KR20080038064A - Substrate heating method - Google Patents

Abstract

A method for heating a substrate is provided to effectively prevent a thermal deformation of a transfer roller by preventing the transfer roller from being stopped after a predetermined time. A substrate is heated up to a predetermined temperature, before a photo-sensitive web(22a) is attached to the substrate(24). The substrate is heated, while the substrate is sporadically or continuously transferred to plural heating furnaces from a transfer unit. When the transfer unit is stopped after a predetermined time in a heating furnace, the transfer roller(76a), which is included in the transfer unit, is rotated as one-way or reciprocation. When the transfer roller is rotated as one-way, the substrate is maintained to be separated from the transfer roller.

Description

Substrate Heating Method {SUBSTRATE HEATING METHOD}

TECHNICAL FIELD This invention relates to the board | substrate heating method which heats the board | substrate with which the photosensitive web adheres to predetermined temperature before an adhesion | attachment process.

For example, in a liquid crystal panel substrate, a printed wiring board, and a PDP panel substrate, a photosensitive sheet member (photosensitive web) having a photosensitive material (photosensitive resin) layer is attached to the substrate surface. In the photosensitive sheet body, a photosensitive material layer and a protective film are sequentially stacked on a flexible plastic support.

Therefore, the attachment apparatus used for the attachment of this kind of photosensitive sheet body usually conveys substrates such as glass substrates and resin substrates at predetermined intervals and conveys them, and corresponds to the range of the photosensitive material layer adhered to the substrates. The method of peeling a protective film from the said photosensitive sheet body is employ | adopted.

For example, in the film bonding method and apparatus disclosed in Japanese Patent Laid-Open No. 11-34280, as shown in FIG. 9, the laminated film (photosensitive sheet member) 1a released from the film roll 1 is a guide roll ( It is wound around 2a, 2b), and is extended along the horizontal film conveyance surface. This guide roll 2b is attached with the rotary encoder 3 which outputs the pulse signal of the number according to the conveyance amount of the laminated body film 1a.

The laminate film 1a extending along the horizontal film conveying surface is wound on the suction roll 4 and between the guide roll 2b and the suction roll 4, the half cutter 5 and the cover film. The peeling apparatus 6 is provided.

The half cutter 5 is provided with a pair of disk cutters 5a and 5b. The disk cutters 5a and 5b move along the film width direction of the laminate film 1a so that the cover film (not shown) of the laminate film 1a is integrated with the photosensitive resin layer (not shown) on the back side thereof. Cut with

The cover film peeling apparatus 6 strongly presses the adhesive tape 7a released from the adhesive tape roll 7 to the cover film between the pressing rollers 8a and 8b, and then winds up with the winding roll 9. Thereby, a cover film is peeled from the photosensitive resin layer and wound up by the winding roll 9 with the adhesive tape 7a.

Downstream of the suction roll 4, the lamination rolls 12a and 12b which overlap and compress the laminated film 1a are provided on the upper surfaces of the plurality of substrates 11 which are sequentially and intermittently conveyed by the substrate conveying apparatus 10, have. The support film winding roll 13 is arrange | positioned downstream of these lamination rolls 12a and 12b. The translucent support film (not shown) attached to the board | substrate 11 is wound up by the support film winding roll 13.

By the way, the board | substrate 11 is heated to predetermined temperature previously by the heater 14 arrange | positioned near the board | substrate conveying apparatus 10 just before lamination by the lamination rolls 12a and 12b. For this reason, the some conveyance roller 10a which comprises the board | substrate conveyance apparatus 10 is exposed to the heat from the heater 14. As shown in FIG.

Here, since the rotation of the conveyance roller 10a is stopped when a lamination process is stopped, the side (upper surface) which opposes the heater 14 is heated intensively in this conveyance roller 10a. As a result, the conveying roller 10a is likely to be thermally deformed due to one-side overheating, and when the conveying of the substrate 11 is resumed, whirling occurs, and the conveyance bending of the substrate 11 is caused. There is a problem that damage due to oscillation or stoppage due to a transport trouble is caused.

SUMMARY OF THE INVENTION The present invention solves this kind of problem, and a substrate heating method capable of satisfactorily preventing thermal deformation of the conveying roller without causing the conveying roller to stop in the heating furnace by a simple process for over a set time. It aims to provide.

TECHNICAL FIELD This invention relates to the board | substrate heating method which heats the board | substrate with which the photosensitive web adheres to predetermined temperature before an adhesion | attachment process.

The substrate heating method includes a step of heating the substrate while intermittently conveying or continuously conveying the substrate to a plurality of heating furnaces through a conveying mechanism, and when it is determined that the conveying mechanism is stopped in the heating furnace for over a set time, It has the process of rotating one direction or reciprocating the conveyance roller which comprises the said conveyance mechanism.

In the present invention, the conveying roller may be rotated in one direction or reciprocating, and since the conveying roller in the heating furnace is not heated for longer than a set time in a stopped state, thermal deformation due to one side overheating occurs in the conveying roller. It can be reliably prevented. Thereby, the whirling of a conveyance roller can be prevented by a simple process, and the damage of the said board | substrate by the conveyance bending of a board | substrate, the shaking, or the stop by conveyance trouble etc. can be prevented favorably.

