JP2007084200A - Separating device and separating method for laminated body - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To favorably separate a second layer body from a laminated body by a simple structure and in a simple process, without generating tension fluctuation in the laminated body. <P>SOLUTION: This separating device 44 is provided with a suction drum 62 sucking and carrying a photosensitive web 22 and with a separation roller 64 linearly contacting to the outer peripheral face of the suction drum 62 while sandwiching the photosensitive web 22, and partially separating a protection film 30 from the photosensitive web 22. A roll interval h between the suction drum 62 and the separation roller 64 is set to have approximately the same dimension as the thickness t of the photosensitive web 22, and is constituted so as not to create a clearance between the suction drum 62 and the separation roller 64. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a laminate peeling apparatus and a peeling method for peeling at least partially the second layer body from a laminate in which at least a first layer body and a second layer body are laminated.

  For example, a liquid crystal panel substrate, a printed wiring substrate, and a PDP panel substrate are configured by attaching a photosensitive sheet (laminated body) having a photosensitive material (photosensitive resin) layer to the substrate surface. In the photosensitive sheet body, a photosensitive material layer and a protective film are sequentially laminated on a flexible plastic support.

  In view of this, a pasting apparatus used for pasting this type of photosensitive sheet body usually transports substrates such as a glass substrate and a resin substrate spaced apart from each other by a predetermined interval, and also a photosensitive unit pasted on the substrate. In accordance with the range of the material layer, a method of peeling the protective film from the photosensitive sheet body is adopted.

  For example, in the film sticking method and apparatus disclosed in Patent Document 1, as shown in FIG. 7, the laminated film 1a fed out from the film roll 1 is wound around the guide rolls 2a and 2b and is transported horizontally. It extends along the surface. A rotary encoder 3 that outputs a number of pulse signals corresponding to the feed amount of the laminated film 1a is attached to the guide roll 2b.

  A laminate film 1a extending along a horizontal film transport surface is wound around a suction roll 4, and a half cutter 5 and a cover film peeling device 6 are interposed between the guide roll 2b and the suction roll 4. And are provided.

  The half cutter 5 includes a pair of disk cutters 5a and 5b. The disc cutters 5a and 5b move along the film width direction of the laminated film 1a, so that the cover film (not shown) of the laminated film 1a is replaced with a photosensitive resin layer (not shown) on the back side thereof. Cut it together.

  The cover film peeling apparatus 6 winds the adhesive tape 7 a fed out from the adhesive tape roll 7 strongly to the cover film between the pressing rolls 8 a and 8 b, and then winds it by the take-up roll 9. As a result, the cover film is peeled off from the photosensitive resin layer and wound around the winding roll 9 together with the adhesive tape 7a.

  Downstream of the suction roll 4, lamination rolls 12 a and 12 b are provided for laminating and laminating the laminate film 1 a on the upper surfaces of a plurality of substrates 11 that are sequentially and intermittently conveyed by the substrate conveying device 10. . A support film take-up roll 13 is disposed downstream of the lamination rolls 12a and 12b. A translucent support film (not shown) attached to the substrate 11 is taken up by a support film take-up roll 13.

  In this case, in Patent Document 1, counting of pulses generated from the rotary encoder 3 is started at the timing when the half cutter 5 starts cutting the laminated film 1a. When the counted value of the pulses generated by the rotary encoder 3 reaches a numerical value that reaches a specific point of the cutting line of the multilayer film 1a, the substrate transport device 10 is driven at that timing. Accordingly, the substrate 11 is fed between the lamination rolls 12a and 12b in synchronization with the laminate film 1a. As a result, the laminated film 1a and the substrate 11 are aligned with each other.

Japanese Patent Laid-Open No. 11-34280 (FIG. 1)

  By the way, in said cover film peeling apparatus 6, after the adhesive tape 7a is crimped | bonded to the cover film between the press rolls 8a and 8b, it is wound up by the winding roll 9. FIG.

  At that time, since the cover film is peeled off from the photosensitive resin layer on the pressing roll 8b that is a pair of rollers, the laminate film 1a is likely to cause tension fluctuations in the laminate film 1a. Thereby, there exists a problem that the laminated body film 1a meanders, a wrinkle etc. generate | occur | produces in the said laminated body film 1a, or the photosensitive resin layer peels.

