JP4769165B2 - Photosensitive laminate manufacturing apparatus and manufacturing method - Google Patents

Description

  The present invention provides a photosensitive laminate by feeding a substrate and a long photosensitive web provided with a photosensitive material layer on a support between a pair of pressure rollers, and affixing the photosensitive material layer to the substrate. The present invention relates to a manufacturing apparatus and a manufacturing method for a photosensitive laminate.

  For example, in a liquid crystal panel substrate, a printed wiring substrate, and a PDP panel substrate, a photosensitive sheet body (photosensitive web) having a photosensitive resin layer (photosensitive material layer) is attached to the substrate surface. In the photosensitive sheet body, a photosensitive resin layer and a protective film are sequentially laminated on a flexible plastic support.

  A manufacturing apparatus used for attaching this type of photosensitive sheet body usually conveys a glass substrate or a resin substrate such as a glass substrate or a resin substrate spaced apart from each other by a predetermined distance, and a photosensitive resin layer attached to the substrate. Corresponding to this range, a method of peeling the protective film from the photosensitive sheet body is adopted.

  For example, in the manufacturing apparatus disclosed in Patent Document 1, as shown in FIG. 9, a laminated body film (photosensitive sheet body) 1a fed out from a film roll 1 is wound around guide rollers 2a and 2b to be horizontal. It extends along the film transport surface. A rotary encoder 3 that outputs a number of pulse signals corresponding to the feed amount of the laminated film 1a is attached to the guide roller 2b.

  A laminate film 1a extending along a horizontal film transport surface is wound around a suction roller 4, and a half cutter 5 and a cover film peeling device 6 are interposed between the guide roller 2b and the suction roller 4. And are provided.

  The half cutter 5 includes a pair of disc cutters 5a and 5b that are separated from each other by a predetermined distance in the transport direction of the laminated film 1a. The disc cutters 5a and 5b move along the film width direction of the laminate film 1a, thereby demarcating two boundary portions between the peeled portion and the remaining portion of the cover film (not shown) of the laminate film 1a. It cuts together with the photosensitive resin layer (not shown) on the back side.

  The cover film peeling apparatus 6 strongly presses the adhesive tape 7a fed out from the adhesive tape roll 7 to the peeling portion of the cover film between the pressing rollers 8a and 8b, and then winds it by the take-up roll 9. Thereby, the peeling part of a cover film is peeled from the photosensitive resin layer, and is wound up by the winding roll 9 with the adhesive tape 7a.

  Downstream of the suction roller 4, a pair of lamination rollers that overlap and pressure-bond the peeled portion of the laminated film 1 a from which the cover film has been peeled over the upper surfaces of the plurality of substrates 11 that are transported at predetermined intervals by the substrate transport device 10. 12a and 12b are provided. A support film take-up roll 13 is disposed downstream of the lamination rollers 12a and 12b. The translucent support film (not shown) attached to the substrate 11 is wound around the support film winding roll 13 together with the remaining portion of the cover film in a state where the photosensitive resin layer remains on the substrate 11.

Japanese Patent Laid-Open No. 11-34280 (FIG. 1)

  By the way, in order to accurately attach the peeled portion of the laminate film 1a from which the cover film has been peeled off to a desired range of the substrate 11, the laminate film is based on the boundary portion between the peeled portion and the remaining portion of the cover film. It is necessary to send 1a between the lamination rollers 12a and 12b with high accuracy.

  However, since the laminate film 1a is formed by forming a photosensitive resin layer on a flexible support film and is transported in a tensioned state, the boundary film 1a is affected by the elongation generated during transportation. The position of the part may be shifted. In addition, since the lamination rollers 12a and 12b are attached while the laminate film 1a and the substrate 11 are heated, the extension of the laminate film 1a in the vicinity of the lamination rollers 12a and 12b is particularly large.

  In this case, if the position of the boundary portion of the laminated film 1a can be detected between the lamination rollers 12a and 12b, the position can be adjusted to perform a highly accurate pasting process. However, it is practically impossible to detect the position of the boundary portion while sandwiching the laminate film 1a and the substrate 11 with the lamination rollers 12a and 12b, because the lamination rollers 12a and 12b impede detection.

  Therefore, when the manufactured photosensitive laminated body is extracted and inspected and the attaching position accuracy is lowered, processing such as adjusting the feeding amount of the laminated film 1a is performed, and the manufacturing efficiency is lowered and the tolerance is reduced. It has been pointed out that the production yields a photosensitive laminate that falls outside the range, resulting in a decrease in yield.

  The present invention solves this type of problem, and can easily and accurately detect the state of attachment of the photosensitive material layer to the substrate, and adjust the attachment position of the photosensitive material layer to achieve high quality. It aims at providing the manufacturing apparatus and manufacturing method of the photosensitive laminated body which can manufacture a photosensitive laminated body efficiently.

The present invention feeds a long photosensitive web in which a photosensitive material layer and a protective film are sequentially laminated on a support, and forms a processing site corresponding to the boundary position between the peeled portion and the remaining portion on the protective film. Then, the peeling portion of the protective film is peeled off, and continuously fed between a pair of heated pressing rollers together with the substrate supplied at a predetermined interval, and the remaining portion of the protective film is arranged between the substrates. In addition, in a manufacturing apparatus for manufacturing a photosensitive laminate by affixing the exposed photosensitive material layer to the substrate,
A detection unit that is disposed on the downstream side of the pressure roller and detects an end portion of the substrate and the processed portion of the long photosensitive web attached to the substrate;
A distance calculation unit for calculating a distance between the end and the processing site;
It is characterized by providing.

