 92 heating mechanism 76a, 78a, 172a, 1 74a, 192a body portion 80, 80a transport roller 84, 176 fixed table 90a, 90b infrared heater 92, 17 8, 194 transfer Mechanism 94, 18 0 Retraction mechanism 96 Frame 1 02 Movable table 1 82 Shaking table 1 86 Cylinder 120a, 120b Rubber roller 200922787 198a Guide groove 200 Guide pin 202 Bearing platform-26