JP2008105354A - Substrate heating method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To allow thermal deformation of a carrier roller to be excellently prevented by a simple process, without stopping the carrier roller in a heating furnace exceeding a set time. <P>SOLUTION: A substrate heating apparatus 45 comprises a first heating furnace 82 to a fifth heating furnace 90, and a carrier mechanism 74 for carrying a glass substrate 24 to the first heating furnace 82 to the fifth heating furnace 90. The carrier mechanism 74 comprises a plurality of carrier rollers 76a placed in the first heating furnace 82, and prevents one side overheat of the carrier rollers 76a by rotating the carrier rollers 76a in one direction or reciprocatingly when it is determined that the carrier rollers 76a might be stopped exceeding the set time. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate heating method in which a substrate to which a photosensitive web is attached is heated in advance to a predetermined temperature before an attaching process.

  For example, a liquid crystal panel substrate, a printed wiring substrate, and a PDP panel substrate are configured by attaching a photosensitive sheet (photosensitive web) having a photosensitive material (photosensitive resin) layer to the substrate surface. In the photosensitive sheet body, a photosensitive material layer and a protective film are sequentially laminated on a flexible plastic support.

  In view of this, a pasting apparatus used for pasting this type of photosensitive sheet body usually transports substrates such as a glass substrate and a resin substrate spaced apart from each other by a predetermined interval, and also a photosensitive unit pasted on the substrate. In accordance with the range of the material layer, a method of peeling the protective film from the photosensitive sheet body is adopted.

  For example, in the film sticking method and apparatus disclosed in Patent Document 1, as shown in FIG. 9, a laminated film (photosensitive sheet) 1a fed out from a film roll 1 is wound around guide rolls 2a and 2b. And extend along a horizontal film transport surface. A rotary encoder 3 that outputs a number of pulse signals corresponding to the feed amount of the laminated film 1a is attached to the guide roll 2b.

  A laminate film 1a extending along a horizontal film transport surface is wound around a suction roll 4, and a half cutter 5 and a cover film peeling device 6 are interposed between the guide roll 2b and the suction roll 4. And are provided.

  The half cutter 5 includes a pair of disk cutters 5a and 5b. The disc cutters 5a and 5b move along the film width direction of the laminated film 1a, so that the cover film (not shown) of the laminated film 1a is replaced with a photosensitive resin layer (not shown) on the back side thereof. Cut it together.

  The cover film peeling apparatus 6 winds the adhesive tape 7 a fed out from the adhesive tape roll 7 strongly to the cover film between the pressing rolls 8 a and 8 b, and then winds it by the take-up roll 9. As a result, the cover film is peeled off from the photosensitive resin layer and wound around the winding roll 9 together with the adhesive tape 7a.

  Downstream of the suction roll 4, lamination rolls 12 a and 12 b are provided for laminating and laminating the laminate film 1 a on the upper surfaces of a plurality of substrates 11 that are sequentially and intermittently conveyed by the substrate conveying device 10. . A support film take-up roll 13 is disposed downstream of the lamination rolls 12a and 12b. A translucent support film (not shown) attached to the substrate 11 is taken up by a support film take-up roll 13.

Japanese Patent Laid-Open No. 11-34280 (FIG. 1)

  By the way, the substrate 11 is heated in advance to a predetermined temperature by a heater 14 disposed in the vicinity of the substrate transport apparatus 10 immediately before lamination by the lamination rolls 12a and 12b. For this reason, the plurality of transport rollers 10 a constituting the substrate transport apparatus 10 are exposed to heat from the heater 14.

  Here, when the laminating process is stopped, the rotation of the transport roller 10a is stopped, so that the side (upper surface) of the transport roller 10a facing the heater 14 is heated intensively. As a result, the transport roller 10a is likely to be thermally deformed due to one-side overheating, causing a swing when the transport of the substrate 11 is resumed, causing damage due to the transport bend or fluttering of the substrate 11, or a stop due to transport trouble, etc. There is a problem of doing.

  The present invention solves this type of problem, and in a simple process, the conveyance roller does not stop for a set time in the heating furnace, and it is possible to satisfactorily prevent thermal deformation of the conveyance roller. An object is to provide a possible substrate heating method.

  The present invention relates to a substrate heating method in which a substrate to which a photosensitive web is attached is heated in advance to a predetermined temperature before the attaching process.

  The substrate heating method includes a step of heating the substrate while intermittently or continuously transporting the substrate to a plurality of heating furnaces via a transport mechanism, and the transport mechanism is stopped for a set time in the heating furnace. If it is determined, the method includes a step of rotating the transport roller constituting the transport mechanism in one direction or reciprocating.

  In the substrate heating method, it is preferable that the substrate is held away from the transport roller at least when the transport roller is rotated in one direction.

  Further, in the substrate heating method, it is preferable that the transport roller is reciprocated by 0.5 or more rotations in both forward and reverse directions.

  Furthermore, in the substrate heating method, when the transport mechanism stops in the heating furnace beyond a certain time longer than a set time, the step of temporarily stopping the heating process of the substrate, and when restarting the heating of the substrate, It is preferable to include a step of rotating the transport roller in one direction or reciprocating before starting the transport of the substrate.