From the description of the following preferred embodiments, which cooperate with the accompanying drawings, the above objects, features, and advantages will become more apparent.

FIG. 1: is a schematic block diagram of the manufacturing apparatus 20 of the photosensitive laminated body to which the board | substrate heating method which concerns on 1st Embodiment of this invention is applied. The manufacturing apparatus 20 thermally transfers the photosensitive resin layers 28 (to be described later) of the long photosensitive webs 22a and 22b in parallel in the manufacturing process of the color filter for the liquid crystal or the organic EL in parallel to the glass substrate 24. Do the work. Hereinafter, the glass substrate 24 on which the photosensitive webs 22a and 22b are laminated is also called the attachment substrate 24a. Each of the photosensitive webs 22a and 22b is set to a predetermined width dimension. For example, the photosensitive web 22a is wider than the photosensitive web 22b.

2 is a cross-sectional view of the photosensitive webs 22a and 22b used in the manufacturing apparatus 20. The photosensitive webs 22a and 22b are basically formed by stacking a flexible base film (support) 26, a photosensitive resin layer (photosensitive material layer) 28, and a protective film 30.

As shown in FIG. 1, the manufacturing apparatus 20 accommodates two photosensitive web rolls 23a and 23b which wound up the photosensitive webs 22a and 22b in roll shape, and each photosensitive web roll is sufficient. Protective film 30 of the first and second web delivery mechanisms 32a and 32b capable of synchronizing the photosensitive webs 22a and 22b from the rolls 23a and 23b and the respective photosensitive webs 22a and 22b. ) And the first and second processing mechanisms 36a and 36b which form the half-cut part 34 which is a boundary position cut | disconnected in the width direction, and the adhesive label 38 which has a non-adhesive part 38a in a part (FIG. 3). And first and second label adhesion mechanisms 40a and 40b for adhering the protective film 30 to each protective film 30.

Downstream of the first and second label bonding mechanisms 40a and 40b, the first and second reservoir mechanisms 42a and 42b for changing the respective photosensitive webs 22a and 22b from tact transfer to continuous transfer and each photosensitive First and second peeling mechanisms 44a and 44b for peeling the protective film 30 from the webs 22a and 22b at predetermined length intervals and attached to the glass substrate 24 in a state of being heated to a predetermined temperature. An attachment mechanism 46 for attaching the substrate heating device 45 to the position and the photosensitive resin layer 28 exposed by the peeling of the protective film 30 integrally and in parallel with the glass substrate 24. Is installed.

First and second detector ports 47a and 47b which directly detect respective half cut portions 34 which are boundary positions of the respective photosensitive webs 22a and 22b near the upstream of the attachment position in the attachment mechanism 46. Is installed.

In the vicinity of the downstream of the first and second web delivery mechanisms 32a and 32b, respective attachments for attaching the rear ends of the photosensitive webs 22a and 22b which have been substantially used and the ends of the photosensitive webs 22a and 22b newly used are attached. Stand 49 is installed. Downstream of the mounting table 49, a film terminal position detector 51 is provided in order to control the shift in the width direction due to the shift in winding of the photosensitive web rolls 23a and 23b.

The first and second processing mechanisms 36a and 36b are roller pairs for calculating the roll diameters of the photosensitive web rolls 23a and 23b that are accommodated in the first and second web delivery mechanisms 32a and 32b. 50) downstream. Each of the first and second processing mechanisms 36a and 36b has a single round blade 52, which travels in the width direction of the photosensitive webs 22a and 22b so that the photosensitive webs 22a And a half cut portion 34 at a predetermined position of 22b).

As shown in FIG. 2, the half cut part 34 needs to cut | disconnect at least the protective film 30, In fact, in order to reliably cut | disconnect this protective film 30, the photosensitive resin layer 28-a base film The cutting depth of the round blade 52 is set to be cut up to 26. The round blade 52 is fixed in a state of being not rotated to move in the width direction of the photosensitive webs 22a and 22b to form a half cut portion 34, or on the photosensitive webs 22a and 22b. A method of forming the half cut portion 34 by moving in the width direction while rotating without slipping is employed.

Moreover, the 1st and 2nd processing mechanisms 36a and 36b are respectively provided in the conveyance direction (arrow A direction) of the photosensitive webs 22a and 22b by two distances, and the remaining part 30b is provided, respectively. Two half cut portions 34 may be formed at the same time.

The half cut portions 34 are set at positions, for example, 10 mm each into the glass substrates 24 on both sides. The portion sandwiched by the half cut portions 34 between the glass substrates 24 serves as a mask when the photosensitive resin layer 28 is bonded to the glass substrate 24 in an edge shape in the attachment mechanism 46 described later. To function.

Since the first and second label adhesive mechanisms 40a and 40b leave the remaining portions 30b of the protective film 30 corresponding to the glass substrates 24, the peeling portions 30aa and the peeling sides rear of the peeling side front. The adhesive label 38 is connected to connect the peeled portion 30ab. As shown in FIG. 2, the protective film 30 makes the part peeled first with the remaining part 30b between the front peeling part 30aa, and the part peeled later becomes the back peeling part 30ab.