  The present invention solves this type of problem, and with a simple configuration and process, there is no fluctuation in tension in the laminate, and the second layer can be satisfactorily peeled from the laminate. It aims at providing the peeling apparatus and peeling method of a laminated body.

  The present invention is a laminate peeling apparatus and a peeling method for peeling at least partially the second layer body from a laminate in which at least a first layer body and a second layer body are laminated. The peeling device includes a suction roller and a peeling roller.

  Therefore, while the laminated body is sandwiched between the suction roller and the peeling roller, the laminated body is sucked and conveyed from the first layer body side by the suction roller, and the second layer body is wound around the outer peripheral surface of the peeling roller. Thus, by applying a predetermined tension to the second layer body, the second layer body is at least partially separated from the laminated body.

  The peeling roller is preferably composed of a conductive rubber roller, and the rubber hardness is preferably set in the range of 20 degrees to 90 degrees. Furthermore, the peeling roller is preferably pressed against the laminated body held on the outer peripheral surface of the suction roller with a linear pressure of 50 N / cm or less.

  Furthermore, the laminate is preferably a long photosensitive web in which a photosensitive material layer as a first layer and a protective film as a second layer are laminated on at least a support.

  In the present invention, since the laminated body is sucked and held by the suction roller from the first layer body side, it is possible to reliably prevent the tension fluctuation from occurring in the laminated body when the second layer body is peeled off. . Thereby, meandering or unnecessary peeling or the like does not occur in the laminated body, and the second layer body can be satisfactorily peeled from the laminated body with a simple configuration and process.

  In addition, the suction roller and the peeling roller are in contact with each other on a straight line with the laminated body interposed therebetween. Therefore, the second layer body can be easily and reliably peeled from the laminated body.

  FIG. 1 is a schematic configuration diagram of a laminate substrate manufacturing apparatus 20 incorporating a laminate peeling apparatus according to an embodiment of the present invention. The manufacturing apparatus 20 thermally transfers a photosensitive resin layer 29 (described later) of a long photosensitive web (photosensitive laminate film) 22 to a glass substrate 24 in a manufacturing process of a liquid crystal or organic EL color filter or the like. Do work.

  FIG. 2 is a cross-sectional view of the photosensitive web 22 used in the manufacturing apparatus 20. The photosensitive web 22 includes a flexible base film (support layer) 26, a cushion layer (thermoplastic resin layer) 27, an intermediate layer (oxygen barrier film) 28, a photosensitive resin layer (first layer body) 29, and a protective layer. A film (second layer body) 30 is laminated. The photosensitive web 22 may be composed of a base film 26, a photosensitive resin layer 29, and a protective film 30.

  The base film 26 is formed of polyethylene terephthalate (PET), the cushion layer 27 is formed of ethylene and vinyl oxide copolymer, the intermediate layer 28 is formed of polyvinyl alcohol, and the photosensitive resin layer 29 is alkali-soluble. The protective film 30 is formed of polyethylene, polypropylene, or the like, and is formed of a colored photosensitive resin composition containing a binder, a monomer, a photopolymerization initiator, and a colorant.

  As shown in FIG. 1, the manufacturing apparatus 20 accommodates a photosensitive web roll 22a in which a photosensitive web 22 is wound in a roll shape, and a web feed mechanism 32 that feeds the photosensitive web 22 from the photosensitive web roll 22a. And a half-cut mechanism 36 for forming a half-cut portion 34 that can be cut in the width direction on the protective film 30 of the fed photosensitive web 22, and an adhesive label 38 having a non-adhesive portion 38a in part (FIG. 3). And a label adhering mechanism 40 for adhering the protective film 30 to the protective film 30. Note that two sets of the half-cut mechanism 36 may be disposed in the direction of the arrow A with a predetermined interval therebetween, and two half-cut portions 34 may be formed at the same time.

  Downstream of the label adhering mechanism 40, a reservoir mechanism 42 for changing the photosensitive web 22 from tact feed to continuous feed, and the protective film 30 is peeled off from the photosensitive web 22 at a predetermined length interval. The peeling device 44 according to the above, the heating mechanism 45 that conveys the glass substrate 24 to a pasting position in a state where the glass substrate 24 is heated to a predetermined temperature, and the photosensitive resin layer 29 exposed by the peeling of the protective film 30 are formed on the glass substrate 24. A pasting mechanism 46 for pasting is provided. Note that an object to be processed in which the photosensitive web 22 is attached to the glass substrate 24 by the attaching mechanism 46 is hereinafter simply referred to as a substrate 24a.

