CN101396897A - Heating device - Google Patents
Heating device Download PDFInfo
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- CN101396897A CN101396897A CNA2008101658658A CN200810165865A CN101396897A CN 101396897 A CN101396897 A CN 101396897A CN A2008101658658 A CNA2008101658658 A CN A2008101658658A CN 200810165865 A CN200810165865 A CN 200810165865A CN 101396897 A CN101396897 A CN 101396897A
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- main part
- laminater
- substrate
- carrying
- heater
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
- Laminated Bodies (AREA)
Abstract
A heating device (45) of the invention comprises the following components: a conveying mechanism (74) which is used for conveying a substrate (24); and a first heating mechanism and a second heating mechanism (76, 78) which are configured along the conveying direction of the conveying mechanism (74). The second heating mechanism (78) comprises the following components: a body part (78a); a conveying mechanism (92) which is provided at the body part (78a) and extends to the vicinity of laminating device (46) and is used for transferring the glass substrate (24) to the laminating device (46); and a retreating device (94) which leads to the moving of body part (78a) relatively to the laminating device (46).
Description
Technical field
The present invention relates to a kind of substrate that will utilize laminater to paste photoelectric sheet (web) is heated to set point of temperature in advance before pasting processing heater.
Background technology
For example, use photosensitive laminate with substrate, PDP panel in substrate at substrate for liquid crystal panel, printed wiring, this photosensitive laminate constitutes for the photonasty lamellar body (photoelectric sheet) that will have photosensitive material (photoresist) layer pastes substrate surface.This photonasty lamellar body is stacked above one another photosensitive material layer and diaphragm on pliability plastic supporting body.
When making this photosensitive laminate, usually substrates such as glass substrate or resin substrate are heated to set point of temperature in advance.And photoelectric sheet and warmed-up substrate clamping and heating between a pair of laminating roll that constitutes laminater by diaphragm has been peeled off by a part or whole part are received on the described substrate photosensitive material layer hot pressing.Then, by from strippable substrate pliability plastic supporting body, make photosensitive laminate thus.
For example, in the laminating method of the disclosed dried resist film of Japanese kokai publication hei 8-183146 communique (dry resistfilm), as shown in Figure 8, film cut-out portion 4 and film are removed the carrying direction configuration of portion 5 along trucking department 6 carrying substrates 7 on basal plate preheating portion 1, lamination portion 2, substrate cooling end 3, the substrate.
In basal plate preheating portion 1, after substrate 7 being heated to the temperature of regulation, this substrate 7 is passed out to lamination portion 2 by pre-hot heater 1a.Dispose a pair of laminating roll 2a, 2b in lamination portion 2, substrate 7 and dried resist film 8 are sent between described laminating roll 2a, the 2b.Thereby dried resist film 8 is received on the substrate 7 by hot pressing.
But, in above-mentioned prior art, owing to need make substrate 7 handing-over smoothly between the substrate inserting side of basal plate preheating portion 1 and laminating roll 2a, 2b.Therefore, usually in lamination portion 2, be provided with side-prominent conveyer belt (not shown) to basal plate preheating portion 1.
But in lamination portion 2, when upkeep operations such as the cleaning of carrying out laminating roll 2a, 2b and replacing, conveyer belt brings obstacle can for this operation.Thereby each maintenance all needs the operation of dismounting conveyer belt, because this operation is quite numerous and diverse, therefore exists and can not effectively carry out the whole problem of safeguarding.
Summary of the invention
The present invention proposes for addressing the above problem, and its purpose is to provide a kind of operations such as maintenance that make laminater effectively and the heater of finishing easily.
The present invention relates to a kind of substrate that will utilize laminater to paste photoelectric sheet is heated to set point of temperature in advance before pasting processing heater.Heater comprises: be used for the carrying mechanism of carrying substrate and a plurality of heating arrangements that dispose along the carrying direction based on described carrying mechanism.
And, comprise with the heating arrangements in the adjacent downstream that is configured in the carrying direction of laminater: main part, it accommodates carrying mechanism and heating source; Transfer mechanism, it is located at described main part, and extend to described laminater near, be used for substrate delivery/reception to described laminater; And keep out of the way mechanism, it can make described main part move with respect to described laminater.