As shown in FIG. 3, the adhesive label 38 is comprised in elongate shape, for example, is formed from the same resin material as the protective film 30. As shown in FIG. The adhesive label 38 has a non-adhesive portion (including microadhesion) 38a to which a pressure-sensitive adhesive is not applied, and both sides of the non-adhesive portion 38a, that is, the adhesive label 38 It has a 1st adhesion part 38b adhering to the peeling part 30aa of the front part at both ends of a longitudinal direction, and the 2nd adhesion part 38c adhering to the peeling part 30ab of the back.

As shown in Fig. 1, the first and second label adhesion mechanisms 40a and 40b each include adsorption pads 54a to 54g that can be attached at a distance of up to seven adhesive labels 38 at predetermined intervals. At the attachment position of the adhesive label 38 by the suction pads 54a to 54g, a pedestal 56 for holding the photosensitive webs 22a and 22b from below is provided to be liftable.

The first and second reservoir mechanisms 42a and 42b absorb the speed difference between the tact conveyance of the upstream photosensitive webs 22a and 22b and the continuous conveyance of the downstream photosensitive webs 22a and 22b. A swingable dancer roller 60 is provided. In the 2nd reservoir mechanism 42b, each photosensitive web 22a, 22b sent out from the 1st and 2nd web delivery mechanism 32a, 32b adjusts each conveyance path length to the attachment mechanism 46 equally. The dancer roller 61 for this purpose is provided.

The first and second peeling mechanisms 44a and 44b disposed downstream of the first and second reservoir mechanisms 42a and 42b respectively block the tension fluctuations on the outgoing side of the photosensitive webs 22a and 22b, respectively. A suction drum 62 is provided to stabilize the tension of the device. In the vicinity of each suction drum 62, a peeling roller 63 is disposed, and the protective film 30 peeled from the photosensitive webs 22a and 22b through the peeling roller 63 is excluded from the remaining portion 30b. And it is wound up by the protective film winding part 64, respectively.

On the downstream side of the first and second peeling mechanisms 44a and 44b, first and second tension control mechanisms 66a and 66b, which can apply tension to the photosensitive webs 22a and 22b, are provided. The first and second tension control mechanisms 66a and 66b have cylinders 68, respectively, and the tension dancers 70 are oscillated and displaced under the driving action of the cylinders 68, respectively, so that each tension dancer 70 slides. The tension of the photosensitive webs 22a and 22b in contact is adjustable.

The first and second detector ports 47a and 47b include photoelectric sensors 72a and 72b such as laser sensors and photo sensors, and the photoelectric sensors 72a and 72b have a wedge shape of the half cut portion 34. The change by the groove-shaped part of the groove | channel, the thickness difference of the protective film 30, or a combination thereof is detected directly, and this detection signal is made into a boundary position signal. The photoelectric sensors 72a and 72b are arranged opposite to the backup rollers 73a and 73b. Instead of the photoelectric sensors 72a and 72b, an image inspection means such as a non-contact displacement meter or a CCD camera may be used. In addition, you may arrange | position a CCD camera in the position which does not oppose the backup roller 73a, 73b.

As shown in FIG. 4, the substrate heating apparatus 45 is provided with the conveyance mechanism 74 for conveying the glass substrate 24 to the arrow C direction, and this conveyance mechanism 74 is the 1st heating furnace mentioned later Each of the several conveyance rollers 76a-76e arrange | positioned in the arrow C direction corresponding to 82- fifth heating furnace 90 is provided. Each conveying roller 76a, 76b, 76c, 76d, and 76e is independently driven to rotate through a separate rotation drive source (for example, a motor).

The conveying rollers 76a to 76e are, for example, a plurality of stainless steel roller shafts 77a and a plurality of rollers 77a that are externally mounted on the roller shaft 77a and rotatably integrated with the roller shaft 77a by a predetermined frictional force. Resin, for example, ring 77b made of PEEK (polyether ether ketone resin). The roller shaft 77a is set to 48 mm in diameter, while the ring 77b is set to 70 mm in diameter.

On the upstream side of the conveyance mechanism 74 in the direction of the arrow C, an accommodation portion 78 for accommodating the glass substrate 24 is provided, and the accommodation portion 78 is a swing table for turning the glass substrate 24 ( 80) is installed.

On the downstream side of the receiving portion 78, the first to fifth heating furnaces 82, 84, 86, 88 and 90 are sequentially arranged. The first heating furnace 82 constitutes a high temperature furnace, the second heating furnace 84 constitutes a temperature raising furnace, the third heating furnace 86 constitutes a temperature raising furnace, and the fourth heating furnace 88 The heat retention furnace and the positioning mechanism 92 are comprised, and the 5th heating furnace 90 comprises a heat retention furnace and a stop mechanism (not shown).

The 1st heater 94a-the 5th heater 94e are provided in the 1st heating furnace 82-the 5th heating furnace 90. In the first heating furnace 82, the furnace atmosphere temperature can be heated to 100 ° C. to 160 ° C. through the first heater 94a, and in the second heating furnace 84, the furnace atmosphere is through the second heater 94b. The temperature can be heated to 100 ° C to 150 ° C.