  A detection mechanism 47 that directly detects a half-cut portion 34 that is a boundary position of the photosensitive web 22 is disposed in the vicinity of the pasting position in the pasting mechanism 46, and downstream of the pasting mechanism 46. An inter-substrate web cutting mechanism 48 for cutting the photosensitive web 22 between the glass substrates 24 is disposed. Upstream of the inter-substrate web cutting mechanism 48, a web cutting mechanism 48a used at the start of operation and at the end of operation is provided.

  In the vicinity of the downstream side of the web feed mechanism 32, a joining base 49 for joining the rear end of the photosensitive web 22 that has been substantially used and the tip of the photosensitive web 22 that is newly used is disposed. A film end position detector 51 is disposed downstream of the joining base 49 in order to control the deviation in the width direction due to the winding deviation of the photosensitive web roll 22a.

  The half-cut mechanism 36 is disposed downstream of the roller pair 50 for calculating the roll diameter of the photosensitive web roll 22a accommodated and wound in the web feed mechanism 32. The half-cut mechanism 36 includes a slide base 52 that can be moved back and forth in a direction orthogonal to the conveyance direction (arrow A direction) of the photosensitive web 22. A rotating round blade (cutter) 54 is fixed to the slide base 52, and a cut receiving base 56 is disposed at a position facing the rotating round blade 54 with the photosensitive web 22 interposed therebetween.

  As shown in FIG. 2, the half-cut portion 34 needs to cut at least the protective film 30, and in practice, the photosensitive resin layer 29 to the intermediate layer 28 are cut to securely cut the protective film 30. In addition, the cutting depth of the rotating round blade 54 is set. Instead of the rotating round blade 54, for example, the half-cut portion 34 employs a cutting method using a fixed round blade or ultrasonic waves, a knife blade, a band-shaped push cutting blade (Thomson blade) described later, and the like. May be. The push cutting blade includes an oblique push cutting structure in addition to a vertical push cutting structure.

  The half-cut part 34 sets the space | interval of the glass substrate 24, for example, is set in the position which respectively entered 10 mm each to the said glass substrate 24 of both sides. A portion sandwiched between the half cut portions 34 between the glass substrates 24 functions as a mask when the photosensitive resin layer 29 is attached to the glass substrate 24 in a frame shape in an attaching mechanism 46 described later.

  The label bonding mechanism 40 supplies an adhesive label 38 that connects the peeling portion 30aa on the front side of the peeling side and the peeling portion 30ab on the back side of the peeling side in order to leave the remaining portion 30b of the protective film 30 correspondingly between the glass substrates 24. . As shown in FIG. 2, the protective film 30 has a remaining portion 30 b sandwiched between the first peeled portion 30 aa and the later peeled portion 30 ab.

  As shown in FIG. 3, the adhesive label 38 is formed in a strip shape, and is formed of, for example, the same resin material as the protective film 30. The adhesive label 38 has a non-adhesive portion (including a slight adhesion) 38a to which a pressure-sensitive adhesive is not applied at the center, and the front side of the non-adhesive portion 38a, that is, both ends in the longitudinal direction of the adhesive label 38 It has the 1st adhesion part 38b adhered to exfoliation part 30aa, and the 2nd adhesion part 38c adhered to back exfoliation part 30ab.

  As shown in FIG. 1, the label adhering mechanism 40 includes adsorbing pads 58a to 58e capable of adhering a maximum of five adhering labels 38 at predetermined intervals, and the adhering labels by the adsorbing pads 58a to 58e. At the attachment position 38, a pedestal 59 for holding the photosensitive web 22 from below is disposed so as to be movable up and down.

  The reservoir mechanism 42 absorbs the difference in speed between the tact conveyance of the upstream photosensitive web 22 and the continuous conveyance of the downstream photosensitive web 22, but in order to further prevent fluctuations in tension, the reservoir mechanism 42 is a oscillating duplex unit. It is preferable to provide a dancer 61 composed of the roller 60. Note that the roller 60 may be one or three or more depending on the reserve amount.