The present invention also provides a processing portion corresponding to a boundary position between a peeled portion and a remaining portion of a long photosensitive web in which a photosensitive material layer and a protective film are sequentially laminated on a support. The peeling portion of the protective film is peeled off, continuously fed between a pair of heated pressure rollers together with a substrate supplied at a predetermined interval, and the remaining portion of the protective film is interposed between the substrates. In the manufacturing method of manufacturing a photosensitive laminate by arranging and exposing the exposed photosensitive material layer to the substrate,
Detecting an end of the substrate and the processed portion of the elongated photosensitive web attached to the substrate;
Calculating a distance between the end and the processing site;
It is characterized by comprising.

  In the present invention, it is possible to easily and accurately detect the state of the photosensitive material layer attached to the substrate. Moreover, a high quality photosensitive laminated body can be efficiently manufactured by adjusting the attachment position of the photosensitive material layer with respect to a board | substrate based on the detected attachment state.

  FIG. 1 is a schematic configuration diagram of a photosensitive laminate manufacturing apparatus 20 according to the first embodiment of the present invention. This manufacturing apparatus 20 is a process for manufacturing a liquid crystal or a color filter for organic EL, etc. The photosensitive resin layers 28 (to be described later) of the film-like photosensitive webs 22a and 22b are parallelly transferred to the glass substrate 24 in parallel. The photosensitive webs 22a and 22b are each set to a predetermined width dimension. For example, the photosensitive web 22a is configured to be wider than the photosensitive web 22b.

  FIG. 2 is a cross-sectional view of the photosensitive webs 22 a and 22 b used in the manufacturing apparatus 20. The photosensitive webs 22a and 22b are formed by laminating a flexible base film (support) 26, a photosensitive resin layer (photosensitive material layer) 28, and a protective film 30.

  As shown in FIG. 1, the manufacturing apparatus 20 accommodates two (or more than two) photosensitive web rolls 23a and 23b each having a photosensitive web 22a and 22b wound in a roller shape. Width of the first and second web feed mechanisms 32a and 32b capable of synchronously feeding the photosensitive webs 22a and 22b from the photosensitive web rolls 23a and 23b, and the protective film 30 of each of the fed photosensitive webs 22a and 22b. First and second processing mechanisms 36a and 36b that form a half-cut portion (processing portion) 34 that is a boundary position that can be cut in the direction, and an adhesive label 38 (see FIG. 3) having a non-adhesive portion 38a in part. First and second label adhering mechanisms 40a and 40b for adhering to each protective film 30 are provided.

  Downstream of the first and second label adhering mechanisms 40a and 40b are first and second reservoir mechanisms 42a and 42b for changing the photosensitive webs 22a and 22b from tact feed to continuous feed, and the respective photosensitive webs. First and second peeling mechanisms 44a and 44b for peeling the protective film 30 from the 22a and 22b at a predetermined length interval, and a substrate transport mechanism 45 for transporting the glass substrate 24 to a pasting position while being heated to a predetermined temperature. And an affixing mechanism 46 for adhering the photosensitive resin layer 28 exposed by peeling off the protective film 30 to the glass substrate 24 integrally and in parallel.

  First and second detection mechanisms 47a and 47b that directly detect the respective half-cut portions 34, which are the boundary positions of the photosensitive webs 22a and 22b, are disposed in the vicinity of the attachment position in the attachment mechanism 46. The

  In the vicinity of the downstream of the first and second web feed mechanisms 32a and 32b, the rear ends of the substantially used photosensitive webs 22a and 22b and the tips of the newly used photosensitive webs 22a and 22b are pasted, respectively. Is attached. A film terminal position detector 51 is disposed downstream of the attachment table 49 in order to control the displacement in the width direction due to the winding displacement of the photosensitive web rolls 23a and 23b. Here, the film terminal position adjustment is performed by moving the first and second web feed mechanisms 32a and 32b in the width direction, but may be performed by attaching a position adjustment mechanism combining rollers. The first and second web feed mechanisms 32a and 32b are configured with a multi-axis such as a biaxial or triaxial feeding shaft for loading the photosensitive web rolls 23a and 23b and feeding the photosensitive webs 22a and 22b. May be.

  The first and second processing mechanisms 36a and 36b are provided with a roller pair 50 for calculating the roll diameter of each photosensitive web roll 23a and 23b accommodated and wound in the first and second web feed mechanisms 32a and 32b. Arranged downstream. Each of the first and second processing mechanisms 36a and 36b includes a single round blade 52, and the round blade 52 travels in the width direction of the photosensitive webs 22a and 22b, and the remaining portion 30b of the protective film 30 ( Half-cut portions 34 are formed at two predetermined positions across FIG.

  As shown in FIG. 2, the half-cut portion 34 needs to cut at least the protective film 30. In practice, in order to cut the protective film 30 with certainty, the photosensitive resin layer 28 to the base film 26 are cut. The cutting depth of the round blade 52 is set. The round blade 52 is fixed without rotating and moves in the width direction of the photosensitive webs 22a and 22b to form a half-cut portion 34, or without sliding on the photosensitive webs 22a and 22b. A method of moving in the width direction while rotating to form the half-cut portion 34 is employed. In place of the round blade 52, the half-cut portion 34 may employ, for example, a method of forming with a knife blade, a push cutting blade (Thomson blade) or the like in addition to a cutting method using laser light or ultrasonic waves. .