In the third heating furnace 86, the furnace atmosphere temperature can be heated to 100 ° C to 150 ° C through the third heater 94c, and in the fourth heating furnace 88, the furnace atmosphere is through the fourth heater 94d. The temperature can be heated to 100 ° C to 150 ° C, and the furnace atmosphere temperature can be heated to 100 ° C to 150 ° C through the fifth heater 94e in the fifth heating furnace 90.

The first heating furnaces 82 to the fifth heating furnace 90 are each provided with one or more temperature sensors 95a to 95e for detecting respective ambient temperatures. In addition, it is preferable that the glass substrate 24 is heated in the range of 90 degreeC-130 degreeC at the time of lamination.

As shown in FIG. 5, the positioning mechanism 92 includes a cylinder 98 fixed on the mount 96, and the lifting platform 100 is fixed to the rod 98a extending upward from the cylinder 98. do. The lifting platform 100 is configured to be long in the width direction of the glass substrate 24 (in the direction of the arrow D intersecting the conveying direction), and the support table 104 is provided on the lifting platform 100 through guide bars 102a and 102b. Is installed.

The support base 104 is configured to be elongated in the direction of an arrow D, and a plurality of positioning members 106 such as a roller, for example, which can hold the glass substrate 24 by frictional resistance on the support 104, It is arranged and arranged in the direction of the arrow (D).

Width adjusting rollers 108a and 108b are installed at both ends of the platform 100 so as to be able to move forward and backward in the direction of the arrow D through the retraction mechanisms 110a and 110b. The retraction mechanisms 110a and 110b have motors 112a and 112b facing each other, and the nut parts 116a and 116b are screwed to the screw shafts 114a and 114b connected to the motors 112a and 112b. The nut parts 116a and 116b are fixed to the movable pillars 118a and 118b, and the width adjustment rollers 108a and 108b are rotatably mounted on the upper ends of the movable pillars 118a and 118b.

The substrate heating device 45 constantly monitors the temperature of the glass substrate 24, and in the case of abnormality, stops or alarms the conveying rollers 76a to 76e, and transmits abnormality information so that the strange glass substrate 24 is removed. It can be used for NG emission in post process, quality control or production control. In addition, in the conveyance mechanism 74, the air floating plate which is not shown in figure is provided, and the glass substrate 24 may be floated, and the structure which conveys it to the arrow C direction may be employ | adopted.

As shown in FIG. 1, the substrate stocker 120 in which the some glass substrate 24 is accommodated is provided upstream of the board | substrate heating apparatus 45. As shown in FIG. Each glass substrate 24 accommodated in the substrate stocker 120 is adsorbed by the suction pad 124 provided on the hand portion 122a of the robot 122, and is taken out to be carried in the receiving portion 78.

The attachment mechanism 46 is provided above and below, and has rubber rollers 130a and 130b heated to a predetermined temperature. The backup rollers 132a and 132b are in sliding contact with the rubber rollers 130a and 130b, and the backup rollers 132b are formed by the pressure rollers 134a and 134b constituting the roller clamp portion 133. It is pressed to 130b) side.

In the vicinity of the rubber roller 130a, a contact preventing roller 136 for preventing the photosensitive webs 22a and 22b from contacting the rubber roller 130a is provided to be movable. In the upstream vicinity of the attachment mechanism 46, the preheating part 137 for preheating the photosensitive webs 22a and 22b to predetermined temperature is provided in advance. This preliminary heating part 137 is provided with heating means, such as an infrared bar heater, for example.

The glass substrate 24 is conveyed from the attachment mechanism 46 to the arrow C direction via the conveyance path 138. The film conveyance rollers 140a and 140b and the substrate conveyance roller 142 are provided in this conveyance path 138. It is preferable that the space | interval of the rubber rollers 130a and 130b and the board | substrate conveyance roller 142 is set to the length of one sheet or less of the glass substrate 24. FIG.

Downstream of the attachment mechanism 46, a cooling mechanism 144 and a base automatic peeling mechanism 146 are provided. The base automatic peeling mechanism 146 continuously peels the long base film 26 to which the glass substrates 24 are attached at intervals of a predetermined interval. The free peeling portion 148 and the peeling roller 150 are wound together. The shaft 152 is provided. It is preferable to perform feedback control of tension by winding-up shaft 152 to torque-control at the time of driving and to give tension to the base film 26, for example, by providing a tension detector (not shown) in the peeling roller 150. FIG. Do.

The free peeling unit 148 includes a peeling bar 156, and the peeling bar 156 can be lifted between the glass substrates 24. Moreover, by reheating the film surface to about 30 degreeC-about 120 degreeC in front of the peeling roller 150, the peeling of the color material layer at the time of peeling is inhibited, and a high quality laminated surface can be obtained.

Downstream of the base automatic peeling mechanism 146, a measuring device 158 for measuring the area position of the photosensitive resin layer 28 actually attached to the glass substrate 24 is provided. The measuring device 158 includes, for example, a camera 160 such as a CCD, and the camera 160 is provided to photograph the glass substrate 24 having the photosensitive resin layer 28 attached thereto.