  In the present invention, the conveyance roller only needs to be rotated in one direction or reciprocating, and the conveyance roller in the heating furnace is not heated beyond the set time in a stopped state. The occurrence of thermal deformation can be reliably prevented. Accordingly, it is possible to prevent the conveyance roller from swinging and to prevent the substrate from being damaged due to bending or flapping of the substrate, or from stopping due to a conveyance trouble, by a simple process.

  FIG. 1 is a schematic configuration diagram of a photosensitive laminate manufacturing apparatus 20 to which a substrate heating method according to a first embodiment of the present invention is applied. In the manufacturing process of the color filter for liquid crystal or organic EL, the manufacturing apparatus 20 performs an operation of thermally transferring the photosensitive resin layers 28 (described later) of the long photosensitive webs 22a and 22b in parallel to the glass substrate 24. Do. Hereinafter, the glass substrate 24 on which the photosensitive webs 22a and 22b are laminated is also referred to as a bonded substrate 24a. The photosensitive webs 22a and 22b are each set to a predetermined width dimension. For example, the photosensitive web 22a is configured to be wider than the photosensitive web 22b.

  FIG. 2 is a cross-sectional view of the photosensitive webs 22 a and 22 b used in the manufacturing apparatus 20. The photosensitive webs 22a and 22b are basically configured by laminating a flexible base film (support) 26, a photosensitive resin layer (photosensitive material layer) 28, and a protective film 30.

  As shown in FIG. 1, the manufacturing apparatus 20 accommodates two (or more than two) photosensitive web rolls 23a and 23b obtained by winding photosensitive webs 22a and 22b in a roll shape. Width of the first and second web feed mechanisms 32a and 32b capable of synchronously feeding the photosensitive webs 22a and 22b from the photosensitive web rolls 23a and 23b, and the protective film 30 of each of the fed photosensitive webs 22a and 22b. Each protective film 30 includes first and second processing mechanisms 36a and 36b that form a half-cut portion 34 that is a boundary position that can be cut in the direction, and an adhesive label 38 (see FIG. 3) that partially includes a non-adhesive portion 38a. First and second label adhesion mechanisms 40a and 40b to be adhered to each other.

  Downstream of the first and second label adhering mechanisms 40a and 40b are first and second reservoir mechanisms 42a and 42b for changing the photosensitive webs 22a and 22b from tact feed to continuous feed, and the respective photosensitive webs. First and second peeling mechanisms 44a and 44b for peeling the protective film 30 from the 22a and 22b at predetermined length intervals, and a substrate heating device 45 for transporting the glass substrate 24 to a bonding position in a state heated to a predetermined temperature. And an affixing mechanism 46 for adhering the photosensitive resin layer 28 exposed by peeling off the protective film 30 to the glass substrate 24 integrally and in parallel.

  First and second detection mechanisms 47a and 47b that directly detect the respective half-cut portions 34, which are the boundary positions of the photosensitive webs 22a and 22b, are disposed in the vicinity of the attachment position in the attachment mechanism 46. The

  In the vicinity of the downstream of the first and second web feed mechanisms 32a and 32b, the rear ends of the substantially used photosensitive webs 22a and 22b and the tips of the newly used photosensitive webs 22a and 22b are pasted, respectively. Is attached. A film terminal position detector 51 is disposed downstream of the attachment table 49 in order to control the displacement in the width direction due to the winding displacement of the photosensitive web rolls 23a and 23b.

  The first and second processing mechanisms 36a and 36b are provided with a roller pair 50 for calculating the roll diameter of each photosensitive web roll 23a and 23b accommodated and wound in the first and second web feed mechanisms 32a and 32b. Arranged downstream. Each of the first and second processing mechanisms 36a and 36b includes a single round blade 52. The round blade 52 travels in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are predetermined. A half-cut portion 34 is formed at the position.

  As shown in FIG. 2, the half-cut portion 34 needs to cut at least the protective film 30. In practice, in order to cut the protective film 30 with certainty, the photosensitive resin layer 28 to the base film 26 are cut. The cutting depth of the round blade 52 is set. The round blade 52 is fixed without rotating and moves in the width direction of the photosensitive webs 22a and 22b to form a half-cut portion 34, or without sliding on the photosensitive webs 22a and 22b. A method of moving in the width direction while rotating to form the half-cut portion 34 is employed.

  Two first and second processing mechanisms 36a and 36b are disposed at a predetermined distance apart in the conveying direction of the photosensitive webs 22a and 22b (in the direction of arrow A), respectively, and two are placed with the remaining portion 30b interposed therebetween. Two half-cut portions 34 may be formed simultaneously.

  The half-cut part 34 is set, for example, at a position where it enters the glass substrates 24 on both sides by 10 mm. A portion sandwiched between the half cut portions 34 between the glass substrates 24 functions as a mask when the photosensitive resin layer 28 is attached to the glass substrate 24 in a frame shape in an attaching mechanism 46 described later.

