JP2009229700A - Sticking position inspecting device of photosensitive layered product - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily and highly accurately detect, with a simple structure, a sticking state of a photosensitive material layer to a substrate. <P>SOLUTION: A sticking position inspecting device 94 includes detecting parts 96a to 96f disposed on the downstream side of rubber rollers 80a and 80b. The detecting part 96a includes an LED illuminator 98 radiating illumination light L from the lower side of the stuck substrate 24a, a CCD camera 100 disposed on the upper side of the stuck substrate 24a and an ND filter 102 coming close to the stuck substrate 24a and disposed to cover one end part of a glass substrate 24 exposed to an external part from at least a photosensitive web 22a. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention provides a manufacturing system for manufacturing a photosensitive laminate by press-bonding a substrate and a long photosensitive web between a pair of pressure rollers, and applying a photosensitive material layer to the long photosensitive web. The present invention relates to a device for inspecting the attachment position of a photosensitive laminate for measuring the attachment position.

  For example, in a liquid crystal panel substrate, a printed wiring substrate, and a PDP panel substrate, a photosensitive sheet body (photosensitive web) having a photosensitive resin layer (photosensitive material layer) is attached to the substrate surface. In the photosensitive sheet body, a photosensitive resin layer and a protective film are usually laminated in order on a flexible plastic support.

  A manufacturing system used for adhering this type of photosensitive sheet body usually conveys a substrate such as a glass substrate or a resin substrate separated by a predetermined interval, and a photosensitive resin that is attached to the substrate. A method of peeling the protective film from the photosensitive sheet body is employed corresponding to the range of the layers.

  For example, in the manufacturing system disclosed in Patent Document 1, as shown in FIG. 13, a laminate film (photosensitive sheet body) 1a fed out from a film roll 1 is wound around guide rollers 2a and 2b to be horizontal. It extends along the film transport surface. A rotary encoder 3 that outputs a number of pulse signals corresponding to the feed amount of the laminated film 1a is attached to the guide roller 2b.

  A laminate film 1a extending along a horizontal film transport surface is wound around a suction roller 4, and a half cutter 5 and a cover film peeling device 6 are interposed between the guide roller 2b and the suction roller 4. And are provided.

  The half cutter 5 includes a pair of disc cutters 5a and 5b that are separated from each other by a predetermined distance in the transport direction of the laminated film 1a. The disc cutters 5a and 5b move along the film width direction of the laminate film 1a, thereby demarcating two boundary portions between the peeled portion and the remaining portion of the cover film (not shown) of the laminate film 1a. A half-cut portion is formed by cutting integrally with a photosensitive resin layer (not shown) on the back side.

  The cover film peeling apparatus 6 winds the adhesive tape 7a fed out from the adhesive tape roll 7 to the peeling portion of the cover film between the pressing rollers 8a and 8b, and then winds it by the take-up roll 9. Thereby, the peeling part of a cover film is peeled from the photosensitive resin layer, and is wound up by the winding roll 9 with the adhesive tape 7a.

  Downstream of the suction roller 4, a pair of lamination rollers that overlap and pressure-bond the peeled portion of the laminated film 1 a from which the cover film has been peeled over the upper surfaces of the plurality of substrates 11 that are transported at predetermined intervals by the substrate transport device 10. 12a and 12b are provided. A support film take-up roll 13 is disposed downstream of the lamination rollers 12a and 12b. The translucent support film (not shown) attached to the substrate 11 is wound around the support film take-up roll 13 together with the remaining portion of the cover film with the photosensitive resin layer remaining on the substrate 11. ing.

JP-A-11-34280

  By the way, in order to attach the peeling part of the laminated film 1a from which the cover film has been peeled off to the desired range of the substrate 11, a half-cut part which is a boundary part between the peeling part and the remaining part of the cover film. As a reference, the laminated film 1a needs to be sent out between the lamination rollers 12a and 12b with high accuracy.

  However, the laminate film 1a is formed by forming a photosensitive resin layer on a flexible light-transmitting support film, and is transported in a tensioned state. There is a risk that the position of the half-cut region will shift. In addition, since the lamination rollers 12a and 12b are attached while the laminate film 1a and the substrate 11 are heated, the extension of the laminate film 1a particularly in the vicinity of the lamination rollers 12a and 12b becomes large.

  In this case, if the position of the half-cut portion of the laminated film 1a can be detected between the lamination rollers 12a and 12b, it is possible to adjust the position and perform a highly accurate pasting process. However, it is practically impossible to detect the position of the half-cut portion while sandwiching the laminated film 1a and the substrate 11 with the lamination rollers 12a and 12b because the lamination rollers 12a and 12b hinder the detection. It is.

  Therefore, for example, it is conceivable to provide an attachment position inspection device that detects a half-cut portion of the laminated film 1a attached to the substrate 11 on the downstream side of the lamination rollers 12a and 12b.

  As shown in FIG. 14, the pasting position inspection apparatus includes an illumination unit 14 disposed below the substrate 11 on which the multilayer film 1 a is pasted, and an imaging camera 15 disposed above the substrate 11. It has. The illumination unit 14 is provided with a neutral density filter 16 (hereinafter referred to as an ND filter 16) corresponding to the substrate end 11a exposed to the outside from the end of the multilayer film 1a. The substrate end portion 11a is likely to cause halation when irradiated with illumination light, and diminishes the illumination light applied to the substrate end portion 11a.

  Therefore, when the illumination light from the illumination unit 14 is applied to the substrate 11 and the laminated film 1a, the illumination light transmitted through the substrate 11 and the laminate film 1a is received by the imaging camera 15. Thereby, the image information of the half cut part HC is detected from the board | substrate edge part 11a.