  Two first and second processing mechanisms 36a and 36b are disposed apart from each other by a distance L corresponding to the width of the remaining portion 30b in the conveyance direction (arrow A direction) of the photosensitive webs 22a and 22b, respectively. Two half-cut portions 34 may be formed simultaneously with the remaining portion 30b (FIG. 2) of the protective film 30 interposed therebetween.

  For example, the half-cut portions 34 are set at positions where they enter into the glass substrates 24 on both sides by 10 mm each. A portion sandwiched between the half cut portions 34 between the glass substrates 24 functions as a mask when the photosensitive resin layer 28 is attached to the glass substrate 24 in a frame shape in an attaching mechanism 46 described later.

  The first and second label bonding mechanisms 40a and 40b connect the peeling portion 30aa at the front side of the peeling side and the peeling portion 30ab at the back side of the peeling side in order to leave the remaining portion 30b of the protective film 30 correspondingly between the glass substrates 24. An adhesive label 38 is supplied. As shown in FIG. 2, the protective film 30 has a remaining portion 30 b sandwiched between the first peeled portion 30 aa and the later peeled portion 30 ab.

  As shown in FIG. 3, the adhesive label 38 is formed in a strip shape, and is formed of, for example, the same resin material as the protective film 30. The adhesive label 38 has a non-adhesive portion (including a slight adhesion) 38a to which a pressure-sensitive adhesive is not applied at the center, and the front side of the non-adhesive portion 38a, that is, both ends in the longitudinal direction of the adhesive label 38 It has the 1st adhesion part 38b adhered to exfoliation part 30aa, and the 2nd adhesion part 38c adhered to back exfoliation part 30ab.

  As shown in FIG. 1, each of the first and second label bonding mechanisms 40a and 40b includes suction pads 54a to 54g, each of which can attach a maximum of seven adhesive labels 38 with a predetermined interval between them. A pedestal 56 for holding the photosensitive webs 22a and 22b from below is disposed so as to be movable up and down at the position where the adhesive label 38 is attached by the pads 54a to 54g.

  The first and second reservoir mechanisms 42a and 42b are arranged to absorb the speed difference between the tact conveyance of the upstream photosensitive webs 22a and 22b and the continuous conveyance of the downstream photosensitive webs 22a and 22b. A dancer roller 60 that can swing in a direction is provided. The second reservoir mechanism 42b includes a dancer for adjusting the lengths of the conveyance paths until the photosensitive webs 22a and 22b sent from the first and second web delivery mechanisms 32a and 32b reach the attaching mechanism 46. A roller 61 is provided.

  The first and second peeling mechanisms 44a and 44b arranged downstream of the first and second reservoir mechanisms 42a and 42b block the tension fluctuation on the delivery side of the photosensitive webs 22a and 22b, respectively, and the tension at the time of lamination is reduced. A suction drum 62 is provided for stabilization. In the vicinity of each suction drum 62, a peeling roller 63 is disposed, and the protective film 30 peeled off from the photosensitive webs 22a and 22b through the peeling roller 63 at an acute peeling angle except for the remaining portion 30b. Then, the film is wound around the protective film winding section 64.

  On the downstream side of the first and second peeling mechanisms 44a and 44b, first and second tension control mechanisms 66a and 66b capable of applying tension to the photosensitive webs 22a and 22b are disposed. Each of the first and second tension control mechanisms 66a and 66b includes a cylinder 68, and the tension dancer 70 swings and displaces under the driving action of the cylinder 68. The tension of 22a, 22b can be adjusted. The first and second tension control mechanisms 66a and 66b may be used as necessary, and may be deleted.

  The first and second detection mechanisms 47a and 47b include, for example, laser displacement meters and CCD cameras 72a and 72b that detect the half-cut portions 34 formed on the photosensitive webs 22a and 22b.

  The substrate transport mechanism 45 includes a plurality of sets of substrate heating units (for example, heaters) 74 disposed so as to sandwich the glass substrate 24 and a transport unit 76 that transports the glass substrate 24 in the direction of arrow C. The substrate heating unit 74 constantly monitors the temperature of the glass substrate 24. When an abnormality occurs, the conveyance unit 76 is stopped or alarmed, and the abnormal information is transmitted to cause the abnormal glass substrate 24 to be discharged NG in the subsequent process. It can be used for management or production management. An air levitation plate (not shown) is disposed in the conveyance unit 76, and the glass substrate 24 is levitated and conveyed in the direction of arrow C. The glass substrate 24 can be transported by a roller conveyor.

  The temperature measurement of the glass substrate 24 is preferably performed in the substrate heating unit 74 or immediately before the attachment position. The measuring method may be a contact type (for example, thermocouple) or a non-contact type.

  A substrate stocker 71 that accommodates a plurality of glass substrates 24 is provided upstream of the substrate heating unit 74. Each glass substrate 24 accommodated in the substrate stocker 71 is sucked and taken out by a suction pad 79 provided in the hand portion 75 a of the robot 75 and inserted into the substrate heating portion 74.

  The affixing mechanism 46 includes rubber rollers (compression rollers) 80a and 80b that are arranged vertically and heated to a predetermined temperature. Backup rollers 82a and 82b are in sliding contact with the rubber rollers 80a and 80b. One backup roller 82b is pressed toward the rubber roller 80b by the pressure cylinders 84a and 84b constituting the roller clamp portion 83.