  The first and second label bonding mechanisms 40a and 40b connect the peeling portion 30aa at the front side of the peeling side and the peeling portion 30ab at the back side of the peeling side in order to leave the remaining portion 30b of the protective film 30 correspondingly between the glass substrates 24. An adhesive label 38 is supplied. As shown in FIG. 2, the protective film 30 has a remaining portion 30 b sandwiched between the first peeled portion 30 aa and the later peeled portion 30 ab.

  As shown in FIG. 3, the adhesive label 38 is formed in a strip shape, and is formed of, for example, the same resin material as the protective film 30. The adhesive label 38 has a non-adhesive portion (including a slight adhesion) 38a to which a pressure-sensitive adhesive is not applied at the center, and the front side of the non-adhesive portion 38a, that is, both ends in the longitudinal direction of the adhesive label 38 It has the 1st adhesion part 38b adhered to exfoliation part 30aa, and the 2nd adhesion part 38c adhered to back exfoliation part 30ab.

  As shown in FIG. 1, each of the first and second label bonding mechanisms 40a and 40b includes suction pads 54a to 54g, each of which can attach a maximum of seven adhesive labels 38 with a predetermined interval between them. A pedestal 56 for holding the photosensitive webs 22a and 22b from below is disposed so as to be movable up and down at the position where the adhesive label 38 is attached by the pads 54a to 54g.

  The first and second reservoir mechanisms 42a and 42b are configured to absorb the speed difference between the tact conveyance of the upstream photosensitive webs 22a and 22b and the continuous conveyance of the downstream photosensitive webs 22a and 22b. A movable dancer roller 60 is provided. The second reservoir mechanism 42b includes a dancer for adjusting the lengths of the conveyance paths until the photosensitive webs 22a and 22b sent from the first and second web delivery mechanisms 32a and 32b reach the attaching mechanism 46. A roller 61 is provided.

  The first and second peeling mechanisms 44a and 44b arranged downstream of the first and second reservoir mechanisms 42a and 42b block the tension fluctuation on the delivery side of the photosensitive webs 22a and 22b, respectively, and the tension at the time of lamination is reduced. A suction drum 62 is provided for stabilization. In the vicinity of each suction drum 62, a peeling roller 63 is disposed, and the protective film 30 peeled off from the photosensitive webs 22a and 22b via the peeling roller 63 is respectively wound on the protective film except for the remaining portion 30b. It is wound around the take-up portion 64.

  On the downstream side of the first and second peeling mechanisms 44a and 44b, first and second tension control mechanisms 66a and 66b capable of applying tension to the photosensitive webs 22a and 22b are disposed. Each of the first and second tension control mechanisms 66a and 66b includes a cylinder 68, and the tension dancer 70 swings and displaces under the driving action of the cylinder 68. The tension of 22a, 22b can be adjusted.

  The first and second detection mechanisms 47a and 47b are provided with photoelectric sensors 72a and 72b such as laser sensors and photosensors. The photoelectric sensors 72a and 72b are wedge-shaped groove-shaped portions of the half-cut portion 34, and are protected. A step due to the thickness of the film 30 or a change due to a combination thereof is directly detected, and this detection signal is used as a boundary position signal. The photoelectric sensors 72a and 72b are disposed to face the backup rollers 73a and 73b. In place of the photoelectric sensors 72a and 72b, an image inspection means such as a non-contact displacement meter or a CCD camera may be used. Further, the CCD camera may be disposed at a position not facing the backup rollers 73a and 73b.

  As shown in FIG. 4, the substrate heating device 45 includes a transport mechanism 74 for transporting the glass substrate 24 in the direction of arrow C. The transport mechanism 74 includes a first heating furnace 82 to a fifth heating furnace 90 described later. Corresponding to the plurality of transport rollers 76a to 76e arranged in the direction of arrow C. Each of the transport rollers 76a, 76b, 76c, 76d, and 76e is independently driven to rotate through an individual rotation drive source (for example, a motor).

  The conveying rollers 76a to 76e are made of, for example, a stainless steel roller shaft 77a and a plurality of resins made of, for example, PEEK (for example, PEEK () A ring 77b made of (polyether / ether / ketone resin). The roller shaft 77a is set to a diameter of 48 mm, while the ring 77b is set to a diameter of 70 mm.

  A receiving portion 78 that receives the glass substrate 24 is provided on the upstream side in the arrow C direction of the transport mechanism 74, and a turning table 80 that turns the glass substrate 24 is provided in the receiving portion 78.

  The first to fifth heating furnaces 82, 84, 86, 88 and 90 are sequentially arranged on the downstream side of the receiving unit 78. The first heating furnace 82 constitutes a high-temperature furnace, the second heating furnace 84 constitutes a heating furnace, the third heating furnace 86 constitutes a heating furnace, and the fourth heating furnace 88 is a heat-retaining furnace. And the positioning mechanism 92 is comprised, and the 5th heating furnace 90 comprises a heat retention furnace and a stop mechanism (not shown).

  The first heating furnace 82 to the fifth heating furnace 90 are provided with a first heater 94 a to a fifth heater 94 e. In the first heating furnace 82, the furnace atmosphere temperature can be heated to 100 ° C. to 160 ° C. via the first heater 94a, and in the second heating furnace 84, the furnace atmosphere temperature via the second heater 94b. Can be heated to 100 ° C to 150 ° C.