Downstream of the base automatic peeling mechanism 146, there is provided a photosensitive laminate stocker 190 in which a plurality of photosensitive laminates 208 are accommodated. The photosensitive laminate 208 in which the base film 26 and the remaining portion 30b are peeled off from the attachment substrate 24a by the base automatic peeling mechanism 146 is provided on the suction portion 192a of the hand portion 192a of the robot 192. It adsorb | sucks by 194, it is taken out, and is accommodated in the photosensitive laminated body stocker 190. FIG.

In the manufacturing apparatus 20, the first and second web feeding mechanisms 32a and 32b, the first and second processing mechanisms 36a and 36b, the first and second label bonding mechanisms 40a and 40b, and the first and second The second reservoir mechanisms 42a and 42b, the first and second peeling mechanisms 44a and 44b, the first and second tension controller spheres 66a and 66b and the first and second detector spheres 47a and 47b are Although disposed above the attachment mechanism 46, the attachment mechanism (from the first and second web delivery mechanisms 32a and 32b to the first and second detector ports 47a and 47b is opposite to the attachment mechanism 46). 46, the upper and lower sides of the photosensitive webs 22a and 22b are reversed so that the photosensitive resin layer 28 may be attached to the lower side of the glass substrate 24, and the whole manufacturing apparatus 20 may be linear. You may comprise in.

As shown in FIG. 1, the manufacturing apparatus 20 is controlled in its entirety through the lamination process control unit 200, and for example, a laminate control unit 202 and a substrate heating control unit for each functional unit of the manufacturing apparatus 20. 204, the base peeling control part 206, etc. are provided and they are connected by the in-process network. The lamination process control unit 200 is connected to a factory network and performs information processing for production such as production management or operation management of instruction information (condition setting or production information) from a factory CPU (not shown).

The substrate heating control unit 204 accommodates the glass substrate 24 from the upstream process, heats the glass substrate 24 to a desired temperature based on the detection signal from the temperature sensors 95a to 95e, and the glass. When the conveyance of the board | substrate 24 is stopped, the conveyance mechanism 74 is drive-controlled as mentioned later.

The laminate control unit 202 is a master of the whole process, which controls each functional unit, and the half cut portion 34 of the photosensitive webs 22a and 22b detected by the first and second detector ports 47a and 47b. Based on the positional information, the control mechanism is configured to control each boundary position at the attachment position, the relative position of the glass substrate 24, and the relative position of each boundary position.

The base peeling control unit 206 controls the operation of peeling the base film 26 from the attachment substrate 24a supplied from the attachment mechanism 46 and discharging the photosensitive laminate 208 in a downstream process. Handling information of the attachment substrate 24a and the photosensitive laminate 208 is controlled.

The manufacturing apparatus 20 is partitioned into the first clean room 212a and the second clean room 212b through the partition wall 210. The first clean room 212a accommodates from the first and second web delivery mechanisms 32a and 32b to the first and second tension control mechanisms 66a and 66b, and further includes a second clean room 212b in the first clean room 212a. After the first and second detector ports 47a and 47b are accommodated. The first clean room 212a and the second clean room 212b communicate with each other through the through part 114.

Operation of the manufacturing apparatus 20 comprised as mentioned above is demonstrated below with respect to the board | substrate heating method which concerns on this invention.

First, the photosensitive webs 22a and 22b are sent out from the photosensitive web rolls 23a and 23b attached to the first and second web delivery mechanisms 32a and 32b. The photosensitive webs 22a and 22b are conveyed to the first and second processing mechanisms 36a and 36b.

In the first and second processing mechanisms 36a and 36b, the round blade 52 moves in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are moved from the protective film 30 to the photosensitive number. The half cut portion 34 is formed by cutting to the base layers 28 to the base film 26 (see Fig. 2). In addition, the photosensitive webs 22a and 22b are stopped after being conveyed in the direction of the arrow A corresponding to the dimensions of the remaining portion 30b of the protective film 30 as shown in FIG. Under action, a half cut portion 34 is formed. As a result, the front peeling part 30aa and the rear peeling part 30ab are formed in the photosensitive webs 22a and 22b with the remaining part 30b interposed therebetween (see Fig. 2).

Subsequently, each photosensitive web 22a, 22b is conveyed to the 1st and 2nd label adhesion mechanism 40a, 40b, and the predetermined attachment part of the protective film 30 is arrange | positioned on the base 56. As shown in FIG. In the first and second label bonding mechanisms 40a and 40b, a predetermined number of adhesive labels 38 are adsorbed and held by the suction pads 54b to 54g, and each adhesive label 38 remains in the protective film 30. Over the part 30b, it adheres integrally to the front peeling part 30aa and the rear peeling part 30ab (refer FIG. 3).

