JP2008155465A - Apparatus and method for manufacturing photosensitive laminated body - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for manufacturing a photosensitive laminated body which can highly accurately detects a position of a processed site formed on a long photosensitive web to a reference position by a simple constitution and can manufacture the photosensitive laminated body with a high quality. <P>SOLUTION: Long photosensitive webs 22a and 22b are irradiated with illuminating light beams from two dimensional light sources 69a and 69b, and the transmitted light beams are received by CCD cameras 72a and 72b constituting first and second detecting mechanisms 47a and 47b to photograph an image of a half-cut site 34 together with reference pieces 67a and 67b arranged at the reference positions. The amounts of positional deviations ΔLa, ΔLb and ΔMa, ΔMb of the half-cut site 34 to the reference pieces 67a and 67b are calculated from the image photographed, and according to the amounts of positional deviations ΔLa, ΔLb and ΔMa, ΔMb, a rubber roller 80a is driven to correct the amounts of feeding of the photosensitive webs 22a and 22b. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention provides a photosensitive laminate by feeding a substrate and a long photosensitive web provided with a photosensitive material layer on a support between a pair of pressure rollers, and affixing the photosensitive material layer to the substrate. The present invention relates to a manufacturing apparatus and a manufacturing method for a photosensitive laminate.

  For example, in a liquid crystal panel substrate, a printed wiring substrate, and a PDP panel substrate, a photosensitive sheet body (photosensitive web) having a photosensitive resin layer (photosensitive material layer) is attached to the substrate surface. In the photosensitive sheet body, a photosensitive resin layer and a protective film are sequentially laminated on a flexible plastic support.

  A manufacturing apparatus used for attaching this type of photosensitive sheet body usually conveys a glass substrate or a resin substrate such as a glass substrate or a resin substrate spaced apart from each other by a predetermined distance, and a photosensitive resin layer attached to the substrate. Corresponding to this range, a method of peeling the protective film from the photosensitive sheet body is adopted.

  For example, in the manufacturing apparatus disclosed in Patent Document 1, as shown in FIG. 9, a laminated body film (photosensitive sheet body) 1a fed out from a film roll 1 is wound around guide rollers 2a and 2b to be horizontal. It extends along the film transport surface. A rotary encoder 3 that outputs a number of pulse signals corresponding to the feed amount of the laminated film 1a is attached to the guide roller 2b.

  A laminate film 1a extending along a horizontal film transport surface is wound around a suction roller 4, and a half cutter device 5 and a cover film peeling device are provided between the guide roller 2b and the suction roller 4. 6 are provided.

  The half-cutter device 5 includes a pair of disc cutters 5a and 5b that are separated from each other by a predetermined distance in the transport direction of the laminated film 1a. The disc cutters 5a and 5b move along the film width direction of the laminate film 1a, thereby forming two boundary portions between the peeled portion and the remaining portion of the cover film (not shown) of the laminate film 1a. It cuts together with the photosensitive resin layer (not shown) on the back side.

  The cover film peeling apparatus 6 strongly presses the adhesive tape 7a fed out from the adhesive tape roll 7 to the peeling portion of the cover film between the pressing rollers 8a and 8b, and then winds it by the take-up roll 9. Thereby, the peeling part of a cover film is peeled from the photosensitive resin layer, and is wound up by the winding roll 9 with the adhesive tape 7a.

  Downstream of the suction roller 4, a pair of lamination rollers that overlap and pressure-bond the peeled portion of the laminated film 1 a from which the cover film has been peeled over the upper surfaces of the plurality of substrates 11 that are transported at predetermined intervals by the substrate transport device 10. 12a and 12b are disposed. A support film take-up roll 13 is disposed downstream of the lamination rollers 12a and 12b. The translucent support film (not shown) attached to the substrate 11 is wound around the support film take-up roll 13 together with the remaining portion of the cover film in a state where the photosensitive resin layer remains on the substrate 11.

  By the way, in order to accurately attach the peeled portion of the laminate film 1a from which the cover film has been peeled off to a desired range of the substrate 11, the laminate film is based on the boundary portion between the peeled portion and the remaining portion of the cover film. It is necessary to send 1a between the lamination rollers 12a and 12b with high accuracy.

  However, since the laminate film 1a is formed by forming a photosensitive resin layer on a flexible support film and is transported in a tensioned state, the boundary film 1a is affected by the extension generated during transportation. The position of the part may be displaced. In addition, since the lamination rollers 12a and 12b are attached while the laminate film 1a and the substrate 11 are heated, the extension of the laminate film 1a in the vicinity of the lamination rollers 12a and 12b is particularly large.

  In this case, if the position of the boundary portion of the laminated film 1a can be detected between the lamination rollers 12a and 12b, the position can be adjusted to perform a highly accurate pasting process. However, it is practically impossible to detect the position of the boundary portion while sandwiching the laminate film 1a and the substrate 11 with the lamination rollers 12a and 12b, because the lamination rollers 12a and 12b impede detection.

  Therefore, a sensor for detecting the boundary portion is arranged at a predetermined portion between the suction roller 4 and the lamination rollers 12a and 12b, and the feeding amount of the laminated film 1a from the time when the sensor detects the boundary portion is controlled. A manufacturing apparatus configured to do so has been proposed by the present applicant (see Patent Document 2).

Japanese Patent Laid-Open No. 11-34280 (FIG. 1) Japanese Patent Laying-Open No. 2006-297889 (FIG. 1)

  In this case, if the distance between the sensor and the lamination rollers 12a and 12b and the extension rate of the laminated film 1a between them are known, the boundary portion between the lamination rollers 12a and 12b can be set with high accuracy. it can.

  However, the sensor can detect a boundary portion, but cannot detect how much the boundary portion is deviated from a desired position.

  The present invention is a photosensitive laminate capable of producing a high-quality photosensitive laminate by accurately detecting the position of a processing portion formed on a long photosensitive web with respect to a reference position with a simple configuration. An object of the present invention is to provide a manufacturing apparatus and a manufacturing method.