  In this case, the half cut portion HC is formed only up to a predetermined thickness of the relatively thin laminated film 1a. Therefore, in order to photograph the half cut part HC with the imaging camera 15, it is necessary to irradiate the illumination unit 14 with considerably strong illumination light. However, when strong illumination light is irradiated from the illumination unit 14, halation is induced in the substrate end portion 11a even by illumination from a portion other than the portion shielded by the ND filter 16 (see FIG. 15). Thereby, the edge image of the board | substrate edge part 11a becomes a white thick line, and there exists a problem that the position of this board | substrate edge part 11a cannot be detected correctly.

  The present invention solves this type of problem, and it is possible to easily and accurately detect the attachment position of the photosensitive material layer on the substrate with a simple configuration, and to detect the attachment position of the photosensitive laminate. An object is to provide an apparatus.

  The present invention feeds a long photosensitive web in which a photosensitive material layer and a protective film are sequentially laminated on a support, and forms at least a processed portion corresponding to the boundary position between the peeled portion and the remaining portion on the protective film. Then, after peeling off the peeled portion of the protective film, the remaining portion of the protective film is removed between the substrates by performing a pressure-bonding process between a pair of heated pressure rollers together with the substrate supplied at a predetermined interval. The present invention relates to a bonding position inspection apparatus for measuring a bonding position of the photosensitive material layer in a manufacturing system for manufacturing a photosensitive laminated body by bonding the exposed and exposed photosensitive material layer to the substrate.

  At least one end in the width direction that intersects the flow direction of the substrate is exposed to the outside from the end of the long photosensitive web attached to the substrate.

  The affixing position inspection device includes a detection unit that is disposed on the downstream side of the pressure roller and detects a processing portion of the long photosensitive web that is affixed to the substrate from one end of the substrate. The detection unit includes an illuminating unit that irradiates illumination light from one side of the substrate, an imaging unit that is disposed on the other side of the substrate, and an external portion that is close to the substrate and at least from the long photosensitive web. And a neutral density filter disposed to cover one end of the substrate exposed to the surface.

  Further, the neutral density filter is preferably disposed on the other side of the substrate, and the illumination means is preferably LED illumination.

  Furthermore, it is preferable that the image pickup means includes a CCD camera and sets a plurality of image inspection areas in an imaging area by the CCD camera.

  In addition, a plurality of detection units are arranged in two rows along the processing site located at the rear edge of the downstream substrate and the processing site located at the front edge of the upstream substrate. It is preferable.

  Furthermore, it is preferable that the photosensitive material layers of a plurality of long photosensitive webs are attached to the substrate in parallel.

  In the present invention, since the neutral density filter is disposed close to the substrate, it is possible to reliably prevent the influence of halation that is likely to occur at the substrate edge. This makes it possible to easily and accurately detect the state of the photosensitive material layer attached to the substrate with a simple configuration. Therefore, it is possible to improve the work efficiency by preventing the reduction of the equipment operation rate and to reduce the cost by stabilizing the operation.

  FIG. 1 is a schematic configuration diagram of a manufacturing system 20 incorporating a photosensitive laminate adhering position inspection apparatus according to the first embodiment of the present invention. This manufacturing system 20 includes a liquid crystal or organic EL color filter, and the like. In the manufacturing process, the photosensitive resin layers (photosensitive material layers) 28 (described later) of the long photosensitive webs 22a and 22b are parallelly transferred to the glass substrate 24 in parallel. The photosensitive webs 22a and 22b are each set to a predetermined width dimension. For example, the photosensitive web 22a is configured to be wider than the photosensitive web 22b.

  FIG. 2 is a cross-sectional view of the photosensitive webs 22 a and 22 b used in the manufacturing system 20. The photosensitive webs 22a and 22b are formed by laminating a flexible base film (support) 26, a photosensitive resin layer 28, and a protective film 30.

  As shown in FIG. 1, the manufacturing system 20 accommodates two (or more than two) photosensitive web rolls 23a and 23b obtained by winding photosensitive webs 22a and 22b in a roll shape. Width of the first and second web feed mechanisms 32a and 32b capable of synchronously feeding the photosensitive webs 22a and 22b from the photosensitive web rolls 23a and 23b, and the protective film 30 of each of the fed photosensitive webs 22a and 22b. First and second processing mechanisms 36a and 36b that form a half-cut portion (processing portion) 34 that is a boundary position that can be cut in the direction, and an adhesive label 38 (see FIG. 3) having a non-adhesive portion 38a in part. First and second label adhering mechanisms 40a and 40b for adhering to each protective film 30 are provided.

  Downstream of the first and second label adhering mechanisms 40a and 40b are first and second reservoir mechanisms 42a and 42b for changing the photosensitive webs 22a and 22b from tact feed to continuous feed, and the respective photosensitive webs. First and second peeling mechanisms 44a and 44b for peeling the protective film 30 from the 22a and 22b at a predetermined length interval, and a substrate transport mechanism 45 for transporting the glass substrate 24 to a pasting position while being heated to a predetermined temperature. And an affixing mechanism 46 for adhering the photosensitive resin layer 28 exposed by peeling off the protective film 30 to the glass substrate 24 integrally and in parallel.