For example, the photosensitive webs 22a and 22b to which the seven adhesive labels 38 are adhered are prevented from being tensioned on the feeding side through the first and second reservoir mechanisms 42a and 42b, as shown in FIG. It is conveyed to the 1st and 2nd peeling mechanism 44a, 44b continuously. In the first and second peeling mechanisms 44a and 44b, as shown in FIG. 6, the base film 26 of the photosensitive webs 22a and 22b is adsorbed and held on the suction drum 62, and the protective film 30 is It is peeled off from the photosensitive webs 22a and 22b, leaving the remaining portion 30b. The protective film 30 is peeled off through the peeling roller 63 and wound around the protective film winding 64 (see FIG. 1).

Under the action of the first and second peeling mechanisms 44a and 44b, after the protective film 30 is peeled off from the base film 26 leaving the remaining portion 30b, the photosensitive webs 22a and 22b are formed into the first and second portions. Tension adjustment is performed by the tension control mechanisms 66a and 66b, and the half cut portion 34 is detected by the photoelectric sensors 72a and 72b in the first and second detector ports 47a and 47b. .

Each photosensitive web 22a, 22b is quantitatively conveyed to the attachment mechanism 46 under the rotation action of the film conveying rollers 90a, 90b based on the detection information of the half cut part 34. As shown in FIG.

On the other hand, in the board | substrate heating apparatus 45, the furnace atmosphere temperature in the 1st-5th heating furnaces 82-90 is set corresponding to the lamination temperature in the attachment mechanism 46 as shown in FIG. For example, when lamination temperature is 110 degreeC, in the 1st heating furnace 82, the 2nd heating furnace 84, the 3rd heating furnace 86, the 4th heating furnace 88, and the 5th heating furnace 90 The atmosphere temperature in a furnace is set to around 150 ° C, 140 ° C, 135 ° C, 135 ° C, and 135 ° C, respectively. In addition, in the glass substrate 24, in order to maintain the quality of the surface adhesion improving agent apply | coated on the surface, an upper limit temperature is set to 130 degreeC.

Thus, the robot 122 grips the glass substrate 24 accommodated in the substrate stocker 120 and carries the glass substrate 24 into the receiving portion 78. In the accommodating part 78, the glass substrate 24 is rotated to a desired posture via the revolving table 80, and it is tact conveyed from the accommodating part 78 to the 1st heating furnace 82. FIG.

In the first heating furnace 82, the glass substrate 24 is rapidly heated under the heating action of the first heater 94a, and then the glass substrate is passed through the conveying roller 76a constituting the conveying mechanism 74. (24) is sent to the second heating furnace (84). On the other hand, the new glass substrate 24 carried in the receiving portion 78 is sent to the first heating furnace 82.

After the glass substrate 24 is heated up in the second heating furnace 84 through the second heater 94b, the glass substrate 24 is made of the transfer roller 76b constituting the conveying mechanism 74. It is carried in 3 heating furnaces 86. The glass substrate 24 heated up by this 3rd heating furnace 86 is sent to the 4th heating furnace 88 via the conveyance roller 76c which comprises the conveyance mechanism 74, and this 4th heating furnace 88 ), The temperature raising processing and the positioning processing are performed.

The positioning mechanism 92 is provided in the 4th heating furnace 88, and as shown in FIG. 5, the width adjustment rollers 108a and 108b are mutually arrange | positioned in the direction of an arrow D, as shown by a solid line. In this state, the lifting platform 100 rises under the driving action of the cylinder 98.

The lifting platform 100 is provided with a support 104 through guide bars 102a and 102b, and a plurality of positioning members 106 are arranged on the support 104. Therefore, the positioning member 106 supports the glass substrate 24 disposed on the conveying roller 76d, and pushes the glass substrate 24 upward above the conveying roller 76d.

Subsequently, the motors 112a and 112b constituting the retraction mechanisms 110a and 110b are driven, and the movable struts 118a and 118b are close to each other through the screw shafts 114a and 114b and the nut parts 116a and 116b. Displacement in the direction. For this reason, the width adjusting rollers 108a and 108b mounted on the upper ends of the movable struts 118a and 118b move in a direction close to each other, so that the glass substrate 24 supported on the positioning member 106 can be moved. The glass substrate 24 is positioned in contact with both ends in the direction of the arrow D. FIG.

After the positioning of the glass substrate 24 is performed, the width adjusting rollers 108a and 108b are slightly separated from both ends of the glass substrate 24, and then the lifting platform 100 is lowered through the cylinder 98. Then, the glass substrate 24 supported on the positioning member 106 is passed from the positioning member 106 to the plurality of conveying rollers 76d, while the width adjusting rollers 108a and 108b move forward and backward. It moves in the direction away from each other via the mechanism (110a, 110b). The width adjusting rollers 108a and 108b may be width-adjusted in a state slightly separated from the width of the glass substrate 24.

As a result, when the glass substrate 24 is in contact with the conveying roller 76d and the lowering is stopped, the width adjusting rollers 108a and 108b are in contact with the glass substrate 24 so that dust is generated and the glass substrate 24 Damage can be prevented.

In addition, the positioning member 106 is formed of a material that generates frictional resistance. Therefore, when the positioning member 106 is lowered, it is possible to satisfactorily prevent the positional shift from occurring in the glass substrate 24.