The present invention feeds a long photosensitive web in which a photosensitive material layer and a protective film are sequentially laminated on a support, and a processing site corresponding to a boundary position between a peeled portion and a remaining portion of the protective film, Formed in a portion extending from the protective film to the photosensitive material layer, peeling off the peeling portion of the protective film, and continuously feeding between a pair of heated pressure rollers together with a substrate supplied at a predetermined interval; In the photosensitive laminate manufacturing apparatus for manufacturing the photosensitive laminate by placing the remaining portion of the protective film between the substrates and attaching the exposed photosensitive material layer to the substrate,
Position detecting means is provided at a predetermined portion in the conveyance path of the long photosensitive web between the processing portion forming the processing portion and the pressure roller, and detects the position of the processing portion with respect to a reference position. ,
The position detecting means includes
A light source that irradiates the elongated photosensitive web with illumination light having a wavelength that does not sensitize the photosensitive material layer;
Based on the illumination light that has at least a detection area extending in the conveying direction of the long photosensitive web, passes through the long photosensitive web, or is reflected by the long photosensitive web. A detection unit for detecting the processing site;
A calculation unit that calculates a position of the processing site detected by the detection unit with respect to the reference position;
It is characterized by providing.

The present invention also provides a processing portion corresponding to a boundary position between a peeled portion and a remaining portion of the protective film by feeding a long photosensitive web in which a photosensitive material layer and a protective film are sequentially laminated on a support. Is formed in a portion from the protective film to the photosensitive material layer, the peeling portion of the protective film is peeled off, and continuously fed between a pair of pressure rollers heated together with a substrate supplied at a predetermined interval. In the method for producing a photosensitive laminate, the remaining portion of the protective film is disposed between the substrates, and the photosensitive laminate is produced by attaching the exposed photosensitive material layer to the substrate.
The long photosensitive web is irradiated with illumination light having a wavelength that does not sensitize the photosensitive material layer, and is transmitted through the long photosensitive web, or reflected by the long photosensitive web. Detecting the illumination light by a detection unit having a detection area extending in the conveying direction of the long photosensitive web;
Calculating the position of the processed part detected by the detection unit as a position with respect to a predetermined reference position;
It is characterized by comprising.

  In the present invention, the position of the processing site formed on the long photosensitive web with respect to the reference position is simply configured by using a detection unit having a detection area extending in the conveyance direction of the long photosensitive web. Can be detected with high accuracy. In this case, for example, according to the detected position of the processed part, the transport amount of the long photosensitive web and the formation position of the processed part are adjusted, and the photosensitive material layer is pasted at a desired position on the substrate. A photosensitive laminate can be produced.

  FIG. 1 is a schematic configuration diagram of a photosensitive laminate manufacturing apparatus 20 according to the first embodiment of the present invention. This manufacturing apparatus 20 is a process for manufacturing a liquid crystal or a color filter for organic EL, etc. The photosensitive resin layers 28 (to be described later) of the film-like photosensitive webs 22a and 22b are parallelly transferred to the glass substrate 24 in parallel. The photosensitive webs 22a and 22b are each set to a predetermined width dimension.

  FIG. 2 is a cross-sectional view of the photosensitive webs 22 a and 22 b used in the manufacturing apparatus 20. The photosensitive webs 22a and 22b are formed by laminating a flexible base film (support) 26, a photosensitive resin layer (photosensitive material layer) 28, and a protective film 30.

  As shown in FIG. 1, the manufacturing apparatus 20 accommodates two (or more than two) photosensitive web rolls 23a and 23b obtained by winding photosensitive webs 22a and 22b in a roll shape. First and second web feed mechanisms 32a and 32b capable of synchronously feeding the photosensitive webs 22a and 22b from the photosensitive web rolls 23a and 23b, the protective film 30 and the photosensitive film of each of the fed photosensitive webs 22a and 22b. Adhesive label 38 having first and second processing mechanisms 36a and 36b for forming a half-cut portion (processing portion) 34 that is a boundary position that can be cut in the width direction on the adhesive resin layer 28, and a non-adhesive portion 38a in part. First and second label adhering mechanisms 40a and 40b for adhering (see FIG. 3) to each protective film 30 are provided.

  Downstream of the first and second label adhering mechanisms 40a and 40b are first and second reservoir mechanisms 42a and 42b for changing the photosensitive webs 22a and 22b from tact feed to continuous feed, and the respective photosensitive webs. First and second peeling mechanisms 44a and 44b for peeling the protective film 30 from the 22a and 22b at a predetermined length interval, and a substrate transport mechanism 45 for transporting the glass substrate 24 to a pasting position while being heated to a predetermined temperature. And an affixing mechanism 46 for adhering the photosensitive resin layer 28 exposed by peeling off the protective film 30 to the glass substrate 24 integrally and in parallel.

  First and second detection mechanisms (position detection means) 47a for detecting the positions of the respective half-cut portions 34, which are the boundary positions of the photosensitive webs 22a and 22b, are located in the vicinity of the attachment position in the attachment mechanism 46. , 47b.

  Near the downstream of the first and second web feed mechanisms 32a and 32b, the rear ends of the substantially used photosensitive webs 22a and 22b and the tips of the newly used photosensitive webs 22a and 22b are pasted, respectively. Is attached. A film terminal position detector 51 is disposed downstream of the attachment table 49 in order to control the displacement in the width direction due to the winding displacement of the photosensitive web rolls 23a and 23b. Here, the film terminal position adjustment is performed by moving the first and second web feed mechanisms 32a and 32b in the width direction, but may be performed by attaching a position adjustment mechanism combining rollers. The first and second web feed mechanisms 32a and 32b are configured with a multi-axis such as a biaxial or triaxial feeding shaft for loading the photosensitive web rolls 23a and 23b and feeding the photosensitive webs 22a and 22b. May be.