  As shown in FIGS. 1 and 4, the peeling device 44 is disposed downstream of the reservoir mechanism 42, and includes a suction drum (suction roller) 62 and an outer peripheral surface of the suction drum 62 with the photosensitive web 22 interposed therebetween. And a peeling roller 64 in contact with a straight line. The protective film 30 that is peeled off from the photosensitive web 22 at an acute peeling angle via the peeling roller 64 is wound around the protective film winding shaft 66 except for the remaining portion 30b. The roll interval h between the suction drum 62 and the peeling roller 64 is set to be approximately the same as the thickness t of the photosensitive web 22, and is configured so that no gap is generated therebetween.

  As shown in FIG. 5, the suction drum 62 includes a fixed cylinder 68 and a movable cylinder 70, and an opening 72 is formed in the fixed cylinder 68 over a predetermined angular range. The inside of the fixed cylinder 68 is sucked in communication with a negative pressure generator (not shown). The movable cylinder 70 has a large number of small holes 74 formed through the outer peripheral surface thereof, and can adsorb the photosensitive web 22 in an area where the opening 72 of the fixed cylinder 68 is disposed.

  As shown in FIG. 1, the protective film take-up shaft 66 is connected to a torque motor 75 in order to apply a predetermined tension to the protective film 30. Instead of the torque motor 75, for example, torque control by a servo motor is performed, the winding speed of the protective film winding shaft 66 is controlled in synchronization with the rotation speed of the suction drum 62, or a powder brake is combined. Alternatively, torque control such as a slip torque shaft may be performed.

  For example, the suction drum 62 is set to have a diameter of 150 mm, while the peeling roller 64 is set to have a diameter of 30 mm to 150 mm. The peeling roller 64 is composed of a conductive rubber roller, for example, a silicone roller, and has a rubber thickness of 5 mm and a rubber hardness in the range of 20 degrees to 90 degrees. The peeling roller 64 is pressed against the photosensitive web 22 held on the outer peripheral surface of the suction drum 62 via a cylinder (not shown) or an electric actuator with a linear pressure of 50 N / cm or less.

  A tension control mechanism 76 that can apply tension to the photosensitive web 22 is disposed on the downstream side of the peeling device 44. The tension control mechanism 76 includes a cylinder 78. When the tension dancer 80 is oscillated and displaced under the driving action of the cylinder 78, the tension of the photosensitive web 22 with which the tension dancer 80 slides can be adjusted. The tension control mechanism 76 may be used as necessary, and can be deleted.

  The detection mechanism 47 includes a photoelectric sensor 82 such as a laser sensor or a photosensor. The photoelectric sensor 82 is a wedge-shaped groove-shaped portion of the half-cut portion 34, a step due to the thickness of the protective film 30, or these A change due to the combination is directly detected, and this detection signal is used as a boundary position signal. The photoelectric sensor 82 is disposed to face the backup roller 83. Instead of the photoelectric sensor 82, an image inspection means such as a non-contact displacement meter or a CCD camera may be used.

  The position data of the half-cut region 34 detected by the detection mechanism 47 can be statistically processed and graphed in real time, and an alarm can be issued when a variation abnormality or bias occurs.

  Further, instead of directly detecting the half-cut portion 34, a hole or notch is formed in the vicinity of the half-cut mechanism 36 corresponding to the half-cut portion 34, or a hole is formed by laser processing or aqua jet processing. A mark portion may be formed by providing a notch or marking by an ink jet or a printer, and the mark portion may be detected and used as a boundary position signal.

  The heating mechanism 45 includes a transport mechanism 84 for transporting the glass substrate 24 in the arrow C direction, and the transport mechanism 84 includes a plurality of resin disk-shaped transport rollers 86 arranged in the arrow C direction. A receiving portion 88 that receives the glass substrate 24 is provided on the upstream side in the arrow C direction of the transport mechanism 84. A plurality of heating furnaces 90 are arranged on the downstream side of the receiving unit 88.

  The heating mechanism 45 constantly monitors the temperature of the glass substrate 24. When an abnormality occurs, the conveyance roller 86 is stopped or alarmed, and abnormal information is transmitted to cause the abnormal glass substrate 24 to be NG discharged and quality control in a subsequent process. Or it can be used for production management. Further, the transport mechanism 84 may be configured such that an air levitation plate (not shown) is provided and the glass substrate 24 is floated and transported in the direction of arrow C.