  In the third heating furnace 86, the furnace atmosphere temperature can be heated to 100 ° C. to 150 ° C. via the third heater 94c, and in the fourth heating furnace 88, the furnace atmosphere temperature is passed through the fourth heater 94d. Can be heated to 100 ° C. to 150 ° C. Further, in the fifth heating furnace 90, the furnace atmosphere temperature can be heated to 100 ° C. to 150 ° C. via the fifth heater 94 e.

  The first heating furnace 82 to the fifth heating furnace 90 are provided with one or more temperature sensors 95a to 95e for detecting the respective ambient temperatures. In addition, it is preferable that the glass substrate 24 is heated in the range whose surface temperature is 90 to 130 degreeC at the time of lamination.

  As shown in FIG. 5, the positioning mechanism 92 includes a cylinder 98 fixed on a gantry 96, and the lifting platform 100 is fixed to a rod 98 a extending upward from the cylinder 98. The lift 100 is configured to be long in the width direction of the glass substrate 24 (the direction of arrow D intersecting the transport direction), and the lift 100 is provided with a support 104 via guide bars 102a and 102b.

  The support base 104 is configured to be long in the direction of arrow D, and a plurality of positioning members 106 such as a suction rubber cup can be held on the support base 104 by a frictional resistance. They are arranged in the D direction.

  At both edge portions of the lifting platform 100, width-adjusting rollers 108a and 108b are disposed so as to be able to advance and retract in the direction of arrow D via the advance and retract mechanisms 110a and 110b. The advance / retreat mechanisms 110a and 110b have motors 112a and 112b facing each other, and nut portions 116a and 116b are screwed onto screw shafts 114a and 114b connected to the motors 112a and 112b. The nut portions 116a and 116b are fixed to the movable struts 118a and 118b, and width adjusting rollers 108a and 108b are rotatably attached to the upper ends of the movable struts 118a and 118b.

  In the substrate heating device 45, the temperature of the glass substrate 24 is constantly monitored. When an abnormality occurs, the conveyance rollers 76a to 76e are stopped or alarmed, and abnormal information is transmitted to cause the abnormal glass substrate 24 to be discharged NG in a subsequent process. Can be used for quality control or production control. Further, the transport mechanism 74 may be configured such that an air levitation plate (not shown) is provided and the glass substrate 24 is floated and transported in the direction of arrow C.

  As shown in FIG. 1, a substrate stocker 120 that accommodates a plurality of glass substrates 24 is provided upstream of the substrate heating device 45. Each glass substrate 24 accommodated in the substrate stocker 120 is sucked and taken out by the suction pad 124 provided in the hand portion 122 a of the robot 122 and is carried into the receiving portion 78.

  The affixing mechanism 46 includes rubber rollers 130a and 130b that are disposed vertically and are heated to a predetermined temperature. The backup rollers 132a and 132b are in sliding contact with the rubber rollers 130a and 130b, and the backup roller 132b is pressed toward the rubber roller 130b by the pressure cylinders 134a and 134b constituting the roller clamp portion 133.

  In the vicinity of the rubber roller 130a, a contact prevention roller 136 for preventing the photosensitive webs 22a and 22b from contacting the rubber roller 130a is movably disposed. A preheating unit 137 for preheating the photosensitive webs 22a and 22b to a predetermined temperature in advance is disposed in the vicinity of the upstream of the attaching mechanism 46. The preheating unit 137 includes heating means such as an infrared bar heater.

  The glass substrate 24 is transported in the direction of arrow C from the attaching mechanism 46 via the transport path 138. In this transport path 138, film transport rollers 140a and 140b and a substrate transport roller 142 are disposed. The distance between the rubber rollers 130 a and 130 b and the substrate transport roller 142 is preferably set to be equal to or less than the length of one glass substrate 24.

  A cooling mechanism 144 and a base automatic peeling mechanism 146 are provided downstream of the attaching mechanism 46. The automatic base peeling mechanism 146 continuously peels the long base film 26 to which the glass substrates 24 are attached with a predetermined interval apart, and the pre-peeling portion 148 and the peeling roller 150 are wound up. A shaft 152 is provided. The take-up shaft 152 preferably applies tension control by applying torque control to the base film 26 while driving, for example, by providing a tension detector (not shown) on the peeling roller 150. .

  The pre-peeling portion 148 includes a peeling bar 156, and the peeling bar 156 can be moved up and down between the glass substrates 24. In addition, by reheating the film surface to about 30 ° C. to 120 ° C. immediately before or after the peeling roller 150, peeling of the color material layer at the time of peeling is prevented, and a high-quality laminate surface can be obtained.

  A measuring instrument 158 for measuring the area position of the photosensitive resin layer 28 actually attached to the glass substrate 24 is disposed downstream of the automatic base peeling mechanism 146. The measuring device 158 includes a camera 160 such as a CCD, for example, and the camera 160 is provided for photographing the glass substrate 24 to which the photosensitive resin layer 28 is attached.