  The first and second processing mechanisms 36a and 36b are provided with a roller pair 50 for calculating the roll diameter of each photosensitive web roll 23a and 23b accommodated and wound in the first and second web feed mechanisms 32a and 32b. Arranged downstream. Each of the first and second processing mechanisms 36a and 36b includes a single round blade 52, and the round blade 52 runs in the width direction of the photosensitive webs 22a and 22b, and the remaining portion 30b ( Half-cut portions 34 are formed at two predetermined positions across FIG.

  As shown in FIG. 2, the half-cut portion 34 needs to cut at least the protective film 30 and the photosensitive resin layer 28, and the cutting depth of the round blade 52 is set so as to cut into the base film 26 in practice. The The round blade 52 is fixed without rotating and moves in the width direction of the photosensitive webs 22a and 22b to form a half-cut portion 34, or without sliding on the photosensitive webs 22a and 22b. A method of moving in the width direction while rotating to form the half-cut portion 34 is employed. In place of the round blade 52, the half-cut portion 34 may employ, for example, a method of forming with a knife blade, a push cutting blade (Thomson blade) or the like in addition to a cutting method using laser light or ultrasonic waves. .

  Two first and second processing mechanisms 36a and 36b are disposed in the conveying direction of the photosensitive webs 22a and 22b (in the direction of arrow A), separated by a distance corresponding to the width of the remaining portion 30b, respectively, for protection. Two half-cut portions 34 may be formed simultaneously with the remaining portion 30b (FIG. 2) of the film 30 interposed therebetween.

  For example, when the photosensitive resin layer 28 is attached to the glass substrate 24, the half-cut portion 34 is set so as to be in a position that enters into the inside by 10 mm from both ends of the glass substrate 24, for example. The remaining portion 30b of the protective film 30 between the glass substrates 24 functions as a mask when the photosensitive resin layer 28 is attached to the glass substrate 24 in a frame shape in an attaching mechanism 46 described later.

  The first and second label bonding mechanisms 40a and 40b connect the peeling portion 30aa at the front side of the peeling side and the peeling portion 30ab at the back side of the peeling side in order to leave the remaining portion 30b of the protective film 30 correspondingly between the glass substrates 24. An adhesive label 38 is supplied. As shown in FIG. 2, the protective film 30 has a remaining portion 30 b sandwiched between the first peeled portion 30 aa and the later peeled portion 30 ab.

  As shown in FIG. 3, the adhesive label 38 is formed in a strip shape, and is formed of, for example, the same resin material as the protective film 30. The adhesive label 38 has a non-adhesive portion (including a slight adhesion) 38a to which a pressure-sensitive adhesive is not applied at the center, and the front side of the non-adhesive portion 38a, that is, both ends in the longitudinal direction of the adhesive label 38 It has the 1st adhesion part 38b adhered to exfoliation part 30aa, and the 2nd adhesion part 38c adhered to back exfoliation part 30ab.

  As shown in FIG. 1, each of the first and second label bonding mechanisms 40a and 40b includes suction pads 54a to 54g, each of which can attach a maximum of seven adhesive labels 38 with a predetermined interval between them. A pedestal 56 for holding the photosensitive webs 22a and 22b from below is disposed so as to be movable up and down at the position where the adhesive label 38 is attached by the pads 54a to 54g.

  The first and second reservoir mechanisms 42a and 42b are arranged to absorb the speed difference between the tact conveyance of the upstream photosensitive webs 22a and 22b and the continuous conveyance of the downstream photosensitive webs 22a and 22b. A dancer roller 60 that can swing in a direction is provided. The second reservoir mechanism 42b includes a dancer for adjusting the lengths of the conveyance paths until the photosensitive webs 22a and 22b sent from the first and second web delivery mechanisms 32a and 32b reach the attaching mechanism 46. A roller 61 is provided.

  The first and second peeling mechanisms 44a and 44b arranged downstream of the first and second reservoir mechanisms 42a and 42b block the tension fluctuation on the delivery side of the photosensitive webs 22a and 22b, respectively, and the tension at the time of lamination is reduced. A suction drum 62 is provided for stabilization. In the vicinity of each suction drum 62, a peeling roller 63 is disposed, and the protective film 30 that is peeled off from the photosensitive webs 22a and 22b through the peeling roller 63 with an acute peeling angle except for the remaining portion 30b. Then, the film is wound around the protective film winding section 64 respectively.

  On the downstream side of the first and second peeling mechanisms 44a and 44b, first and second tension control mechanisms 66a and 66b capable of applying tension to the photosensitive webs 22a and 22b are disposed. Each of the first and second tension control mechanisms 66a and 66b includes a cylinder 68, and the tension dancer 70 swings and displaces under the driving action of the cylinder 68, whereby each tension dancer 70 is in sliding contact with the photosensitive web. The tension of 22a, 22b can be adjusted. The first and second tension control mechanisms 66a and 66b may be used as necessary, and may be deleted.

  As shown in FIG. 4, the first and second detection mechanisms 47a and 47b for detecting the position of the half-cut portion 34 are long photosensitive webs 22a and 22b between the transport roller 73 and the transport rollers 71a and 71b. Is a two-dimensional sensor having a detection area extending in the conveying direction of the long photosensitive webs 22a and 22b, as shown in FIG. (Detection units) 72a and 72b, two-dimensional light sources 69a and 69b, which are opposed to the CCD cameras 72a and 72b via the photosensitive webs 22a and 22b, and irradiate the long photosensitive webs 22a and 22b with illumination light. Is provided.

  The CCD cameras 72a and 72b have a plurality of detection pixels constituting the detection area. The CCD cameras 72a and 72b are only required to be able to detect the position of the half-cut portion 34 with respect to the transport direction of the long photosensitive webs 22a and 22b, and accordingly, a primary in which a plurality of detection pixels are arranged in the transport direction. It can also be composed of original sensors. The illumination light output from the two-dimensional light sources 69a and 69b is light having a wavelength that does not sensitize the photosensitive resin layer 28, for example, red light.