  First and second detection mechanisms 47a and 47b that directly detect the respective half-cut portions 34, which are the boundary positions of the photosensitive webs 22a and 22b, are disposed in the vicinity of the attachment position in the attachment mechanism 46. The

  Near the downstream of the first and second web feed mechanisms 32a and 32b, the rear ends of the substantially used photosensitive webs 22a and 22b and the tips of the newly used photosensitive webs 22a and 22b are pasted, respectively. An affixing base 49 is provided. A film terminal position detector 51 is disposed downstream of the attachment table 49 in order to control the displacement in the width direction due to the winding displacement of the photosensitive web rolls 23a and 23b.

  The first and second processing mechanisms 36a and 36b are provided with a roller pair 50 for calculating the roll diameter of each photosensitive web roll 23a and 23b accommodated and wound in the first and second web feed mechanisms 32a and 32b. Arranged downstream. Each of the first and second processing mechanisms 36a and 36b includes a single round blade 52, and the round blade 52 travels in the width direction of the photosensitive webs 22a and 22b, and the remaining portion 30b of the protective film 30 ( Half-cut portions 34 are formed at two predetermined positions across FIG.

  As shown in FIG. 2, the half-cut portion 34 needs to cut at least the protective film 30. In practice, in order to cut the protective film 30 with certainty, the photosensitive resin layer 28 to the base film 26 are cut. The cutting depth of the round blade 52 is set. The round blade 52 is fixed without rotating and moves in the width direction of the photosensitive webs 22a and 22b to form a half-cut portion 34, or without sliding on the photosensitive webs 22a and 22b. A method of moving in the width direction while rotating to form the half-cut portion 34 is employed. In place of the round blade 52, the half-cut portion 34 may employ, for example, a method of forming with a knife blade, a push cutting blade (Thomson blade) or the like in addition to a cutting method using laser light or ultrasonic waves. .

  Two first and second processing mechanisms 36a and 36b are disposed at a distance S corresponding to the width of the remaining portion 30b in the conveying direction (arrow A direction) of the photosensitive webs 22a and 22b, respectively. Two half-cut portions 34 may be formed simultaneously with the remaining portion 30b (FIG. 2) of the protective film 30 interposed therebetween.

  The half-cut part 34 is set, for example, at a position where it enters the glass substrates 24 on both sides by 10 mm. A portion sandwiched between the half cut portions 34 between the glass substrates 24 functions as a mask when the photosensitive resin layer 28 is attached to the glass substrate 24 in a frame shape in an attaching mechanism 46 described later.

  The first and second label bonding mechanisms 40a and 40b connect the peeling portion 30aa at the front side of the peeling side and the peeling portion 30ab at the back side of the peeling side in order to leave the remaining portion 30b of the protective film 30 correspondingly between the glass substrates 24. An adhesive label 38 is supplied. As shown in FIG. 2, the protective film 30 has a remaining portion 30 b sandwiched between the first peeled portion 30 aa and the later peeled portion 30 ab.

  As shown in FIG. 3, the adhesive label 38 is formed in a strip shape, and is formed of, for example, the same resin material as the protective film 30. The adhesive label 38 has a non-adhesive portion (including a slight adhesion) 38a to which a pressure-sensitive adhesive is not applied at the center, and the front side of the non-adhesive portion 38a, that is, both ends in the longitudinal direction of the adhesive label 38 It has the 1st adhesion part 38b adhered to exfoliation part 30aa, and the 2nd adhesion part 38c adhered to back exfoliation part 30ab.

  As shown in FIG. 1, each of the first and second label bonding mechanisms 40a and 40b includes suction pads 54a to 54g, each of which can attach a maximum of seven adhesive labels 38 with a predetermined interval between them. A pedestal 56 for holding the photosensitive webs 22a and 22b from below is disposed so as to be movable up and down at the position where the adhesive label 38 is attached by the pads 54a to 54g.

  The first and second reservoir mechanisms 42a and 42b are arranged to absorb the speed difference between the tact conveyance of the upstream photosensitive webs 22a and 22b and the continuous conveyance of the downstream photosensitive webs 22a and 22b. A dancer roller 60 that can swing in a direction is provided. The second reservoir mechanism 42b includes a dancer for adjusting the lengths of the conveyance paths until the photosensitive webs 22a and 22b sent from the first and second web delivery mechanisms 32a and 32b reach the attaching mechanism 46. A roller 61 is provided.

  The first and second peeling mechanisms 44a and 44b arranged downstream of the first and second reservoir mechanisms 42a and 42b block the tension fluctuation on the delivery side of the photosensitive webs 22a and 22b, respectively, and the tension at the time of lamination is reduced. A suction drum 62 is provided for stabilization. In the vicinity of each suction drum 62, a peeling roller 63 is disposed, and the protective film 30 peeled off from the photosensitive webs 22a and 22b through the peeling roller 63 at an acute peeling angle except for the remaining portion 30b. Then, the film is wound around the protective film winding section 64.

  On the downstream side of the first and second peeling mechanisms 44a and 44b, first and second tension control mechanisms 66a and 66b capable of applying tension to the photosensitive webs 22a and 22b are disposed. Each of the first and second tension control mechanisms 66a and 66b includes a cylinder 68, and the tension dancer 70 swings and displaces under the driving action of the cylinder 68. The tension of 22a, 22b can be adjusted. The first and second tension control mechanisms 66a and 66b may be used as necessary, and may be deleted.

  The first and second detection mechanisms 47a and 47b include, for example, laser displacement meters and CCD cameras 72a and 72b that detect the half-cut portions 34 formed on the photosensitive webs 22a and 22b.