  A photosensitive laminate stocker 190 in which a plurality of photosensitive laminates 208 are accommodated is provided downstream of the automatic base peeling mechanism 146. The photosensitive laminate 208 from which the base film 26 and the remaining portion 30b have been peeled off from the pasting substrate 24a by the base automatic peeling mechanism 146 is sucked and taken out by the suction pad 194 provided on the hand portion 192a of the robot 192. Is accommodated in the conductive laminate stocker 190.

  In the manufacturing apparatus 20, the first and second web feed mechanisms 32a and 32b, the first and second processing mechanisms 36a and 36b, the first and second label adhesion mechanisms 40a and 40b, and the first and second reservoir mechanisms 42a and 42b. The first and second peeling mechanisms 44a and 44b, the first and second tension control mechanisms 66a and 66b, and the first and second detection mechanisms 47a and 47b are arranged above the attaching mechanism 46. On the contrary, the first and second web feed mechanisms 32a and 32b to the first and second detection mechanisms 47a and 47b are arranged below the affixing mechanism 46, and the photosensitive webs 22a and 22b are moved up and down. However, the photosensitive resin layer 28 may be attached to the lower side of the glass substrate 24, or the entire manufacturing apparatus 20 may be configured in a straight line.

  As shown in FIG. 1, the manufacturing apparatus 20 is entirely controlled via a laminating process control unit 200. For example, a laminating control unit 202, a substrate heating control unit 204, and the like are provided for each functional unit of the manufacturing apparatus 20. A base peeling control unit 206 and the like are provided, and these are connected by an in-process network. The laminating process control unit 200 is connected to a factory network, and performs information processing for production such as production management and operation management of instruction information (condition setting and production information) from a factory CPU (not shown).

  The substrate heating control unit 204 receives the glass substrate 24 from the upstream process and heats the glass substrate 24 to a desired temperature based on detection signals from the temperature sensors 95a to 95e, and the conveyance of the glass substrate 24 is stopped. In this case, the conveyance mechanism 74 is driven and controlled as will be described later.

  The laminating control unit 202 controls each functional unit as a master of the entire process, and the position of the half-cut portion 34 of the photosensitive webs 22a and 22b detected by the first and second detection mechanisms 47a and 47b. Based on the information, a control mechanism capable of controlling the relative position between each boundary position and the glass substrate 24 at the pasting position and the relative position between the respective boundary positions is configured.

  The base peeling control unit 206 controls the operation of peeling the base film 26 from the sticking substrate 24a supplied from the sticking mechanism 46, and discharging the photosensitive laminate 208 to the downstream process, and the sticking substrate. 24a and information on the photosensitive laminate 208 are controlled.

  The interior of the manufacturing apparatus 20 is partitioned into a first clean room 212a and a second clean room 212b through a partition wall 210. The first clean room 212a accommodates the first and second web feed mechanisms 32a and 32b to the first and second tension control mechanisms 66a and 66b, and the second clean room 212b includes the first and second detections. The mechanisms 47a and 47b and thereafter are accommodated. The first clean room 212a and the second clean room 212b communicate with each other through the penetration part 214.

  The operation of the manufacturing apparatus 20 configured as described above will be described below in relation to the substrate heating method according to the present invention.

  First, the photosensitive webs 22a and 22b are sent out from the respective photosensitive web rolls 23a and 23b attached to the first and second web delivery mechanisms 32a and 32b. The photosensitive webs 22a and 22b are conveyed to the first and second processing mechanisms 36a and 36b.

  In the first and second processing mechanisms 36a and 36b, the round blade 52 moves in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are moved from the protective film 30 to the photosensitive resin layer 28 to the base film. Cut to 26 to form a half-cut portion 34 (see FIG. 2). Further, as shown in FIG. 1, the photosensitive webs 22a and 22b are stopped after being transported in the direction of the arrow A corresponding to the dimension of the remaining portion 30b of the protective film 30, and the half-blade 52 is halfway under the traveling action. A cut site 34 is formed. Thus, the photosensitive webs 22a and 22b are provided with a front peeling portion 30aa and a rear peeling portion 30ab with the remaining portion 30b interposed therebetween (see FIG. 2).

  Next, the respective photosensitive webs 22 a and 22 b are conveyed to the first and second label adhering mechanisms 40 a and 40 b, and a predetermined application site of the protective film 30 is arranged on the cradle 56. In the first and second label adhering mechanisms 40a and 40b, a predetermined number of adhesive labels 38 are adsorbed and held by the adsorbing pads 54a to 54g, and each adhering label 38 straddles the remaining portion 30b of the protective film 30, and a front peeling portion. 30aa and the rear peeling portion 30ab are integrally bonded (see FIG. 3).

  For example, the photosensitive webs 22a and 22b to which the seven adhesive labels 38 are bonded, as shown in FIG. 1, after the first and second reservoir mechanisms 42a and 42b are prevented from changing the tension on the delivery side, It is continuously conveyed to the first and second peeling mechanisms 44a and 44b. In the first and second peeling mechanisms 44a and 44b, as shown in FIG. 6, the base film 26 of the photosensitive webs 22a and 22b is adsorbed and held by the suction drum 62, and the protective film 30 leaves the remaining portion 30b. It peels from the said photosensitive webs 22a and 22b. The protective film 30 is peeled off via the peeling roller 63 and wound around the protective film take-up portion 64 (see FIG. 1).