  In the vicinity of the rubber roller 80a, a contact prevention roller 86 for preventing the photosensitive webs 22a and 22b from contacting the rubber roller 80a is movably disposed. In the vicinity of the upstream of the attaching mechanism 46, a preheating unit 87 for preheating the photosensitive webs 22a and 22b to a predetermined temperature is disposed. This preheating part 87 is provided with heating means, such as an infrared bar heater, for example.

  The glass substrate 24 is transported from the pasting mechanism 46 via a transport path 88 extending in the direction of arrow C. In the transport path 88, film transport rollers 90a and 90b and a substrate transport roller 92 are disposed. The distance between the rubber rollers 80 a and 80 b and the substrate transport roller 92 is preferably set to be equal to or less than the length of one glass substrate 24. In the vicinity of the downstream side of the substrate transport roller 92, a substrate front end detection sensor 94 that detects the front end portion (downstream end portion) of the transported glass substrate 24 is disposed.

  Further, on the downstream side close to the substrate tip detection sensor 94, as shown in FIG. 4, the protective film remaining on both ends of the glass substrate 24 in the transport direction and the photosensitive resin layer 28 attached to the glass substrate 24 is provided. For example, three CCD cameras 96a to 96c (detection units) each composed of an area sensor are disposed to detect both end portions of 30. These CCD cameras 96a to 96c are arranged at a predetermined interval in the width direction of the photosensitive webs 22a and 22b. The CCD cameras 96a to 96c are opposed to illumination light sources 98a to 98c that irradiate the CCD cameras 96a to 96c with light having a wavelength that does not sensitize the photosensitive resin layer 28 via the photosensitive webs 22a and 22b. Arranged.

  A cooling mechanism 123 and a base automatic peeling mechanism 142 are provided downstream of the substrate transport roller 92. The automatic base peeling mechanism 142 continuously peels the long base film 26 affixed to each glass substrate 24 separated by a predetermined interval, and includes a pre-peeling portion 144 and a relatively small-diameter peeling roller. 146, a winding shaft 148, and an automatic pasting machine 150. The take-up shaft 148 preferably applies torque control during driving to apply tension to the base film 26, while providing a tension detector (not shown) on the peeling roller 146, for example, to perform tension feedback control. . The pre-peeling portion 144 includes a peeling bar 156 that can move up and down between the glass substrates 24.

  A measuring instrument 158 that measures the area position of the photosensitive resin layer 28 actually attached to the glass substrate 24 is disposed downstream of the automatic base peeling mechanism 142. The measuring device 158 includes, for example, a camera 160 such as a CCD that images the glass substrate 24 on which the photosensitive resin layer 28 is attached.

  A photosensitive laminate stocker 132 in which a plurality of photosensitive laminates 106 whose area positions are measured in the photosensitive resin layer 28 by the measuring device 158 is accommodated downstream of the automatic base peeling mechanism 142. The photosensitive laminate 106 from which the base film 26 and the remaining portion 30b have been peeled off by the automatic base peeling mechanism 142 is sucked and taken out by the suction pad 136 provided on the hand portion 134a of the robot 134, and the photosensitive laminate stocker 133 is removed. Is housed in.

  In the manufacturing apparatus 20 configured as described above, the first and second web feed mechanisms 32a and 32b, the first and second processing mechanisms 36a and 36b, the first and second label adhesion mechanisms 40a and 40b, The first and second reservoir mechanisms 42a and 42b, the first and second peeling mechanisms 44a and 44b, the first and second tension control mechanisms 66a and 66b, and the first and second detection mechanisms 47a and 47b Although arranged above, conversely, the first and second web delivery mechanisms 32a, 32b to the first and second detection mechanisms 47a, 47b are arranged below the attaching mechanism 46. The photosensitive webs 22a and 22b may be turned upside down, and the photosensitive resin layer 28 may be attached to the lower side of the glass substrate 24. Further, the entire manufacturing apparatus 20 is configured linearly. It may be.

  As shown in FIG. 1, the manufacturing apparatus 20 is entirely controlled by a laminating process control unit 100, and for example, a laminating control unit 102, a substrate heating control unit 104, and a half for each functional unit of the manufacturing apparatus 20. A cut control unit 108 and the like are provided, and these are connected to each other by an in-process network. Further, the laminating process control unit 100 is connected to a factory network, and performs information processing for production such as production management and operation management of instruction information (condition setting and production information) from a factory CPU (not shown).

  The substrate heating control unit 104 receives the glass substrate 24 from the upstream process, controls the operation of heating the glass substrate 24 to a desired temperature and supplying the glass substrate 24 to the pasting mechanism 46, and handling of information on the glass substrate 24.

  The laminating control unit 102 controls each functional unit as a master of the entire process, and the position of the half cut portion 34 of the photosensitive webs 22a and 22b detected by the first and second detection mechanisms 47a and 47b. Based on the information, a control mechanism capable of controlling the relative position between each boundary position and the glass substrate 24 at the pasting position and the relative position between the respective boundary positions is configured.

  The half cut control unit 108 controls the first and second processing mechanisms 36a and 36b to form the half cut portion 34 at a predetermined position of the photosensitive webs 22a and 22b.

  FIG. 5 shows a block of a function for detecting the attachment state of the photosensitive resin layer 28 to the glass substrate 24 by the laminate control unit 102 and the half-cut control unit 108 and adjusting the position thereof.