The glass substrate 24 sent to the conveyance roller 76d is sent to the 5th heating furnace 90 under the rotation effect of this conveyance roller 76d, and heat-retaining is processed and conveyed to the attachment position in the state heated at the predetermined temperature. . The glass substrate 24 is once disposed between the rubber rollers 130a and 130b corresponding to the attachment portion of the photosensitive resin layer 28 of the photosensitive webs 22a and 22b in parallel.

In this state, the glass substrate 24 is sandwiched between the rubber rollers 130a and 130b at a predetermined press pressure by raising the backup roller 132b and the rubber roller 130b. In addition, the photosensitive resin layers 28 in parallel are transferred (laminated) to the glass substrate 24 under the rotational action of the rubber roller 130a.

Here, as lamination conditions, the speed is 1.0 m / min-10.0 m / min, the temperature of the rubber rollers 130a and 130b is 80 degreeC-150 degreeC, and the rubber hardness of the said rubber rollers 130a and 130b is 40 degreeC- 90 degree | times, the press pressure (linear pressure) of the said rubber rollers 130a and 130b is 50 N / cm-400 N / cm.

When the lamination of one sheet of the photosensitive webs 22a and 22b is finished on the glass substrate 24 through the rubber rollers 130a and 130b, the rotation of the rubber roller 130a is stopped while the photosensitive webs 22a and The glass substrate 24, that is, the attachment substrate 24a, on which 22b) is laminated, is clamped by the substrate conveying roller 142.

Then, the rubber roller 130b is retracted in the direction away from the rubber roller 130a, the clamp is released, the rotation of the substrate transfer roller 142 is started, and the attachment substrate 24a is moved in the direction of the arrow C. Quantitatively conveyance and the position between board | substrates of the photosensitive webs 22a and 22b move to the predetermined position of the lower vicinity of the rubber roller 130a. On the other hand, the next glass substrate 24 is conveyed toward the attachment position via the substrate heating device 45.

When the front end of the next glass substrate 24 is disposed between the rubber rollers 130a and 130b, the rubber roller 130b is raised to the next glass substrate 24 by the rubber rollers 130a and 130b. And photosensitive webs 22a and 22b are clamped. Then, the laminate is started under the rotational action of the rubber rollers 130a and 130b and the substrate conveying roller 142, and the substrate 24a is conveyed in the direction of the arrow C. FIG.

At that time, as shown in Fig. 7, the end portions of the attached substrates 24a are covered by the remaining portions 30b. Therefore, when the photosensitive resin layer 28 is transferred to the glass substrate 24, the rubber rollers 130a and 130b are not polluted by the photosensitive resin layer 28.

The attachment substrate 24a laminated by the attachment mechanism 46 is cooled through the cooling mechanism 144 and then transferred to the free peeling part 148. In this free peeling part 148, the peeling bar 156 raises, and the protective film 30 can be peeled from the rear end and the front end of the adjacent glass substrate 24. As shown in FIG. Subsequently, in the base automatic peeling mechanism 146, the base film 26 is continuously wound from the attachment substrate 24a under the rotational action of the winding shaft 152.

The attachment substrate 24a on which the base film 26 has been peeled off is disposed at an inspection station corresponding to the measuring device 158. In this inspection station, the image of the glass substrate 24 and the photosensitive resin layer 28 is input by the camera 160 in the state in which the glass substrate 24 was fixed by positioning. Then, by performing image processing, the attachment position is calculated and the attachment state is inspected.

By the way, 1st heating which comprises the board | substrate heating apparatus 45 is carried out, for example, when performing the operation of exchanging the photosensitive web rolls 23a and 23b and the operation of separating the base film 26 wound around the winding shaft 152. The glass substrate 24 stays in the furnace 82-the 5th heating furnace 90, and the drive of the conveyance rollers 76a-76e is stopped.

Thus, for example, when it is determined that the conveying roller 76a in the first heating furnace 82 is stopped for longer than a set time, the conveying roller 76a is driven to rotate. At that time, when the glass substrate 24 is mounted on the conveying roller 76a, the conveying rollers 76a are reciprocally rotated to reciprocate the glass substrate 24 in the first heating furnace 82. (See Figure 4).

Specifically, each conveying roller 76a is rotated by 0.5 to 1.5 rotations, preferably one or more rotations, respectively, in the clockwise direction (forward axis) and counterclockwise direction (reverse axis).

On the other hand, when the glass substrate 24 does not exist on the conveyance roller 76a, the said conveyance roller 76a is rotated continuously in one direction. Therefore, the conveyance roller 76a in the 1st heating furnace 82 does not heat from upper direction through the 1st heater 94a beyond the preset time in the state to which rotation was stopped. For this reason, it can reliably prevent the upper side of the conveyance roller 76a from overheating on one side, and thermal deformation occurs.

Thereby, only one direction rotation or reciprocation rotation of the conveyance roller 76a may be carried out, and the whipping of the conveyance roller 76a can be prevented by a simple process. Accordingly, the effect that the glass substrate 24 can be satisfactorily prevented from being bent or damaged due to swinging or stopping due to a transport trouble can be obtained.