  Under the action of the first and second peeling mechanisms 44a and 44b, after the protective film 30 is peeled from the base film 26 leaving the remaining portion 30b, the photosensitive webs 22a and 22b are moved to the first and second tension control mechanisms. The tension is adjusted by 66a and 66b, and the half-cut portion 34 is detected by the photoelectric sensors 72a and 72b by the first and second detection mechanisms 47a and 47b.

  Each photosensitive web 22a, 22b is quantitatively transported to the affixing mechanism 46 under the rotational action of the film transport rollers 90a, 90b based on the detection information of the half-cut region 34, respectively.

  On the other hand, in the substrate heating device 45, as shown in FIG. 4, the furnace atmosphere temperatures in the first to fifth heating furnaces 82 to 90 are set corresponding to the lamination temperature in the attaching mechanism 46. For example, when the laminating temperature is 110 ° C., the furnace atmosphere temperatures in the first heating furnace 82, the second heating furnace 84, the third heating furnace 86, the fourth heating furnace 88, and the fifth heating furnace 90 are 150 respectively. C, 140 ° C, 135 ° C, 135 ° C and around 135 ° C are set. Moreover, in glass substrate 24, in order to maintain the quality of the surface contact | adherence improving agent apply | coated to the surface, upper limit temperature is set to 130 degreeC.

  Therefore, the robot 122 holds the glass substrate 24 accommodated in the substrate stocker 120 and carries the glass substrate 24 into the receiving unit 78. In the receiving unit 78, the glass substrate 24 is swung into a desired posture via the swivel table 80, and then tact-transferred from the receiving unit 78 to the first heating furnace 82.

  In the first heating furnace 82, after the glass substrate 24 is rapidly heated under the heating action of the first heater 94 a, the glass substrate 24 is moved to the second heating furnace via the transport roller 76 a constituting the transport mechanism 74. 84. On the other hand, the new glass substrate 24 carried into the receiving unit 78 is sent into the first heating furnace 82.

  In the second heating furnace 84, after the glass substrate 24 has been heated through the second heater 94b, the glass substrate 24 is carried into the third heating furnace 86 through the transport roller 76b constituting the transport mechanism 74. Is done. The glass substrate 24 whose temperature has been raised in the third heating furnace 86 is sent to the fourth heating furnace 88 via the conveyance roller 76c constituting the conveyance mechanism 74, and in this fourth heating furnace 88, the temperature raising process and the positioning process. And is given.

  In the fourth heating furnace 88, a positioning mechanism 92 is provided. As shown in FIG. 5, first, the width-adjusting rollers 108a and 108b are arranged apart from each other in the direction of arrow D as shown by the solid line. In this state, the lifting platform 100 is raised under the driving action of the cylinder 98.

  The lifting platform 100 is provided with a support platform 104 via guide bars 102 a and 102 b, and a plurality of positioning members 106 are arranged on the support platform 104. Accordingly, the positioning member 106 supports the glass substrate 24 disposed on the transport roller 76d and pushes the glass substrate 24 upward above the transport roller 76d.

  Next, the motors 112a and 112b constituting the advancing and retracting mechanisms 110a and 110b are driven, and the movable columns 118a and 118b are displaced toward each other through the screw shafts 114a and 114b and the nut portions 116a and 116b. For this reason, the width-adjusting rollers 108a and 108b attached to the upper ends of the movable support columns 118a and 118b move in directions close to each other, and are attached to both ends in the arrow D direction of the glass substrate 24 supported on the positioning member 106. The glass substrate 24 is positioned by contact.

  After the glass substrate 24 is positioned, the width adjusting rollers 108 a and 108 b are slightly separated from both ends of the glass substrate 24, and then the lifting platform 100 is lowered via the cylinder 98. The glass substrate 24 supported on the positioning member 106 is transferred from the positioning member 106 to the plurality of transport rollers 76d, while the width adjusting rollers 108a and 108b are separated from each other via the advancing and retracting mechanisms 110a and 110b. Move in the direction you want. Further, the width adjusting rollers 108 a and 108 b may be adjusted in a state of being slightly separated from the width of the glass substrate 24.

  As a result, when the glass substrate 24 comes into contact with the conveying roller 76d and the descent stops, the width-adjusting rollers 108a and 108b come into contact with the glass substrate 24 to prevent generation of dust and damage to the glass substrate 24. be able to.

  Furthermore, the positioning member 106 is formed of a material that generates frictional resistance, such as a suction rubber cup, for example. Therefore, when the positioning member 106 is lowered, it is possible to satisfactorily prevent the displacement of the glass substrate 24.

  The glass substrate 24 delivered to the transport roller 76d is sent to the fifth heating furnace 90 under the rotating action of the transport roller 76d to perform a heat insulation process, and is heated to a predetermined temperature. It is conveyed to. The glass substrate 24 is temporarily disposed between the rubber rollers 130a and 130b corresponding to the portions where the photosensitive resin layers 28 of the photosensitive webs 22a and 22b arranged in parallel are attached.