  At the reference position of the detection area of the CCD cameras 72a and 72b, reference pieces 67a and 67b positioned with reference to the positions of the rubber rollers 80a and 80b constituting the attaching mechanism 46 are disposed. Specifically, as shown in FIG. 4, for example, the half-cut portion 34 at the rear end of the preceding photosensitive resin layer 28 attached to the glass substrate 24 is positioned on the center line of the rubber rollers 80a and 80b. Each reference piece 67a, 67b is arranged at a position having a reference length L from the half cut portion 34 at the rear end portion to the rear half cut portion 34 at the rear end portion of the next photosensitive resin layer 28. Established. In this case, the reference length L is a design length of the photosensitive resin layer 28 to be attached to the glass substrate 24.

  Note that the first and second detection mechanisms 47a and 47b are configured to be movable in the direction of the arrow shown in FIG. 5 along the conveyance path of the long photosensitive webs 22a and 22b, thereby having different reference lengths L. The positions of the reference pieces 67a and 67b can be adjusted corresponding to the above. Further, the positions of the reference pieces 67a and 67b indicating the reference position of the half-cut portion 34 may be adjustable in correspondence with the reference length L within the detection areas of the CCD cameras 72a and 72b. Further, instead of using the reference pieces 67a and 67b, detection pixels constituting the CCD cameras 72a and 72b may be specified, and the positions of the detection pixels may be set as the reference positions.

  The substrate transport mechanism 45 includes a plurality of sets of substrate heating units (for example, heaters) 74 disposed so as to sandwich the glass substrate 24 and a transport unit 76 that transports the glass substrate 24 in the direction of arrow C. The substrate heating unit 74 constantly monitors the temperature of the glass substrate 24. When an abnormality occurs, the conveyance unit 76 is stopped or alarmed, and abnormal information is transmitted to cause the abnormal glass substrate 24 to be discharged NG in the subsequent process. It can be used for management or production management. An air levitation plate (not shown) is disposed in the conveyance unit 76, and the glass substrate 24 is levitated and conveyed in the direction of arrow C. The glass substrate 24 can be transported by a roller conveyor.

  The temperature measurement of the glass substrate 24 is preferably performed in the substrate heating unit 74 or immediately before the attachment position. The measuring method may be a contact type (for example, thermocouple) or a non-contact type.

  A substrate stocker 71 that accommodates a plurality of glass substrates 24 is provided upstream of the substrate heating unit 74. Each glass substrate 24 accommodated in the substrate stocker 71 is sucked and taken out by a suction pad 79 provided in the hand portion 75 a of the robot 75 and inserted into the substrate heating portion 74.

  The affixing mechanism 46 includes rubber rollers (compression rollers) 80a and 80b that are arranged vertically and heated to a predetermined temperature. Backup rollers 82a and 82b are in sliding contact with the rubber rollers 80a and 80b. One backup roller 82b is pressed toward the rubber roller 80b by the pressure cylinders 84a and 84b constituting the roller clamp portion 83.

  In the vicinity of the rubber roller 80a, a contact prevention roller 86 for preventing the photosensitive webs 22a and 22b from contacting the rubber roller 80a is movably disposed. In the vicinity of the upstream of the attaching mechanism 46, a preheating unit 87 for preheating the photosensitive webs 22a and 22b to a predetermined temperature is disposed. This preheating part 87 is provided with heating means, such as an infrared bar heater, for example.

  The glass substrate 24 is transported from the pasting mechanism 46 via a transport path 88 extending in the direction of arrow C. In the transport path 88, film transport rollers 90a and 90b and a substrate transport roller 92 are disposed. The distance between the rubber rollers 80 a and 80 b and the substrate transport roller 92 is preferably set to be equal to or less than the length of one glass substrate 24. In the vicinity of the downstream side of the substrate transport roller 92, a substrate front end detection sensor 94 that detects the front end portion of the transported glass substrate 24 is disposed. The substrate front end detection sensor 94 is configured such that when the half cut portion 34 at the rear end of the photosensitive resin layer 28 attached to the glass substrate 24 is disposed between the rubber rollers 80a and 80b of the attaching mechanism 46, It is arranged at a position for detecting the tip.

  Further, a cooling mechanism 122 and a base automatic peeling mechanism 142 are provided downstream of the substrate transport roller 92. The automatic base peeling mechanism 142 continuously peels the long base film 26 affixed to each glass substrate 24 separated by a predetermined interval, and includes a pre-peeling portion 144 and a relatively small-diameter peeling roller. 146, a winding shaft 148, and an automatic pasting machine 150. The take-up shaft 148 preferably applies torque control during driving to apply tension to the base film 26, while providing a tension detector (not shown) on the peeling roller 146, for example, to perform tension feedback control. . The pre-peeling portion 144 includes a peeling bar 156 that can move up and down between the glass substrates 24.

  A measuring instrument 158 that measures the area position of the photosensitive resin layer 28 actually attached to the glass substrate 24 is disposed downstream of the automatic base peeling mechanism 142. The measuring device 158 includes, for example, a camera 160 such as a CCD that images the glass substrate 24 on which the photosensitive resin layer 28 is attached.

  A photosensitive laminate stocker 132 in which a plurality of photosensitive laminates 106 whose area positions are measured in the photosensitive resin layer 28 by the measuring device 158 is accommodated downstream of the automatic base peeling mechanism 142. The photosensitive laminate 106 from which the base film 26 and the remaining portion 30b have been peeled off by the automatic base peeling mechanism 142 is sucked and taken out by the suction pad 136 provided on the hand portion 134a of the robot 134, and the photosensitive laminate stocker 132 is removed. Is housed in.

  In the manufacturing apparatus 20 configured as described above, the first and second web feed mechanisms 32a and 32b, the first and second processing mechanisms 36a and 36b, the first and second label adhesion mechanisms 40a and 40b, The first and second reservoir mechanisms 42a and 42b, the first and second peeling mechanisms 44a and 44b, the first and second tension control mechanisms 66a and 66b, and the first and second detection mechanisms 47a and 47b Although arranged above, conversely, the first and second web delivery mechanisms 32a, 32b to the first and second detection mechanisms 47a, 47b are arranged below the attaching mechanism 46. The photosensitive webs 22a and 22b may be turned upside down, and the photosensitive resin layer 28 may be attached to the lower side of the glass substrate 24. Further, the entire manufacturing apparatus 20 is configured linearly. It may be.