  The substrate transport mechanism 45 includes a plurality of sets of substrate heating units (for example, heaters) 74 disposed so as to sandwich the glass substrate 24 and a transport unit 76 that transports the glass substrate 24 in the direction of arrow C. The substrate heating unit 74 constantly monitors the temperature of the glass substrate 24. When an abnormality occurs, the conveyance unit 76 is stopped or alarmed, and the abnormal information is transmitted to cause the abnormal glass substrate 24 to be discharged NG in the subsequent process. It can be used for management or production management. An air levitation plate (not shown) is disposed in the conveyance unit 76, and the glass substrate 24 is levitated and conveyed in the direction of arrow C. The glass substrate 24 can be transported by a roller conveyor.

  The temperature measurement of the glass substrate 24 is preferably performed in the substrate heating unit 74 or immediately before the attachment position. The measuring method may be a contact type (for example, thermocouple) or a non-contact type.

  A substrate stocker 71 that accommodates a plurality of glass substrates 24 is provided upstream of the substrate heating unit 74. Each glass substrate 24 accommodated in the substrate stocker 71 is sucked and taken out by a suction pad 79 provided in the hand portion 75 a of the robot 75 and inserted into the substrate heating portion 74.

  The affixing mechanism 46 includes rubber rollers (compression rollers) 80a and 80b that are arranged vertically and heated to a predetermined temperature. Backup rollers 82a and 82b are in sliding contact with the rubber rollers 80a and 80b. One backup roller 82b is pressed toward the rubber roller 80b by the pressure cylinders 84a and 84b constituting the roller clamp portion 83.

  In the vicinity of the rubber roller 80a, a contact prevention roller 86 for preventing the photosensitive webs 22a and 22b from contacting the rubber roller 80a is movably disposed. In the vicinity of the upstream of the attaching mechanism 46, a preheating unit 87 for preheating the photosensitive webs 22a and 22b to a predetermined temperature is disposed. This preheating part 87 is provided with heating means, such as an infrared bar heater, for example.

  The glass substrate 24 is transported from the pasting mechanism 46 via a transport path 88 extending in the direction of arrow C. In the transport path 88, film transport rollers 90a and 90b and a substrate transport roller 92 are disposed. The distance between the rubber rollers 80 a and 80 b and the substrate transport roller 92 is preferably set to be equal to or less than the length of one glass substrate 24.

  In the vicinity of the downstream side of the substrate transport roller 92, as will be described later, a position where the photosensitive resin layer 28 of the glass substrate 24 (hereinafter also referred to as a bonding substrate 24a) on which the photosensitive webs 22a and 22b are laminated is attached. An affixing position inspection device 94 for measurement is provided.

  As shown in FIGS. 4 and 5, the attachment position inspection device 94 includes detection units arranged in the direction of arrow D along the half-cut portion 34 located at the rear edge of the attachment substrate 24 a on the downstream side. 96a, 96b, and 96c, and detectors 96d, 96e, and 96f arranged in the direction of arrow D along the half-cut portion 34 located at the leading edge of the upstream attachment substrate 24a.

  As shown in FIG. 5, the affixing substrate 24a has photosensitive webs 22a and 22b affixed in parallel to each other in the width direction (arrow D direction) of the glass substrate 24, and one side of the glass substrate 24. The substrate edge portion GEa is exposed to the outside by a distance Sa from the end surface of the photosensitive web 22a. Similarly, the other substrate edge portion GEb of the glass substrate 24 is exposed to the outside by a distance Sb from the end surface of the photosensitive web 22b, and the photosensitive webs 22a and 22b are separated from each other by a distance Sc.

  The detection unit 96a is arranged corresponding to one corner of the rear end edge of the downstream (preceding) pasting substrate 24a, and the detection unit 96b is located on the rear end edge of the photosensitive webs 22a and 22b. The detection part 96c is arrange | positioned corresponding to the other corner | angular part of the said rear-end edge part.

  The detection unit 96d is arranged corresponding to one corner of the front end edge of the upstream (following) pasting substrate 24a, and the detection unit 96e spans the photosensitive webs 22a and 22b at the front end edge. The detection part 96f is arranged corresponding to the other corner part of the tip edge part.

  As shown in FIG. 6, the detection unit 96a includes an LED illumination (illuminating means) 98 that irradiates illumination light L from below (one side) of the attached substrate 24a, and above (on the other side) the attached substrate 24a. And a CCD camera (imaging means) 100 disposed on the glass substrate 24, and one end of the glass substrate 24 that is disposed above the bonding substrate 24a and that is close to the bonding substrate 24a and exposed outward from the photosensitive web 22a. An ND filter (attenuating filter) 102 covering the portion (substrate edge portion GEa), and a reference piece 103 serving as a measurement reference.

  As shown in FIG. 7, the distance h1 from the surface of the LED illumination 98 to the bottom surface of the glass substrate 24, the distance h2 from the surface of the LED illumination 98 to the ND filter 102, and the tip of the CCD camera 100 from the surface of the LED illumination 98 Distance h3 is set, and the overlap amount t of the ND filter 102 with respect to the bonded substrate 24a is set. Specifically, the distance h1 = 210 mm, the distance h2 = 225 mm, the distance h3 = 300 mm, and t = 20 mm are set.

  As shown in FIG. 8, the CCD camera 100 has a predetermined imaging area, and a plurality of image inspection areas 104 are set in the imaging area.

  The detection units 96b to 96f are configured in the same manner as the above-described detection unit 96a, and the same components are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 1, a cooling mechanism 110 and a base automatic peeling mechanism 112 are provided downstream of the attachment position inspection device 94. The automatic base peeling mechanism 112 continuously peels the long base film 26 affixed to each glass substrate 24 spaced apart by a predetermined interval, and includes a pre-peeling portion 114 and a relatively small-diameter peeling roller. 116, a winding shaft 118, and an automatic pasting machine 120 are provided. The pre-peeling unit 114 includes a peeling bar 122 that can move up and down between the glass substrates 24.