  In this state, by raising the backup roller 132b and the rubber roller 130b, the glass substrate 24 is sandwiched between the rubber rollers 130a and 130b with a predetermined pressing pressure. Further, the photosensitive resin layers 28 arranged in parallel are transferred (laminated) to the glass substrate 24 under the rotating action of the rubber roller 130a.

  Here, as lamination conditions, the speed is 1.0 m / min to 10.0 m / min, the temperature of the rubber rollers 130 a and 130 b is 90 ° C. to 140 ° C., the rubber hardness of the rubber rollers 130 a and 130 b is 40 degrees to 90 degrees, The pressing pressure (linear pressure) of the rubber rollers 130a and 130b is 50 N / cm to 400 N / cm.

  When the lamination of one photosensitive web 22a, 22b is completed on the glass substrate 24 via the rubber rollers 130a, 130b, the rotation of the rubber roller 130a is stopped, while the photosensitive webs 22a, 22b are laminated. The glass substrate 24, that is, the bonded substrate 24 a is clamped by the substrate transport roller 142.

  Then, the rubber roller 130b is retracted in the direction away from the rubber roller 130a to release the clamp, and the rotation of the substrate transport roller 142 is started, and the pasted substrate 24a is quantitatively transported in the direction of arrow C, and the photosensitive web. The position between the substrates 22a and 22b moves to a predetermined position near the lower side of the rubber roller 130a. On the other hand, the next glass substrate 24 is conveyed toward the attaching position via the substrate heating device 45.

  When the tip of the next glass substrate 24 is disposed between the rubber rollers 130a and 130b, the rubber roller 130b is raised, and the next glass substrate 24 and the photosensitive webs 22a and 22b are clamped by the rubber rollers 130a and 130b. Is done. Then, laminating is started under the rotational action of the rubber rollers 130a and 130b and the substrate transport roller 142, and the bonded substrate 24a is transported in the direction of arrow C.

  At that time, as shown in FIG. 7, the pasting substrate 24a is covered with the remaining portion 30b at each end. Therefore, when the photosensitive resin layer 28 is transferred to the glass substrate 24, the rubber rollers 130a and 130b are not soiled by the photosensitive resin layer 28.

  The pasted substrate 24 a laminated by the pasting mechanism 46 is cooled through the cooling mechanism 144 and then transferred to the pre-peeling portion 148. In the pre-peeling portion 148, the protective film 30 can be peeled off from the rear end and the front end of the adjacent glass substrate 24 by raising the peeling bar 156. Next, in the automatic base peeling mechanism 146, the base film 26 is continuously wound from the attached substrate 24 a under the rotating action of the winding shaft 152.

  The glass substrate 24 from which the base film 26 has been peeled is placed at an inspection station corresponding to the measuring instrument 158. In this inspection station, images of the glass substrate 24 and the photosensitive resin layer 28 are captured by the camera 160 with the glass substrate 24 positioned and fixed. Then, by applying image processing, the pasting position is calculated and the pasting state is inspected.

  By the way, for example, when performing a replacement operation of the photosensitive web rolls 23a and 23b or a removal operation of the base film 26 wound around the winding shaft 152, the first heating furnace 82 constituting the substrate heating device 45 is performed. The glass substrate 24 stays in the fifth heating furnace 90, and the driving of the transport rollers 76a to 76e is stopped.

  Therefore, for example, when it is determined that the transport roller 76a in the first heating furnace 82 is stopped after a set time, the transport roller 76a is rotationally driven. At that time, when the glass substrate 24 is placed on the transport roller 76a, the transport roller 76a is reciprocally rotated to reciprocate the glass substrate 24 in the first heating furnace 82 (see FIG. 4). .

  Specifically, each transport roller 76a is rotated by 0.5 to 1.5 rotations, preferably one or more rotations, clockwise (forward axis) and counterclockwise (reverse axis), respectively.

  On the other hand, when the glass substrate 24 does not exist on the conveyance roller 76a, the conveyance roller 76a is continuously rotated in one direction. Therefore, the transport roller 76a in the first heating furnace 82 is not heated from above through the first heater 94a in a state where the rotation is stopped and the set time is exceeded. For this reason, it is possible to reliably prevent the upper side of the transport roller 76a from being overheated on one side and causing thermal deformation.

  Thus, the conveying roller 76a only needs to be rotated in one direction or reciprocated, and the swinging of the conveying roller 76a can be prevented with a simple process. Therefore, it is possible to effectively prevent the glass substrate 24 from being damaged due to conveyance bending or fluttering, or stopped due to conveyance trouble.

  Also, in the second heating furnace 84 to the fourth heating furnace 88, similarly to the first heating furnace 82 described above, the transport rollers 76b to 76d are rotated by rotating the transport rollers 76b to 76d in one direction or reciprocating. It is possible to prevent heating beyond the set time in a state where the rotation is stopped.

  Furthermore, the fifth heating furnace 90 includes a positioning member 106 that can be moved up and down via a cylinder 98 as shown in FIG. Therefore, the glass substrate 24 on the transport roller 76e is continuously transferred in one direction after being transferred onto the positioning member 106 as the positioning member 106 is raised. Thereby, the conveyance roller 76e is not heated over the set time in the stopped state, and the same effect as the above-described conveyance roller 76a is obtained.