  The laminate control unit 102 and the half cut control unit 108 include a roller control unit 123 that controls a roller drive motor 120 that rotationally drives the rubber roller 80a based on the roller feed pulse. The roller control unit 123 controls the rotation of the rubber roller 80a according to the detection signal of the front end portion of the glass substrate 24 by the substrate front end detection sensor 94 and the detection signal of the half cut portion 34 by the laser displacement meter and the CCD cameras 72a and 72b. .

  The laminate control unit 102 and the half-cut control unit 108 calculate the pasting position of the protective film 30 on the glass substrate 24 based on both ends of the glass substrate 24 and the protective film 30 detected by the CCD cameras 96a to 96c. An attachment position calculation unit 124 and an attachment state determination unit 126 that determines an attachment state according to the attachment position are included.

  The pasting state determination unit 126 supplies correction data to the roller feed pulse correction unit 128 or the half cut position correction unit 130 according to the determination result of the pasting state. The roller feed pulse correction unit 128 adjusts the roller feed pulse supplied to the roller control unit 123 according to the correction data. Further, the half-cut position correction unit 130 adjusts the processing timing of the first and second processing mechanisms 36a and 36b by the processing mechanism control unit 133 according to the correction data.

  The inside of the manufacturing apparatus 20 is partitioned into a first clean room 112a and a second clean room 112b through a partition wall 110. The first clean room 112a accommodates the first and second web feed mechanisms 32a and 32b to the first and second tension control mechanisms 66a and 66b, and the second clean room 112b contains the first and second detections. The mechanisms 47a and 47b and thereafter are accommodated. The first clean room 112a and the second clean room 112b communicate with each other through the penetration part 114.

  The operation of the manufacturing apparatus 20 configured as described above will be described below in relation to the manufacturing method according to the present invention.

  First, the photosensitive webs 22a and 22b are sent out from the respective photosensitive web rolls 23a and 23b attached to the first and second web delivery mechanisms 32a and 32b. The photosensitive webs 22a and 22b are conveyed to the first and second processing mechanisms 36a and 36b.

  In the first and second processing mechanisms 36a and 36b, the round blade 52 moves in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are moved from the protective film 30 to the photosensitive resin layer 28 to the base film. Cut to 26 to form a half-cut portion 34 (see FIG. 2). Furthermore, the photosensitive webs 22a and 22b are stopped after being conveyed in the direction of arrow A corresponding to the width L (FIG. 2) of the remaining portion 30b of the protective film 30, and the half-cut portion is moved under the running action of the round blade 52. 34 is formed. Thus, the photosensitive webs 22a and 22b are provided with a front peeling portion 30aa and a rear peeling portion 30ab with the remaining portion 30b interposed therebetween.

  The width L of the remaining portion 30b is set on the basis of the distance between the glass substrates 24 supplied between the rubber rollers 80a and 80b of the attaching mechanism 46 on the assumption that the photosensitive webs 22a and 22b do not extend. It shall be.

  Next, the respective photosensitive webs 22 a and 22 b are conveyed to the first and second label adhering mechanisms 40 a and 40 b, and a predetermined application site of the protective film 30 is arranged on the cradle 56. In the first and second label adhering mechanisms 40a and 40b, a predetermined number of adhesive labels 38 are adsorbed and held by the adsorbing pads 54b to 54g, and each adhering label 38 straddles the remaining portion 30b of the protective film 30, and a front peeling portion. 30aa and the rear peeling portion 30ab are integrally bonded (see FIG. 3).

  For example, the photosensitive webs 22a and 22b to which the seven adhesive labels 38 are bonded, as shown in FIG. 1, after the first and second reservoir mechanisms 42a and 42b are prevented from changing the tension on the delivery side, It is continuously conveyed to the first and second peeling mechanisms 44a and 44b. In the first and second peeling mechanisms 44a and 44b, the base film 26 of the photosensitive webs 22a and 22b is adsorbed and held by the suction drum 62, and the protective film 30 leaves the remaining portion 30b and the photosensitive webs 22a and 22b. Is peeled off. The protective film 30 is peeled off via the peeling roller 63 and taken up by the protective film take-up portion 64.

  Under the action of the first and second peeling mechanisms 44a and 44b, after the protective film 30 is peeled from the base film 26 leaving the remaining portion 30b, the photosensitive webs 22a and 22b are moved to the first and second tension control mechanisms. The tension is adjusted by 66a and 66b, and the half-cut portion 34 is detected by the laser displacement meters of the first and second detection mechanisms 47a and 47b and the CCD cameras 72a and 72b.

  In this case, on the assumption that the photosensitive webs 22a and 22b do not extend, when the laser displacement meter and the CCD cameras 72a and 72b detect the half cut portion 34 (FIG. 2) on the rear peeling portion 30ab side, The length of the conveyance path between the first and second detection mechanisms 47a, 47b and the attaching mechanism 46 so that the half-cut portion 34 on the front peeling portion 30aa side preceding the predetermined position between 80b is arranged. Is set.

  Therefore, after the laser displacement meter and the CCD cameras 72a and 72b detect the half-cut portion 34 on the rear peeling portion 30ab side, the photosensitive webs 22a and 22b are moved by a distance L corresponding to the width of the remaining portion 30b of the protective film 30. While being transported and stopped, the glass substrate 24 is transported to a pasting position in a preheated state under the action of the substrate transport mechanism 45. The glass substrate 24 is temporarily disposed between the rubber rollers 80a and 80b so as to correspond to the portions where the photosensitive resin layers 28 of the photosensitive webs 22a and 22b arranged in parallel are attached.