  As shown in FIG. 1, the manufacturing apparatus 20 is entirely controlled by a laminating process control unit 100, and for example, a laminating control unit 102, a substrate heating control unit 104, and a half for each functional unit of the manufacturing apparatus 20. A cut control unit 108 and the like are provided, and these are connected to each other by an in-process network. Further, the laminating process control unit 100 is connected to a factory network, and performs information processing for production such as production management and operation management of instruction information (condition setting and production information) from a factory CPU (not shown).

  The substrate heating control unit 104 receives the glass substrate 24 from the upstream process, controls the operation of heating the glass substrate 24 to a desired temperature and supplying the glass substrate 24 to the pasting mechanism 46, and handling of information on the glass substrate 24.

  The laminating control unit 102 controls each functional unit as a master of the entire process, and the position of the half cut portion 34 of the photosensitive webs 22a and 22b detected by the first and second detection mechanisms 47a and 47b. Based on the information, a control mechanism capable of controlling the relative position between each boundary position and the glass substrate 24 at the pasting position and the relative position between the respective boundary positions is configured.

  The half cut control unit 108 controls the first and second processing mechanisms 36a and 36b to form the half cut portion 34 at a predetermined position of the photosensitive webs 22a and 22b.

  FIG. 6 shows a configuration block of a function for correcting the positional deviation of the half-cut portion 34 by the laminating process control unit 100, the laminating control unit 102, and the half-cut control unit 108.

  In this case, the laminating process control unit 100 detects the tips of the reference pieces 67a and 67b based on the images of the detection areas photographed by the CCD cameras 72a and 72b when the tip of the glass substrate 24 is detected by the substrate tip detection sensor 94. A misregistration amount calculation unit (calculation unit) 120 for calculating misregistration amounts ΔLa, ΔLb and ΔMa, ΔMb of the half-cut portions 34 of the respective photosensitive webs 22a, 22b with respect to the reference position of the unit. The misregistration amounts ΔLa and ΔLb are misregistration amounts of the half-cut portion 34 disposed at the rear end portion of the photosensitive resin layer 28 attached to the glass substrate 24. The misregistration amounts ΔMa and ΔMb are glass This is the amount of misalignment of the half-cut portion 34 disposed at the front end of the photosensitive resin layer 28 that is attached to the substrate 24.

  The laminating control unit 102 determines the feed amount of the photosensitive resin layer 28 attached to the glass substrate 24 based on the positional deviation amounts ΔLa, ΔLb and ΔMa, ΔMb of the half-cut portion 34 calculated by the positional deviation amount calculation unit 120. A control pulse correction unit 123 that corrects the laminate control pulse to be controlled and also corrects the inter-substrate feed control pulse that controls the feed amount of the remaining portion 30b of the protective film 30 between the glass substrates 24, and the corrected laminate control. A roller control unit 126 that controls a roller driving motor 124 that rotates the rubber roller 80a in accordance with the pulse or the inter-substrate feed control pulse.

  The half-cut control unit 108, when the positional deviation amount ΔLa, ΔLb or ΔMa, ΔMb of the half-cut part 34 calculated by the positional deviation amount calculation unit 120 exceeds a predetermined allowable amount, the positional deviation amount ΔLa, Based on ΔLb or ΔMa, ΔMb, a half-cut position correction unit 128 that corrects the position of the half-cut portion 34 by the first and second processing mechanisms 36a, 36b is provided.

  The inside of the manufacturing apparatus 20 is partitioned into a first clean room 112a and a second clean room 112b through a partition wall 110. The first clean room 112a accommodates the first and second web delivery mechanisms 32a and 32b to the first and second tension control mechanisms 66a and 66b, and the second clean room 112b contains the first and second detections. The mechanisms 47a and 47b and thereafter are accommodated. The first clean room 112a and the second clean room 112b communicate with each other through the penetration part 114.

  The operation of the manufacturing apparatus 20 configured as described above will be described below in relation to the manufacturing method according to the present invention.

  First, the photosensitive webs 22a and 22b are sent out from the respective photosensitive web rolls 23a and 23b attached to the first and second web delivery mechanisms 32a and 32b. The photosensitive webs 22a and 22b are conveyed to the first and second processing mechanisms 36a and 36b.

  In the first and second processing mechanisms 36a and 36b, the round blade 52 moves in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are moved from the protective film 30 to the photosensitive resin layer 28 to the base film. Cut to 26 to form a half-cut portion 34 (see FIG. 2). Further, the photosensitive webs 22 a and 22 b are stopped after being conveyed in the direction of arrow A corresponding to the width M of the remaining portion 30 b of the protective film 30, and a half-cut portion 34 is formed under the running action of the round blade 52. The Thus, the photosensitive webs 22a and 22b are provided with a front peeling portion 30aa and a rear peeling portion 30ab with the remaining portion 30b interposed therebetween (see FIG. 2).

  The width M of the remaining portion 30b is set on the basis of the distance between the glass substrates 24 supplied between the rubber rollers 80a and 80b of the attaching mechanism 46 on the assumption that the photosensitive webs 22a and 22b do not extend. Shall. A set of half-cut portions 34 formed with a width M is formed on the long photosensitive webs 22a and 22b at intervals of a reference length L of the photosensitive resin layer 28 attached to the glass substrate 24. .

  Next, the respective photosensitive webs 22 a and 22 b are conveyed to the first and second label adhering mechanisms 40 a and 40 b, and a predetermined application site of the protective film 30 is arranged on the cradle 56. In the first and second label adhering mechanisms 40a and 40b, a predetermined number of adhesive labels 38 are adsorbed and held by the adsorbing pads 54b to 54g, and each adhering label 38 straddles the remaining portion 30b of the protective film 30, and a front peeling portion. 30aa and the rear peeling portion 30ab are integrally bonded (see FIG. 3).