In the present invention, be provided with the transfer mechanism that is used for substrate delivery/reception is arrived laminater at the main part that constitutes heating arrangements, this main part can leave from described laminater by keeping out of the way mechanism integratedly with described transfer mechanism.Therefore, when the maintenance level pressure device,, promptly can guarantee to safeguard and use the space only by main part is moved to prescribed direction.Thus, can be effective and the various upkeep operations of easy complete layer pressure device.
Description of drawings
From the following describes of in conjunction with the accompanying drawings preferred embodiment, can be clearer and more definite to above-mentioned purpose and other purposes, feature and advantage.
Fig. 1 is the summary construction diagram of manufacturing system of heater of first embodiment of the present invention of packing into.
Fig. 2 is to use in the cutaway view of the strip photoelectric sheet of described manufacturing system.
Fig. 3 is the key diagram that adhesive labels is bonded to the state of described strip photoelectric sheet.
Fig. 4 is the schematic configuration key diagram of described heater.
Fig. 5 is the key diagram of overlooking of described heater.
Fig. 6 is the schematic configuration key diagram of the heater of second embodiment of the present invention.
Fig. 7 is the schematic configuration key diagram of the heater of the 3rd embodiment of the present invention.
Fig. 8 is the key diagram of the laminating method of disclosed dried resist film in Japanese kokai publication hei 8-183146 communique.
The specific embodiment
Fig. 1 is the summary construction diagram of manufacturing system 20 of photosensitive laminate of heater of first embodiment of the present invention of packing into.In making liquid crystal or the organic EL operation with colour filter (color filter), this manufacturing system 20 is carried out photo-sensitive resin 28 (aftermentioned) heat with strip photoelectric sheet 22 and is transferred to operation on the glass substrate 24.
This photoelectric sheet 22 constitutes by stacked pliability basement membrane (supporting mass) 26, photo-sensitive resin (photosensitive material layer) 28 and diaphragm 30.
As shown in Figure 1, manufacturing system 20 comprises: thin plate delivering mechanism 32, and it accommodates the photoelectric sheet roller 22a that photoelectric sheet 22 is wound into the roller shape, and sends described photoelectric sheet 22 from this photoelectric sheet roller 22a; Organisation of working 36, it forms on the diaphragm 30 of the described photoelectric sheet 22 that is sent can be at the hemisect position 34 (with reference to Fig. 2) that width cuts off; And label bonding agency 40, it bonds to the adhesive labels 38 (with reference to Fig. 3) that a part has non-bonded part 38a on the diaphragm 30.
Downstream at label bonding agency 40 disposes: storing mechanism 42, and it is used for photoelectric sheet 22 is changed to continuous feed by (tact) feeding at intermittence; Mechanism for stripping 44, it is peeled off diaphragm 30 with the length of regulation at interval from described photoelectric sheet 22; The heater 45 of first embodiment, it is transported to paste position with it under the state that glass substrate 24 is heated to set point of temperature; And laminater 46, it will be stripped from the photo-sensitive resin 28 that exposes because of described diaphragm 30 and paste on the described glass substrate 24.Also have, the object being treated that below will utilize laminater 46 to paste photoelectric sheet 22 on glass substrate 24 abbreviates adhesive substrate 24a as.
Near the upstream of the paste position of laminater 46, dispose the testing agency 47 of direct detection, and dispose thin plate shut-off mechanism 48 between the substrate that cuts off the described photoelectric sheet 22 between each glass substrate 24 in the downstream of described laminater 46 as the hemisect position 34 of photoelectric sheet 22 boundary positions.Provided upstream at thin plate shut-off mechanism 48 between this substrate is equipped with when turning round beginning and the thin plate shut-off mechanism 48a that turns round and use when finishing.
Dispose bond pad 49 near the downstream of thin plate delivering mechanism 32, it makes the rear end of roughly using the photoelectric sheet 22 that finishes engage with the front end of the new photoelectric sheet 22 that uses.Dispose film end position detector 51 in the downstream of this bond pad 49, it is used to control the dislocation on the width that dislocation (ま I ず れ) causes rolled of photoelectric sheet roller 22a.