  Next, by raising the backup roller 82b and the rubber roller 80b, the glass substrate 24 is sandwiched between the rubber rollers 80a and 80b with a predetermined pressing pressure. The roller controller 123 (FIG. 5) drives the roller drive motor 120 based on the roller feed pulse, and conveys the photosensitive webs 22a and 22b and the glass substrate 24 in the direction of arrow C under the rotating action of the rubber roller 80a. As a result, the photosensitive resin layers 28 arranged in parallel are transferred (laminated) to the glass substrate 24. In this case, assuming that the photosensitive webs 22a and 22b do not extend, the photosensitive resin layer 28 of the photosensitive webs 22a and 22b is accurately moved from the half-cut portion 34 on the rear peeling portion 30ab side to a predetermined portion of the glass substrate 24. Will be transferred to.

  The laminating conditions include a speed of 1.0 m / min to 10.0 m / min, a temperature of the rubber rollers 80a and 80b of 90 ° C to 140 ° C, a rubber hardness of the rubber rollers 80a and 80b of 40 ° to 90 °, The pressing pressure (linear pressure) of the rubber rollers 80a and 80b is 50 N / cm to 400 N / cm.

  The substrate tip detection sensor 94 detects the tip of the glass substrate 24, and when the lamination of the photosensitive webs 22a and 22b on the glass substrate 24 is completed via the rubber rollers 80a and 80b, the rotation of the rubber roller 80a is stopped. On the other hand, the glass substrate 24 (hereinafter also referred to as a bonded substrate 24 a) on which the photosensitive webs 22 a and 22 b are laminated is clamped by a substrate transport roller 92. At this time, as will be described later, the positions of the rear end portion of the preceding glass substrate 24 and the rear end portion of the photosensitive resin layer 28 are detected using the CCD cameras 96a to 96c.

  Then, the rubber roller 80b is retracted in the direction away from the rubber roller 80a to release the clamp, and the rotation of the substrate transport roller 92 is started, so that the pasted substrate 24a moves in the direction of arrow C and the remaining portion 30b of the protective film 30 The half-cut portion 34 behind the protective film 30 is moved to a predetermined position near the lower portion of the rubber roller 80a. At this time, as will be described later, the positions of the front end portion of the glass substrate 24 and the front end portion of the photosensitive resin layer 28 that have been laminated are detected using the CCD cameras 96a to 96c.

  On the other hand, the next glass substrate 24 is transported toward the attaching position via the substrate transport mechanism 45. By repeating the above operation, the bonded substrate 24a is continuously manufactured.

  At that time, as shown in FIG. 4, the end portions of the pasting substrate 24 a are covered with the remaining portions 30 b. Therefore, when the photosensitive resin layer 28 is transferred to the glass substrate 24, the rubber rollers 80a and 80b are not soiled by the photosensitive resin layer 28.

  The pasted substrate 24 a laminated by the pasting mechanism 46 is cooled through the cooling mechanism 122 and then transferred to the pre-peeling portion 144. In the pre-peeling portion 144, the peeling bar 156 enters between the glass substrates 24 and rises, whereby the protective film 30 between the glass substrates 24 is lifted and peeled from the rear end and the leading end of the adjacent glass substrates 24. To do.

  Next, in the automatic base peeling mechanism 142, the base film 26 is continuously wound from the pasting substrate 24 a under the rotating action of the winding shaft 148. Further, after separation at a trouble stop or after separation at the time of defective product separation, the tip of the base film 26 of the pasted substrate 24a that has been newly laminated and the base film that is wound around the winding shaft 148 26 is automatically pasted via the automatic pasting machine 150.

  The bonded substrate 24a from which the base film 26 has been peeled is placed at an inspection station corresponding to the measuring instrument 158. In this inspection station, images of the glass substrate 24 and the photosensitive resin layer 28 are captured by the four cameras 160 with the glass substrate 24 positioned and fixed. Then, by applying image processing, the pasting position is calculated.

  The attachment substrate 24 a on which the attachment position of the photosensitive resin layer 28 is confirmed is taken out by the robot 134 and accommodated in the photosensitive laminate stocker 132 as the photosensitive laminate 106.

  By the way, the above description is based on the premise that the photosensitive webs 22a and 22b fed from the first and second web feed mechanisms 32a and 32b are supplied to the attaching mechanism 46 without extending. Since the flexible photosensitive webs 22a and 22b are extended by a predetermined amount under the influence of tension and heat, there is a concern that the photosensitive resin layer 28 may not be transferred to a predetermined position of the glass substrate 24 with high accuracy. The

  Accordingly, a method for correcting the position where the photosensitive resin layer 28 is attached to the glass substrate 24 will be described with reference to FIGS.

  First, when the lamination for one sheet is completed and the substrate tip detection sensor 94 detects the tip of the glass substrate 24 (step S1), the roller control unit 123 controls the roller drive motor 120 to rotate the rubber roller 80a. Stop. Thereby, conveyance of the photosensitive webs 22a and 22b is stopped (step S2).

  Next, the illumination light from the illumination light sources 98a to 98c is applied to the rear end portions of the glass substrate 24 and the photosensitive resin layer 28, and the illumination light transmitted through these is received by the CCD cameras 96a to 96c, whereby the rear end. Image information indicating the pasting state in the part is detected (step S3). The image information detected by the CCD cameras 96a to 96c is supplied to the pasting position calculation unit 124 and subjected to predetermined image processing to calculate the pasting position at the rear end (step S4). .