  A substrate stocker 100 that accommodates a plurality of glass substrates 24 is provided upstream of the heating mechanism 45. The substrate stocker 100 is provided with a dust removal fan unit (or duct unit) 102 on three side surfaces other than the loading and unloading ports. The fan unit 102 blows out the static elimination clean air into the substrate stocker 100. Each glass substrate 24 accommodated in the substrate stocker 100 is sucked and taken out by the suction pad 106 provided in the hand portion 104 a of the robot 104 and is carried into the receiving portion 88.

  The affixing mechanism 46 is provided with rubber rollers 110a and 110b for laminating that are arranged vertically and heated to a predetermined temperature. The backup rollers 112a and 112b are slidably contacted with the rubber rollers 110a and 110b, and the backup roller 112b is pressed toward the rubber roller 110b via the roller clamp portion 114.

  In the vicinity of the rubber roller 110a, a contact preventing roller 116 for preventing the photosensitive web 22 from contacting the rubber roller 110a is movably disposed. In the vicinity of the upstream of the attaching mechanism 46, a preheating unit 117 for preheating the photosensitive web 22 to a predetermined temperature in advance is disposed. The preheating unit 117 includes heating means such as an infrared bar heater.

  A film transport roller 118a and a substrate transport roller 118b are disposed between the attaching mechanism 46 and the inter-substrate web cutting mechanism 48. A cooling mechanism 120 is disposed on the downstream side of the inter-substrate web cutting mechanism 48, and a base peeling mechanism 122 is disposed on the downstream side of the cooling mechanism 120. After the photosensitive web 22 between the substrates 24a is cut through the inter-substrate web cutting mechanism 48, the cooling mechanism 120 supplies the substrate 24a with cold air and performs a cooling process. Specifically, the cold air temperature is set to 10 ° C., and the air volume is set to 1.0 to 2.0 m / min. In addition, you may naturally cool with the photosensitive laminated body stocker 136 mentioned later, without using the cooling mechanism 120. FIG.

  The base peeling mechanism 122 disposed downstream of the cooling mechanism 120 includes a plurality of suction pads 124 for sucking the substrate 24a from below, and the robot hand 126 is placed in a state where the substrate 24a is sucked and held by the suction pads 124. Then, the base film 26 and the remaining portion 30b are peeled off. On the upstream side, downstream side, and both sides of the suction pad 124, static elimination blows (not shown) that inject static elimination clean air from the side surfaces in four directions are disposed on the entire laminate portion of the substrate 24a. Note that the peeling may be performed with the table vertical, tilted, or turned upside down for dust removal.

  A photosensitive laminate stocker 136 that accommodates a plurality of laminate substrates 130 is provided downstream of the base peeling mechanism 122. The laminate substrate 130 from which the base film 26 and the remaining portion 30b have been peeled off from the substrate 24a by the base peeling mechanism 122 is sucked and taken out by the suction pad 134 provided on the hand portion 132a of the robot 132, and the photosensitive laminate stocker. 136.

  The photosensitive laminate stocker 136 is provided with a dust removal fan unit (or duct unit) 102 on three side surfaces other than the inlet and outlet ports. The fan unit 102 blows out neutralizing clean air into the photosensitive laminate stocker 136.

  In the manufacturing apparatus 20, the web feed mechanism 32, the half cut mechanism 36, the label adhesion mechanism 40, the reservoir mechanism 42, the peeling device 44, the tension control mechanism 76, and the detection mechanism 47 are arranged above the pasting mechanism 46. On the contrary, the detection mechanism 47 from the web delivery mechanism 32 is disposed below the attaching mechanism 46 so that the photosensitive web 22 is turned upside down so that the photosensitive resin layer 29 is attached to the glass substrate 24. You may affix on the lower side, and you may comprise the said manufacturing apparatus 20 whole on a straight line.

  The manufacturing apparatus 20 is entirely controlled via a laminating process control unit 140. For each functional unit of the manufacturing apparatus 20, for example, a laminating control unit 142, a substrate heating control unit 144, a base peeling control unit 146, and the like are provided. Provided, and these are connected by an in-process network.

  The laminating process control unit 140 is connected to a factory network, and performs information processing for production such as production management and operation management of instruction information (condition setting and production information) from a factory CPU (not shown).