Organisation of working 36 is disposed at roller to 50 downstream, and this roller is used to calculate the roller diameter of accommodating the photoelectric sheet roller 22a of coiling at thin plate delivering mechanism 32 to 50.This organisation of working 36 possesses single dise knife 52, and this dise knife 52 feed on the width of photoelectric sheet 22 is at the assigned position formation hemisect position 34 of described photoelectric sheet 22.
As shown in Figure 2, hemisect position 34 needs tripping protection film 30 at least, in fact, and for cutting off this diaphragm 30 is set dise knife 52 with the degree that is cut into photo-sensitive resin 28 and even basement membrane 26 penetraction depth reliably.
The interval of glass substrate 24 is set at hemisect position 34, for example, is set at the position that respectively enters 10mm from the described glass substrate 24 of both sides to the inside.The part that is clipped by hemisect position 34 between the glass substrate 24 is brought into play the effect of mask when pasting photo-sensitive resin 28 on the described glass substrate 24 with the picture frame shape in laminater 46 described later.
For corresponding to the remnant 30b that keeps diaphragm 30 between the glass substrate 24, label bonding agency 40 is supplied with and is linked released part 30aa that peels off side the place ahead and the adhesive labels 38 of peeling off the released part 30ab of proceeds posterolateral.As shown in Figure 2,, the part of peeling off earlier on the diaphragm 30 is made as the released part 30aa in the place ahead across remnant 30b, in addition, with after the part peeled off be made as the released part 30ab at rear.
As shown in Figure 3, adhesive labels 38 constitutes thin rectangle, and is for example formed by the resin material identical with protective film 30.Adhesive labels 38 has not non-bonded part (the comprising bonding a little) 38a at the central portion adhesive-applying, and, both sides at this non-bonded part 38a, be the length direction both ends of described adhesive labels 38, have the first adhesive portion 38b and the second adhesive portion 38c that bonds to the released part 30ab at rear of the released part 30aa that bonds to the place ahead.
As shown in Figure 1, label bonding agency 40 possesses the absorption layer 54a～54g that maximum seven adhesive labels 38 can be separated and pasted with predetermined distance, and on paste position, disposing lifting supporting station 56 freely based on the described adhesive labels 38 of described absorption layer 54a～54g, supporting station 56 is used for keeping from the below photoelectric sheet 22.
Speed difference between the continuous carrying of the carrying at intermittence of storing mechanism 42 absorption upstream side photoelectric sheets 22 and the described photoelectric sheet 22 in downstream, and then storing mechanism 42 also comprises the dancer 61 that is made of swing two rollers 60 freely for preventing tension change.And roller 60 can adopt more than one or three according to memory space.
The mechanism for stripping 44 that is disposed at these storing mechanism 42 downstreams possesses the tube of suction (suction drum) 62, the tension stability when this suction tube 62 is used to make lamination, and the tension change of sending side of the thin plate 22 that desensitizes.Near suction tube 62, dispose stripper roll 63, and the diaphragm 30 of being stripped from from photoelectric sheet 22 with the peel angle of acute angle by this stripper roll 63 is batched diaphragm reeling end 64 except remnant 30b.
Dispose the tension control mechanism 66 that to give tension force to photoelectric sheet 22 in the downstream of mechanism for stripping 44.Tension control mechanism 66 possesses cylinder 68, and under the driving effect of this cylinder 68, tension force dancer 70 swing displacements can be adjusted the tension force with the photoelectric sheet 22 of these tension force dancer 70 sliding-contacts thus.And, can use tension control mechanism 66 as required, also can delete.
Testing agency 47 possesses photoelectric sensors 72 such as laser sensor or optical sensor; the variation that described photoelectric sensor 72 directly detects step difference that the thickness of groove shape portion, the diaphragm 30 of the wedge-like at hemisect positions 34 causes or caused by their combination, and with this detection signal as boundary position signals.Photoelectric sensor 72 and spare roll (backup drum) 73 arranged opposite.And, can replace photoelectric sensor 72, use image testing devices such as noncontact extensometer or CCD camera etc.
As shown in Figure 4, heater 45 comprises: be used for along the carrying mechanism 74 of arrow C direction carrying glass substrate 24; And along a plurality of, at least the first heating arrangements 76 and second heating arrangements 78 based on the configuration of the carrying direction of described carrying mechanism 74.