  In this case, as shown in FIG. 7A, the pasting position calculation unit 124, based on the image information acquired by the CCD cameras 96a to 96c, the photosensitive substrate pasted on the rear end of the glass substrate 24. Distances EB1, EB2 and EA1, EA2 between the photosensitive webs 22a, 22b and the rear end of the photosensitive resin layer 28 are calculated. Further, the pasting position calculation unit 124 calculates distances EB3, EA3, and EA4 between the side portions of the glass substrate 24 and the photosensitive webs 22a and 22b and between the photosensitive webs 22a and 22b.

  Next, the photosensitive webs 22a and 22b are transported by a distance L corresponding to the width of the remaining portion 30b of the protective film 30 to stop the transportation (step S5), and then again from the CCD cameras 96a to 96a. 96c is used to detect image information indicating the pasting state at the tip portions of the glass substrate 24 and the photosensitive resin layer 28 (step S6), and the sticking position calculation unit 124 calculates the sticking position of the tip portion ( Step S7).

  In this case, as shown in FIG. 7B, the affixing position calculation unit 124 includes the front end of the glass substrate 24 and the front end of the photosensitive resin layer 28 in the photosensitive webs 22a and 22b attached thereto. Distances FB1, FB2 and FA1, FA2 are calculated. In addition, the pasting position calculation unit 124 calculates distances FB3, FA3, and FA4 between the side portion of the glass substrate 24 and the photosensitive webs 22a and 22b and between the photosensitive webs 22a and 22b.

  The pasting state determination unit 126 determines the pasting state of the photosensitive resin layer 28 on the glass substrate 24 based on each pasting position calculated by the pasting position calculation unit 124 (step S8).

  For example, if the calculated distances EB1, EB2, EA1, EA2, FB1, FB2, FA1, and FA2 are all within the allowable range, it is determined that there is no positional deviation (step S9), and the positional deviation is corrected. Continue the pasting process.

  On the other hand, any one of the distances EB1, EB2, EA1, EA2, FB1, FB2, FA1, and FA2 exceeds the allowable range, but the relative positional relationship between the glass substrate 24 and the photosensitive webs 22a and 22b is determined. When the adjustment can be made within the allowable range, the pasting state determination unit 126 determines the positional deviation between the glass substrate 24 and the photosensitive webs 22a and 22b (step S10), and performs the inter-substrate feed. Correction data for correcting the feed pulse is supplied to the roller feed pulse correction unit 128. The roller feed pulse correction unit 128 corrects the roller feed pulse according to the correction data and supplies it to the roller control unit 123. The roller control unit 123 corrects the distance corresponding to the width L of the remaining portion 30b of the photosensitive webs 22a and 22b by an amount according to the correction data, and conveys the photosensitive webs 22a and 22b (step S11). As a result, the positional deviation between the both end portions of the glass substrate 24 and the both end portions of the photosensitive resin layer 28 can be within an allowable range.

  In addition, each of the distances EB1, EB2, EA1, EA2, FB1, FB2, FA1, FA2 exceeds the allowable range, and the relative positional relationship between the glass substrate 24 and the photosensitive webs 22a, 22b is adjusted. Even when the positional deviation cannot be corrected within the allowable range, it is assumed that the photosensitive webs 22a and 22b extend beyond the allowable range, or that the characteristic difference between the photosensitive webs 22a and 22b is large. In this case, the pasting state determination unit 126 supplies correction data for correcting the position of the half-cut portion 34 to the half-cut position correction unit 130. The half-cut position correcting unit 130 supplies the machining mechanism control unit 133 with the machining position data corrected according to the correction data, and the machining mechanism control unit 133 forms the half-cut portion 34 at a position according to the corrected machining position data. (Step S12).

  In addition, when the distances EB3 and EA4 between the side portion of the pasting substrate 24a and the side portions of the photosensitive webs 22a and 22b and the distance EA3 between the photosensitive webs 22a and 22b exceed an allowable range, For example, it is possible to adjust by moving the transport system or the photosensitive webs 22a and 22b supplying the photosensitive webs 22a and 22b in a direction perpendicular to the transport direction according to the correction data of these distances.

  As described above, by adjusting the position where the photosensitive resin layer 28 is attached to the glass substrate 24, a high-quality attached substrate 24a can be manufactured.

  In the first embodiment, two photosensitive web rolls 23a and 23b are used. However, the present invention is not limited to this. One photosensitive web roller or three or more photosensitive web rolls are used. A roller may be employed. The same applies to the second embodiment described below.

  FIG. 8 is a schematic configuration diagram of a manufacturing apparatus 300 according to the second embodiment of the present invention. In addition, the same referential mark is attached | subjected to the component same as the manufacturing apparatus 20 which concerns on 1st Embodiment, and the detailed description is abbreviate | omitted.

  The manufacturing apparatus 300 includes an inter-substrate web cutting mechanism 48 that is disposed downstream of the attaching mechanism 46 and that can integrally cut the photosensitive webs 22 a and 22 b between the glass substrates 24.

  In the manufacturing apparatus 300 configured as described above, the pasting substrate 24a laminated by the pasting mechanism 46 is transported in the direction of arrow C, as in the first embodiment. When the space between the bonded substrates 24a reaches a position corresponding to the inter-substrate web cutting mechanism 48, the inter-substrate web cutting mechanism 48 moves in the direction of arrow C at the same conveyance speed as the bonded substrate 24a, The two photosensitive webs 22a and 22b are integrally cut between the pasting substrates 24a.