  A measuring instrument 124 for measuring the area position of the photosensitive resin layer 28 actually attached to the glass substrate 24 is disposed downstream of the automatic base peeling mechanism 112. The measuring device 124 includes a camera 126 such as a CCD that photographs the glass substrate 24 to which the photosensitive resin layer 28 is attached.

  A photosensitive laminate stocker 132 in which a plurality of photosensitive laminates 128 whose area positions are measured in the photosensitive resin layer 28 by the measuring device 124 is provided downstream of the automatic base peeling mechanism 112. The photosensitive laminate 128 from which the base film 26 and the remaining portion 30b have been peeled off by the automatic base peeling mechanism 112 is sucked and taken out by the suction pad 136 provided on the hand portion 134a of the robot 134, and the photosensitive laminate stocker 132 is removed. Is housed in.

  In the manufacturing system 20 configured as described above, the first and second web feed mechanisms 32a and 32b, the first and second processing mechanisms 36a and 36b, the first and second label adhesion mechanisms 40a and 40b, The first and second reservoir mechanisms 42a and 42b, the first and second peeling mechanisms 44a and 44b, the first and second tension control mechanisms 66a and 66b, and the first and second detection mechanisms 47a and 47b Although arranged above, conversely, the first and second web delivery mechanisms 32a, 32b to the first and second detection mechanisms 47a, 47b are arranged below the attaching mechanism 46. The photosensitive webs 22a and 22b may be turned upside down so that the photosensitive resin layer 28 may be attached to the lower side of the glass substrate 24, and the entire manufacturing system 20 is linear. Configuration may be.

  The entire manufacturing system 20 is controlled by a laminating process control unit 140. For example, a laminating control unit 142, a substrate heating control unit 144, and a half cut control unit 146 are provided for each functional unit of the manufacturing system 20. These are interconnected by an in-process network.

  The substrate heating control unit 144 receives the glass substrate 24 from the upstream process, controls the operation of heating the glass substrate 24 to a desired temperature and supplying the glass substrate 24 to the attaching mechanism 46, and handling of information on the glass substrate 24.

  The laminate control unit 142 controls each functional unit as a master of the entire process, and the position of the half-cut portion 34 of the photosensitive webs 22a and 22b detected by the first and second detection mechanisms 47a and 47b. Based on the information, a control mechanism capable of controlling the relative position between each boundary position and the glass substrate 24 at the pasting position and the relative position between the respective boundary positions is configured.

  The half cut control unit 146 controls the first and second processing mechanisms 36a and 36b to form the half cut portion 34 at a predetermined position of the photosensitive webs 22a and 22b.

  The interior of the manufacturing system 20 is partitioned into a first clean room 152a and a second clean room 152b via a partition wall 150. The first clean room 152a accommodates the first and second web feed mechanisms 32a and 32b to the first and second tension control mechanisms 66a and 66b, and the second clean room 152b includes the first and second detections. The mechanisms 47a and 47b and thereafter are accommodated. The first clean room 152a and the second clean room 152b communicate with each other through the penetrating portion 154.

  The operation of the manufacturing system 20 configured as described above will be described below in relation to the attachment position inspection apparatus 94 according to the first embodiment.

  First, the photosensitive webs 22a and 22b are sent out from the respective photosensitive web rolls 23a and 23b attached to the first and second web delivery mechanisms 32a and 32b. The photosensitive webs 22a and 22b are conveyed to the first and second processing mechanisms 36a and 36b.

  In the first and second processing mechanisms 36a and 36b, the round blade 52 moves in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are moved from the protective film 30 to the photosensitive resin layer 28 to the base film. Cut to 26 to form a half-cut portion 34 (see FIG. 2). Furthermore, the photosensitive webs 22a and 22b are stopped after being conveyed in the direction of arrow A corresponding to the width S (FIG. 2) of the remaining portion 30b of the protective film 30, and the half-cut portion is moved under the running action of the round blade 52. 34 is formed. Thus, the photosensitive webs 22a and 22b are provided with a front peeling portion 30aa and a rear peeling portion 30ab with the remaining portion 30b interposed therebetween.

  Next, the respective photosensitive webs 22 a and 22 b are conveyed to the first and second label adhering mechanisms 40 a and 40 b, and a predetermined application site of the protective film 30 is arranged on the cradle 56. In the first and second label adhering mechanisms 40a and 40b, a predetermined number of adhesive labels 38 are adsorbed and held by the adsorbing pads 54a to 54g, and each adhering label 38 straddles the remaining portion 30b of the protective film 30, and a front peeling portion. 30aa and the rear peeling portion 30ab are integrally bonded (see FIG. 3).

  For example, the photosensitive webs 22a and 22b to which the seven adhesive labels 38 are bonded, as shown in FIG. 1, after the first and second reservoir mechanisms 42a and 42b are prevented from changing the tension on the delivery side, It is continuously conveyed to the first and second peeling mechanisms 44a and 44b. In the first and second peeling mechanisms 44a and 44b, the base film 26 of the photosensitive webs 22a and 22b is adsorbed and held by the suction drum 62, and the protective film 30 leaves the remaining portion 30b and the photosensitive webs 22a and 22b. Is peeled off. The protective film 30 is peeled off via the peeling roller 63 and taken up by the protective film take-up portion 64.