Keep out of the way mechanism 94 and possess on base station 82 parallel to each otherly and at a pair of second guide rail 100 that arrow D direction is extended, disposing on this second guide rail 100 can be in the movable table 102 of arrow D direction advance and retreat.On the advance and retreat position of the arrow D of movable table 102 direction, be provided with not shown interlock, described movable table 102 can be remained on two positions.
On movable table 102, be provided with parallel to each other and, be configured on described the 3rd guide rail 104 at the main part 78a that the arrow C direction can be advanced and retreat at a pair of the 3rd guide rail 104 that the arrow C direction is extended.Main part 78a is fixed near laminater 46 in arrow C direction front position, and on the other hand, main part 78a also can fix at arrow C direction back-end location.
And carrying mechanism 74 can also adopt the not shown air supporting plate of configuration, glass substrate 24 is floated and to the structure of arrow C direction carrying.
As shown in Figure 1, the provided upstream at heater 45 is equipped with the substrate bunker 110 of accommodating a plurality of glass substrates 24.On three sides beyond the input of substrate bunker 110 and the conveying end, set up dedusting with fan unit (or piping unit) 112.Fan unit 112 blows out the antistatic purgative gas in substrate bunker 110.Each glass substrate 24 that is contained in substrate bunker 110 is located at absorption layer 116 absorption on the hand 114a of robot 114 and is removed, and is moved into heater 45.
Dispose movably contact preventing roller 126 near rubber rollers 120a, contact preventing roller 126 is used to prevent that photoelectric sheet 22 from contacting with described rubber rollers 120a.Near the upstream of laminater 46, dispose and be used for photoelectric sheet 22 is preheated the portion that preheats 127 that predesignates temperature.This preheats portion 127 and for example possesses heaters such as infrared ray heating rod.
Disposing film carrying roller 128a and board carrying roller 128b between laminater 46 and substrate between the thin plate shut-off mechanism 48.The downstream of thin plate shut-off mechanism 48 disposes cooling body 130 between substrate, and disposes basic mechanism for stripping 132 in the downstream of this cooling body 130.Cooling body 130 thin plate shut-off mechanism 48 between by substrate has cut off after the photoelectric sheet 22 between adhesive substrate 24a, supplies with cold wind to this adhesive substrate 24a, implements cooling processing.Specifically being set at the cold wind temperature is 10 ℃, and air quantity is 1.0～2.0m
3/ min.And, also can not use cooling body 130, cooling naturally in photosensitive laminate bunker 146 described later.In addition, also can replace cold wind, dry with indoor wind.
The basic mechanism for stripping 132 that is disposed at the downstream of cooling body 130 possesses from a plurality of absorption layers 134 of below absorption adhesive substrate 24a, on this absorption layer 134, adsorb and maintain under the state of described adhesive substrate 24a, peel off basement membrane 26 and remnant 30b by manipulator 136.Dispose antistatic hair-dryer (not shown) in upstream, downstream and the both sides of absorption layer 134, its from the side of four direction to the laminated portion integral spray antistatic gas of adhesive substrate 24a.And, for dedusting can be with workbench vertical or tilt or turn over and peel off.
Be provided with the photosensitive laminate bunker 146 of accommodating a plurality of photosensitive laminates 140 in the downstream of basic mechanism for stripping 132.The photosensitive laminate 140 that utilizes basic mechanism for stripping 132 to peel off basement membrane 26 and remnant 30b from adhesive substrate 24a is located at absorption layer 114 absorption on the hand 142a of robot 142 and is removed, and is accommodated in photosensitive laminate bunker 146.And hand 142a also can not use suction type, for example the hold mode that adopts friction to be realized.
On three sides beyond the input of photosensitive laminate bunker 146 and the conveying end, set up dedusting with fan unit (or piping unit) 112.Fan unit 112 blows out the antistatic purgative gas in photosensitive laminate bunker 146.