  By the way, when the laminating process is stopped for a certain period of time longer than the above set time, for example, more than one hour, due to equipment trouble, cleaning of the rubber rollers 130a and 130b, replacement of the rubber rollers 130a and 130b or troubles in the upstream and downstream processes. The first heater 94a to the fifth heater 94e constituting the substrate heating device 45 are deactivated. When the laminating process is resumed, the first heater 94a to the fifth heater 94e are energized and the conveying rollers 76a to 76e constituting the conveying mechanism 74 are activated before the conveyance of the glass substrate 24 is started. The first heating furnace 82 to the fifth heating furnace 90 are each heated to a predetermined temperature while rotating in one direction or reciprocating once.

  Therefore, when the conveyance of the glass substrate 24 is started, thermal denaturation due to one-side overheating is not caused in each of the conveyance rollers 76a to 76e. Thereby, the glass substrate 24 can be conveyed favorably, and there is an advantage that the laminating process is efficiently performed.

  In the first embodiment, the two photosensitive web rolls 23a and 23b are used. However, the present invention is not limited to this. One photosensitive web roll or three or more photosensitive web rolls is used. A roll may be adopted. The same applies to the second embodiment described below.

  FIG. 8 is a schematic configuration diagram of a photosensitive laminate manufacturing apparatus 300 according to the second embodiment of the present invention. In addition, the same referential mark is attached | subjected to the component same as the manufacturing apparatus 20 which concerns on 1st Embodiment, and the detailed description is abbreviate | omitted.

  The manufacturing apparatus 300 includes an inter-substrate web cutting mechanism 48 that is disposed downstream of the attaching mechanism 46 and that can integrally cut the photosensitive webs 22 a and 22 b between the glass substrates 24.

  In the manufacturing apparatus 300 configured as described above, the pasting substrate 24a laminated by the pasting mechanism 46 is transported in the direction of the arrow C as in the first embodiment. When the space between the bonded substrates 24a reaches a position corresponding to the inter-substrate web cutting mechanism 48, the inter-substrate web cutting mechanism 48 moves in the direction of arrow C at the same conveyance speed as the bonded substrate 24a, The two photosensitive webs 22a and 22b are integrally cut between the pasting substrates 24a.

  After this cutting, the inter-substrate web cutting mechanism 48 is returned to a predetermined standby position, while the base film 26 and the remaining portion 30b are sequentially peeled (single-wafer peeling) on the bonded substrate 24a to form the photosensitive laminate 208. Manufactured.

It is a schematic block diagram of the manufacturing apparatus of the photosensitive laminated body to which the substrate heating method which concerns on the 1st Embodiment of this invention is applied. It is sectional drawing of the elongate photosensitive web used for the said manufacturing apparatus. It is explanatory drawing of the state by which the adhesive label was adhere | attached on the said elongate photosensitive web. It is a schematic explanatory drawing of the substrate heating apparatus which comprises the said manufacturing apparatus. It is explanatory drawing of the 5th heating furnace which comprises the said substrate heating apparatus. It is explanatory drawing at the time of peeling a protective film from the said elongate photosensitive web. It is explanatory drawing of the state by which the photosensitive resin layer was transcribe | transferred to the glass substrate. It is a schematic block diagram of the manufacturing apparatus of the photosensitive laminated body which concerns on the 2nd Embodiment of this invention. It is a schematic block diagram of the film sticking apparatus of patent document 1. FIG.

Explanation of symbols

20, 300 ... Manufacturing apparatus 22a, 22b ... Photosensitive webs 23a, 23b ... Photosensitive web roll 24 ... Glass substrate 26 ... Base film 28 ... Photosensitive resin layer 30 ... Protective film 32a, 32b ... Web feed mechanisms 40a, 40b ... Label adhesion mechanism 44a, 44b ... peeling mechanism 45 ... substrate heating device 46 ... pasting mechanism 64 ... protective film winding unit 74 ... transport mechanism 76a-76e ... transport roller 82-90 ... heating furnace 92 ... positioning mechanism 94a-94e ... Heaters 108a, 108b ... width adjusting rollers 130a, 130b ... rubber rollers 146 ... automatic base peeling mechanism

Claims (4)

A substrate heating method in which a substrate to which a photosensitive web is attached is heated to a predetermined temperature in advance before the attaching process,
Heating the substrate while intermittently transporting or continuously transporting the substrate to a plurality of heating furnaces via a transport mechanism;
A step of rotating or reciprocatingly rotating a transport roller constituting the transport mechanism when it is determined that the transport mechanism is stopped after a set time in the heating furnace;
A substrate heating method characterized by comprising:   2. The substrate heating method according to claim 1, wherein the substrate is held apart from the transport roller when at least the transport roller is rotated in one direction.   2. The substrate heating method according to claim 1, wherein the transport roller reciprocates at least 0.5 rotations in both forward and reverse directions. The method for heating a substrate according to claim 1, wherein when the transport mechanism stops in the heating furnace beyond a predetermined time longer than the set time, the heating process of the substrate is temporarily stopped.
When resuming heating of the substrate, rotating the transport roller in one direction or reciprocating before starting to transport the substrate;
A substrate heating method characterized by comprising:

Images