  Under the action of the first and second peeling mechanisms 44a and 44b, the protective film 30 is peeled from the base film 26 leaving the remaining portion 30b. Further, the photosensitive webs 22a and 22b are subjected to tension adjustment by the first and second tension control mechanisms 66a and 66b, and then the laser displacement meters of the first and second detection mechanisms 47a and 47b and the CCD cameras 72a and 72b. Thus, the half-cut portion 34 is detected.

  Therefore, after the laser displacement meter and the CCD cameras 72a and 72b detect the half-cut portion 34 on the rear peeling portion 30ab side, the photosensitive webs 22a and 22b are moved by a distance S corresponding to the width of the remaining portion 30b of the protective film 30. While being transported and stopped, the glass substrate 24 is transported to a pasting position in a preheated state under the action of the substrate transport mechanism 45. The glass substrate 24 is temporarily disposed between the rubber rollers 80a and 80b so as to correspond to the portions where the photosensitive resin layers 28 of the photosensitive webs 22a and 22b arranged in parallel are attached.

  Next, by raising the backup roller 82b and the rubber roller 80b, the glass substrate 24 is sandwiched between the rubber rollers 80a and 80b with a predetermined pressing pressure. Under the rotating action of the rubber roller 80a, the photosensitive webs 22a and 22b and the glass substrate 24 are conveyed in the direction of arrow C, and the respective photosensitive resin layers 28 arranged in parallel are transferred (laminated) to the glass substrate 24.

  The laminating conditions include a speed of 1.0 m / min to 10.0 m / min, a temperature of the rubber rollers 80a and 80b of 80 ° C to 150 ° C, a rubber hardness of the rubber rollers 80a and 80b of 40 ° to 90 °, The pressing pressure (linear pressure) of the rubber rollers 80a and 80b is 50 N / cm to 400 N / cm.

  When the lamination of one photosensitive web 22a, 22b is completed on the glass substrate 24 via the rubber rollers 80a, 80b, the rotation of the rubber roller 80a is stopped, and the pasting substrate 24a is clamped by the substrate transport roller 92. The At that time, the position of the half-cut region 34 from the rear edge of the preceding glass substrate 24 is detected by the detectors 96a to 96c, while the position of the half-cut region 34 from the leading edge of the subsequent glass substrate 24 is detected. , Are detected by the detectors 96d to 96f.

  Hereinafter, the operation of the detection unit 96a will be described. In the detection unit 96a, as shown in FIGS. 6 and 7, the illumination light L from the LED illumination 98 is transmitted to the rear ends of the glass substrate 24 and the photosensitive resin layer 28. Is irradiated. The illumination light L transmitted through the vicinity of one corner on the rear edge side of the pasting substrate 24a is received by the CCD camera 100, and image information is detected. The detected image information is inspected by a plurality of image inspection areas 104 as shown in FIG.

  In this case, in the first embodiment, one end of the glass substrate 24 that is close to the bonding substrate 24a and is exposed to the outside from the photosensitive web 22a on the upper side of the bonding substrate 24a, that is, on the CCD camera 100 side. The ND filter 102 is disposed so as to cover the portion (substrate edge portion GEa).

  For this reason, when the illumination light L from the LED illumination 98 is applied to the substrate edge portion GEa of the glass substrate 24, if halation is caused at the substrate edge portion GEa, the scattered light due to this halation is attenuated by the ND filter 102. Is done. On the other hand, the illumination light L that passes through the glass substrate 24 and the half-cut portion 34 is received by the CCD camera 100. Therefore, in the image taken by the CCD camera 100, as shown in FIG. 8, the edge portion GEa of the glass substrate 24 is photographed in black compared with other portions, and the position of the edge portion GEa is detected accurately and with high accuracy. be able to.

  And since the picked-up image of the edge part GEa of the glass substrate 24 becomes black, it becomes possible to increase the light quantity of LED illumination 98 rather than the conventional illumination part. For this reason, the image of the half-cut region 34 is captured more clearly and clearly.

  Thereby, it is possible to reliably detect the position of the edge portion GEa and the position of the half-cut portion 34 of the glass substrate 24 with a simple configuration, and easily attach the photosensitive resin layer 28 to the glass substrate 24. It becomes possible to detect with high accuracy. Therefore, it is possible to prevent the reduction of the equipment operation rate, improve the work efficiency, and reduce the cost by stabilizing the operation.

  Furthermore, since the illumination light L from the LED illumination 98 is diffused light, an image having a width wider than the actual width of the half-cut portion 34 can be obtained, and the half-cut portion 34 can be easily detected. At that time, by setting the distance h1 large in FIG. 7, the diffused light transmitted through the half-cut portion 34 is sufficiently and surely incident on the CCD camera 100, and the detection accuracy of the half-cut portion 34 is improved. There are advantages.

  Further, by setting the position of the ND filter 102, that is, the distance h2 in FIG. 7, a good captured image can be obtained. Specifically, as shown in FIG. 9, as a result of various changes in the distance h <b> 2 of the ND filter 102, a result that the photographed image is blurred as the ND filter 102 approaches the CCD camera 100 was obtained. Therefore, it is possible to obtain a clear and good captured image by setting an appropriate distance h2.

  Furthermore, in the first embodiment, as shown in FIG. 8, a plurality of image inspection areas 104 are set in the imaging area by the CCD camera 100. For this reason, even when the half-cut region 34 is imaged in the form of a dot or a thin line, the inspection is performed in the search area with a narrow detection width, so that a sufficient contrast difference can be obtained. Therefore, the detection sensitivity of the half-cut part 34 can be improved satisfactorily, and the half-cut part 34 can be reliably detected.