In manufacturing system 20, thin plate delivering mechanism 32, organisation of working 36, label bonding agency 40, storing mechanism 42, mechanism for stripping 44, tension control mechanism 66 and testing agency 47 are configured in the top of laminater 46, but also can be in contrast, to be disposed at the below of described laminater 46 from described thin plate delivering mechanism 32 to described testing agency 47, turning upside down of photoelectric sheet 22, photo-sensitive resin 28 is pasted on the downside of glass substrate 24, in addition, also can be in a straight line with described manufacturing system 20 whole formations.
Manufacturing system 20 is controlled by whole by lamination operation control part 150, in each function portion of this manufacturing system 20, for example be provided with lamination control part 152, substrate heating control section 154 and basis and peel off control part 156 etc., utilize the in-process network that they are coupled together.
Lamination operation control part 150 is connected with plant network, to from the production management of the indication information (condition enactment, production information) of the not shown CPU of factory, work management etc., the information processing that is used to produce.
Lamination control part 152 carries out the control of each function portion as the master of operation integral body, based on the positional information by the hemisect position 34 of testing agency's 47 detected photoelectric sheets 22, for example constitutes the controlling organization of control heater 45.
The basis is peeled off control part 156 and is carried out peeling off basement membrane 26 from the adhesive substrate 24a that is supplied with by laminater 46, and then operation is discharged the control of the action of photosensitive laminate 140 downstream, and handles the information of described adhesive substrate 24a of control and described photosensitive laminate 140.
Be separated into the first Clean room 162a and the second Clean room 162b by partition wall 160 in the manufacturing system 20.Accommodate thin plate delivering mechanism 32 to tension control mechanism 66 at the first Clean room 162a, and accommodate later mechanism of testing agency 47 at the second Clean room 162b.The first Clean room 162a and the second Clean room 162b are communicated with by breakthrough part 164.
Below the action of this manufacturing system 20 is described.
At first, as shown in Figure 1, in organisation of working 36, dise knife 52 moves on the width of photoelectric sheet 22, and this photoelectric sheet 22 is cut into photo-sensitive resin 28 and even basement membrane 26 from diaphragm 30, forms hemisect position 34 (with reference to Fig. 2).And then as shown in Figure 1, photoelectric sheet 22, is stopped by after the carrying of arrow A direction corresponding to the size of the remnant 30b of diaphragm 30, forms hemisect position 34 under the feed effect of dise knife 52.Thus, on photoelectric sheet 22, be provided with the released part 30aa in the place ahead and the released part 30ab at rear (with reference to Fig. 2) across remnant 30b.
Below, photoelectric sheet 22 is moved to label bonding agency 40, and the regulation of diaphragm 30 is pasted the position and is configured on the supporting station 56.In label bonding agency 40; the adhesive labels 38 of regulation number is adsorbed pad 54a～54g and adsorbs maintenance; and each adhesive labels 38 strides across the remnant 30b of diaphragm 30, bonds to the released part 30aa in the place ahead and the released part 30ab at rear integratedly and goes up (with reference to Fig. 3).
As shown in Figure 1, for example, the photoelectric sheet 22 of bonding seven adhesive labels 38 prevents to send the pulling force change of side by storing mechanism 42, is transported to mechanism for stripping 44 continuously then.In mechanism for stripping 44, the basement membrane 26 of photoelectric sheet 22 is adsorbed to remain in and sucks tube 62, and except keeping remnant 30b, diaphragm 30 is peeled off from described photoelectric sheet 22.Diaphragm reeling end 64 is peeled off and batched to this diaphragm 30 by stripper roll 63 with the peel angle of acute angle.
Under the effect of mechanism for stripping 44; diaphragm 30 except that keeping remnant 30b by after basement membrane 26 is peeled off; carry out tension adjustment by 66 pairs of photoelectric sheets of tension control mechanism 22, and then utilize photoelectric sensor 72 to carry out the detection at hemisect position 34 in testing agency 47.
On the other hand, in heater 45, set heating-up temperature in first and second heating arrangements 76,78 corresponding to the laminating temperature of laminater 46.For example, when laminating temperature is 110 ℃, the heating-up temperature in first and second heating arrangements 76,78 is set at 120 ℃ of front and back by first and second infrared heater 90a, 90b.
Therefore, robot 114 is controlled the glass substrate 24 that is contained in substrate bunker 110, and this glass substrate 24 is moved into first heating arrangements 76.As shown in Figure 4, in first heating arrangements 76,, afterwards, described glass substrate 24 is delivered to second heating arrangements 78 by carrying mechanism 74 in heat effect lower glass substrate 24 intensifications of the first infrared heater 90a.