  For example, the photosensitive webs 22a and 22b to which the seven adhesive labels 38 are bonded, as shown in FIG. 1, after the first and second reservoir mechanisms 42a and 42b are prevented from changing the tension on the delivery side, It is continuously conveyed to the first and second peeling mechanisms 44a and 44b. In the first and second peeling mechanisms 44a and 44b, the base film 26 of the photosensitive webs 22a and 22b is adsorbed and held by the suction drum 62, and the protective film 30 leaves the remaining portion 30b and the photosensitive webs 22a and 22b. Is peeled off. The protective film 30 is peeled off via the peeling roller 63 and wound around the protective film take-up portion 64 (see FIG. 1).

  Under the action of the first and second peeling mechanisms 44a and 44b, after the protective film 30 is peeled from the base film 26 leaving the remaining portion 30b, the photosensitive webs 22a and 22b are moved to the first and second tension control mechanisms. The tension adjustment is performed by 66a and 66b, and then the half-cut portion 34 is detected by the first and second detection mechanisms 47a and 47b.

  Illumination light, which is red light, is applied to the long photosensitive webs 22a and 22b from the two-dimensional light sources 69a and 69b constituting the first and second detection mechanisms 47a and 47b, and the transmitted light is applied to the CCD cameras 72a and 72b. By being guided, an image of the long photosensitive webs 22a and 22b including the half-cut portion 34 and an image of the reference pieces 67a and 67b arranged at the reference positions are captured. In addition, since the half cut part 34 is formed in a state in which the photosensitive resin layer 28 is removed from the long photosensitive webs 22a and 22b, an image of the half cut part 34 having high luminance is obtained. The misregistration amount calculation unit 120 calculates misregistration amounts ΔLa and ΔLb of the half-cut region 34 with respect to the tip portions of the reference pieces 67a and 67b based on the captured images.

  In this case, the half-cut portion 34 on the peeling portion 30aa side shown in FIG. 2 and the tip end portions of the reference pieces 67a and 67b coincide with each other, and the positional deviation amounts ΔLa and ΔLb are 0, and a predetermined position between the rubber rollers 80a and 80b. It is assumed that the reference length L between the first and second detection mechanisms 47a and 47b and the pasting mechanism 46 is set so that the half-cut portion 34 on the side of the peeling portion 30ab preceding to the position is disposed. .

  Therefore, from the above state, the photosensitive webs 22a, 22b are transported and stopped by a distance corresponding to the width M of the remaining portion 30b of the protective film 30, while the glass substrate 24 is operated under the action of the substrate transport mechanism 45. It is conveyed to the pasting position in a preheated state. The glass substrate 24 is temporarily disposed between the rubber rollers 80a and 80b so as to correspond to the portions where the photosensitive resin layers 28 of the photosensitive webs 22a and 22b arranged in parallel are attached.

  Next, by raising the backup roller 82b and the rubber roller 80b, the glass substrate 24 is sandwiched between the rubber rollers 80a and 80b with a predetermined pressing pressure. The roller control unit 126 (FIG. 6) drives the roller drive motor 124 based on the laminating control pulse corresponding to the uncorrected reference length L supplied from the control pulse correcting unit 123, and under the rotating action of the rubber roller 80a. Then, the photosensitive webs 22a and 22b and the glass substrate 24 are conveyed in the direction of arrow C. As a result, the photosensitive resin layers 28 arranged in parallel are heated and melted and transferred (laminated) to the glass substrate 24. In this case, assuming that the photosensitive webs 22a and 22b do not extend, the photosensitive resin layer 28 of the photosensitive webs 22a and 22b is accurately moved from the half-cut portion 34 on the rear peeling portion 30ab side to a predetermined portion of the glass substrate 24. Will be transferred to.

  The laminating conditions include a speed of 1.0 m / min to 10.0 m / min, a temperature of the rubber rollers 80a and 80b of 80 ° C to 140 ° C, a rubber hardness of the rubber rollers 80a and 80b of 40 ° to 90 °, The pressing pressure (linear pressure) of the rubber rollers 80a and 80b is 50 N / cm to 400 N / cm.

  The substrate tip detection sensor 94 detects the tip of the glass substrate 24, and when the lamination of the photosensitive webs 22a and 22b on the glass substrate 24 is completed via the rubber rollers 80a and 80b, the rotation of the rubber roller 80a is stopped. On the other hand, the glass substrate 24 (hereinafter also referred to as a bonded substrate 24 a) on which the photosensitive webs 22 a and 22 b are laminated is clamped by a substrate transport roller 92.

  Then, the rubber roller 80b is retracted in the direction away from the rubber roller 80a to release the clamp, and the rotation of the substrate transport roller 92 is started, so that the pasting substrate 24a moves in the direction of arrow C and the remaining portion 30b of the protective film 30 The half cut portion 34 on the peeling portion 30ab side behind the protective film 30 moves to a predetermined position near the lower portion of the rubber roller 80a. On the other hand, the next glass substrate 24 is transported toward the attaching position via the substrate transport mechanism 45. By repeating the above operation, the bonded substrate 24a is continuously manufactured.

  At that time, as shown in FIG. 4, the end portions of the pasting substrate 24 a are covered with the remaining portions 30 b. Therefore, when the photosensitive resin layer 28 is transferred to the glass substrate 24, the rubber rollers 80a and 80b are not soiled by the photosensitive resin layer 28.

  The pasted substrate 24 a laminated by the pasting mechanism 46 is cooled through the cooling mechanism 122 and then transferred to the pre-peeling portion 144. In the pre-peeling portion 144, the peeling bar 156 enters between the glass substrates 24 and rises, whereby the protective film 30 between the glass substrates 24 is lifted and peeled from the rear end and the leading end of the adjacent glass substrates 24. To do.

  Next, in the automatic base peeling mechanism 142, the base film 26 is continuously wound from the pasting substrate 24 a under the rotating action of the winding shaft 148. Further, after separation when trouble stops or separation when defective products are separated, the base film 26 wound on the winding shaft 148 and the tip of the base film 26 of the pasting substrate 24a which has been newly laminated are started. 26 is automatically pasted via the automatic pasting machine 150.