  After this cutting, the inter-substrate web cutting mechanism 48 is returned to a predetermined standby position, while the base film 26 and the remaining portion 30b are sequentially peeled (single-wafer peeling) on the bonded substrate 24a, and the photosensitive laminate 106 is formed. Manufactured.

It is a schematic block diagram of the manufacturing apparatus which concerns on the 1st Embodiment of this invention. It is sectional drawing of the elongate photosensitive web used for the said manufacturing apparatus. It is explanatory drawing of the state by which the adhesive label was adhere | attached on the said elongate photosensitive web. It is explanatory drawing of the detection part which detects the affixing mechanism and the affixing state arrange | positioned in the downstream. It is a block diagram of the function which detects a sticking state and performs position adjustment. It is a flowchart of the process which detects and correct | amends a sticking state. It is explanatory drawing of the affixed state of the two photosensitive webs affixed on the glass substrate. It is a schematic block diagram of the manufacturing apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic block diagram of the manufacturing apparatus of patent document 1.

Explanation of symbols

DESCRIPTION OF SYMBOLS 20,300 ... Manufacturing apparatus 22a, 22b ... Photosensitive web 24 ... Glass substrate 26 ... Flexible base film 28 ... Photosensitive resin layer 30 ... Protective film 46 ... Pasting mechanism 47a, 47b ... Detection mechanism 80a, 80b ... Rubber roller 94: Substrate tip detection sensors 96a to 96c ... CCD camera 124 ... Paste position calculation unit 126 ... Paste state determination unit 128 ... Roller feed pulse correction unit 130 ... Half cut position correction unit

Claims (13)

A long photosensitive web in which a photosensitive material layer and a protective film are sequentially laminated on a support is sent out, and a processed portion corresponding to a boundary position between a peeled portion and a remaining portion is formed on the protective film, and the protection is performed. The peeling portion of the film is peeled off, and continuously fed between a pair of heated pressure rollers together with a substrate supplied at a predetermined interval, and the remaining portion of the protective film is disposed between the substrates and exposed. In a manufacturing apparatus for manufacturing a photosensitive laminate by attaching the photosensitive material layer to the substrate,
A detection unit that is disposed on the downstream side of the pressure roller and detects an end portion of the substrate and the processed portion of the long photosensitive web attached to the substrate;
A distance calculation unit for calculating a distance between the end and the processing site;
An apparatus for producing a photosensitive laminate, comprising: The manufacturing apparatus according to claim 1,
The distance calculation unit calculates a distance between an upstream end portion of the substrate and the processing portion and a distance between a downstream end portion of the substrate and the processing portion. Manufacturing equipment. The manufacturing apparatus according to claim 1 or 2,
An apparatus for manufacturing a photosensitive laminate, comprising: an adjustment unit that adjusts a position where the photosensitive material layer is attached to the substrate based on the distance. The manufacturing apparatus according to claim 3.
The said adjustment part adjusts the feed amount of the said elongate photosensitive web with respect to the said board | substrate based on the said distance, The manufacturing apparatus of the photosensitive laminated body characterized by the above-mentioned. The manufacturing apparatus according to claim 3.
The said adjustment part adjusts the process position of the said process site | part based on the said distance, The manufacturing apparatus of the photosensitive laminated body characterized by the above-mentioned. The manufacturing apparatus according to claim 1,
The said detection part detects the edge part of the said board | substrate and the said process site | part based on the light quantity of the light which permeate | transmits the said elongate photosensitive web, The manufacturing apparatus of the photosensitive laminated body characterized by the above-mentioned. The manufacturing apparatus according to claim 1,
An apparatus for producing a photosensitive laminate, wherein a photosensitive material layer of a plurality of long photosensitive webs is attached in parallel to the substrate. The manufacturing apparatus according to claim 7, wherein
The said detection part consists of the said several detection part which detects each said process part of each said elongate photosensitive web, The manufacturing apparatus of the photosensitive laminated body characterized by the above-mentioned. A long photosensitive web in which a photosensitive material layer and a protective film are sequentially laminated on a support is sent out, and a processed portion corresponding to a boundary position between a peeled portion and a remaining portion is formed on the protective film, and the protection is performed. The peeling portion of the film is peeled off, and continuously fed between a pair of heated pressure rollers together with a substrate supplied at a predetermined interval, and the remaining portion of the protective film is disposed between the substrates and exposed. In the manufacturing method of manufacturing a photosensitive laminate by attaching the photosensitive material layer to the substrate,
Detecting an end of the substrate and the processed portion of the elongated photosensitive web attached to the substrate;
Calculating a distance between the end and the processing site;
The manufacturing method of the photosensitive laminated body characterized by comprising. In the manufacturing method of Claim 9,
A method for producing a photosensitive laminate, comprising: adjusting a position where the photosensitive material layer is attached to the substrate based on the distance. In the manufacturing method of Claim 10,
A method for producing a photosensitive laminate, comprising: adjusting an attachment position of the photosensitive material layer by adjusting a feed amount of the long photosensitive web with respect to the substrate based on the distance. In the manufacturing method of Claim 10,
The manufacturing method of the photosensitive laminated body characterized by adjusting the attachment position of the said photosensitive material layer by adjusting the processing position of the said process part based on the said distance. In the manufacturing method of Claim 9,
A method for producing a photosensitive laminate, wherein a plurality of the long photosensitive webs are attached in parallel to the substrate.

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