In second heating arrangements 78,,, be sent to laminater 46 by carrying mechanism 92 maintaining under the state of set point of temperature by the second infrared heater 90b glass substrate 24.In laminater 46, glass substrate 24 is corresponding with the adhesive portion of the photo-sensitive resin 28 of photoelectric sheet 22, temporarily is disposed between rubber rollers 120a, the 120b.
Under this state, by roller clamping section 124 spare roll 122b and rubber rollers 120b are risen, thus, glass substrate 24 is sandwiched between rubber rollers 120a, the 120b with the squeeze pressure of stipulating.And then, under the turning effort of rubber rollers 120a, on this glass substrate 24, utilize heating and melting transfer printing (lamination) photo-sensitive resin 28.
Here, as lamination, speed is 1.0m/min～10.0m/min, and the temperature of rubber rollers 120a, 120b is 80 ℃～150 ℃, the rubber hardness of described rubber rollers 120a, 120b is 40 degree～90 degree, and the extruding force (linear pressure) of this rubber rollers 120a, 120b is 50N/cm～400N/cm.
When finishing by rubber rollers 120a, 120b to photoelectric sheet 22 of glass substrate 24 laminations, the rotation of described rubber rollers 120a stops, on the other hand, by lamination the described glass substrate 24 of described photoelectric sheet 22 be that adhesive substrate 24a is clamped by board carrying roller 128b.
Then, rubber rollers 120b keeps out of the way to the direction of leaving from rubber rollers 120a, removes to clamp, and board carrying roller 128b begins rotation simultaneously, adhesive substrate 24a is quantitatively carried to the arrow C direction, and the position moves near the assigned position in below of rubber rollers 120a between the substrate of photoelectric sheet 22.On the other hand, by heater 45 next glass substrate 24 is carried to paste position.
When the front-end configuration of next glass substrate 24 was between rubber rollers 120a, 120b, described rubber rollers 120b rose, and clamped described next glass substrate 24 and photoelectric sheet 22 with described rubber rollers 120a, 120b.And, under the turning effort of rubber rollers 120a, 120b and board carrying roller 128b, begin lamination, and adhesive substrate 24a carried to the arrow C direction.
Adhesive substrate 24a is quantitatively carried to the arrow C direction, after the photoelectric sheet 22 that cuts off between the glass substrates 24 by thin plate shut-off mechanism between substrate 48, by cooling body 130 coolings, and then is shifted into basic mechanism for stripping 132.In this basis mechanism for stripping 132, maintain under the state of adhesive substrate 24a in absorption on the absorption layer 134, peel off basement membrane 26 and remnant 30b by manipulator 136, thereby obtain photosensitive laminate 140.
At this moment, in upstream, downstream and the both sides of absorption layer 134, spray antistatic gas from the side of four direction to the laminated portion integral body of adhesive substrate 24a.And photosensitive laminate 140 is maintained on the hand 142a of robot 142, only accommodates the photosensitive laminate 140 of specified quantity at photosensitive laminate bunker 146.
At this moment, as shown in Figure 4, in the first embodiment, be provided with transfer mechanism 92 on the arrow C direction front end face of the main part 78a that constitutes second heating arrangements 78, described transfer mechanism 92 is near laminater 46 configurations.
Therefore, especially when using the thin and large-scale glass substrate 24 of wall, the carrying direction front that also can keep this glass substrate 24 is reliably constituting between rubber rollers 120a, the 120b of laminater 46, can be smoothly and carry described glass substrate 24 reliably.
In addition, as described below when upkeep operation that carries out laminater 46 etc., first heating arrangements 76 and second heating arrangements 78 are retreated.That is, in first heating arrangements 76, main part 76a moves the distance L 1 of regulation along first guide rail 86 to arrow C 1 direction, and the main part 78a that constitutes second heating arrangements 78 simultaneously moves predetermined distance L1 along the 3rd guide rail 104 to arrow C 1 direction equally.Here, first heating arrangements 76 and second heating arrangements 78 are provided with and are used to stop the interlock that moves to the arrow C direction.