  The bonded substrate 24a from which the base film 26 has been peeled is placed at an inspection station corresponding to the measuring instrument 158. In this inspection station, images of the glass substrate 24 and the photosensitive resin layer 28 are captured by the four cameras 160 with the glass substrate 24 positioned and fixed. Then, by applying image processing, the pasting position is calculated.

  The attachment substrate 24 a on which the attachment position of the photosensitive resin layer 28 is confirmed is taken out by the robot 134 and accommodated in the photosensitive laminate stocker 132 as the photosensitive laminate 106.

  By the way, in the above description, it is assumed that the photosensitive webs 22a and 22b fed from the first and second web feed mechanisms 32a and 32b are accurately supplied to the pasting mechanism 46 without extending. In this case, since the flexible photosensitive webs 22a and 22b are extended by a predetermined amount due to the influence of tension and heat, the photosensitive resin layer 28 may not be transferred to a predetermined position of the glass substrate 24 with high accuracy. Concerned.

  Therefore, in the CCD cameras 72a and 72b constituting the first and second detection mechanisms 47a and 47b, the substrate tip detection sensor 94 detects the tip of the glass substrate 24 and the photosensitive webs 22a and 22b and the glass substrate 24 are conveyed. When stopped, an image including the half-cut portion 34 on the peeled portion 30aa side and the reference pieces 67a and 67b is taken, and the image is supplied to the positional deviation amount calculation unit 120. The misregistration amount calculation unit 120 calculates misregistration amounts ΔLa and ΔLb of the half-cut portion 34 with respect to the tip portions of the reference pieces 67a and 67b, which are reference positions, based on the supplied image.

  In this case, if the signs of the positional deviation amounts ΔLa and ΔLb are + and the downstream side to which the photosensitive webs 22a and 22b are supplied with respect to the reference pieces 67a and 67b are − and the downstream side is −, for example, the positional deviation amounts ΔLa , ΔLb is +, the photosensitive resin layer 28 attached to the glass substrate 24 extends from the reference length L by the positional deviation amounts ΔLa, ΔLb, and when it is −, it is shorter than the reference length L. It can be determined that

  When the calculated misregistration amounts ΔLa and ΔLb are within a predetermined allowable amount, the misregistration amount calculation unit 120 supplies the misregistration amounts ΔLa and ΔLb to the control pulse correction unit 123, and the photosensitive webs 22a and 22b. The laminating control pulse is corrected according to the positional deviation amounts ΔLa and ΔLb.

  Next, in the CCD cameras 72a and 72b constituting the first and second detection mechanisms 47a and 47b, the long photosensitive webs 22a and 22b are formed on the remaining portion 30b of the protective film 30 under the rotating action of the rubber roller 80a. When the sheet is transported by a distance corresponding to the width M and stopped, an image including the half-cut portion 34 on the peeling portion 30ab side and the reference pieces 67a and 67b is taken, and the image is supplied to the positional deviation amount calculation unit 120. The misregistration amount calculation unit 120 calculates misregistration amounts ΔMa and ΔMb of the half-cut region 34 with respect to the tip portions of the reference pieces 67a and 67b, which are reference positions, based on the supplied image.

  In this case, the fluctuation amount of the width M of the remaining portion 30b of the protective film 30 can be detected based on the positional deviation amounts ΔMa and ΔMb of the half cut portion 34 on the peeling portion 30ab side.

  When the calculated misregistration amounts ΔMa and ΔMb are within a predetermined allowable amount, the misregistration amount calculation unit 120 supplies the misregistration amounts ΔMa and ΔMb to the control pulse correction unit 123, and the long photosensitive web 22a. , 22b is corrected according to the positional deviation amounts ΔMa, ΔMb.

  Thereafter, the roller control unit 126 drives the roller drive motor 124 according to the corrected laminating control pulse and the corrected inter-substrate spacing control pulse to control the conveyance of the long photosensitive webs 22a and 22b.

  On the other hand, when the misregistration amounts ΔLa, ΔLb or ΔMa, ΔMb calculated by the misregistration amount calculation unit 120 exceed a predetermined allowable amount, the half-cut portion 34 of the first and second processing mechanisms 36a, 36b This can be done by correcting the machining position. In this case, the half cut position correcting unit 128 changes the processing position of the half cut portion 34 based on the positional deviation amounts ΔLa, ΔLb or ΔMa, ΔMb, and forms the half cut portion 34 on the photosensitive webs 22a, 22b.

  In the first embodiment, two photosensitive web rolls 23a and 23b are used. However, the present invention is not limited to this. One photosensitive web roller or three or more photosensitive web rolls are used. A roller may be employed. The same applies to the second embodiment described below.

  FIG. 7 is a schematic configuration diagram of a photosensitive laminate manufacturing apparatus 300 according to the second embodiment of the present invention. The same components as those in the photosensitive laminate manufacturing apparatus 20 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  The manufacturing apparatus 300 includes an inter-substrate web cutting mechanism 48 that is disposed downstream of the attaching mechanism 46 and that can integrally cut the photosensitive webs 22 a and 22 b between the glass substrates 24.

  In the manufacturing apparatus 300 configured as described above, the pasting substrate 24a laminated by the pasting mechanism 46 is transported in the direction of arrow C, as in the first embodiment. When the space between the bonded substrates 24a reaches a position corresponding to the inter-substrate web cutting mechanism 48, the inter-substrate web cutting mechanism 48 moves in the direction of arrow C at the same conveyance speed as the bonded substrate 24a, The two photosensitive webs 22a and 22b are integrally cut between the pasting substrates 24a.

  After this cutting, the inter-substrate web cutting mechanism 48 is returned to a predetermined standby position, while the base film 26 and the remaining portion 30b are sequentially peeled (single-wafer peeling) on the bonded substrate 24a, and the photosensitive laminate 106 is formed. Manufactured.