  The laminating control unit 142 controls each functional unit as a master of the entire process. For example, based on the position information of the half-cut portion 34 of the photosensitive web 22 detected by the detection mechanism 47, for example, the heating mechanism 45. The control mechanism which controls is comprised.

  The base peeling control unit 146 controls the operation of peeling the base film 26 from the substrate 24a supplied from the attaching mechanism 46, and discharging the laminated body substrate 130 in the downstream process, and the substrate 24a and the laminated body. Information on the substrate 130 is controlled to be handled.

  The inside of the manufacturing apparatus 20 is partitioned into a first clean room 152a and a second clean room 152b through a partition wall 150. The first clean room 152a accommodates the web feed mechanism 32 to the tension control mechanism 76, and the second clean room 152b accommodates the detection mechanism 47 and the subsequent elements. The first clean room 152a and the second clean room 152b communicate with each other through the penetrating portion 154.

  The operation of the manufacturing apparatus 20 configured as described above will be described below in relation to the peeling method according to this embodiment.

  First, as shown in FIG. 1, the photosensitive web 22 is fed out from a photosensitive web roll 22 a attached to the web feed mechanism 32, and the photosensitive web 22 is sent to a half-cut mechanism 36.

  In the half-cut mechanism 36, the slide base 52 moves in the width direction of the photosensitive web 22 (direction orthogonal to the transport direction). For this reason, the rotating round blade 54 rotates while moving in a state where it is cut into the half cut portion 34 of the photosensitive web 22 to a desired depth. As a result, a half-cut portion 34 cut from the protective film 30 to a desired depth is formed in the photosensitive web 22 (see FIG. 2).

  As shown in FIG. 1, the half-cut photosensitive web 22 is conveyed in the direction of arrow A corresponding to the dimension of the remaining portion 30 b of the protective film 30, and then temporarily stopped to run the rotating round blade 54. The next half-cut portion 34 is formed under the action. For this reason, the photosensitive web 22 is provided with a front peeling portion 30aa and a rear peeling portion 30ab across the remaining portion 30b (see FIG. 2).

  Further, the photosensitive web 22 is conveyed to the label adhering mechanism 40, and a predetermined application portion of the protective film 30 is disposed on the receiving table 59. In the label adhering mechanism 40, a predetermined number of adhering labels 38 are adsorbed and held by the adsorbing pads 58a to 58e, and each adhering label 38 straddles the remaining portion 30b of the protective film 30, and the front peeling portion 30aa and the rear peeling portion 30ab. Are integrally bonded to each other (see FIG. 3).

  For example, as shown in FIG. 1, the photosensitive web 22 to which five adhesive labels 38 are bonded is continuously conveyed to the peeling device 44 after preventing the tension fluctuation on the sending side through the reservoir mechanism 42. The

  In the peeling device 44, the photosensitive web 22 is sandwiched between the suction drum 62 and the peeling roller 64, and the base film 26 of the photosensitive web 22 is sucked and held on the suction drum 62. In this state, the suction drum 62 is rotated, and a predetermined tension is applied to the protective film 30 via the torque motor 75.

  Therefore, the protective film 30 is peeled off from the photosensitive web 22 leaving the remaining portion 30 b, and taken up on the protective film take-up shaft 66 via the peeling roller 64. In addition, it is preferable to spray static elimination air on a peeling site | part.

  In this case, in the present embodiment, the photosensitive web 22 is firmly held under the suction action of the suction drum 62, and an impact when the protective film 30 is peeled off from the photosensitive web 22 is caused by the downstream photosensitive film. It does not act on the sexual web 22. Thereby, the impact of peeling is not transmitted to the attaching mechanism 46, and it is possible to satisfactorily prevent the occurrence of streak-like defective portions or the like in the laminated portion of the glass substrate 24.

  Moreover, as shown in FIG. 4, the suction drum 62 and the peeling roller 64 are in contact with each other on a straight line with the photosensitive web 22 in between (roll interval h = thickness t). For this reason, only the protective film 30 can be easily and reliably peeled off from the photosensitive web 22.