Then, in second heating arrangements 78, main part 78a and movable table 102 integratedly along second guide rail 100 to the mobile predetermined distance L2 of arrow D direction (with reference to Fig. 5), and apply interlocking.
Therefore, in laminater 46, be formed with the space that upkeep operation is used in heater 45 sides, utilize this space, the operator can constitute upkeep operations such as the cleaning, replacing of rubber rollers 120a, the 120b of laminater 46.
As mentioned above, be provided with at the main part 78a of second heating arrangements 78 and be used for from the transfer mechanism 92 of heater 45 to laminater 46 handing-over glass substrates 24.And, when upkeep operation that carries out laminater 46 etc., second heating arrangements 78 is temporarily being moved predetermined distance L1 to arrow C 1 direction, promptly make main part 78a when arrow D direction moves, temporarily make transfer mechanism 92 move to not the position of interfering, described main part 78a is moved to arrow D direction with described laminater 46.
Therefore, only move to arrow C 1 direction and arrow D direction, transfer mechanism 92 and described main part 78a are kept out of the way from laminater 46 integratedly by the main part 78a that makes second heating arrangements 78.Thus, can enough shirtsleeve operations guarantee to safeguard and use the space that the various upkeep operations of laminater 46 can effectively and easily be finished.
And in the first embodiment, it is so-called carrying in batches that glass substrate 24 carries out index(ing) feed, but is not limited thereto, and also can be applicable to the structure of the described glass substrate 24 of continuous carrying.
Fig. 6 is the schematic configuration key diagram of the heater 170 of second embodiment of the present invention.And, to being marked with same-sign, and omit its detailed description with the heater 45 identical structural elements of first embodiment.
Keep out of the way mechanism 180 and possess on swing platform 182 pair of guide rails 188 to the direction extension that intersects with the arrow C direction.On this guide rail 188, dispose the main part 174a that can advance and retreat.
As shown in Figure 6, in second embodiment, the swing platform 182 that constitutes transfer mechanism 178 is being supported under the state of horizontal direction, near laminater 46.Therefore, the glass substrate 24 that utilizes first heating arrangements 172 and second heating arrangements 174 to be heated to set point of temperature can be handed off on the laminater 46 smoothly and reliably by the carrying roller 80a that constitutes transfer mechanism 178.
Below, when carrying out the upkeep operation of laminater 46, at first, driving the cylinder 186 that constitutes transfer mechanism 178, bar 186a moves to the inside.Thus, the swing platform 182 that is connected with bar 186a is that supporting-point is swung (double dot dash line in reference to Fig. 6) to vertical downward direction with bolster 184.
Therefore, the main part 184a guide rail 188 of keeping out of the way mechanism 180 along formation moves to the direction with arrow C direction quadrature.Therefore, in heater 170, can guarantee to safeguard with configuration space and use the space corresponding to the operation of second heating arrangements 174.
Like this, in second embodiment, the swing platform 182 that constitutes transfer mechanism 178 and be provided with carrying roller 80a constitutes and posture can be transformed into flat-hand position and vertical posture.Thus, during glass substrate 24, swing platform 182 is configured to flat-hand position in handing-over, thus, especially can size is big and glass substrate 24 that wall is thin send into reliably between rubber rollers 120a, the 120b that constitutes laminater 46.
On the other hand, when maintenance level pressure device 46,, main part 174a is moved along guide rail 188 get final product as long as swing platform 182 is altered one's posture to after the vertical posture from flat-hand position.Thereby transfer mechanism 178 is not interfered with laminater 46, can guarantee that required maintenance use the space, the raising of realization operation.
And in second embodiment, swing platform 182 constitutes and can automatically swing by cylinder 186, but replaces this mode, for example, also can constitute to make by manual operation and swing platform 182 and alter one's posture into flat-hand position and vertical posture.
Fig. 7 is the schematic configuration key diagram of the heater 190 of the 3rd embodiment of the present invention.And, the structural element identical with the heater 170 of second embodiment is marked with same-sign, and omits its detailed description.