  In each of the above-described embodiments, the half-cut portion 34 is detected by receiving illumination light transmitted through the photosensitive webs 22a and 22b by the CCD cameras 72a and 72b. However, as shown in FIG. You may make it detect the half-cut site | part 34 based on the illumination light reflected by the photosensitive webs 22a and 22b using the detection mechanisms 162a and 162b comprised.

  That is, the illumination light output from the light sources 164a and 164b is reflected by the half mirrors 166a and 166b, guided to the photosensitive webs 22a and 22b, and then reflected by the photosensitive webs 22a and 22b, and the half mirrors 166a and 166b. Is transmitted to the CCD cameras 72a and 72b. In this case, the illumination light reflected by the half-cut part 34 is scattered more largely than the illumination light reflected by the other parts of the photosensitive webs 22a and 22b. Can be detected. The light sources 164a and 164b and the half mirrors 166a and 166b constitute a coaxial incident illumination optical system.

It is a schematic block diagram of the manufacturing apparatus which concerns on the 1st Embodiment of this invention. It is sectional drawing of the elongate photosensitive web used for the said manufacturing apparatus. It is explanatory drawing of the state by which the adhesive label was adhere | attached on the said elongate photosensitive web. It is explanatory drawing of the structure of the 1st and 2nd detection mechanism which detects the position of a half cut site | part, and the arrangement | positioning relationship between a 1st and 2nd detection mechanism and a sticking mechanism. It is explanatory drawing of the state which detects a half cut site | part by the 1st and 2nd detection mechanism. It is a circuit block diagram for detecting and correcting a position shift of a half cut part. It is a schematic block diagram of the manufacturing apparatus which concerns on the 2nd Embodiment of this invention. It is explanatory drawing of the other structure of a 1st and 2nd detection mechanism. It is a schematic block diagram of the manufacturing apparatus of patent document 1.

Explanation of symbols

DESCRIPTION OF SYMBOLS 20,300 ... Manufacturing apparatus 22a, 22b ... Photosensitive web 24 ... Glass substrate 26 ... Flexible base film 28 ... Photosensitive resin layer 30 ... Protective film 34 ... Half cut part 36a, 36b ... Processing mechanism 46 ... Pasting mechanism 47a, 47b, 162a, 162b... Detection mechanism 67a, 67b... Reference piece 69a, 69b... Pulse correction unit 124 ... Roller drive motor 126 ... Roller control unit 128 ... Half-cut position correction unit 164a, 164b ... Light source 166a, 166b ... Half mirror

Claims (9)

A long photosensitive web in which a photosensitive material layer and a protective film are sequentially laminated on a support is fed out, and a processing site corresponding to a boundary position between a peeled portion and a remaining portion of the protective film is transferred from the protective film. Formed in a portion reaching the photosensitive material layer, peels off the peeled portion of the protective film, and continuously feeds between a pair of heated pressure rollers together with a substrate supplied at a predetermined interval. In the photosensitive laminate manufacturing apparatus for manufacturing the photosensitive laminate by arranging the remaining portion of the protective film and attaching the exposed photosensitive material layer to the substrate,
Position detecting means is provided at a predetermined portion in the conveyance path of the long photosensitive web between the processing portion forming the processing portion and the pressure roller, and detects the position of the processing portion with respect to a reference position. ,
The position detecting means includes
A light source that irradiates the elongated photosensitive web with illumination light having a wavelength that does not sensitize the photosensitive material layer;
Based on the illumination light that has at least a detection area extending in the conveying direction of the long photosensitive web, passes through the long photosensitive web, or is reflected by the long photosensitive web. A detection unit for detecting the processing site;
A calculation unit that calculates a position of the processing site detected by the detection unit with respect to the reference position;
An apparatus for producing a photosensitive laminate, comprising: The manufacturing apparatus according to claim 1,
The said detection part consists of a two-dimensional sensor which has the some detection pixel which comprises the said detection area, The manufacturing apparatus of the photosensitive laminated body characterized by the above-mentioned. The manufacturing apparatus according to claim 1,
The said detection part consists of a one-dimensional sensor which has the some detection pixel which comprises the said detection area, The manufacturing apparatus of the photosensitive laminated body characterized by the above-mentioned. The manufacturing apparatus according to claim 1,
An apparatus for manufacturing a photosensitive laminate, wherein a predetermined position of the detection area is set as the reference position. The manufacturing apparatus according to claim 1,
A reference piece that defines the reference position is disposed between the detection unit and the elongated photosensitive web, and the detection unit detects the processed portion and the reference piece. Manufacturing device for conductive laminates. In the manufacturing apparatus of any one of Claims 1-5,
The said position detection means detects the position of the said process part with respect to the said reference position set on the basis of the position of the said press roller, The manufacturing apparatus of the photosensitive laminated body characterized by the above-mentioned. A long photosensitive web in which a photosensitive material layer and a protective film are sequentially laminated on a support is fed out, and a processing site corresponding to a boundary position between a peeled portion and a remaining portion of the protective film is transferred from the protective film. Formed in a portion reaching the photosensitive material layer, peels off the peeled portion of the protective film, and continuously feeds between a pair of heated pressure rollers together with a substrate supplied at a predetermined interval. In the method for producing a photosensitive laminate, in which the remaining portion of the protective film is arranged and the photosensitive laminate is produced by attaching the exposed photosensitive material layer to the substrate.
The long photosensitive web is irradiated with illumination light having a wavelength that does not sensitize the photosensitive material layer, and is transmitted through the long photosensitive web, or reflected by the long photosensitive web. Detecting the illumination light by a detection unit having a detection area extending in the conveying direction of the long photosensitive web;
Calculating the position of the processed part detected by the detection unit as a position with respect to a predetermined reference position;
The manufacturing method of the photosensitive laminated body characterized by comprising. In the manufacturing method of Claim 7,
A method for producing a photosensitive laminate, wherein a predetermined position of the detection area is set to the reference position. The manufacturing method according to claim 7 or 8,
A method for producing a photosensitive laminate, comprising: detecting a position of the processed portion with respect to the reference position set based on the position of the pressure roller.

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