  That is, when the experiment was performed to peel the protective film 30 from the photosensitive web 22 by variously changing the roll interval h, the result shown in FIG. 6 was obtained. Here, the peeling evaluation is an evaluation as to whether or not peeling of the photosensitive resin layer 29 or the cushion layer 27 occurs when the protective film 30 is peeled from the photosensitive web 22. “◯” when the photosensitive resin layer 29 and the cushion layer 27 are not peeled, “Δ” when the photosensitive resin layer 29 or the cushion layer 27 is slightly peeled, and further, the photosensitive resin layer 29 or When the cushion layer 27 has significant peeling, it is indicated by “x”.

  As a result, if there is a gap larger than the thickness t of the photosensitive web 22 between the suction drum 62 and the peeling roller 64, that is, if the roll interval h = thickness t + n (n = 1 or more), When the protective film 30 is peeled from the photosensitive web 22, the photosensitive resin layer 29 or the cushion layer 27 is peeled off.

  In contrast, in the present embodiment in which the photosensitive web 22 is in close contact between the suction drum 62 and the peeling roller 64, that is, when the roll interval h = thickness t, the photosensitive resin layer 29 and the cushion layer 27 are peeled off. There is no effect, and the effect that the peeling treatment of the protective film 30 is performed with high accuracy and goodness can be obtained.

  Further, in the present embodiment, the peeling roller 64 is composed of a conductive rubber roller. For this reason, even if the adhesive label 38 is adhered to the photosensitive web 22 and the thickness varies, the peeling roller 64 can be easily deformed to absorb the variation in thickness. Therefore, the shape of the adhesive label 38 is not transferred to the photosensitive resin layer 29, and it is unnecessary to adjust the distance between the suction drum 62 and the peeling roller 64, and there is an advantage that the maintainability is improved satisfactorily. .

  Furthermore, the rubber hardness of the peeling roller 64 is set in a range of 20 degrees to 90 degrees, and is pressed against the photosensitive web 22 held on the outer peripheral surface of the suction drum 62 with a linear pressure of 50 N / cm or less. It has been. As a result, there is no occurrence of traces or streaks in the photosensitive resin layer 29, and the photosensitive resin layer 29 can be maintained well and the protective film 30 can be efficiently peeled off.

  As described above, after the protective film 30 is peeled off from the base film 26 leaving the remaining portion 30b under the action of the peeling device 44, the photosensitive web 22 is tension-adjusted by the tension control mechanism 76, and The detection mechanism 47 detects the half-cut region 34 by the photoelectric sensor 82.

  The photosensitive web 22 is quantitatively conveyed to the affixing mechanism 46 under the rotational action of the film conveying roller 118a based on the detection information of the half cut portion 34. At that time, the contact prevention roller 116 waits upward, and the rubber roller 110b is disposed below.

  On the other hand, in the heating mechanism 45, the heating temperature in each heating furnace 90 is set corresponding to the laminating temperature in the attaching mechanism 46. Therefore, the robot 104 holds the glass substrate 24 accommodated in the substrate stocker 100 and carries the glass substrate 24 into the receiving unit 88. The glass substrate 24 is tact-conveyed sequentially from the receiving unit 88 to each heating furnace 90 under the rotating action of the conveyance roller 86 constituting the conveyance mechanism 84.

  In the heating furnace 90 disposed in the rear stage in the direction of arrow C, the glass substrate 24 is accurately stopped at a predetermined stop position, and the glass substrate 24 is attached to the photosensitive resin layer 29 of the photosensitive web 22. Is temporarily disposed between the rubber rollers 110a and 110b.

  In this state, by raising the backup roller 112b and the rubber roller 110b via the roller clamp portion 114, the glass substrate 24 is sandwiched between the rubber rollers 110a and 110b with a predetermined pressing pressure. Further, the photosensitive resin layer 29 is transferred (laminated) to the glass substrate 24 by heating and melting under the rotating action of the rubber roller 110a.

  Here, as the lamination conditions, the speed is 1.0 m / min to 10.0 m / min, the temperature of the rubber rollers 110a and 110b is 80 ° C. to 140 ° C., and the rubber hardness of the rubber rollers 110a and 110b is 40 degrees to 90 degrees, The pressing pressure (linear pressure) of the rubber rollers 110a and 110b is 50 N / cm to 400 N / cm.