  At this time, when the half-cut region 34 is detected in the plurality of image inspection regions 104, the half-cut region 34 at the detection position closest to the reference piece 103 side (the pasting region side) serving as a measurement reference. The detection result is adopted. The reference piece 103 side (the pasting region side) from the half-cut part 34 is a laminated part, and the black resist is difficult to crack, and it is difficult to take a picture of noise. This is because the side far from the reference piece 103 (between the substrates) is not laminated, the resist is easily cracked, and noise may be erroneously detected.

  In addition, the half-cut part 34 on the rear end side of the preceding pasting substrate 24a and the half-cut part 34 on the front end side of the subsequent pasting substrate 24a are inspected at the same time. For this reason, there exists an advantage that a sticking precision test | inspection process is performed rapidly and efficiently.

  Note that the other detection units 96b to 96f can easily and accurately detect the affixed state of the photosensitive resin layer 28 to the glass substrate 24 in the same manner as the detection unit 96a.

  As described above, after the inspection by the attaching position inspection device 94 is performed, as shown in FIG. 1, the rubber roller 80b is retracted in a direction away from the rubber roller 80a to release the clamp, and the substrate transport roller The rotation of 92 is started. For this reason, the affixing substrate 24a is transported in the direction of arrow C by a distance S corresponding to the width of the remaining portion 30b of the protective film 30, and the half-cut portion 34 behind the protective film 30 is a predetermined position near the lower side of the rubber roller 80a. Move to.

  On the other hand, the next glass substrate 24 is transported toward the attaching position via the substrate transport mechanism 45. By repeating the above operation, the bonded substrate 24a is continuously manufactured.

  The pasted substrate 24 a laminated by the pasting mechanism 46 is cooled through the cooling mechanism 110 and then transferred to the pre-peeling unit 114. In the pre-peeling portion 114, the peeling bar 122 enters and rises between the glass substrates 24, whereby the protective film 30 between the glass substrates 24 is lifted and peeled from the rear end and the front end of the adjacent glass substrates 24. To do.

  Next, in the automatic base peeling mechanism 112, the base film 26 is continuously wound from the pasting substrate 24 a under the rotating action of the winding shaft 118. Further, after separation when trouble stops or separation when defective products are separated, the base film 26 wound on the winding shaft 118 and the tip of the base film 26 of the pasted substrate 24a on which the laminating process is newly started. 26 is automatically pasted via the automatic pasting machine 120.

  The bonded substrate 24 a from which the base film 26 has been peeled is placed at an inspection station corresponding to the measuring instrument 124. In this inspection station, images of the glass substrate 24 and the photosensitive resin layer 28 are captured by the four cameras 126 while the glass substrate 24 is positioned and fixed. Then, by applying image processing, the pasting position is calculated.

  The attachment substrate 24 a on which the attachment position of the photosensitive resin layer 28 has been confirmed is taken out by the robot 134 and accommodated in the photosensitive laminate stocker 132 as the photosensitive laminate 128.

  FIG. 10 is an explanatory plan view of a bonding position inspection apparatus 180 according to the second embodiment of the present invention. Note that the same reference numerals are assigned to the same components as those of the attachment position inspection apparatus 94 according to the first embodiment, and detailed description thereof is omitted. Further, the pasting position inspection device 180 is incorporated in the manufacturing system 20.

  The affixing position inspection device 180 includes detection units 96a, 96b, and 96c. The affixing substrate 24a is intermittently conveyed in the direction of arrow C. Therefore, the half-cut portion 34 located at the rear end edge of the downstream attachment substrate 24a and the half-cut portion 34 located at the leading edge of the upstream attachment substrate 24a are temporarily stopped at the same position. At this time, the detection units 96a, 96b, and 96c are arranged in the direction of arrow D corresponding to the positions where the half-cut portions 34 can be sequentially detected.

  Accordingly, in the second embodiment, first, when the lamination for one sheet is completed, the half-cut portion 34 located at the rear edge of the downstream side attachment substrate 24a corresponds to the attachment position inspection device 180. Is stopped. For this reason, the half-cut site | part 34 is detected by the detection parts 96a, 96b, and 96c.

  Next, when the photosensitive webs 22a and 22b are transported by a distance S corresponding to the width of the remaining portion 30b of the protective film 30 and stopped, the half-cut portion 34 located at the leading edge of the upstream attachment substrate 24a is formed. The operation is stopped in correspondence with the attachment position inspection device 180. Therefore, the half-cut region 34 is detected by the detection units 96a, 96b, and 96c.

  As described above, in the second embodiment, the pasting position inspection device 180 only needs to include the three detection units 96a, 96b, and 96c, and an effect of being more economically configured can be obtained.

  FIG. 11 is a schematic configuration diagram of a manufacturing system 200 according to the third embodiment of the present invention. Note that the same components as those in the manufacturing system 20 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. Moreover, you may incorporate the sticking position inspection apparatus 180 which concerns on 2nd Embodiment. The same applies to the following fourth embodiment.

  The manufacturing system 200 includes an inter-substrate web cutting mechanism 202 that is disposed downstream of the attaching mechanism 46 and can integrally cut the photosensitive webs 22a and 22b between the glass substrates 24.

  In the manufacturing system 200 configured as described above, the pasting substrate 24a laminated by the pasting mechanism 46 is transported in the direction of arrow C, as in the first embodiment. When the space between the bonded substrates 24a reaches a position corresponding to the inter-substrate web cutting mechanism 202, the inter-substrate web cutting mechanism 202 moves in the direction of arrow C at the same conveyance speed as the bonded substrate 24a, The two photosensitive webs 22a and 22b are integrally cut between the pasting substrates 24a.