Moreover, also in the 2nd heating furnace 84-the 4th heating furnace 88, similarly to the said 1st heating furnace 82, the said conveying roller 76b is made by rotating conveying rollers 76b-76d by one direction or reciprocating rotation. -76d) can be prevented from being heated for more than a set time in a state where rotation is stopped.

In addition, in the fifth heating furnace 90, as shown in FIG. 5, the positioning member 106 that can be lifted and lowered through the cylinder 98 is provided. For this reason, the glass substrate 24 on the conveyance roller 76e is sent to this positioning member 106 by raising the positioning member 106, and then rotates continuously in one direction. Thereby, the conveyance roller 76e does not heat over a set time in the stopped state, and the same effect as the conveyance roller 76a is obtained.

By the way, by the apparatus trouble, the cleaning of the rubber rollers 130a and 130b, the exchange of the rubber rollers 130a and 130b, or the trouble of the upstream and downstream processes, etc., the laminating treatment is stopped for a predetermined time longer than the set time, for example, for an hour or more. The first heater 94a to the fifth heater 94e constituting the substrate heating apparatus 45 are destroyed. When the lamination process is resumed, the conveying rollers 76a to constituting the conveying mechanism 74 while biasing the first heaters 4a to 5th heater 94e before starting the conveyance of the glass substrate 24. The process of heating the inside of the 1st heating furnace 82-the 5th heating furnace 90 to predetermined | prescribed temperature, respectively, once 76e) is rotated in one direction or reciprocating is performed.

Therefore, when starting the conveyance of the glass substrate 24, each conveyance roller 76a-76e does not cause thermal denaturation by single side overheating. Thereby, the glass substrate 24 can be conveyed favorably, and there exists an advantage that lamination process is performed efficiently.

Moreover, although the 1st photosensitive web roll 23a, 23b is used in 1st Embodiment, it is not limited to this, You may employ | adopt one photosensitive web roll or three or more photosensitive web rolls. The same applies to the second embodiment described below.

8 is a schematic configuration diagram of an apparatus 300 for manufacturing a photosensitive laminate according to a second embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same component as the manufacturing apparatus 20 which concerns on 1st Embodiment, and the detailed description is abbreviate | omitted.

The manufacturing apparatus 300 is provided downstream of the attachment mechanism 46, and is provided with the board-to-board web cutter tool 48 which can cut | disconnect the photosensitive webs 22a and 22b between each glass substrate 24 integrally. .

In the manufacturing apparatus 300 comprised in this way, like the said 1st Embodiment, the adhesion board 24a laminated by the attachment mechanism 46 is conveyed in the arrow C direction. Then, when the attachment substrate 24a reaches a position corresponding to the inter-substrate web cutting tool 48, the inter-substrate web cutting tool 48 is in the direction of the arrow C at the same conveyance speed as the attaching substrate 24a. While moving to, the two photosensitive webs 22a and 22b are integrally cut between the attachment substrates 24a.

After this cutting, the inter-substrate web cutting tool 48 is returned to a predetermined standby position, while the base film 26 and the remaining portion 30b are sequentially peeled off (sheet peeling) on the attached substrate 24a so that the photosensitive laminate is 208 is manufactured.

1 is a schematic configuration diagram of an apparatus for manufacturing a photosensitive laminate to which the substrate heating method according to the first embodiment is applied.

2 is a cross-sectional view of an elongate photosensitive web used in the manufacturing apparatus.

It is explanatory drawing of the state which the adhesive label adhere | attached on the said elongate photosensitive web.

It is a schematic explanatory drawing of the board | substrate heating apparatus which comprises the said manufacturing apparatus.

It is explanatory drawing of the 5th heating furnace which comprises the said substrate heating apparatus.

It is explanatory drawing at the time of peeling a protective film from the said elongate photosensitive web.

7 is an explanatory diagram of a state in which a photosensitive resin layer is transferred onto a glass substrate.

It is a schematic block diagram of the manufacturing apparatus of the photosensitive laminated body which concerns on 2nd Embodiment of this invention.

It is a schematic block diagram of the film bonding apparatus of patent document 1.

Claims (4)

As a substrate heating method in which the substrate 24 to which the photosensitive web 22a is attached is heated to a predetermined temperature in advance before the attachment process: Heating the substrate (24) while intermittently conveying or continuously conveying the substrate (24) to a plurality of heating furnaces (80 to 90) through a conveying mechanism (74); And When it is determined that the conveyance mechanism 74 stops in the heating furnace 82 over a set time, the conveyance roller 76a constituting the conveyance mechanism 74 is rotated in one direction or reciprocally. A substrate heating method, characterized in that. 2. The substrate heating method according to claim 1, wherein the substrate (24) is held apart from the conveying roller (76a) when at least the conveying roller (76a) is rotated in one direction. 2. The substrate heating method according to claim 1, wherein the conveying roller (76a) is reciprocally rotated by 0.5 rotations or more in forward and reverse directions. The process according to claim 1, further comprising: once stopping the heat treatment of the substrate (24) when the conveyance mechanism (74) stops in the heating furnace (82) for a predetermined time longer than the set time; And And a step of rotating the conveying roller (76a) in one direction or reciprocating before starting the conveyance of the substrate (24) when the heating of the substrate (24) is resumed.

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