  The substrate 24 a having the photosensitive web 22 attached to the glass substrate 24 is quantitatively conveyed in the direction of arrow C, cooled through the cooling mechanism 120, and then transferred to the base peeling mechanism 122. In the base peeling mechanism 122, the base film 26 and the remaining portion 30b are peeled off via the robot hand 126 in a state where the substrate 24a is sucked and held on the suction pad 124, whereby the multilayer substrate 130 is obtained.

  At that time, neutralizing clean air is sprayed from the side surfaces in the four directions to the entire laminate portion of the substrate 24a upstream, downstream, and both sides of the suction pad 124. Note that the laminate substrate 130 is held by the hand 132a of the robot 132 and is stored in a predetermined number in the photosensitive laminate stocker 136.

It is a schematic block diagram of the manufacturing apparatus incorporating the peeling apparatus which concerns on embodiment of this invention. It is sectional drawing of the elongate photosensitive web used for the said manufacturing apparatus. It is explanatory drawing of the state by which the adhesive label was adhere | attached on the said elongate photosensitive web. It is a schematic block diagram of the said peeling apparatus. It is a perspective explanatory view showing a schematic structure of a suction drum constituting the peeling device. It is explanatory drawing of a relationship between a roll space | interval and peeling evaluation. It is a schematic block diagram of the film cutting device which concerns on a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 20 ... Manufacturing apparatus 22 ... Photosensitive web 22a ... Photosensitive web roll 24 ... Glass substrate 26 ... Base film 27 ... Cushion layer 29 ... Photosensitive resin layer 30 ... Protective film 32 ... Web delivery mechanism 34 ... Half cut part 36 ... Half Cutting mechanism 40 ... Label adhesion mechanism 42 ... Reservoir mechanism 44 ... Peeling device 45 ... Heating mechanism 46 ... Pasting mechanism 47 ... Detection mechanism 48 ... Inter-substrate web cutting mechanism 54 ... Rotary round blade 62 ... Suction drum 64 ... Peeling roller 66 ... Protective film take-up shaft 75 ... Torque motor 76 ... Tension control mechanism 84 ... Conveying mechanism 110a, 110b ... Rubber roller 120 ... Cooling mechanism 122 ... Base peeling mechanism 140 ... Lamination process control unit 142 ... Lamination control unit 144 ... Substrate heating control unit 146 ... Base peeling controller

Claims (8)

A laminate peeling apparatus for peeling at least partially the second layer body from a laminate in which at least the first and second layer bodies are laminated,
A suction roller for adsorbing and transporting the laminate from the first layer side;
A peeling roller for contacting the outer circumferential surface of the suction roller in a straight line with the laminate interposed therebetween, and for peeling the second layer at least partially from the laminate,
The peeling apparatus of the laminated body characterized by comprising. The peeling apparatus according to claim 1, wherein the peeling roller is composed of a conductive rubber roller,
A laminate peeling apparatus, wherein the rubber hardness is set in a range of 20 to 90 degrees.   3. The peeling apparatus according to claim 1, wherein the peeling roller is pressed with a linear pressure of 50 N / cm or less against the laminated body held on the outer peripheral surface of the suction roller. Peeling device.   4. The peeling apparatus according to claim 1, wherein the laminate includes at least a photosensitive material layer as the first layer body and a protective film as the second layer body on a support. A laminate peeling apparatus characterized by being a laminated long photosensitive web. A laminate peeling method for at least partially peeling the second layer body from a laminate in which at least the first and second layer bodies are laminated,
In a state where the laminate is sandwiched between a suction roller and a peeling roller, the laminate is sucked and conveyed from the first layer body side by the suction roller, and
Wrapping the second layer body around the outer peripheral surface of the peeling roller and applying a predetermined tension to the second layer body, the second layer body is at least partially peeled from the laminate. To peel off the laminate. The peeling method according to claim 5, wherein the peeling roller is composed of a conductive rubber roller,
A method for peeling a laminate, wherein the rubber hardness is set in a range of 20 to 90 degrees.   The peeling method according to claim 5 or 6, wherein the peeling roller is pressed against the laminated body held on the outer peripheral surface of the suction roller with a linear pressure of 50 N / cm or less. Peeling method.   The peeling method according to any one of claims 5 to 7, wherein the laminate includes at least a photosensitive material layer as the first layer body and a protective film as the second layer body on a support. A laminate peeling method, characterized in that it is a laminated long photosensitive web.

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