  After this cutting, the inter-substrate web cutting mechanism 48 is returned to a predetermined standby position, while the base film 26 and the remaining portion 30b are sequentially peeled (single-wafer peeling) on the bonded substrate 24a, so that the photosensitive laminate 128 is formed. Manufactured.

  FIG. 12 is a schematic configuration explanatory diagram of a pasting position inspection apparatus 300 according to the fourth embodiment of the present invention. It should be noted that the same components as those in the pasting position inspection device 94 are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the detection unit 96a that constitutes the attachment position inspection device 300, the ND filter 102 is arranged adjacent to the attachment substrate 24a on the side where the LED illumination 98 is arranged, that is, on the lower side of the attachment substrate 24a. . The ND filter 102 is disposed with a predetermined overlap amount t inward from the substrate edge portion GEa of the bonded substrate 24a.

  Therefore, the illumination light L emitted from the LED illumination 98 is not applied to the substrate edge portion GEa of the glass substrate 24, and it is possible to prevent halation from occurring at the substrate edge portion GEa as much as possible. it can. Thereby, in the image photographed by the CCD camera 100, the substrate edge portion GEa is not photographed thickly due to halation, and the substrate edge portion GEa can be detected with high accuracy and reliability. The same effect as the first embodiment is obtained.

It is a schematic block diagram of the manufacturing system incorporating the bonding position inspection apparatus of the photosensitive laminated body which concerns on the 1st Embodiment of this invention. It is sectional drawing of the elongate photosensitive web used for the said manufacturing system. It is explanatory drawing of the state by which the adhesive label was adhere | attached on the said elongate photosensitive web. It is explanatory drawing of the detection part which comprises a sticking mechanism and the said sticking position test | inspection apparatus. It is plane explanatory drawing which shows the arrangement | positioning state of the said detection part. It is a schematic perspective view of the detection unit. It is explanatory drawing of the said detection part. It is explanatory drawing of the test | inspection image by the CCD camera which comprises the said detection part. It is explanatory drawing of the imaging | photography state by the arrangement | positioning height of the ND filter which comprises the said detection part. It is a plane explanatory view of the pasting position inspection device concerning a 2nd embodiment of the present invention. It is a schematic block diagram of the manufacturing system which concerns on the 3rd Embodiment of this invention. It is a schematic block diagram of the sticking position test | inspection apparatus which concerns on the 4th Embodiment of this invention. It is a schematic block diagram of the manufacturing system of patent document 1. It is a schematic perspective explanatory drawing of the sticking position test | inspection apparatus as a comparative example. It is explanatory drawing of the picked-up image by the said sticking position test | inspection apparatus of FIG.

Explanation of symbols

20, 200 ... Manufacturing system 22a, 22b ... Photosensitive web 24 ... Glass substrate 26 ... Base film 28 ... Photosensitive resin layer 30 ... Protective film 34 ... Half-cut part 45 ... Substrate transport mechanism 46 ... Pasting mechanism 80a, 80b ... Rubber rollers 94, 180, 300 ... Sticking position inspection devices 96a to 96f ... Detection unit 98 ... LED illumination 100 ... CCD camera 102 ... ND filter 112 ... Base automatic peeling mechanism

Claims (6)

A long photosensitive web in which a photosensitive material layer and a protective film are laminated in order on a support is sent out, and at least the processing portion corresponding to the boundary position between the peeled portion and the remaining portion is formed on the protective film to protect the protective film. After the peeling portion of the film is peeled off, the remaining portion of the protective film is disposed and exposed between the substrates by pressure bonding between a pair of heated pressure rollers together with the substrate supplied at a predetermined interval. In a manufacturing system for manufacturing a photosensitive laminate by attaching the photosensitive material layer to the substrate, an attachment position inspection device for measuring the attachment position of the photosensitive material layer,
At least one end in the width direction intersecting the flow direction of the substrate is exposed to the outside from an end of the long photosensitive web attached to the substrate,
The affixing position inspection device includes a detection unit that is disposed on the downstream side of the pressure roller and detects the processing portion of the long photosensitive web that is affixed to the substrate from the one end of the substrate. ,
The detection unit includes illumination means for irradiating illumination light from one side of the substrate;
Imaging means disposed on the other side of the substrate;
A neutral density filter disposed close to the substrate and covering at least one end of the substrate exposed to the outside from the long photosensitive web;
An apparatus for inspecting the attachment position of a photosensitive laminate, comprising:   2. The attachment position inspection apparatus according to claim 1, wherein the neutral density filter is disposed on the other side of the substrate.   3. The attachment position inspection apparatus according to claim 1, wherein the illumination means is LED illumination. In the pasting position inspection device according to any one of claims 1 to 3, the imaging unit includes a CCD camera,
An apparatus for inspecting the attachment position of a photosensitive laminate, wherein a plurality of image inspection areas are set in an imaging area by the CCD camera.   5. The affixing position inspection apparatus according to claim 1, wherein the detection unit includes the processing portion located at a rear edge of the substrate on the downstream side and a tip of the substrate on the upstream side. An apparatus for inspecting affixing position of a photosensitive laminate, wherein the apparatus is disposed in a plurality of rows in two rows along the processed portion located at the edge.   In the pasting position inspection device according to any one of claims 1 to 5, each photosensitive material layer of a plurality of said long photosensitive webs is stuck in parallel on said substrate. A device for inspecting the attachment position of a photosensitive laminate.

Images