When guide finger 200 was configured in the outboard end of gathering sill 198a, slide 196 was near laminaters 46, and with a plurality of carrying rollers 80 with one side on a plurality of carrying roller 80a of configuration, and be flat-hand position by supporting station 202 supportings.Be configured at guide finger 200 when the medial end of gathering sill 198a, slide 196 is kept out of the way the below of carrying roller 80, and by supporting station 204 its leading section sides of supporting.
In the 3rd embodiment, slide 196 is pulled out from main part 192a, and is supported platform 202 supporting, carry thus roller 80a be configured in other carrying rollers 80 that constitute carrying mechanism 74 with on the one side, and be positioned near laminater 46.Thereby, glass substrate 24 successfully is handed off on the laminater 46 from second heating arrangements 192.
On the other hand, when maintenance level pressure device 46, slide 196 under the guiding function of guide finger 200 and slide rail 198, in being accommodated in main part 192a after (double dot dash line in reference to Fig. 7), described main part 192a keeps out of the way along guide rail 188.
Thus, can be simply enough and operation fast guarantee to safeguard and use the space, and can obtain effectively to improve operation etc., and the same effect of first and second embodiment.
Claims (7)
1. heater, it is to utilize substrate (24) that laminater (46) pastes photoelectric sheet (22) pasting the heater (45) that is heated to set point of temperature before handling in advance,
Described heater is characterised in that,
It comprises: carrying mechanism (74), and it is used to carry described substrate (24); And a plurality of heating arrangements (76,78), it disposes along the carrying direction based on described carrying mechanism (74),
And comprise with the described heating arrangements (78) in the adjacent downstream that is configured in the carrying direction of described laminater (46):
Main part (78a), it accommodates described carrying mechanism (74) and heating source (90b);
Transfer mechanism (92), it is located at described main part (78a), extend to described laminater (46) near, be used for described substrate (24) is handed off to described laminater (46);
Keep out of the way mechanism (94), it can move described main part (78a) with respect to described laminater (46).
2. heater according to claim 1 is characterized in that,
Described transfer mechanism (92) is fixed with respect to described main part (78a).
3. heater according to claim 1 is characterized in that,
The described mechanism (94) of keeping out of the way constitutes on the direction that described main part (78a) can be intersected in described carrying direction and with described carrying direction and advances and retreat.
4. heater according to claim 1 is characterized in that,
Described carrying mechanism (178) constitutes and can swing with respect to described main part (174a).
5. heater according to claim 4 is characterized in that,
Described transfer mechanism (178) possesses swing cylinder (186).
6. heater according to claim 1 is characterized in that,
Described transfer mechanism (194) constitutes and can be contained in described main part (192a).
7. according to claim 4 or 6 described heaters, it is characterized in that,
The described mechanism (180) of keeping out of the way constitutes described main part (174a, 192a) can be at least advanced and retreat on the direction of intersecting with described carrying direction.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007251250 | 2007-09-27 | ||
| JP2007251250A JP2009078510A (en) | 2007-09-27 | 2007-09-27 | Heating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101396897A true CN101396897A (en) | 2009-04-01 |
Family
ID=40515853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008101658658A Pending CN101396897A (en) | 2007-09-27 | 2008-09-25 | Heating device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2009078510A (en) |
| KR (1) | KR20090032979A (en) |
| CN (1) | CN101396897A (en) |
| TW (1) | TW200922787A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116252519A (en) * | 2022-12-07 | 2023-06-13 | 深圳源明杰科技股份有限公司 | Label preparation method and system |
-
2007
- 2007-09-27 JP JP2007251250A patent/JP2009078510A/en not_active Withdrawn
-
2008
- 2008-08-29 KR KR1020080085092A patent/KR20090032979A/en not_active Application Discontinuation
- 2008-09-23 TW TW097136388A patent/TW200922787A/en unknown
- 2008-09-25 CN CNA2008101658658A patent/CN101396897A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116252519A (en) * | 2022-12-07 | 2023-06-13 | 深圳源明杰科技股份有限公司 | Label preparation method and system |
| CN116252519B (en) * | 2022-12-07 | 2024-03-26 | 深圳源明杰科技股份有限公司 | Label preparation method and system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009078510A (en) | 2009-04-16 |
| KR20090032979A (en) | 2009-04-01 |
| TW200922787A (en) | 2009-06-01 |
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Application publication date: 20090401 |